CN111293055A - Processing device - Google Patents
Processing device Download PDFInfo
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- CN111293055A CN111293055A CN201911219072.4A CN201911219072A CN111293055A CN 111293055 A CN111293055 A CN 111293055A CN 201911219072 A CN201911219072 A CN 201911219072A CN 111293055 A CN111293055 A CN 111293055A
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- workpiece
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- cassette
- display screen
- chuck table
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- 238000003754 machining Methods 0.000 claims abstract description 71
- 238000004140 cleaning Methods 0.000 claims abstract description 43
- 238000010586 diagram Methods 0.000 claims description 38
- 238000002360 preparation method Methods 0.000 claims 1
- 238000003860 storage Methods 0.000 abstract description 126
- 238000005520 cutting process Methods 0.000 abstract description 71
- 239000003086 colorant Substances 0.000 abstract description 16
- 239000003550 marker Substances 0.000 abstract 1
- 230000004048 modification Effects 0.000 description 23
- 238000012986 modification Methods 0.000 description 23
- 238000001514 detection method Methods 0.000 description 21
- 238000003384 imaging method Methods 0.000 description 12
- 239000007788 liquid Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000002390 adhesive tape Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000004590 computer program Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/409—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by using manual data input [MDI] or by using control panel, e.g. controlling functions with the panel; characterised by control panel details or by setting parameters
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67282—Marking devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67294—Apparatus for monitoring, sorting or marking using identification means, e.g. labels on substrates or labels on containers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Human Computer Interaction (AREA)
- Automation & Control Theory (AREA)
- Dicing (AREA)
- Numerical Control (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Provided is a processing device capable of grasping the progress of processing of a workpiece. The machining device comprises a chuck worktable, a cutting unit, a rail for temporarily placing the machined object, a cleaning unit, a display screen (111), and a display information setting unit for setting a progress status display screen (112) displayed on the display screen (111). The progress status display screen (112) is set with: an in-apparatus layout (120) having corresponding regions (121, 123, 124) that display predetermined colors (301, 303, 304) corresponding to the rail, the chuck table, and the cleaning unit; a workpiece marker for displaying the current position of the workpiece superimposed on the in-device layout (120); and a plurality of cells (131) representing the storage shelves of the cartridges. The color (301, 303, 304) of the corresponding region (121, 123, 124) corresponding to the current position of the workpiece once stored in the storage rack of the cassette shown in the grid (131) is displayed in the grid (131).
Description
Technical Field
The present invention relates to a processing apparatus.
Background
Various machining apparatuses are known which hold a plate-shaped workpiece on a chuck table and cut with a cutting tool, thin with a grinding wheel, or machine with a laser beam. Among these machining apparatuses, the following full-automatic type machining apparatuses are often used: the present invention relates to a processing apparatus that takes out a workpiece from a cassette in which a plurality of layers are formed and each layer supports a single workpiece, processes the workpiece using a chuck table, cleans the workpiece using a cleaning table, and returns the workpiece to the cassette again (see, for example, patent document 1).
In the processing apparatus disclosed in patent document 1 or the like, an area other than the case is covered with an exterior cover for the purpose of preventing foreign matter from adhering to the workpiece or preventing an operator from being accidentally injured.
Patent document 1: japanese patent laid-open publication No. 2016-15042
The processing device disclosed in patent document 1 or the like covers the region other than the case with the exterior cover, and therefore, at first glance, it is not possible to know where the object is positioned in the device. Further, the processing device shown in patent document 1 and the like displays, by numerals, where processing of a workpiece is performed among the workpieces stored in a cassette, but it is difficult to see at a glance and to understand the situation by seeing a screen of the display device from a remote position.
Disclosure of Invention
The present invention has been made in view of the above problems, and an object thereof is to provide a machining device capable of grasping the progress of machining of a workpiece.
In order to solve the above problem and achieve the object, a processing apparatus according to the present invention includes: a chuck table for holding a workpiece; a machining unit for machining the workpiece held by the chuck table; a cassette mounting area for mounting a cassette having a plurality of layers for housing the object to be processed; a cleaning region for cleaning the workpiece; a conveying unit for conveying the processed object among the box, the chuck worktable and the cleaning area; a display screen for displaying the progress of the processing of the workpiece; and a display information setting unit that sets information to be displayed on the display screen, wherein the display information setting unit sets, as display information: an in-apparatus layout having the chuck table and the cleaning region, each region displaying a predetermined color or a predetermined identification mark; a workpiece mark for displaying a current position of the workpiece carried out of the cassette in a superimposed manner on the layout diagram in the apparatus; and a plurality of cells indicating the layer of the cassette, and the color or the predetermined identification mark of the region corresponding to the current position of the workpiece once stored in the layer of the cassette indicated by the cell is displayed in the cell.
In the processing apparatus, the layout diagram may include a conveying unit that conveys the workpiece.
In the processing apparatus, a color or an identification mark indicating that the carrying-in is completed may be displayed in the cell indicating the layer in which the workpiece is stored, the workpiece being carried out of the cassette and then returned to the cassette again.
The processing apparatus may further include a temporary storage area for temporarily storing the object to be processed carried out of the cassette placed in the cassette placement area, the conveying unit may convey the object to be processed among the cassette, the temporary storage area, the chuck table, and the cleaning area, and the layout diagram in the apparatus may include the temporary storage area.
The present invention has an effect of being able to grasp the progress of machining of a workpiece.
Drawings
Fig. 1 is a perspective view showing a configuration example of a processing apparatus according to embodiment 1.
Fig. 2 is a perspective view showing a cartridge of the processing apparatus shown in fig. 1.
Fig. 3 is a diagram illustrating a progress status display screen displayed on the display screen of the display unit of the processing apparatus shown in fig. 1.
Fig. 4 is a diagram showing an example of the target object mark displayed on the display screen of the display unit of the machining apparatus shown in fig. 1.
Fig. 5 is a diagram showing another example of the object mark displayed on the display screen of the display unit of the machining apparatus shown in fig. 1.
Fig. 6 is a view showing a progress status display screen when the object to be processed, which has been stored in the storage rack on the lowermost side of the magazine of the processing apparatus shown in fig. 1, is temporarily placed on the rail.
Fig. 7 is a view showing a progress status display screen when the object to be processed, which has been stored in the storage rack on the lowermost side of the magazine of the processing apparatus shown in fig. 1, is transported by the 1 st transport unit.
Fig. 8 is a view showing a progress status display screen when the object to be processed, which has been once stored in the second storage rack from the bottom of the magazine of the processing apparatus shown in fig. 1, is placed on the rail.
Fig. 9 is a view showing a progress status display screen when the workpiece that was once stored in the lowermost storage rack of the magazine of the processing apparatus shown in fig. 1 is held by the chuck table and the workpiece that was once stored in the next second storage rack is transported by the 1 st transport unit.
Fig. 10 is a view showing a progress status display screen when the second conveying unit 2 conveys the workpiece that was once stored in the lowermost storage rack of the cassette of the processing apparatus shown in fig. 1, the workpiece that was once stored in the second next storage rack is held on the chuck table, and the workpiece that was once stored in the third next storage rack of the cassette is temporarily placed on the rail.
Fig. 11 is a view showing a progress status display screen when the workpiece that was once stored in the lowermost storage rack of the magazine of the processing apparatus shown in fig. 1 is held on the rotary table and the workpiece that was once stored in the third storage rack next to the magazine is transported by the 1 st transport unit.
Fig. 12 is a diagram showing a progress status display screen when the 1 st conveying unit conveys a workpiece that has been stored in the lowermost storage rack of the magazine of the processing apparatus shown in fig. 1, the 2 nd conveying unit conveys a workpiece that has been stored in the next second storage rack, and the workpiece that has been stored in the next third storage rack of the magazine is held on the chuck table.
Fig. 13 is a diagram showing a progress status display screen when the object to be processed, which has been once stored in the storage rack on the lowermost side of the magazine of the processing apparatus shown in fig. 1, is temporarily placed on the rail and the object to be processed, which has been stored in the next second storage rack, is held on the rotary table.
Fig. 14 is a diagram showing a progress status display screen when the workpiece that has been stored in the lowermost storage rack of the cassette of the processing apparatus shown in fig. 1 is carried into the cassette and the workpiece that has been stored in the fourth storage rack from the bottom is temporarily placed on the rail.
Fig. 15 is a view showing a progress status display screen when the workpiece once stored in the uppermost storage rack of the cassette of the processing apparatus shown in fig. 1 is temporarily placed on the rail after the cutting process.
Fig. 16 is a diagram illustrating a progress status display screen displayed on a display screen of a display unit of a processing apparatus according to modification 1 of embodiment 1.
Fig. 17 is a diagram illustrating a progress status display screen displayed on a display screen of a display unit of a processing apparatus according to modification 2 of embodiment 1.
Description of the reference symbols
1: a processing device; 10: a chuck table; 20: a cutting unit (machining unit); 50: a cassette lifter (cassette mounting area); 60: a cartridge; 64: a storage rack (layer); 70: a cleaning unit (cleaning area); 81: tracks (pause areas); 90: a conveying unit; 100: a control unit; 101: a display information setting unit; 111: displaying a picture; 112: a progress status display screen (display information); 120: an in-device layout diagram; 121: temporarily playing the corresponding area; 122: 1, a conveying unit corresponding area; 123: a corresponding area of the chuck workbench; 124: cleaning a corresponding area; 125: a 2 nd conveying unit corresponding area; 131: grid; 140. 141: marking the processed object; 200: a workpiece; 301. 302, 303, 304, 305: color (prescribed color); 306: indicating the color of the completion of the loading.
Detailed Description
A mode (embodiment) for carrying out the present invention will be described in detail with reference to the accompanying drawings. The present invention is not limited to the contents described in the following embodiments. The components described below include those that can be easily conceived by those skilled in the art, and substantially the same ones. The following structures may be combined as appropriate. Various omissions, substitutions, and changes in the structure may be made without departing from the spirit of the invention.
[ embodiment 1]
A machining apparatus according to embodiment 1 of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing a configuration example of a processing apparatus according to embodiment 1. Fig. 2 is a perspective view showing a cartridge of the processing apparatus shown in fig. 1. Fig. 3 is a diagram illustrating a progress status display screen displayed on the display screen of the display unit of the processing apparatus shown in fig. 1. Fig. 4 is a diagram showing an example of the target object mark displayed on the display screen of the display unit of the machining apparatus shown in fig. 1. Fig. 5 is a diagram showing another example of the object mark displayed on the display screen of the display unit of the machining apparatus shown in fig. 1.
The machining apparatus 1 according to embodiment 1 is a machining apparatus 1 that performs cutting (corresponding to machining) on a workpiece 200 shown in fig. 1. In embodiment 1, the workpiece 200 is a wafer such as a disc-shaped semiconductor wafer or an optical device wafer having silicon, sapphire, gallium, or the like as a base material. In the workpiece 200, devices 203 are formed in regions partitioned in a lattice shape by a plurality of planned dividing lines 202 formed in a lattice shape on the front surface 201.
The workpiece 200 of the present invention may be a so-called TAIKO (registered trademark) wafer having a thinned central portion and a thick portion formed on an outer peripheral portion, or may be a rectangular package substrate, a ceramic substrate, a ferrite substrate, a substrate containing at least one of nickel and iron, or the like having a plurality of devices sealed with resin, in addition to the wafer. In embodiment 1, the workpiece 200 is supported by the ring frame 205 with the back surface 204 thereof bonded to the adhesive tape 206 having the ring frame 205 attached to the outer peripheral edge thereof.
The machining apparatus 1 shown in fig. 1 is an apparatus that holds a workpiece 200 by a chuck table 10 and cuts the workpiece along a line to divide 202 by a cutting tool 21. As shown in fig. 1, a processing apparatus 1 includes: a chuck table 10 that suctions and holds the workpiece 200 by a holding surface 11; a cutting unit 20 that cuts the workpiece 200 held by the chuck table 10 with a cutting tool 21; an imaging unit 30 that images the workpiece 200 held by the chuck table 10; and a control unit 100.
As shown in fig. 1, the processing apparatus 1 includes at least: an X-axis moving unit, not shown, for feeding the chuck table 10 in the X-axis direction parallel to the horizontal direction; a Y-axis moving unit, not shown, for indexing the cutting unit 20 in a Y-axis direction parallel to the horizontal direction and perpendicular to the X-axis direction; and a Z-axis moving unit 40 that performs a cutting-in feed of the cutting unit 20 in a Z-axis direction parallel to a vertical direction perpendicular to both the X-axis direction and the Y-axis direction. As shown in fig. 1, the machining apparatus 1 is a dicing saw having two cutting units 20, that is, two spindles, so-called facing biaxial type machining apparatus 1.
The chuck table 10 has a disk shape, and the holding surface 11 for holding the workpiece 200 is formed of porous ceramics or the like. The chuck table 10 is provided to be movable in the X-axis direction in a machining region below the cutting unit 20 and a carrying-in/out region away from the lower side of the cutting unit 20 to carry in and out the workpiece 200 by the X-axis moving unit, and is provided to be rotatable about an axis parallel to the Z-axis direction by a rotation drive source. The chuck table 10 is connected to a vacuum suction source, not shown, and sucks and holds the workpiece 200 placed on the holding surface 11 by the vacuum suction source. In embodiment 1, the chuck table 10 sucks and holds the back surface 204 side of the workpiece 200 via the adhesive tape 206. As shown in fig. 1, a plurality of clamping portions 12 for clamping the ring frame 205 are provided around the chuck table 10.
The cutting unit 20 is a cutting unit to which a cutting tool 21 for cutting the workpiece 200 held by the chuck table 10 is detachably attached. The cutting units 20 are provided so as to be movable in the Y-axis direction by the Y-axis moving unit and in the Z-axis direction by the Z-axis moving unit 40 with respect to the workpiece 200 held by the chuck table 10.
As shown in fig. 1, the one cutting unit 20 is provided on the one column portion 4 of the gate-shaped support frame 3 erected from the apparatus main body 2 via a Y-axis moving unit, a Z-axis moving unit 40, and the like. As shown in fig. 1, the other cutting unit 20 is provided on the other column portion 5 of the support frame 3 via a Y-axis moving unit, a Z-axis moving unit 40, and the like. The support frame 3 connects the upper ends of the column portions 4 and 5 to each other via a horizontal beam 6.
The cutting unit 20 can position the cutting tool 21 at an arbitrary position on the holding surface 11 of the chuck table 10 by the Y-axis moving unit and the Z-axis moving unit 40. The cutting unit 20 has: a spindle housing 22 provided to be movable in the Y-axis direction and the Z-axis direction by a Y-axis moving unit and a Z-axis moving unit 40; and a spindle, not shown, which is provided on the spindle housing 22 so as to be rotatable about the axis, is rotated by a motor, and has a cutting tool 21 attached to the tip thereof.
The imaging unit 30 is fixed to the cutting unit 20 so as to move integrally with the cutting unit 20. The imaging unit 30 includes an imaging element for imaging a region to be divided of the workpiece 200 before cutting held by the chuck table 10. The imaging Device is, for example, a CCD (Charge-Coupled Device) imaging Device or a CMOS (Complementary metal oxide semiconductor) imaging Device. The imaging unit 30 images the workpiece 200 held by the chuck table 10 to obtain an image for performing alignment or the like, aligns the workpiece 200 with the cutting tool 21, and outputs the obtained image to the control unit 100.
The X-axis moving unit moves the chuck table 10 in the X-axis direction, which is a machining feed direction, and causes the chuck table 10 and the cutting unit 20 to relatively perform machining feed along the X-axis direction. The Y-axis moving unit moves the cutting unit 20 in the Y-axis direction, which is an index feeding direction, and thus the chuck table 10 and the cutting unit 20 are relatively indexed in the Y-axis direction. The Z-axis moving unit 40 moves the cutting unit 20 in the Z-axis direction, which is a cutting feed direction, and causes the chuck table 10 and the cutting unit 20 to perform cutting feed relatively in the Z-axis direction.
The X-axis moving unit, the Y-axis moving unit, and the Z-axis moving unit 40 include: a known ball screw provided to be rotatable about an axis; a well-known motor that rotates a ball screw about an axis; and a known guide rail that supports the chuck table 10 or the cutting unit 20 to be movable in the X-axis direction, the Y-axis direction, or the Z-axis direction.
The machining apparatus 1 further includes: an X-axis direction position detection unit, not shown, for detecting the position of the chuck table 10 in the X-axis direction; a Y-axis direction position detection unit, not shown, for detecting the position of the cutting unit 20 in the Y-axis direction; and a Z-axis direction position detection unit that detects a Z-axis direction position of the cutting unit 20. The X-axis direction position detection unit and the Y-axis direction position detection unit can be constituted by a linear scale parallel to the X-axis direction or the Y-axis direction and a readhead. The Z-axis direction position detection unit detects the position of the cutting unit 20 in the Z-axis direction using the pulse of the motor. The X-axis direction position detection unit, the Y-axis direction position detection unit, and the Z-axis direction position detection unit output the X-axis direction of the chuck table 10, and the Y-axis direction or Z-axis direction position of the cutting unit 20 to the control unit 100. In embodiment 1, the positions of the components of the processing apparatus 1 in the X-axis direction, the Y-axis direction, and the Z-axis direction are determined using reference positions that are set in advance and that are not shown as reference positions.
The machining apparatus 1 further includes: a cassette lifter 50 as a cassette mounting area for mounting the cassette 60, which stores the workpiece 200 before and after cutting, on the upper surface and moving the cassette 60 up and down in the Z-axis direction; a cleaning unit 70 which is a cleaning region for cleaning the cut workpiece 200; a temporary placement unit 80 for moving the workpiece 200 into and out of the cassette 60; and a conveying unit 90 that conveys the workpiece 200.
As shown in fig. 2, the cartridge 60 has: a base plate 61 mounted on the cassette lifter 50; a top plate 62 facing the bottom plate 61 with a space therebetween in the Z-axis direction; and a pair of side plates 63 that connect the ends of the bottom plate 61 and the top plate 62 in the X-axis direction to each other. The pair of side plates 63 face each other with a gap therebetween in the X-axis direction. The pair of side plates 63 each have a storage shelf 64, and the storage shelves 64 are layers protruding in the direction of approaching each other. The cassette 60 has a plurality of storage shelves 64 on each side plate 63 at equal intervals in the Z-axis direction, and in embodiment 1, 10 storage shelves 64 on each side plate 63. The upper surfaces of the storage racks 64 disposed on the pair of side plates 63 and facing each other in the X-axis direction are disposed on the same plane. Each of the storage racks 64 places the workpiece 200 on the upper surface and stores the workpiece 200 in the cassette 60. In embodiment 1, each storage rack 64 mounts the ring frame 205 on the upper surface.
In the present description, when the storage shelves 64 are distinguished from each other, the natural numbers increasing from 1, such as-1, -2, -3 … -10, are assigned to the reference numerals 64 in order from the object on the lower side, and when the storage shelves 64 are not distinguished from each other, only the reference numeral 64 is assigned to the description. In the present specification, when the workpieces 200 stored in the storage shelves 64 are distinguished from each other, the natural numbers that increase from 1, such as the numbers-1, -2, -3 … -10, are assigned to the workpieces 200 stored in the lower storage shelf 64 in order from 1, and the descriptions are given by assigning only the number 200 without distinguishing the workpieces 200 stored in the storage shelves 64 from each other.
In embodiment 1, the cassette lifter 50 mounts the cassette 60 on the upper surface, and moves the cassette 60 up and down in the Z-axis direction by a motor, not shown.
The cleaning unit 70 is in a disk shape, and the cleaning unit 70 includes: a rotary table 72 having a holding surface 71 formed of porous ceramics or the like for holding the workpiece 200; and a cleaning liquid supply nozzle, not shown, for supplying a cleaning liquid such as pure water to the workpiece 200 held on the holding surface 71 of the rotary table 72.
The rotary table 72 is connected to a vacuum suction source, not shown, and sucks and holds the workpiece 200 placed on the holding surface 71 by the vacuum suction source. The rotary table 72 is provided to be rotatable about an axis parallel to the Z-axis direction by a motor or the like, not shown. In embodiment 1, the cleaning unit 70 cleans the workpiece 200 held on the holding surface 71 by supplying the cleaning liquid from the cleaning liquid supply nozzle to the workpiece 200 while rotating the rotary table 72 that sucks and holds the rear surface 204 side of the workpiece 200 through the adhesive tape 206 around the axis.
The temporary placement unit 80 carries out one sheet of the object 200 to be processed before cutting from the cassette 60 mounted on the cassette lifter 50, and carries the object 200 to be processed after cutting into the cassette 60. The pause unit 80 includes: a carrying-in and carrying-out unit 83 that carries out the object 200 to be machined before cutting from the magazine 60 and carries the object 200 to be machined after cutting into the magazine 60; and a pair of rails 81 serving as a temporary placement area for temporarily placing the pre-cut workpiece 200 carried out of the cassette 60 mounted on the cassette lifter 50 and temporarily placing the post-cut workpiece 200. The pause unit 80 further includes a detection sensor 82 for detecting the workpiece 200 placed on the rail 81. The detection sensor 82 outputs the detection result to the control unit 100.
The conveying unit 90 conveys the workpiece 200 among the cassette 60, the rail 81 of the temporarily placing unit 80, the chuck table 10, and the rotating table 72 of the cleaning unit 70. The conveyance unit 90 includes a 1 st conveyance unit 91 and a 2 nd conveyance unit 92. The 1 st conveyance unit 91 conveys the workpiece 200 before cutting placed temporarily on the rail 81 of the temporary placement unit 80 to the chuck table 10, and conveys the cleaned workpiece 200 on the rotary table 72 of the cleaning unit 70 to the rail 81 of the temporary placement unit 80. The 2 nd conveying unit 92 conveys the cut workpiece 200 on the chuck table 10 to the rotary table 72 of the cleaning unit 70.
In the present specification, the 1 st conveying unit 91 and the 2 nd conveying unit 92 have the same configuration, and therefore the 1 st conveying unit 91 will be described below as a representative, and the same reference numerals are given to the same parts of the 2 nd conveying unit 92 and the 1 st conveying unit 91, and the description thereof will be omitted. The 1 st conveying unit 91 includes: a unit main body 94 provided to be movable in the Y-axis direction and vertically movable in the Z-axis direction on a 2 nd support frame 7 that is provided upright from the apparatus main body 2 and is disposed at a position closer to the carrying-in/out area than the support frame 3; and a suction member 93 attached to the unit main body 94, connected to a vacuum suction source not shown, and configured to suck and hold the ring frame 205 supporting the workpiece 200. The 1 st conveyance unit 91 conveys the workpiece 200 by holding the annular frame 205 by suction with the suction member 93 and moving the unit main body 94 in the Y-axis direction and the Z-axis direction.
The control unit 100 controls each of the above units of the machining apparatus 1 to cause the machining apparatus 1 to perform a machining operation on the workpiece 200. Specifically, the control unit 100 carries the workpiece 200 before cutting out to the temporary placement unit 80 and places it on the rail 81, and the 1 st conveyance unit 91 conveys the workpiece 200 placed on the rail 81 to the chuck table 10. The control unit 100 sucks and holds the workpiece 200 on the chuck table 10 and clamps the ring frame 205 by the clamping portion 12, and then moves the chuck table 10 by the X-axis moving unit and images the workpiece 200 on the chuck table 10 by the imaging unit 30. The control unit 100 performs alignment to align the workpiece 200 and the cutting tool 21, and cuts the cutting tool 21 into the line to divide 202 while relatively moving the chuck table 10 and the cutting tool 21 of the cutting unit 20 along the line to divide 202.
After the cutting tool 21 cuts into all the lines to divide 202, the control unit 100 releases the suction holding of the chuck table 10 and the clamping of the clamping portion 12, and conveys the workpiece 200 on the chuck table 10 to the rotary table 72 by the 2 nd conveying unit 92. After the workpiece 200 is sucked and held by the rotary table 72 and the workpiece 200 is cleaned by the cleaning unit 70, the control unit 100 releases the suction and holding of the rotary table 72 and conveys the workpiece 200 on the rotary table 72 onto the rail 81 by the 1 st conveying unit 91. The control unit 100 positions the lower surface of the ring frame 205 on the rail 81, which supports the object 200, and the upper surface of the storage rack 64, which is the same as that before the carrying-out, on the same plane by the cassette lifter 50, and then carries the object 200 on the rail 81 into the cassette 60 by the temporary placement unit 80.
Further, the control unit 100 is a computer, and the control unit 100 includes: an arithmetic processing device having a microprocessor such as a Central Processing Unit (CPU); a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory); and an input/output interface device. The arithmetic processing device of the control unit 100 performs arithmetic processing in accordance with a computer program stored in the storage device, and outputs a control signal for controlling the machining apparatus 1 to the above-described respective units of the machining apparatus 1 via the input/output interface device.
The control unit 100 determines whether or not the workpiece 200 is temporarily placed on the temporary placement rail 81 based on the detection result of the detection sensor 82. The control unit 100 determines whether or not the chuck table 10 sucks and holds the workpiece 200 by the holding surface 11 based on the negative pressure of the vacuum suction source connected to the chuck table 10 or the like. The control unit 100 determines whether or not the rotary table 72 sucks and holds the workpiece 200 by the holding surface 71 based on the negative pressure of the vacuum suction source connected to the rotary table 72 and the like. The control unit 100 determines whether or not the respective conveyance units 91 and 92 are to suck and hold the workpiece 200 by the suction member 93, based on the negative pressure of the vacuum suction source connected to the suction member 93 of the respective conveyance units 91 and 92, or the like.
The processing apparatus 1 includes: a display unit 110 (shown in fig. 1) connected to the control unit 100 and having a display screen 111 for displaying a state of a machining operation, an image, and the like; and an input unit that is connected to the control unit 100 and is used by an operator when registering the processing content information or the like. The display unit 110 is constituted by a liquid crystal display device or the like. The input unit is configured by an external input device such as a touch panel or a keyboard provided on the display screen 111 of the display unit 110.
The display unit 110 is controlled by the control unit 100 so that a progress status display screen 112 as display information shown in fig. 3 is displayed on the display screen 111 during the machining operation of the machining apparatus 1. The progress display screen 112 shows the progress of the cutting process of the workpiece 200 in the machining apparatus 1.
As shown in fig. 3, the progress status display screen 112 includes: a start/stop input area 113 for inputting start and stop of cutting by the machining apparatus 1; a captured image display area 114 in which the imaging unit 30 captures an image and displays the image; an in-device layout 120; and a box interior layout 130.
The in-device layout 120 includes: a pause corresponding region 121 corresponding to the track 81 of the pause unit; a 1 st conveying unit corresponding area 122 corresponding to the 1 st conveying unit 91; a chuck table corresponding region 123 corresponding to the chuck table 10; a cleaning corresponding region 124 corresponding to the rotary table 72 of the cleaning unit 70; and a 2 nd conveying unit corresponding area 125 corresponding to the 2 nd conveying unit 92. The corresponding areas 121, 122, 123, 124, and 125 display a predetermined color or a predetermined identification mark. In embodiment 1, the respective corresponding regions 121, 122, 123, 124, 125 display mutually different colors 301, 302, 303, 304, 305. In embodiment 1, the intra-apparatus layout 120 has a blank area 126 that does not correspond to any of the units of the processing apparatus 1. The blank region 126 may be used to correspond to another unit of the processing apparatus 1 or a unit added to the processing apparatus 1.
The box inside layout 130 has a plurality of cells 131 corresponding to the storage shelves 64. In embodiment 1, 10 cells 131 are arranged in the vertical direction of the display screen 111 so as to correspond to the storage shelves 64 one by one, and correspond to the storage shelf 64 from the lower side to the upper side among the plurality of storage shelves 64 of the cartridge 60 in the order from the lower side to the upper side. In the present specification, when the cells 131 are distinguished from each other, the natural numbers increasing from 1, such as-1, -2, -3 … -10, are assigned to the reference numerals 131 in order from the lower object, and when the cells 131 are not distinguished from each other, only the reference numeral 131 is assigned.
As shown in fig. 1 and the like, the control unit 100 includes a display information setting unit 101 that sets information to be displayed on the display screen 111. In order to display the apparatus interior layout 120 and the box interior layout 130 on the display screen 111, the display information setting unit 101 sets the apparatus interior layout 120 and the box interior layout 130 as display information. That is, the display information setting unit 101 stores information for displaying the in-apparatus layout diagram 120 and the in-box layout diagram 130, a program for displaying the in-apparatus layout diagram 120 and the in-box layout diagram 130 on the display screen 111, and the like.
In order to show the current position of the workpiece 200 carried out of the cassette 60, the display information setting unit 101 sets the workpiece marks 140 and 141 shown in fig. 4 and 5 displayed in a manner overlapping the in-device layout 120 of the display screen 111 as display information. In embodiment 1, the object marks 140 and 141 shown in fig. 4 and 5 schematically show the planar shapes of the object 200 and the ring frame 205. In the present specification, when the storage shelves 64 storing the workpieces 200 indicated by the workpiece marks 140 and 141 before cutting are distinguished from each other, natural numbers that increase in order from 1, such as reference numerals 140, 141, -1, -2, -3 … -10, are described in order from the workpiece mark indicating the workpiece 200 stored in the storage shelf 64 on the lower side, and when the storage shelves 64 storing the workpieces 200 indicated by the workpiece marks 140 and 141 before cutting are not distinguished from each other, only the reference numerals 140 and 141 will be described.
The display information setting unit 101 displays the object markers 140 and 141 so as to overlap the corresponding regions 121, 122, 123, 124, and 125 corresponding to the current position in the machining device 1 of the object 200. In embodiment 1, the object mark 140 shown in fig. 4 is used before being carried out of the cartridge 60 and held on the chuck table 10, and the object mark 141 shown in fig. 5 is used after being held on the chuck table 10 until being carried into the cartridge 60. That is, the display information setting unit 101 stores information indicating the target objects 140 and 141, a program for displaying the target objects 140 and 141 in a manner to overlap the corresponding areas 121, 122, 123, 124, and 125 of the display screen 111, and the like.
The display information setting unit 101 stores a lattice display program 150, and executes the lattice display program 150 during the cutting process of the machining apparatus 1. The cell display program 150 is a program for displaying the colors 301, 302, 303, 304, 305 of the respective corresponding regions 121, 122, 123, 124, 125 or a predetermined identification mark corresponding to the current position of the workpiece 200 stored in the storage rack 64 of the cassette 60 shown in the cell 131. In embodiment 1, the cell display program 150 displays colors corresponding to the corresponding regions 121, 122, 123, 124, 125 in each cell 131 (in embodiment 1, the same colors 301, 302, 303, 304, 305 as the corresponding regions 121, 122, 123, 124, 125), and the corresponding regions 121, 122, 123, 124, 125 correspond to the current position in the machining apparatus 1 of the workpiece 200 stored in the storage rack 64 corresponding to each cell 131 before the cutting process.
The cell display program 150 is a program for displaying a color 306 or an identification mark indicating that loading is completed in the cell 131 of the storage rack 64 in which the workpiece 200 is stored, which is carried out of the cassette 60 and then returned to the cassette 60 again. The cell display program 150 displays a color 306 (for example, gray, indicated by a dense parallel hatching in fig. 3) indicating that the loading is completed in the cell 131 corresponding to the storage rack 64 in which the workpiece 200 is stored, which is unloaded from the cassette 60 and then returned to the cassette 60 again.
The function of the display information setting unit 101 is realized by the storage device of the control unit 100 storing information indicating the in-device layout diagram 120, information indicating the in-box layout diagram 130, information indicating the object markers 140 and 141, and the lattice display program 150, and the arithmetic processing device performing arithmetic processing in accordance with a computer program stored in the storage device.
In the processing apparatus 1, the region other than the cartridge 60 in the apparatus main body 2 is covered with an exterior cover, not shown, and the display unit 110 is attached to the exterior cover.
Next, the present specification describes a machining operation of the machining apparatus 1 configured as described above. Fig. 6 is a view showing a progress status display screen when the object to be processed, which has been stored in the storage rack on the lowermost side of the magazine of the processing apparatus shown in fig. 1, is temporarily placed on the rail. Fig. 7 is a view showing a progress status display screen when the object to be processed, which has been stored in the storage rack on the lowermost side of the magazine of the processing apparatus shown in fig. 1, is transported by the 1 st transport unit. Fig. 8 is a view showing a progress status display screen when the object to be processed, which has been once stored in the second storage rack from the bottom of the magazine of the processing apparatus shown in fig. 1, is placed on the rail. Fig. 9 is a view showing a progress status display screen when the workpiece that was once stored in the lowermost storage rack of the magazine of the processing apparatus shown in fig. 1 is held by the chuck table and the workpiece that was once stored in the next second storage rack is transported by the 1 st transport unit. Fig. 10 is a view showing a progress status display screen when the second conveying unit 2 conveys the workpiece that was once stored in the lowermost storage rack of the cassette of the processing apparatus shown in fig. 1, the workpiece that was once stored in the second next storage rack is held on the chuck table, and the workpiece that was once stored in the third next storage rack of the cassette is temporarily placed on the rail. Fig. 11 is a view showing a progress status display screen when the workpiece that was once stored in the lowermost storage rack of the magazine of the processing apparatus shown in fig. 1 is held on the rotary table and the workpiece that was once stored in the third storage rack next to the magazine is transported by the 1 st transport unit. Fig. 12 is a diagram showing a progress status display screen when the 1 st conveying unit conveys a workpiece that has been stored in the lowermost storage rack of the magazine of the processing apparatus shown in fig. 1, the 2 nd conveying unit conveys a workpiece that has been stored in the next second storage rack, and the workpiece that has been stored in the next third storage rack of the magazine is held on the chuck table. Fig. 13 is a diagram showing a progress status display screen when the object to be processed, which has been once stored in the storage rack on the lowermost side of the magazine of the processing apparatus shown in fig. 1, is temporarily placed on the rail and the object to be processed, which has been stored in the next second storage rack, is held on the rotary table. Fig. 14 is a diagram showing a progress status display screen when the workpiece that has been stored in the lowermost storage rack of the cassette of the processing apparatus shown in fig. 1 is carried into the cassette and the workpiece that has been stored in the fourth storage rack from the bottom is temporarily placed on the rail. Fig. 15 is a diagram of a progress status display screen when the workpiece once stored in the uppermost storage rack of the cassette of the processing apparatus shown in fig. 1 is temporarily placed on the rail after the cutting process.
First, in the machining operation, the operator registers the machining content information in the control unit 100, stores the workpiece 200 before cutting in the cassette 60, and sets the cassette 60 on the upper surface of the cassette lifter 50. When the machining device 1 receives a machining operation start instruction from the operator, the machining operation is started. In embodiment 1, the control unit 100 of the machining apparatus 1 displays the progress status display screen 112 on the display screen 111 of the display unit 110, and starts the machining operation of the machining apparatus 1 when receiving an operation of the start/stop input region 113 by the operator. In embodiment 1, the machining device 1 performs the cutting process on the workpieces 200 stored in the plurality of storage racks 64 of the cassette 60 in order from the workpiece 200 stored in the lower storage rack 64 to the workpiece 200 stored in the upper storage rack 64 during the machining operation, but the order of the machining device 1 performing the cutting process on the workpiece 200 in the cassette 60 is not limited to the order shown in embodiment 1 in the present invention.
When the machining device 1 starts the machining operation, the cassette 60 is positioned by the cassette lifter 50 at a position where the lower surface of the ring frame 205 supporting the workpiece 200-1 stored in the storage rack 64-1 at the lowermost side is flush with the upper surface of the rail 81. The control unit 100 carries out the workpiece 200-1 stored in the storage rack 64-1 on the lowermost side from the cassette 60 by the carrying-in and carrying-out unit 83 of the temporary storage unit 80, and temporarily stores the carried-out workpiece 200-1 on the rail 81. When the detection sensor 82 detects the workpiece 200-1 placed on the rail 81, the control unit 100 displays the workpiece mark 140-1 indicating the workpiece 200-1 that was stored in the lowermost storage rack 64-1 in a superimposed manner in the temporary placement corresponding area 121 of the progress status display screen 112 as shown in fig. 6. Further, the control unit 100 displays the same color 301 as the pause corresponding region 121 in the compartment 131-1 corresponding to the lowermost storage shelf 64-1 among the plurality of compartments 131.
The control unit 100 sucks and holds the ring frame 205 supporting the workpiece 200-1 placed on the rail 81 of the temporary placing unit 80 by the 1 st conveying unit 91, relatively moves the 1 st conveying unit 91 and the chuck table 10 by an X-axis moving unit or the like, and moves the 1 st conveying unit 91 upward of the chuck table 10. When the control unit 100 detects that the 1 st conveyance unit 91 suctions and holds the ring frame 205 based on, for example, the negative pressure of the vacuum suction source connected to the suction member 93 of the 1 st conveyance unit 91, the processing object mark 140-1 indicating the processing object 200-1 once stored in the storage rack 64-1 on the lowermost side is superimposed and displayed on the 1 st conveyance unit corresponding region 122 of the progress status display screen 112 as shown in fig. 7. The control unit 100 displays the same color 302 as the 1 st conveying unit corresponding region 122 in the cell 131-1 corresponding to the lowermost storage rack 64-1 among the cells 131.
The control unit 100 positions the cassette 60 by the cassette lifter 50 at a position where the lower surface of the ring frame 205 supporting the workpiece 200-2 stored in the second storage rack 64-2 on the lower side is flush with the upper surface of the rail 81. The control unit 100 carries out the object 200-2 stored in the second storage rack 64-2 from the cassette 60 by the carrying-in and carrying-out unit 83 of the temporary storage unit 80, and temporarily stores the carried-out object 200-2 on the rail 81. When the detection sensor 82 detects the workpiece 200-2 placed on the rail 81, the control unit 100 displays the workpiece mark 140-2 indicating the workpiece 200-2 that was stored in the next second storage rack 64-2 in a superimposed manner in the temporary placement corresponding area 121 of the progress status display screen 112 as shown in fig. 8. Further, the control unit 100 displays the same color 301 as the pause corresponding region 121 in the cell 131-2 corresponding to the next second storage rack 64-2 among the plurality of cells 131.
The control unit 100 places the workpiece 200-1 on the holding surface 11 of the chuck table 10 by the first conveying unit 91, sucks and holds the workpiece 200-1 by the chuck table 10, and holds the ring frame 205 by the holding section 12. When the control unit 100 detects that the chuck table 10 sucks and holds the workpiece 200-1 based on the negative pressure of the vacuum suction source connected to the chuck table 10, as shown in fig. 9, the workpiece mark 141-1 indicating the workpiece 200-1 once stored in the lowermost storage shelf 64-1 is displayed in a superimposed manner in the chuck table corresponding region 123 of the progress status display screen 112. Further, the control unit 100 displays the same color 303 as the chuck table corresponding region 123 in the cell 131-1 corresponding to the lowermost storage shelf 64-1 among the plurality of cells 131.
The control unit 100 moves the chuck table 10 toward the machining area by the X-axis moving unit, photographs the workpiece 200-1 by the photographing unit 30, and performs alignment based on an image photographed by the photographing unit 30. At this time, the control unit 100 displays the image captured by the imaging unit 30 in the captured image display area 114 of the progress status display screen 112.
The control unit 100 cuts the workpiece 200-1 into the devices 203 by cutting the cutting tool 21 into the lines 202 while relatively moving the workpiece 200-1 and the cutting unit 20 along the lines 202. When the control unit 100 cuts the cutting tool 21 into all the lines 202 to be divided of the object 200-1 sucked and held by the chuck table 10, the suction and holding of the chuck table 10 and the clamping of the clamping portion 12 are released.
The control unit 100 sucks and holds the ring frame 205 supporting the workpiece 200-2 placed on the rail 81 of the temporary placing unit 80 by the 1 st conveying unit 91, relatively moves the 1 st conveying unit 91 and the chuck table 10 by an X-axis moving unit or the like, and moves the 1 st conveying unit 91 upward of the chuck table 10. When the control unit 100 detects that the 1 st conveyance unit 91 suctions and holds the ring frame 205 based on, for example, the negative pressure of the vacuum suction source connected to the suction member 93 of the 1 st conveyance unit 91, as shown in fig. 9, the object mark 140-2 indicating the object 200-2 that was stored in the next second storage rack 64-2 is displayed in a superimposed manner in the 1 st conveyance unit corresponding area 122 of the progress status display screen 112. Further, the control unit 100 displays the same color 302 as the 1 st conveying unit corresponding area 122 in the cell 131-2 corresponding to the second receiving rack 64-2 among the plurality of cells 131.
The control unit 100 sucks and holds the annular frame 205 supporting the workpiece 200-1 placed on the holding surface 11 of the chuck table 10 by the 2 nd conveying unit 92, and moves the 2 nd conveying unit 92 upward of the rotary table 72. When the control unit 100 detects that the 2 nd conveyance unit 92 sucks and holds the ring frame 205 based on the negative pressure of the vacuum suction source connected to the suction member 93 of the 2 nd conveyance unit 92 or the like, as shown in fig. 10, the workpiece mark 141-1 indicating the workpiece 200-1 once stored in the lowermost storage rack 64-1 is superimposed and displayed on the 2 nd conveyance unit corresponding region 125 of the progress status display screen 112. The control unit 100 displays the same color 305 as the 2 nd conveying unit corresponding area 125 in the cell 131-1 corresponding to the lowermost storage rack 64-1 among the cells 131.
The control unit 100 places the workpiece 200-2 on the holding surface 11 of the chuck table 10 by the first conveying unit 91, sucks and holds the workpiece 200-2 by the chuck table 10, and holds the ring frame 205 by the holding section 12. When the control unit 100 detects that the chuck table 10 sucks and holds the workpiece 200-2 based on the negative pressure of the vacuum suction source connected to the chuck table 10, as shown in fig. 10, the workpiece mark 141-2 indicating the workpiece 200-2 once stored in the next second storage rack 64-2 is displayed in a superimposed manner in the chuck table corresponding area 123 of the progress status display screen 112. Further, the control unit 100 displays the same color 303 as the region 123 corresponding to the chuck table in the cell 131-2 corresponding to the next second housing rack 64-2 among the plurality of cells 131. The control unit 100 divides the workpiece 200-2 into the devices 203 similarly to the workpiece 200-1. When the control unit 100 cuts the cutting tool 21 into all the lines 202 to be divided of the object 200-2 sucked and held by the chuck table 10, the suction and holding of the chuck table 10 and the clamping of the clamping portion 12 are released.
The control unit 100 positions the cassette 60 by the cassette lifter 50 at a position where the lower surface of the ring frame 205 supporting the workpiece 200-3 stored in the third storage rack 64-3 below is flush with the upper surface of the rail 81. The control unit 100 carries out the object 200-3 stored in the third storage rack 64-3 from the cassette 60 by the carrying in and out unit 83 of the temporary storage unit 80, and temporarily stores the carried out object 200-3 on the rail 81. When the detection sensor 82 detects the workpiece 200-3 placed temporarily on the rail 81, the control unit 100 displays the workpiece mark 140-3 indicating the workpiece 200-3 that was stored in the third storage rack 64-3 from below in a superimposed manner in the temporary placement corresponding area 121 of the progress status display screen 112 as shown in fig. 10. Further, the control unit 100 displays the same color 301 as the pause corresponding region 121 in the cell 131-3 corresponding to the third receiving rack 64-3 from among the plurality of cells 131.
The control unit 100 places the workpiece 200-1 on the holding surface 71 of the rotating table 72 by the 2 nd conveying unit 92, and suctions and holds the workpiece 200-1 by the rotating table 72. When the control unit 100 detects that the rotary table 72 sucks and holds the workpiece 200-1 based on the negative pressure of the vacuum suction source connected to the rotary table 72, as shown in fig. 11, the workpiece mark 141-1 indicating the workpiece 200-1 once stored in the lowermost storage rack 64-1 is superimposed and displayed on the cleaning corresponding region 124 of the progress status display screen 112. Further, the control unit 100 displays the same color 304 as the cleaning corresponding region 124 in the compartment 131-1 corresponding to the lowermost storage rack 64-1 among the plurality of compartments 131. The control unit 100 cleans the workpiece 200-1 by supplying the cleaning liquid from the cleaning liquid supply nozzle while rotating the rotary table 72 around the axis by the cleaning unit 70. After the workpiece 200-1 is cleaned by the cleaning unit 70 for a predetermined time, the control unit 100 stops the rotation of the rotary table 72 and the supply of the cleaning liquid, and releases the suction holding of the rotary table 72.
The control unit 100 sucks and holds the ring frame 205 supporting the workpiece 200-3 placed on the rail 81 of the temporary placing unit 80 by the 1 st conveying unit 91, relatively moves the 1 st conveying unit 91 and the chuck table 10 by an X-axis moving unit or the like, and moves the 1 st conveying unit 91 upward of the chuck table 10. When the control unit 100 detects that the 1 st conveyance unit 91 suctions and holds the ring frame 205 based on, for example, the negative pressure of the vacuum suction source connected to the suction member 93 of the 1 st conveyance unit 91, the object mark 140-3 indicating the object 200-3 that was stored in the next third storage rack 64-3 is superimposed and displayed on the 1 st conveyance unit corresponding area 122 of the progress status display screen 112 as shown in fig. 11. The control unit 100 displays the same color 302 as the 1 st conveying unit corresponding area 122 in the cell 131-3 corresponding to the third receiving rack 64-3 from among the cells 131.
The control unit 100 sucks and holds the annular frame 205 supporting the workpiece 200-2 placed on the holding surface 11 of the chuck table 10 by the 2 nd conveying unit 92, and moves the 2 nd conveying unit 92 upward of the rotary table 72. When the control unit 100 detects that the 2 nd conveyance unit 92 sucks and holds the ring frame 205 based on the negative pressure of the vacuum suction source connected to the suction member 93 of the 2 nd conveyance unit 92, as shown in fig. 12, the object mark 141-2 indicating the object 200-2 that was stored in the next second storage rack 64-2 is superimposed and displayed on the 2 nd conveyance unit corresponding area 125 of the progress status display screen 112. The control unit 100 displays the same color 305 as the 2 nd conveying unit corresponding area 125 in the cell 131-2 corresponding to the next second storage rack 64-2 among the cells 131.
The control unit 100 places the workpiece 200-3 on the holding surface 11 of the chuck table 10 by the first conveying unit 91, sucks and holds the workpiece 200-3 by the chuck table 10, and holds the ring frame 205 by the holding section 12. When the control unit 100 detects that the chuck table 10 sucks and holds the workpiece 200-3 based on the negative pressure of the vacuum suction source connected to the chuck table 10, as shown in fig. 12, the workpiece mark 141-3 indicating the workpiece 200-3 once stored in the third storage rack 64-2 is displayed in a superimposed manner in the chuck table corresponding area 123 of the progress status display screen 112. In addition, the control unit 100 displays the same color 303 as the chuck table corresponding region 123 in the cell 131-3 corresponding to the third receiving rack 64-3 from among the plurality of cells 131. The control unit 100 divides the workpiece 200-3 into the devices 203 similarly to the workpieces 200-1 and 200-2. When the control unit 100 divides the workpiece 200-3 sucked and held by the chuck table 10 into the respective devices 203, the suction holding of the chuck table 10 and the clamping of the clamping portion 12 are released.
The control unit 100 sucks and holds the annular frame 205 supporting the workpiece 200-1 placed on the rotary table 72 by the 1 st conveyance unit 91, and moves the 1 st conveyance unit 91 upward of the rail 81 of the placement unit 80. When the control unit 100 detects that the 1 st conveyance unit 91 suctions and holds the ring frame 205 based on, for example, the negative pressure of the vacuum suction source connected to the suction member 93 of the 1 st conveyance unit 91, as shown in fig. 12, the object mark 141-1 indicating the object 200-1 to be processed, which was stored in the storage rack 64-1 on the lowermost side, is displayed in a superimposed manner in the 1 st conveyance unit corresponding area 122 of the progress status display screen 112. The control unit 100 displays the same color 302 as the 1 st conveying unit corresponding region 122 in the cell 131-1 corresponding to the lowermost storage rack 64-1 among the cells 131.
The control unit 100 places the workpiece 200-2 on the holding surface 71 of the rotating table 72 by the 2 nd conveying unit 92, and suctions and holds the workpiece 200-2 by the rotating table 72. When the control unit 100 detects that the rotary table 72 sucks and holds the workpiece 200-2 based on the negative pressure of the vacuum suction source connected to the rotary table 72, as shown in fig. 13, the workpiece mark 141-2 indicating the workpiece 200-2 once stored in the next second storage rack 64-2 is displayed in a superimposed manner in the cleaning correspondence region 124 of the progress status display screen 112. Further, the control unit 100 displays the same color 304 as the cleaning corresponding region 124 in the cell 131-2 corresponding to the second receiving rack 64-2 from among the plurality of cells 131. The control unit 100 cleans the workpiece 200-2 by the cleaning unit 70 in the same manner as the workpiece 200-1, and releases the suction holding of the rotary table 72 when the cleaning is finished.
Further, the control unit 100 places the workpiece 200-1 on the rail 81 of the provisional placement unit 80 by the 1 st conveyance unit 91, and when the detection sensor 82 detects the workpiece 200-1 provisionally placed on the rail 81, as shown in fig. 13, superimposes and displays the workpiece mark 141-1 indicating the workpiece 200-1 once stored in the lowermost storage rack 64-1 on the provisional placement corresponding area 121 of the progress status display screen 112. Further, the control unit 100 displays the same color 301 as the pause corresponding region 121 in the compartment 131-1 corresponding to the lowermost storage shelf 64-1 among the plurality of compartments 131.
The control unit 100 positions the cassette 60 by the cassette lifter 50 at a position where the upper surface of the lowermost storage rack 64-1 for storing the workpiece 200-1 placed on the rail 81 is flush with the upper surface of the rail 81. The control unit 100 carries the object 200-1 on the rail 81 to the lowermost storage rack 64-1 by the carrying-in and carrying-out unit 83 of the temporary placement unit 80. When the detection sensor 82 does not detect the workpiece 200-1 placed on the rail 81, the control unit 100 displays a color 306 indicating that the loading is completed in the cell 131-1 corresponding to the lowermost storage rack 64-1 among the cells 131 as shown in fig. 14.
The control unit 100 positions the cassette 60 by the cassette lifter 50 at a position where the lower surface of the ring frame 205 supporting the workpiece 200-4 stored in the fourth storage rack 64-4 from the bottom is flush with the upper surface of the rail 81. The control unit 100 carries out the object 200-4 stored in the fourth storage rack 64-4 from the cassette 60 by the carrying-in and carrying-out unit 83 of the temporary storage unit 80, and temporarily stores the carried-out object 200-4 on the rail 81. When the detection sensor 82 detects the workpiece 200-4 placed temporarily on the rail 81, the control unit 100 displays the workpiece mark 140-4 indicating the workpiece 200-4 that was stored in the fourth storage rack 64-4 from the bottom in a superimposed manner in the temporary placement corresponding area 121 of the progress status display screen 112 as shown in fig. 14. Further, the control unit 100 displays the same color 301 as the pause corresponding region 121 in the cell 131-4 corresponding to the fourth receiving rack 64-4 from among the plurality of cells 131.
In this way, the processing apparatus 1 displays the colors 301, 302, 303, 304, 305 of the corresponding regions 121, 122, 123, 124, 125 corresponding to the current position of the workpiece 200 once stored in the storage rack 64 of the cassette 60 shown in the cell 131 in each cell 131 of the cassette internal layout diagram 130 of the progress status display screen 112 on the display screen 111 of the display unit 110. The processing apparatus 1 displays a color 306 indicating that the carrying-in is completed in a cell 131 of the storage rack 64 in which the object 200 to be processed is stored after being carried out from the cassette 60 and then returned to the cassette 60 again.
The machining apparatus 1 sequentially conveys the workpiece 200 from the cassette 60 to the rail 81 of the temporary placement unit 80, the 1 st conveying unit 91, the chuck table 10, the 2 nd conveying unit 92, the rotating table 72, the 1 st conveying unit 91, and the rail 81 of the temporary placement unit 80, and then cuts the workpiece into the cassette 60. In embodiment 1, when the control unit 100 cuts the workpiece 200 in order from the lower side in the cassette 60 and the detection sensor 82 detects the workpiece 200-10 that has been cut by the tenth rack 64-10 placed next to the rail 81, the workpiece mark 141-10 indicating the workpiece 200-10 placed next to the tenth rack 64-10 is displayed in the temporary placement corresponding area 121 of the progress status display screen 112 in a superimposed manner as shown in fig. 15. Further, the control unit 100 displays the same color 301 as the pause corresponding region 121 in the cell 131-10 corresponding to the tenth receiving rack 64-10 from among the plurality of cells 131. At this time, as shown in fig. 15, the control unit 100 displays a color 306 indicating that the loading is completed in the cells 131-9 corresponding to the ninth lower storage rack 64-9 from the cell 131-1 corresponding to the lowermost storage rack 64-1 among the cells 131. The control unit 100 positions the cassette 60 by the cassette lifter 50 at a position where the upper surface of the uppermost storage rack 64-10 for storing the workpiece 200-10 placed on the rail 81 is flush with the upper surface of the rail 81. The control unit 100 carries the object 200-10 on the rail 81 to the uppermost storage rack 64-10 by the carrying-in and carrying-out unit 83 of the temporary placement unit 80. In this way, when the cutting of all the workpieces 200 in the cassette 60 is completed, the control unit 100 of the processing apparatus 1 ends the processing operation.
In the processing apparatus 1 according to embodiment 1, the in-apparatus layout 120 and the in-box layout 130 are set on the progress status display screen 112 displayed on the display screen 111 of the display unit 110. The processing apparatus 1 sets different colors 301, 302, 303, 304, 305 in advance for the respective corresponding regions 121, 122, 123, 124, 125 of the in-apparatus layout 120, and sets a cell 131 corresponding to the workpiece 200 in the cassette 60 in the cassette layout 130. The processing apparatus 1 displays, in each cell 131, colors 301, 302, 303, 304, 305 of corresponding regions 121, 122, 123, 124, 125 corresponding to the current position of the workpiece 200 once stored in the storage rack 64 of the cassette 60 corresponding to the cell 131. Therefore, the processing apparatus 1 can make the operator clearly recognize at a glance which position in the layout diagram of the inside of the apparatus the workpiece 200 carried out from each storage rack 64 of the magazine 60 is at by the colors 301, 302, 303, 304, 305 of the lattice 131. As a result, the machining device 1 has an effect of being able to grasp the progress of machining of the workpiece 200.
In addition, since the machining device 1 displays the workpiece marks 140 and 141 in a superimposed manner in the corresponding regions 121, 122, 123, 124, and 125, the operator can recognize the current position of each workpiece 200 at a glance by checking the corresponding regions 121, 122, 123, 124, and 125.
The processing apparatus 1 sets the conveyance unit corresponding areas 122 and 125 corresponding to the conveyance units 91 and 92 on the progress status display screen 112. As a result, the processing apparatus 1 can also make the operator clearly recognize the state of the workpiece 200 being conveyed in the processing apparatus 1 by checking the colors 301, 302, 303, 304, 305 of the grid 131.
Further, since the machining device 1 displays the color 306 indicating the completion of the carrying-in the cell 131 corresponding to the storage rack 64 for storing the workpiece 200 carried into the cassette 60, which is carried out of the cassette 60 and subjected to the cutting process, the operator can recognize the processed workpiece 200 at a glance by checking the cassette layout diagram 130.
[ modification 1]
A machining apparatus according to modification 1 of embodiment 1 of the present invention will be described with reference to the drawings. Fig. 16 is a diagram illustrating a progress status display screen displayed on a display screen of a display unit of a processing apparatus according to modification 1 of embodiment 1. In fig. 16, the same portions as those in embodiment 1 are denoted by the same reference numerals, and description thereof is omitted.
The processing apparatus 1 according to modification 1 of embodiment 1 supports a plurality of (two in modification 1) cassettes 60 by overlapping them in the Z-axis direction by the cassette lifter 50. The progress status display screen 112 of the processing apparatus 1 according to modification 1 has the same configuration as the progress status display screen 112 according to embodiment 1 except that the cassette internal layout 130 includes a 1 st cassette internal layout 130-1 corresponding to the lower cassette 60 of the two cassettes 60 and a 2 nd cassette internal layout 130-2 corresponding to the upper cassette 60 as shown in fig. 16. The inside layout views 130-1 and 130-2 of the progress status display screen 112 of the processing apparatus 1 according to modification 1 are equivalent to the inside layout view 130 of embodiment 1.
In the processing apparatus 1 of modification 1, the in-apparatus layout 120 and the cassette layouts 130-1 and 130-2 are set on the progress status display screen 112, and the colors 301, 302, 303, 304, 305 of the corresponding regions 121, 122, 123, 124, 125 corresponding to the current position of the workpiece 200 that has been stored in the storage rack 64 of the cassette 60 corresponding to the cell 131 are displayed in each cell 131 of the cassette layouts 130-1 and 130-2, as in embodiment 1. Therefore, the machining device 1 according to modification 1 can make the operator clearly recognize at a glance which position in the device layout diagram the workpiece 200 carried out from each storage rack 64 of the magazine 60 is in by the colors 301, 302, 303, 304, 305 of the grid 131, and has an effect of being able to grasp the progress of machining of the workpiece 200.
[ modification 2]
A machining apparatus according to modification 2 of embodiment 1 of the present invention will be described with reference to the drawings. Fig. 17 is a diagram illustrating a progress status display screen displayed on a display screen of a display unit of a processing apparatus according to modification 2 of embodiment 1. In fig. 17, the same portions as those in embodiment 1 are denoted by the same reference numerals, and description thereof is omitted.
The processing apparatus 1 according to modification 2 of embodiment 1 supports a plurality of (two in modification 2) cassettes 60 by overlapping them in the Z-axis direction by the cassette lifter 50. The progress status display screen 112 of the processing apparatus 1 according to modification 2 is configured in the same manner as the progress status display screen 112 according to embodiment 1, except that one of the 1 st in-box layout view 130-1 corresponding to the lower cassette 60 and the 2 nd in-box layout view 130-2 corresponding to the upper cassette 60 of the two cassettes 60 is displayed as shown in fig. 17, and the displayed 1 st in-box layout view 130-1 and 2 nd in-box layout view 130-2 can be switched. Each of the in-box layout diagrams 130-1 and 130-2 of the progress status display screen 112 of the processing apparatus 1 according to modification 2 has a box recognition area 132 for displaying the box 60 being displayed, in addition to the configuration of the in-box layout diagram 130 according to embodiment 1. In modification 2, the inside layout diagrams 130-1 and 130-2 displayed on the progress status display screen 112 are switched when the display information setting unit 101 of the processing apparatus 1 receives an operation of the cassette recognition area 132 by the operator, but in the present invention, the method of switching the inside layout diagrams 130-1 and 130-2 displayed on the progress status display screen 112 is not limited to this method.
In the processing apparatus 1 of modification 2, the in-apparatus layout 120 and the cassette layouts 130-1 and 130-2 are set on the progress status display screen 112 in the same manner as in embodiment 1, and the colors 301, 302, 303, 304 and 305 of the corresponding areas 121, 122, 123, 124 and 125 corresponding to the current position of the workpiece 200 once stored in the storage rack 64 of the cassette 60 corresponding to the cell 131 are displayed in each cell 131 of the cassette layouts 130-1 and 130-2. Therefore, the machining device 1 according to modification 2 can make the operator clearly recognize at a glance which position in the device layout diagram the workpiece 200 carried out from each storage rack 64 of the magazine 60 is in by the colors 301, 302, 303, 304, 305 of the grid 131, and has an effect of being able to grasp the progress of machining of the workpiece 200.
The present invention is not limited to the above embodiment and modification. That is, various modifications can be made and implemented without departing from the scope of the present invention. In the embodiment 1 and the like described above, the colors 301, 302, 303, 304, and 305 different from each other are displayed in the corresponding regions 121, 122, 123, 124, and 125 of the progress status display screen 112, and the colors 301, 302, 303, 304, and 305 of the corresponding regions 121, 122, 123, 124, and 125 corresponding to the current position of the workpiece 200 are displayed in the cells 131. However, in the present invention, different identification marks may be displayed in the corresponding areas 121, 122, 123, 124, and 125 on the progress status display screen 112, and the identification marks of the corresponding areas 121, 122, 123, 124, and 125 corresponding to the current position of the workpiece 200 may be displayed in the cells 131. In embodiment 1 and the like, although the machining apparatus 1 is shown as an example of a cutting apparatus, the machining apparatus 1 of the present invention is not limited to the cutting apparatus, and may be any of various apparatuses that machine the workpiece 200, such as a grinding apparatus, a laser machining apparatus, and a planer.
Claims (4)
1. A processing apparatus, comprising:
a chuck table for holding a workpiece;
a machining unit for machining the workpiece held by the chuck table;
a cassette mounting area for mounting a cassette having a plurality of layers for housing the object to be processed;
a cleaning region for cleaning the workpiece;
a conveying unit for conveying the processed object among the box, the chuck worktable and the cleaning area;
a display screen for displaying the progress of the processing of the workpiece; and
a display information setting unit that sets information to be displayed on the display screen,
it is characterized in that the preparation method is characterized in that,
the display information setting unit sets, as display information:
an in-apparatus layout having the chuck table and the cleaning region, each region displaying a predetermined color or a predetermined identification mark;
a workpiece mark for displaying a current position of the workpiece carried out of the cassette in a superimposed manner on the layout diagram in the apparatus; and
a plurality of bins representing the layer of the box,
the color or the predetermined identification mark of the area corresponding to the current position of the workpiece once housed in the layer of the cassette shown in the compartment is displayed in the compartment.
2. The processing device according to claim 1,
the layout diagram includes a conveying unit for conveying the workpiece.
3. The processing apparatus according to claim 1 or 2,
the color or the identification mark indicating the completion of the loading is displayed in the cell indicating the layer in which the object to be processed which has been carried out of the cassette and then returned to the cassette again is stored.
4. The processing apparatus according to any one of claims 1 to 3,
the processing device also has a temporary placing area for temporarily placing the processed object carried out from the box arranged in the box loading area,
the conveying unit conveys the processed object among the box, the temporary placing area, the chuck worktable and the cleaning area,
the layout in the device includes the pause region.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018-230217 | 2018-12-07 | ||
| JP2018230217A JP7162513B2 (en) | 2018-12-07 | 2018-12-07 | processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111293055A true CN111293055A (en) | 2020-06-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911219072.4A Pending CN111293055A (en) | 2018-12-07 | 2019-12-03 | Processing device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7162513B2 (en) |
| KR (1) | KR20200070102A (en) |
| CN (1) | CN111293055A (en) |
| TW (1) | TWI813825B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023119405A1 (en) * | 2021-12-21 | 2023-06-29 | 株式会社Fuji | Machine tool |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11354398A (en) * | 1998-06-08 | 1999-12-24 | Kokusai Electric Co Ltd | Method of processing wafer |
| JP2005197121A (en) * | 2004-01-08 | 2005-07-21 | Ebara Corp | Electron beam device |
| CN108213725A (en) * | 2016-12-13 | 2018-06-29 | 株式会社迪思科 | Laser processing device |
| CN108389794A (en) * | 2017-02-03 | 2018-08-10 | 株式会社迪思科 | Processing unit (plant) |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3973238B2 (en) * | 1995-01-11 | 2007-09-12 | 株式会社日立国際電気 | Display method in semiconductor manufacturing equipment |
| US6165051A (en) * | 1998-10-29 | 2000-12-26 | Kulicke & Soffa Investments, Inc. | Monitoring system for dicing saws |
| JP5336054B2 (en) * | 2007-07-18 | 2013-11-06 | 浜松ホトニクス株式会社 | Processing information supply system provided with processing information supply device |
| TWI388953B (en) * | 2009-03-11 | 2013-03-11 | Inotera Memories Inc | Method for monitoring fabrication parameters |
| JP4797108B2 (en) | 2010-03-16 | 2011-10-19 | 株式会社日立国際電気 | Display method in semiconductor manufacturing apparatus and semiconductor manufacturing apparatus |
| JP6433178B2 (en) | 2014-07-02 | 2018-12-05 | 株式会社ディスコ | Processing equipment |
| JP6403601B2 (en) * | 2015-02-16 | 2018-10-10 | 株式会社ディスコ | Processing equipment |
| JP6639283B2 (en) * | 2016-03-14 | 2020-02-05 | 株式会社ディスコ | Failure detection method |
| JP6957083B2 (en) * | 2016-07-11 | 2021-11-02 | 株式会社ディスコ | Management system |
-
2018
- 2018-12-07 JP JP2018230217A patent/JP7162513B2/en active Active
-
2019
- 2019-11-22 KR KR1020190151385A patent/KR20200070102A/en not_active Application Discontinuation
- 2019-12-03 CN CN201911219072.4A patent/CN111293055A/en active Pending
- 2019-12-05 TW TW108144483A patent/TWI813825B/en active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11354398A (en) * | 1998-06-08 | 1999-12-24 | Kokusai Electric Co Ltd | Method of processing wafer |
| JP2005197121A (en) * | 2004-01-08 | 2005-07-21 | Ebara Corp | Electron beam device |
| WO2005069345A1 (en) * | 2004-01-08 | 2005-07-28 | Ebara Corporation | Electron beam device |
| CN108213725A (en) * | 2016-12-13 | 2018-06-29 | 株式会社迪思科 | Laser processing device |
| CN108389794A (en) * | 2017-02-03 | 2018-08-10 | 株式会社迪思科 | Processing unit (plant) |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20200070102A (en) | 2020-06-17 |
| TW202031419A (en) | 2020-09-01 |
| JP2020091804A (en) | 2020-06-11 |
| TWI813825B (en) | 2023-09-01 |
| JP7162513B2 (en) | 2022-10-28 |
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