CN111426411A - Multi-scale flexible light-sensitive mechanical pressure sensor - Google Patents

Multi-scale flexible light-sensitive mechanical pressure sensor Download PDF

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Publication number
CN111426411A
CN111426411A CN202010393360.8A CN202010393360A CN111426411A CN 111426411 A CN111426411 A CN 111426411A CN 202010393360 A CN202010393360 A CN 202010393360A CN 111426411 A CN111426411 A CN 111426411A
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CN
China
Prior art keywords
flexible
sensing
optical fiber
pressure sensor
sensing unit
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Pending
Application number
CN202010393360.8A
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Chinese (zh)
Inventor
焦鹏程
谢意维
杨旸
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Zhejiang University ZJU
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Zhejiang University ZJU
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Priority to CN202010393360.8A priority Critical patent/CN111426411A/en
Publication of CN111426411A publication Critical patent/CN111426411A/en
Priority to LU501048A priority patent/LU501048B1/en
Priority to PCT/CN2020/118677 priority patent/WO2021227339A1/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/24Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G01L1/247Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet using distributed sensing elements, e.g. microcapsules
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/16Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/165Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by means of a grating deformed by the object
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/16Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/18Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge using photoelastic elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/04Measuring force or stress, in general by measuring elastic deformation of gauges, e.g. of springs
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/24Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G01L1/242Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
    • G01L1/243Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre using means for applying force perpendicular to the fibre axis

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The invention belongs to the field of pressure sensing, and discloses a multi-scale flexible light-sensing mechanical pressure sensor which comprises a flexible sensing layer, an optical fiber group and an optical fiber terminal, wherein the flexible sensing layer comprises a flexible supporting layer and a sensing unit group arranged on the flexible supporting layer, the sensing unit group comprises a plurality of sensing units, the optical fiber group comprises a plurality of optical fibers corresponding to the sensing units, one end of each optical fiber is connected with the optical fiber terminal, the other end of each optical fiber is sequentially wound on the sensing units, and the optical fiber terminal is provided with an optical fiber power supply module and an optical fiber state monitoring module. The flexible material is innovatively applied to the pressure sensor, so that the complex environment adaptability of pressure measurement is realized; the invention creatively combines the flexible material and the optical fiber sensing technology, and realizes the flexible light-sensitive pressure measurement technology for the first time.

Description

Multi-scale flexible light-sensitive mechanical pressure sensor
Technical Field
The invention belongs to the field of pressure sensing, and particularly relates to a multi-scale flexible light-sensitive mechanical pressure sensor.
Background
The pressure sensor is a signal sensing device for converting mechanical signals into electric signals, and is also the most widely applied sensor. Pressure sensors can be divided into conventional mechanical pressure sensors and semiconductor pressure sensors: the traditional mechanical pressure sensor has the defects of heavy mass, large volume and no electric signal output; compared with the traditional mechanical pressure sensor, the semiconductor pressure sensor has the advantages of high precision, small volume and electric signal output, but because the semiconductor pressure sensor can not be bent, the semiconductor pressure sensor can not be used when the application environment is more complicated (such as irregular placement plane, uneven pressure or multi-directional pressure bearing at the same time). The performance of the existing pressure sensor in sensing multi-scale mechanical signals is greatly different, and the sensor design capable of sensing large-scale mechanical signals (such as buildings, bridges and roads) cannot be applied to sensing small-scale mechanical signals (such as muscle movement or micro vibration). Meanwhile, most of the existing pressure sensors need to continuously provide electric energy support, which greatly limits the continuous application and acquisition frequency of the pressure sensors. Therefore, the sensing flexibility, sensitivity, energy dependence and environmental adaptability of the pressure sensor become influence factors for limiting the applicability of the pressure sensor, and the problem becomes a key technical problem to be solved urgently in the field.
Flexible materials have become an excellent substitute for traditional rigid sensor housings due to their light weight, high flexibility, and strong environmental suitability. The sensor using flexible material as the shell can adapt to complex measuring terrain and can adapt to real-time shape along with the deformation of the measuring object (such as human motion). Therefore, the technical problems of multi-scale signal sensing and environmental adaptability can be solved by using the flexible material as the design of the sensor main body.
The optical fiber sensing technology is a sensing technology with excellent sensitivity, light wave information in an optical fiber is influenced by an external signal to change, and the change of the light wave information is sensed and processed through an optical detector, so that the sensing of an external physical signal is realized. The optical fiber sensing technology is applied to the field of pressure sensing, the sensitivity and the accuracy of pressure measurement can be greatly improved, and meanwhile, the environmental adaptability and the measurement durability of the pressure sensor can be greatly improved due to the fact that the optical fiber has the advantages of being easy to bend, low in energy consumption and strong in external interference resistance.
Compared with the prior art: the mechanical pressure sensor designed by applying the flexible material and the optical fiber sensing technology has the advantages of excellent environmental adaptability, sensing sensitivity and measurement accuracy, meets the pressure measurement requirements of different scales in a non-energy supply mode, and can solve the industrial problems that the conventional pressure sensor cannot realize non-energy supply measurement, uneven pressure measurement, multi-directional pressure measurement, adaptation to real-time deformation of a measurement target and the like.
Disclosure of Invention
Aiming at the problems in the prior art, the invention aims to provide a technical scheme of a multi-scale flexible light-sensitive mechanical pressure sensor.
The flexible light sensation mechanical pressure sensor of a multiscale, including flexible response layer, optic fibre group and fiber termination, its characterized in that flexible response layer includes flexible supporting layer, sets up the sensing unit group on flexible supporting layer, the sensing unit group includes a plurality of sensing units, optic fibre group includes many optic fibre that correspond with sensing unit, optic fibre one end is connected with fiber termination, the other end twines in proper order on sensing unit, fiber termination is provided with optic fibre power supply module and optic fibre state monitoring module.
The multi-scale flexible light sensation mechanical pressure sensor is characterized in that a flexible sensing surface is arranged on a flexible supporting layer, a sensing unit group is accommodated in a space coated by the flexible supporting layer and the flexible sensing surface, a plurality of flexible pressure receiving units which correspond to the sensing units one to one are arranged on the flexible sensing surface, and the flexible pressure receiving units are positioned at the upper ends of the sensing units.
The multi-scale flexible light sensation mechanical pressure sensor is characterized in that a plurality of unit installation cavities which correspond to the sensing units one to one are arranged in the flexible supporting layer, and the sensing units are arranged in the unit installation cavities.
The flexible light sensation mechanical pressure sensor is characterized in that an optical fiber through opening is formed in the unit installation cavity, and an optical fiber group interface is arranged on the flexible supporting layer.
The multi-scale flexible light-sensitive mechanical pressure sensor is characterized in that the part of the optical fiber wound on the sensing unit is provided with an optical fiber inlet end and an optical fiber outlet end.
The multi-scale flexible light-sensing mechanical pressure sensor is characterized in that the sensing unit can be predictably deformed when receiving pressure.
The multi-scale flexible polished rod mechanical pressure sensor is characterized in that each optical fiber of the optical fiber group is composed of a grating and an optical fiber sheath.
The flexible material is innovatively applied to the pressure sensor, so that the complex environment adaptability of pressure measurement is realized; the invention innovatively combines the flexible material and the optical fiber sensing technology, and realizes the flexible light sensation pressure measurement technology for the first time; the invention innovatively combines the mechanical pressure measurement technology with the flexible material and optical fiber sensing technology, and realizes the pressure measurement technology with multiple measurement scales for the first time; compared with other pressure sensing technologies, the invention has more excellent environmental adaptability, measurement sensitivity, accuracy and energy consumption saving.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of a connection structure of an optical fiber set and a flexible sensing layer according to the present invention;
FIG. 3 is a second schematic view of the connection structure of the optical fiber set and the flexible sensing layer according to the present invention;
FIG. 4 is a schematic structural diagram of the flexible supporting layer of the present invention when a sensing unit is mounted thereon;
FIG. 5 is a schematic structural view of the flexible supporting layer of the present invention without a sensing unit mounted thereon;
FIG. 6 is a schematic structural diagram of a sensing unit according to the present invention when the sensing unit is not under stress;
FIG. 7 is a schematic structural diagram of a sensing unit according to the present invention when a force is applied to the sensing unit;
fig. 8 is a schematic view of the structure of the optical fiber of the present invention.
In the figure: 1-a flexible induction layer; 2-optical fiber group; 3-optical fiber termination; 101-a flexible support layer; 102-a flexible sensing surface; 103-a flexible pressure receiving unit; 104-a sensing unit; 105-a unit mounting cavity; 106-optical fiber port; 107-fiber group interface; 108-fiber entrance; 109-fiber outlet end; 201-a grating; 202-optical fiber sheath.
Detailed Description
As shown in the figure, a flexible light sense machinery pressure sensor of multiscale, including flexible inductive layer 1, optic fibre group 2 and fiber terminal 3, flexible inductive layer 1 includes flexible supporting layer 101, set up the sensing unit group on flexible supporting layer 101, the sensing unit group includes the sensing unit 104 that a plurality of arrays were arranged, optic fibre group 2 includes many optic fibres that correspond with sensing unit 104, optic fibre one end is connected with fiber terminal 2, the other end order closely twines on sensing unit 104, fiber terminal 3 is provided with fiber power supply module and optic fibre state monitoring module.
As the optimized structure of the invention: the flexible supporting layer 101 is provided with a flexible sensing surface 102, the sensing unit group is accommodated in a space covered by the flexible supporting layer 101 and the flexible sensing surface 102, the flexible sensing surface 102 is provided with a plurality of flexible pressure receiving units 103 which are in one-to-one correspondence with the sensing units 104, and the flexible pressure receiving units 103 are positioned at the upper ends of the sensing units 104.
As the optimized structure of the invention: a plurality of unit installation cavities 105 corresponding to the sensing units 104 one to one are arranged in the flexible supporting layer 101, and the sensing units 104 are arranged in the unit installation cavities 105.
As the optimized structure of the invention: the unit installation cavity 105 is provided with an optical fiber through port 106, and the flexible support layer 101 is provided with an optical fiber group interface 107.
As the optimized structure of the invention: the part of the fiber wound on the sensing unit 104 has a fiber entrance end 108 and a fiber exit end 109.
As the optimized structure of the invention: the sensing element 104 deforms predictably when subjected to pressure.
As the optimized structure of the invention: each optical fiber of the optical fiber group 2 is composed of a grating 201 and a fiber jacket 202.
The flexible material shell of the invention is made of silica gel, rubber and the like.
The operation principle of a multi-scale flexible photomechanical pressure sensor is explained by taking fig. 6 and 7 as an example. For example, if a part of the flexible sensing layer 1 is under pressure, the pressure first acts on a part of the flexible pressure receiving unit 103 disposed on the flexible sensing surface 102, the lower surface of the flexible pressure receiving unit 103 is in close contact with the upper surface of the sensing unit 104, when the flexible pressure receiving unit 103 is pressed to deform downward, the pressure is directly transmitted to the sensing unit 104, the sensing unit 104 deforms as shown in fig. 7 after being pressed, the optical fiber tightly wound around the sensing unit 104 responds quickly due to the deformation, the optical signal changes, and the optical signal is transmitted to the optical fiber terminal 3 through the optical fiber outlet 109, the optical fiber port 106, and the optical fiber group interface 107 for information processing and conversion.
If the flexible sensing layer 1 is arranged on an uneven measuring surface, the flexible sensing layer 1 can be bent at will according to the shape of the measuring surface because the flexible sensing layer is made of flexible materials, when the flexible sensing layer is stressed unevenly or stressed in multiple directions simultaneously, the flexible pressure receiving unit 103 arranged on the flexible sensing surface 102 can receive pressure signals on the cell corresponding to the stress direction according to the difference of the stress direction, then the same working process is carried out according to the operation principle of the multi-scale flexible light-sensitive mechanical pressure sensor, so that the sensing units 104 with different stresses simultaneously send information to the optical fiber terminal 3, the synchronous processing of complex mechanical signals is realized, and the self-adaptive working expectation of complex environments is further achieved.
Finally, it should be noted that the above embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.

Claims (7)

1. The utility model provides a flexible light sense mechanical pressure sensor of multiscale, including its characterized in that flexible response layer (1), optic fibre group (2) and fiber termination (3), flexible response layer (1) includes flexible supporting layer (101), set up the sensing unit group on flexible supporting layer (101), the sensing unit group includes a plurality of sensing unit (104), optic fibre group (2) include many optic fibre that correspond with sensing unit (104), optic fibre one end is connected with fiber termination (2), the other end twines in proper order on sensing unit (104), fiber termination (3) are provided with optic fibre power supply module and optic fibre state monitoring module.
2. The flexible multi-scale light-sensing mechanical pressure sensor as claimed in claim 1, wherein the flexible supporting layer (101) is provided with a flexible sensing surface (102), the sensing unit group is accommodated in a space covered by the flexible supporting layer (101) and the flexible sensing surface (102), the flexible sensing surface (102) is provided with a plurality of flexible pressure receiving units (103) corresponding to the sensing units (104) one by one, and the flexible pressure receiving units (103) are located at the upper ends of the sensing units (104).
3. The multi-scale flexible photomechanical pressure sensor of claim 2, wherein the flexible supporting layer (101) has a plurality of unit mounting cavities (105) corresponding to the sensing units (104) one by one, and the sensing units (104) are disposed in the unit mounting cavities (105).
4. The flexible multi-scale photomechanical pressure sensor of claim 3, wherein the unit mounting cavity (105) has a fiber port (106) and the flexible support layer (101) has a fiber group interface (107).
5. A multiscale flexible optomechanical pressure sensor as claimed in any one of claims 1-4, wherein the part of the optical fiber wound around the sensing unit (104) has an optical fiber entrance end (108) and an optical fiber exit end (109).
6. A multiscale flexible optomechanical pressure sensor as claimed in any one of claims 1 to 4, wherein the sensing unit (104) is adapted to deform predictably when subjected to pressure.
7. The mechanical pressure sensor of flexible polished rod with multiple dimensions as claimed in any of claims 1-4, characterized in that each optical fiber of the optical fiber group (2) is composed of grating (201) and optical fiber sheath (202).
CN202010393360.8A 2020-05-11 2020-05-11 Multi-scale flexible light-sensitive mechanical pressure sensor Pending CN111426411A (en)

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CN202010393360.8A CN111426411A (en) 2020-05-11 2020-05-11 Multi-scale flexible light-sensitive mechanical pressure sensor
LU501048A LU501048B1 (en) 2020-05-11 2020-09-29 Multi-scale flexible photosensitive mechanical pressure sensor
PCT/CN2020/118677 WO2021227339A1 (en) 2020-05-11 2020-09-29 Multi-scale flexible photosensitive mechanical pressure sensor

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CN202010393360.8A CN111426411A (en) 2020-05-11 2020-05-11 Multi-scale flexible light-sensitive mechanical pressure sensor

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021227339A1 (en) * 2020-05-11 2021-11-18 浙江大学 Multi-scale flexible photosensitive mechanical pressure sensor
WO2022116926A1 (en) * 2020-12-04 2022-06-09 浙江大学 Self-powered pressure sensor based on phenomenon of post-buckling
CN114964604A (en) * 2022-06-10 2022-08-30 长春理工大学 Optical fiber pressure sensor and manufacturing method of spiral sensing optical fiber pressure probe

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4408829A (en) * 1981-01-30 1983-10-11 Schlumberger Technology Corporation Fiber optic transducers
CN201926539U (en) * 2010-12-06 2011-08-10 沈阳航空航天大学 Optical fiber pressure sensor
CN102221374A (en) * 2010-04-19 2011-10-19 西安金和光学科技有限公司 Fiber sensing device for sensing torque parameters
CN103968980A (en) * 2014-05-20 2014-08-06 山东大学 Novel optical fiber touch sensor array and manufacturing method thereof
CN203772461U (en) * 2014-02-27 2014-08-13 中国电子科技集团公司第八研究所 Stress monitoring device
CN108663145A (en) * 2018-08-01 2018-10-16 桂林电子科技大学 The quasi- profile fiber pressure sensor of sensitizing type

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL99773A (en) * 1991-10-17 1995-11-27 Israel State Pressure sensor
GB2421075A (en) * 2004-12-09 2006-06-14 Insensys Ltd Optical-fibre interstice displacement sensor
CN204649334U (en) * 2015-04-30 2015-09-16 武汉理工大学 A kind of optical fiber optical grating array sensor
CN206943194U (en) * 2017-06-30 2018-01-30 大连理工大学 A kind of intelligent gasket device for being used for monitoring bolt loosening based on fiber grating
CN111426411A (en) * 2020-05-11 2020-07-17 浙江大学 Multi-scale flexible light-sensitive mechanical pressure sensor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4408829A (en) * 1981-01-30 1983-10-11 Schlumberger Technology Corporation Fiber optic transducers
CN102221374A (en) * 2010-04-19 2011-10-19 西安金和光学科技有限公司 Fiber sensing device for sensing torque parameters
CN201926539U (en) * 2010-12-06 2011-08-10 沈阳航空航天大学 Optical fiber pressure sensor
CN203772461U (en) * 2014-02-27 2014-08-13 中国电子科技集团公司第八研究所 Stress monitoring device
CN103968980A (en) * 2014-05-20 2014-08-06 山东大学 Novel optical fiber touch sensor array and manufacturing method thereof
CN108663145A (en) * 2018-08-01 2018-10-16 桂林电子科技大学 The quasi- profile fiber pressure sensor of sensitizing type

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
冯程成: "光纤白光干涉测量技术应用研究", 《中国优秀硕士学位论文全文数据库 基础科学辑》 *
刘清君: "《穿戴式与便携式生化传感检测技术》", 31 May 2018, 世界图书出版西安有限公司 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021227339A1 (en) * 2020-05-11 2021-11-18 浙江大学 Multi-scale flexible photosensitive mechanical pressure sensor
WO2022116926A1 (en) * 2020-12-04 2022-06-09 浙江大学 Self-powered pressure sensor based on phenomenon of post-buckling
CN114964604A (en) * 2022-06-10 2022-08-30 长春理工大学 Optical fiber pressure sensor and manufacturing method of spiral sensing optical fiber pressure probe
CN114964604B (en) * 2022-06-10 2023-07-18 长春理工大学 Optical fiber pressure sensor and manufacturing method of spiral sensing optical fiber pressure probe

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WO2021227339A1 (en) 2021-11-18

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Application publication date: 20200717