CN111304605A - ITO (indium tin oxide) rotary target binding method - Google Patents
ITO (indium tin oxide) rotary target binding method Download PDFInfo
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- CN111304605A CN111304605A CN202010157218.3A CN202010157218A CN111304605A CN 111304605 A CN111304605 A CN 111304605A CN 202010157218 A CN202010157218 A CN 202010157218A CN 111304605 A CN111304605 A CN 111304605A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/06—Metallic material
- C23C4/08—Metallic material containing only metal elements
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/14—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying for coating elongate material
- C23C4/16—Wires; Tubes
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Abstract
The invention discloses an ITO (indium tin oxide) rotary target binding method, which is characterized in that an automatic ultrasonic indium coating device, a semi-automatic rotary target oxide skin removing device and a sectional heating device respectively participate in a metallization pretreatment step, an oxide skin removing step and a binding and welding step of each ITO target tube, so that manual operation and manual errors are reduced as much as possible, the safety coefficient and the production efficiency in a production workshop are improved, the same binding condition of each section of ITO target tube is ensured, the uniformity of the whole target performance is improved, and the yield of products is improved.
Description
Technical Field
The invention relates to the technical field of target processing, in particular to an ITO rotary target binding method.
Background
The ITO film has wider and wider application, the main raw material in the film coating process needs to use an ITO target, the target and a back tube need to be bound for use in the actual use process according to the physical property of the target, and the binding effect often influences the use effect of the target. Especially for a long rotating target, the performance of a metal layer poured by the long rotating target uniformly affects the final binding and welding rate, and the conventional binding method is easy to deform a back pipe and has low yield. In the prior art, the technical process of sectional binding can well solve the problem, but in the technical method of sectional binding, the welded layer of each target material section is not uniform, and the performance of each part of the whole tube is not uniform, so that the film coating quality of the ITO target material is seriously influenced, and even the serious consequence of scrapping the ITO target material is caused. Therefore, a binding method that is more sophisticated and minimizes human involvement is needed.
Disclosure of Invention
The invention aims to provide an ITO rotary target binding method aiming at the technical problems.
In order to achieve the purpose, the invention adopts the technical scheme that: an ITO rotary target binding method comprises the following steps:
1) the method comprises the following substeps of carrying out metallization pretreatment on an ITO target tube, and conveying a single section of the ITO target tube to automatic ultrasonic indium coating equipment:
1.1) heating and warming a single-section ITO target tube through a high-temperature box of the automatic ultrasonic indium coating equipment, wherein the temperature of the ITO target tube is raised to 200 ℃ at the heating rate of 1.2-1.6 ℃/min.
1.2) manually adding indium in a molten state to the inner tube wall of the ITO target tube by a spoon.
1.3) driving the ITO target tube to rotate axially through a supporting roller device arranged in the high-temperature box, and simultaneously carrying out ultrasonic coating on the inner tube wall of the ITO target tube from inside to outside by ultrasonic coating rods on two sides of the automatic ultrasonic indium coating equipment until indium completely covers the inner tube wall of the ITO target tube to form a metalized layer with the thickness of 0.05-1 mm, wherein the ultrasonic coating areas of the two ultrasonic coating rods are intersected.
2) Removing oxide skin of an ITO target tube, transferring the ITO target tube subjected to metallization pretreatment to a semi-automatic rotating target oxide skin removing device, wherein the semi-automatic rotating target oxide skin removing device is provided with another supporting roller device, the ITO target tube is arranged between the supporting roller pairs of the supporting roller devices, the ITO target tube performs axis rotation under the driving action of the supporting roller, the rotation speed of the ITO target tube is 20 r/min-30 r/min, the temperature of the ITO target tube is controlled to be 170-200 ℃, the inner tube wall of the ITO target tube is manually subjected to axis direction oxide skin removing matching through a peeling scraper, and the period for removing the oxide skin is 1-3 min.
3) Preparing a back pipe tool, namely sleeving the bottom of a back pipe on a tool base of the binding device, and then sleeving a graphite positioning ring on the bottom of the back pipe to finish the preparation of the back pipe tool.
4) Binding a single section of ITO target tube, transferring the ITO target tube subjected to scale removal treatment to a rotary target binding device, and comprising the following substeps:
4.1) the ITO target tube of single section is emboliaed the frock and is positioned the bottom at binding means's back pipe, spacing cooperation between the bottom of ITO target tube and the graphite holding ring to keep the concentricity of back pipe and ITO target tube, the lower mouth of pipe of ITO target tube and the clearance of back pipe bottom are sealed through the sealing washer.
4.2) a pouring space is formed between the ITO target tube and the back tube, and a plurality of positioning beads are clamped in the pouring space to ensure that the thicknesses of welding layers between the ITO target tube and the back tube are the same.
4.3) carrying out sectional heating treatment, namely locally heating the single-section ITO target tube and the single-section ITO back tube through a heating module of a sectional heating device, and keeping the temperature of the ITO target tube at 170-300 ℃ until the temperature difference between the ITO target tube and the single-section ITO back tube is less than 50 ℃ so as to finish the sectional heating treatment.
And 4.4) injecting binding solder into the pouring space between the ITO target tube and the back tube until the single-section pouring space is completely filled, so as to finish the binding of the single-section ITO target tube.
5) And (4) after the binding of the single section of the ITO target tube is finished, sleeving another sealing ring into the back tube to seal a gap between the next section of the ITO target tube and the back tube, and repeating the step 4) until the whole tube binding of the rotary target is finished.
In a further technical scheme, the automatic ultrasonic indium coating equipment in the step 1) comprises a high-temperature box and ultrasonic generating devices respectively arranged on two opposite sides of the high-temperature box, wherein a supporting roller device is arranged in the high-temperature box, the supporting roller device comprises two symmetrically arranged supporting rollers and a rotation driving device, an ITO target tube is placed between the two supporting rollers, the roller surface of each supporting roller is in friction fit with the surface of the ITO target tube, and the rotation driving device is in transmission connection with at least one supporting roller; two opposite sides of the high-temperature box are respectively provided with an opening, the two ultrasonic generating devices are respectively movably provided with an ultrasonic coating rod, the two ultrasonic coating rods are respectively inserted into the corresponding openings, and the end parts of the ultrasonic coating rods movably extend to the inner cavity of the rotary target; the two ultrasonic coating rods are respectively cooperated with the supporting roll device to coat indium for matching.
In a further technical scheme, the rotation speed of the ITO target tube in the step 1.3) is 10 r/min-15 r/min.
In a further technical scheme, the coating speed of the ultrasonic coating rod in the step 1.3) is 6-10 mm/min.
In a further technical scheme, the semi-automatic rotary target scale removing device in the step 2) comprises a frame, a first supporting roller, a second supporting roller, a rotary driving device and a rotary control unit, wherein the first supporting roller and the second supporting roller are respectively and rotatably arranged at the top of the frame and are parallel to each other, and supporting parts for placing rotary targets are formed between the first supporting roller and the second supporting roller at intervals; the rotation driving device is in driving connection with the first supporting roller or the second supporting roller, and the rotation control unit is electrically connected with the rotation driving device.
In a further technical scheme, the sectional heating device in the step 4) is provided with a lifting support column, a heating module and a lifting driving device, wherein the lifting support column is positioned beside the tool base and is vertically arranged; the heating module is used for locally heating the rotating target, is slidably mounted on one side, close to the rotating target binding tool device, of the lifting support column, and is located above the rotating target binding tool device; and the lifting driving device is used for driving the heating module to do lifting motion along the axial direction of the rotating target and is connected with the heating module.
In a further technical scheme, lift pillar slidable mounting has a heating cabinet, and a box opening has been seted up respectively to the top surface and the bottom surface of heating cabinet, and two box openings cooperate with ITO target pipe with one heart respectively, and the heating cabinet passes through box opening movable sleeve and locates the ITO target pipe of corresponding single section, and heating module is fixed in the inner chamber of heating cabinet, and the box height of heating cabinet is the same with the length of the ITO target pipe of single section.
In a further technical scheme, the heating module is set to be an infrared radiation heating module or an electromagnetic induction heating module.
In a further technical scheme, in the step 4), the material of the sealing ring is pure copper, and the section size of the sealing ring is set to be 0.5 mm-1.5 mm according to the binding gap.
In a further technical scheme, in the step 5), in the whole target binding process, a sealing ring is respectively clamped between each section of ITO target tube, and the thickness of the sealing ring is a binding gap.
After adopting the structure, compared with the prior art, the invention has the advantages that: according to the ITO rotary target binding method, the automatic ultrasonic indium coating equipment, the semi-automatic rotary target oxide skin removing device and the sectional heating devices are respectively involved in the metallization pretreatment step, the oxide skin removing step and the binding and welding step of each ITO target tube, so that manual operation and manual errors are reduced as far as possible, the safety factor in a production workshop is improved, the production efficiency is improved, the same binding condition of each section of ITO target tube is ensured, the uniformity of the whole target performance is improved, and the yield of products is improved.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a schematic structural diagram of an automatic ultrasonic indium coating device in the present invention.
Fig. 2 is a schematic structural view of an ultrasonic generator in the present invention.
Fig. 3 is a schematic structural view of the hot box of the present invention.
Fig. 4 is a schematic structural view of a semi-automatic rotary target scale removing apparatus according to the present invention.
Fig. 5 is a schematic structural view of another perspective view of the semi-automatic rotary target scale removing apparatus according to the present invention.
Fig. 6 is a schematic cross-sectional view of a ring pillow of the present invention.
FIG. 7 is a schematic view of the peeling scraper of the present invention.
Fig. 8 is a schematic structural view of the sectional heating apparatus of the present invention.
Fig. 9 is a schematic cross-sectional view of a segmented heating apparatus of the present invention.
Detailed Description
The following are merely preferred embodiments of the present invention, and do not limit the scope of the present invention.
An ITO rotary target binding method comprises the following steps:
1) the method comprises the following substeps of carrying out metallization pretreatment on the ITO target tube, and sending the single-section ITO target tube to an automatic ultrasonic indium coating device.
1.1) heating and warming a single-section ITO target tube through a high-temperature box 10 of the automatic ultrasonic indium coating equipment, wherein the temperature of the ITO target tube is raised to 200 ℃ at the heating rate of 1.2-1.6 ℃/min.
1.2) manually adding indium in a molten state to the inner tube wall of the ITO target tube by a spoon.
1.3) driving the ITO target tube to rotate axially through a supporting roller device arranged in the high-temperature box 10, and simultaneously carrying out ultrasonic coating on the inner tube wall of the ITO target tube from inside to outside by ultrasonic coating rods 1116 on two sides of the automatic ultrasonic indium coating device until indium completely covers the inner tube wall of the ITO target tube to form a metalized layer with the thickness of 0.05-1 mm, wherein the ultrasonic coating areas of the two ultrasonic coating rods 1116 are intersected.
2) Removing oxide skin of an ITO target tube, transferring the ITO target tube subjected to metallization pretreatment to a semi-automatic rotating target oxide skin removing device, wherein the semi-automatic rotating target oxide skin removing device is provided with another supporting roller device, the ITO target tube is arranged between the supporting roller pairs of the supporting roller devices, the ITO target tube performs axis rotation under the driving action of the supporting roller, the rotation speed of the ITO target tube is 20 r/min-30 r/min, the temperature of the ITO target tube is controlled to be 170-200 ℃, the inner tube wall of the ITO target tube is manually subjected to axis direction oxide skin removing matching through a peeling scraper, and the period for removing the oxide skin is 1-3 min.
3) Preparing a back pipe tool, namely sleeving the bottom of a back pipe on a tool base of the binding device, and then sleeving a graphite positioning ring on the bottom of the back pipe to finish the preparation of the back pipe tool.
4) Binding a single section of ITO target tube, transferring the ITO target tube subjected to scale removal treatment to a rotary target binding device, and comprising the following substeps:
4.1) the ITO target tube of single section is emboliaed the frock and is positioned the bottom at binding means's back pipe, spacing cooperation between the bottom of ITO target tube and the graphite holding ring to keep the concentricity of back pipe and ITO target tube, the lower mouth of pipe of ITO target tube and the clearance of back pipe bottom are sealed through the sealing washer.
4.2) a pouring space is formed between the ITO target tube and the back tube, and a plurality of positioning beads are clamped in the pouring space to ensure that the thicknesses of welding layers between the ITO target tube and the back tube are the same.
4.3) carrying out sectional heating treatment, namely locally heating the single-section ITO target tube and the single-section ITO back tube through a heating module of a sectional heating device, and keeping the temperature of the ITO target tube at 170-300 ℃ until the temperature difference between the ITO target tube and the single-section ITO back tube is less than 50 ℃ so as to finish the sectional heating treatment.
And 4.4) injecting binding solder into the pouring space between the ITO target tube and the back tube until the single-section pouring space is completely filled, so as to finish the binding of the single-section ITO target tube.
5) And (4) after the binding of the single section of the ITO target tube is finished, sleeving another sealing ring into the back tube to seal a gap between the next section of the ITO target tube and the back tube, and repeating the step 4) until the whole tube binding of the rotary target is finished.
Specifically, as shown in fig. 1 to 3, the automatic ultrasonic indium coating apparatus in step 1) includes a high temperature box 10 and ultrasonic generating devices respectively disposed at two opposite sides of the high temperature box 10, a supporting roller device is disposed in the high temperature box 10, the supporting roller device includes two symmetrically disposed supporting rollers and a rotation driving device, an ITO target tube is disposed between the two supporting rollers, a roller surface of the supporting roller is in friction fit with a surface of the ITO target tube, and the rotation driving device is in transmission connection with at least one supporting roller; two opposite sides of the high-temperature box 10 are respectively provided with an opening 104, two ultrasonic generating devices are respectively and movably provided with an ultrasonic coating bar 1116, the two ultrasonic coating bars 1116 are respectively inserted into the corresponding openings 104, and the end parts of the ultrasonic coating bars 1116 movably extend to the inner cavity of the rotary target; the two ultrasonic coating bars 1116 cooperate with the anvil roll means, respectively, for indium coating. The ultrasonic indium coating equipment drives the rotary target 9 to rotate around the axis through the two supporting rollers, so that the ultrasonic coating rod 1116 can rotate to coat indium on the inner cavity wall of the rotary target 9. The manual indium coating is avoided, the indium coating efficiency is improved, and the product defect caused by manual errors is avoided. One of the two supporting rollers is an active supporting roller 101, the active supporting roller 101 is connected with a rotary driving device, and the other supporting roller is a passive supporting roller 103 which only rotates with following without a power source. The rotation speed of the rotary target 9 is driven and controlled by the rotation driving device.
Specifically, the high temperature box 10 is provided with a temperature control circuit, a heat generating device, and a temperature monitoring device, which are electrically connected to the temperature control circuit, respectively. The hot box 10 provides a pre-treatment thermal environment for the rotating target 9 to maintain the indium in a molten state for ultrasonic coating. To avoid excessive volatilization of indium and to maintain relatively stable melt physical properties. The requirement on the indium coating environment is high, and the temperature control circuit can ensure that the temperature in the high-temperature inner cavity 100 is kept at 120-150 ℃. The application temperature depends on the application speed, and the faster the application speed, the higher the application temperature of the high temperature cavity 100.
Specifically, the heat generating device is provided with at least one heat generating portion 103, and the heat generating portion 103 is fixed on the bottom surface of the inner cavity of the high temperature box 10; the temperature monitoring device comprises a plurality of temperature monitoring elements arranged in the inner cavity of the high-temperature box 10, and the temperature monitoring elements are respectively distributed along the axial direction of the supporting roller at intervals.
Specifically, a plurality of bolsters 1011 made of a high temperature resistant material are provided at intervals in the axial direction on the roll surface of the support roll, and the thickness of each of the bolsters 1011 is the same in the same support roll. There is the settlement interval between two backing rolls to improve the rotational stability of rotatory target 9, guarantee that rotatory target 9 can carry out the higher rotation motion of concentricity, guarantee to scribble the indium work and go on smoothly and the homogeneity on indium layer.
Specifically, the in-out adjusting mechanisms 11 are respectively disposed on two opposite sides of the high temperature chamber 10, and each in-out adjusting mechanism 11 includes a base 1101, an in-out adjusting guide rail 1102, a sliding base 1104, and an in-out driving motor 1105. The base 1101 is fixed on one side corresponding to the high-temperature box 10, and an in-out adjusting screw 1103 is installed on the base 1101; the in-out adjustment guide 1102 is fixed to the base 1101, and the in-out adjustment guide 1102 is provided along the axial direction of the support rollers; the sliding base 1104 is arranged on the in-out adjusting guide rail 1102, the ultrasonic generating device is arranged on the sliding base 1104, the sliding base 1104 is provided with an in-out adjusting screw rod pair, the in-out adjusting screw rod pair is connected with the in-out adjusting screw rod 1103, and the ultrasonic generating device is arranged on the sliding base 1104; the in-out driving motor 1105 is fixed to the outer end of the base 1101, and the in-out driving motor 1105 has an output shaft connected to the in-out adjusting screw 1103 through a coupling. This structure makes supersound generating device's supersound scribble pole 1116 through lead screw drive structure and can carry out the in-and-out motion, realizes that supersound scribbles pole 1116 and carries out the in-and-out motion with a set for at the uniform velocity, evenly scribbles the indium to the inner chamber wall of rotary target 9 from inside to outside and outside to inside, guarantees the inside and outside homogeneity in indium layer to and the stability of performance on indium layer.
Specifically, the transverse adjusting seat 1106 is provided with a vertical guide rail seat 1109, the vertical guide rail seat 1109 is provided with a vertical guide rail 1110 and a swing driving structure, the vertical guide rail 1110 is provided with a swing adjusting base 1112, the swing driving structure is connected with the swing adjusting base 1112, the ultrasonic generating device comprises an ultrasonic generating unit 1115 and an ultrasonic coating rod 1116, the ultrasonic coating rod 1116 is connected with one end of the ultrasonic generating unit 1115, the other end of the ultrasonic generating unit 1115 is provided with a telescopic connecting rod 1119 in a telescopic mode, the telescopic connecting rod 1119 and the ultrasonic coating rod 1116 are coaxially arranged, and the end part of the telescopic connecting rod 1119 is rotatably connected with the polished rod 1108; a rotating connecting rod 1118 is fixedly connected to the ultrasonic generating unit 1115, the rotating connecting rod 1118 is perpendicular to the telescopic connecting rod 1119, and the rotating connecting rod 1118 is rotatably connected to a rotating hole of a swinging connecting seat on the swinging adjusting base 1112, so that the swinging adjusting base 1112 can drive the ultrasonic generating device to swing around the polished rod 1108. The structure realizes the up-and-down swinging of the ultrasonic coating rod 1116, realizes the control of the initial point and the final point of the indium coating point and ensures the uniform indium coating. In addition, the swing structure driven by the screw rod driving structure can control the abutting pressure of the ultrasonic action, is suitable for the ultrasonic indium-coated pretreatment of different materials, avoids scraping the inner cavity wall of the target material, and ensures the uniformity of the binding layer structure.
Specifically, the swing driving structure comprises a swing driving motor 1114 and a swing adjusting screw 1111, the swing driving motor 1114 is fixed on the top of the transverse adjusting seat 1106, and the swing driving motor 1114 is provided with an output shaft; the swing adjusting screw 1111 is rotatably arranged on the transverse adjusting seat 1106, and an output shaft of the swing driving motor 1114 is connected with the swing adjusting screw 1111 through a coupling; the swing adjusting base 1112 is provided with a pair of swing adjusting screw rods 1111, and the pair of swing adjusting screw rods 1111 is connected with the swing adjusting screw rods 1111.
Specifically, the sliding base 1104 is provided with a transverse adjusting mechanism, the transverse adjusting mechanism comprises a transverse adjusting base 1106, the transverse adjusting base 1106 is provided with a polished rod 1108 and a transverse adjusting guide rail 1107, the polished rod 1108 and the transverse adjusting guide rail 1107 are parallel and vertically go in and out of the adjusting guide rail 1102, and the ultrasonic generating device is respectively connected with the polished rod 1108 and the transverse adjusting guide rail 1107 in a sliding manner. The structure realizes the manual adjustment and the self-adaptive adjustment of the transverse direction of the ultrasonic device, the ultrasonic device is self-adaptively and transversely moved to a corresponding position under the action of the swinging stress of the ultrasonic coating rod 1116, so that the coating part 1117 of the ultrasonic coating rod 1116 is positioned at the lowest point of the inner cavity wall of the rotary target 9, the coating precision is improved, the ultrasonic action time of each part of the inner cavity wall of the rotary target 9 is relatively average, and the uniformity of the indium layer performance is further improved.
Specifically, the end of the ultrasonic coating rod 1116 is provided with an arc-shaped coating part 1117 in a molding manner, the coating part 1117 is movably abutted and matched with the inner cavity wall of the rotary target placed on the supporting roller, and the coating part 1117 performs an ultrasonic action on the binding surface on the inner side of the rotary target 9, so that molten indium can well invade the binding surface of the rotary target 9.
Specifically, a hoop is welded at the end of the rotating connecting rod 1118, the hoop is sleeved on the ultrasonic generating unit 1115, and the broken part of the hoop is connected through a bolt. This kind of detachable mounting structure can conveniently change the supersound generating element 1115 of different models and carry out the frock repacking to be suitable for different production requirements.
Specifically, the rotation speed of the ITO target tube in the step 1.3) is 10 r/min-15 r/min.
Specifically, the coating speed of the ultrasonic coating bar 1116 in the step 1.3) is 6mm/min to 10 mm/min.
Specifically, as shown in fig. 4 to 7, the semi-automatic rotary target scale removing apparatus in step 2) includes a frame 2, a first supporting roller 26, a second supporting roller 27, a rotary driving device and a rotary control unit 21, the first supporting roller 26 and the second supporting roller 27 are respectively rotatably mounted on the top of the frame 2, the first supporting roller 26 and the second supporting roller 27 are parallel, and a supporting portion for placing the rotary target is formed between the first supporting roller 26 and the second supporting roller 27 at an interval; the rotation driving device is connected with the first supporting roller 26 or the second supporting roller 27 in a driving way, and the rotation control unit 21 is electrically connected with the rotation driving device. This semi-automatic rotatory target cinder remove device passes through motor drive rotatory target 9 and carries out the axis rotation of setting angular velocity to cooperate the manual work to carry out the continuous of axis direction through shelling the scraper and peel, avoid the manual work to rotate rotatory target 9, improve security and peel efficiency. The angular travel of the rotary target 9 is accurate, repeated scraping is avoided, the uniform thickness of the metallization layer of the rotary target 9 is ensured, and the binding quality of the rotary target 9 is improved.
Specifically, as shown in fig. 7, the peeling scraper has a rake-shaped structure, and is formed by connecting a handle 2903 and a scraper 2901, one end of the handle 2903 is connected with the scraper 2901, the other end of the handle 2903 is provided with a handle 2904, an arc-shaped scraping portion 2902 is formed at the bottom of the scraper 2901, and the arc of the arc-shaped scraping portion 2902 is matched with the arc of the inner side surface of the rotating target 9 to scrape oxide, i.e., scale, deposited on the inner side surface of the rotating target 9 due to metallization pretreatment.
Specifically, as shown in fig. 4 to 6, a plurality of ring pillows 28 are arranged on the roll surface of the first supporting roll 26, each ring pillow 28 is arranged at intervals along the axial direction of the first supporting roll 26, the thickness of each ring pillow 28 on the first supporting roll 26 is the same, and the interval between two adjacent ring pillows 28 is set to be 5cm to 15 cm; a plurality of ring pillows 28 are additionally provided on the roll surface of the second support roll 27, the ring pillows 28 are provided at intervals in the axial direction of the second support roll 27, the thickness of each ring pillow 28 on the second support roll 27 is the same, and the interval between two adjacent ring pillows 28 is set to 5cm to 15 cm.
Specifically, as shown in fig. 3, each ring pillow 28 is provided with a surface pillow case 2801, a welding layer 2802, and a bottom pillow core 2803 in this order from the outside to the inside. The surface layer pillowcase 2801 is formed by closing aluminum alloy material; the welding layer 2802 is used for fixedly connecting the surface layer pillowcase 2801 and the bottom layer pillow core 2803, the welding layer 2802 is formed by closing high temperature resistant welding flux, and the high temperature resistant welding flux comprises tin-lead welding flux or copper-zinc welding flux or silver-copper-zinc welding flux; the bottom layer pillow core 2803 is formed on the roll surfaces of the first support roll 26 and the second support roll 27, the bottom layer is made of cast iron, and the outer surface of the bottom layer pillow core 2803 is in clearance fit with the inner side surface of the surface layer pillow case 2801.
Specifically, two supporting roller bearings 25 are symmetrically arranged on two sides of the frame 2 along the length direction, and two ends of the first supporting roller 26 and the second supporting roller 27 are respectively connected to the corresponding supporting roller bearings 25; one end of the first supporting roller 26 is provided with a driven pulley 24, and the driven pulley 24 is coaxially fitted with the first supporting roller 26.
Specifically, the rotation driving device comprises a rotation driving motor 22, the rotation driving motor 22 is positioned below a driven pulley 24, the rotation driving motor 22 is provided with an output rotating shaft, a driving pulley 23 is fixed on the output rotating shaft, the diameter of the driving pulley 23 is smaller than that of the driven pulley 24, and the driving pulley 23 is in transmission connection with the driven pulley 24 through a belt; the rotation drive motor 22 is electrically connected to the rotation control unit 21.
Specifically, the bottom of frame 2 is provided with a plurality of roller devices, and every roller device is provided with gyro wheel and gyro wheel locking structure respectively, and gyro wheel locking structure is including the locking footboard and the spring bolt that the activity set up, and the spring bolt is connected to the locking footboard, and the bottom surface protrusion of spring bolt is provided with the locking and bites the tooth, and the bottom surface activity of spring bolt is supported and is pressed in the wheel face of gyro wheel.
Specifically, the wheel face of gyro wheel is made by macromolecular material, and the hardness setting of the wheel face of gyro wheel is 60 ~ 80A of shao shi. The roller structure has a mute effect, can reduce noise in a workshop, and is durable in use.
Specifically, the frame 2 is provided with an infrared temperature monitoring device electrically connected to the rotation control unit 21, the infrared temperature monitoring device having an infrared detection element serving as a means for monitoring the temperature of the rotating target, the infrared detection element being fixed to the top of the frame 2. Since the rotary target 9 is subjected to the pretreatment for metallization at a high temperature, the scale is soft at a high temperature and is easily scraped off. The oxide skin is connected with the metallization pretreatment layer after cooling and solidifying, has very high connection rigidity, and the peeling operation is carried out below the specified peeling temperature, so that the pretreatment layer is easy to scrape, and the binding quality is influenced. This structure carries out surface temperature monitoring through infrared temperature monitoring devices to rotatory target 9, ensures that rotatory target 9 peels under the specification temperature, otherwise the stall to the heating is done over again.
Specifically, as shown in fig. 8 and 9, the segmented heating device in step 4) is provided with a lifting support 33, a heating module 3501 and a lifting driving device, the lifting support 33 is located beside the tool base, and the lifting support 33 is vertically arranged; the heating module 3501 is used for locally heating the rotary target, the heating module 3501 is slidably mounted on one side, close to the rotary target binding tool device 36, of the lifting support column 33, and the heating module 3501 is located above the rotary target binding tool device 36; and the lifting driving device is used for driving the heating module 3501 to do lifting motion along the axial direction of the rotating target, and the lifting driving device is connected with the heating module 3501.
Specifically, lifting column 33 slidable mounting has a heating cabinet 35, and a box opening 3500 has been seted up respectively to the top surface and the bottom surface of heating cabinet 35, and two box openings 3500 cooperate with the ITO target pipe is concentric respectively, and corresponding single-section ITO target pipe is located through box opening 3500 movable sleeve to heating cabinet 35, and heating module 3501 is fixed in the inner chamber of heating cabinet 35, and the box height of heating cabinet 35 is the same with the length of single-section ITO target pipe. The ITO target tube is heated by the heating box 35 in a single section, so that the heating efficiency is high, the heat loss is reduced, and the heating efficiency of the back tube part is improved.
Specifically, the lifting support column 33 is provided with a lifting guide rail and a lifting platform 34, the lifting guide rail is arranged along the vertical direction, a sliding seat 3302 is slidably mounted on the lifting guide rail, and the lifting driving device is connected with the sliding seat 3302; the lifting platform 34 is fixedly connected to the slide base 3302, the lifting platform 34 is horizontally arranged, and the heating module 3501 is fixed to the lifting platform 34.
Specifically, the lifting platform 34 is vertically provided with an avoidance port for avoiding a rotating target in a penetrating manner, the avoidance port is vertically aligned with the rotating target binding tool device 36, the diameter of the avoidance port is larger than that of the rotating target positioned on the rotating target binding tool device by the tool, and the rotating target penetrates through the avoidance port; the mesa of lift platform 34 is provided with a heating cabinet 35, and a box opening 3500 has been seted up respectively to the top surface and the bottom surface of heating cabinet 35, and two box openings 3500 cooperate with dodging the mouth with one heart respectively, and rotatory target is located through box opening 3500 movable sleeve to heating cabinet 35, and heating module 3501 is fixed in the inner chamber of heating cabinet 35.
Specifically, the heating box 35 is set up to the box that carbon fiber material made, and the heating box 35 is square setting, and the surface of box is provided with warning colour layer, and warning colour layer is formed by the spraying of temperature sensing color change material. Carbon fiber material is an excellent thermal insulation material, which can improve binding safety and reduce heat loss. Set up warning colour layer on the box surface, can play the warning effect to personnel, show that heating device is heating the operation, improve the security.
Specifically, the heating module 3501 is an infrared radiation heating module, the heating module 3501 includes a plurality of PTC heating elements and a heat conducting plate, the heat conducting plate is made of an aluminum alloy material and is arranged in a cylindrical shape, the heat conducting plate is fixed in an inner cavity of the heating box 35, the diameter of the heat conducting plate is larger than that of the box body through opening 3500, the inner side surface of the heat conducting plate is coated with a far infrared radiation coating, and the heat conducting plate is provided with a plurality of slots at equal angles along the circumferential direction; the PTC heating elements are respectively inserted into the corresponding slots. Of course, the heating module 3501 may also be an electromagnetic induction heating module, and the metal target is heated by electromagnetic induction through the induction coil, so that the heat efficiency can be further improved.
Specifically, the lifting guide rail comprises a lifting guide groove arranged inside the lifting support column 33, a lifting screw rod pair is slidably mounted in the lifting guide groove, and the sliding base 3302 is connected with the lifting screw rod pair; a lifting driving screw rod 3301 is arranged in the lifting guide groove, and the lifting driving screw rod 3301 is in threaded connection with the lifting screw rod pair; the lifting driving device comprises a lifting driving motor 37, the lifting driving motor 37 is fixed at the bottom of the lifting support column 33, and the lifting driving motor 37 is provided with a driving rotating shaft which is connected with a lifting driving screw rod 3301 through a coupler.
Specifically, the heating device is provided with a heating control unit, and the top of the lifting column 33 is provided with an infrared temperature detector, which is electrically connected to the heating control unit respectively with the heating module 3501.
This heating device's concrete mounting structure does, binds the equipment and is provided with and binds platform 31 and rotatory target and bind tool equipment 36, binds platform 31 and has seted up platform opening 3100, and rotatory target is bound tool equipment 36 and is fixed in under platform opening 3100, and rotatory target is bound tool equipment 36 protrusion in binding platform 31. A base 32 is fixed at the side of the platform through hole 3100, and a lifting support 33 is fixedly connected to one side of the base 32 close to the platform through hole 3100; the lifting driving motor 37 is fixedly connected to the bottom of the binding platform 31. The binding platform 31 of the binding device can be set as the binding platform 31 with the ascending and descending functions, so that the binding device is suitable for binding multiple sections of rotating targets with long lengths. In turn, the heating device can carry out sectional multi-section heating on the rotary target so as to facilitate the personnel to carry out sectional multi-section binding operation.
Specifically, in the step 4), the sealing ring is made of pure copper, and the section size of the sealing ring is set to be 0.5 mm-1.5 mm according to the binding gap. The process requirement of multi-section binding is that the gap of the ITO target tube pitch cannot exceed 1.5mm, otherwise the quality of a sputtered film is influenced.
Specifically, in the step 5), in the whole target binding process, a sealing ring is respectively clamped between each section of ITO target tube, and the thickness of the sealing ring is a binding gap.
The above description is only a preferred embodiment of the present invention, and for those skilled in the art, the present invention should not be limited by the description of the present invention, which should be interpreted as a limitation.
Claims (10)
1. An ITO rotary target binding method is characterized by comprising the following steps:
1) the ITO target tube metallization pretreatment, the single-section ITO target tube is sent to an automatic ultrasonic indium coating device, the method comprises the following substeps,
1.1) heating a single-section ITO target tube by a high-temperature box (10) of automatic ultrasonic indium coating equipment, wherein the temperature of the ITO target tube is increased to 200 ℃ at the temperature increase rate of 1.2-1.6 ℃/min;
1.2) manually adding indium in a molten state to the inner pipe wall of the ITO target pipe through a spoon;
1.3) driving the ITO target tube to rotate axially through a supporting roller device arranged in a high-temperature box (10), and simultaneously carrying out ultrasonic coating on the inner tube wall of the ITO target tube from inside to outside by ultrasonic coating rods (1116) on two sides of an automatic ultrasonic indium coating device until indium completely covers the inner tube wall of the ITO target tube to form a metalized layer with the thickness of 0.05-1 mm, wherein the ultrasonic coating areas of the two ultrasonic coating rods (1116) are intersected;
2) removing oxide skin of the ITO target tube, transferring the ITO target tube subjected to metallization pretreatment to a semi-automatic rotating target oxide skin removing device, wherein the semi-automatic rotating target oxide skin removing device is provided with another supporting roller device, the ITO target tube is arranged between a supporting roller pair of the supporting roller device, the ITO target tube performs axis rotation under the driving action of the supporting roller, the rotation speed of the ITO target tube is 20-30 r/min, the temperature of the ITO target tube is controlled to be 170-200 ℃, the inner tube wall of the ITO target tube is manually subjected to axis-direction oxide skin removing matching through a peeling scraper, and the period of oxide skin removing is 1-3 min;
3) preparing a back pipe tool, namely sleeving the bottom of a back pipe on a tool base of a binding device, and then sleeving a graphite positioning ring on the bottom of the back pipe to finish the preparation of the back pipe tool;
4) binding a single section of ITO target tube, transferring the ITO target tube subjected to scale removal treatment to a rotary target binding device, comprising the following substeps,
4.1) the single-section ITO target tube is sleeved in the tool and positioned at the bottom of the back tube of the binding device, the bottom of the ITO target tube is in limit fit with the graphite positioning ring so as to keep the concentricity of the back tube and the ITO target tube, and a gap between the lower tube opening of the ITO target tube and the bottom of the back tube is sealed by a sealing ring;
4.2) a pouring space is formed between the ITO target tube and the back tube, and a plurality of positioning beads are clamped in the pouring space to ensure that the thicknesses of welding layers between the ITO target tube and the back tube are the same;
4.3) carrying out sectional heating treatment, namely locally heating the single-section ITO target tube and the single-section ITO back tube through a heating module of a sectional heating device, and keeping the temperature of the ITO target tube at 170-300 ℃ until the temperature difference between the ITO target tube and the single-section ITO back tube is less than 50 ℃ so as to finish the sectional heating treatment;
4.4) pouring binding solder into the pouring space between the ITO target tube and the back tube until the single-section pouring space is completely filled, so as to finish the binding of the single-section ITO target tube;
5) and (4) after the binding of the single section of the ITO target tube is finished, sleeving another sealing ring into the back tube to seal a gap between the next section of the ITO target tube and the back tube, and repeating the step 4) until the whole tube binding of the rotary target is finished.
2. The ITO rotary target binding method according to claim 1, wherein: the automatic ultrasonic indium coating equipment in the step 1) comprises a high-temperature box (10) and ultrasonic generating devices respectively arranged at two opposite sides of the high-temperature box (10),
the high-temperature box (10) is internally provided with the supporting roll device, the supporting roll device comprises two supporting rolls which are symmetrically arranged and a rotation driving device, the ITO target tube is placed between the two supporting rolls, the roll surface of each supporting roll is in friction fit with the surface of the ITO target tube, and the rotation driving device is in transmission connection with at least one supporting roll;
two opposite sides of the high-temperature box (10) are respectively provided with an opening (104), the two ultrasonic generating devices are respectively and movably provided with an ultrasonic coating rod (1116), the two ultrasonic coating rods (1116) are respectively inserted into the corresponding openings (104), and the end parts of the ultrasonic coating rods (1116) movably extend to the inner cavity of the rotary target;
two ultrasonic coating rods (1116) cooperate with the anvil roll means to apply indium coating.
3. The ITO rotary target binding method according to claim 1, wherein: the autorotation speed of the ITO target tube in the step 1.3) is 10 r/min-15 r/min.
4. The ITO rotary target binding method according to claim 1, wherein: the coating speed of the ultrasonic coating rod in the step 1.3) is 6 mm/min-10 mm/min.
5. The ITO rotary target binding method according to claim 1, wherein: the semi-automatic rotary target scale removing device in the step 2) comprises a frame (2), a first supporting roller (26), a second supporting roller (27), a rotary driving device and a rotary control unit (21),
the first supporting roller (26) and the second supporting roller (27) are respectively rotatably arranged at the top of the frame (2), the first supporting roller (26) and the second supporting roller (27) are parallel, and a supporting part for placing a rotary target is formed between the first supporting roller (26) and the second supporting roller (27) at intervals;
the rotation driving device is in driving connection with the first supporting roller (26) or the second supporting roller (27), and the rotation control unit (21) is electrically connected with the rotation driving device.
6. The ITO rotary target binding method according to claim 1, wherein: the sectional heating device in the step 4) is provided with a lifting support column (33), the heating module (3501) and a lifting driving device,
the lifting support column (33) is positioned at the side of the tool base, and the lifting support column (33) is vertically arranged;
the heating module (3501) is used for locally heating the rotary target, the heating module (3501) is slidably mounted on one side, close to the rotary target binding tool device (36), of the lifting support column (33), and the heating module (3501) is located above the rotary target binding tool device (36);
and the lifting driving device is used for driving the heating module (3501) to do lifting motion along the axis direction of the rotating target, and the lifting driving device is connected with the heating module (3501).
7. The ITO rotary target binding method according to claim 6, wherein: lifting support (33) slidable mounting has a heating cabinet (35), and a box opening (3500) has been seted up respectively to the top surface and the bottom surface of heating cabinet (35), two box openings (3500) respectively with ITO target pipe cooperates with one heart, and corresponding single-section ITO target pipe is located through box opening (3500) movable sleeve in heating cabinet (35), heating module (3501) is fixed in the inner chamber of heating cabinet (35), and the box height of heating cabinet (35) is the same with the length of single-section ITO target pipe.
8. The ITO rotary target binding method according to claim 7, wherein: the heating module (3501) is set to be an infrared radiation heating module or an electromagnetic induction heating module.
9. The ITO rotary target binding method according to claim 1, wherein: in the step 4), the sealing ring is made of pure copper, and the section size of the sealing ring is set to be 0.5-1.5 mm according to the binding gap.
10. The ITO rotary target binding method according to claim 1, wherein: in the step 5), in the whole target binding process, one sealing ring is respectively clamped between each section of ITO target tube, and the thickness of each sealing ring is a binding gap.
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| CN202010157218.3A CN111304605A (en) | 2020-03-09 | 2020-03-09 | ITO (indium tin oxide) rotary target binding method |
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| CN202010157218.3A CN111304605A (en) | 2020-03-09 | 2020-03-09 | ITO (indium tin oxide) rotary target binding method |
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| CN112725753A (en) * | 2020-12-30 | 2021-04-30 | 湖南柯盛新材料有限公司 | Method for binding multiple sections of ITO (indium tin oxide) rotary target materials in one-step centrifugation manner |
| CN113337801A (en) * | 2021-05-31 | 2021-09-03 | 广州市尤特新材料有限公司 | Method for binding deoxidized substances of rotary target, computer-readable storage medium and binding device |
| CN113463044A (en) * | 2021-06-10 | 2021-10-01 | 芜湖映日科技股份有限公司 | Equipment for binding target material in vacuum |
| CN113684459A (en) * | 2021-07-13 | 2021-11-23 | 芜湖映日科技股份有限公司 | Rotary target binding method for reducing cracking |
| CN114481049A (en) * | 2021-12-24 | 2022-05-13 | 凯盛信息显示材料(洛阳)有限公司 | ITO rotary target binding device |
| CN115612993A (en) * | 2022-10-18 | 2023-01-17 | 江苏东玖光电科技有限公司 | Back tube indium precoating equipment |
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