CN104697678A - Sensor for detecting weak stress and preparation method of sensor - Google Patents
Sensor for detecting weak stress and preparation method of sensor Download PDFInfo
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- CN104697678A CN104697678A CN201510102333.XA CN201510102333A CN104697678A CN 104697678 A CN104697678 A CN 104697678A CN 201510102333 A CN201510102333 A CN 201510102333A CN 104697678 A CN104697678 A CN 104697678A
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Abstract
The invention provides a sensor for detecting weak stress. The stress sensor comprises a supporting housing, and an inductive coil positioned in the supporting housing; the supporting housing comprises a flexible supporting surface; a flexible bulge is connected to be above the flexible supporting surface; a magnetic field unit for providing a magnetic field to the inductive coil is connected to be below the flexible supporting surface; when in a working state, the outside weak stress acts on the flexible bulge, the flexible bulge generates pressure to drive the flexible supporting surface to deform to enable the change of a magnetic flux of the magnetic field unit on the inductive coil, and then the coil impedance changes and outputted from two ends of the coil, so that the outside weak stress straining can be detected, such as the pressure generated by the pulse fluctuating, air flow impacting or voice volume caused vibrating. The stress sensor has the advantages of being simple in structure, low in cost and high in sensitivity, and has a good application prospect.
Description
Technical field
The present invention relates to faint stress detection technology, being specifically related to a kind of sensor for detecting faint stress and preparation method thereof, have a good application prospect in fields such as weak pulsatile detection, noise measuring and flow detection.
Background technology
Pressure transducer is one of sensor commonly used in industry, is widely used in field of industrial automatic control, relates to numerous industries such as water conservancy and hydropower, railway traffic, intelligent building, production automatic control, Aero-Space, military project, lathe.
Along with the development of flexible electronic and wearable device, strain gauge more and more receives the concern of people.Traditional pressure transducer can be divided into several large classes such as pressure resistance type, condenser type, piezoelectric type.
Piezoelectric pressure indicator is the sensor made according to piezoelectric effect, has the advantages such as structure is simple, reproducible, precision is higher, sensitivity is good, wide dynamic range, good mechanical performance, but there is signal acquisition circuit complexity, high in cost of production deficiency.
The principle that piezoresistive pressure sensor utilizes the change of the electrical resistance ambient pressure of metal or semiconductor and changes carries out work.The piezoresistive pressure sensor mainly silicon substrate pressure sensor of current application, has and is widely used, wide dynamic range, is beneficial to the advantages such as integrated.But the serviceability temperature of silicon substrate pressure sensor, generally lower than 125 DEG C, can not at high temperature use, and measured low pressure limit is generally 1000Pa, can not measure ultra-miniature pressure.
The principle that capacitance pressure transducer, utilizes electric capacity to change with pressure change realizes the detection of ambient pressure, has the advantages such as structure is simple, low in energy consumption, the linearity is good, volume is little.But capacitance-type strain gauge force snesor is vulnerable to connect the effect of parasitic capacitance in wire, therefore requires higher to metering circuit.
Above-mentioned strain gauge all has in the industry to be applied comparatively widely, but the sensor being applicable to measuring faint stress or faint strain is but uncommon, such as, for detecting pulse generation etc.
Summary of the invention
For the above-mentioned state of the art, the present invention aims to provide a kind of sensor for detecting faint stress.
In order to realize above-mentioned technical purpose, the technical scheme that the present inventor is provided in the present invention is: a kind of sensor for detecting faint stress, comprises support housing, and is positioned at the telefault of support housing inside; Described telefault comprises magnetic core and air core coil, and magnetic core is inner through air core coil;
Described support housing comprises flexible support face, connects flexible raised above flexible support face, and flexible support connects magnetic field units below face, for providing magnetic field for telefault;
During duty, extraneous faint effect of stress is on flexible raised, flexible raised generation compressive stress drives flexible support face that deformation occurs, magnetic field units is caused to act on magnetic flux change in telefault, coil impedance changes thereupon, coil two ends are impedance output, and coil two ends export this impedance.
The source of extraneous faint stress is not limit, and can be the fluctuating of pulse, the vibration etc. that causes of the collision of air-flow, wave volume.
Described flexible support plane materiel material is not limit, and can be the flexible materials such as dimethyl silicone polymer (PDMS), rubber.
Described flexible raised material is not limit, and can be the flexible material such as PDMS, rubber.
When the flexibility of flexible support plane materiel material is larger, is conducive to flexible support face and comparatively large deformation occurs, thus improve stress sensing sensitivity.Therefore, as preferably, the flexibility of described flexible support plane materiel material is greater than the flexibility of flexible raised material.
Described magnetic field units is used for providing magnetic field for telefault, and its material is not limit, and comprises flexible material and non-flexible material.As preferably, described magnetic field units is flexible material.As the preferred implementation of one, described magnetic field units is made up of with the magnetic be distributed in PDMS flexible material PDMS.Described magnetic includes but not limited to permanent magnetism powder, such as ferrite etc.
Described magnetic core is magnetic material, includes but not limited to magnetic metal, magnetic alloy, amorphous magnetic material etc.
Amorphous magnetostriction materials are the one in amorphous magnetic material.Amorphous magnetostriction materials have good giant magnetic impedance and Giant Stress Impedance effect, and compared with Giant Stress Impedance effect, giant magnetoresistance effect is more obvious, and namely faint changes of magnetic field will cause the impedance of amorphous magnetostriction materials to change.Therefore, in the present invention, magnetic core selects amorphous magnetostriction materials to be conducive to improving stress sensing sensitivity.
Described amorphous magnetostriction materials can be Fe-based amorphous soft magnetic material or cobalt base amorphous soft magnetic material, include but not limited to FeSiB, FeCuNbSiB, FeNiSiB, FeCoSiB, GdFeCo, CoSiB etc.
Described air core coil structure is not limit, and can be that enameled wire detours in hollow cylinder periphery and formed.
In flexible support face, be positioned at flexible raised immediately below the deformation of position maximum, therefore, as preferably, described magnetic field units be positioned at flexible raised immediately below, be conducive to improving sensing sensitivity.
The shape of described support housing is not limit, and can be hollow cylinder (or being called cydariform), its shape of cross section not be limit, comprise circle, rectangle, polygon etc., also can be hollow cone, its shape of cross section not be limit, and comprises circle, rectangle, polygon etc.
Described raised face (RF) shape is not limit, and comprises sphere, elliptical area, the face of cylinder etc.
Described impedance output is connected with electric impedance analyzer, or impedance output and resistance form wheatstone bridge configuration, and impedance output is a brachium pontis of Wheatstone bridge, the output of Wheatstone bridge and voltage table or reometer or electric impedance analyzer are connected.
Present invention also offers a kind of method preparing above-mentioned strain gauge, wherein, described support housing material is PDMS, flexible raised material is PDMS, magnetic field units is made up of PDMS and the magnetic be distributed in PDMS, comprise the steps:
(1) magnetic field units is prepared
PDMS host and hardening agent form PDMS mixed liquor, are mixed by PDMS mixed liquor with magnetic, dry, then take out and magnetize in magnetic field in 60 ~ 120 DEG C.
In step (1), as preferably, in described PDMS mixed liquor, the mass ratio of PDMS host and hardening agent is 10:1 ~ 2:1.
In step (1), as preferably, described PDMS mixed liquor and the mass ratio of magnetic are 10:1 ~ 2:1.
In step (1), as preferably, described magnetic field intensity is 1 ~ 2 tesla.
In step (1), as preferably, described drying time is 0.5 ~ 4 hour.
(2) support housing is prepared
Support housing is grouped into by housing base and housing upper, and described housing upper divides the housing remainder comprised except housing base, namely comprises flexible support face.
(2-1) prepare housing upper to divide
Adopt the housing upper described in mould preparation to divide, the mould that housing upper divides, is made up of mold and bed die; Be poured in bed die after PDMS host being mixed with hardening agent, then magnetic field units be placed on bed die lower center position, then fasten mold, after drying, the housing upper obtaining integrated magnetic field unit divides 8.
In step (2-1), as preferably, the mass ratio of PDMS host and hardening agent is 15:1 ~ 5:1.
In step (2-1), as preferably, described bake out temperature is 60 ~ 120 DEG C.
In step (2-1), as preferably, described drying time is 0.5 ~ 3 hour.
(2-2) housing base is prepared
Adopt the housing base described in mould preparation; Be poured in after PDMS host is mixed with hardening agent in housing base mould, then telefault is placed in the lower center position of housing base mould, the housing upper of the integrated magnetic field unit that back-off step (2-1) is obtained divides again, after drying, obtain the support housing of integrated magnetic field unit and telefault.
In step (2-2), as preferably, the mass ratio of PDMS host and hardening agent is 10:1 ~ 3:1.
In step (2-2), as preferably, described bake out temperature is 60 ~ 100 DEG C.
In step (2-2), as preferably, described drying time is 0.5 ~ 3 hour.
(3) projection is prepared
Adopt the projection described in mould preparation, PDMS host is mixed with hardening agent and is placed in male mold, take out the demoulding after oven dry, obtain projection.
In step (3), as preferably, the mass ratio of PDMS host and hardening agent is 10:1 ~ 2:1.
In step (3), as preferably, described bake out temperature is 60 ~ 120 DEG C;
In step (3), as preferably, described drying time is 0.5 ~ 4 hour;
(4) projection that step (3) is obtained is placed in the upper surface in flexible support face, the mixed liquor of link position place coating PDMS host and hardening agent, then dry, projection is bonded on flexible support face.
In step (4), as preferably, the mass ratio of PDMS host and hardening agent is 10:1 ~ 2:1;
In step (4), as preferably, described bake out temperature is 60 ~ 120 DEG C.
In sum, the present invention adopts flexible supporter, flexible raised, magnetic field units and telefault, by structural design, by faint for external world effect of stress on flexible raised, flexible raised generation compressive stress drives flexible support face that deformation occurs, magnetic field units is caused to act on magnetic flux change in telefault, coil impedance changes thereupon, exports this impedance by coil two ends, thus achieves the detection of faint ess-strain to external world.This pressure sensor structure is simple, cost is low, highly sensitive, especially when the magnetic core in telefault is for having giant magnetoimpedance material, the Weak magentic-field change produced by faint pressure signal can cause obvious coil impedance to change, thus can improve detection sensitivity further.In addition, this pressure transducer bio-compatibility is good, and has wireless exploration compatibility, therefore the various faint stress of detection or faint strain is applicable to, such as, for detecting the stress that pulse produces, the stress that air-flow produces, and the stress etc. that sound produces, have a good application prospect.
Accompanying drawing explanation
Fig. 1 is for detecting the structural representation of the sensor of faint stress in the embodiment of the present invention;
Fig. 2 is the lower die structure schematic diagram for the preparation of flexible supporter lower part in Fig. 1;
Fig. 3 is the upper die structure schematic diagram for the preparation of flexible supporter lower part in Fig. 1;
Fig. 4 is the result figure utilizing pressure transducer shown in Fig. 1 to detect pulse.
Specific embodiments
Below in conjunction with accompanying drawing and embodiment, illustrate the present invention further.Should be understood that these embodiments are only for illustration of the present invention, and be not used in and limit the scope of the invention.
Reference numeral in Fig. 1 to 3 is: the housing upper of flexible support face 1, telefault 2, housing sidewall 3, magnetic field units 4, projection 5, position 6, position 7, integrated magnetic field unit divides 8.
In the present embodiment, as shown in Figure 1, comprise support housing for the sensor detecting faint stress, and the telefault 2 being positioned at support housing inside forms.
Telefault 2 comprises magnetic core and air core coil, and magnetic core is inner through air core coil.Magnetic core is cobalt base amorphous soft magnetic material.Coil is that copper cash detours 100 circles and making.
Support housing is hollow cylindrical, also known as " drum type " structure.Cylinder end face is flexible support face 1.Connect flexible raised 5 above flexible support face 1, connect magnetic field units 4 below flexible support face, magnetic field units 4 is for providing magnetic field for telefault 2.Flexible raised in elliptical area.
Flexible support plane materiel material is PDMS.Flexible raised material is PDMS.Magnetic field units is made up of with the magnetic be distributed in PDMS PDMS.
Coil two ends are connected with electric impedance analyzer, or coil two ends and resistance form wheatstone bridge configuration, and coil two ends are a brachium pontis of Wheatstone bridge, and the output of Wheatstone bridge and voltage table or reometer or electric impedance analyzer are connected.
The preparation method of above-mentioned strain gauge comprises the steps:
(1) magnetic field units is prepared
PDMS host is in a liquid state, form PDMS mixed liquor for 10:1 mixes by PDMS host in mass ratio with hardening agent, by PDMS mixed liquor with magnetic in mass ratio for 2:1 mixes, dry in 120 DEG C after 1 hour and take out, then magnetize in 2 Tesla magnetic fields, obtain magnetic field units;
(2) support housing is prepared
Support housing is grouped into by housing base and housing upper, and described housing upper divides the housing remainder comprised except housing base, namely comprises flexible support face 1 and housing sidewall 3;
(2-1) prepare housing upper to divide
Adopt the housing upper described in mould preparation to divide, the mould structure schematic diagram that housing upper divides as shown in Figure 2, is made up of mold and bed die; Be 10:1 mix after be poured in bed die with hardening agent according to mass ratio by PDMS host, then the magnetic field units that step (1) is obtained is placed on bed die lower center position, as shown in position in Fig. 26, fasten mold again, dry 3 hours at 120 DEG C, the housing upper obtaining integrated magnetic field unit divides 8.
(2-2) housing base is prepared
Adopt the housing base described in mould preparation, housing base mould structure schematic diagram as shown in Figure 3; Be 10:1 mix after be poured in housing base mould with hardening agent according to mass ratio by PDMS host, then telefault is placed in the lower center position of housing base mould, position 7 as shown in Figure 3, the housing upper fastening the obtained integrated magnetic field unit of upper step (2-1) again divides 8, after drying 3 hours through 70 DEG C, obtain the support housing of integrated magnetic field unit and telefault.
(3) projection is prepared
Be 5:1 mix after be poured in half elliptic mould with hardening agent according to mass ratio by PDMS host, dry in 60 ~ 120 DEG C after 0.5 ~ 4 hour and take out, obtain projection.
(4) supporting surface projection obtained for step (3) being placed on the obtained flexible supporter of step (2) is positioned at directly over magnetic field units, link position place applies the PDMS mixed liquor be mixed to form by PDMS host and hardening agent, then dry, projection is bonded on the supporting surface of supporter.
During duty, extraneous faint effect of stress is on flexible raised 5, flexible raised 5 produce compressive stress drives flexible support face 1 that deformation occurs, the deformation in this flexible support face 1 causes magnetic field units 4 to act on magnetic flux change in telefault 2, coil impedance changes thereupon, coil two ends are impedance output, and coil two ends export this impedance, thus achieve the detection of extraneous faint stress.
Wherein, the source of extraneous faint stress is not limit, and can be the fluctuating of pulse, the vibration etc. that causes of the collision of air-flow, wave volume.
Utilize this strain gauge to detect the stress of certain human pulse fluctuating generation, by flexible raised contact human pulse, the result of detection figure of gained as shown in Figure 4, can learn heart rate cycle and the strong and weak information of pulse of this person of being detected from figure.
Above-described embodiment has been described in detail technical scheme of the present invention and beneficial effect; be understood that and the foregoing is only specific embodiments of the invention; be not limited to the present invention; all any amendments and improvement etc. made in spirit of the present invention, all should be included within protection scope of the present invention.
Claims (10)
1. for detecting a sensor for faint stress, it is characterized in that: comprise support housing, and be positioned at the telefault of support housing inside; Described telefault comprises magnetic core and air core coil, and magnetic core is inner through air core coil;
Described support housing comprises flexible support face, connects flexible raised above flexible support face, and flexible support connects magnetic field units below face, for providing magnetic field for telefault;
During duty, extraneous faint effect of stress is on flexible raised, flexible raised generation compressive stress drives flexible support face that deformation occurs, magnetic field units is caused to act on magnetic flux change in telefault, coil impedance changes thereupon, coil two ends are impedance output, and coil two ends export this impedance.
2. as claimed in claim 1 for detecting the sensor of faint stress, it is characterized in that: the vibration that the faint stress source in the described external world causes in collision or the wave volume of the fluctuating of pulse, air-flow.
3. as claimed in claim 1 for detecting the sensor of faint stress, it is characterized in that: described flexible support plane materiel material is the flexible material such as dimethyl silicone polymer (PDMS) or rubber;
As preferably, described flexible raised material is the flexible material such as PDMS or rubber;
As preferably, described magnetic field units is made up of with the magnetic be distributed in PDMS flexible material PDMS.
4. as claimed in claim 1 for detecting the sensor of faint stress, it is characterized in that: the flexibility of described flexible support plane materiel material is greater than the flexibility of flexible raised material.
5. as claimed in claim 1 for detecting the sensor of faint stress, it is characterized in that: described magnetic core is magnetic metal, magnetic alloy, amorphous magnetic material; As preferably, described magnetic core is amorphous magnetostriction materials; Further preferably, described amorphous magnetostriction materials are Fe-based amorphous soft magnetic material or cobalt base amorphous soft magnetic material.
6. as claimed in claim 5 for detecting the sensor of faint stress, it is characterized in that: described amorphous magnetostriction materials are FeSiB, FeCuNbSiB, FeNiSiB, FeCoSiB, GdFeCo or CoSiB.
7. the sensor for detecting faint stress as described in claim arbitrary in claim 1 to 6, is characterized in that: described magnetic field units be positioned at flexible raised immediately below.
8. the sensor for detecting faint stress as described in claim arbitrary in claim 1 to 6, is characterized in that: the shape of described support housing is hollow cylinder, and its shape of cross section is circle, rectangle or polygon; Or the shape of described support housing is hollow cone, its shape of cross section is circle, rectangle or polygon;
As preferably, described raised face (RF) shape is sphere, elliptical area or the face of cylinder.
9. the sensor for detecting faint stress as described in claim arbitrary in claim 1 to 6, it is characterized in that: described impedance output is connected with electric impedance analyzer, or impedance output and resistance form wheatstone bridge configuration, and impedance output is a brachium pontis of Wheatstone bridge, the output of Wheatstone bridge and voltage table or reometer or electric impedance analyzer are connected.
10. the method for the sensor for detect faint stress of preparation as described in claim arbitrary in claim 1 to 6, it is characterized in that: described support housing material is PDMS, flexible raised material is PDMS, magnetic field units is made up of with the magnetic be distributed in PDMS PDMS, comprises the steps:
(1) magnetic field units is prepared
PDMS host and hardening agent form PDMS mixed liquor, are mixed by PDMS mixed liquor with magnetic, dry, then take out and magnetize in magnetic field in 60 ~ 120 DEG C;
In step (1), as preferably, in described PDMS mixed liquor, the mass ratio of PDMS host and hardening agent is 10:1 ~ 2:1;
In step (1), as preferably, described PDMS and the mass ratio of magnetic are 10:1 ~ 2:1;
(2) support housing is prepared
Support housing is grouped into by housing base and housing upper, and described housing upper divides the housing remainder comprised except housing base, namely comprises flexible support face;
(2-1) prepare housing upper to divide
Adopt the housing upper described in mould preparation to divide, the mould that housing upper divides is made up of mold and bed die; Be poured in bed die after PDMS host being mixed with hardening agent, then magnetic field units be placed on bed die lower center position, then fasten mold, after drying, the housing upper obtaining integrated magnetic field unit divides.
In step (2-1), as preferably, the mass ratio of PDMS host and hardening agent is 15:1 ~ 5:1;
In step (2-1), as preferably, described bake out temperature is 60 ~ 80 DEG C;
(2-2) housing base is prepared
Adopt the housing base described in mould preparation; Be poured in after PDMS host is mixed with hardening agent in housing base mould, then telefault is placed in the lower center position of housing base mould, the housing upper of the integrated magnetic field unit that back-off step (2-1) is obtained divides again, after drying, obtain the support housing of integrated magnetic field unit and telefault;
In step (2-2), as preferably, the mass ratio of PDMS host and hardening agent is 10:1 ~ 3:1;
In step (2-2), as preferably, described bake out temperature is 60 ~ 100 DEG C;
(3) projection is prepared
Adopt the projection described in mould preparation, PDMS host is mixed with hardening agent and is placed in male mold, take out the demoulding after oven dry, obtain projection;
In step (3), as preferably, the mass ratio of PDMS host and hardening agent is 10:1 ~ 2:1;
In step (3), as preferably, described bake out temperature is 60 ~ 120 DEG C;
(4) projection that step (3) is obtained is placed in the upper surface in flexible support face, the mixed liquor of link position place coating PDMS host and hardening agent, then dry, projection is bonded on flexible support face.
In step (4), as preferably, the mass ratio of PDMS host and hardening agent is 10:1 ~ 2:1;
In step (4), as preferably, described bake out temperature is 60 ~ 120 DEG C.
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| CN107997853A (en) * | 2016-10-28 | 2018-05-08 | 中国科学院宁波材料技术与工程研究所 | A kind of electronic bio integumentary system |
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Effective date of registration: 20220921 Address after: No. 189 Guangming Road, Zhuangshi street, Zhenhai District, Ningbo City, Zhejiang Province Patentee after: Ningbo magnetic materials Application Technology Innovation Center Co.,Ltd. Address before: 315201, No. 519, Zhuang Avenue, Zhenhai District, Zhejiang, Ningbo Patentee before: NINGBO INSTITUTE OF MATERIALS TECHNOLOGY & ENGINEERING, CHINESE ACADEMY OF SCIENCES |