CN111278206A - Plasma generating device with dielectric barrier discharge and microwave discharge connected in series - Google Patents
Plasma generating device with dielectric barrier discharge and microwave discharge connected in series Download PDFInfo
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- CN111278206A CN111278206A CN202010197072.5A CN202010197072A CN111278206A CN 111278206 A CN111278206 A CN 111278206A CN 202010197072 A CN202010197072 A CN 202010197072A CN 111278206 A CN111278206 A CN 111278206A
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- microwave
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/461—Microwave discharges
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/461—Microwave discharges
- H05H1/463—Microwave discharges using antennas or applicators
Abstract
The invention discloses a plasma generating device with dielectric barrier discharge and microwave discharge connected in series, which comprises discharge tubes, a high-voltage power supply, two dielectric barrier electrodes, a microwave source and a microwave cavity, wherein the discharge tubes consist of two discharge tubes with different outer diameters and are used for connecting the dielectric barrier discharge and the microwave discharge in series. The gas is introduced into the dielectric barrier discharge tube, dielectric barrier plasma jet flow with the length enough to reach the microwave cavity is formed between two adjacent electrodes connected with the high-voltage power supply, and excited state particles with low ionization energy generated by the dielectric barrier plasma jet flow can promote microwave discharge to generate microwave plasma after reaching the microwave cavity, so that series discharge is formed. The invention makes full use of penning and light excitation processes generated in dielectric barrier discharge, not only can reduce the breakdown power of working gas and the maintenance power required by plasma in microwave discharge, but also can improve discharge dynamics, thereby improving the energy utilization rate to the maximum extent.
Description
Technical Field
The invention belongs to the field of plasma generating devices, and particularly relates to a plasma generating device with dielectric barrier discharge and microwave discharge connected in series.
Background
The dielectric barrier discharge is a common non-equilibrium plasma discharge, and when a certain voltage is applied, electrons escaping from a cathode are broken down to generate a large amount of space charges to form a current column, so that a typical discharge mode of the dielectric barrier discharge is a current column discharge or a wire discharge. Dielectric barrier discharge is widely applied to various fields, for example, research of dielectric barrier plasma in the fields of biomedical treatment, pollutant control and treatment, gas conversion and the like by virtue of the characteristics of easy realization of a discharge device, wide discharge voltage and frequency range, high energy utilization rate and the like.
The microwave source typically provides sufficient energy from a coaxial cable or rectangular waveguide to the working gas in the plasma reactor to cause the gas to break down and generate a microwave discharge. In microwave plasmas, electrons accept most of the energy input of the discharge, since they are much lighter than neutral particles and ions, making them easier to accelerate, eventually resulting in that the electron temperature can be much higher than the gas temperature. Thus, without heating the entire gas, these energetic electrons can subject the heavy particles to ionization, excitation, and dissociation processes through collision processes. The microwave plasma has wide application, mainly comprising the fields of analytical instruments, gas conversion, semiconductor production, preparation and modification of metal films and materials and the like.
In the existing dielectric barrier discharge and microwave discharge technology, the plasma generating device has a complex structure and is complex to operate, and the dielectric barrier discharge is often only used as an igniter for microwave discharge, so that the beneficial effects brought to the whole device are limited, and the energy consumption is very high.
Disclosure of Invention
The invention aims to provide a plasma generating device with dielectric barrier discharge and microwave discharge connected in series, which adopts a mode of connecting dielectric barrier discharge and microwave discharge in series and has the advantages of simple device, simple and convenient operation, low gas consumption and low energy consumption. The method improves the discharge dynamics under the conditions of reducing the breakdown power of microwave discharge and maintaining the power required by discharge, thereby improving the energy utilization rate to the maximum extent.
In order to achieve the purpose, the invention is realized by adopting the following technical scheme:
a plasma generating device with dielectric barrier discharge and microwave discharge connected in series comprises a discharge tube, a high-voltage power supply, two adjacent dielectric barrier electrodes I and II, a microwave source, a microwave cavity and an air supply device; the microwave discharge tube is arranged in the microwave cavity, and gas generated by the gas supply device flows in from the dielectric barrier discharge tube and flows out from the microwave discharge tube; the dielectric barrier electrode I and the dielectric barrier electrode II cover the outer side of the dielectric barrier discharge tube and are connected with a high-voltage power supply.
Further, the microwave discharge tube, the microwave cavity and the microwave source form a microwave discharge system, the microwave discharge system further comprises a tubular structure main adjusting part arranged in the microwave cavity and used for adjusting microwave coupling, a tubular structure micro adjusting part arranged in the cavity of the main adjusting part and used for adjusting microwave coupling, and a microwave antenna coupling part, the main adjusting part is provided with an annular plug disc in sliding fit with the inner wall of the microwave cavity, and the coupling part of the microwave antenna is arranged on the microwave discharge tube between the annular plug disc of the main adjusting part and the microwave cavity and connected with the microwave source through a microwave antenna connecting part and an interface part.
Furthermore, the dielectric barrier electrode I and the dielectric barrier electrode II are connected with a high-voltage power supply through leads, wherein the dielectric barrier electrode I connected with the positive electrode of the high-voltage power supply is close to an air inlet of an air supply device, the dielectric barrier electrode II connected with the grounding cathode of the high-voltage power supply is close to a microwave cavity, and dielectric barrier plasma jet flow is formed towards the direction of a downstream microwave discharge tube.
Furthermore, the distance between the dielectric barrier electrode I and the dielectric barrier electrode II and the distance between the cathode of the high-voltage power supply and the fine adjustment part are 1-3cm, and the distance between the dielectric barrier electrode I and the dielectric barrier electrode II and the distance between the cathode of the high-voltage power supply and the fine adjustment part are not necessarily the same. The dielectric barrier electrode I and the copper micro-adjusting part form external discharge to avoid the phenomenon that the dielectric barrier electrode I and the copper micro-adjusting part form external discharge due to too close distance.
Furthermore, the dielectric barrier electrode I and the dielectric barrier electrode II are prepared by copper, iron, aluminum, tungsten, platinum or other alloys; the discharge tube is made of quartz, corundum or other insulating ceramics.
Furthermore, the two discharge tubes with the same inner diameter and different outer diameters have the inner diameters of 2mm, the outer diameter of the microwave discharge tube is 6mm, and the outer diameter of the dielectric barrier discharge tube is 3 mm. The purpose of the inner diameters being the same is to cause the dielectric barrier plasma and the microwave plasma to form a series discharge. The outer diameter of the microwave discharge tube is 6mm determined by the size of the micro-regulating member tube cavity, and the outer diameter of the dielectric barrier discharge tube is 3mm for generating dielectric barrier plasma with longer jet length by reducing the thickness of the dielectric layer. The above dimensions may be specifically changed according to actual conditions.
Furthermore, the gas supply device consists of a gas cylinder and a gas flow controller, and the gas enters from the dielectric barrier discharge tube and flows out from the microwave discharge tube in the gas inlet direction.
Compared with the prior art, the device provided by the invention not only can use dielectric barrier discharge as an igniter of microwave discharge, but also realizes the combination of dielectric barrier plasma and microwave plasma by adopting a mode of series connection of dielectric barrier discharge and microwave discharge, so that the breakdown energy of working gas and the maintenance energy of plasma are smaller, and the requirements on power supply equipment can be remarkably reduced while the energy consumption is reduced.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a graph showing the variation of the breakdown energy of argon with the flow rate at different dielectric barrier discharge voltages when the discharge frequency of the dielectric barrier discharge is 9 kHz;
FIG. 3 is a graph showing the variation of the sustain energy of the argon plasma with the flow rate at different dielectric barrier discharge voltages when the discharge frequency of the dielectric barrier discharge is 9 kHz;
wherein: the microwave gas source comprises a gas cylinder 1, a gas flow controller 2, a high-voltage power supply 3, a dielectric barrier electrode I4, a dielectric barrier electrode II 5, a dielectric barrier discharge tube 6, a microwave discharge tube 7, a main adjusting piece 8, a fine adjusting piece 9, a microwave cavity 10, an annular plug disc 11, a microwave antenna coupling piece 12, a microwave antenna connecting piece 13, an interface piece 14 and a microwave source 15.
Detailed Description
The structure and operation of the plasma generator with dielectric barrier discharge series microwave discharge according to the present invention will be further described with reference to the accompanying drawings, which are given by way of example:
example 1
A plasma generating device with dielectric barrier discharge and microwave discharge connected in series comprises a discharge tube, a high-voltage power supply 3, two adjacent dielectric barrier electrodes I4 and II 5, a microwave source 15, a microwave cavity 10 and an air supply device; the discharge tube is formed by connecting two quartz tubes with the same inner diameter and different outer diameters in series, the discharge tube with the small outer diameter is a dielectric barrier discharge tube 6, the discharge tube with the large outer diameter is a microwave discharge tube 7, wherein the dielectric barrier discharge tube 6 is close to the air inlet of the air supply device, and the microwave discharge tube is arranged in a microwave cavity 10; the gas supply device consists of a gas cylinder 1 and a gas flow controller 2, and gas generated by the gas supply device flows in from a dielectric barrier discharge tube 6 and flows out from a microwave discharge tube 7; the dielectric barrier electrode I4 and the dielectric barrier electrode II 5 are both made of copper, cover the outer side of the dielectric barrier discharge tube 6 and are connected with the high-voltage power supply 3; the microwave discharge tube 7, the microwave cavity 10 and the microwave source 15 form a microwave discharge system.
The dielectric barrier electrode I4 and the dielectric barrier electrode II 5 are connected with the high-voltage power supply 3 through leads, wherein the dielectric barrier electrode I4 connected with the positive electrode of the high-voltage power supply 3 is close to the air inlet of the air supply device, the dielectric barrier electrode II 5 connected with the grounding cathode of the high-voltage power supply 3 is close to the microwave cavity 10, and dielectric barrier plasma jet flow is formed towards the downstream microwave discharge tube 7. The distance between the dielectric barrier electrode I4 and the dielectric barrier electrode II 5 is 1cm, the distance between the cathode of the high-voltage power supply 3 and the microwave cavity 10 is 3cm, so that the dielectric barrier electrode I4 and the copper micro-adjusting piece 9 are prevented from forming external discharge when the dielectric barrier plasma can reach the microwave discharge tube to form microwave plasma and the distance is too close to avoid forming external discharge.
When the device works, the gas supply device generates working gas argon which continuously flows into the dielectric barrier discharge tube 6, firstly, the working gas argon flows through the areas corresponding to the dielectric barrier discharge electrodes 4 and 5 to generate discharge, plasma jet which can reach a microwave discharge area is generated, microwave plasma is generated under the input of the energy of the microwave source 15, and the series discharge of dielectric barrier discharge and microwave discharge can be realized. The flow rate of discharge gas in the gas discharge tubes 6 and 7 is 0-2L/min, and the microwave coupling power is 0-200W. The peak-peak value of the dielectric barrier discharge voltage is 20-28 kV, and the frequency is 9 kHz.
Example 2
The present embodiment is different from embodiment 1 in that:
as shown in fig. 1, the microwave discharge system composed of the microwave discharge tube 7, the microwave cavity 10 and the microwave source 15 further includes a tubular main adjusting part 8 installed in the microwave cavity 10 for adjusting microwave coupling, a tubular micro adjusting part 9 installed in the cavity of the main adjusting part for adjusting microwave coupling, and a microwave antenna coupling part 12, wherein the main adjusting part 8 is provided with an annular plug disc 11 slidably fitted to the inner wall of the microwave cavity 10, and the microwave antenna coupling part 12 is located on the microwave discharge tube 7 between the annular plug disc 11 of the main adjusting part and the microwave cavity 10 and connected to the microwave source 15 through a microwave antenna connecting part 13 and an interface part 14.
Both discharge tubes are made of insulating ceramics, and both dielectric barrier electrodes are made of iron; the distance between the dielectric barrier electrode I4 and the dielectric barrier electrode II 5 is 3cm, the distance between the cathode of the high-voltage power supply 3 and the micro-adjusting part 9 is 1cm, so that the dielectric barrier plasma can reach the microwave discharge tube to form microwave plasma, and the phenomenon that the dielectric barrier electrode I4 and the copper micro-adjusting part 9 form outer discharge due to too close distance is avoided.
When the device works, the gas supply device generates working gas argon which continuously flows into the dielectric barrier discharge tube 6, firstly, the working gas argon flows through the areas corresponding to the dielectric barrier discharge electrodes 4 and 5 to generate discharge, plasma jet which can reach a microwave discharge area is generated, microwave plasma is generated under the input of the energy of the microwave source 15, and the series discharge of dielectric barrier discharge and microwave discharge can be realized. The flow rate of discharge gas in the gas discharge tubes 6 and 7 is 0-2L/min, and the microwave coupling power is 0-200W. The peak-peak value of the dielectric barrier discharge voltage is 20-28 kV, and the frequency is 9 kHz.
Example 3
The present embodiment is different from embodiment 2 in that:
the distance between the dielectric barrier electrode I4 and the dielectric barrier electrode II 5 and the distance between the cathode of the high-voltage power supply 3 and the micro-adjusting piece 9 are 2cm, so that the dielectric barrier electrode I and the copper micro-adjusting piece 9 are prevented from forming external discharge due to too close distance, and microwave plasma can be formed by the dielectric barrier plasma reaching the microwave discharge tube.
The two dielectric barrier discharge tubes 6 and the microwave discharge tubes 7 are the same in inner diameter and different in outer diameter, the inner diameters of the two dielectric barrier discharge tubes 6 and the microwave discharge tubes 7 are both 2mm, the outer diameters of the microwave discharge tubes 7 are 6mm, and the outer diameters of the dielectric barrier discharge tubes 6 are 3 mm.
Compared with the prior art, the device provided by the invention not only can use dielectric barrier discharge as an igniter of microwave discharge, but also realizes the combination of dielectric barrier plasma and microwave plasma by adopting a mode of series connection of dielectric barrier discharge and microwave discharge, so that the breakdown energy of working gas and the maintenance energy of plasma are smaller, and the requirements on power supply equipment can be remarkably reduced while the energy consumption is reduced. Specifically, as shown in fig. 2 and fig. 3, when the discharge frequency of the dielectric barrier discharge is 9kHz, we obtain the gas breakdown power and the plasma sustaining power required by the pure argon discharge only during the microwave discharge as a function of the flow rate, and in the subsequent step, by sequentially increasing the voltage of the dielectric barrier discharge, obtain the corresponding breakdown power and sustaining power required by the microwave discharge as a function of the flow rate. FIG. 2 is a graph showing the breakdown energy of argon gas as a function of flow rate at different discharge voltages obtained using the device. FIG. 3 is a graph showing the variation of the breakdown maintenance energy of the argon plasma with the flow rate at different discharge voltages obtained using the apparatus. As can be seen from the figure, the breakdown power and the sustain power of the microwave discharge are significantly reduced after the series discharge is formed in addition to the dielectric barrier discharge, and the breakdown power and the sustain power of the microwave discharge show a decreasing trend as the dielectric barrier discharge voltage increases. When the voltage of the dielectric barrier discharge is increased from 22kV to 26kV, the consumed power is increased from 3.62W to 6.19W, and as can be seen from FIGS. 2 and 3, the dielectric barrier discharge can reduce the discharge breakdown power and the plasma maintaining power required by the microwave discharge by 8-15W and 6-11W respectively, so even if the power consumption of the dielectric barrier discharge is added, the power used by the whole series discharge is still lower than that used by the microwave discharge alone.
The present invention is not limited to the above-described embodiments, and various corresponding changes and modifications may be made by those skilled in the art according to the present invention without departing from the spirit and substance of the present invention, and such corresponding changes and modifications should fall within the scope of the appended claims.
Claims (8)
1. A plasma generating device with dielectric barrier discharge and microwave discharge connected in series is characterized in that: the microwave plasma discharge lamp comprises a discharge tube, a high-voltage power supply (3), two adjacent dielectric barrier electrodes I (4) and II (5), a microwave source (15), a microwave cavity (10) and an air supply device; the discharge tube is formed by connecting two discharge tubes with the same inner diameter and different outer diameters in series, the discharge tube with the small outer diameter is a dielectric barrier discharge tube (6), the discharge tube with the large outer diameter is a microwave discharge tube (7), the dielectric barrier discharge tube (6) is close to an air inlet of the air supply device, the microwave discharge tube (7) is arranged in the microwave cavity (10), and gas generated by the air supply device flows into the dielectric barrier discharge tube (6) and flows out of the microwave discharge tube (7); the dielectric barrier electrode I (4) and the dielectric barrier electrode II (5) cover the outer side of the dielectric barrier discharge tube (6) and are connected with the high-voltage power supply (3).
2. A dielectric barrier discharge series microwave discharge plasma generating apparatus as recited in claim 1, wherein: microwave discharge tube (7), microwave cavity (10) and microwave source (15) constitute the microwave discharge system, the microwave discharge system still including install tubular structure main regulating part (8) that are used for adjusting the microwave coupling in microwave cavity (10), install tubular structure micro-regulating part (9) and microwave antenna coupling spare (12) that are used for adjusting the microwave coupling in main regulating part (8) lumen, main regulating part (8) are provided with microwave cavity (10) inner wall sliding fit's annular cock disc (11), microwave antenna coupling spare (12) are located microwave discharge tube (7) between main regulating part annular cock disc (11) and microwave cavity (10), are connected with microwave source (15) through microwave antenna connecting piece (13) and interface piece (14).
3. A dielectric barrier discharge series microwave discharge plasma generating apparatus as claimed in claim 1 or 2, wherein: the dielectric barrier electrode I (4) and the dielectric barrier electrode II (5) are connected with the high-voltage power supply (3) through leads, wherein the position of the dielectric barrier electrode I (4) connected with the anode of the high-voltage power supply (3) is close to an air inlet of an air supply device, the position of the dielectric barrier electrode II (5) connected with the grounding cathode of the high-voltage power supply (3) is close to a microwave cavity (10), and a dielectric barrier plasma jet is formed towards the direction of a downstream microwave discharge tube (7).
4. A dielectric barrier discharge series microwave discharge plasma generating apparatus as recited in claim 3, wherein: the distance between the dielectric barrier electrode I (4) and the dielectric barrier electrode II (5) and the distance from the cathode of the high-voltage power supply (3) to the fine adjustment piece (9) are required to ensure that the dielectric barrier plasma can reach the microwave discharge tube (7) to form microwave plasma, and the phenomenon that the dielectric barrier electrode I (4) and the fine adjustment piece (9) form tube external discharge due to too close distance is avoided.
5. A plasma generator of mass-barrier discharge in series with microwave discharge as claimed in claim 4, wherein: the distance between the dielectric barrier electrode I (4) and the dielectric barrier electrode II (5) and the distance from the cathode of the high-voltage power supply (3) to the fine adjustment piece (9) are 1-3 cm.
6. A dielectric barrier discharge series microwave discharge plasma generating apparatus as recited in claim 4, wherein: the dielectric barrier electrode I (4) and the dielectric barrier electrode II (5) are prepared from copper, iron, aluminum, tungsten, platinum or other alloys; the dielectric barrier discharge tube (6) and the microwave discharge tube (7) are prepared from quartz, corundum or other insulating ceramics.
7. A dielectric barrier discharge series microwave discharge plasma generating apparatus as claimed in claim 4, 5 or 6, wherein: the two discharge tubes with the same inner diameter and different outer diameters have the inner diameters of 2mm, the outer diameter of the microwave discharge tube (7) is 6mm, and the outer diameter of the dielectric barrier discharge tube (6) is 3 mm.
8. A dielectric barrier discharge series microwave discharge plasma generating apparatus as claimed in claim 1 or 2, wherein: the gas supply device consists of a gas cylinder (1) and a gas flow controller (2), and gas enters from the dielectric barrier discharge tube (6) and flows out from the microwave discharge tube (7) in the gas inlet direction.
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| CN202010197072.5A CN111278206B (en) | 2020-03-19 | 2020-03-19 | Plasma generating device with dielectric barrier discharge and microwave discharge connected in series |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112004304A (en) * | 2020-08-13 | 2020-11-27 | 中国科学院合肥物质科学研究院 | Corona composite dielectric barrier discharge plasma jet generating device |
| CN113692100A (en) * | 2021-08-09 | 2021-11-23 | 南京工业大学 | Multi-section electrode plasma jet triggering method applied to endoscope inner wall disinfection |
| JP7475084B1 (en) | 2023-01-11 | 2024-04-26 | 株式会社アドテックプラズマテクノロジー | Coaxial microwave plasma torch |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101119608A (en) * | 2007-09-12 | 2008-02-06 | 清华大学 | Method to reduce microwave plasma excitated difficulty |
| JP4916776B2 (en) * | 2006-05-01 | 2012-04-18 | 国立大学法人 東京大学 | Blowout type microwave excitation plasma processing equipment |
| CN103236394A (en) * | 2013-04-17 | 2013-08-07 | 四川大学 | Microwave plasma based atmospheric pressure desorption ion source and application thereof |
| CN104749139A (en) * | 2015-03-26 | 2015-07-01 | 四川大学 | Matrix-assisted excitation spectrum detection system adopting plasma surface sample injection |
| US9852891B2 (en) * | 2014-04-21 | 2017-12-26 | Old Dominion University Research Foundation | Radio frequency plasma method for uniform surface processing of RF cavities and other three-dimensional structures |
| CN207070436U (en) * | 2017-07-03 | 2018-03-02 | 李容毅 | A kind of enhanced microwave plasma torch generating means of two-chamber excitation |
| CN207531150U (en) * | 2017-11-21 | 2018-06-22 | 清华大学 | A kind of microwave plasma excitated system based on dielectric barrier discharge preionization |
-
2020
- 2020-03-19 CN CN202010197072.5A patent/CN111278206B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4916776B2 (en) * | 2006-05-01 | 2012-04-18 | 国立大学法人 東京大学 | Blowout type microwave excitation plasma processing equipment |
| CN101119608A (en) * | 2007-09-12 | 2008-02-06 | 清华大学 | Method to reduce microwave plasma excitated difficulty |
| CN103236394A (en) * | 2013-04-17 | 2013-08-07 | 四川大学 | Microwave plasma based atmospheric pressure desorption ion source and application thereof |
| US9852891B2 (en) * | 2014-04-21 | 2017-12-26 | Old Dominion University Research Foundation | Radio frequency plasma method for uniform surface processing of RF cavities and other three-dimensional structures |
| CN104749139A (en) * | 2015-03-26 | 2015-07-01 | 四川大学 | Matrix-assisted excitation spectrum detection system adopting plasma surface sample injection |
| CN207070436U (en) * | 2017-07-03 | 2018-03-02 | 李容毅 | A kind of enhanced microwave plasma torch generating means of two-chamber excitation |
| CN207531150U (en) * | 2017-11-21 | 2018-06-22 | 清华大学 | A kind of microwave plasma excitated system based on dielectric barrier discharge preionization |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112004304A (en) * | 2020-08-13 | 2020-11-27 | 中国科学院合肥物质科学研究院 | Corona composite dielectric barrier discharge plasma jet generating device |
| CN113692100A (en) * | 2021-08-09 | 2021-11-23 | 南京工业大学 | Multi-section electrode plasma jet triggering method applied to endoscope inner wall disinfection |
| JP7475084B1 (en) | 2023-01-11 | 2024-04-26 | 株式会社アドテックプラズマテクノロジー | Coaxial microwave plasma torch |
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