CN111482598B - Laser welding layer prefabricated part and preparation method of laser welding layer prefabricated part and aluminum silicon carbide box body - Google Patents

Laser welding layer prefabricated part and preparation method of laser welding layer prefabricated part and aluminum silicon carbide box body Download PDF

Info

Publication number
CN111482598B
CN111482598B CN202010173917.7A CN202010173917A CN111482598B CN 111482598 B CN111482598 B CN 111482598B CN 202010173917 A CN202010173917 A CN 202010173917A CN 111482598 B CN111482598 B CN 111482598B
Authority
CN
China
Prior art keywords
silicon carbide
laser welding
welding layer
aluminum
prefabricated part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202010173917.7A
Other languages
Chinese (zh)
Other versions
CN111482598A (en
Inventor
高明起
熊德赣
肖静
陈柯
杨盛良
束平
何东
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CETC 29 Research Institute
Original Assignee
CETC 29 Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CETC 29 Research Institute filed Critical CETC 29 Research Institute
Priority to CN202010173917.7A priority Critical patent/CN111482598B/en
Publication of CN111482598A publication Critical patent/CN111482598A/en
Application granted granted Critical
Publication of CN111482598B publication Critical patent/CN111482598B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/02Compacting only
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22DCASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D23/00Casting processes not provided for in groups B22D1/00 - B22D21/00
    • B22D23/04Casting by dipping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/02Containers; Seals
    • H01L23/10Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention discloses a laser welding layer prefabricated part and a preparation method of an aluminum silicon carbide box body, wherein the preparation method comprises the following steps of 1: preparing a laser welding layer prefabricated part; and 2, step: laminating and matching the laser welding layer prefabricated part and the silicon carbide prefabricated part; and step 3: preparing an aluminum silicon carbide blank with a laser welding layer by vacuum air pressure infiltration; and 4, step 4: carrying out mechanical processing; the laser welding layer prefabricated part is formed by pressing particle-reinforced aluminum alloy powder, and is specifically to be general the aluminum alloy powder is arranged in a graphite mould, the graphite mould comprises a female die and a male die, the aluminum alloy powder is spread at the bottom of the female die, and a hydraulic machine applies 0.5-2MPa pressure and pressure maintaining to the aluminum alloy powder in the female die through the male die to form the laser welding layer prefabricated part, wherein the particle size of the particle-reinforced aluminum alloy powder is 10-200 mu m, the laser welding layer is designed at the upper end of the aluminum silicon carbide box body, so that the problem of laser welding of the aluminum silicon carbide box body and the cover plate is effectively solved, and the air tightness of the box body after sealing is ensured.

Description

Laser welding layer prefabricated part and preparation method of laser welding layer prefabricated part and aluminum silicon carbide box body
Technical Field
The invention relates to the field of laser welding electronic packaging, in particular to a laser welding layer prefabricated part and a preparation method of an aluminum silicon carbide box body.
Background
With the rapid development of information technology, the integration level of IC chips is continuously increased, so that the power density thereof is increased. Therefore, more effective thermal management materials are needed. However, conventional electronic packaging materials such as Kovar alloy, Inva alloy and W/Cu alloy have not fully satisfied the requirements of modern electronic packaging due to their high price, high density and low thermal conductivity. As a high volume fraction (60-75%) silicon carbide reinforced aluminum matrix composite (hereinafter referred to as aluminum silicon carbide), the composite has high thermal conductivity and elastic modulus, low density and properly adjustable expansion coefficient, and is widely applied to electronic devices such as microwave integrated circuits, power modules, microprocessor cover plates, radiating plates and the like.
As a packaging box body filled with bare chips, on one hand, the box body is required to have high compactness; on the other hand, the weld between the box body and the cover plate is required to have high air tightness. Laser welding has the characteristics of high energy, small heat affected zone, flexible use, low cost and the like, and is widely used for sealing covers of electronic packaging boxes. However, laser hermetic sealing of aluminum silicon carbide housings is very challenging due to the large difference in physicochemical properties of the silicon carbide reinforcement phase and the aluminum matrix. In order to solve the problem that the high volume fraction (the silicon carbide volume fraction is more than 50%) aluminum silicon carbide box body for electronic packaging cannot be directly sealed and welded by laser air tightness, researchers at home and abroad carry out research, namely, a metal welding layer with a certain thickness is integrated on the upper part of the aluminum silicon carbide box body to be used as a transition layer, and then the metal welding layer is sealed and welded with a cover plate, as shown in figure 1.
The American CPS company and the PCC _ AFT company adopt a synchronous integration process to compound Kovar or titanium alloy on the upper end of an aluminum silicon carbide box body to be used as a laser welding layer, but brittle intermetallic and compound such as Fe3Al, TiAl and the like can be formed at the interface of the Kovar and the titanium alloy, and microcracks are easily formed.
The patent with publication number CN103367270A uses vacuum pressure infiltration and synchronous integration technology to prepare the as-cast aluminum alloy laser welding layer at the upper end of the aluminum silicon carbide box, and the interface between the welding layer and the aluminum silicon carbide shell is in atomic-scale metallurgical bonding, and has high bonding strength and no defects such as cracks. However, as a cast aluminum alloy laser welding layer has large grains and has casting defects of looseness, shrinkage cavity and the like, the welding line is easy to be pulled and cracked in the laser capping process, and the air tightness is affected.
Patent publication No. CN101973144A discloses a laser-weldable layered aluminum-silicon-aluminum-silicon carbide composite material and a preparation method thereof. The patent firstly prepares a laminated silicon-silicon carbide prefabricated member, then adopts a vacuum liquid phase pressure infiltration method to infiltrate aluminum into the laminated prefabricated member to obtain a laminated aluminum-silicon-aluminum-silicon carbide composite material, and a welding layer is aluminum-silicon. There are mainly the following problems: (1) the oxide layer on the surface of the silicon powder is thicker, so that the laser welding performance of the infiltration aluminum silicon is poorer; (2) the components of the aluminum silicon layer are not uniform, so that the box body is greatly deformed in the brazing process; (3) when the port of the box body passes through the aluminum silicon layer, the interface joint is easy to crack.
Machuxue et al apply the synchronous integration technology in Interfacial and bonding strip of SiC/A356/FeNi50 composite bonded by gas compression infiltration to embed the FeNi50 welding layer into the formed SiC prefabricated member, and prepare the SiC/A356/FeNi50 composite material by using the air pressure infiltration technology, but cracks and holes are easily formed at the interface.
The patent with publication number CN101733498A uses Zn-Cd-Ag-Cu solder to braze Kovar alloy on the upper end of an aluminum silicon carbide shell to be used as a laser welding layer, and the joint shear strength reaches 225 MPa. However, the base material needs to be plated with a Ni-P layer before welding, and needs to be connected in a protective atmosphere, so that the process is complex and the cost is high; meanwhile, the brazing flux is corrosive, and Cd has high toxicity.
The patent with publication number CN101502904A firstly carries out chemical plating of Ni (P) alloy on the aluminum silicon carbide composite material and Kovar alloy, then uses Al-Ag-Cu eutectic solder to braze the two under the protection of nitrogen, the shearing strength of the joint is 65MPa, the sealing and welding thickness of the metal shell and the cover plate is 1.0 multiplied by 10 < -5 > (Pa cm 3)/s. However, the aluminum silicon carbide has bare silicon carbide particles, which easily causes the gold coating to fall off.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: to the not enough that prior art exists, design out a laser welding layer in the upper end of aluminium carborundum box body, effectively solve the laser welding difficult problem of aluminium carborundum box body and apron, guarantee the gas tightness of seal welding back box body.
The prefabricated part of the laser welding layer is formed by pressing particle-reinforced aluminum alloy powder, the particle size of the particle-reinforced aluminum alloy powder is 10-200 mu m, and the thickness, the structure, the components (the proportion of reinforcing phase particles to an aluminum alloy matrix) and the like of the laser welding layer can be adjusted according to actual use requirements so as to meet different use requirements.
Preferably, the aluminum alloy powder has a grain size of 50-80 μm and a reinforcing phase of 6063 or is 100-150 μm and a reinforcing phase of 3003.
Wherein the pressing specifically comprises pressing with a hydraulic press at a pressure of 0.5-2 MPa.
The invention also provides a preparation method of the laser welding layer prefabricated member, which comprises the steps of weighing the particle-reinforced aluminum alloy powder, placing the aluminum alloy powder in a graphite mold, wherein the graphite mold comprises a female mold and a male mold, spreading the aluminum alloy powder at the bottom of the female mold, and applying pressure of 0.5-2MPa to the aluminum alloy powder in the female mold through the male mold by a hydraulic machine and maintaining the pressure to form the laser welding layer prefabricated member.
The invention also provides a preparation method of the aluminum silicon carbide box body with the laser welding layer, which comprises the following steps,
step 1: preparing a laser welding layer prefabricated part;
and 2, step: the laser welding layer prefabricated part and the silicon carbide prefabricated part are matched in a laminating mode to form a double-layer prefabricated part;
and 3, step 3: preparing an aluminum silicon carbide blank with a laser welding layer by vacuum air pressure infiltration;
and 4, step 4: and machining the aluminum silicon carbide blank.
Further, the step 1 specifically comprises the step of placing the aluminum alloy powder in a graphite mold, wherein the graphite mold comprises a female mold and a male mold, the aluminum alloy powder is laid at the bottom of the female mold, and a hydraulic machine applies pressure of 0.5-2MPa to the aluminum alloy powder in the female mold through the male mold and maintains the pressure to form the laser welding layer prefabricated member.
Further, the step 2 specifically includes placing the laser welding layer preform on the upper end of the porous silicon carbide preform and laminating.
Further, the step 3 specifically comprises
Step 3.1: placing the stainless steel mold with the double-layer prefabricated part in an upper chamber of a vacuum pressure infiltration furnace for preheating, and simultaneously placing an aluminum matrix in a crucible of a lower chamber for melting;
step 3.2: when the upper chamber and the lower chamber reach the set temperature and time, vacuumizing until the vacuum degree is lower than 500Pa, and then lifting the crucible by using a lifting rod;
step 3.3: filling high-purity nitrogen to ensure that the pressure in the furnace is more than 5 MPa;
step 3.4: and removing the stainless steel die after the stainless steel die is cooled and solidified along with the furnace.
Wherein the aluminum matrix is an aluminum alloy of Zl101A or Zl 102.
Further, the step 4 specifically includes
Step 4.1: removing the aluminum alloy on the periphery of the aluminum silicon carbide blank by using a grinding machine and a milling machine;
and 4.2: performing stress relief annealing on the aluminum silicon carbide blank;
step 4.3: and (3) processing the aluminum silicon carbide blank to the required size by adopting a numerical control milling machine.
By adopting the technical scheme, the invention has the beneficial effects that: the laser welding layer prefabricated part and the laser welding layer which are formed by pressing the particle reinforced aluminum alloy powder have fine crystal grains, have no casting defects such as looseness and shrinkage cavities and have good mechanical properties. Therefore, the aluminum silicon carbide box body using the laser welding layer can ensure the air tightness of the welding line in the laser sealing process and lead the expansion coefficient to be adjustable, and can be widely applied to the box bodies of microwave integrated circuits, hybrid integrated circuits and the like which need air tightness packaging.
Drawings
The invention will now be described, by way of example, with reference to the accompanying drawings, in which:
FIG. 1 is a schematic view of an aluminum silicon carbide cassette;
FIG. 2 is a flow chart of a method of making an aluminum silicon carbide cartridge with a laser welded layer according to the present invention;
FIG. 3 is a schematic view of a method of making a laser-welded layer preform according to the present invention;
FIG. 4 is a schematic illustration of the lamination fit of a laser welded layer preform with a porous aluminum silicon carbide preform;
FIG. 5 is a schematic view of the assembly of the preform with graphite in a stainless steel mold;
FIG. 6 is a schematic view of vacuum pressure infiltration;
FIG. 7 is a schematic view of an aluminum silicon carbide cassette with a laser welded layer according to the present invention;
the reference numbers are as follows:
1-cover plate, 2-metal welding layer, 3-aluminum silicon carbide layer, 4-male die, 5-graphite die, 6-aluminum alloy powder, 7-laser welding layer prefabricated part, 8-porous silicon carbide prefabricated part, 9-graphite partition plate 1, 10-graphite partition plate 2, 11-stainless steel die, 12-runner gap, 13-vacuum container, 14-crucible, 15-lifting mechanism, 16-gas outlet valve, 17-heating element, 18-aluminum silicon carbide blank, 19-liquid guiding pipe, 20-aluminum liquid and 21-gas inlet valve.
Detailed Description
Any feature disclosed in this specification may be replaced by alternative features serving equivalent or similar purposes, unless expressly stated otherwise. That is, unless expressly stated otherwise, each feature is only an example of a generic series of equivalent or similar features.
The technical scheme adopted by the invention is that a circle of aluminum alloy laser welding layer reinforced by particles is designed on the periphery of an aluminum silicon carbide box body, the reinforced particles are aluminum alloy powder, and the particle size is 10-200 mu m. The thickness, structure, components (the proportion of the reinforcing phase particles to the aluminum alloy matrix) and the like of the laser welding layer can be adjusted according to actual use requirements so as to meet different use requirements. Therefore, the box body with the laser welding layer has adjustable expansion coefficient, and can be hermetically sealed and welded with the cover plate by laser after machining, plating and other treatments.
The following is further described with reference to the flow chart of FIG. 2.
1) And preparing a laser welding layer prefabricated part. And placing the aluminum alloy powder into a graphite die, and applying a pressure of 0.5-2MPa through a hydraulic press to form a laser welding layer prefabricated part.
2) The laser welding layer preform is laminated with the silicon carbide preform. And placing the laser welding layer prefabricated member at the upper end of the porous silicon carbide prefabricated member and laminating to form the double-layer prefabricated member.
3) And (3) preparing the aluminum silicon carbide blank with the laser welding layer by vacuum air pressure infiltration. Placing the stainless steel mould with the double-layer prefabricated part in an upper chamber of a vacuum pressure infiltration furnace for preheating, simultaneously placing an aluminum matrix in a crucible of a lower chamber for melting, vacuumizing until the vacuum degree is lower than 500Pa after the upper chamber and the lower chamber reach set temperature and time, lifting the crucible by using a lifting rod, and then filling high-purity nitrogen to ensure that the pressure in the furnace is more than 5MPa, and finishing the metallurgical bonding of the laser welding layer and the aluminum silicon carbide material when the aluminum matrix infiltrates the pores of the porous silicon carbide prefabricated part and the prefabricated part of the laser welding layer. And (5) cooling and solidifying along with the furnace, and removing the stainless steel die to obtain the aluminum silicon carbide blank with the laser welding layer.
4) And (6) machining. Firstly, removing aluminum alloy on the periphery of an aluminum silicon carbide blank by using a grinding machine and a milling machine, then carrying out stress relief annealing on the blank, and finally processing the blank to the required product size by using a numerical control milling machine.
The aluminum silicon carbide box body with the laser welding layer has the advantages that the laser welding layer is fine in crystal grains, does not have casting defects such as looseness and shrinkage cavities, has good mechanical properties, can ensure the air tightness of welding seams in the laser sealing process, and can be widely applied to box bodies needing air tightness packaging, such as microwave integrated circuits and hybrid integrated circuits.
The invention will now be further described with reference to the following examples, and the accompanying drawings:
example 1
The structure of the aluminum silicon carbide box body with the laser welding layer is shown in figure 1, wherein the laser welding layer 1 is positioned at the upper end of the aluminum silicon carbide layer 2; 2 are macroscopically layered, and are microscopically not layered, and 2 have good metallurgical bonding. The thickness of the laser welding layer 1 is 2mm, the laser welding layer is composed of 6063 aluminum alloy powder serving as a reinforcing phase and ZL102 aluminum alloy serving as a base body, the volume fraction of the 6063 aluminum alloy powder is 60%, and the volume fraction of the ZL102 aluminum alloy base body is 40%. The aluminum silicon carbide layer 2 is composed of silicon carbide particles and a ZL102 aluminum alloy matrix, wherein the volume fraction of silicon carbide is 63%, and the volume fraction of ZL102 aluminum alloy is 37%.
A preparation method of an aluminum silicon carbide box body with a laser welding layer for electronic packaging comprises the following specific steps:
1) and preparing a laser welding layer prefabricated part. Weighing 6063 aluminum alloy particle powder 6 with the particle size of 50-80 microns, paving the 6063 aluminum alloy particle powder at the bottom of a graphite mold concave mold 5, applying 1MPa pressure to the 6063 aluminum alloy powder 6 in the graphite mold concave mold 5 through a convex mold 4, keeping the pressure for 30s, and relieving the pressure to obtain a 6063 aluminum alloy laser welding layer prefabricated part 7 with the particle volume fraction of 60%.
2) The laser welding layer prefabricated member is matched with the silicon carbide prefabricated member in a laminating way. Placing a porous silicon carbide prefabricated part 8 above the 6063 aluminum alloy laser welding layer prefabricated part 7 prepared in the step 1), wherein the volume fraction of silicon carbide in the porous silicon carbide prefabricated part 8 is 63% as shown in fig. 4, and pressing the porous silicon carbide prefabricated part 8 into a double-layer prefabricated part. The pressing conditions are as follows: the pressure is 0.5MPa, and the dwell time is 60 s.
3) And (3) preparing the aluminum silicon carbide blank with the laser welding layer by vacuum pressure infiltration. The double-layered preform obtained in step 2) is placed in a stainless steel mold 11, as shown in fig. 5. Then placing the stainless steel die 11 in an upper chamber of a vacuum pressure infiltration furnace, as shown in fig. 6, heating the upper chamber to 520 ℃ and keeping the temperature for 2h, placing the Zl102 aluminum alloy serving as a base alloy in a crucible 14 of a lower chamber, heating to 670 ℃ and keeping the temperature for 2h to obtain molten aluminum liquid 20, and filling argon into the upper chamber and the lower chamber in the heating process; then when the vacuum pumping is carried out to 200Pa, the liquid guiding pipe 19 is inserted into the melted aluminum liquid 20 through the lifting mechanism 15, the vacuum pumping is stopped, high-purity nitrogen is filled into the lower chamber, the pressure in the furnace is increased to 1-2 MPa, and the constant temperature and the constant pressure are kept for 6 min; and finally, closing the power supplies of the upper chamber and the lower chamber, continuously filling nitrogen to increase the pressure in the furnace to 10MPa, and maintaining the pressure for 10 min. In the above process, the aluminum liquid 20 infiltrates the pores of the 6063 aluminum alloy laser welding layer preform 7 and the pores of the silicon carbide preform 8, and simultaneously, metallurgical bonding of the laser welding layer 2 and the aluminum silicon carbide layer 3 is also completed, that is, the interface between the two layers 2 is continuous. An aluminum silicon carbide green body 18 with a laser welded layer was prepared by the above process.
4) And (6) machining. And cooling the aluminum silicon carbide blank 18 wrapped by the stainless steel mold 11 along with the furnace, taking out, removing the stainless steel mold 11, removing the peripheral aluminum alloy from the aluminum silicon carbide blank 18 by a grinding machine and a milling machine, performing stress relief annealing at 400 ℃ for 1 hour, and finally processing the aluminum silicon carbide blank 18 by a diamond cutter through a numerical control milling machine to obtain the aluminum silicon carbide box body with the laser welding layer, wherein the aluminum silicon carbide box body is shown in figure 7.
The aluminum silicon carbide box body with the laser welding layer prepared by the method has the advantages that the laser welding layer is fine in crystal grains, does not have casting defects such as looseness and shrinkage cavities, and has good mechanical properties. After the box body and the cover plate are subjected to laser welding, the value is 2.3 multiplied by 10 < -3 > (Pa.cm 3)/s according to the air tightness detection of 1014.2A1 in a GJB 548-548B-2005 method, and the technical requirement that the GJB 548-548B-2005 is less than or equal to 5 multiplied by 10 < -3 > (Pa.cm 3)/s is met.
Example 2
The structure of the aluminum silicon carbide box body with the laser welding layer is shown in figure 1, wherein the thickness of 1 of the laser welding layer is 1.8mm, the aluminum alloy box body is composed of 3003 aluminum alloy powder serving as a reinforcing phase and ZL101A aluminum alloy serving as a base body, the volume fraction of the 3003 aluminum alloy powder is 55%, and the volume fraction of the ZL101A aluminum alloy base body is 45%. The aluminum silicon carbide layer 2 consists of silicon carbide particles and a ZL101A aluminum alloy matrix, wherein the volume fraction of silicon carbide is 60%, and the volume fraction of ZL102 aluminum alloy is 40%.
A preparation method of an aluminum silicon carbide box body with a laser welding layer for electronic packaging comprises the following specific steps:
1) and preparing a laser welding layer prefabricated member. Weighing 3003 aluminum alloy particle powder 6 with the particle size of 100-150 microns, paving the powder at the bottom of a graphite die cavity 5, applying 1.5MPa pressure to the 3003 aluminum alloy powder 6 in the graphite die cavity 5 through a male die 4, maintaining the pressure for 60s, and relieving the pressure to obtain a prefabricated member 7 of the 3003 aluminum alloy laser welding layer with the particle volume fraction of 55%.
2) The laser welding layer preform is laminated with the silicon carbide preform. And (2) placing a porous silicon carbide prefabricated part 8 above the 3003 aluminum alloy laser welding layer prefabricated part 7 prepared in the step 1), wherein the volume fraction of silicon carbide in the porous silicon carbide prefabricated part 8 is 60%, and pressing the porous silicon carbide prefabricated part into a double-layer prefabricated part. The pressing conditions were: the pressure is 0.8MPa, and the dwell time is 100 s.
3) And (3) preparing the aluminum silicon carbide blank with the laser welding layer by vacuum pressure infiltration. The double-layered preform obtained in step 2) is placed in a stainless steel mold 11, as shown in fig. 5. Then placing the stainless steel mold 11 in an upper chamber of a vacuum pressure infiltration furnace, as shown in fig. 6, heating the upper chamber to 540 ℃, keeping the temperature for 2 hours, placing the ZL101A aluminum alloy serving as a base alloy in a crucible 14 of a lower chamber, heating to 710 ℃, and keeping the temperature for 3 hours to obtain molten aluminum liquid 20, wherein argon gas is filled into the upper chamber and the lower chamber in the heating process; then when the furnace is vacuumized to 200Pa, the liquid guiding pipe 19 is inserted into the molten aluminum liquid 20 through the lifting mechanism 15, the vacuumizing is stopped, high-purity nitrogen is filled into the lower chamber, the pressure in the furnace is increased to 1-2 MPa, and the furnace is kept at constant temperature and pressure for 5 min; and finally, closing the power supplies of the upper chamber and the lower chamber, continuously filling nitrogen to increase the pressure in the furnace to 10MPa, and maintaining the pressure for 10 min. In the above process, the aluminum liquid 20 infiltrates the pores of the 3003 aluminum alloy laser welding layer preform 7 and the pores of the silicon carbide preform 8, and simultaneously, the metallurgical bonding of the laser welding layer 2 and the aluminum silicon carbide layer 3 is also completed, i.e. the interface between the two layers 2 is continuous. An aluminum silicon carbide green body 18 with a laser welded layer was prepared by the above process.
4) And (6) machining. And cooling the aluminum silicon carbide blank 18 wrapped by the stainless steel mold 11 along with the furnace, taking out, removing the stainless steel mold 11, removing the peripheral aluminum alloy from the aluminum silicon carbide blank 18 by a grinding machine and a milling machine, performing stress relief annealing at 450 ℃ for 1.5 hours, and finally processing the aluminum silicon carbide blank 18 by a diamond cutter through a numerical control milling machine to obtain the aluminum silicon carbide box body with the laser welding layer, wherein the aluminum silicon carbide box body is shown in figure 7.
The aluminum silicon carbide box body with the laser welding layer prepared by the method has the advantages that the laser welding layer is fine in crystal grains, does not have casting defects such as looseness and shrinkage cavities, and has good mechanical properties. After the box body and the cover plate are subjected to laser welding, the value is 3.7 multiplied by 10 < -3 > (Pa.cm 3)/s according to the air tightness detection of 1014.2A1 in a GJB 548-548B-2005 method, and the technical requirement that the GJB 548-548B-2005 is less than or equal to 5 multiplied by 10 < -3 > (Pa.cm 3)/s is met.
The foregoing description shows and describes two preferred embodiments of the present invention, but as aforementioned, it is to be understood that the invention is not limited to the forms disclosed herein, and is not to be construed as excluding other embodiments, and that the invention is capable of use in various other combinations, modifications, and environments and is capable of changes within the scope of the inventive concept as expressed herein, commensurate with the above teachings, or the skill or knowledge of the relevant art. And that modifications and variations may be effected by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (5)

1. A preparation method of an aluminum silicon carbide box body with a laser welding layer is characterized by comprising the following steps: comprises the steps of (a) preparing a substrate,
step 1: preparing a laser welding layer prefabricated part;
the laser welding layer prefabricated part is formed by pressing particle reinforced aluminum alloy powder, and the particle size of the particle reinforced aluminum alloy powder is 10-200 microns; the aluminum alloy powder is selected from aluminum alloy powder with the grain diameter of 50-80 mu m and the reinforcing phase of 6063 or aluminum alloy powder with the grain diameter of 100-150 mu m and the reinforcing phase of 3003;
and 2, step: the laser welding layer prefabricated part and the silicon carbide prefabricated part are matched in a laminating mode to form a double-layer prefabricated part;
and step 3: preparing an aluminum silicon carbide blank with a laser welding layer by vacuum air pressure infiltration;
the step 3 specifically comprises
Step 3.1: placing the stainless steel mold with the double-layer prefabricated part in an upper chamber of a vacuum pressure infiltration furnace for preheating, and simultaneously placing an aluminum matrix in a crucible of a lower chamber for melting;
step 3.2: after the upper chamber and the lower chamber reach the set temperature and time, vacuumizing until the vacuum degree is lower than 500Pa, and lifting the crucible by using a lifting rod;
step 3.3: filling high-purity nitrogen to ensure that the pressure in the furnace is more than 5 MPa;
step 3.4: cooling and solidifying with the furnace, and removing the stainless steel mold;
and 4, step 4: and machining the aluminum silicon carbide blank.
2. The method of making an aluminum silicon carbide cartridge according to claim 1, wherein: the step 1 specifically comprises the steps of placing aluminum alloy powder in a graphite mold, wherein the graphite mold comprises a female mold and a male mold, laying the aluminum alloy powder at the bottom of the female mold, and applying pressure of 0.5-2MPa to the aluminum alloy powder in the female mold through the male mold by a hydraulic machine and maintaining the pressure to form a laser welding layer prefabricated part.
3. The method of making an aluminum silicon carbide cartridge according to claim 1, wherein: and the step 2 specifically comprises the steps of placing the laser welding layer prefabricated member at the upper end of the porous silicon carbide prefabricated member and laminating.
4. The method of making an aluminum silicon carbide cartridge according to claim 1, wherein: the aluminum matrix is an aluminum alloy ZL101A or ZL 102.
5. The method of making an aluminum silicon carbide cassette according to claim 1, wherein: the step 4 specifically comprises
Step 4.1: removing the aluminum alloy on the periphery of the aluminum silicon carbide blank by using a grinding machine and a milling machine;
and 4.2: performing stress relief annealing on the aluminum silicon carbide blank;
step 4.3: and (3) processing the aluminum silicon carbide blank to the required size by adopting a numerical control milling machine.
CN202010173917.7A 2020-03-13 2020-03-13 Laser welding layer prefabricated part and preparation method of laser welding layer prefabricated part and aluminum silicon carbide box body Active CN111482598B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010173917.7A CN111482598B (en) 2020-03-13 2020-03-13 Laser welding layer prefabricated part and preparation method of laser welding layer prefabricated part and aluminum silicon carbide box body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010173917.7A CN111482598B (en) 2020-03-13 2020-03-13 Laser welding layer prefabricated part and preparation method of laser welding layer prefabricated part and aluminum silicon carbide box body

Publications (2)

Publication Number Publication Date
CN111482598A CN111482598A (en) 2020-08-04
CN111482598B true CN111482598B (en) 2022-07-15

Family

ID=71798135

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010173917.7A Active CN111482598B (en) 2020-03-13 2020-03-13 Laser welding layer prefabricated part and preparation method of laser welding layer prefabricated part and aluminum silicon carbide box body

Country Status (1)

Country Link
CN (1) CN111482598B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112281038B (en) * 2020-10-28 2022-02-08 黑龙江科技大学 Infiltration device and method for efficiently preparing diamond powder reinforced metal matrix composite
CN113560541A (en) * 2021-07-13 2021-10-29 珠海亿特立新材料有限公司 Aluminum silicon carbide high-power LED radiator and preparation method thereof

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6196001A (en) * 1984-10-17 1986-05-14 Showa Denko Kk Easily sinterable composite
CN2682579Y (en) * 2004-02-13 2005-03-02 中国人民解放军国防科学技术大学 Aluminium silicon carbide packaging casing with metallic packing ring
CN102114541B (en) * 2009-12-30 2012-12-26 北京有色金属研究总院 Preparation process of high volume fraction silicon particle enhanced aluminum based composite material
CN101973144B (en) * 2010-09-15 2012-10-10 中国人民解放军国防科学技术大学 Layered aluminium-silica-alumina-silicon carbide composite material capable of laser welding and preparation method thereof
CN102093056A (en) * 2010-12-08 2011-06-15 湖南浩威特科技发展有限公司 Preparation methods of aluminium silicon carbide composites with interpenetrating network structure and components of composites
CN103367270B (en) * 2013-07-11 2016-03-23 中国人民解放军国防科学技术大学 Aluminum silicon carbide composite material with laser welding layer and preparation method thereof
CN103966543B (en) * 2014-05-13 2016-03-30 中国人民解放军国防科学技术大学 Aluminium silicon/aluminum silicon carbide composite material and preparation method thereof, electronic packaging device
CN106222463B (en) * 2016-08-31 2019-04-09 华南理工大学 A kind of lightweight AlSiTi system high-entropy alloy particle enhanced aluminum-based composite material and preparation method thereof
CN106424718B (en) * 2016-10-31 2018-07-31 北京科技大学 A kind of mold and forming method of machine-shaping titanium aluminium base alloy cavity liner

Also Published As

Publication number Publication date
CN111482598A (en) 2020-08-04

Similar Documents

Publication Publication Date Title
EP0538457B1 (en) Fabrication of metal matrix composites by vacuum die casting
JP6502950B2 (en) Heat dissipation member, and method of manufacturing heat dissipation member
CN108746637B (en) Aluminum silicon/aluminum silicon carbide gradient composite material and preparation method thereof
CA2462451C (en) Sintered diamond having high thermal conductivity and method for producing the same and heat sink employing it
JP5988977B2 (en) Heat dissipation parts for semiconductor elements
JP5275625B2 (en) Heat sink made of boron-containing diamond and copper composite
CN111482598B (en) Laser welding layer prefabricated part and preparation method of laser welding layer prefabricated part and aluminum silicon carbide box body
JP5698947B2 (en) Heat sink for electronic device and method for manufacturing the same
WO1996041030A1 (en) Method for producing metal matrix composites incorporating partially sintered preforms
CN105382263B (en) Method for manufacturing ultrahigh-heat-conductive diamond-Al composite material with surface capable of being machined
CN112981164B (en) Preparation method of diamond reinforced metal matrix composite material with high reliability and high thermal conductivity
KR101200578B1 (en) Material composite
CN112981163B (en) Preparation method of diamond-reinforced metal matrix composite with high surface precision and high reliability
US20070243407A1 (en) Machinable Metallic Composites
CN108774699A (en) Aluminium silicon/aluminium gold hard rock gradient composites and preparation method thereof
CN111411281A (en) Preparation method of gradient electronic packaging shell
CN112059174A (en) Simple infiltration preparation method of low-expansion-coefficient diamond/metal composite material
CN113149714A (en) Aluminum diamond composite material with aluminum silicon carbide layer coated on surface and preparation method and application thereof
WO2005056238A1 (en) Manufacture method of super-hard grinding tool containing metallic or ceramic binder
CN111668103B (en) Preparation method of connector hole of aluminum silicon carbide electronic packaging box body
CN112281038A (en) Infiltration device and method for efficiently preparing diamond powder reinforced metal matrix composite
JP4178070B2 (en) Method for canning sintered preform and method for producing sintered material thereby
CN109732092A (en) Preparation method of aluminum-based electronic packaging material
US5406029A (en) Electronic package having a pure metal skin
CN212551723U (en) Simple infiltration device

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant