CN111352051A - Magnetic sensor and application method thereof - Google Patents
Magnetic sensor and application method thereof Download PDFInfo
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- CN111352051A CN111352051A CN201811575805.3A CN201811575805A CN111352051A CN 111352051 A CN111352051 A CN 111352051A CN 201811575805 A CN201811575805 A CN 201811575805A CN 111352051 A CN111352051 A CN 111352051A
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- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 25
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims description 25
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims description 25
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims description 25
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 25
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- 229910001172 neodymium magnet Inorganic materials 0.000 claims description 9
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- FACXGONDLDSNOE-UHFFFAOYSA-N buta-1,3-diene;styrene Chemical compound C=CC=C.C=CC1=CC=CC=C1.C=CC1=CC=CC=C1 FACXGONDLDSNOE-UHFFFAOYSA-N 0.000 claims description 5
- 229920001971 elastomer Polymers 0.000 claims description 5
- 229920000468 styrene butadiene styrene block copolymer Polymers 0.000 claims description 5
- 239000002131 composite material Substances 0.000 claims description 4
- 229920005839 ecoflex® Polymers 0.000 claims description 4
- 230000005426 magnetic field effect Effects 0.000 claims description 4
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- 239000010409 thin film Substances 0.000 claims description 3
- QJVKUMXDEUEQLH-UHFFFAOYSA-N [B].[Fe].[Nd] Chemical compound [B].[Fe].[Nd] QJVKUMXDEUEQLH-UHFFFAOYSA-N 0.000 claims description 2
- KPLQYGBQNPPQGA-UHFFFAOYSA-N cobalt samarium Chemical compound [Co].[Sm] KPLQYGBQNPPQGA-UHFFFAOYSA-N 0.000 claims description 2
- QUSDAWOKRKHBIV-UHFFFAOYSA-N dysprosium iron terbium Chemical compound [Fe].[Tb].[Dy] QUSDAWOKRKHBIV-UHFFFAOYSA-N 0.000 claims description 2
- 239000000843 powder Substances 0.000 claims description 2
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 claims description 2
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- 239000010410 layer Substances 0.000 description 60
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 9
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/066—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices field-effect magnetic sensors, e.g. magnetic transistor
Abstract
The invention provides a magnetic sensor, which comprises a flexible body, wherein the flexible body has electric conductivity, and the flexible body contains a magnetic material. When the flexible body is in a working state, an external magnetic field acts on the magnetic sensor, the magnetic material in the flexible body is acted by the magnetic field to cause the flexible body to deform, so that an electric signal of the flexible body is changed, and the detection of the magnetic field is realized by detecting the change of the electric signal of the flexible body. The magnetic sensor has the advantages of simple structure, low cost, sensitive response to a magnetic field, wide detectable external magnetic field range and good application prospect in the technical field of magnetic sensors.
Description
Technical Field
The invention relates to a magnetic field detection technology, in particular to a magnetic sensor and a using method thereof.
Background
The magnetic sensor is an important component of a sensor, and converts a magnetic signal into an electrical signal and outputs other information in a desired form. Through the development of the last century, magnetic sensors play more and more important roles in various aspects of human social life, and billions of magnetic sensors are put into use every year around the world. Along with the increasingly perfect magnetic sensors, various industries have higher and higher requirements on the magnetic sensors, especially the detection precision of the magnetic sensors is higher and higher, and meanwhile, the application range of the magnetic sensors is required to be wider and wider, so that the application field is further widened to meet the requirements of practical application. Therefore, it is one of the new development directions of magnetic sensors to have high detection accuracy and wide use range, and the magnetic sensors are also receiving more and more attention from researchers.
At present, the common magnetic sensors mainly include Hall (Hall) sensors, fluxgates, current-sensing magnetic sensors, magneto-resistance sensors, and the like. From the current research, the detection accuracy and the measurement range of the magnetic sensor at room temperature are generally considered. Therefore, it is still a challenge to prepare a magnetic sensor that can achieve both high detection accuracy and a wide detection range, and the search for a new magnetic sensor is one of the directions of efforts at present.
Disclosure of Invention
In view of the above technical state, the present invention provides a magnetic sensor including a flexible body having electrical conductivity and containing a magnetic material therein;
when the flexible body is in a working state, an external magnetic field acts on the magnetic sensor, the magnetic material in the flexible body is acted by the magnetic field to cause the flexible body to deform, so that an electric signal of the flexible body is changed, and the detection of the magnetic field is realized by detecting the change of the electric signal of the flexible body.
The flexible body is flexible, i.e. capable of undergoing deformation, e.g. stretching, twisting, folding, etc. The material of the flexible body is not limited. Preferably, the flexible body is made of a rubber material, and for example, one or a composite of two or more of dimethyl siloxane (PDMS), Ecoflex rubber, styrene-butadiene-styrene (SBS), and the like can be used.
The magnetic material is not limited, and comprises one or more of neodymium iron boron, terbium dysprosium iron (TeDyFe) and samarium cobalt. The magnetic material can be powder, block and the like. The structures of the magnetic material and the flexible body are not limited, and as an implementation manner, the magnetic material is distributed in the flexible body in a granular shape, and preferably, the magnetic material is uniformly fixed in the flexible body in a granular shape.
The electrical signal refers to a parameter characterizing the electrical conductivity of the flexible body, including but not limited to resistance, voltage, current, impedance, and the like.
The magnetic field response sensitivity can be adjusted by adjusting the content of the magnetic material in the flexible body, and preferably, the mass ratio of the flexible body to the magnetic material is 1: 1-20: 1.
The magnetic sensor comprises a first flexible layer and a second flexible layer, wherein the second flexible layer is located on the surface of the first flexible layer, the first flexible layer is conductive, and the second flexible layer contains a magnetic material; during operating condition, external magnetic field acts on magnetic sensor, and the magnetic material in the second flexible layer receives the magnetic field effect, causes the second flexible layer to take place deformation to drive first flexible layer and take place deformation, the signal of telecommunication that causes first flexible layer changes, realizes the detection in magnetic field through the change of the signal of telecommunication that detects first flexible layer.
In one implementation, the first flexible layer includes a first flexible material and a conductive material, wherein a conductivity property of the conductive material mainly or entirely determines a conductivity of the first flexible layer.
In order to improve the sensitivity of the magnetic sensor, it is preferable that the conductive material in the first flexible layer is arranged in a granular orientation, that is, arranged in a certain direction, and in this state, when an external magnetic field acts on the magnetic sensor to cause deformation of the second flexible layer, the structure of the conductive particles therein is sensitive to the deformation response, so that the sensitivity of the electrical property of the first flexible layer changing along with the deformation is improved, that is, the detection accuracy of the magnetic sensor is improved.
As one implementation manner, the conductive material has a magnetic field response characteristic, and the preparation process of the first flexible layer includes the following steps:
the first flexible material is in a flowing state; uniformly mixing the first flexible material and the conductive material particles to obtain a mixture; forming a thin film on the surface of the substrate by the mixture, and applying a certain magnetic field to align the conductive particles in the mixture according to the magnetic field orientation; and finally, curing the mixture to obtain the first flexible layer.
The method for forming the thin film on the surface of the substrate by the mixture is not limited, and includes a casting method, a spin coating method and the like.
As one implementation manner, the preparation process of the second flexible layer includes the following steps:
the second flexible material is in a flowing state; uniformly mixing the second flexible material with the magnetic material particles to obtain a mixture; and forming a film on the surface of the first flexible layer by the mixture, and then curing the mixture to obtain the second flexible body. The method for forming the film on the surface of the first flexible layer by the mixture is not limited, and includes a casting method, a spin coating method and the like.
The use method of the magnetic sensor of the present invention comprises the steps of:
testing an electric signal of the magnetic sensor without applying a magnetic field;
applying a magnetic field to the magnetic sensor, and testing an electric signal of the magnetic sensor;
and detecting the applied magnetic field based on a change in the electrical signal before and after the magnetic field is applied.
Compared with the prior art, the invention adopts the flexible electric conductor and the magnetic material to form the magnetic sensor, when an external magnetic field acts on the magnetic sensor, the magnetic material in the flexible body is acted by the magnetic field to cause the flexible body to deform, thereby causing the electric signal of the flexible body to change, and realizing the detection of the magnetic field by detecting the change of the electric signal of the flexible body. The magnetic sensor has the advantages of simple structure, low cost and sensitive response to a magnetic field, and the response sensitivity of the magnetic field can be adjusted by adjusting the content of the magnetic material in the flexible conductor, so that the external detectable magnetic field range can be from micro Tesla (mu T) to Tesla (T) magnitude, and the magnetic sensor can realize high-sensitivity and wide-range magnetic field detection and has good application prospect in the technical field of magnetic sensors.
Drawings
Fig. 1 is a schematic structural view of a magnetic sensor in embodiment 1 of the present invention.
Fig. 2 is a graph showing the rate of change in resistance of the magnetic sensor before and after the application of a magnetic field in example 1 of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the following examples and drawings, which are intended to facilitate the understanding of the present invention and are not intended to limit the present invention in any way.
The reference numerals in fig. 1 are: the flexible magnetic material comprises a first flexible layer 1, a conductive material 2, a magnetic material 3 and a second flexible layer 4.
Example 1:
in this embodiment, the magnetic sensor has a structure as shown in fig. 1, and includes a first flexible layer 1 and a second flexible layer 4 on a surface of the first flexible layer 1. The first flexible layer 1 has electrical conductivity. The second flexible layer comprises a magnetic material 3.
In this embodiment, the first flexible layer includes a first flexible material PDMS and a conductive material Ag @ Ni (i.e., silver-coated nickel in a core-shell structure, and a silver layer coating the nickel core layer), and the Ag @ Ni particles are closely and directionally distributed in the PDMS.
The second flexible layer comprises a second flexible material PDMS and a magnetic material NdFeB, wherein the NdFeB is uniformly fixed in the PDMS in a granular mode.
During operating condition, external magnetic field acts on magnetic sensor, and the magnetic material in the second flexible layer receives the magnetic field effect, causes the second flexible layer to take place deformation to drive first flexible layer and take place deformation, the signal of telecommunication that causes first flexible layer changes, realizes the detection in magnetic field through the change of the signal of telecommunication that detects first flexible layer.
The preparation method of the magnetic sensor comprises the following steps:
(1) preparing the first flexible layer
The PDMS main agent is in a flowing state, and is prepared from the following components in a mass ratio of 10: 1 mixing to form PDMS mixed liquid;
mixing PDMS mixed liquor and magnetic powder Ag @ Ni according to a mass ratio of 5: 1, uniformly mixing, casting on a glass sheet, magnetizing in a 20 millitesla magnetic field for 5 minutes, and finally drying at 120 ℃ for 1 hour and taking out to obtain a first flexible layer;
two pieces of high-temperature adhesive tapes with the size of 5mm × 5mm are adhered to two ends of the surface of the first flexible layer, and gaps of electrodes at two ends are reserved.
(2) Preparing the second flexible layer
The PDMS main agent is in a flowing state, and is prepared from the following components in a mass ratio of 10: 1 mixing to form PDMS mixed liquid;
mixing PDMS mixed solution and magnetic powder NdFeB according to the mass ratio of 10: 1, uniformly mixing, throwing the mixture on the surface of the first flexible layer obtained in the step (1) by using a spin coater at a rotating speed of 300 revolutions per minute, drying at 120 ℃ for 1 hour, and taking out;
(3) preparation of electrodes
And (2) connecting silver wires at the gaps of the electrodes at the two ends reserved in the first flexible layer in the step (1) by adopting silver adhesive to prepare the electrodes at the two ends.
The use method of the magnetic sensor comprises the following steps:
(1) testing the resistance R of the magnetic sensor by using a semiconductor parameter instrument without applying an external magnetic field;
(2) applying external magnetic fields with different sizes in the interval of 1 mu T-1T to the magnetic sensor, and testing the resistance R' of the magnetic sensor by adopting a semiconductor parameter instrument, wherein the testing conditions are the same as those in the step (1);
(3) comparing the resistance value R obtained in step (2) under different magnetic fields with the resistance value R 'obtained in step (1), the resistance change rate under different magnetic fields (Δ R/R × 100%, Δ R ═ R' -R) is obtained as shown in fig. 2, and when the external magnetic field is greater than 100mT, the resistance change rate and the applied external magnetic field are substantially in a linear relationship, and the applied magnetic field is detected based on the resistance change rate.
Example 2:
in this embodiment, the magnetic sensor has a structure as shown in fig. 1, and includes a first flexible layer 1 and a second flexible layer 4 on a surface of the first flexible layer 1. The first flexible layer 1 has electrical conductivity. The second flexible layer comprises a magnetic material 3.
In this embodiment, the first flexible layer includes a first flexible material PDMS and conductive material Ag nanowires, and the Ag nanowires are distributed in the PDMS in a close arrangement.
The second flexible layer comprises a second flexible material PDMS and a magnetic material NdFeB, wherein the NdFeB is uniformly fixed in the PDMS in a granular mode.
During operating condition, external magnetic field acts on magnetic sensor, and the magnetic material in the second flexible layer receives the magnetic field effect, causes the second flexible layer to take place deformation to drive first flexible layer and take place deformation, the signal of telecommunication that causes first flexible layer changes, realizes the detection in magnetic field through the change of the signal of telecommunication that detects first flexible layer.
The preparation method of the magnetic sensor comprises the following steps:
(1) preparing the first flexible layer
The PDMS main agent is in a flowing state, and is prepared from the following components in a mass ratio of 10: 1 mixing to form PDMS mixed liquid;
mixing PDMS mixed solution and Ag nano-wires according to the mass ratio of 5: 1, uniformly mixing, throwing the mixture on a glass sheet by a glue throwing machine at the rotating speed of 1000 rpm, and finally drying the glass sheet at 120 ℃ for 1 hour and taking out the glass sheet to obtain a first flexible layer;
two pieces of high-temperature adhesive tapes with the size of 5mm × 5mm are adhered to two ends of the surface of the first flexible layer, and gaps of electrodes at two ends are reserved.
(2) Preparing the second flexible layer
The PDMS main agent is in a flowing state, and is prepared from the following components in a mass ratio of 10: 1 mixing to form PDMS mixed liquid;
mixing PDMS mixed solution and magnetic powder NdFeB according to the mass ratio of 10: 1, uniformly mixing, throwing the mixture on the surface of the first flexible layer obtained in the step (1) by using a spin coater at a rotating speed of 300 revolutions per minute, drying at 120 ℃ for 1 hour, and taking out;
(3) preparation of electrodes
And (2) connecting silver wires at the gaps of the electrodes at the two ends reserved in the first flexible layer in the step (1) by adopting silver adhesive to prepare the electrodes at the two ends.
The magnetic sensor is used as follows:
(1) testing the resistance R of the magnetic sensor by using a semiconductor parameter instrument without applying an external magnetic field;
(2) applying external magnetic fields with different sizes in the interval of 1 muT-1T to the magnetic sensor, and testing the resistance R' of the magnetic sensor by using a semiconductor parameter instrument under the same test conditions as those in the step (1).
(3) The resistance values under different magnetic fields obtained in step (2) are compared with the resistance values obtained in step (1) to obtain the rate of change of resistance under different magnetic fields (Δ R/R × 100%, Δ R ═ R' -R), and the applied magnetic field is detected from the rate of change of resistance.
Example 3:
this example is substantially the same as example 1, except that the mass ratio of the PDMS mixed solution to the magnetic powder NdFeB in the preparation process is 5: 1.
the magnetic sensor was used in the same manner as in example 1. The detection sensitivity of this magnetic sensor is improved as compared with example 1.
The embodiments described above are intended to illustrate the technical solutions of the present invention in detail, and it should be understood that the above-mentioned embodiments are only specific embodiments of the present invention, and are not intended to limit the present invention, and any modification, supplement or similar substitution made within the scope of the principles of the present invention should be included in the protection scope of the present invention.
Claims (11)
1. A magnetic sensor comprising a flexible body, characterized by: the flexible body has electrical conductivity, and the flexible body contains therein a magnetic material;
when the flexible body is in a working state, an external magnetic field acts on the magnetic sensor, the magnetic material in the flexible body is acted by the magnetic field to cause the flexible body to deform, so that an electric signal of the flexible body is changed, and the detection of the magnetic field is realized by detecting the change of the electric signal of the flexible body.
2. A magnetic sensor as in claim 1, wherein: the magnetic material is powder or block;
preferably, the magnetic material is distributed in the flexible body in a granular shape;
further preferably, the magnetic material is uniformly fixed in the flexible body in a granular form.
3. A magnetic sensor as in claim 1, wherein: the magnetic sensor comprises a first flexible layer and a second flexible layer positioned on the surface of the first flexible layer;
the first flexible layer has electrical conductivity, and the second flexible layer contains a magnetic material therein;
during the operating condition, external magnetic field acts on magnetic sensor, and the magnetic material in the second flexible layer receives the magnetic field effect, arouses the second flexible layer to take place deformation to drive first flexible layer and take place deformation, arouse the signal of telecommunication of first flexible layer to change, realize the detection in magnetic field through the change of the signal of telecommunication that detects first flexible layer.
4. A magnetic sensor as in claim 3, wherein: the first flexible layer includes a first flexible material and a conductive material.
5. A magnetic sensor as in claim 4, wherein: the conductive material in the first flexible layer is arranged in a granular orientation.
6. A magnetic sensor as in claim 5, wherein: the conductive material has a magnetic field response characteristic, and the preparation process of the first flexible layer comprises the following steps:
bringing the first flexible material into a fluid state; uniformly mixing the first flexible material and conductive material particles to obtain a mixture; forming a thin film on the surface of the substrate by the mixture, and applying a certain magnetic field to align the conductive particles in the mixture according to the magnetic field orientation; and finally, curing the mixture to obtain the first flexible layer.
7. A magnetic sensor as in claim 3, wherein: the preparation process of the second flexible layer comprises the following steps:
bringing the second flexible body material into a fluid state; uniformly mixing the second flexible material with the magnetic material particles to obtain a mixture; and forming a film on the surface of the first flexible layer by the mixture, and then curing the mixture to obtain the second flexible body.
8. A magnetic sensor as claimed in any one of claims 1 to 7, wherein: the flexible body material is one or more than two composite materials of PDMS, Ecoflex rubber and styrene-butadiene-styrene;
the first flexible material is one or more composite materials of PDMS, Ecoflex rubber and styrene-butadiene-styrene;
the second flexible material is one or more of composite materials of PDMS, Ecoflex rubber and styrene-butadiene-styrene.
9. A magnetic sensor as claimed in any one of claims 1 to 7, wherein: the magnetic material comprises one or more of neodymium iron boron, terbium dysprosium iron and samarium cobalt.
10. A magnetic sensor as claimed in any one of claims 1 to 7, wherein: the electric signal comprises one or more of resistance, voltage, current and impedance.
11. Use of a magnetic sensor as claimed in any one of claims 1 to 7, characterized in that: the method comprises the following steps:
testing an electric signal of the magnetic sensor without applying a magnetic field;
applying a magnetic field to the magnetic sensor, and testing an electric signal of the magnetic sensor;
and detecting the applied magnetic field based on a change in the electrical signal before and after the magnetic field is applied.
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| CN201811575805.3A CN111352051A (en) | 2018-12-22 | 2018-12-22 | Magnetic sensor and application method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113418553A (en) * | 2021-06-11 | 2021-09-21 | 深圳大学 | Multi-modal sensor, preparation method thereof and intelligent device |
| CN114089236A (en) * | 2021-12-02 | 2022-02-25 | 邯郸学院 | Optical fiber magnetic field sensor |
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| CN104697678A (en) * | 2015-03-09 | 2015-06-10 | 中国科学院宁波材料技术与工程研究所 | Sensor for detecting weak stress and preparation method of sensor |
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2018
- 2018-12-22 CN CN201811575805.3A patent/CN111352051A/en active Pending
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| CN102427111A (en) * | 2011-11-28 | 2012-04-25 | 西交利物浦大学 | Flexible layered electromagnetic element |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113418553A (en) * | 2021-06-11 | 2021-09-21 | 深圳大学 | Multi-modal sensor, preparation method thereof and intelligent device |
| CN113418553B (en) * | 2021-06-11 | 2023-05-30 | 深圳大学 | Multi-mode sensor, preparation method thereof and intelligent device |
| CN114089236A (en) * | 2021-12-02 | 2022-02-25 | 邯郸学院 | Optical fiber magnetic field sensor |
| CN114089236B (en) * | 2021-12-02 | 2024-02-02 | 邯郸学院 | Optical fiber magnetic field sensor |
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Application publication date: 20200630 |
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