CN111341709A - Substrate transmission method, control module and substrate transmission system - Google Patents
Substrate transmission method, control module and substrate transmission system Download PDFInfo
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- CN111341709A CN111341709A CN201811550042.7A CN201811550042A CN111341709A CN 111341709 A CN111341709 A CN 111341709A CN 201811550042 A CN201811550042 A CN 201811550042A CN 111341709 A CN111341709 A CN 111341709A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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Abstract
The invention provides a substrate transmission method, which is used for sequentially transmitting a plurality of substrate boxes containing substrates, wherein the substrate transmission method comprises the following steps: sequentially transferring the first M substrate cassettes containing substrates to be processed from the carrier to the preparation area at a first transfer speed; sequentially transferring the remaining substrate cassettes containing substrates to be processed from the carrier to the preparation area at a second transfer speed; sequentially transferring from 1 st to L-N substrate cassettes containing processed substrates in the preparation area to the carrier at a third transfer speed; sequentially transferring the last N substrate cassettes containing processed substrates in the preparation area to the carrier at a fourth transfer speed. The invention also provides a control module of the substrate transmission device and a substrate transmission system. The substrate transmission method can effectively improve the substrate transmission rate.
Description
Technical Field
The invention relates to the field of microelectronic processing, in particular to a substrate transmission method,
A control module for a substrate transport apparatus and a substrate transport system including the same.
Background
During the processing of microelectronic products, it is often necessary to transfer substrates from one location to another. For example, the substrate is transported in the machine table as follows: the substrate storage box enters a transfer area of a machine table for temporary storage, the substrate is transmitted to a vacuum preparation area (load lock) from the substrate storage box by using the storage box manipulator, then the substrate is taken out from the substrate storage box by using the substrate manipulator and placed on a quartz boat, the quartz boat rises to enter a pipeline for carrying out a process, after the process is finished, the quartz boat falls back to the original position, and the substrate is transmitted to the substrate storage box from the quartz boat by using the substrate manipulator. Finally, the substrate storage cassette is moved to the unloading area for storage by the cassette robot.
In order to improve the conveying efficiency of the substrate, the running speed of the substrate box manipulator can be improved. However, practice has shown that by increasing the transport speed of all substrate cassette robots, the overall time is only reduced by 19 s.
Therefore, how to effectively improve the transmission efficiency becomes a technical problem to be solved in the field.
Disclosure of Invention
The invention aims to provide a substrate transmission method, a control module for a substrate transmission device and a substrate transmission system comprising the control module. The substrate transmission method can be used for transmitting the substrate, so that the substrate transmission efficiency can be improved.
In order to achieve the above object, as one aspect of the present invention, there is provided a substrate transfer method for sequentially transferring a plurality of substrate cassettes accommodating substrates, wherein the substrate transfer method comprises:
sequentially transferring the first M substrate cassettes containing substrates to be processed from the carrier to the preparation area at a first transfer speed;
sequentially transferring the remaining substrate cassettes containing substrates to be processed from the carrier to the preparation area at a second transfer speed;
wherein, in the transferring process, once the substrate box containing the substrate to be processed is transferred to the preparation area, the substrate to be processed in the substrate box containing the substrate to be processed in the preparation area is transferred to a quartz boat for processing, and the processed substrate is put into an empty substrate box in the preparation area;
sequentially transferring from 1 st to L-N substrate cassettes containing processed substrates in the preparation area to the carrier at a third transfer speed;
sequentially transferring the last N substrate cassettes containing processed substrates in the preparation area to the carrier at a fourth transfer speed, wherein,
the first transmission speed is greater than the second transmission speed; and/or the fourth transmission speed is greater than the third transmission speed; m and N are positive integers, M is less than L, N is less than L, and L is the total number of the substrate boxes.
Preferably, when the substrate box is transported by the substrate box transport module:
the first transmission speed is 50% to 80% of the maximum transmission speed of the substrate box transmission module; the second transmission speed is 40% to 50% of the maximum transmission speed of the substrate box transmission module; the fourth transfer speed is 50% to 80% of the maximum transfer speed of the substrate cassette transfer module; the third transfer speed is 40% to 50% of the maximum transfer speed of the substrate cassette transfer module.
Preferably, the step of transferring the substrate to be processed to the quartz boat for processing specifically comprises: a plurality of acceleration transmission sub-stages, a smooth transmission sub-stage, and a plurality of deceleration transmission sub-stages, which are sequentially performed, wherein,
the acceleration of the first acceleration transmission sub-phase is minimum in the plurality of acceleration transmission sub-phases;
the acceleration of the last deceleration transmission sub-phase among the plurality of deceleration transmission sub-phases is the largest.
Preferably, the substrate is transferred by a substrate manipulator, during the process of transferring the substrate, the displacement of the substrate on the substrate manipulator is detected, and when the displacement of the current substrate on the substrate manipulator exceeds a preset threshold, the acceleration of the acceleration transfer sub-stage when the next substrate is transferred is reduced.
As a second aspect of the present invention, there is provided a control module for a substrate transport apparatus including a substrate cassette transport module and a substrate transport module, the control module for controlling the substrate transport apparatus to sequentially transport a plurality of substrate cassettes accommodating substrates, characterized in that the control module includes a substrate cassette transport control unit and a substrate transport control unit,
the substrate box transmission control unit is used for controlling the substrate box transmission module to sequentially transmit the first M substrate boxes containing substrates to be processed from a bearing frame to a preparation area at a first transmission speed, sequentially transmit the rest substrate boxes containing substrates to be processed from the bearing frame to the preparation area at a second transmission speed, sequentially transmit the 1 st substrate box containing processed substrates to the L-N substrate boxes containing processed substrates in the preparation area to the bearing frame at a third transmission speed, and sequentially transmit the last N substrate boxes containing processed substrates in the preparation area to the bearing frame at a fourth transmission speed;
the substrate transmission control unit is used for controlling the substrate transmission module to transmit the substrate to be processed in the substrate box containing the substrate to be processed in the preparation area to the quartz boat for processing, and controlling the substrate transmission module to place the processed substrate in the empty substrate box in the preparation area;
wherein the first transmission speed is greater than the second transmission speed; and/or the fourth transmission speed is greater than the third transmission speed; m and N are positive integers, M is less than L, N is less than L, and L is the total number of the substrate boxes.
Preferably, the first transfer speed is 50% to 80% of the maximum transfer speed of the substrate cassette transfer module; the second transfer speed is 40% to 50% of the maximum transfer speed of the substrate cassette transfer module;
the fourth transfer speed is 50% to 80% of the maximum transfer speed of the substrate cassette transfer module; the third transfer speed is 40% to 50% of the maximum transfer speed of the substrate cassette transfer module.
Preferably, the substrate transfer control unit is configured to control the substrate transfer module to transfer the substrate according to a plurality of acceleration transfer sub-stages, a smooth transfer sub-stage, and a plurality of deceleration transfer sub-stages that are sequentially performed when transferring each substrate,
the acceleration of the first acceleration transmission sub-phase is minimum in the plurality of acceleration transmission sub-phases;
the acceleration of the last deceleration transmission sub-phase among the plurality of deceleration transmission sub-phases is the largest.
Preferably, the substrate transmission module includes a substrate manipulator, and the substrate transmission control unit is configured to control the substrate transmission module to reduce the acceleration of the acceleration transmission sub-stage when the next substrate is transmitted, when receiving a trigger signal that the displacement of the current substrate on the substrate manipulator exceeds a preset threshold.
As a third aspect of the present invention, there is provided a substrate transport system comprising a substrate transport apparatus and the above control module provided by the present invention, wherein the substrate transport apparatus comprises a substrate cassette transport module and a substrate transport module.
Preferably, the substrate transmission system further includes a substrate detection unit, the substrate detection unit includes a reflection-type optical line sensor and a trigger signal generation unit, the reflection-type optical line sensor is disposed on the substrate transmission manipulator, and the trigger signal unit is configured to receive a reading of the reflection-type optical line sensor and generate a trigger signal when the reading of the reflection-type optical line sensor changes.
In the substrate transmission method provided by the invention, the transmission speed of M substrate boxes is improved before transmission, and the transmission speed of the first substrate box is ensured to be improved; and/or the transmission speed of the N substrate boxes after transmission is increased, so that the transmission speed of the last substrate box is ensured to be increased. Therefore, the substrate transmission method provided by the invention can realize overall improvement of the substrate transmission efficiency.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a flow chart of a substrate transfer method provided by the present invention;
FIG. 2 is a schematic view of the transfer of a substrate pod from the carrier to the staging area;
FIG. 3 is a schematic view of the transfer of substrates from the staging area to the quartz boat;
FIG. 4 is a schematic view showing the operation of the substrate transfer robot when transferring a substrate;
FIG. 5 is an acceleration curve during substrate transport;
FIG. 6 is another acceleration profile while transporting a substrate;
fig. 7 is a schematic view of a substrate transport module provided in the present invention.
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.
As an aspect of the present invention, there is provided a substrate transfer method for sequentially transferring a plurality of substrate cassettes accommodating substrates, as shown in fig. 1, the substrate transfer method comprising:
sequentially transferring the first M substrate cassettes containing substrates to be processed from the carrier to the preparation area at a first transfer speed in step S110;
in step S120, the rest of the substrate cassettes accommodating the substrates to be processed are sequentially transferred from the carrier to the preparation area at a second transfer speed;
wherein, in the transferring process, once the substrate box containing the substrate to be processed is transferred to the preparation area, the substrate to be processed in the substrate box containing the substrate to be processed in the preparation area is transferred to the quartz boat for processing, and the processed substrate is put into the empty substrate box in the preparation area;
sequentially transferring the 1 st to L-N substrate cassettes containing processed substrates in the preparation area to the carrier at a third transfer speed in step S130;
in step S140, the last N substrate cassettes containing processed substrates in the preparation area are sequentially transferred to the carrier at the fourth transfer speed.
In the substrate transfer method, the first transfer speed is greater than the second transfer speed; and/or the fourth transmission speed is greater than the third transmission speed; m and N are positive integers, M is less than L, N is less than L, and L is the total number of the substrate boxes.
It should be noted that, after the substrate to be processed is disposed in the quartz boat, the quartz boat needs to be lifted into the process chamber for the process, and after the process is finished, the quartz boat is lowered back to the original position, and then step S130 is performed.
Shown in fig. 2 is a schematic view of the scenario of step S110. The preparation area 100 comprises two preparation sub-areas, namely a preparation sub-area 110 and a preparation sub-area 120.
After the first cassette containing the substrate to be processed is transferred into the preparation sub-area 110, as shown in fig. 2, the substrate to be processed in the first cassette containing the substrate to be processed in the first stocker 310 of the carrier including the first stocker 310, the second stocker 320, the third stocker 330, …, the nth stocker 3N0 is transferred to the preparation sub-area 110 by the robot 200, and at the same time, the second cassette containing the substrate to be processed is transferred from the second stocker 320 to the preparation sub-area 120. The substrates to be processed in the first substrate cassette are then transported to the quartz boat 400 in sequence, as shown in FIG. 3. After the substrates to be processed in the first substrate cassette are all transferred into the quartz boat 400, the substrates in the second substrate cassette are transferred into the quartz boat 400. In other words, while the substrate to be processed in the first cassette is to be transferred, the second cassette is waiting. It can be seen that, when all the substrate cassettes are transferred to the preparation area in sequence, the key point for improving the transmission efficiency is whether the transmission speed of the first substrate cassette is increased. As long as the transfer speed of the first substrate cassette is increased, the time required for the entire substrate transfer method can be shortened.
Similarly, after the substrates in the quartz boat 400 are transferred to the empty substrate cassette in the preparation sub-area 110 by the robot 500, the substrate cassette is transferred to the carrier. After transferring the substrate cassette containing the processed substrates to the carrier, it is also necessary to transfer the substrates in the quartz boat 400 to an empty substrate cassette in the preparation sub-area 120. It follows that the key point for improving the transport efficiency when transferring all cassettes in sequence to the carrier is whether the transport speed of the last cassette is increased. As long as the transfer speed of the last substrate cassette is increased, the time required for the entire substrate transfer method can be shortened.
In the substrate transfer method provided by the invention, the speed of M substrate boxes before transfer is increased (namely, increased to the first transfer speed), and the transfer speed of the first substrate box is ensured to be increased; and/or the transfer speed of the N substrate cassettes after transfer is increased (i.e., increased to the fourth transfer speed), ensuring that the transfer speed of the last substrate cassette is increased. Therefore, the substrate transmission method provided by the invention can realize overall improvement of the substrate transmission efficiency.
In the present invention, specific values of M and N are not particularly limited, and M and N are both 1 as a preferred embodiment for saving energy consumption.
In the substrate transfer method provided by the invention, the substrate box is transferred by the substrate box transfer device.
Correspondingly, the first transmission speed is 50% to 80% of the maximum transmission speed of the substrate box transmission module; the second transmission speed is 40% to 50% of the maximum transmission speed of the substrate box transmission module; the fourth transmission speed is 50% to 80% of the maximum transmission speed of the substrate box transmission module; the third transfer speed is 40% to 50% of the maximum transfer speed of the substrate cassette transfer module.
The step of transferring the substrate includes two cases: conveying the substrate to be processed from the substrate box to a quartz boat; the processed substrates in the quartz boat are transferred to a substrate cassette. In either case, the substrate is moved at an acceleration, then a smoothing, and then a deceleration.
As shown in fig. 5, first, the substrate is accelerated in an acceleration stage t12, and after the speed of the substrate reaches a steady speed V0, the substrate is transported in a steady operation stage t12, and when the substrate is about to be transported to a target position (which is a quartz boat when the substrate is a substrate to be processed; and which is a substrate cassette when the substrate is a processed substrate), a deceleration stage t13 is entered, and deceleration of the substrate is started.
In order to avoid excessive displacement and even falling off of the substrate from the manipulator in the process of substrate transportation, the step of transporting the substrate to be processed to the quartz boat for processing preferably comprises for each substrate: a plurality of acceleration transmission sub-stages, a smooth transmission sub-stage and a plurality of deceleration transmission sub-stages which are sequentially carried out.
Wherein, in the plurality of acceleration transmission sub-phases, the acceleration of the first acceleration transmission sub-phase is minimum; the acceleration of the last deceleration transmission sub-phase is the greatest among the plurality of deceleration transmission sub-phases.
It will be readily appreciated that the acceleration of the first accelerated transport sub-phase is the greatest, i.e. the substrate is accelerated relatively slowly during the accelerated transport sub-phase, and there is little to no relative movement between the substrate and the substrate transport module due to substrate inertia. After the substrate velocity is raised to a certain degree, the substrate may be accelerated with a large acceleration until the velocity is increased to the velocity V0, the velocity of the substrate is maintained at V0, and the substrate is continuously transported to the target position. The substrate is decelerated when the target position is to be reached. Likewise, to prevent the inertia of the sudden deceleration from being too large, the acceleration of the first deceleration sub-phase is preferably large (the acceleration is negative), so that the first deceleration can be relatively slow.
In conclusion, the speed of the substrate in the process of conveying can be controlled according to the rule, so that the phenomenon of chip falling in the process of conveying the substrate can be prevented.
As an embodiment, as shown in fig. 6, each of the substrates is transported while including three acceleration transportation sub-stages (a first acceleration sub-stage t21, a second acceleration sub-stage t22, and a third acceleration sub-stage t23, respectively) and three deceleration transportation sub-stages (a first deceleration sub-stage t25, a second deceleration sub-stage t26, and a third deceleration sub-stage t27, respectively). It will be readily appreciated that the phase between the third acceleration sub-phase t23 and the first deceleration sub-phase t25 is a constant speed phase t 24.
As shown, the acceleration of the second acceleration transmission sub-phase t22 is greater than the acceleration of the third acceleration transmission sub-phase t23, and the acceleration of the second deceleration transmission sub-phase t26 is less than the acceleration of the third deceleration transmission sub-phase t 26.
As an embodiment of the present invention, the substrate is transferred using a substrate robot. The speed profile in fig. 6 can be implemented with the following instructions:
GET_Speed_Setup(Step1,Step2,Step3,Step4,Step5)
PUT_Speed_Setup(Step1,Step2,Step3,Step4,Step5)
GET_Acceleration_Step1(a1,a2,a3)
GET_Acceleration_Step2(a1,a2,a3)
GET_Acceleration_Step3(a1,a2,a3)
GET_Acceleration_Step4(a1,a2,a3)
GET_Acceleration_Step5(a1,a2,a3)
PUT_Acceleration_Step1(a1,a2,a3)
PUT_Acceleration_Step2(a1,a2,a3)
PUT_Acceleration_Step3(a1,a2,a3)
PUT_Acceleration_Step4(a1,a2,a3)
PUT_Acceleration_Step5(a1,a2,a3)
the parameters a1, a2, a3 set in the function Accelation represent three Acceleration sub-phases in the speed curve and three deceleration sub-phases in the speed curve, respectively. The parameters Step1, Step2, Step3, Step4 and Step5 set in the function Speed represent the Speed setting percentage of each Step.
Wherein Step1 is the speed set percentage when the Z axis moves to the target height, Step2 is the speed set percentage when the theta axis rotates to the target direction, Step3 is the speed set percentage when the R axis extends to the target position, Step4 is the speed set percentage when the Z axis is lifted, and Step5 is the speed set percentage when the arm retracts.
And in the process of transmitting the substrate, detecting the displacement of the substrate on the substrate manipulator, and when the displacement of the current substrate on the substrate manipulator exceeds a preset threshold value, reducing the acceleration of the acceleration transmission sub-stage when the next substrate is transmitted.
The scratch and the particle on the surface of the substrate can be detected by using special equipment to indirectly judge whether the substrate slides too much on a substrate manipulator for transporting the substrate, if the substrate slides too much, the running speed of the substrate manipulator is over fast, and the running speed of the manipulator needs to be reduced.
As a preferred embodiment, the present invention provides a method for rapidly roughly measuring whether a substrate slides on a robot.
Specifically, two reflective optical fiber sensors are arranged on the substrate manipulator, and when the output value of the reflective optical fiber sensors changes, the slippage of the substrate in the transmission process is indicated, and at the moment, the running speed of the substrate manipulator can be reduced.
Shown in fig. 4 is a schematic view of a substrate robot in transferring substrates. In transferring the substrate, a fork (fork) of the substrate robot moves to below the substrate, then a Z-axis of the substrate robot is raised, a θ -axis is rotated so that the substrate faces a target position, then the R-axis is extended so that the substrate reaches above the target position, then the Z-axis is lowered, and the substrate is set at the target position. Correspondingly, when the Z-axis lifting speed is less than 38% of the maximum Z-axis speed, the theta-axis rotating speed is less than 30% of the maximum theta-axis rotating speed, the R-axis stretching speed is less than 30% of the maximum R-axis stretching speed, and the acceleration and deceleration is less than 50% of the maximum acceleration and deceleration, the Wafer has no slippage. The following optimization settings are performed by the test data:
GET_Speed_Setup(70％,70％,50％,35％，30％)
PUT_Speed_Setup(35％,30％,30％,35％，70％)
GET_Acceleration_Step1(30％，80％,30％)
GET_Acceleration_Step2(25％,50％,25％)
GET_Acceleration_Step3(30％,80％,30％)
GET_Acceleration_Step4(20％，30％,20％)
GET_Acceleration_Step5(20％，30％,20％)
PUT_Acceleration_Step1(20％，30％,20％)
PUT_Acceleration_Step2(20％，30％,20％)
PUT_Acceleration_Step3(20％，30％,20％)
PUT_Acceleration_Step4(20％，30％,20％)
PUT_Acceleration_Step5(20％，50％,20％)。
as a second aspect of the present invention, there is provided a control module for a substrate transport apparatus including a substrate cassette transport module 730 and a substrate transport module 740 for controlling the substrate cassette transport apparatus to sequentially transport a plurality of substrate cassettes accommodating substrates, as shown in fig. 7, wherein the control module includes a substrate cassette transport control unit 710 and a substrate transport control unit 720.
The substrate cassette transfer control unit 710 is configured to control the substrate cassette transfer module 730 to sequentially transfer the first M substrate cassettes containing substrates to be processed from the carrier to the preparation area at a first transfer speed, sequentially transfer the remaining substrate cassettes containing substrates to be processed from the carrier to the preparation area at a second transfer speed, sequentially transfer the 1 st substrate cassette containing processed substrates to the L-N substrate cassettes containing processed substrates in the preparation area to the carrier at a third transfer speed, and sequentially transfer the last N substrate cassettes containing processed substrates in the preparation area to the carrier at a fourth transfer speed.
The substrate transfer control unit 720 is configured to control the substrate transfer module 740 to transfer the substrates to be processed in the substrate cassettes containing the substrates to be processed in the preparation area to the quartz boat for processing, and control the substrate transfer module to place the processed substrates in the empty substrate cassettes in the preparation area.
Wherein the first transmission speed is greater than the second transmission speed; and/or the fourth transmission speed is greater than the third transmission speed; m and N are positive integers, M is less than L, N is less than L, and L is the total number of the substrate boxes.
The control method provided by the present invention is used for controlling the substrate box transmission module 730 and the substrate transmission module 740 to execute the above substrate transmission method provided by the present invention, and the working principle and the beneficial effect of the substrate transmission method have been described in detail above, and are not described again here.
Preferably, as above, the first transport speed is 50% to 80% of the maximum transport speed of the substrate cassette transport module; the second transmission speed is 40% to 50% of the maximum transmission speed of the substrate box transmission module; the fourth transmission speed is 50% to 80% of the maximum transmission speed of the substrate box transmission module; the third transfer speed is 40% to 50% of the maximum transfer speed of the substrate cassette transfer module.
The substrate cassette transfer module 710 is further configured to control the second transfer speed of the substrate cassette transfer module 730 to be 50% to 80% of the maximum transfer speed of the substrate cassette transfer module when transferring the N substrate cassettes containing processed substrates after transfer, and to be 40% to 50% of the maximum transfer speed of the substrate cassette transfer device 730 when transferring the remaining substrate cassettes containing processed substrates.
Preferably, the substrate transfer control unit 720 is configured to control the substrate transfer module 740 to transfer according to a plurality of acceleration transfer sub-stages, a smooth transfer sub-stage, and a plurality of deceleration transfer sub-stages, which are sequentially performed, when transferring each substrate.
Wherein, in the multiple acceleration transmission sub-phases, the acceleration of the first acceleration transmission sub-phase is minimum, and in the multiple deceleration transmission sub-phases, the acceleration of the last deceleration transmission sub-phase is maximum.
Preferably, the substrate transfer control unit is configured to control the substrate transfer module to transfer each substrate according to three acceleration transfer sub-stages, a smooth transfer sub-stage, and three deceleration transfer sub-stages that are sequentially performed when transferring each substrate.
The acceleration of the second acceleration transmission sub-phase is greater than that of the third acceleration transmission sub-phase, and the acceleration of the second deceleration transmission sub-phase is less than that of the third deceleration transmission sub-phase.
Preferably, the substrate transmission module comprises a substrate manipulator, and the substrate transmission control unit is used for controlling the substrate transmission module to reduce the acceleration of the acceleration transmission sub-stage when the next substrate is transmitted when receiving a trigger signal that the displacement of the current substrate on the substrate manipulator exceeds a preset threshold.
As a third aspect of the present invention, there is provided a substrate transfer system, as shown in fig. 7, comprising a substrate transfer device and the above-mentioned control module provided in the present invention, wherein the substrate transfer device comprises a substrate cassette transfer device 730 and a substrate transfer module 740.
Preferably, the substrate transferring system further comprises a substrate detecting unit 750 (specifically, the substrate detecting unit 750 is a part of the substrate transferring apparatus), the substrate detecting unit 730 comprises a reflective optical line sensor and a trigger signal generating unit, the reflective optical line sensor is disposed on the substrate transferring robot, and the trigger signal generating unit is configured to receive the reading of the reflective optical line sensor and generate a trigger signal when the reading of the reflective optical line sensor changes.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (10)
1. A substrate transfer method for sequentially transferring a plurality of substrate cassettes accommodating substrates, comprising:
sequentially transferring the first M substrate cassettes containing substrates to be processed from the carrier to the preparation area at a first transfer speed;
sequentially transferring the remaining substrate cassettes containing substrates to be processed from the carrier to the preparation area at a second transfer speed;
wherein, in the transferring process, once the substrate box containing the substrate to be processed is transferred to the preparation area, the substrate to be processed in the substrate box containing the substrate to be processed in the preparation area is transferred to a quartz boat for processing, and the processed substrate is put into an empty substrate box in the preparation area;
sequentially transferring from 1 st to L-N substrate cassettes containing processed substrates in the preparation area to the carrier at a third transfer speed;
sequentially transferring the last N substrate cassettes containing processed substrates in the preparation area to the carrier at a fourth transfer speed, wherein,
the first transmission speed is greater than the second transmission speed; and/or the fourth transmission speed is greater than the third transmission speed; m and N are positive integers, M is less than L, N is less than L, and L is the total number of the substrate boxes.
2. The substrate transport method according to claim 1, wherein, when transporting the substrate cassette by the substrate cassette transport module:
the first transmission speed is 50% to 80% of the maximum transmission speed of the substrate box transmission module; the second transmission speed is 40% to 50% of the maximum transmission speed of the substrate box transmission module; the fourth transfer speed is 50% to 80% of the maximum transfer speed of the substrate cassette transfer module; the third transfer speed is 40% to 50% of the maximum transfer speed of the substrate cassette transfer module.
3. The substrate transport method according to claim 1 or 2, wherein the step of transporting the substrate to be processed to the quartz boat for processing specifically comprises: a plurality of acceleration transmission sub-stages, a smooth transmission sub-stage, and a plurality of deceleration transmission sub-stages, which are sequentially performed, wherein,
the acceleration of the first acceleration transmission sub-phase is minimum in the plurality of acceleration transmission sub-phases;
the acceleration of the last deceleration transmission sub-phase among the plurality of deceleration transmission sub-phases is the largest.
4. A substrate transfer method according to claim 3, wherein the substrate is transferred by a substrate robot, a displacement of the substrate on the substrate robot is detected during the transfer of the substrate, and the acceleration of the acceleration transfer sub-stage when the next substrate is transferred is decreased when the displacement of the current substrate on the substrate robot exceeds a preset threshold.
5. A control module for a substrate transport apparatus, the substrate transport apparatus comprising a substrate cassette transport module and a substrate transport module, the control module for controlling the substrate transport apparatus to sequentially transport a plurality of substrate cassettes containing substrates, characterized in that the control module comprises a substrate cassette transport control unit and a substrate transport control unit,
the substrate box transmission control unit is used for controlling the substrate box transmission module to sequentially transmit the first M substrate boxes containing substrates to be processed from a bearing frame to a preparation area at a first transmission speed, sequentially transmit the rest substrate boxes containing substrates to be processed from the bearing frame to the preparation area at a second transmission speed, sequentially transmit the 1 st substrate box containing processed substrates to the L-N substrate boxes containing processed substrates in the preparation area to the bearing frame at a third transmission speed, and sequentially transmit the last N substrate boxes containing processed substrates in the preparation area to the bearing frame at a fourth transmission speed;
the substrate transmission control unit is used for controlling the substrate transmission module to transmit the substrate to be processed in the substrate box containing the substrate to be processed in the preparation area to the quartz boat for processing, and controlling the substrate transmission module to place the processed substrate in the empty substrate box in the preparation area;
wherein the first transmission speed is greater than the second transmission speed; and/or the fourth transmission speed is greater than the third transmission speed; m and N are positive integers, M is less than L, N is less than L, and L is the total number of the substrate boxes.
6. The control module of claim 5, wherein the first transport speed is 50% to 80% of a maximum transport speed of the substrate cassette transport module; the second transfer speed is 40% to 50% of the maximum transfer speed of the substrate cassette transfer module;
the fourth transfer speed is 50% to 80% of the maximum transfer speed of the substrate cassette transfer module; the third transfer speed is 40% to 50% of the maximum transfer speed of the substrate cassette transfer module.
7. The control module according to claim 6, wherein the substrate transport control unit is configured to control the substrate transport module to transport in accordance with a plurality of acceleration transport sub-stages, a smooth transport sub-stage, and a plurality of deceleration transport sub-stages, which are sequentially performed, while transporting each substrate,
the acceleration of the first acceleration transmission sub-phase is minimum in the plurality of acceleration transmission sub-phases;
the acceleration of the last deceleration transmission sub-phase among the plurality of deceleration transmission sub-phases is the largest.
8. The control module of claim 7, wherein the substrate transfer module comprises a substrate robot, and the substrate transfer control unit is configured to control the substrate transfer module to decrease the acceleration of the acceleration transfer sub-stage when transferring the next substrate, upon receiving a trigger signal that the displacement of the current substrate on the substrate robot exceeds a preset threshold.
9. A substrate transport system comprising a substrate transport apparatus and a control module according to any one of claims 5 to 8, wherein the substrate transport apparatus comprises a substrate cassette transport module and a substrate transport module.
10. The substrate transport system according to claim 9, wherein the control module is the control module according to claim 8, the substrate transport system further comprises a substrate detection unit, the substrate detection unit comprises a reflective optical line sensor and a trigger signal generation unit, the reflective optical line sensor is disposed on the substrate transport robot, and the trigger signal unit is configured to receive a reading of the reflective optical line sensor and generate a trigger signal when the reading of the reflective optical line sensor changes.
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| JPH0655471A (en) * | 1992-07-31 | 1994-03-01 | Sony Corp | Action control method for work transfer robot |
| CN101533795A (en) * | 2008-03-12 | 2009-09-16 | 大日本网屏制造株式会社 | Apparatus for conveying substrate |
| CN102138209A (en) * | 2008-08-28 | 2011-07-27 | 细美事有限公司 | Method of adjusting velocity of transfer member, method of transferring substrate using the method, and substrate-processing apparatus |
| KR20140003770A (en) * | 2012-06-28 | 2014-01-10 | 주식회사 원익아이피에스 | Buffer chamber and method of transferring workpiece using the same |
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