CN111307878A - Wireless self-powered gas sensor array and preparation method thereof - Google Patents
Wireless self-powered gas sensor array and preparation method thereof Download PDFInfo
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- CN111307878A CN111307878A CN201911274569.6A CN201911274569A CN111307878A CN 111307878 A CN111307878 A CN 111307878A CN 201911274569 A CN201911274569 A CN 201911274569A CN 111307878 A CN111307878 A CN 111307878A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/126—Composition of the body, e.g. the composition of its sensitive layer comprising organic polymers
Abstract
The invention provides a wireless self-powered gas sensor array, which comprises a gas testing cavity, a negative friction material layer, a positive friction material layer, an interdigital electrode, a gas sensitive material, a gas inlet, a gas outlet and a lead, and has the advantages that: external mechanical energy collected outside the gas-sensitive test cavity can be wirelessly transmitted to a gas-sensitive detection interface in a spaced mode to form periodic alternating potential difference at two ends of the interdigital electrode, and the potential difference drives current carriers in the gas-sensitive film to form alternating current. The energy collecting component is independent of a gas-sensitive testing environment, and energy is wirelessly transmitted in a spaced mode by adopting an electromagnetic oscillation effect to drive the sensor to work, so that the testing stability, the configuration flexibility and the individual mobility of the self-powered sensor are greatly improved.
Description
Technical Field
The invention relates to the field of energy collection technology, micro-electro-mechanical systems (MEMS) and electronic polymer sensitive materials, in particular to a wireless self-powered gas sensor array and a preparation method thereof.
Background
With the rapid development of safety and scientific technology, the detection of toxic gases has been expanded from the industry to the medical field, artificial intelligence and daily life. The identification of Volatile Organic Compounds (VOCs) is now of great interest to researchers, as pollution monitoring and early non-invasive disease diagnosis are an important research area. Generally, volatile organic compounds are a wide variety of chemical compound gases that are released from liquid/solid forms and are harmful to human health when inhaled at high concentrations. In addition, VOCs are widely distributed and widely available. In most cities in China, VOCs discharged artificially are far higher than natural sources, and mainly come from fixed source combustion, automobile tail gas road traffic, solvent product use and industrial production processes. This puts new demands on the atmospheric environment monitoring network formed by the gas sensors.
Therefore, the development of sensor technology for toxic and harmful gases is urgent. Currently, all sensors developed and produced currently are supplied with energy through battery or wired power transmission, and personnel are required to regularly replace the battery and maintain a power grid to ensure continuous operation of the network, so that not only is the economic cost increased, but also the mobility and the environmental adaptability of the sensor network nodes are greatly reduced. Secondly, in order to detect and distinguish mixed VOCs gas, the gas sensors are often combined into an array to improve the selectivity of the sensors, so that the energy consumption of the whole node is very high, and the requirement of long-term operation of the sensor node cannot be met only by depending on battery power supply. If the battery life is desired to be longer, the system needs to be powered down or otherwise powered down. If the energy collection technology is utilized, the wireless sensing node can acquire energy when the energy is consumed, and the long-term effective use of the wireless sensing node is realized by means of the energy management and energy transfer technology, so that the problem of energy supply of the wireless sensing node is fundamentally solved.
In order to solve the problems that the traditional gas sensor is short in service life, high in power consumption, and needs an external power supply for power supply, the invention provides an energy collection-transmission mechanism and method completely based on a polymer material, and any metal electrode and circuit connection are not needed, so that the structure and the integration process of a device are simplified, the compatibility of an energy module and the sensor is further improved, and the defects of the current research are overcome. In addition, the existing self-driven gas sensor needs an external energy source to directly act on the device, namely, the spatial range of energy collection can be limited to the position of the sensor, and environmental energy outside the position of the device cannot be collected, so that the application range and the space utilization rate of the self-driven gas sensor are weakened to a great extent. The invention provides a wireless energy transmission self-driven sensitive mechanism and a wireless energy transmission self-driven sensitive model, and provides an environment energy collection, wireless energy transmission and spontaneous active detection integrated detection system which can be driven simultaneously only by external mechanical motion, and can work independently without external power supply. The energy collected by the energy supply part can be wirelessly transmitted to the gas-sensitive detection interface at intervals, so that the environmental applicability and the individual mobility of the sensor are improved.
Disclosure of Invention
In view of the above drawbacks of the prior art, the present invention provides a wireless self-powered gas sensor array and a method for manufacturing the same, which can simultaneously drive energy collection and wireless energy transmission to perform self-powered wireless gas detection by external force only, and realize an integrated functional module of "environmental energy collection, wireless energy transmission, active spontaneous detection" to meet the requirements of long-term stable energy supply and self-powered environmental monitoring of numerous, widely distributed and flexibly located sensor nodes. The negative friction material layer 1 and the positive friction material layer 2 are used as energy collecting-transmitting units (dielectric layers) and slide under the pushing of external air flow or mechanical motion, and external mechanical energy is converted into time-varying electric displacement field energy and transmitted outwards. The gas sensitive structure is used for wirelessly collecting time-varying electric displacement field energy and converting the time-varying electric displacement field energy into induction current. The chemical specific reaction is converted into an electrical signal at the energy conversion interface to achieve real-time spontaneous active detection of gas species and concentration.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a wireless self-powered gas sensor array comprises an energy collection part and a gas detection part,
the energy collecting part comprises a negative friction material layer 1 and a positive friction material layer 2 which have the same size with the cross section of the gas testing cavity 3, the negative friction material layer 1 and the positive friction material layer 2 are positioned outside the gas testing cavity 3, the positive friction material layer 2 completely covers the outer surface of the gas testing cavity 3, the negative friction material layer 1 is positioned above the positive friction material layer 2, the negative friction material layer 1 is of a grating structure, a grating of the negative friction material layer 1 is parallel to an electrode of an interdigital electrode, the characteristic parameters of the grating are the same, the negative friction material layer 1 and the positive friction material layer 2 are used as energy collecting and converting units, the negative friction material layer 1 slides back and forth under the driving of external force, the positive friction material layer 2 is fixed, the negative friction material layer 1 slides under the action of the external force and radiates time-varying electromagnetic field energy to the outside, and a first, the surface of the positive friction material layer 2 is provided with a second polymer film; the electron-obtaining capacity of the first polymer film is stronger than that of the second polymer film, the contact of the first polymer film and the second polymer film can charge negative charges on the surface of the first polymer film, and the surface of the second polymer film can charge positive charges;
the gas detection part comprises a cuboid gas test cavity 3, an array formed by more than two interdigital electrodes is arranged in the gas test cavity 3, and a gas-sensitive material is filled in each interdigital electrode; the gas-sensitive materials filled in the plurality of interdigital electrodes are different from each other, and the gas-sensitive materials on two sides of each interdigital electrode are not communicated; the interdigital electrode is led out through a lead for detecting an electric signal output by the sensor; the interdigital electrode is used for wirelessly collecting time-varying electromagnetic oscillation energy radiated by external force triggering outside the test cavity, and realizing self-driven detection of the type and concentration of the gas to be detected; and the two sides of the gas testing cavity 3 are provided with a gas inlet 5 and a gas outlet 6, and the gas inlet 5 and the gas outlet 6 are respectively connected with a gas inlet pipe and a gas outlet pipe and used for quantitatively leading in and discharging gas to be tested.
Preferably, the gas-sensitive material between the interdigital electrodes is an organic polymer, or a metal oxide, or an inorganic material sensitive to the target gas.
Preferably, the gas sensitive material is a composite film composed of one or more different materials selected from polyaniline, polyethylene oxide, polyethylene imine, sodium polystyrene sulfonate, polyaniline, polyimide, chitosan and graphene oxide.
Preferably, the first polymer film material of the negative friction material layer 1 is selected from teflon or polyvinyl fluoride or polyvinyl chloride or polyimide, and the film thickness is in the range of 10-50 micrometers.
Preferably, the second polymeric film material of the positive friction material layer 2 is selected from nylon or polyurethane or magnesium fluoride, with a film thickness in the range of 10-50 microns.
Preferably, the grating of the layer of negative friction material 1 is parallel to the electrodes of the interdigital electrodes and their following characteristic parameters are the same: the length of the whole grating is A, the width of the whole grating is B, the width of each light transmission part of the grating is C, the grating period is D, the duty ratio is 0.5, the length of the interdigital electrode is E, the sum of the widths of all the interdigital electrodes in the width direction is F, the transverse farthest distance of the two interdigital electrodes is G, the period of the interdigital electrode is H, the A is equal to E, the B is equal to F, the C is equal to G, and the D is equal to H.
Preferably, the test chamber is comprised of acrylic plates.
In order to achieve the purpose, the invention further provides a preparation method of the wireless self-powered gas sensor array, wherein a gas-sensitive material is deposited between gaps of the interdigital electrodes by adopting one of methods of spin coating, spray coating, drop coating, sol-gel, self-assembly and chemical vapor deposition and combining with a stripping process to form a gas-sensitive structure.
Preferably, the preparation method comprises the following steps:
step 1: cleaning the first polymer film and the second polymer film by using a chemical reagent and drying;
step 2: the polymer film is used as a contact electrification layer, the first polymer film and the second polymer film are jointly used as friction electrification materials, and friction electrification charges are generated in the contact process, wherein the electron obtaining capacity of the first polymer film is higher than that of the second polymer film, so that the contact of the first polymer film and the second polymer film can carry negative charges on the surface of the first polymer film and carry positive charges on the surface of the second polymer film;
and step 3: laser cutting the first polymer film into a grating structure as a negative friction material layer 1; the second polymer film is subjected to laser cutting to form a rectangular pattern, and is attached to the outer surface of the top of the gas test cavity to be used as a positive friction material layer 2;
and 4, step 4: depositing different gas-sensitive materials among gaps of different interdigital electrodes by adopting one of methods of spin coating, spray coating, drop coating, sol-gel, self-assembly and chemical vapor deposition and combining a stripping process to form a plurality of gas-sensitive structures;
and 5: cutting an organic glass plate by using a laser cutting machine, assembling the organic glass plate into a gas testing cavity, respectively punching holes on the left side and the right side of the gas testing cavity to serve as a gas inlet and a gas outlet, arranging a plurality of gas-sensitive structures at the bottom in the testing cavity, and filling different gas-sensitive materials between electrodes of different interdigital electrodes to form a self-driven gas sensor array;
step 6: and leading out the interdigital electrode to a test port of a current test instrument through a lead.
Compared with the prior art, the invention has the beneficial effects that: the traditional self-driven gas sensor array needs an external energy source to directly act on a device, namely, the space range of energy collection can be limited at the position of the sensor, and the environmental energy outside the position of the device can not be collected, so that the application range and the space utilization rate of the self-driven gas sensor array are weakened to a great extent. The invention provides a wireless self-powered gas sensor array mechanism and a wireless self-powered gas sensor array model, and provides an environment energy collection-wireless energy transmission-spontaneous active detection integrated detection system which can be driven simultaneously by external mechanical motion, and can work independently without external power supply. The energy collected by the energy supply part can be wirelessly transmitted to the gas-sensitive detection interface at intervals, so that the environmental applicability and the individual mobility of the sensor array are improved. In addition, the energy collection-transmission mechanism and method based on the polymer material do not need any metal electrode and line connection, thereby simplifying the structure and the integration process of the device and further improving the compatibility of the energy module and the sensor array.
Drawings
Fig. 1 is a schematic structural diagram of a wireless self-powered gas sensor array according to the present invention.
Fig. 2 and 3 are diagrams of a conduction mechanism. In which the negative friction material layer 1 of fig. 2 slides to the left and the negative friction material layer 1 of fig. 3 slides to the right.
FIG. 4 shows the gas-sensitive mechanism of ammonia gas environment.
Fig. 5 is an ambient gas sensitive mechanism for nitrogen dioxide.
Fig. 6 is an equivalent circuit diagram of the present invention.
The material comprises a negative friction material layer 1, a positive friction material layer 2, a gas test cavity 3, a gas inlet 5, a gas outlet 6, an acrylic plate 7, a first interdigital electrode 41, a second interdigital electrode 42, a third interdigital electrode 43, a first gas sensitive material 81, a second gas sensitive material 82 and a third gas sensitive material 83.
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.
As shown in fig. 1, a wireless self-powered gas sensor array structurally comprises an energy collecting part and a gas detecting part,
the energy collecting part comprises a negative friction material layer 1 and a positive friction material layer 2 which have the same size with the cross section of the gas testing cavity 3, the negative friction material layer 1 and the positive friction material layer 2 are positioned outside the gas testing cavity 3, the positive friction material layer 2 completely covers the outer surface of the gas testing cavity 3, the negative friction material layer 1 is positioned above the positive friction material layer 2, the negative friction material layer 1 is of a grating structure, a grating of the negative friction material layer 1 is parallel to an electrode of an interdigital electrode, the characteristic parameters of the grating are the same, the negative friction material layer 1 and the positive friction material layer 2 are used as energy collecting and converting units, the negative friction material layer 1 slides back and forth under the driving of external force, the positive friction material layer 2 is fixed, the negative friction material layer 1 slides under the action of the external force and radiates time-varying electromagnetic field energy to the outside, and a first, the surface of the positive friction material layer 2 is provided with a second polymer film; the electron-obtaining capacity of the first polymer film is stronger than that of the second polymer film, the contact of the first polymer film and the second polymer film can charge negative charges on the surface of the first polymer film, and the surface of the second polymer film can charge positive charges;
the gas detection part comprises a cuboid gas test cavity 3, an array formed by 3 interdigital electrodes is arranged in the gas test cavity 3 and respectively comprises a first interdigital electrode 41, a second interdigital electrode 42 and a third interdigital electrode 43, and gas-sensitive materials are filled in each interdigital electrode; the gas-sensitive materials filled in the plurality of interdigital electrodes are different from each other, and the gas-sensitive materials on two sides of each interdigital electrode are not communicated; the interdigital electrode is led out through a lead for detecting an electric signal output by the sensor; the interdigital electrode is used for wirelessly collecting time-varying electromagnetic oscillation energy radiated by external force triggering outside the test cavity, and realizing self-driven detection of the type and concentration of the gas to be detected; and the two sides of the gas testing cavity 3 are provided with a gas inlet 5 and a gas outlet 6, and the gas inlet 5 and the gas outlet 6 are respectively connected with a gas inlet pipe and a gas outlet pipe and used for quantitatively leading in and discharging gas to be tested.
The negative friction material layer 1 and the positive friction material layer 2 are arranged outside the gas testing cavity, so that the friction motion cannot interfere the flow field of the testing cavity and the gas molecule adsorption/desorption, and the stability of gas detection is ensured to the maximum extent.
The distance between the energy collection part and the gas detection part of the sensor array can be adjusted as required within the maximum sensing distance, so that the spatial range and the variety of energy collection are expanded, and the environmental applicability and the individual mobility of the sensor are greatly improved.
Specifically, the gas-sensitive material between the interdigital electrodes is an organic polymer, or a metal oxide, or an inorganic material which is sensitive to the target gas.
Specifically, the gas sensitive material is a composite film composed of one or more than two different materials of polyaniline, polyethylene oxide, polyethylene imine, sodium polystyrene sulfonate, polyaniline, polyimide, chitosan and graphene oxide.
Specifically, the first polymer film material of the negative friction material layer 1 is selected from teflon, polyvinyl fluoride, polyvinyl chloride or polyimide, and the film thickness ranges from 10 microns to 50 microns.
Specifically, the second polymeric film material of the positive friction material layer 2 is selected from nylon or polyurethane or magnesium fluoride, and has a film thickness in the range of 10 to 50 μm.
Specifically, the grating of the negative friction material layer 1 is parallel to the electrode of the interdigital electrode and the following characteristic parameters are the same: the length of the whole grating is A, the width of the whole grating is B, the width of each light transmission part of the grating is C, the grating period is D, the duty ratio is 0.5, the length of the interdigital electrode is E, the sum of the widths of all the interdigital electrodes in the width direction is F, the transverse farthest distance of the two interdigital electrodes is G, the period of the interdigital electrode is H, the A is equal to E, the B is equal to F, the C is equal to G, and the D is equal to H.
Specifically, the test chamber is composed of an acrylic plate.
The embodiment also provides a preparation method of the wireless self-powered gas sensor array, which is to deposit a gas-sensitive material between the gaps of the interdigital electrodes by adopting one of spin coating, spray coating, drop coating, sol-gel, self-assembly and chemical vapor deposition and combining with a stripping process to form a gas-sensitive structure.
Specifically, the preparation method comprises the following steps:
step 1: cleaning the first polymer film and the second polymer film by using a chemical reagent and drying;
step 2: the polymer film is used as a contact electrification layer, the first polymer film and the second polymer film are jointly used as friction electrification materials, and friction electrification charges are generated in the contact process, wherein the electron obtaining capacity of the first polymer film is higher than that of the second polymer film, so that the contact of the first polymer film and the second polymer film can carry negative charges on the surface of the first polymer film and carry positive charges on the surface of the second polymer film;
and step 3: laser cutting the first polymer film into a grating structure as a negative friction material layer 1; the second polymer film is subjected to laser cutting to form a rectangular pattern, and is attached to the outer surface of the top of the gas test cavity to be used as a positive friction material layer 2;
and 4, step 4: depositing different gas-sensitive materials among gaps of different interdigital electrodes by adopting one of methods of spin coating, spray coating, drop coating, sol-gel, self-assembly and chemical vapor deposition and combining a stripping process to form a plurality of gas-sensitive structures;
and 5: cutting an organic glass plate by using a laser cutting machine, assembling the organic glass plate into a gas testing cavity, respectively punching holes on the left side and the right side of the gas testing cavity to serve as a gas inlet and a gas outlet, arranging a plurality of gas-sensitive structures at the bottom in the testing cavity, and filling different gas-sensitive materials between electrodes of different interdigital electrodes to form a self-driven gas sensor array;
step 6: and leading out the interdigital electrode to a test port of a current test instrument through a lead.
The power generation principle of the gas sensor is shown in fig. 2. The negative friction material layer 1 made of PTFE material and the positive friction material layer 2 made of Nylon material are used as energy collection-transmission modules, and the equal-quantity different-sign polarized charges are formed on the PTFE and the Nylon in the contact electrification process, and slide back under the action of external force and output space time-varying electromagnetic oscillation energy (displacement current) to the outside. Initially, the position of the raster line of PTFE overlaps the position of the first interdigitated electrode (IDE). Since PTFE is more triboelectrically negative than Nylon, triboelectric charges occur between the two surfaces, which results in positive charges being induced on the first IDE corresponding to the negative charges on the PTFE surface. In this state, there is no charge between the two electrodes due to electrostatic equilibrium. As the PTFE layer begins to slide to the left, the friction layer gradually moves from the overlapping position in the first IDE to the overlapping position in the second IDE. In this case, a potential drop is generated and positive charge and sliding motion from the first IDE to the second IDE are driven, thereby generating a transient current in the external load. Once the PTFE layer and the second IDE reached a fully overlapping position, all positive charges were transferred to the electrode while another electrostatic equilibrium was achieved. This is a unit step of the sliding. As the PTFE continues to slide left through another step to the first IDE, positive charge will be electrostatically attracted back to the first IDE, thereby creating a reverse current in the circuit. Thus, the power generation cycle is completed. If the PTFE is driven to slide to the right, the reverse process occurs, as shown in FIG. 3.
The gas detection mechanism of the present invention is shown in fig. 4 and 5. FIG. 4 shows a reducing gas NH3For example, external mechanical energy is converted into time-varying electromagnetic oscillation energy through the polarized dielectric layer and transmitted to the interdigital electrode coated with the gas-sensitive material in an air-spaced manner. Due to the fact that the size and the moving speed of the device are fixed, the potential difference between two ends of the interdigital electrode of the device is kept unchanged. And the carrier concentration in the gas sensitive material will be modulated with the gas adsorption process. Therefore, the external mechanical motion modulates the chemical specificity reaction process on the surface of the gas sensitive structure into an output signal, and realizes the self-driven detection of the type and the concentration of the gas to be detected. When the device structure is in dry air, oxygen molecules adsorb and deprive free electrons in the sensitive film to form oxygen ions, and the process reduces the carrier concentration of the gas sensitive film so as to reduce induced current. Then, NH3The induction of the electron-sensitive layer provides electrons to the sensitive film, and the carrier concentration of the gas-sensitive film is improved, so that the induction current is increased.
FIG. 5 shows the oxidizing gas NO2For example, when the device structure is in dry air, oxygen molecules adsorb and abstract free electricity in the sensitive filmThe ions form oxygen ions, which will reduce the gas sensitive film carrier concentration and thus reduce the induced current. Then, NO2The electrons of the sensitive film are further captured by the gas sensor, and the carrier concentration of the gas sensitive film is reduced, so that the size of induced current is further reduced. Therefore, the output current of the gas sensitive structure will change with the change of the concentration of the gas to be measured. Therefore, the concentration of the gas to be measured in the environment can be reversely deduced by detecting the electrical parameters output by the sensor.
The equivalent circuit of the gas detection mechanism of the present invention is shown in fig. 6. The energy collecting part comprises a grating structure negative friction material layer 1 with the same size as the cross section of the gas testing cavity and a positive friction material layer 2 completely covering the upper outer surface of the testing cavity, and is equivalent to a generator for supplying energy to the gas sensitive structure; the gas-sensitive material is deposited in a gas-sensitive structure formed among gaps of the interdigital electrodes and is equivalent to a gas-sensitive resistor; the concentration of the gas to be measured in the environment can be reversely deduced by measuring the output current of the gas-sensitive resistor.
Compared with the traditional self-powered gas sensor, the self-powered gas sensor has the advantages that the energy collection units (the PTFE negative friction material layer 1 and the Nylon positive friction material layer 2 are arranged outside the gas test cavity, as shown in figure 1, so that the friction motion cannot interfere with the flow field of the test cavity and the absorption/desorption of gas molecules, and the stability of gas detection is ensured to the maximum extent.
The size of the wireless self-powered gas sensor array of the embodiment is 4cm × 8cm × 5 cm.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.
Claims (9)
1. A wireless self-powered gas sensor array, characterized by: comprises an energy collection part and a gas detection part,
the energy collecting part comprises a negative friction material layer (1) and a positive friction material layer (2) which have the same size with the cross section of the gas testing cavity (3), the negative friction material layer (1) and the positive friction material layer (2) are positioned outside the gas testing cavity (3), the positive friction material layer (2) completely covers the outer surface of the gas testing cavity (3), the negative friction material layer (1) is positioned above the positive friction material layer (2), the negative friction material layer (1) is of a grating structure, a grating of the negative friction material layer (1) is parallel to an electrode of an interdigital electrode, the characteristic parameters of the grating and the characteristic parameters of the interdigital electrode are the same, the negative friction material layer (1) and the positive friction material layer (2) are used as energy collecting and converting units, the negative friction material layer (1) slides back and forth under the driving of external force, the positive friction material layer (2) is fixed, the negative friction material layer (1) slides under the action of external, the surface of the negative friction material layer (1) is provided with a first polymer film, and the surface of the positive friction material layer (2) is provided with a second polymer film; the electron-obtaining capacity of the first polymer film is stronger than that of the second polymer film, the contact of the first polymer film and the second polymer film can charge negative charges on the surface of the first polymer film, and the surface of the second polymer film can charge positive charges;
the gas detection part comprises a cuboid gas test cavity (3), an array formed by more than two interdigital electrodes is arranged in the gas test cavity (3), and a gas-sensitive material is filled in each interdigital electrode; the gas-sensitive materials filled in the plurality of interdigital electrodes are different from each other, and the gas-sensitive materials on two sides of each interdigital electrode are not communicated; the interdigital electrode is led out through a lead for detecting an electric signal output by the sensor; the interdigital electrode is used for wirelessly collecting time-varying electromagnetic oscillation energy radiated by external force triggering outside the test cavity, and realizing self-driven detection of the type and concentration of the gas to be detected; and the two sides of the gas testing cavity (3) are provided with a gas inlet (5) and a gas outlet (6), and the gas inlet (5) and the gas outlet (6) are respectively connected with a gas inlet pipe and a gas outlet pipe and used for quantitatively leading in and discharging gas to be tested.
2. A wireless self-powered gas sensor array according to claim 1, wherein: the gas-sensitive material between the interdigital electrodes is an organic polymer, or a metal oxide, or an inorganic material which is sensitive to the target gas.
3. A wireless self-powered gas sensor array according to claim 2, wherein: the gas-sensitive material is a composite film formed by one or more than two different materials of polyaniline, polyethylene oxide, polyethyleneimine, sodium polystyrene sulfonate, polyaniline, polyimide, chitosan and graphene oxide.
4. A wireless self-powered gas sensor array according to claim 1, wherein: the first polymer film material of the negative friction material layer (1) is selected from Teflon or polyvinyl fluoride or polyvinyl chloride or polyimide, and the film thickness ranges from 10 microns to 50 microns.
5. A wireless self-powered gas sensor array according to claim 1, wherein: the second polymeric film material of the positive friction material layer (2) is selected from nylon or polyurethane or magnesium fluoride, and the film thickness is in the range of 10-50 microns.
6. A wireless self-powered gas sensor array according to claim 1, wherein: the grating of the negative friction material layer (1) is parallel to the electrodes of the interdigital electrodes, and the following characteristic parameters of the negative friction material layer are the same: the length of the whole grating is A, the width of the whole grating is B, the width of each light transmission part of the grating is C, the grating period is D, the duty ratio is 0.5, the length of the interdigital electrode is E, the sum of the widths of all the interdigital electrodes in the width direction is F, the transverse farthest distance of the two interdigital electrodes is G, the period of the interdigital electrode is H, the A is equal to E, the B is equal to F, the C is equal to G, and the D is equal to H.
7. A wireless self-powered gas sensor array according to claim 1, wherein: the test chamber consists of an acrylic plate.
8. A method of making a wireless self-powered gas sensor array as claimed in any one of claims 1 to 7, wherein: and depositing the gas-sensitive material between the gaps of the interdigital electrodes by adopting one of methods of spin coating, spray coating, drop coating, sol-gel, self-assembly and chemical vapor deposition and combining a stripping process to form a gas-sensitive structure.
9. The method of claim 8, comprising the steps of:
step 1: cleaning the first polymer film and the second polymer film by using a chemical reagent and drying;
step 2: the polymer film is used as a contact electrification layer, the first polymer film and the second polymer film are jointly used as friction electrification materials, and friction electrification charges are generated in the contact process, wherein the electron obtaining capacity of the first polymer film is higher than that of the second polymer film, so that the contact of the first polymer film and the second polymer film can carry negative charges on the surface of the first polymer film and carry positive charges on the surface of the second polymer film;
and step 3: laser cutting the first polymer film into a grating structure as a negative friction material layer (1); laser cutting the second polymer film into a rectangular pattern, and attaching the rectangular pattern to the outer surface of the top of the gas test cavity to be used as a positive friction material layer (2);
and 4, step 4: depositing different gas-sensitive materials among gaps of different interdigital electrodes by adopting one of methods of spin coating, spray coating, drop coating, sol-gel, self-assembly and chemical vapor deposition and combining a stripping process to form a plurality of gas-sensitive structures;
and 5: cutting an organic glass plate by using a laser cutting machine, assembling the organic glass plate into a gas testing cavity, respectively punching holes on the left side and the right side of the gas testing cavity to serve as a gas inlet and a gas outlet, arranging a plurality of gas-sensitive structures at the bottom in the testing cavity, and filling different gas-sensitive materials between electrodes of different interdigital electrodes to form a self-driven gas sensor array;
step 6: and leading out the interdigital electrode to a test port of a current test instrument through a lead.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
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| CN201911274569.6A CN111307878A (en) | 2019-12-12 | 2019-12-12 | Wireless self-powered gas sensor array and preparation method thereof |
| US17/120,239 US11802859B2 (en) | 2019-12-12 | 2020-12-13 | Wireless self-powered gas sensor based on electromagnetic oscillations triggered by external forces and fabrication method thereof |
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| CN201911274569.6A CN111307878A (en) | 2019-12-12 | 2019-12-12 | Wireless self-powered gas sensor array and preparation method thereof |
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