CN111304637A - Coating film production equipment - Google Patents

Coating film production equipment Download PDF

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Publication number
CN111304637A
CN111304637A CN202010188797.8A CN202010188797A CN111304637A CN 111304637 A CN111304637 A CN 111304637A CN 202010188797 A CN202010188797 A CN 202010188797A CN 111304637 A CN111304637 A CN 111304637A
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China
Prior art keywords
vacuum
heating
cavity
conveying
loading
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Granted
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CN202010188797.8A
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Chinese (zh)
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CN111304637B (en
Inventor
梁建军
朱海剑
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Changzhou Jiejiachuang Precision Machinery Co Ltd
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Changzhou Jiejiachuang Precision Machinery Co Ltd
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Priority to CN202010188797.8A priority Critical patent/CN111304637B/en
Publication of CN111304637A publication Critical patent/CN111304637A/en
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Publication of CN111304637B publication Critical patent/CN111304637B/en
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention provides a coating production device, which comprises: the loading cavity is provided with a first vacuum pump; the feeding end of the heating assembly is connected with the loading box, and the heating assembly comprises at least two vacuum heating devices; the discharging cavity is connected with the discharging end of the heating assembly, and a second vacuum pump is arranged on the discharging cavity; the conveying assembly is connected with the loading cavity, the heating assembly and the unloading cavity; wherein, the conveying assembly is configured to be suitable for conveying the at least two workpieces in the loading cavity into the at least two vacuum heating devices respectively for heating, and conveying the at least two workpieces after heating from the vacuum heating devices to the unloading cavity. The coating production equipment can heat a plurality of workpieces simultaneously in a single vacuumizing-backfilling atmosphere cycle, so that the processing efficiency is greatly improved. And then realize optimizing coating film production facility structure, promote coating film production facility production efficiency, reduce product manufacturing cost's technical effect.

Description

Coating film production equipment
Technical Field
The invention relates to the technical field of coating production, in particular to coating production equipment.
Background
In the production process of solar cells, the productivity of a Plasma Enhanced Chemical Vapor Deposition (PECVD) coating device directly affects the cost of the cells, and in the conventional PECVD device, a lot of time is spent for vacuumizing and backfilling the atmosphere when each carrier plate enters and exits a vacuum cavity every time, and meanwhile, in order to ensure uniform temperature of silicon wafers during process reaction, heaters are required to be placed in a plurality of cavities and a lot of time is spent for radiating and heating the silicon wafers, so that the cost of the device is greatly increased, and the productivity in unit time is greatly restricted.
Disclosure of Invention
The present invention is directed to solving at least one of the problems of the prior art or the related art.
Therefore, the invention provides coating production equipment.
In view of the above, the present invention provides a plating production apparatus, including: the loading cavity is provided with a first vacuum pump; the feeding end of the heating assembly is connected with the loading box, and the heating assembly comprises at least two vacuum heating devices; the discharging cavity is connected with the discharging end of the heating assembly, and a second vacuum pump is arranged on the discharging cavity; the conveying assembly is connected with the loading cavity, the heating assembly and the unloading cavity; wherein, the conveying assembly is configured to be suitable for conveying the at least two workpieces in the loading cavity into the at least two vacuum heating devices respectively for heating, and conveying the at least two workpieces after heating from the vacuum heating devices to the unloading cavity.
In the technical scheme, the coating production equipment comprises a loading cavity, a heating assembly, a discharging cavity and a conveying assembly. The feeding cavity is connected with the feeding end of the heating assembly and used for conveying workpieces to be processed to the heating assembly, and the heating assembly is used for heating the workpieces so as to meet the process requirements of users. The loading cavity is connected with the discharging end of the heating assembly and used for receiving the heated workpieces and conveying the heated workpieces out of the coating production equipment in a centralized manner. According to the process requirements of workpieces, a first vacuum pump is arranged on the loading cavity, at least two vacuum heating devices are arranged in the heating assembly, and a second vacuum pump is arranged on the unloading cavity, so that the loading cavity can load the workpieces into the vacuum heating devices after synchronizing air pressure with the vacuum heating devices, and the workpieces which are processed are received by the vacuum heating devices after synchronizing air pressure with the vacuum heating devices in the unloading cavity correspondingly, so that the vacuum environment of the vacuum heating devices is not damaged, and the quality of the processed workpieces is stable and reliable. The conveying assembly is connected with the loading cavity, the heating assembly and the unloading cavity, can simultaneously convey at least two workpieces from the loading cavity to at least two vacuum heating devices of the heating devices respectively for heating, and can also simultaneously convey the workpieces from the at least two vacuum heating devices to the unloading cavity from the heating assembly.
The at least two vacuum heating devices are arranged on the coating production equipment, and the conveying assembly capable of conveying and outputting workpieces to the at least two vacuum heating devices is arranged, so that the coating production equipment can complete the heating process of a plurality of workpieces simultaneously when a vacuumizing cycle is performed, the steps of vacuumizing once and backfilling atmosphere are avoided when each workpiece enters and exits the loading cavity, the heating assembly and the unloading cavity, the coating production equipment can heat the workpieces simultaneously in a single vacuumizing-backfilling atmosphere cycle, and the processing efficiency is greatly improved. And then realize optimizing coating film production facility structure, promote coating film production facility production efficiency, reduce product manufacturing cost's technical effect.
In addition, the coating production equipment provided by the invention can also have the following additional technical characteristics:
in the technical scheme, at least two vacuum heating devices are connected in series.
In the technical scheme, the arrangement mode of the vacuum heating device is specifically limited. At least two vacuum heating devices are connected in series, and the conveying assembly is sequentially connected with the vacuum heating devices connected in series. By connecting at least two vacuum heating devices in series, the number of branches of the conveying assembly can be reduced, so that a single conveying assembly can sequentially complete workpiece loading and workpiece unloading of the at least two vacuum heating devices in one vacuumizing-backfilling atmosphere cycle. Therefore, the technical effects of optimizing the structure of the heating assembly, simplifying the structure of the conveying assembly, improving the productivity of the coating production equipment and reducing the cost of the coating production equipment are achieved.
In any of the above technical solutions, the transfer assembly includes: conveying wheelset, conveying wheelset includes: the conveying wheels are respectively arranged in the loading cavity, the unloading cavity and the vacuum heating device; the carrier plate is arranged on the conveying wheel set, the conveying wheel rotates to drive the carrier plate to move on the conveying wheel set, and the carrier plate is configured to be suitable for bearing a workpiece.
In this technical solution, the structure of the transfer assembly is specifically defined. The conveying assembly comprises a conveying wheel set and a carrier plate, the conveying wheel set is a conveying structure of the conveying assembly and is composed of a plurality of conveying wheels, and the plurality of conveying wheels are respectively arranged in the loading cavity, the vacuum heating device and the unloading cavity. The carrier plate is a positioning bearing structure of the conveying assembly, the carrier plate is placed on the conveying wheel set and moves on the conveying wheel set under the driving of the conveying wheel set, and the workpiece is positioned on the carrier plate and moves along with the carrier plate. In the working process, the carrier plate with the workpiece is placed into the loading cavity and moves into the vacuum heating device under the driving of the conveying wheel set, and after the vacuum heating device finishes heating the workpiece on the carrier plate, the conveying wheel set conveys the carrier plate into the loading cavity, so that the heated workpiece can enter the next processing link. Wherein, conveying wheelset and support plate are split type structure, the user can directly place the support plate of accomplishing the loading on the conveying wheelset to get into the heating link as early as possible, when going out to carry on the same reason, the user can directly dismantle the support plate that bears the work piece that has accomplished the heating from the conveying wheelset, and get into next heating cycle fast, thereby promoted the loading and unloading rate of work piece on the conveying subassembly by a wide margin, and then realize optimizing conveying subassembly structure, promote conveying subassembly work efficiency, promote the technological effect of coating film production facility productivity.
In any of the above technical solutions, the number of the conveying wheel sets is the same as that of the vacuum heating devices, and different transmission wheel sets are located on different planes; the number of the carrier plates is the same as that of the vacuum heating devices, and each conveying wheel set is provided with one carrier plate.
In the technical scheme, the structure of the transmission wheel set is further limited. The number of the conveying wheel sets is the same as that of the vacuum heating devices, the plurality of conveying wheel sets correspond to the plurality of vacuum heating devices one to one, and different conveying wheel sets are distributed on different planes to avoid interference. The number of the carrier plates is the same as that of the vacuum heating devices, and the plurality of carrier plates correspond to the plurality of vacuum heating devices and the plurality of conveying wheel sets one by one so as to convey and output workpieces for the plurality of vacuum heating devices through the plurality of carrier plates under the driving of the plurality of conveying wheel sets. In the working process, different carrier plates respectively move on different planes, when the carrier plates move to the corresponding vacuum heating device, the carrier plates stop moving and perform a heating process, and after the heating is completed, the carrier plates move to the load discharging cavity together and are output by the load discharging cavity. The conveying wheel sets and the support plates corresponding to the number of the vacuum heating devices are arranged, so that the conveying assembly can convey and output workpieces for the plurality of vacuum heating devices at the same time, and the coating production equipment can heat as many workpieces as possible in one vacuumizing-atmosphere backfilling cycle. And then realize optimizing the transmission assembly structure, promote the production efficiency of coating film production facility, promote the productivity by a wide margin, reduction in production cost's technical effect.
In any of the above technical solutions, the vacuum heating apparatus includes: a heating box; the heater is arranged in the heating box; and the lifting device is arranged on the heating box and connected with the heater, and the lifting device lifts or lowers the heater.
In the technical scheme, the vacuum heating device comprises a heating box, a heater and a lifting device. The heating box encloses and limits the heating chamber. A heater is disposed within the heating chamber to provide heat to the workpiece for heating by a user. The lifting device is arranged at the bottom of the heating box and connected with the heater, and the lifting device can drive the heater to rise or fall, so that the heater can be close to the workpiece when the workpiece needs to be heated, and the workpiece is separated after the heating is finished. Through setting up the heater that is connected with elevating gear, make heating device can closely heat the work piece, promoted heating efficiency on the one hand by a wide margin, on the other hand avoids appearing the uneven phenomenon of work piece heating through closely contacting the heating, and then has realized optimizing the heating device structure, promotes heating device reliability, promotes the technological effect of coating film production facility's production precision.
In any of the above technical solutions, the transmission wheel set further includes: and the telescopic device is arranged on the loading cavity, the unloading cavity and the vacuum heating device and is connected with the conveying wheel.
In the technical scheme, a telescopic device is further arranged on the conveying wheel set, the telescopic device and the conveying wheel are correspondingly arranged in the loading cavity, the vacuum heating device and the unloading cavity, and the telescopic end of the telescopic device is connected with the conveying wheel so as to drive the conveying wheel to extend out or retract back. In the working process, the carrier plate bearing the workpiece to be heated stops moving after moving into the target heating box, the conveying wheel on the conveying wheel set of the vacuum heating device is not in charge of moving to retract under the driving of the telescopic device, then the lifting device drives the heater to ascend, so that the workpiece on the carrier plate can be attached to the heater, the heater can be ensured to contact with the heating workpiece, the lifting device drives the heater to reset after the heating is finished, and the telescopic device drives the retracted conveying wheel to extend out. The interference of a plurality of transmission wheel sets arranged in the vacuum heating device to the lifting device can be avoided by arranging the telescopic device, and the heater in each vacuum heating device can be ensured to be contacted with the workpiece on the corresponding support plate. And then realized optimizing the conveying wheelset structure, promoted the practicality of coating film production facility and the technological effect of reliability.
In any of the above technical solutions, a grid is arranged on the carrier plate, and the workpiece is embedded on the grid; the heater is provided with a groove corresponding to the grid, and the grid falls into the groove after the heater in the lifting process is contacted with the workpiece.
In the technical scheme, the carrier plate is provided with a grating matched with the appearance of the workpiece, and the workpiece is embedded on the grating so as to position the workpiece through the grating. Meanwhile, the heater is provided with a groove corresponding to the shape of the grid, so that the support plate can fall into the groove after the lifting device drives the heater to rise, the workpiece can be separated from the support plate and is in contact with the heater, and after heating is finished, the lifting device drives the heater to fall, and the workpiece falls onto the grid of the support plate again. Through set up corresponding grid and slot on support plate and heater, make the work piece break away from the support plate and contact with the heater in the heating process to guarantee the heating efficiency and the heating effect of work piece, avoid appearing the heating inequality, heating incomplete technical problem, and then promote coating film production facility's reliability and stability.
In any of the above technical solutions, the coating production apparatus further includes: one end of the first vacuum gate valve is connected with the loading cavity, and the other end of the first vacuum gate valve is connected with the feeding end; one end of the second vacuum gate valve is connected with the loading cavity, and the other end of the second vacuum gate valve is connected with the discharging end; and two ends of the third vacuum gate valve are respectively connected with different vacuum heating devices.
In the technical scheme, the coating production equipment is also provided with a first vacuum gate valve, a second vacuum gate valve and a third vacuum gate valve. The first vacuum gate valve is communicated with the loading cavity and the vacuum heating device, when the loading cavity needs to convey a workpiece to the heating assembly, the first vacuum gate valve is opened, then the first vacuum gate valve is closed and the workpiece is heated, and by arranging the first vacuum gate valve, the stability of air pressure in the vacuum heating assembly can be guaranteed, and on the other hand, heat loss can be avoided. The second vacuum gate valve is communicated with the vacuum heating device and the load discharging cavity, after the workpiece is heated, the second vacuum gate valve is opened, after all the carrier plates enter the load discharging cavity, the second vacuum gate valve is closed, the second vacuum gate valve is matched with the first vacuum gate valve, so that the air pressure in the vacuum heating device is stable, the step of frequently extracting the air in the vacuum heating device is omitted, the production efficiency is further improved, and the production cost is reduced. The third vacuum gate valve is communicated with the two adjacent different vacuum heating devices, the third vacuum gate valve is opened when the workpiece is loaded and unloaded, and the workpiece can be independently heated by each vacuum heating device by arranging the third vacuum gate valve, so that the application range of the coating production equipment is widened, and the practicability of the product is improved.
In any of the above technical solutions, the coating production apparatus further includes: and the third vacuum pump is connected with the vacuum heating device and is configured to extract gas in the vacuum heating device.
In the technical scheme, the coating production equipment is also provided with a third vacuum pump, and the third vacuum pump is connected with the vacuum heating device and used for extracting gas in the vacuum heating device, so that the heating process in a vacuum state is met, and a workpiece meeting the requirements is obtained.
In any of the above technical solutions, the coating production apparatus further includes: the first atmosphere gate valve is arranged on the loading cavity and opens or closes a feeding hole in the loading cavity; and the second atmosphere valve is arranged on the unloading cavity and opens or closes the discharge hole in the unloading cavity.
In the technical scheme, the coating production equipment is further provided with a first atmosphere gate valve and a second atmosphere gate valve, the first atmosphere gate valve is arranged on the loading cavity and used for opening and closing a feeding hole of the loading cavity, and the second atmosphere gate valve is arranged on the unloading cavity and used for opening and closing a discharging hole in the unloading cavity. In the working process, after the workpieces are all placed in the loading cavity, the first atmosphere valve is closed, and the first vacuum pump extracts gas in the loading cavity so as to balance the air pressure of the loading cavity and the vacuum heating device. And after the workpieces which are heated completely enter the loading and unloading cavity, opening a second atmosphere valve to convey the workpieces out of the coating production equipment.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a schematic view showing the structure of a plating production apparatus according to an embodiment of the present invention;
fig. 2 is another schematic structural view showing a plating production apparatus according to an embodiment of the present invention;
FIG. 3 is a schematic view showing the construction of a plating production apparatus according to another embodiment of the invention;
FIG. 4 is a schematic view showing the construction of a plating production apparatus according to still another embodiment of the invention;
FIG. 5 is a schematic view showing the construction of a plating production apparatus according to still another embodiment of the invention;
fig. 6 is a schematic view showing the structure of a plating production apparatus according to still another embodiment of the invention.
Wherein, the correspondence between the reference numbers and the part names in fig. 1 to 6 is:
1 coating production equipment, 10 loading chamber, 102 first vacuum pump, 104 first atmosphere valve, 20 vacuum heating device, 202 heating box, 204 heater, 206 groove, 208 lifting device, 210 third vacuum pump, 30 unloading chamber, 302 second vacuum pump, 304 second atmosphere valve, 40 conveying assembly, 402 conveying wheel, 404 loading plate, 406 grating, 50 first vacuum valve, 60 second vacuum valve and 70 third vacuum valve.
Detailed Description
In order that the above objects, features and advantages of the present invention can be more clearly understood, a more particular description of the invention will be rendered by reference to the appended drawings. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those specifically described herein, and therefore the scope of the present invention is not limited by the specific embodiments disclosed below.
A plating film production apparatus 1 according to some embodiments of the invention is described below with reference to fig. 1 to 6.
As shown in fig. 1 and 2, in an embodiment of the first aspect of the present invention, there is provided a plating production apparatus 1, the plating production apparatus 1 including: the loading device comprises a loading cavity 10, wherein a first vacuum pump 102 is arranged on the loading cavity 10; the feeding end of the heating assembly is connected with the loading box, and the heating assembly comprises at least two vacuum heating devices 20; the unloading cavity 30 is connected with the unloading end of the heating assembly, and a second vacuum pump 302 is arranged on the unloading cavity 30; a transfer assembly 40 connected to the loading chamber 10, the heating assembly and the unloading chamber 30; wherein, the transfer assembly 40 is configured to be suitable for transferring at least two workpieces in the loading chamber 10 to at least two vacuum heating devices 20 for heating respectively, and transferring at least two workpieces which are finished to be heated from the vacuum heating devices 20 to the unloading chamber 30.
In this embodiment, the plating production apparatus 1 includes an in-loading chamber 10, a heating assembly, an out-loading chamber 30, and a transfer assembly 40. The loading cavity 10 is connected with the feeding end of the heating assembly and is used for conveying workpieces to be processed to the heating assembly, and the heating assembly is used for heating the workpieces so as to meet the process requirements of users. The discharging cavity 30 is connected with the discharging end of the heating assembly and used for receiving the heated workpieces and intensively conveying the heated workpieces out of the coating production equipment 1. According to the process requirements of workpieces, the first vacuum pump 102 is arranged on the loading cavity 10, the at least two vacuum heating devices 20 are arranged in the heating assembly, and the second vacuum pump 302 is arranged on the unloading cavity 30, so that the workpieces can be loaded into the vacuum heating devices 20 after the loading cavity 10 and the vacuum heating devices 20 synchronize air pressure, and the workpieces which are processed are received by the vacuum heating devices 20 after the unloading cavity 30 and the vacuum heating devices 20 synchronize air pressure, so that the vacuum environment of the vacuum heating devices 20 is not damaged, and the quality of the processed workpieces is stable and reliable. The transfer assembly 40 is connected to the loading chamber 10, the heating assembly and the unloading chamber 30, the transfer assembly 40 can simultaneously transfer at least two workpieces from the loading chamber 10 to at least two vacuum heating devices 20 of the heating devices for heating, respectively, and the transfer assembly 40 can also simultaneously transfer workpieces from at least two vacuum heating devices 20 from the heating assembly to the unloading chamber 30.
By arranging at least two vacuum heating devices 20 on the coating production equipment 1 and arranging the conveying assembly 40 which can convey and output workpieces to the at least two vacuum heating devices 20 simultaneously, the coating production equipment 1 can complete the heating process of a plurality of workpieces simultaneously when a vacuumizing cycle is performed, thereby avoiding the steps of vacuumizing and backfilling atmosphere when each workpiece enters and exits the loading cavity 10, the heating assembly and the unloading cavity 30, and enabling the coating production equipment 1 to heat a plurality of workpieces simultaneously in a single vacuumizing-backfilling atmosphere cycle, so that the processing efficiency is greatly improved. Further realizing the technical effects of optimizing the structure of the coating production equipment 1, improving the production efficiency of the coating production equipment 1 and reducing the production cost of products.
In one embodiment of the present invention, further, as shown in fig. 2, at least two vacuum heating apparatuses 20 are connected in series.
In this embodiment, the arrangement of the vacuum heating apparatus 20 is specifically defined. At least two vacuum heating devices 20 are connected in series, and the conveying assembly 40 is sequentially connected with the vacuum heating devices 20 connected in series. By connecting at least two vacuum heating apparatuses 20 in series, the number of branches of the transfer module 40 can be reduced, so that a single transfer module 40 can sequentially perform workpiece loading and workpiece unloading of at least two vacuum heating apparatuses 20 in one evacuation-backfill atmosphere cycle. Therefore, the technical effects of optimizing the structure of the heating assembly, simplifying the structure of the conveying assembly 40, improving the productivity of the coating production equipment 1 and reducing the cost of the coating production equipment 1 are achieved.
In one embodiment of the present invention, further, as shown in fig. 2, the transfer assembly 40 includes: a set of transfer wheels 402, the set of transfer wheels 402 comprising: a plurality of transfer wheels 402, the plurality of transfer wheels 402 being respectively disposed in the loading chamber 10, the unloading chamber 30 and the vacuum heating apparatus 20; the carrier 404 is disposed on the set of transmission wheels 402, the transmission wheels 402 rotate to drive the carrier 404 to move on the set of transmission wheels 402, and the carrier 404 is configured to carry a workpiece.
In this embodiment, the structure of the transfer assembly 40 is specifically defined. The transfer assembly 40 includes a group of transfer wheels 402 and a carrier plate 404, the group of transfer wheels 402 is a conveying structure of the transfer assembly 40 and is composed of a plurality of transfer wheels 402, and the plurality of transfer wheels 402 are respectively disposed in the loading chamber 10, the vacuum heating apparatus 20 and the unloading chamber 30. The carrier 404 is a positioning and carrying structure of the conveying assembly 40, and the carrier 404 is placed on the set of conveying wheels 402 and moved on the set of conveying wheels 402 by the set of conveying wheels 402, wherein the workpiece is positioned on the carrier 404 and moves along with the carrier 404. In the working process, the carrier plate 404 with the workpiece is placed in the loading chamber 10 and moved to the vacuum heating device 20 under the driving of the conveying wheel 402 set, and after the vacuum heating device 20 finishes heating the workpiece on the carrier plate 404, the conveying wheel 402 set conveys the carrier plate 404 to the unloading chamber 30, so that the heated workpiece can enter the next processing step. The conveying wheel 402 group and the carrier plate 404 are of a split structure, a user can directly place the carrier plate 404 which is loaded completely on the conveying wheel 402 group to enter a heating link as soon as possible, and similarly, when the carrier plate is unloaded, the user can directly disassemble the carrier plate 404 which bears the workpiece which is heated completely from the conveying wheel 402 group and quickly enter the next heating cycle, so that the loading and unloading rate of the workpiece on the conveying assembly 40 is greatly improved, the structure of the conveying assembly 40 is optimized, the working efficiency of the conveying assembly 40 is improved, and the technical effect of the coating production equipment 1 is improved.
In one embodiment of the present invention, further, as shown in fig. 2, the number of sets of transfer wheels 402 is the same as the number of vacuum heating devices 20, with different sets of drive wheels located on different planes; the number of carrier plates 404 is the same as the number of vacuum heating devices 20, and one carrier plate 404 is arranged on each group of transfer wheels 402.
In this embodiment, the structure of the set of transfer wheels 402 is further defined. The number of sets of transfer wheels 402 is the same as the number of vacuum heating apparatuses 20, the plurality of sets of transfer wheels 402 corresponds to the plurality of vacuum heating apparatuses 20 one-to-one, and different sets of transfer wheels 402 are distributed on different planes to avoid interference. Wherein, the number of the carrier plates 404 is the same as that of the vacuum heating devices 20, and the plurality of carrier plates 404 correspond to the plurality of vacuum heating devices 20 and the plurality of groups of the conveying wheels 402 one by one, so as to convey and output the workpieces for the plurality of vacuum heating devices 20 simultaneously through the plurality of carrier plates 404 under the driving of the plurality of groups of the conveying wheels 402. In the working process, different carrier plates 404 move on different planes respectively, when the carrier plates 404 move to the corresponding vacuum heating device, the movement is stopped and the heating process is executed, and after the heating is completed, a plurality of carrier plates 404 move together to the unloading cavity 30 and are output from the unloading cavity 30. By arranging the conveying wheel 402 group and the carrier plate 404 corresponding to the number of the vacuum heating devices 20, the conveying assembly 40 can simultaneously convey and output workpieces for a plurality of vacuum heating devices 20, so that the coating production equipment 1 can heat as many workpieces as possible in one vacuumizing-atmosphere backfilling cycle. Thereby realizing the technical effects of optimizing the structure of the conveying assembly 40, improving the production efficiency of the coating production equipment 1, greatly improving the productivity and reducing the production cost.
In an embodiment of the present invention, further, as shown in fig. 1, the vacuum heating apparatus 20 includes: a heating chamber 202; a heater 204 disposed in the heating box 202; and an elevating device 208 disposed on the heating chamber 202 and connected to the heater 204, wherein the elevating device 208 raises or lowers the heater 204.
In this embodiment, the vacuum heating apparatus 20 includes a heating box 202, a heater 204, and a lifting device 208. The heating chamber 202 encloses to define a heating chamber. A heater 204 is disposed within the heating chamber 202 to provide heat for a user to heat the workpiece. The lifting device 208 is disposed at the bottom of the heating box 202 and connected to the heater 204, and the lifting device 208 can drive the heater 204 to be lifted or lowered, so that the heater 204 can be close to the workpiece when the workpiece needs to be heated, and can be separated from the workpiece after the heating is completed. Through setting up the heater 204 that is connected with elevating gear 208, make heating device can closely heat the work piece, promoted heating efficiency on the one hand by a wide margin, on the other hand avoids appearing the uneven phenomenon of work piece heating through closely contacting the heating, and then has realized optimizing the heating device structure, promotes the heating device reliability, promotes the technological effect of the production precision of coating film production facility 1.
In an embodiment of the present invention, further, as shown in fig. 1, the set of transfer wheels 402 further includes: the telescopic device is arranged on the loading cavity 10, the unloading cavity 30 and the vacuum heating device 20 and is connected with the conveying wheel 402.
In this embodiment, the set of transfer wheels 402 is further provided with a retractable device, which is disposed in the loading chamber 10, the vacuum heating device 20 and the unloading chamber 30 corresponding to the transfer wheels 402, wherein the retractable end of the retractable device is connected to the transfer wheels 402 to drive the transfer wheels 402 to extend or retract. In the working process, the carrier plate 404 carrying the workpiece to be heated stops moving after moving into the target heating box 202, and then the conveying wheel 402 on the conveying wheel 402 group not responsible for moving the vacuum heating device 20 retracts under the driving of the expansion device, and then the lifting device 208 drives the heater 204 to ascend, so that the workpiece on the carrier plate 404 can be attached to the heater 204, the heater 204 can be ensured to contact with the heated workpiece, after the heating is completed, the lifting device 208 drives the heater 204 to reset, and the expansion device drives the retracted conveying wheel 402 to extend. Interference of the lifting device 208 by the plurality of conveying wheel 402 sets arranged in the vacuum heating device 20 can be avoided by arranging the telescopic device, and the heater 204 in each vacuum heating device 20 can be ensured to be contacted with the workpiece on the corresponding support plate 404. And then realized optimizing transfer gear 402 group structure, promoted the practicality of coating film production facility 1 and the technological effect of reliability.
In an embodiment of the present invention, further, as shown in fig. 1, a grid 406 is disposed on the carrier 404, and the workpiece is embedded on the grid 406; the heater 204 is provided with grooves 206 corresponding to the grill 406, and the grill 406 falls into the grooves 206 after the raised heater 204 comes into contact with the workpiece.
In this embodiment, the carrier 404 is provided with a grid 406 adapted to the shape of the workpiece, and the workpiece is embedded on the grid 406 to position the workpiece through the grid 406. Meanwhile, the heater 204 is provided with a groove 206 corresponding to the shape of the grid 406, so that after the lifting device 208 drives the heater 204 to ascend, the carrier plate 404 can fall into the groove 206, so that the workpiece can be separated from the carrier plate 404 and is in contact with the heater 204, after the heating is finished, the lifting device 208 drives the heater 204 to descend, and the workpiece falls onto the grid 406 of the carrier plate 404 again. The corresponding grids 406 and the corresponding grooves 206 are arranged on the support plate 404 and the heater 204, so that the workpiece can be separated from the support plate 404 and is in contact with the heater 204 in the heating process, the heating efficiency and the heating effect of the workpiece are ensured, the technical problems of uneven heating and incomplete heating are avoided, and the reliability and the stability of the coating production equipment 1 are further improved.
In an embodiment of the present invention, further, as shown in fig. 2, the plating production apparatus 1 further includes: a first vacuum gate valve 50, one end of the first vacuum gate valve 50 being connected to the loading chamber 10, and the other end of the first vacuum gate valve 50 being connected to the feeding end; a second vacuum gate valve 60, one end of the second vacuum gate valve 60 is connected with the loading cavity 30, and the other end of the second vacuum gate valve 60 is connected with the discharging end; and a third vacuum gate valve 70, both ends of the third vacuum gate valve 70 being connected to different vacuum heating means 20, respectively.
In this embodiment, the plating production apparatus 1 is also provided with a first vacuum gate valve 50, a second vacuum gate valve 60, and a third vacuum gate valve 70. The first vacuum gate valve 50 is communicated with the loading cavity 10 and the vacuum heating device 20, when the loading cavity 10 needs to convey a workpiece to the heating assembly, the first vacuum gate valve 50 is opened, then the first vacuum gate valve 50 is closed and the workpiece is heated, and by arranging the first vacuum gate valve 50, on one hand, the air pressure in the vacuum heating assembly can be ensured to be stable, and on the other hand, heat loss can be avoided. The second vacuum gate valve 60 is communicated with the vacuum heating device 20 and the unloading cavity 30, after the workpiece is heated, the second vacuum gate valve 60 is opened, after all the carrier plates 404 enter the unloading cavity 30, the second vacuum gate valve 60 is closed, the second vacuum gate valve 60 is matched with the first vacuum gate valve 50, so that the air pressure in the vacuum heating device 20 is stable, the frequent step of extracting the air in the vacuum heating device 20 is omitted, the production efficiency is improved, and the production cost is reduced. The third vacuum gate valve 70 is communicated with two adjacent different vacuum heating devices 20, the third vacuum gate valve 70 is opened when the workpiece is loaded and unloaded, and each vacuum heating device 20 can independently heat the workpiece by arranging the third vacuum gate valve 70, so that the application range of the coating production equipment 1 is widened, and the practicability of the product is improved.
In an embodiment of the present invention, further, as shown in fig. 1, the plating production apparatus 1 further includes: and a third vacuum pump 210 connected to the vacuum heating apparatus 20, wherein the third vacuum pump 210 is configured to pump gas from the vacuum heating apparatus 20.
In this embodiment, the coating production equipment 1 is further provided with a third vacuum pump 210, and the third vacuum pump 210 is connected to the vacuum heating device 20 and is used for extracting gas in the vacuum heating device 20, so as to satisfy the heating process in a vacuum state and obtain a workpiece meeting the requirement.
In an embodiment of the present invention, further, as shown in fig. 2, the plating production apparatus 1 further includes: the first atmosphere valve 104 is arranged on the loading chamber 10, and the first atmosphere valve 104 opens or closes a feeding hole on the loading chamber 10; and the second atmosphere valve 304 is arranged on the unloading cavity 30, and the second atmosphere valve 304 opens or closes the discharging hole on the unloading cavity 30.
In this embodiment, the plating production apparatus 1 is further provided with a first large atmosphere valve 104 and a second large atmosphere valve 304, the first large atmosphere valve 104 is provided on the loading chamber 10 for opening and closing the feeding port of the loading chamber 10, and the second large atmosphere valve 304 is provided on the unloading chamber 30 for opening and closing the discharging port of the unloading chamber 30. In operation, after the workpieces are all placed in the loading chamber 10, the first atmosphere valve 104 is closed, and the first vacuum pump 102 pumps the gas in the loading chamber 10 to balance the gas pressures of the loading chamber 10 and the vacuum heating device 20. After the workpieces which are completely heated enter the unloading chamber 30, the second atmosphere valve 304 is opened to convey the workpieces out of the coating production equipment 1.
In one embodiment of the invention:
the invention designs the heater 204 with the aluminum boss, and the lifting action in the process cavity (the vacuum heating device 20) enables the silicon chip (the workpiece) to be automatically separated from the carrier plate 404 and directly contact and fall on the boss surface with even high temperature, so as to form an efficient heat conduction heating mode for process reaction; after the process is finished, the silicon wafer automatically falls on the carrier plate 404 by the lifting action in the process chamber and is separated from the heater 204, and the subsequent carrier plate 404 is continuously conveyed.
The double-layer conveying wheel 402 group is arranged in the loading cavity 10 and the unloading cavity 30, two support plates 404 can simultaneously enter and exit the loading cavity 10 and the unloading cavity 30, vacuumizing and backfilling atmosphere are simultaneously carried out, then each support plate 404 respectively enters a process reaction station in one process cavity and a silicon wafer coating process is simultaneously carried out, the productivity of equipment is greatly improved, and the energy consumption problem caused by frequent vacuumizing and backfilling atmosphere is solved.
The carrier plate 404 is a hollow carrier plate 404, and is made of a carbon fiber material and is high temperature resistant; the heater 204 has a plurality of bosses with recesses (grooves 206) therebetween, into which recesses the carrier plate 404 may be dropped in its solid portions.
In another embodiment of the invention:
as shown in fig. 2, two carrier plates 404 enter the loading chamber 10 through the upper and lower rows of conveying wheels 402, then the first atmosphere valve 104 is closed, vacuum pumping is started, the required vacuum pressure is reached, and the pressure in the vacuum heating device 20 is kept consistent; at this time, the heater 204 in the vacuum heating apparatus 20 has been heated for a long time, and the upper surface of the projection on the heater 204 has reached the desired uniform high temperature.
As shown in fig. 3, the first vacuum gate valve 50 and the third vacuum gate valve 70 are opened, and the two carrier plates 404 are transferred to the two vacuum heating apparatuses 20, respectively, by the transfer wheel 402 set.
As shown in fig. 4, the lifting devices 208 in the vacuum heating apparatus 20 respectively lift, the silicon wafers (workpieces) on the carrier plate 404 respectively fall onto the bosses of the heater 204, and meanwhile, the carrier plate 404 falls into the grooves (grooves 206) between the bosses, and continues to lift to separate the carrier plate 404 from the set of transfer wheels 402, so that the silicon wafers are rapidly heated by heat conduction; the lifting device 208 carries the carrier plate 404 and the silicon wafer to a required position for carrying out a process reaction.
As shown in fig. 5, after the process is finished, the lifting device 208 in the vacuum heating apparatus 20 is lowered, the two carrier plates 404 are respectively dropped onto the two sets of conveying wheels 402, the lifting device 208 is further lowered, so that the periphery of each silicon wafer on the bosses of the heater 204 is dropped onto the corresponding silicon wafer area (grid 406) on the carrier plate 404, and the silicon wafer is separated from the boss surfaces on the heater 204.
As shown in fig. 6, the vacuum second vacuum gate valve 60 is opened, the carrier plate 404 with the silicon wafer is transported to the unloading chamber 30 through the set of transfer wheels 402, the second vacuum gate valve 60 is closed for backfilling atmosphere, the second atmosphere gate valve 304 is opened, and the carrier plate 404 is transported out of the unloading chamber 30 through the set of transfer wheels 402.
The contact heat conduction and the separation transmission among the silicon chip, the support plate 404 and the heater 204 are simple and efficient, compared with the traditional mode, the time spent by the whole beat is greatly reduced, the heating uniformity of the silicon chip is well ensured, the capacity is greatly improved, and the cost and the energy consumption are well controlled.
In the description of the present invention, the terms "plurality" or "a plurality" refer to two or more, and unless otherwise specifically defined, the terms "upper", "lower", and the like indicate orientations or positional relationships based on the orientations or positional relationships illustrated in the drawings, and are only for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention; the terms "connected," "mounted," "secured," and the like are to be construed broadly and include, for example, fixed connections, removable connections, or integral connections; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the description of the present invention, the description of the terms "one embodiment," "some embodiments," "specific embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In the present invention, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. A coating film production apparatus, characterized by comprising:
the loading device comprises a loading cavity, a first vacuum pump and a second vacuum pump, wherein the first vacuum pump is arranged on the loading cavity;
the feeding end of the heating assembly is connected with the loading box, and the heating assembly comprises at least two vacuum heating devices;
the discharging cavity is connected with the discharging end of the heating assembly, and a second vacuum pump is arranged on the discharging cavity;
the conveying assembly is connected with the loading cavity, the heating assembly and the unloading cavity;
wherein the conveying assembly is configured to be suitable for conveying at least two workpieces in the loading cavity into at least two vacuum heating devices for heating respectively, and conveying the at least two workpieces after being heated to the unloading cavity by the vacuum heating devices.
2. The plating film production apparatus according to claim 1, wherein at least two of the vacuum heating devices are connected in series.
3. The plating production apparatus according to claim 2, wherein the conveyance assembly comprises:
a transfer wheel set, the transfer wheel set comprising:
the conveying wheels are respectively arranged in the loading cavity, the unloading cavity and the vacuum heating device;
the carrier plate is arranged on the conveying wheel set, the conveying wheel rotates to drive the carrier plate to move on the conveying wheel set, and the carrier plate is configured to bear the workpiece.
4. The coating production equipment according to claim 3, wherein the number of the conveying wheel sets is the same as that of the vacuum heating devices, and different transmission wheel sets are positioned on different planes;
the number of the carrier plates is the same as that of the vacuum heating devices, and one carrier plate is arranged on each conveying wheel set.
5. The plating film production apparatus according to claim 4, wherein the vacuum heating device includes:
a heating box;
the heater is arranged in the heating box;
and the lifting device is arranged on the heating box and connected with the heater, and the lifting device lifts or lowers the heater.
6. The coating production apparatus of claim 4, wherein the transfer wheel assembly further comprises:
and the telescopic device is arranged on the loading cavity, the unloading cavity and the vacuum heating device and is connected with the conveying wheel.
7. The coating production equipment according to claim 5, wherein a grid is arranged on the carrier plate, and the workpiece is embedded on the grid;
the heater is provided with a groove corresponding to the grating, and the grating falls into the groove after the heater in the lifting process is contacted with the workpiece.
8. The plating film production apparatus according to any one of claims 3 to 7, further comprising:
a first vacuum gate valve, one end of the first vacuum gate valve being connected to the loading chamber and the other end of the first vacuum gate valve being connected to the feed end;
one end of the second vacuum gate valve is connected with the unloading cavity, and the other end of the second vacuum gate valve is connected with the discharging end;
and two ends of the third vacuum gate valve are respectively connected with different vacuum heating devices.
9. The plating film production apparatus according to any one of claims 3 to 7, further comprising:
a third vacuum pump connected with the vacuum heating device, the third vacuum pump being configured to extract gas in the vacuum heating device.
10. The plating film production apparatus according to any one of claims 3 to 7, further comprising:
the first large atmosphere valve is arranged on the loading cavity and opens or closes a feeding hole in the loading cavity;
and the second atmosphere valve is arranged on the unloading cavity and opens or closes the discharge hole in the unloading cavity.
CN202010188797.8A 2020-03-17 2020-03-17 Coating production equipment Active CN111304637B (en)

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