CN111290218A - Installing and debugging mechanism with DMD modular design and LDI equipment - Google Patents
Installing and debugging mechanism with DMD modular design and LDI equipment Download PDFInfo
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- CN111290218A CN111290218A CN202010064380.0A CN202010064380A CN111290218A CN 111290218 A CN111290218 A CN 111290218A CN 202010064380 A CN202010064380 A CN 202010064380A CN 111290218 A CN111290218 A CN 111290218A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
- G03F7/2053—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
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- Optics & Photonics (AREA)
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Abstract
The invention relates to the technical field of laser direct imaging, and discloses a mounting and debugging mechanism with a DMD modular design and LDI equipment, which comprise a mounting frame and a quick dismounting component, wherein the mounting frame is used for mounting a DMD exposure head and a CCD camera; the quick assembly disassembly subassembly includes first hitching member and second hitching member, is provided with the peg on the first hitching member, is provided with the suspension groove on the second hitching member, and the peg can cooperate with the suspension groove, and one of first hitching member and the second hitching member is installed on the portal frame of LDI equipment, and another is installed on the mounting bracket, and the mounting bracket passes through quick assembly disassembly subassembly detachably and installs on the portal frame of LDI equipment. According to the installing and debugging mechanism with the DMD modular design, the DMD exposure head and the CCD camera are integrally arranged on one installing frame, so that the DMD exposure head is matched with the CCD camera to carry out various debugging on the DMD exposure head on line, and the online debugging time is shortened; then through the cooperation of first hitching member and second hitching member, improve mounting bracket dismouting efficiency, and then improve the operating efficiency.
Description
Technical Field
The invention relates to the technical field of laser direct imaging, in particular to a mounting and debugging mechanism with a DMD modular design and LDI equipment.
Background
An LDI device based on Laser Direct Imaging (LDI) is one of the most important devices in the exposure process. Currently, in an LDI apparatus, an exposure head (hereinafter referred to as a DMD exposure head) based on a digital micro mirror array (DMD) is generally used to expose a workpiece (such as a PCB).
In current LDI equipment, generally with a plurality of DMD exposure heads independent mounting on the portal frame, in the operation process, when the DMD exposure head breaks down and needs to be changed, need shut down the maintenance, after changing new DMD exposure head, need cooperate the CCD camera to carry out multinomial debugging to the DMD exposure head, for example facula integrality and homogeneity debugging, camera lens multiplying power and angle debugging, the focal plane debugging, exposure intensity compensation debugging between the different DMD exposure heads, the measurement of different wave band light sources, DMD exposure head and DMD exposure head relation are markd and single two-way concatenation debugging etc. current LDI equipment is after changing the DMD exposure head, the debugging time is longer, thereby seriously influence operating efficiency.
Therefore, a DMD modular design debug mechanism is needed to solve the above problems.
Disclosure of Invention
The invention aims to provide a mounting and debugging mechanism with a DMD modular design, which is used for solving the problems of long debugging time and low working efficiency after replacing a DMD exposure head in the prior art.
Another objective of the present invention is to provide an LDI device, which can shorten the time for shutdown maintenance and debugging and improve the operation efficiency by using the DMD modular installation and debugging mechanism.
In order to realize the purpose, the following technical scheme is provided:
in one aspect, a DMD modular design installation and commissioning mechanism is provided, comprising:
the mounting rack is used for mounting the DMD exposure head and the CCD camera;
the quick assembly disassembly assembly comprises a first hanging connecting piece and a second hanging connecting piece, wherein a hanging rod is arranged on the first hanging connecting piece, a hanging groove is formed in the second hanging connecting piece, the hanging rod can be matched with the hanging groove, one of the first hanging connecting piece and the second hanging connecting piece is configured to be installed on a portal frame of LDI equipment, and the other hanging connecting piece is installed on the installation frame;
the mounting bracket and the quick assembly disassembly subassembly fixed connection to through quick assembly disassembly subassembly detachably installs on the portal frame of LDI equipment.
As the preferred scheme of the installation and debugging mechanism of DMD modular design, the mounting bracket comprises a first mounting plate and a second mounting plate, the second mounting plate is fixedly arranged on the first mounting plate, the first mounting plate is used for installing the DMD exposure head, and the second mounting plate is used for installing the CCD camera.
As the preferred scheme of DMD modular design's installation debugging mechanism, the second mounting panel is L type mounting panel, the first support arm of L type mounting panel with first mounting panel fixed connection, its second support arm with first mounting panel parallel arrangement is provided with a plurality of CCD installation hole site on the second support arm, and every CCD installation hole site is used for installing a CCD camera.
As the preferable scheme of the installation and debugging mechanism with the DMD modular design, a plurality of DMD installation hole sites are arranged on the first installation plate, and each DMD installation hole site is used for installing one DMD exposure head.
As the preferable scheme of the installation and debugging mechanism with the DMD modular design, a plurality of CCD installation hole sites are arranged on the second installation plate, and each CCD installation hole site is used for installing one CCD camera.
As a preferable scheme of the DMD modular design installation and debugging mechanism, the first hitching member is configured to be installed on a gantry of the LDI device, and the second hitching member is installed on the first installation plate.
As the preferred scheme of the installation and debugging mechanism of the DMD modular design, the number of the hanging rods is two, the hanging rods are respectively arranged on two sides of the first hanging and connecting piece, the second hanging and connecting piece is respectively arranged on two sides of the first mounting plate, the second hanging and connecting piece is arranged on the hanging rods through the hanging grooves on the second hanging and connecting piece, and the second hanging and connecting piece and the hanging rods are matched one by one.
As the preferred scheme of the installation and debugging mechanism with the DMD modular design, the first ends of the second hanging pieces are fixedly connected with the first installation plate, the second hanging pieces are arranged in parallel, and the suspension groove is formed in the side face of each second hanging piece and located above the first installation plate.
As a preferred scheme of the mounting and debugging mechanism with the DMD modular design, the quick assembly disassembly assembly further includes at least one reinforcement, and two ends of the reinforcement are respectively and fixedly connected with the second ends of the two second hanging pieces, so that the reinforcement, the second hanging pieces and the first mounting plate form a frame structure.
In another aspect, an LDI device is provided, including:
a worktable configured to place a workpiece to be processed;
the portal frame is arranged on the workbench and comprises a cross beam and two upright columns which are respectively arranged at two end parts of the cross beam;
the installing and debugging mechanism with the DMD modular design comprises an installing frame and a quick assembly and disassembly component, wherein the installing frame is detachably installed on the portal frame through the quick assembly and disassembly component;
DMD exposure head and CCD camera, both set up on the mounting bracket.
As a preferred scheme of the LDI device, the LDI device further includes:
the horizontal driving mechanism comprises a horizontal driving piece and a horizontal mounting plate, the horizontal mounting plate is movably arranged on the cross beam, and the horizontal driving piece can drive the horizontal mounting plate to move on the cross beam along the horizontal direction;
the lifting driving mechanism comprises a lifting driving piece and a lifting mounting plate, wherein the lifting driving piece is arranged on the horizontal mounting plate and connected with the lifting mounting plate, the lifting mounting plate is fixedly connected with a first hanging piece in the quick assembly disassembly assembly, and the lifting driving piece can drive the lifting mounting plate to drive the first hanging piece to move along the vertical direction.
Compared with the prior art, the invention has the beneficial effects that:
the installing and debugging mechanism with the DMD modular design comprises an installing frame and a quick assembling and disassembling component, wherein the installing frame is used for installing a DMD exposure head and a CCD camera; the quick assembly disassembly subassembly includes first hitching member and second hitching member, is provided with the peg on the first hitching member, is provided with on the second hitching member and hangs the groove, and the peg can cooperate with hanging the groove, and one of first hitching member and the second hitching member is configured as and installs on the portal frame of LDI equipment, and another installs on the mounting bracket, and the mounting bracket passes through quick assembly disassembly subassembly detachably and installs on the portal frame of LDI equipment. According to the installing and debugging mechanism with the DMD modular design, the DMD exposure head and the CCD camera are integrally arranged on one installing frame, so that the DMD exposure head is matched with the CCD camera to carry out various debugging on the DMD exposure head on line, and the online debugging time is shortened; when the DMD exposure head and/or the CCD camera in use break down, the debugged DMD exposure head and the debugged CCD camera can be directly replaced by the installation and debugging mechanism, so that the maintenance time of the LDI equipment is greatly shortened; through the cooperation of first hitching member and second hitching member, improve mounting bracket dismouting efficiency, and then improve the operating efficiency.
According to the LDI equipment provided by the invention, the installation and debugging mechanism with the DMD modular design is applied, so that the shutdown maintenance and debugging time can be greatly shortened, and the operation efficiency is improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments of the present invention will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the contents of the embodiments of the present invention and the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a first direction of a DMD modular design installation and debugging mechanism according to an embodiment of the present invention;
fig. 2 is a front view of an LDI device provided by an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a second direction of the DMD modular design installation and debugging mechanism according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a third direction of the DMD modular design installation and debugging mechanism according to an embodiment of the present invention;
FIG. 5 is a top view of an LDI apparatus provided in an embodiment of the present invention;
FIG. 6 is a side view of an LDI device provided in accordance with an embodiment of the present invention;
FIG. 7 is an enlarged view of a portion of FIG. 6 at A;
fig. 8 is a partially enlarged view of an LDI apparatus provided in an embodiment of the present invention.
Reference numerals:
10-a workbench; 20-a portal frame; 201-a cross beam; 202-upright post; 30-DMD exposure head; 40-CCD camera; 50-a horizontal drive mechanism; 501-horizontal mounting plate; 502-horizontal slide rail; 503-horizontal slider; 60-a lifting driving mechanism; 601-a lifting drive; 602-a lifting mounting plate;
1-a mounting frame; 11-a first mounting plate; 12-a second mounting plate;
2-a first hanging part; 21-hanging the rod;
3-a second hanging part; 31-a suspension groove;
4-a reinforcement.
Detailed Description
In order to make the technical solutions of the present invention better understood by those skilled in the art, the technical solutions of the present invention are further described below by way of specific embodiments with reference to the accompanying drawings.
In the description of the present invention, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or orientations or positional relationships conventionally laid out when the product is used, and are only for convenience of description of the present invention, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", and the like are used for descriptive purposes only or to distinguish between different structures or components and are not to be construed as indicating or implying relative importance.
As shown in fig. 1-3, the present embodiment provides a DMD modular design installation and debugging mechanism, which includes a mounting frame 1 and a quick-release assembly, where the mounting frame 1 is used to mount a DMD exposure head 30 and a CCD camera 40; the quick assembly disassembly subassembly includes first hitching member 2 and second hitching member 3, be provided with peg 21 on the first hitching member 2, be provided with on the second hitching member 3 and hang groove 31, peg 21 can cooperate with hanging groove 31, one of first hitching member 2 and second hitching member 3 is configured for installing on portal frame 20 of LDI equipment, another installs on mounting bracket 1, mounting bracket 1 and quick assembly disassembly subassembly fixed connection, and install on portal frame 20 of LDI equipment through quick assembly disassembly subassembly detachably.
According to the installing and debugging mechanism with the DMD modular design, the DMD exposure head 30 and the CCD camera 40 are integrally arranged on one installing frame 1, so that the CCD camera 40 is matched with the DMD exposure head 30 to carry out various debugging on line, and the online debugging time is shortened; when the DMD exposure head and/or the CCD camera in use break down, the debugged DMD exposure head 30 and the debugged CCD camera 40 can be directly replaced by the installation and debugging mechanism, so that the maintenance time of the LDI equipment is greatly shortened; through the cooperation of first hitching member 2 and second hitching member 3, improve the dismouting efficiency of mounting bracket 1, and then improve the operating efficiency.
Specifically, the CCD camera 40 is used to detect the coordinate position of the PCB so that the DMD exposure head 30 performs exposure processing on the PCB.
Alternatively, as shown in fig. 2 in combination with fig. 3, in the present embodiment, the first hanging member 2 is configured to be mounted on a gantry 20 of the LDI apparatus, and the second hanging member 3 is mounted on the mounting frame 1. Of course, in other embodiments, the first hanging member 2 may also be installed on the mounting frame 1, and the second hanging member 3 is configured to be installed on the portal frame 20 of the LDI device, so that the mounting frame 1 can be quickly installed on the portal frame 20 or the mounting frame 1 can be quickly detached from the portal frame 20.
Particularly, second hitching member 3, mounting bracket 1, and install DMD exposure head 30 and CCD camera 40 on mounting bracket 1 and constitute the DMD module jointly, in the PCB exposure processing procedure, when DMD exposure head 30 broke down, can directly take off whole DMD module from the first hitching member 2 on portal frame 20, then install the DMD module that has accomplished the debugging on the first hitching member 2 on portal frame 20, realize DMD modularization installation and debugging, shorten online debug time, improve the operating efficiency.
Illustratively, the hanging rod 21 on the first hanging member 2 is a cylindrical rod, the hanging groove 31 on the second hanging member 3 is a U-shaped groove, and the hanging groove 31 of the second hanging member 3 can be installed on the hanging rod 21 on the first hanging member 2.
Preferably, as shown in fig. 3 in combination with fig. 4, the mounting frame 1 includes a first mounting plate 11 and a second mounting plate 12, the second mounting plate 12 is fixedly disposed on the first mounting plate 11, the first mounting plate 11 is used for mounting the DMD exposure head 30, and the second mounting plate 12 is used for mounting the CCD camera 40, so as to facilitate the assembly and disassembly of the DMD exposure head 30 and the CCD camera 40.
Further, the second mounting plate 12 is an L-shaped mounting plate, a first support arm of the L-shaped mounting plate is fixedly connected with the first mounting plate 11, a second support arm of the L-shaped mounting plate is used for mounting the CCD camera 40 and is arranged in parallel with the first mounting plate 11, a plurality of CCD mounting holes are arranged on the second support arm, and each CCD mounting hole is used for mounting one CCD camera 40.
Optionally, a plurality of DMD mounting holes are disposed on the first mounting plate 11, and each DMD mounting hole is used for mounting one DMD exposure head 30.
In this embodiment, "a plurality" means any number, which may be one, two, or more than two.
Illustratively, three DMD mounting holes are provided on the second arm of the first mounting plate 11, and three DMD exposure heads 30 are mounted on the first mounting plate 11. Specifically, the working end of the DMD exposure head 30 passes through the DMD mounting hole, and is disposed downward, so as to expose the PCB. In other embodiments, one, two, four, five, six, etc. DMD exposure heads 30 may be disposed on the first mounting plate 11, and may be selected according to the needs, which is not illustrated herein.
Illustratively, one CCD mounting hole is provided on the second mounting plate 12 and one CCD camera 40 is mounted on the second mounting plate 12. Preferably, the lower end of the CCD camera 40 is substantially flush with the lower end of the DMD exposure head. In other embodiments, any number of two, three, four, five, etc. CCD cameras 40 may be disposed on the second mounting plate 12, which is not illustrated herein.
Preferably, the number of the CCD cameras 40 on the second mounting plate 12 is also determined according to the number of the DMD exposure heads 30 on the first mounting plate 11, and preferably, three DMD exposure heads 30 are provided with one CCD camera 40. Of course, four DMD exposure heads 30 may be equipped with one CCD camera 40, and the number relationship between the two may be selected according to the requirement of PCB processing precision, which is not illustrated herein.
Preferably, the first hitching member 2 is configured to be mounted on a gantry 20 of the LDI equipment, and the second hitching member 3 is mounted on the first mounting plate 11.
Further, the quantity of peg 21 is two and sets up respectively in the both sides of first hitching and connecting piece 2, and two second hitching and connecting pieces 3 set up respectively in the both sides of first mounting panel 11, and second hitching and connecting piece 3 installs on peg 21 through the groove 31 that hangs above that, and second hitching and connecting piece 3 and peg 21 cooperate the setting one by one to improve the joint strength of first hitching and connecting piece 2 and second hitching and connecting piece 3, make mounting bracket 1 install on portal frame 20 steadily firmly.
Optionally, the number of the hanging rods 21 may also be one, at this time, the hanging rods 21 are disposed on the first hanging and connecting member 2, and two ends of the hanging rods 21 respectively extend out of two sides of the first hanging and connecting member 2, so that the two second hanging and connecting members 3 are respectively hung on two ends of the hanging rods 21.
Preferably, the first hanging piece 2 is flat, so that the first hanging piece 2 can be conveniently mounted on the gantry 20, and the occupied space of the first hanging piece 2 can be reduced, so that the mounting and debugging mechanism with the DMD modular design is more compact in structure.
Exemplarily, the first end of the second hanging piece 3 is fixedly connected with the first mounting plate 11, the two second hanging pieces 3 are arranged in parallel, the suspension groove 31 is arranged on the side surface of the second hanging piece 3 and is positioned above the first mounting plate 11, when the second hanging piece 3 is hung on the hanging rod 21, the stress point of the second hanging piece 3 is above the mounting frame 1, the stress uniformity of the second hanging piece 3 is facilitated, and the shaking of the mounting frame 1 is reduced.
Further, as shown in fig. 4, the quick-release assembly further includes at least one reinforcing member 4, and two ends of the reinforcing member 4 are respectively and fixedly connected with the second ends of the two second hanging members 3, so that the reinforcing member 4, the second hanging members 3 and the first mounting plate 11 form a frame structure. Specifically, the lower extreme and the first mounting panel 11 fixed connection of second articulate piece 3, and reinforcement 4 sets up in the upper end of second articulate piece 3, makes the structural stability of the frame construction of compriseing reinforcement 4, two second articulate pieces 3 and first mounting panel 11 better.
Preferably, three reinforcing members 4 are arranged between the two second hanging members 3, wherein the two reinforcing members 4 are positioned on one side of the second hanging member 3 close to the hanging groove 31, and one reinforcing member 4 is positioned on one side of the second hanging member 3 far from the hanging groove 31, so that the structural stability of the frame structure consisting of the three reinforcing members 4, the two second hanging members 3 and the first mounting plate 11 is better.
As shown in fig. 5 and fig. 2, the present embodiment further provides an LDI apparatus, which includes a workbench 10, a gantry 20, a DMD modular-design installation and debugging mechanism, a DMD exposure head 30, and a CCD camera 40, wherein the workbench 10 is used for placing a workpiece to be processed, the workpiece may be a PCB, and the gantry 20 is disposed on the workbench 10. Installation and debugging mechanism of DMD modular design, including mounting bracket 1 and quick assembly disassembly subassembly, mounting bracket 1 passes through quick assembly disassembly subassembly detachably and installs on portal frame 20, and DMD exposure head 30 and CCD camera 40, both all set up on mounting bracket 1. This LDI equipment, through DMD modular design's installation debugging mechanism, can install DMD exposure head 30 and CCD camera 40 on portal frame 20 fast, and can shorten online debugging time, improve the operating efficiency.
Preferably, the gantry 20 includes a beam 201 and two columns 202 respectively disposed at two ends of the beam 201. Specifically, two upright posts 202 are disposed on the working table 10, and are fixedly connected to two ends of the cross beam 201, respectively.
As shown in fig. 5 to 6, the gantry 20 is disposed on the table 10, the PCB can move on the table 10, and when the PCB passes under the gantry 20, the CCD camera 40 on the gantry 20 detects the position of the PCB, and the DMD exposure head 30 exposes the PCB.
Preferably, as shown in fig. 7-8, the LDI device further includes a horizontal driving mechanism 50 and a lifting driving mechanism 60, wherein the horizontal driving mechanism 50 is used for driving the DMD modular design installation and commissioning mechanism to move on the gantry 20 in a horizontal direction, i.e. in an extending direction of the beam 201; the elevating driving mechanism 60 is used for driving the DMD modular design installation and commissioning mechanism to move on the gantry 20 in the vertical direction, i.e. in the extending direction of the upright 202.
Preferably, as shown in fig. 7-8, the horizontal driving mechanism 50 includes a horizontal driving member (not shown in the drawings) and a horizontal mounting plate 501, the horizontal mounting plate 501 is movably disposed on the gantry 20, specifically, the horizontal mounting plate 501 is movably disposed on the cross beam 201, and the horizontal driving member can drive the horizontal mounting plate 501 to move on the cross beam 201 along the extending direction of the cross beam 201. The mounting and debugging mechanism of the DMD modular design is indirectly arranged on the horizontal mounting plate 501.
Further, the horizontal driving mechanism 50 further includes a horizontal sliding rail 502 and a horizontal sliding block 503, wherein the horizontal sliding rail 502 is disposed on the cross beam 201 along the horizontal direction, the horizontal sliding block 503 is disposed on the horizontal mounting plate 501, and the horizontal sliding block 503 and the horizontal sliding rail 502 can cooperate to enable the horizontal mounting plate 501 to move stably and directionally. Preferably, two horizontal sliding rails 502 are arranged on the cross beam 201 in parallel at intervals, and two horizontal sliding blocks 503 are arranged on the horizontal mounting plate 501 in parallel at intervals and can be respectively matched with the two horizontal sliding rails 502 in a sliding manner.
Preferably, as shown in fig. 7-8, the DMD modular installation and commissioning mechanism is installed on the horizontal installation plate 501 through the lifting driving mechanism 60, and the horizontal installation plate 501 can drive the whole lifting driving mechanism 60 and the DMD modular installation and commissioning mechanism to move along the horizontal direction when moving.
Specifically, the lifting driving mechanism 60 includes a lifting driving member 601 and a lifting mounting plate 602, the lifting driving member 601 is disposed on the horizontal mounting plate 501 and connected to the lifting mounting plate 602, the installation and debugging mechanism of the DMD modular design is disposed on the lifting mounting plate 602, and the lifting driving member 601 can drive the lifting mounting plate 602 to drive the installation and debugging mechanism of the DMD modular design to move in the vertical direction.
Further, the lifting mounting plate 602 is fixedly connected with the first hanging piece 2 in the quick assembly disassembly assembly, and the lifting driving piece 601 can drive the lifting mounting plate 602 to drive the first hanging piece 2 to move along the vertical direction. The mounting bracket 1 is mounted on the first hitching member 2 through the second hitching member 3.
Optionally, the lifting driving mechanism 60 further includes a lead screw (not shown in the figure), the lead screw is fixedly connected to an output end of the lifting driving member 601, the lifting mounting plate 602 is fixedly connected to a lead screw nut seat of the lead screw, and the lifting driving member 601 can drive the lead screw to rotate so as to move the lifting mounting plate 602 in the vertical direction, even if the DMD exposure head 30 and the CCD camera 40 are driven by the DMD modular-designed mounting and debugging mechanism installed on the lifting mounting plate 602 to move in the vertical direction, so as to adjust the distance between the DMD exposure head 30 and the CCD camera 40 and the workbench 10.
For convenience of understanding, the working principle of the DMD modular design installation and debugging mechanism provided by the present embodiment is as follows:
step 1), mounting a first hanging piece 2 on a lifting mounting plate 602 on a portal frame 20;
step 2), arranging the second hanging piece 3, the DMD exposure head 30 and the CCD camera 40 on the mounting frame 1 to form a DMD module, and performing offline debugging on the DMD module;
step 4), installing the DMD module on the first hanging part 2 on the portal frame 20, and starting exposure operation;
and 5) when the DMD exposure head 30 on the LDI equipment breaks down, taking down the DMD module on the LDI equipment, and replacing the debugged DMD module.
The LDI equipment that this embodiment provided through the installation debugging mechanism who uses above-mentioned DMD modular design, can shorten maintenance and debugging time of shutting down greatly, improves the operating efficiency.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (10)
1. A DMD modular design's installation debugging mechanism, characterized in that includes:
a mounting frame (1) for mounting a DMD exposure head (30) and a CCD camera (40);
the quick assembly disassembly assembly comprises a first hanging connecting piece (2) and a second hanging connecting piece (3), wherein a hanging rod (21) is arranged on the first hanging connecting piece (2), a hanging groove (31) is arranged on the second hanging connecting piece (3), the hanging rod (21) can be matched with the hanging groove (31), one of the first hanging connecting piece (2) and the second hanging connecting piece (3) is configured to be installed on a portal frame (20) of LDI equipment, and the other one of the first hanging connecting piece (2) and the second hanging connecting piece (3) is installed on the installation frame (1);
the mounting frame (1) is fixedly connected with the quick assembly disassembly component and is detachably mounted on the portal frame (20) through the quick assembly disassembly component.
2. The DMD modular designed setup mechanism according to claim 1, characterized in that said mounting bracket (1) comprises a first mounting plate (11) and a second mounting plate (12), said second mounting plate (12) being fixedly arranged on said first mounting plate (11), said first mounting plate (11) being used for mounting said DMD exposure head (30), said second mounting plate (12) being used for mounting said CCD camera (40).
3. The DMD module design installation and debugging mechanism according to claim 2, characterized in that said second mounting plate (12) is an L-shaped mounting plate, a first arm of said L-shaped mounting plate is fixedly connected to said first mounting plate (11), a second arm of said L-shaped mounting plate is arranged in parallel to said first mounting plate (11), said second arm is provided with a plurality of CCD mounting holes, and each CCD mounting hole is used for mounting one CCD camera (40).
4. The DMD module-designed mounting and commissioning mechanism according to claim 2, characterized in that said first mounting plate (11) is provided with a plurality of DMD mounting holes, each DMD mounting hole being adapted to mount one DMD exposure head (30).
5. The DMD modular designed setup mechanism according to claim 2, characterized in that said first hitching member (2) is configured to be mounted on a gantry (20) of said LDI device and said second hitching member (3) is mounted on said first mounting plate (11).
6. The DMD module-designed installation and debugging mechanism according to claim 5, characterized in that said hanging rods (21) are two in number and disposed on two sides of said first hanging piece (2), respectively, two of said second hanging pieces (3) are disposed on two sides of said first mounting plate (11), respectively, said second hanging pieces (3) are mounted on said hanging rods (21) through hanging slots (31) thereon, and said second hanging pieces (3) are fitted with said hanging rods (21) one by one.
7. The DMD-modularly designed installation and commissioning mechanism according to claim 6, characterised in that said second hitching element (3) is fixedly connected at its first end to said first mounting plate (11), that two of said second hitching elements (3) are arranged in parallel, and that said suspension slot (31) is arranged on the side of said second hitching element (3) above said first mounting plate (11).
8. The DMD module design setup mechanism according to claim 7, characterized in that the quick-release assembly further comprises at least one stiffener (4), wherein both ends of the stiffener (4) are fixedly connected to the second ends of the two second hitches (3), respectively, so that the stiffener (4), the second hitches (3) and the first mounting plate (11) form a frame structure.
9. An LDI device, comprising:
a table (10) configured to place a workpiece to be processed;
the gantry (20) is arranged on the workbench (10), and the gantry (20) comprises a beam (201) and two columns (202) which are respectively arranged at two ends of the beam (201);
installation and commissioning mechanism of DMD modular design according to any of claims 1 to 8, comprising a mounting frame (1) and a quick-release assembly by means of which said mounting frame (1) is detachably mounted on said gantry (20);
a DMD exposure head (30) and a CCD camera (40), both arranged on the mounting frame (1).
10. The LDI device of claim 9, wherein said LDI device further comprises:
the horizontal driving mechanism (50) comprises a horizontal driving piece and a horizontal mounting plate (501), the horizontal mounting plate (501) is movably arranged on the cross beam (201), and the horizontal driving piece can drive the horizontal mounting plate (501) to move on the cross beam (201) along the horizontal direction;
lifting drive mechanism (60), including lifting drive spare (601) and lift mounting panel (602), lifting drive spare (601) set up horizontal installation board (501) go up and with lift mounting panel (602) are connected, lift mounting panel (602) with first hitching member (2) fixed connection in the quick assembly disassembly subassembly, lifting drive spare (601) can drive lifting drive board (602) drive first hitching member (2) remove along vertical direction.
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| US20180188655A1 (en) * | 2016-07-13 | 2018-07-05 | Applied Materials, Inc. | Micro led array as illumination system |
| CN206292526U (en) * | 2016-11-25 | 2017-06-30 | 天津津芯微电子科技有限公司 | LDI equipment and its splicing debugging system |
| CN109471333A (en) * | 2017-09-08 | 2019-03-15 | 上海微电子装备（集团）股份有限公司 | A kind of galvanometer correction system and method |
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