CN111408837A - High-power laser beam efficient coupling water-guided laser structure and method - Google Patents

High-power laser beam efficient coupling water-guided laser structure and method Download PDF

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Publication number
CN111408837A
CN111408837A CN202010351836.1A CN202010351836A CN111408837A CN 111408837 A CN111408837 A CN 111408837A CN 202010351836 A CN202010351836 A CN 202010351836A CN 111408837 A CN111408837 A CN 111408837A
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nozzle
module
laser beam
energy transmission
water
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龙芋宏
黄宇星
梁恩
张光辉
刘清原
周嘉
焦辉
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Guilin University of Electronic Technology
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Guilin University of Electronic Technology
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Priority to CN202010351836.1A priority Critical patent/CN111408837A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/032—Optical fibres with cladding with or without a coating with non solid core or cladding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/032—Optical fibres with cladding with or without a coating with non solid core or cladding
    • G02B2006/0325—Fluid core or cladding

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention discloses a high-efficiency coupling water-guided laser structure and a method of a high-power laser beam, wherein the upper end of an energy transmission module is connected with a high-power energy transmission optical fiber, and the lower end of the energy transmission module is provided with a self-focusing lens for transmitting the laser beam; the energy transmission fixing module comprises a centering block coaxially mounted with the energy transmission module, the centering block is coaxially mounted in the connecting body, the bottom of the connecting body is provided with a flow blocking block coaxially mounted on the centering block, and a sealing ring is arranged between the flow blocking block and the connecting body; the nozzle module comprises a nozzle seat arranged below the energy transmission fixing module, and a nozzle coaxial with the lower end of the energy transmission module is arranged on the nozzle seat; the coupling liquid cavity module comprises a low-pressure steady flow liquid layer arranged between the flow blocking block and the nozzle seat, and the low-pressure steady flow liquid layer is sprayed out from the nozzle to form a water jet; the lower end of the energy transfer module is suspended in the low-pressure steady flow liquid layer at the bottom of the centering block or the lower end of the energy transfer module extends into and is fixed in a spray hole of the nozzle so as to couple the laser beam into the water jet to form the water beam optical fiber.

Description

High-power laser beam efficient coupling water-guided laser structure and method
Technical Field
The invention relates to a laser high-precision processing technology, in particular to a high-power laser beam high-efficiency coupling water-guided laser structure and a method.
Background
The water-guided laser utilizes micron-sized water beam optical fibers formed by a nozzle in a coupling cavity to conduct laser beams, and the laser is totally reflected and limited in a water beam after meeting the total reflection critical condition of an air-water beam interface of the water beam optical fibers. The laser beam is transmitted to the surface of the workpiece to be processed along the water beam optical fiber due to the total reflection action to burn the material of the workpiece, and meanwhile, the water beam impacts and cools the surface of the workpiece, so that the high-precision processing of the workpiece is completed.
In the water guide laser processing, the water beam optical fiber is used for guiding the laser beam, so that the problem that the traditional laser processing needs real-time focusing because the defocusing phenomenon of the focused beam along with the processing process occurs can be solved, and the precise processing of the thick plate can be realized. The multi-mode effect formed by the water beam fiber has a homogenizing effect on the energy density distribution of the coupled focused laser beam, and the parallel cutting groove can be realized. In addition, due to the impact and cooling effect of the micro water jet, molten substances and chips generated by laser ablation can be removed, a heat affected zone can be reduced, the formation and expansion of microcracks are reduced, a recast layer formed on the surface of a machined part is reduced, and the machining quality is remarkably improved. Therefore, the water-guided laser processing technology is widely applied to aerospace, biomedical, rail transit, new energy, IC and MEMS, and the technology also has industrial application of Synova SA, Avonisys AG and shibiua.
However, the existing water-guided laser processing technology has certain defects;
1. the diameter of the water beam optical fiber formed by the nozzle is small (dozens of microns), the laser beam is coupled with the water beam optical fiber through focusing, the water beam-light beam coupling adjustment is difficult, the focusing light beam and the center of the nozzle are centered and deviated, the nozzle is burnt, and the coupling transmission fails.
2. The laser beam reaches the end face of the nozzle after being focused by a focusing lens, air, a glass window and a liquid layer, and the calculation and adjustment of the focusing process of the laser beam are complex; the optical transmission cavity of the coupling cavity has larger size, the sealing and bearing requirements of the coupling cavity are high, and the structure is relatively complex.
The technical defects limit the better popularization and application of the water-guide laser processing technology.
Disclosure of Invention
Aiming at the defects of the prior art, the technical problem to be solved by the invention is to provide a high-power laser beam high-efficiency coupling water-guided laser structure and a method, wherein the water beam-light beam coupling difficulty is reduced, the structural size of a coupling cavity is reduced, and the processing efficiency is improved by utilizing a high-power laser beam.
Can solve above-mentioned technical problem's high power laser beam high efficiency coupling water guide laser structure, its technique is including passing can module, passing can fixed module, coupling liquid chamber module and nozzle module, and the institute is different:
1. the upper end of the energy transmission module is connected with a high-power energy transmission optical fiber, and the lower end of the energy transmission module is provided with an energy transmission optical fiber head, a self-focusing lens or a diamond joint for transmitting laser beams.
2. The energy transmission fixing module comprises a centering block coaxially mounted with the energy transmission module, the centering block is coaxially mounted in the connecting body, a flow blocking block coaxially mounted on the centering block is arranged at the bottom of the connecting body, and a sealing ring is arranged between the flow blocking block and the connecting body.
3. The nozzle module comprises an energy transmission module and a nozzle seat arranged below the energy transmission fixing module, and a nozzle coaxial with the lower end of the energy transmission module is arranged on the nozzle seat.
4. The coupling liquid cavity module comprises a low-pressure steady flow liquid layer arranged between the flow blocking block and the nozzle seat, and the low-pressure steady flow liquid layer is sprayed out from the nozzle to form a water jet (water beam).
5. The lower end of the energy transfer module is suspended in the low-pressure steady flow liquid layer at the bottom of the centering block or the lower end of the energy transfer module extends into and is fixed in a spray hole of the nozzle so as to couple the laser beam into the water jet to form a water beam optical fiber.
When the energy transmission module adopts a tail end suspension type structure, the circular spray hole of the nozzle is matched with the excircle of the lower end of the energy transmission module.
When the energy transfer module adopts a tail end fixed structure, the lower end of the energy transfer module is internally tangent to a regular hexagon spray hole, a regular pentagon spray hole, a square spray hole, a regular triangle spray hole, an oval spray hole or a petal-shaped spray hole of the nozzle.
When the energy transfer module adopts a tail end fixed structure, the circular spray hole of the nozzle is internally provided with a concentric ring sleeve through thin ribs with uniform circumference, and the lower end of the energy transfer module is positioned in the ring sleeve.
The nozzle can be made of tool steel, sapphire or stainless steel and is manufactured by high-precision machining or high-precision 3D printing.
The scheme of adopting the high-power laser beam high-efficiency coupling water-guide laser structure to couple the water jet and the laser beam into the water beam optical fiber comprises the following steps:
1. and starting the high-pressure liquid supply module to form a low-pressure steady flow liquid layer coupled with the liquid cavity module, and downwards ejecting the low-pressure steady flow liquid layer from the nozzle to form a stable water jet (water beam).
2. Selective coupling mode
①, the lower end of the energy transfer module is suspended in the low-pressure steady flow liquid layer, and the diameter d of the fiber core of the energy transfer module is well matchedcOr diameter of energy transmission fiber head and diameter d of water jetjThe device comprises a low-pressure steady flow liquid layer, a laser beam, the wavelength, power and frequency of the laser beam, the depth of the lower end of an energy transfer module inserted into the low-pressure steady flow liquid layer, and the distance from the lower end of the energy transfer module to a nozzle.
②, the lower end of the energy transfer module extends into the nozzle of the nozzle and is fixed in position, and the diameter d of the fiber core in the energy transfer module is well matchedcOr diameter of energy transmission fiber head and diameter d of water jetjWavelength, power and frequency of the laser beam.
3. And starting the laser emitter, transmitting the laser beam to the energy transmission optical fiber head, the self-focusing lens or the diamond joint through the energy transmission optical fiber, and emitting the laser beam downwards after focusing through the energy transmission optical fiber head, the self-focusing lens or the diamond joint.
4. Under the condition of satisfying total reflection, the laser beam is guided and coupled into the water jet to form a water beam optical fiber.
The invention has the beneficial effects that:
1. the invention utilizes the energy transfer module to transmit and focus the laser beam, and couples the laser beam with the water beam formed by the nozzle to form the water beam optical fiber, thereby reducing the alignment adjustment precision in the water beam-light beam coupling process and reducing the coupling difficulty.
2. The invention utilizes the compact energy transfer module to directly transmit and focus the laser beam, reduces the size of an optical cavity for optical transmission in the coupling cavity, further reduces the overall size of the coupling cavity, and improves the sealing performance and the pressure-bearing capacity of the cavity.
3. The invention adopts the energy transfer module to directly transmit and focus the high-power laser beam and couple the high-power laser beam into the water beam to form the water beam optical fiber, thereby improving the processing precision and efficiency of the water-guided laser.
Drawings
Fig. 1 is a schematic structural view of an embodiment of the present invention, wherein the energy transmission module is an end suspension structure.
Fig. 2 is a schematic structural view of another embodiment of the present invention, wherein the end of the energy transmission module is a fixed structure.
Fig. 3 is an alignment chart of the energy transfer module and the circular orifice of the nozzle in the embodiment of fig. 1.
Fig. 4(a) is an alignment chart of the energy transfer module and the regular hexagonal nozzle holes of the nozzle in the embodiment of fig. 2.
Fig. 4(b) is an alignment chart of the energy transfer module and the regular pentagonal nozzle hole of the nozzle in the embodiment of fig. 2.
Fig. 4(c) is a diagram illustrating alignment of the energy transfer module and the square nozzle hole of the nozzle in the embodiment of fig. 2.
Fig. 5(a) is an alignment chart of the energy transfer module and the regular triangle nozzle holes of the nozzle in the embodiment of fig. 2.
Fig. 5(b) is an alignment chart of the energy transfer module and the elliptical orifice of the nozzle in the embodiment of fig. 2.
Fig. 6 is a block diagram of a nozzle employing a ribbed sheet in the embodiment of fig. 2.
Fig. 7 is a structural diagram of an energy transfer module in the embodiment of fig. 1 and 2.
And (3) identifying the figure number: 1. an energy transfer module; 1-1, energy transmission optical fiber; 1-2, optical fiber cladding; 2. a self-focusing lens; 3. centering blocks; 4. a linker; 5. a flow blocking block; 6. a nozzle holder; 7. a nozzle; 7-1, spraying holes in a regular hexagon shape; 7-2, spraying a regular pentagonal orifice; 7-3, square spray holes; 7-4, spraying holes in a regular triangle shape; 7-5, elliptical spray holes; 8. a low-pressure steady flow liquid layer; 9. a water beam optical fiber; 10. a laser beam; 11. thin ribs; 12. sleeving a ring; 13. and (5) sealing rings.
Detailed Description
The technical solution of the present invention will be further explained with reference to the embodiments shown in the drawings.
The invention discloses a high-power laser beam high-efficiency coupling water-guided laser structure which comprises an energy transfer module 1, an energy transfer fixing module, a coupling liquid cavity module and a nozzle module, wherein the energy transfer fixing module is used for positioning the energy transfer module 1 in the middle, the nozzle module is arranged below the energy transfer module 1 and the energy transfer fixing module, the coupling liquid cavity module is arranged among the energy transfer module 1, the energy transfer fixing module and the nozzle module, and the energy transfer module 1 is used for directly guiding and transmitting a high-power laser beam and then coupling the high-power laser beam to the nozzle module to form a water beam optical fiber 9.
The upper end of an energy transmission module 1 which is packaged and molded into a cylinder is connected with a high-power energy transmission optical fiber 1-1, the outer layer of the energy transmission optical fiber 1-1 is an optical fiber cladding 1-2, and the lower end of the energy transmission module 1 is provided with an energy transmission optical fiber head, or a self-focusing lens 2, or a diamond joint for transmitting a laser beam 10, as shown in fig. 1, 2 and 7.
The energy transmission fixing module comprises a centering block 3 coaxially mounted with the energy transmission module 1, the centering block 3 is coaxially mounted in a connecting body 4, a flow blocking block 5 coaxially mounted on the centering block 3 is arranged at the bottom of the connecting body 4, a sealing ring 13 is arranged between the flow blocking block 5 and the connecting body 4, and the lower end of the energy transmission module 1 is suspended at the bottom of the centering block 3, as shown in fig. 1 and 2.
The nozzle module includes nozzle holder 6, set up nozzle mounting hole or the nozzle screw hole that link up on the nozzle holder 6, the embedding has in the nozzle mounting hole and passes the coaxial nozzle 7 of energy module 1 lower extreme, or the spiral has closed the coaxial nozzle 7 of passing the energy module 1 lower extreme on the nozzle screw hole, nozzle 7 has following multiform:
1. the circular spray hole of the nozzle 7 has an inner diameter matched with the outer circle of the lower end of the energy transmission module 1, as shown in fig. 3.
2. A concentric ring sleeve 12 is arranged in a circular spray hole of the nozzle 7, three radial thin fins 11 are uniformly distributed on the circumference between the ring sleeve 12 and the inner wall of the circular spray hole to support the ring sleeve 12, and an inner hole of the ring sleeve 12 is matched with the outer circle of the lower end of the energy transmission module 1, as shown in fig. 6.
3. The regular hexagonal shaped orifices 7-1 of the nozzle 7 are shown in fig. 4 (a).
4. The regular pentagon of the nozzle 7 is jetted out of the orifice 7-2 as shown in fig. 4 (b).
5. The square orifice 7-3 of the nozzle 7 is shown in fig. 4 (c).
6. Regular triangular shaped orifices 7-4 of the nozzle 7 are shown in fig. 5 (a).
7. The elliptical orifice 7-5 of the nozzle 7 is shown in fig. 5 (b).
The coupling liquid cavity module comprises a low-pressure liquid stabilizing layer 8 arranged between the lower end of the flow blocking block 5, the centering block 3 and the energy transfer module 1 and the nozzle seat 6, wherein the low-pressure liquid stabilizing layer 8 flows from outside to inside and is sprayed out downwards through a spray hole of the nozzle 7 to form a water jet (water beam), as shown in fig. 1 and 2.
As shown in fig. 1 and 3, the lower end of the energy transfer module 1 is suspended from the low-pressure steady fluid layer 8, and the outer diameter of the lower end of the energy transfer module 1 is matched with the circular spray hole of the nozzle 7.
As shown in fig. 2, the lower end of the energy transfer module 1 passes through the low-pressure liquid stabilizer layer 8 and extends into the nozzle hole of the nozzle 7 to be fixed, and the following modes are provided:
1. the lower end of the energy transfer module 1 extends into a ring sleeve 12 in the spray hole of the nozzle 7 and is fixed, as shown in fig. 6.
2. The lower end of the energy transfer module 1 extends into a regular hexagon nozzle hole 7-1 of the nozzle 7 to be internally tangent and fixed, as shown in fig. 4 (a).
3. The lower end of the energy transfer module 1 extends into a regular pentagonal jet hole 7-2 of the nozzle 7 to be internally tangent and fixed, as shown in fig. 4 (b).
4. The lower end of the energy transfer module 1 extends into a square spray hole 7-3 of the nozzle 7 for internally cutting and fixing, as shown in fig. 4 (c).
5. The lower end of the energy transfer module 1 extends into a regular triangle spray hole 7-4 of the nozzle 7 for internally tangent fixation, as shown in fig. 5 (a).
6. The lower end of the energy transfer module 1 extends into an oval spray hole 7-5 of the nozzle 7 to be internally tangent and fixed, as shown in fig. 5 (b).
In a preferred embodiment, the diameter d of the core of the energy transmission optical fiber 1-1cThe range is selected from 20 μm to 200 μm, depending on the diameter d of the water jet formed by the nozzle 7jMatching (d)c＜dj) So as to be coupled; the wavelength of the laser beam 10 is selected to be 532nm or 1064nm, preferably 532 nm; the laser working form can adopt quasi-continuous or pulse laser, and when pulse laser is adopted, the pulse width is 5 ns-50 ns, the power is 200W-2000W, and the frequency range is 20 kHz-200 kHz.
When the lower end of the energy transmission module 1 shown in fig. 1 is suspended, the depth of the energy transmission module 1 inserted into the low-pressure steady flow liquid layer 8 needs to meet the corresponding coupling conditions for matching, and the specific requirements are as follows: h is less than or equal to (d)j-dc)/{2tan[arcsin(NA/nw)]H is the distance from the lower end of the energy transfer module 1 to the nozzle 7, djDiameter of the formed water bundle fiber 9, dcFor the diameter of the energy-transmitting fiber 1-1, NA is the numerical aperture of the fiber in air, nwTo form the liquid refractive index of the water bundle fiber 9.
The high-power laser beam 10 transmitted by the energy transmission optical fiber 1-1 is coupled with the water jet of the nozzle 7 to form the water beam optical fiber 9, so that the purpose of guiding the laser beam 10 by the water beam is achieved, and the high-efficiency, high-precision and low-damage processing of the material by the high-efficiency coupled water-guided laser of the high-power laser beam 10 is further realized.
The scheme of adopting the high-power laser beam high-efficiency coupling water-guide laser structure to couple the water beam optical fiber 9 comprises the following steps:
1. the high pressure liquid supply module is started to form a low pressure steady flow liquid layer 8 coupled with the liquid cavity module, and the low pressure steady flow liquid layer 8 is downwards ejected from the nozzle 7 to form a stable water jet (water beam).
2. Selective coupling mode
①, the lower end of the energy transfer module 1 is suspended in the low-pressure steady flow liquid layer 8, and the diameter d of the fiber core of the energy transfer module 1 is matchedcWater jet diameter djThe wavelength, the power and the frequency of the laser beam 10, the depth of the lower end of the energy transmission module 1 inserted into the low-pressure steady flow liquid layer 8, and the nozzle distance from the lower end of the energy transmission module 1 to the nozzle 7.
②, the lower end of the energy transfer module 1 extends into the nozzle opening of the nozzle 7 and is fixed in position.
3. And starting the laser emitter, transmitting the high-power laser beam 10 to the energy transmission optical fiber head or the self-focusing lens 2 or the diamond joint through the energy transmission optical fiber 1-1, and emitting the laser beam 10 downwards after being focused by the energy transmission optical fiber head or the self-focusing lens 2 or the diamond joint.
4. The laser beam 10 is guided to couple into the water jet to form a water beam fiber 9, provided that total reflection is satisfied.

Claims (6)

1. High power laser beam high efficiency coupling water guide laser structure, including biography can module (1), biography can fixed module, coupling liquid chamber module and nozzle module, its characterized in that:
the upper end of the energy transmission module (1) is connected with a high-power energy transmission optical fiber (1-1), and the lower end of the energy transmission module (1) is provided with an energy transmission optical fiber head, a self-focusing lens (2) or a diamond joint for transmitting laser beams;
the energy transmission fixing module comprises a fixed middle block (3) coaxially mounted with the energy transmission module (1), the fixed middle block (3) is coaxially mounted in a connecting body (4), a flow blocking block (5) coaxially mounted on the fixed middle block (3) is arranged at the bottom of the connecting body (4), and a sealing ring (13) is arranged between the flow blocking block (5) and the connecting body (4);
the nozzle module comprises a nozzle seat (6) arranged below the energy transfer module (1) and the energy transfer fixing module, and a nozzle (7) coaxial with the lower end of the energy transfer module (1) is arranged on the nozzle seat (6);
the coupling liquid cavity module comprises a low-pressure steady flow liquid layer (8) arranged between the flow blocking block (5) and the fixed and middle block (3) and the nozzle seat (6), and the low-pressure steady flow liquid layer (8) is sprayed out from the nozzle (7) to form water jet;
the lower end of the energy transfer module (1) is suspended in the low-pressure steady flow liquid layer (8) at the bottom of the centering block (3) or the lower end of the energy transfer module (1) extends into and is fixed in a spray hole of the nozzle (7) so as to couple the laser beam (10) into the water jet to form a water beam optical fiber (9).
2. The high power laser beam high efficiency coupling water-guided laser structure of claim 1, characterized in that: and a circular spray hole of the nozzle (7) is matched with the excircle of the lower end of the energy transmission module (1).
3. The high power laser beam high efficiency coupling water-guided laser structure of claim 2, characterized in that: the lower end of the energy transfer module (1) is internally tangent to a regular hexagon spray hole (7-1), a regular pentagon spray hole (7-2), a square spray hole (7-3), a regular triangle spray hole (7-4), an oval spray hole (7-5) or a petal-shaped spray hole of the nozzle (7).
4. The high power laser beam high efficiency coupling water-guided laser structure of claim 2, characterized in that: the concentric ring sleeve (13) is supported in a circular spray hole of the nozzle (7) through thin fins (12) with uniform circumference, and the extending end of the energy transfer module (1) is positioned in the ring sleeve (13).
5. The high-power laser beam high-efficiency coupling water-guided laser structure according to any one of claims 1 to 4, characterized in that: the material of the nozzle (7) is selected from tool steel, sapphire or stainless steel and is manufactured by high-precision machining or high-precision 3D printing.
6. The method for efficiently coupling the high-power laser beam with the water-guided laser is characterized by adopting the high-power laser beam efficient coupling water-guided laser structure as claimed in any one of claims 1 to 4, and the scheme that the jet flow and the laser beam (10) are coupled into the water beam optical fiber (9) comprises the following steps:
①, starting the high-pressure liquid supply module to form a low-pressure liquid stabilizing layer (8) coupled with the liquid cavity module, and ejecting the low-pressure liquid stabilizing layer (8) downwards from the nozzle (7) to form a stable water jet (water beam);
②, selecting coupling mode
A. The lower end of the energy transfer module (1) is suspended in the low-pressure steady flow liquid layer (8) and the diameter d of the fiber core of the energy transfer module (1) is matchedcOr diameter of energy transmission fiber head and diameter d of water jetjThe wavelength, the power and the frequency of the laser beam (10), the depth of the lower end of the energy transmission module (1) inserted into the low-pressure steady flow liquid layer (8), and the nozzle distance from the lower end of the energy transmission module (1) to the nozzle (7);
B. the lower end of the energy transfer module (1) extends into the nozzle of the nozzle (7) and is fixed in position, and the diameter d of the fiber core of the energy transfer module (1) is well matchedcOr diameter of energy transmission fiber head and diameter d of water jetjWavelength, power and frequency of the laser beam (10);
③, starting a laser emitter, transmitting a laser beam (10) to an energy transmission optical fiber head, a self-focusing lens (2) or a diamond joint through an energy transmission optical fiber (1-1), and emitting the laser beam (10) downwards after focusing through the energy transmission optical fiber head, the self-focusing lens (2) or the diamond joint;
④, under the condition of satisfying total reflection, the laser beam (10) is guided and coupled into the water jet to form a water beam fiber (9).
CN202010351836.1A 2020-04-28 2020-04-28 High-power laser beam efficient coupling water-guided laser structure and method Pending CN111408837A (en)

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CN114043074A (en) * 2021-11-25 2022-02-15 哈尔滨工业大学 Small water-guide laser processing system and method with flexible processing capacity

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CN110125540A (en) * 2019-05-15 2019-08-16 哈尔滨工业大学 A kind of method, system and its equipment of water guiding laser processing workpiece
CN110883424A (en) * 2019-11-22 2020-03-17 桂林电子科技大学 Water-guided laser flexible micromachining system and method
CN212443728U (en) * 2020-04-28 2021-02-02 桂林电子科技大学 High-power laser beam high-efficiency coupling water-guide laser structure

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112705839A (en) * 2020-12-31 2021-04-27 桂林电子科技大学 Water-guided laser device based on positioning coupling
CN112705839B (en) * 2020-12-31 2024-05-28 桂林电子科技大学 Water guide laser device based on positioning coupling
CN114043074A (en) * 2021-11-25 2022-02-15 哈尔滨工业大学 Small water-guide laser processing system and method with flexible processing capacity
CN114043074B (en) * 2021-11-25 2024-05-03 哈尔滨工业大学 Small water-guided laser processing system and method with flexible processing capability

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