CN106918380A - A kind of micro- quality detecting method of high sensitivity and portable quality test device - Google Patents
A kind of micro- quality detecting method of high sensitivity and portable quality test device Download PDFInfo
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- CN106918380A CN106918380A CN201710086715.7A CN201710086715A CN106918380A CN 106918380 A CN106918380 A CN 106918380A CN 201710086715 A CN201710086715 A CN 201710086715A CN 106918380 A CN106918380 A CN 106918380A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
- G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
- G01G3/14—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing measuring variations of electrical resistance
- G01G3/142—Circuits specially adapted therefor
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Abstract
The invention discloses a kind of micro- quality detecting method of high sensitivity and portable quality test device, micro- quality detecting method is：A certain CF is detection frequency in certain limit before and after with micro-mass sensor resonant frequency, and the forward and backward micro-mass sensor equivalent circuit impedance differences of load mass are measured in the case where frequency is detected, difference is converted to micro- quality of loading by calculating.The portable quality test device that declines of adopting said method includes micro-mass sensor, signal generating module and impedance read module, and the micro-mass sensor is piezoelectric cantilever sensor.Measuring method of the present invention improves more than 100 times relative to frequency measurement sensitivity; measuring principle is simple; required equipment price is cheap; portability is strong, thus can be widely used for air-borne dust pollution, environmental pollution, harmful influence reveal and the Tiny Mass such as microorganism such as bacterium or virus accurate measurement.
Description
Technical field
The present invention relates to portable detection sensor technical field, specifically a kind of micro- quality detecting method of high sensitivity
And portable quality test device.
Background technology
Piezoelectric cantilever type micro-mass sensor is a kind of novel sensor for integrating excitation, sensing, and extensively should
For fields such as air-borne dust, the detection of microbial pathogens and identifications.Piezoelectric cantilever sensor is by piezoelectric membrane and elasticity unit
Part two parts are constituted.
At present, the main method by frequency offset detection of measurement of micro- quality realizes that its operation principle is by detecting area
The Tiny Mass change of absorption is converted into the change of resonant frequency, derives that micro- quality becomes according to the difference on the frequency before and after quality of adsorption
Change, i.e. Δ m=- Δs f Me/fn, wherein fn are the structural resonance frequency of correspondence n-th order mode, Me is cantilever beam equivalent mass,
Δ m is detected amount of substance, and Δ f is resonant frequency variable quantity.A large amount of prior arts based on frequency-difference method, for example, the U.S. is special
The A2 of sharp US 6389877 B1, WO 2005/043126 country patent CN1250156A, CN2011101177772,
CN201110216323.0, ZL2013100145951, ZL2013103177028 etc. are by measuring different cantilever designs
Difference on the frequency recognizes Tiny Mass.In addition, document " Higher modes of vibration increase mass
Sensitivity in nanomechanical microcantilevers " and " An alternative solution to
improve sensitivity of resonant microcantilever chemical sensors:comparison
Between using high-order modes and reducing dimensions " can according to frequency-difference method measuring principle
Know, it is necessary to just can determine that the difference on the frequency that micro- mass change causes by a range of sweep measurement.By measuring high frequent vibration
The difference on the frequency of mode recognizes Tiny Mass.The micro- quality of frequency offset detection.It should be noted that frequency-difference method is in practical application
In exist clearly disadvantageous, i.e. its micro- quality sweep measurement process for being based on frequency difference depends critically upon electric impedance analyzer, and impedance
Analyzer it is expensive, and certainty of measurement influenceed by instrument and environmental damping by quality factor and resolution ratio, frequency sweep survey
Amount process is complicated.
In order to simplify measurement process and the micro- quality detection sensitivity of lifting, need badly and a kind of more effectively and be easier what is realized
Micro- mass measuring method, it is micro- to meet air-borne dust pollution, environmental pollution, harmful influence leakage and microorganism such as bacterium or virus etc.
The accurate measurement demand of small quality.
The content of the invention
Decline the deficiency of quality determining method presence for traditional frequency difference, accurate the invention aims to provide a kind of detection
Really, using a kind of convenient micro- quality detecting method of high sensitivity.
To achieve these goals, technical solution of the present invention is as follows：
A kind of micro- quality detecting method of high sensitivity, it is characterised in that：With certain before and after micro-mass sensor resonant frequency
In the range of a CF be detection frequency, by the forward and backward micro-mass sensor impedance variations of load mass, by being calculated plus
The micro- quality size for carrying, its step includes：
S1, with a CF in certain limit before and after micro-mass sensor vibration frequency be detection frequency, measurement loading matter
The forward and backward detection circuit output voltage of amount；
S2, the change of calculating output voltage obtain the forward and backward micro-mass sensor impedance of load mass and become by calculation process
Change；
S3, according to the linear relationship under the detection frequency between micro-mass sensor impedance variations and load mass, pass through
It is calculated load mass size.
It is another object of the present invention to provide a kind of portable quality test dress that declines based on above-mentioned quality detecting method
Put, micro- quality test device includes micro-mass sensor, signal generating module, detection circuit and impedance read module；
The micro-mass sensor is piezoelectric cantilever sensor, and it includes fixed block, is connected to the cantilever beam of fixed block
Be pasted on piezoelectric patches on cantilever beam and wide with cantilever beam, the piezoelectricity leaf length is less than cantilever beam length, the cantilever
Beam is bonded cantilever beam and piezoelectric patches composite log with piezoelectric patches, and cantilever beam is not with piezoelectric patches bound fraction for cantilever beam extends
Section；
The signal generating module includes signal generating circuit and power amplifier, the power amplifier output end and institute
State micro-mass sensor piezoelectric patches lead-out wire connection, the piezoelectric patches connected with resistance R after with additional capacitor CpIt is in parallel；
The impedance read module parallel connection and additional capacitor CpTwo ends.
Further, each rank resonant frequency of the micro-mass sensor is
Wherein,It is the cantilever beam and piezoelectric patches composite log amplitude function；It is the cantilever beam extension
Amplitude function；l1It is that cantilever beam and piezoelectric patches are combined segment length；l2For cantilever beam extends segment length；m1=(ρptp+ρnptnp)w；m2=
ρnptnpw；EpIt is the elastic modelling quantity of the piezoelectric patches；tpIt is the thickness of the piezoelectric patches；ρpIt is the density of the piezoelectric patches；EnpFor
The elastic modelling quantity of the cantilever beam；tnpIt is the thickness of the cantilever beam；ρnpIt is the density of the cantilever beam；W is the piezoelectric patches
With the width of the cantilever beam.
Further, by adjusting additional capacitor CpRealize the regulation of device range and measurement device sensitivity.
Further, it is described by adjusting additional capacitor CpRealize that the measurement device sensitivity for adjusting is：
Wherein, RmIt is piezoelectric cantilever sensor dynamic electric resistor, CmIt is piezoelectric cantilever sensor dynamic capacity, LmIt is pressure
Electric cantilever beam sensor dynamic inductance, ωnIt is input voltage frequency, CpIt is additional capacitor, Δ m is load mass.
Compared with prior art, beneficial effects of the present invention：
1st, the present invention demonstrates the feasibility of impedance measurement method from point of theory, and sensitivity is compared to same structure
Frequency measurement improves more than 100 times.
2nd, the present invention devises new measuring circuit from portability angle, and complicated frequency measurement is changed into simplicity
Resistance measurement, measuring apparatus volume is small, and portability is strong, cheap.
3rd, the present invention is not changing sensor construction by the method to piezoelectric cantilever sensor connection in series-parallel additional circuit
And sensor measurement range and measurement sensitivity are adjusted in the case of size.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
The accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, drawings in the following description are this hairs
Some bright embodiments, for those of ordinary skill in the art, without having to pay creative labor, can be with
Other accompanying drawings are obtained according to these accompanying drawings.
Fig. 1 is quality detecting method flow chart of the present invention.
Fig. 2 is piezoelectric cantilever sensor structure chart of the present invention；
Fig. 3 is the portable apparatus for measuring quality detection circuit diagram that declines of the invention；
Fig. 4 is the portable apparatus for measuring quality schematic diagram that declines of the present invention；
Fig. 5 is the impedance variations curve of embodiment 1；
Fig. 6 is the portable apparatus for measuring quality curve that declines of the impedance variations of embodiment 2；
Fig. 7 is the impedance variations curve of embodiment 3；
Drawing reference numeral explanation：
1st, fixed block, 2, piezoelectric patches, 3, cantilever beam.
Specific embodiment
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is
A part of embodiment of the present invention, rather than whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art
The every other embodiment obtained under the premise of creative work is not made, belongs to the scope of protection of the invention.
As sensor input voltage UiFrequency fiIt is each rank resonant frequency fnNeighbouring a range of a certain CF
When, impedance changes with frequency approximately linear, is the size that can obtain load mass by impedance variations before and after load mass.
Based on above-mentioned principle, the invention provides a kind of micro- quality detecting method of high sensitivity, it is characterised in that with micro- matter
A certain CF is detection frequency in certain limit before and after quantity sensor resonant frequency, is passed by the forward and backward micro- quality of load mass
Sensor equivalent circuit impedance variations, by being calculated micro- quality size of loading, its testing process is as shown in figure 1, step bag
Include：
S1, with a certain CF in certain limit before and after micro-mass sensor resonant frequency be detection frequency, measurement plus
The forward and backward detection circuit output voltage of mounted mass.The specific detection frequency is typically debugged before equipment is dispatched from the factory, when using
It is not required to carry out additional frequency modulation work.The sensor resonant frequency used in the present embodiment is：
Wherein,It is the cantilever beam and piezoelectric patches composite log amplitude function；It is the cantilever beam extension
Amplitude function；l1It is that cantilever beam and piezoelectric patches are combined segment length；l2For cantilever beam extends segment length；m1=(ρptp+ρnptnp)w；m2=
ρnptnpw；EpIt is the elastic modelling quantity of the piezoelectric patches；tpIt is the thickness of the piezoelectric patches；ρpIt is the density of the piezoelectric patches；EnpFor
The elastic modelling quantity of the cantilever beam；tnpIt is the thickness of the cantilever beam；ρnpIt is the density of the cantilever beam；W is the piezoelectric patches
With the width of the cantilever beam.
S2, the change of calculating output voltage obtain poor by the forward and backward micro- matter sensor impedance of load mass by calculation process.
S3, according to the linear relationship under the detection frequency between impedance and load mass, by being calculated load mass
Size.
The present embodiment provides a kind of portable quality test device that declines based on above-mentioned quality detecting method, micro- quality
Test device includes micro-mass sensor, signal generating module, detection circuit and impedance read module；
The micro-mass sensor be piezoelectric cantilever sensor, the piezoelectric cantilever sensor structure as shown in Fig. 2
It includes being connected to the cantilever beam 3 of fixed block 1, and is pasted on the piezoelectric patches 2 on cantilever beam 3, and the cantilever beam is from high-elastic
Property material, piezoelectric patches is made film-form and adhere well on cantilever beam.Wherein, piezoelectric patches 2 and cantilever beam 3 be wide and piezoelectric patches 2
Length of the length less than cantilever beam 3, the cantilever beam and piezoelectric patches are bonded cantilever beam and piezoelectric patches composite log, cantilever beam
It is not cantilever beam extension with piezoelectric patches bound fraction；
The signal generating module includes signal generating circuit and the power amplifier being connected with signal generating circuit, described
Power amplifier output end is connected with the piezoelectric patches lead-out wire of the micro-mass sensor, and the piezoelectric patches is gone here and there with resistance R
With additional capacitor C after connectionpIt is in parallel；
The impedance read module parallel connection and additional capacitor CpTwo ends, b, d two ends loading Ui=uiejωtSinusoidal input electricity
Pressure, a, c two ends output voltages Uo。
The present embodiment is illustrated in figure 3 detection circuit diagram using the total impedance Z of Wheatstone bridge measurement sensor,
U is loaded at bd two endsi=uiejωtInput sinusoidal voltage, ac two ends output voltages Uo.During bridge balance, electric bridge opposing arms resistance
Product it is equal, i.e. ZR3=R2R4.The change of total impedance can be caused as sensor quality of adsorption Δ m, sensed after quality of adsorption
The total impedance of device is Z', then sensor quality of adsorption Δ m causes the change Delta Z of total impedance, by detecting output voltage UoChange
Change obtains impedance change, AZ=Δ UoZ/Ui.According to piezoelectric cantilever sensor impedance variations curve, input voltage UiFrequency
fiIt is each rank resonant frequency fnDuring neighbouring a range of a certain CF, impedance changes with frequency approximately linear, by adding
Impedance change, AZ is the size that can obtain load mass Δ m before and after mounted mass.
Piezoelectric cantilever sensor impedance Z=the Re+jXe,
Wherein：ReIt is resistive component, XeIt is reactive component.
It is illustrated in figure 4 the portable apparatus for measuring quality overall structure diagram that declines.
Further, by adjusting additional capacitor CpRealize the regulation of device range and measurement device sensitivity.Work as loading
When maximum impedance frequency is less than original sensor minimum impedance frequency after quality, mass measurement of institute's mass metering beyond the sensor
Scope.In the case where sensor construction size is not changed, as shown in figure 4, by adjusting additional capacitor CpWith the method for resistance R
Increase its mass measurement scope.Wherein, additional capacitor CpIt is tunable capacitor.
By adjusting additional capacitor CpMethod changes device sensitivity, and the measurement sensitivity is
Wherein, RmIt is piezoelectric cantilever sensor dynamic electric resistor, CmIt is piezoelectric cantilever sensor dynamic capacity, LmIt is pressure
Electric cantilever beam sensor dynamic inductance, ωnIt is input voltage frequency, CpIt is additional capacitor, Δ m is load mass.
Specific embodiment：
Embodiment one
Impedance before and after piezoelectric cantilever sensor load mass, phase angle is illustrated in figure 5 near second-order modal to become with frequency
Change curve.With former resonant frequency, nearby a certain CF is detection frequency, and impedance becomes at the frequency before and after measurement load mass
Change and then obtain to load the size of micro- quality.This example is detection frequency with piezoelectric cantilever sensor original resonant frequency, is obtained
Impedance differences are 520 Ω before and after loading 500 μ g mass, and sensitivity is 1.04 × 106Ω/g, be frequency measurement sensitivity 6.43 ×
10416.2 times of HZ/g.
Embodiment two
This example makes new additional capacitor C using the size of adjustment additional capacitorp1=0.5CpAfterwards, impedance frequency change is obtained
Curve is as shown in Figure 6.Resonant frequency is detection frequency before load mass, and near resonant frequency, impedance is with frequency proximal line
Property change and be gradually reduced, can obtain loading micro- quality size by impedance variations before and after load mass at CF.Should
Impedance contrast is 457 Ω before and after obtaining 500 μ g mass of loading with the measurement device, and sensitivity is 0.914 × 106Ω/g, is frequency difference
14.2 times of method measurement sensitivity.
Embodiment three
This example makes new additional capacitor C using the size of adjustment additional capacitorp2=2CpAfterwards, impedance frequency curve is obtained such as
Shown in Fig. 7.Measurement range increase after piezoelectric cantilever sensor shunt capacitance, in corner frequency fturnBoth sides, impedance is with frequency
Equal approximately linear change, by taking measurement frequency f=5900HZ as an example, before and after 500 μ g microgram quantities of loading impedance contrast be 1.233 ×
105Ω, sensitivity is 2.5 × 108Ω/g, is 3888 times of frequency measurement sensitivity.
The instance analysis of the above three is obtained, by adjusting additional capacitor CpImpedance can be made in each rank resonant frequency both sides with frequency
Rate linear change, substantially increases the mass measurement scope and measurement sensitivity of sensor.
The present invention describes the feasibility of impedance measurement and provides specific measuring circuit from point of theory, passes through
Sensor measurement model is adjusted in the case where sensor construction size is not changed to the method for sensor series and parallel additional circuit
Enclose and measurement sensitivity.
Finally it should be noted that：Various embodiments above is merely illustrative of the technical solution of the present invention, rather than its limitations；To the greatest extent
Pipe has been described in detail with reference to foregoing embodiments to the present invention, it will be understood by those within the art that：Its according to
The technical scheme described in foregoing embodiments can so be modified, or which part or all technical characteristic are entered
Row equivalent；And these modifications or replacement, the essence of appropriate technical solution is departed from various embodiments of the present invention technology
The scope of scheme.
Claims (5)
1. the micro- quality detecting method of a kind of high sensitivity, it is characterised in that：With certain model before and after micro-mass sensor resonant frequency
It is detection frequency to enclose an interior CF, by the forward and backward micro-mass sensor impedance variations of load mass, by being calculated loading
Micro- quality size, its step includes：
S1, with a CF in certain limit before and after micro-mass sensor vibration frequency be detection frequency, measurement load mass before,
Detection circuit output voltage afterwards；
S2, the change of calculating output voltage obtain the forward and backward micro-mass sensor impedance variations of load mass by calculation process；
S3, according to the linear relationship under the detection frequency between micro-mass sensor impedance variations and load mass, by calculating
Obtain load mass size.
2. a kind of portable quality test device that declines based on micro- quality detecting method described in claim 1, it is characterised in that：Its
Including micro-mass sensor, signal generating module, detection circuit and impedance read module；
The micro-mass sensor is piezoelectric cantilever sensor, and it includes fixed block, the cantilever beam that is connected to fixed block and viscous
Be affixed on piezoelectric patches on cantilever beam and wide with cantilever beam, the piezoelectricity leaf length is less than cantilever beam length, the cantilever beam with
Piezoelectric patches is bonded cantilever beam and piezoelectric patches composite log, and cantilever beam is not cantilever beam extension with piezoelectric patches bound fraction；
The signal generating module includes signal generating circuit and power amplifier, and the power amplifier output end is micro- with described
Mass sensor piezoelectric patches lead-out wire connection, the piezoelectric patches connected with resistance R after with additional capacitor CpIt is in parallel；
The impedance read module parallel connection and additional capacitor CpTwo ends.
3. micro- quality test device according to claim 2, it is characterised in that：Each rank resonance of micro-mass sensor is frequently
Rate is
Wherein,It is the cantilever beam and piezoelectric patches composite log amplitude function；It is cantilever beam extension amplitude
Function；l1It is that cantilever beam and piezoelectric patches are combined segment length；l2For cantilever beam extends segment length；m1=(ρptp+ρnptnp)w；m2=
ρnptnpw；EpIt is the elastic modelling quantity of the piezoelectric patches；tpIt is the thickness of the piezoelectric patches；ρpIt is the density of the piezoelectric patches；EnpFor
The elastic modelling quantity of the cantilever beam；tnpIt is the thickness of the cantilever beam；ρnpIt is the density of the cantilever beam；W is the piezoelectric patches
With the width of the cantilever beam.
4. quality test device according to claim 2, it is characterised in that：By adjusting additional capacitor CpRealize device amount
Journey and the regulation of measurement device sensitivity.
5. micro- quality test device according to claim 4, it is characterised in that：It is described by adjusting additional capacitor CpRealize
The measurement device sensitivity of regulation is：
Wherein, RmIt is piezoelectric cantilever sensor dynamic electric resistor, CmIt is piezoelectric cantilever sensor dynamic capacity, LmFor piezoelectricity is outstanding
Arm beam sensor dynamic inductance, ωnIt is input voltage frequency, CpAdditional capacitor, Δ m load mass.
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| CN111272193A (en) * | 2020-02-17 | 2020-06-12 | 东南大学 | MEMS gyroscope online frequency difference identification method based on noise power spectrum estimation |
| CN111486931A (en) * | 2020-04-15 | 2020-08-04 | 大连理工大学 | Measuring circuit and device of constant-frequency piezoelectric micro-mass sensor |
| CN112325998A (en) * | 2020-11-05 | 2021-02-05 | 吉林大学 | Trace substance sensor and method based on internal resonance |
| CN108362605B (en) * | 2018-04-28 | 2024-02-02 | 华中科技大学 | Automatic change integrated form air humidity measuring device |
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