CN111220315B - Preparation method of zero-power-consumption pressure sensor and wearable electronic equipment - Google Patents
Preparation method of zero-power-consumption pressure sensor and wearable electronic equipment Download PDFInfo
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- CN111220315B CN111220315B CN202010158822.8A CN202010158822A CN111220315B CN 111220315 B CN111220315 B CN 111220315B CN 202010158822 A CN202010158822 A CN 202010158822A CN 111220315 B CN111220315 B CN 111220315B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/02—Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/02—Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
- A61B5/024—Detecting, measuring or recording pulse rate or heart rate
- A61B5/02438—Detecting, measuring or recording pulse rate or heart rate with portable devices, e.g. worn by the patient
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/68—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient
- A61B5/6801—Arrangements of detecting, measuring or recording means, e.g. sensors, in relation to patient specially adapted to be attached to or worn on the body surface
- A61B5/6802—Sensor mounted on worn items
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/005—Measuring force or stress, in general by electrical means and not provided for in G01L1/06 - G01L1/22
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
Abstract
The invention provides a preparation method of a zero-power-consumption pressure sensor and wearable electronic equipment. The preparation method comprises the following steps: providing a sponge, and cleaning and drying the sponge; preparing a mixed solution of ethyl acetate and a high molecular polymer containing silicon elements and/or fluorine elements; immersing the sponge into the mixed solution for a preset time, and drying to obtain a flexible dielectric layer; and forming an upper electrode layer and a lower electrode layer on the upper surface and the lower surface of the flexible dielectric layer respectively, thereby obtaining the zero-power pressure sensor. The zero-power-consumption pressure sensor has an ultra-wide detection range under the condition of not requiring external power supply, can identify micro pressure and detect larger pressure, has higher sensitivity, increases the application range of the pressure sensor, can be applied to the wearable health monitoring field, can identify micro pressure similar to pulse and heartbeat, and can be used for monitoring large pressure including foot pressure.
Description
Technical Field
The invention relates to the technical field of pressure sensors, in particular to a preparation method of a zero-power-consumption pressure sensor and wearable electronic equipment.
Background
With the increasing aging population of China, the real-time monitoring of the health condition of the old people is also very important. In wearable health monitoring technology, pressure sensor has huge market demand because can play physiological signal such as monitoring heart rate, pulse.
Most of the pressure sensors in the prior art are hard and cannot meet the requirements of wearable electronic equipment. In the existing flexible pressure sensor, the sensor can not normally work under the condition of no external power supply, so that the practical application of the sensor in the wearable health monitoring direction is greatly limited. A few zero-power pressure sensors with tribo nanogenerators prepared by the prior art have narrow detection ranges, which severely limits their practical application in different fields.
Disclosure of Invention
An object of the present invention is to provide a pressure sensor which does not require external circuitry for power supply and has an ultra-wide detection range;
it is a further object of the present invention to provide a pressure sensor that is capable of recognizing extremely minute pressures, and also capable of recognizing larger pressures.
It is another object of the invention to provide a wearable electronic device that does not require a power source to supply power.
Particularly, the invention provides a preparation method of a zero-power-consumption pressure sensor, which comprises the following steps:
providing a sponge, and cleaning and drying the sponge;
preparing a mixed solution of ethyl acetate and a high molecular polymer containing silicon elements and/or fluorine elements;
immersing the sponge into the mixed solution for a preset time, and drying to obtain a flexible dielectric layer;
and forming an upper electrode layer and a lower electrode layer on the upper surface and the lower surface of the flexible dielectric layer respectively, thereby obtaining the zero-power pressure sensor.
Optionally, the volume ratio of the ethyl acetate to the high molecular polymer containing silicon element and/or fluorine element is any value in the range of 1:1-5: 1.
Optionally, the preparation method further comprises:
preparing and obtaining a flexible spacing layer, and enabling the lower surface of the flexible spacing layer to be in contact with the upper surface of the flexible dielectric layer, and enabling the upper surface of the flexible spacing layer to be in contact with the lower surface of the upper electrode layer.
Optionally, the thickness of the flexible spacer layer is any value in the range of 50-1000 μm.
Optionally, the flexible spacer layer is an annular structure.
Optionally, the flexible spacer layer is comprised of two spaced apart columns extending in a direction perpendicular to the upper surface of the sponge.
Optionally, the material of the flexible spacing layer is polymethyl methacrylate or silicone rubber.
Optionally, the high molecular polymer containing silicon and/or fluorine is one or more of polydimethylsiloxane, polycarbosilane, silicone rubber, polytetrafluoroethylene and polyvinylidene fluoride.
Optionally, the preparation method of the upper electrode and/or the lower electrode comprises: and forming a metal film of 10-30 μm on the polymer flexible film by physical sputtering to obtain the upper electrode and/or the lower electrode.
Particularly, the invention also provides wearable electronic equipment which comprises the zero-power-consumption pressure sensor prepared by the preparation method.
According to the scheme of the embodiment of the invention, the zero-power-consumption pressure sensor has an ultra-wide detection range under the condition of not requiring external power supply, can identify micro pressure and detect larger pressure, has higher sensitivity, and increases the application range of the pressure sensor. The full-flexible bendable characteristic of the zero-power-consumption pressure sensor enables the zero-power-consumption pressure sensor to be applied to the field of wearable health monitoring, for example, micro pressure similar to pulse and heartbeat can be identified, and meanwhile, the zero-power-consumption pressure sensor can also be used for monitoring large pressure including foot pressure.
In addition, the sponge is used as the skeleton structure to build the flexible dielectric layer, so that the flexible dielectric layer has an ultralow Young modulus, and the sensor is ensured to have higher sensitivity in a detection range. The measuring range and the sensitivity of the pressure sensor can be adjusted by adjusting the proportion of the high molecular polymer containing the silicon element and/or the fluorine element to the ethyl acetate.
The above and other objects, advantages and features of the present invention will become more apparent to those skilled in the art from the following detailed description of specific embodiments thereof, taken in conjunction with the accompanying drawings.
Drawings
Some specific embodiments of the invention will be described in detail hereinafter, by way of illustration and not limitation, with reference to the accompanying drawings. The same reference numbers in the drawings identify the same or similar elements or components. Those skilled in the art will appreciate that the drawings are not necessarily drawn to scale. In the drawings:
FIG. 1 shows a schematic flow diagram of a method of manufacturing a zero power consumption pressure sensor in accordance with a first embodiment of the present invention;
FIG. 2 shows a schematic cross-sectional view of a zero power consumption pressure sensor in accordance with a first embodiment of the present invention;
FIG. 3 shows a schematic cross-sectional view of a zero power consumption pressure sensor in accordance with a second embodiment of the present invention;
FIG. 4 shows a scanning electron micrograph of a pretreated sponge according to an embodiment of the present invention;
FIG. 5 shows a scanning electron micrograph of a flexible dielectric layer of an embodiment of the present invention;
FIG. 6 illustrates a graph of zero power consumption pressure sensor pressure versus rate of change of voltage in accordance with a specific embodiment of the present invention;
FIG. 7 illustrates a graph of voltage output of a zero power consumption pressure sensor at different pressures in accordance with a specific embodiment of the present invention;
FIG. 8 illustrates voltage outputs of a zero power consumption pressure sensor at one drop, two drops, three drops, four drops, and five drops, respectively, in accordance with one embodiment of the present invention;
FIG. 9 shows a schematic diagram of pulse wave information monitored by a zero power consumption pressure sensor, according to one embodiment of the invention;
FIG. 10 shows a schematic diagram of a zero power consumption pressure sensor monitoring the human breathing rate, according to one embodiment of the present invention.
Detailed Description
Fig. 1 shows a schematic flow diagram of a method of manufacturing a zero power consumption pressure sensor according to a first embodiment of the invention. Fig. 2 shows a schematic cross-sectional view of a zero power consumption pressure sensor according to a first embodiment of the invention. As shown in fig. 1, the preparation method comprises:
step S100, providing a sponge, and cleaning and drying the sponge;
step S200, preparing a mixed solution of ethyl acetate and a high molecular polymer containing silicon elements and/or fluorine elements;
step S300, soaking the sponge into the mixed solution for a preset time, and drying to obtain a flexible dielectric layer 2;
in step S400, an upper electrode layer 1 and a lower electrode layer 3 are formed on the upper surface and the lower surface of the flexible dielectric layer, respectively, so as to obtain the zero power consumption pressure sensor shown in fig. 2.
In step S100, the sponge may be a sponge of the prior art, which has a porous structure therein. When the sponge is cleaned, the sponge can be put into ethanol and clear water for cleaning for many times, and is dried by nitrogen.
In step S200, the silicon-containing and/or fluorine-containing polymer serves to cover the sponge with a porous structure in the subsequent step, so as to serve as a flexible dielectric layer of the pressure sensor, and the polymer is required to have high dielectric properties, so long as the polymer has high dielectric properties, which can achieve the purpose of the present application, and the silicon-containing and/or fluorine-containing polymer has such high dielectric properties. The silicon element and/or fluorine element-containing high polymer can be one or more of polydimethylsiloxane, polycarbosilane, silicone rubber, polytetrafluoroethylene and polyvinylidene fluoride.
The ethyl acetate is used for reducing the concentration of the high molecular polymer of the silicon element and/or the fluorine element, so that in the subsequent step, the high molecular polymer only covers pores in the porous structure of the sponge and does not cover the skeleton of the porous structure, and the flexible dielectric layer obtained by subsequent preparation has the excellent mechanical property of the sponge and the excellent dielectric property of the high molecular polymer. Therefore, the volume ratio of the ethyl acetate to the high molecular polymer containing a silicon element and/or a fluorine element is selected to be 1:1, 2:1, 3:1, 4:1 or 5:1, and may be any other value in the range of 1:1 to 5: 1. The mechanical property of the flexible dielectric layer can be regulated and controlled by adjusting the concentration of the ethyl acetate.
In step S300, the preset time may be, for example, 10S, 15S, 20S, 25S, 30S, 35S, or 40S, or any value from 10 to 40S. And attaching the high molecular polymer of the silicon element and/or the fluorine element with proper thickness on the pores of the sponge porous structure within the preset time.
In step S400, the materials of the upper electrode layer and the lower electrode layer may be the same or different. The material of the upper electrode layer and the lower electrode layer may be, for example, a copper film, a gold film, or the like. In one embodiment, the upper electrode layer and/or the lower electrode layer are prepared by: and forming a metal film with a certain thickness on the polymer flexible film by adopting a physical sputtering method. The thickness of the metal film may be 10 μm, 20 μm, or 30 μm, or any other value of 10 to 30 μm. The polymeric flexible film may be, for example, a polyethylene terephthalate film. The metal may be gold. The physical sputtering method may be, for example, a magnetron sputtering method.
After step S400, as shown in fig. 2, an upper encapsulation layer 4 is formed on the outer surface of the upper electrode layer 1, and a lower encapsulation layer 5 is formed on the outer surface of the lower electrode layer 3, the upper encapsulation layer 4 and the lower encapsulation layer 5 serving to insulate the upper electrode layer 1 and the lower electrode layer 3.
The principle of the zero power consumption pressure sensor for zero power consumption and pressure detection is as follows: the upper electrode layer and the flexible dielectric layer can be considered as two friction layers. Due to triboelectric and electrostatic induction effects, the potentials on the upper electrode layer, the flexible dielectric layer and the lower electrode layer are not zero, so that an electric field exists between the upper electrode layer, the flexible dielectric layer and the lower electrode layer. When external pressure is applied to the upper packaging layer of the pressure sensor, the upper electrode layer and the dielectric layer are correspondingly deformed due to the action of external force. At this time, the distance between the upper electrode layer and the lower electrode layer is changed, and thus the corresponding potential difference is also changed. When the external force changes, the potential difference of the polar plates also changes, so that current is generated, and the purpose of zero power consumption is achieved. And the purpose of monitoring the pressure is achieved by measuring the potential difference between the upper electrode layer and the lower electrode layer.
According to the scheme of the embodiment of the invention, the zero-power-consumption pressure sensor has an ultra-wide detection range under the condition of not requiring external power supply, can identify micro pressure and detect larger pressure, has higher sensitivity, and increases the application range of the pressure sensor. The full-flexible bendable characteristic of the zero-power-consumption pressure sensor enables the zero-power-consumption pressure sensor to be applied to the field of wearable health monitoring, for example, micro pressure similar to pulse and heartbeat can be identified, and meanwhile, the zero-power-consumption pressure sensor can also be used for monitoring large pressure including foot pressure.
In addition, the sponge is used as the skeleton structure to build the flexible dielectric layer, so that the flexible dielectric layer has an ultralow Young modulus, and the sensor is ensured to have higher sensitivity in a detection range. The measuring range and the sensitivity of the pressure sensor can be adjusted by adjusting the proportion of the high molecular polymer containing the silicon element and/or the fluorine element to the ethyl acetate.
In this first embodiment, since the surface of the sponge has many cut skeletons to which the mixed solution is not attached, thereby having a burr-like surface, the burr-like surface functions to space the upper electrode layer from the flexible dielectric layer to some extent and to allow the upper electrode layer to be restored to its original position after being deformed.
In the second embodiment, the manufacturing method of the zero power consumption pressure sensor is different from that of the first embodiment in that the manufacturing method further includes the following steps: preparing to obtain the flexible spacing layer 6 and contacting the lower surface of the flexible spacing layer 6 with the upper surface of the flexible dielectric layer 2, and contacting the upper surface of the flexible spacing layer 6 with the lower surface of the upper electrode layer 1. The cross-sectional structure of the zero-power-consumption pressure sensor prepared by the preparation method of the second embodiment is shown in fig. 3.
Wherein the thickness of the flexible spacer layer is 50 μm, 100 μm, 200 μm, 300 μm, 500 μm, 800 μm or 1000 μm, or any other value in the range of 50-1000 μm. The flexible spacing layer is of an annular structure or consists of two spaced-apart columnar bodies, and the columnar bodies extend along the direction vertical to the upper surface of the sponge. The material of the flexible spacer layer may be, for example, polymethyl methacrylate or silicone rubber. The preparation method of the flexible spacing layer can utilize a template method in the prior art, namely, polymethyl methacrylate or silicon rubber materials are injected into a template with a corresponding shape, and the flexible spacing layer is formed after curing and drying.
Compared with the first embodiment, the flexible spacing layer is added, so that the distance between the upper electrode layer and the flexible dielectric layer can be further increased, and the resilience force of the upper electrode layer after deformation is further increased, thereby ensuring the mechanical property and the electrical property of the pressure sensor.
In a specific embodiment, the method for manufacturing the zero power consumption pressure sensor comprises the following steps:
sponge pretreatment: the sponge was washed three times in ethanol and clear water and blown dry with nitrogen.
Preparing a mixed solution: preparing dimethyl silicone polymer and ethyl acetate according to the volume ratio of 1:3, and stirring the solution by using a magnetic stirrer to uniformly mix the solution, thereby obtaining the mixed solution of dimethyl silicone polymer and ethyl acetate.
The preparation method of the flexible dielectric layer comprises the following steps: the sponge was immersed in the mixed solution for 30 seconds and subjected to a drying treatment, thereby obtaining a flexible dielectric layer.
The preparation method of the flexible electrode comprises the following steps: a gold film with the thickness of 20 mu m is sputtered on the polyethylene terephthalate film by a magnetron sputtering process, and the polyethylene terephthalate film sputtered with the gold film is used as an upper electrode layer and a lower electrode layer of the zero-power consumption pressure sensor.
Assembling: adhering a prepared flexible spacing layer with the thickness of 200 mu m on the upper surface of the flexible dielectric layer, adhering an upper electrode layer on the upper surface of the flexible spacing layer, and adhering a lower electrode layer on the lower surface of the flexible dielectric layer.
FIG. 4 shows a scanning electron micrograph of a pretreated sponge according to an embodiment of the present invention. FIG. 5 shows a scanning electron micrograph of a flexible dielectric layer of an embodiment of the present invention. As can be seen in fig. 4, the sponge has a porous structure. As can be seen from FIG. 5, the polydimethylsiloxane forms a layer of supporting film to be filled in the middle of the sponge network framework, and the diluted polydimethylsiloxane ensures that the polydimethylsiloxane does not fill the whole sponge space but is only adhered to the sponge network, so that the mechanical property of the sponge is optimized and the sponge is more elastic.
On the other hand, the filled polydimethylsiloxane ensures that the friction material of the flexible dielectric layer is polydimethylsiloxane instead of sponge, and the polydimethylsiloxane has more excellent electronegativity and can generate more friction charges by rubbing with the upper electrode layer, so that the pressure sensor can still have larger output under the micro pressure. By the method, excellent mechanical properties of the sponge network can be utilized, and meanwhile, the friction material is guaranteed to be polydimethylsiloxane, so that the pressure sensor has excellent electrical properties.
FIG. 6 illustrates a graph of zero power consumption pressure sensor pressure versus rate of change of voltage in accordance with a specific embodiment of the present invention. As can be seen from FIG. 6, as the pressure increases, the rate of change of the output voltage of the pressure sensor also increases and increases linearly, with a slope of 5.93 for a straight line in the range of 0 to 5KPa, indicating that the pressure sensor has 5.93KPa-1The slope of the line is 0.205 in the range of 5-25kpa, which shows that the sensor still has higher sensitivity under the condition of high pressure and can also be used for measuring the condition of high pressure such as plantar pressure.
FIG. 7 illustrates a graph of voltage output of a zero power consumption pressure sensor at different pressures, in accordance with a specific embodiment of the present invention. As shown in fig. 7, when an external force of 0.024N is applied to the pressure sensor, the pressure sensor can output a voltage of 0.08V, and as the pressure increases, the voltage output of the pressure sensor also increases, and thus the magnitude of the external force can be measured using the electrical response of the pressure sensor.
Fig. 8 illustrates voltage outputs of the zero-power pressure sensor under one drop, two drops, three drops, four drops, and five drops, respectively, where the number of drop-like icons represents the drop number of the water drops, according to an embodiment of the present invention. As shown in fig. 8, when a drop of water lands on the pressure sensor, the pressure sensor outputs a voltage of 0.015V to the outside, and as the drop of water increases, the output pressure of the pressure sensor also increases, which indicates that the pressure sensor is very sensitive to the external pressure and can monitor the minute pressure similar to the drop of water.
Fig. 9 shows a schematic diagram of pulse wave information monitored by a zero power consumption pressure sensor according to one embodiment of the invention. As can be seen from the figure, the pressure sensor can monitor the pulse beat frequency and can measure the specific information of the pulse wave. By utilizing the pressure sensor, the detail information of the human body such as systolic pressure Ps, diastolic pressure PD, pulse wave conduction time and the like can be clearly measured, so that the cardiovascular diseases such as hypertension, atherosclerosis and the like can be judged.
FIG. 10 shows a schematic diagram of a zero power consumption pressure sensor monitoring the human breathing rate, according to one embodiment of the present invention. As can be seen from fig. 10, when the human body is in a normal breathing state, the pressure sensor outputs a voltage of about 0.1V, when the human body is in a deep breathing state, the pressure sensor outputs a voltage of about 0.2V, and when the human body has moved, the pressure sensor outputs a voltage of about 0.4V, and the breathing frequency significantly increases. According to the output voltage of the pressure sensor, the breathing state of the human body, including the breathing volume and the breathing frequency, can be judged, so that the health state of the human body is monitored.
Thus, it should be appreciated by those skilled in the art that while a number of exemplary embodiments of the invention have been illustrated and described in detail herein, many other variations or modifications consistent with the principles of the invention may be directly determined or derived from the disclosure of the present invention without departing from the spirit and scope of the invention. Accordingly, the scope of the invention should be understood and interpreted to cover all such other variations or modifications.
Claims (10)
1. A method for manufacturing a zero-power pressure sensor is characterized by comprising the following steps:
providing a sponge, and cleaning and drying the sponge;
preparing a mixed solution of ethyl acetate and a high molecular polymer containing silicon elements and/or fluorine elements;
immersing the sponge into the mixed solution for a preset time, and drying to obtain a flexible dielectric layer;
forming an upper electrode layer and a lower electrode layer on the upper surface and the lower surface of the flexible dielectric layer respectively so as to obtain a zero-power-consumption pressure sensor;
the ethyl acetate reduces the concentration of the high molecular polymer containing silicon elements and/or fluorine elements, so that the high molecular polymer in the flexible dielectric layer only covers the pores of the porous structure of the sponge and does not cover the skeleton of the porous structure;
the upper electrode layer and the flexible dielectric layer are used as two friction layers, when external pressure is applied to the zero-power-consumption pressure sensor, the upper electrode layer and the flexible dielectric layer are deformed and are electrified based on friction electrification and electrostatic induction effects, and therefore power supply by an external power source is not needed.
2. The method according to claim 1, wherein the volume ratio of the ethyl acetate to the high molecular polymer containing silicon element and/or fluorine element is in a range of 1:1 to 5: 1.
3. The method of manufacturing according to claim 2, further comprising:
preparing and obtaining a flexible spacing layer, and enabling the lower surface of the flexible spacing layer to be in contact with the upper surface of the flexible dielectric layer, and enabling the upper surface of the flexible spacing layer to be in contact with the lower surface of the upper electrode layer.
4. A method of manufacturing as claimed in claim 3, wherein the thickness of the flexible spacer layer is any value in the range of 50-1000 μm.
5. The method of claim 4, wherein the flexible spacer layer is a ring-shaped structure.
6. The method of claim 4, wherein the flexible spacer layer is comprised of two spaced apart columns extending in a direction perpendicular to the upper surface of the sponge.
7. The production method according to any one of claims 3 to 6, wherein the material of the flexible spacer layer is polymethyl methacrylate or silicone rubber.
8. The method according to any one of claims 1 to 6, wherein the high molecular polymer containing silicon and/or fluorine is one or more of polydimethylsiloxane, polycarbosilane, silicone rubber, polytetrafluoroethylene and polyvinylidene fluoride.
9. The method according to claim 8, wherein the upper electrode and/or the lower electrode is prepared by: and forming a metal film of 10-30 μm on the polymer flexible film by physical sputtering to obtain the upper electrode and/or the lower electrode.
10. Wearable electronic device, characterized in that it comprises a zero-power consumption pressure sensor obtained by the preparation method according to any one of claims 1 to 9.
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| CN114469033A (en) * | 2021-11-11 | 2022-05-13 | 煤炭科学研究总院 | Heart rate detection sensor, protective clothing and manufacturing method of sensor |
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| CN105067160A (en) * | 2015-07-23 | 2015-11-18 | 东南大学 | Oxidized graphene sponge-based flexible pressure sensor and manufacturing method thereof |
| CN106188630A (en) * | 2016-07-11 | 2016-12-07 | 武汉纺织大学 | A kind of preparation method and applications based on cellulose sponge conducing composite material |
| CN206540646U (en) * | 2017-03-21 | 2017-10-03 | 河北工业大学 | A kind of pliable pressure sensor-based system |
| CN109724720A (en) * | 2018-11-20 | 2019-05-07 | 浙江大学 | A kind of condenser type pliable pressure sensor and preparation method thereof |
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