CN111173722B - Miniature piezoelectric pump module - Google Patents
Miniature piezoelectric pump module Download PDFInfo
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- CN111173722B CN111173722B CN201811344076.0A CN201811344076A CN111173722B CN 111173722 B CN111173722 B CN 111173722B CN 201811344076 A CN201811344076 A CN 201811344076A CN 111173722 B CN111173722 B CN 111173722B
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- 238000013459 approach Methods 0.000 claims abstract description 8
- 239000003990 capacitor Substances 0.000 claims description 15
- 230000005669 field effect Effects 0.000 claims description 14
- 229910044991 metal oxide Inorganic materials 0.000 claims description 14
- 150000004706 metal oxides Chemical class 0.000 claims description 14
- 239000004065 semiconductor Substances 0.000 claims description 14
- 238000004891 communication Methods 0.000 claims description 12
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 230000001131 transforming effect Effects 0.000 claims 4
- 230000009466 transformation Effects 0.000 abstract description 22
- 239000012530 fluid Substances 0.000 abstract description 7
- 230000000694 effects Effects 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
- F04B49/065—Control using electricity and making use of computers
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/0075—Electrical details, e.g. drive or control circuits or methods
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Reciprocating Pumps (AREA)
Abstract
A micro piezoelectric pump module comprises a piezoelectric pump, a microprocessor, a driving component and a feedback circuit. The piezoelectric pump has optimal performance when operating at an ideal operating voltage. The driving component is electrically connected with the microprocessor and the piezoelectric pump and comprises a voltage transformation component and an inversion component, wherein the voltage transformation component outputs effective working voltage to the piezoelectric pump, and the inversion component controls a first electrode and a second electrode of the piezoelectric pump to receive the effective working voltage or be grounded, so that the piezoelectric component of the piezoelectric pump generates deformation due to piezoelectric effect and is used for conveying fluid. The feedback circuit is electrically connected between the piezoelectric pump and the microprocessor, receives the effective working voltage output by the piezoelectric pump, and generates a feedback voltage to the microprocessor so that the microprocessor can adjust the effective working voltage output by the voltage transformation element to approach an ideal working voltage.
Description
Technical Field
The present disclosure relates to a micro piezoelectric pump module, and more particularly, to a micro piezoelectric pump module using a feedback circuit to assist a microprocessor to precisely adjust a working voltage of a piezoelectric pump.
Background
With the development of technology, the applications of fluid delivery devices are becoming more diversified, such as industrial applications, biomedical applications, medical care, electronic heat dissipation, etc., and even recently, the image of a wearable device is seen in a hot-door wearable device, which shows that the conventional pump tends to be miniaturized, but the conventional pump is difficult to reduce the size to the centimeter level, so that the conventional micro fluid delivery device can only use a piezoelectric pump structure as the micro fluid delivery device.
The piezoelectric pump applies voltage to the piezoelectric element, the piezoelectric element deforms due to piezoelectric effect, and the internal pressure of the piezoelectric element changes to drive the pump for conveying the fluid, so that the efficiency of the piezoelectric pump is greatly influenced by the working voltage on the piezoelectric element, but the floating and insufficient working voltage can be caused by the influence of loss, heat source and the like when the working voltage is supplied to the piezoelectric element at present, so that the conventional piezoelectric pump has the problem of unstable and reduced efficiency.
Disclosure of Invention
The main objective of the present disclosure is to provide a micro piezoelectric pump structure, which obtains a working voltage of a piezoelectric element through a feedback circuit and transmits the working voltage back to a microprocessor, so that the microprocessor can control the working voltage of the piezoelectric element.
To achieve the above object, a micro piezoelectric pump module according to a broader aspect of the present invention includes: a piezoelectric pump having a first electrode, a second electrode and a piezoelectric element, the piezoelectric pump having optimal performance when operating at an ideal operating voltage; a microprocessor for outputting a control signal and a modulation signal; a driving assembly electrically connected to the microprocessor and the piezoelectric pump, the driving assembly comprising: a voltage transformer for receiving the modulation signal and outputting an effective working voltage to the piezoelectric pump; and an inverter, receiving the modulation signal, controlling the first electrode and the second electrode of the piezoelectric pump to receive the effective working voltage or to be grounded by the modulation signal, when the first electrode receives the effective working voltage, the second electrode is grounded, when the first electrode is grounded, the second electrode receives the effective working voltage, and through the voltage difference between the first electrode and the second electrode, the piezoelectric element of the piezoelectric pump is deformed due to the piezoelectric effect to convey fluid; and a feedback circuit, electrically connected between the piezoelectric pump and the microprocessor, for generating a feedback voltage by the effective working voltage of the piezoelectric pump; the microprocessor receives the feedback voltage transmitted by the feedback circuit, and adjusts the modulation signal according to the feedback voltage, so that the effective working voltage output by the transformer approaches the ideal working voltage.
Drawings
Fig. 1 is a block diagram of a micro piezoelectric pump module according to the present disclosure.
Fig. 2 is a schematic circuit diagram of the present miniature piezoelectric pump module.
Fig. 3A is an equivalent circuit diagram of the feedback circuit in the first control step.
Fig. 3B is an equivalent circuit diagram of the feedback circuit in the second control step.
Description of the reference numerals
100: miniature piezoelectric pump
1: microprocessor
11: control unit
12: conversion unit
13: communication unit
2: drive assembly
21: pressure changing piece
211: voltage output terminal
212: voltage transformation feedback terminal
213: voltage transformation feedback circuit
213 a: first end point
213 b: second end point
213 c: third endpoint
213 d: fourth terminal point
22: inversion component
221: buffer brake
221 a: buffer input terminal
221 b: buffer output
222: inverter with a capacitor having a capacitor element
222 a: inverting input terminal
222 b: reverse output end
223: a first P-type metal oxide semiconductor field effect transistor
224: second P-type metal oxide semiconductor field effect transistor
225: a first N-type metal oxide semiconductor field effect transistor
226: second N-type metal oxide semiconductor field effect transistor
3: piezoelectric pump
31: a first electrode
32: second electrode
4: feedback circuit
41 a: first contact
41 b: second contact
42 a: third contact
42 b: fourth contact
43 a: fifth contact
43 b: the sixth contact
44 a: seventh junction
44 b: eighth contact
C: capacitor with a capacitor element
D: drain electrode
G: grid electrode
R1: a first resistor
R2: second resistance
R3: third resistance
R4: fourth resistor
R5: fifth resistor
S: source electrode
Detailed Description
Exemplary embodiments that embody features and advantages of this disclosure are described in detail below in the detailed description. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.
Referring to fig. 1, a micro piezoelectric pump module 100 includes: a microprocessor 1, a driving component 2, a piezoelectric pump 3 and a feedback circuit 4, wherein the piezoelectric pump 3 has the best performance when operating under an ideal working voltage. The microprocessor 1 outputs a control signal and a modulation signal to the driving component 2, the driving component 2 is electrically connected with the piezoelectric pump 3 and provides an effective working voltage for the piezoelectric pump 3 to operate by the control signal and the modulation signal, the feedback circuit 4 feeds back the effective working voltage of the piezoelectric pump 3 to the microprocessor 1, and the microprocessor 1 makes the effective working voltage of the driving component approach to the ideal working voltage of the piezoelectric pump 3 by the modulation signal.
Referring to fig. 2, the microprocessor 1 includes a control unit 11, a conversion unit 12 and a communication unit 13, the driving assembly 2 includes a voltage transformation element 21 and an inverter element 22, the piezoelectric pump 3 includes a first electrode 31, a second electrode 32 and a piezoelectric element 33, the communication unit 13 is electrically connected to the voltage transformation element 21 to output a modulation signal to the voltage transformation element 21, the voltage transformation element 21 modulates the voltage into an effective working voltage according to the modulation signal and transmits the effective working voltage to the inverter element 22, and the control unit 11 is electrically connected to the inverter element 22 to control the effective working voltage received by the first electrode 31 and the second electrode 32 of the piezoelectric pump 3 or to ground through the inverter element 22. In this embodiment, the constant voltage is 5V, and the ideal operating voltage is 15V, which is only used for reference, but not limited thereto.
As shown in fig. 2, the feedback circuit 4 is electrically connected between the piezoelectric pump 3 and the microprocessor 1, the feedback circuit 4 includes a first resistor R1, a second resistor R2, a third resistor R3 and a capacitor C, the first resistor R1 has a first node 41a and a second node 41b, the second resistor R2 has a third node 42a and a fourth node 42b, the third resistor R3 has a fifth node 43a and a sixth node 43b, the capacitor C has a seventh node 44a and an eighth node 44b, wherein the first node 41a of the first resistor R1 is electrically connected to the first electrode 31 of the piezoelectric pump 3, the third node 42a of the second resistor R2 is electrically connected to the second electrode 32 of the piezoelectric pump 3, the sixth node 43b of the third resistor R3 is electrically connected to the eighth node 44b of the capacitor C and to ground, the fifth node 43a of the third resistor R3 is electrically connected to the seventh node 44a of the capacitor C, the third resistor R3 is electrically connected to the second node 41b of the first resistor R1, the fourth node 42b of the second resistor R2 and the microprocessor 1 after being connected in parallel with the capacitor C, so as to divide the effective working voltage between the first electrode 31 and the second electrode 32 of the piezoelectric pump 3, so as to generate the feedback voltage to be fed back to the converting unit 12 of the microprocessor 1. The first resistor R1 and the second resistor R2 have the same resistance, but not limited thereto. In addition, the capacitor C functions as a filter to prevent noise from interfering with the feedback voltage.
In view of the above, the voltage transformer 21 further includes a voltage output terminal 211, a voltage transformation feedback terminal 212 and a voltage transformation feedback circuit 213, the voltage output terminal 211 is electrically connected to the inverter 22, the voltage transformation feedback circuit 213 is electrically connected between the microprocessor 1 and the voltage transformation feedback terminal 212, wherein the voltage transformation feedback circuit 213 includes a fourth resistor R4 and a fifth resistor R5, the fourth resistor R4 has a first end 213a and a second end 213b, the fifth resistor R5 has a third end 213c and a fourth end 213d, the first end 213a of the fourth resistor R4 is electrically connected to the voltage output terminal 211, the third end 213c of the fifth resistor R5 is electrically connected to the second end 213b of the fourth resistor R4 and the voltage transformation feedback terminal 212, and the fourth end 213d of the fifth resistor R5 is grounded. Wherein, the fifth resistor R5 is a variable resistor, in this embodiment, the fifth resistor R5 is a digital variable resistor, and has a communication interface 213e, the communication interface 213e is electrically connected to the communication unit 13 of the microprocessor 1, so that the communication unit 13 can transmit the modulation signal to the digital variable resistor (the fifth resistor R5) to adjust the resistance thereof, after the effective working voltage output by the voltage output terminal 211 of the voltage transformer 21 is divided by the fourth resistor R4 and the fifth resistor R5 of the voltage transformation feedback circuit 213, the divided effective working voltage is transmitted back to the voltage transformer 21 from the voltage transformation feedback terminal 212, so that the voltage transformer 21 can refer to whether the output effective working voltage meets the ideal working voltage or not, if the effective working voltage is different from the ideal working voltage, then the output effective working voltage is modulated again to make it continuously adjust to approach the ideal working voltage, and finally the effective working voltage is adjusted to be consistent with the ideal working voltage.
Referring to fig. 2, the inverter 22 includes: a buffer gate 221, an inverter 222, a first P-type mosfet 223, a second P-type mosfet 224, a first N-type mosfet 225, and a second N-type mosfet 226. The buffer gate 221 has a buffer input 221a and a buffer output 221b, the inverter 222 has an inverting input 222a and an inverting output 222b, and the first P-type mosfet 223, the second P-type mosfet 224, the first N-type mosfet 225 and the second N-type mosfet 226 each have a gate G, a drain D and a source S, respectively. Wherein, the buffer input 221a of the buffer gate 221 and the inverting input 222a of the inverter 222 are electrically connected to the control unit 11 of the microprocessor 1 for receiving a control signal, and the control signal may be but is not limited to a pwm signal, the buffer output 221b of the buffer gate 221 is electrically connected to the gate G of the first pmos 223 and the gate G of the first nmos 225, the inverting output 222b of the inverter 222 is electrically connected to the gate G of the second pmos 224 and the gate G of the second nmos 226, the drain D of the first pmos 223 and the drain D of the second pmos 224 are electrically connected to the voltage output 211 of the voltage transformer 21 for receiving the effective working voltage output by the voltage transformer 21, the source S of the first pmos 223 is electrically connected to the drain D of the first nmos 225 and the second electrode of the piezoelectric pump 3 32, the source S of the second P-type mosfet 224 is electrically connected to the drain D of the second N-type mosfet 226 and the first electrode 31 of the piezoelectric pump 3, and the source S of the first N-type mosfet 225 is electrically connected to the source S of the second N-type mosfet 226 and grounded.
As mentioned above, the first P-type mosfet 223, the second P-type mosfet 224, the first N-type mosfet 225 and the second N-type mosfet 226 form an H-bridge structure for converting the effective working voltage (dc) output from the voltage transformer 21 into ac to the piezoelectric pump 3, so that the first P-type mosfet 223 and the second P-type mosfet 224 need to receive opposite signals, the first N-type mosfet 225 and the second N-type mosfet 226 also need to receive the same signals, so that the control signal transmitted by the microprocessor 1 is transmitted to the second P-type mosfet 224 through the inverter 222, the control signal of the second P-type mosfet 224 is inverted to the first P-type mosfet 223, but the first P-type mosfet 223 and the second P-type mosfet 224 need to be connected to the control signal together, therefore, a buffer gate 221 is disposed in front of the first P-type mosfet 223, so that the first P-type mosfet 223 and the second P-type mosfet 224 can be synchronously connected to opposite signals, and the first N-type mosfet 225 and the second N-type mosfet 226 are also the same; in the first control step, when the first P-type mosfet 223 and the second N-type mosfet 226 are turned on, the second P-type mosfet 224 and the first N-type mosfet 225 are turned off, the effective operating voltage is transmitted to the second electrode 32 of the piezoelectric pump 3 through the first P-type mosfet 223, the first electrode 31 of the piezoelectric pump 3 is grounded due to the second N-type mosfet 226 being turned on, in the second control step, the effective operating voltage is transmitted to the first electrode 31 of the piezoelectric pump 3 through the second P-type mosfet 224 and the second N-type mosfet 225, the second electrode 32 of the piezoelectric pump 3 is grounded due to the first N-type mosfet 225 being turned on, by repeating the above first control step and the second control step, the piezoelectric element 33 of the piezoelectric pump 3 can be deformed by the effective working voltage (or ground) received by the first electrode 31 and the second electrode 32 through the piezoelectric effect, so as to drive the pressure in the chamber (not shown) inside the piezoelectric pump 3 to change, thereby continuously transmitting the fluid.
The feedback circuit 4 continuously receives the effective working voltages (or ground) of the first electrode 31 and the second electrode 32 of the piezoelectric pump 3, the second electrode 32 is the effective working voltage in the first control step, the first electrode 31 is the ground, the equivalent circuit of the feedback circuit 4 is shown in fig. 3A, the first resistor R1 is connected in parallel with the third resistor R3, the feedback voltage is (R1// R3) ÷ [ (R1// R3) + R2] × the effective working voltage, the first electrode 31 is the effective working voltage in the second control step, the second electrode 32 is the ground, the equivalent circuit of the feedback circuit 4 is shown in fig. 3B, the second resistor R2 is connected in parallel with the third resistor R3, the feedback voltage is (R2// R3) ÷ [ (R2// R3) + R1] × the effective working voltage, the feedback circuit 4 transmits the feedback voltage to the microprocessor 1, the microprocessor 1 receives the feedback voltage to determine the effective working voltage of the current-voltage pump 3, compares the effective working voltage with the ideal working voltage, if the effective working voltage is different from the ideal working voltage, converts the feedback voltage into a digital signal through the conversion unit 12, transmits the modulation signal converted into the digital signal from the communication unit 13 to the communication interface 213e to adjust the fifth resistor R5 (digital variable resistor), and finally transmits the effective working voltage output by the voltage output end 211 of the voltage transformation component 21 back to the voltage transformation component 21 through the voltage transformation feedback circuit 213 after the effective working voltage is divided by the fourth resistor R4 and the fifth resistor R5, so as to determine whether the effective working voltage output by the voltage transformation component conforms to the ideal working voltage, if the effective working voltage is different from the ideal working voltage, modulates the output effective working voltage again to make it continuously adjust to approach the ideal working voltage, finally, the effective working voltage is adjusted to be consistent with the ideal working voltage, and the effective working voltage received by the piezoelectric pump 3 can be always maintained at the ideal working voltage through the steps, so that the piezoelectric pump 3 can continuously operate under the optimal efficiency.
In summary, the present invention provides a micro piezoelectric pump module, which uses a feedback circuit to transmit an effective working voltage of a piezoelectric pump back to a microprocessor, so that the microprocessor can adjust the effective working voltage output by a voltage transformation element according to the feedback voltage, so that the effective working voltage can approach an ideal working voltage and be adjusted to be the same as the ideal working voltage, and the piezoelectric pump can continuously operate at the ideal working voltage to maintain an optimal transmission performance.
Various modifications may be made by those skilled in the art without departing from the scope of the invention as defined by the appended claims.
Claims (10)
1. A miniature piezoelectric pump module, comprising:
a piezoelectric pump having a first electrode, a second electrode and a piezoelectric element, the piezoelectric pump having optimal performance when operating at an ideal operating voltage;
a microprocessor for outputting a control signal and a modulation signal;
a driving assembly electrically connected to the microprocessor and the piezoelectric pump, the driving assembly comprising:
a voltage transformer for receiving the modulation signal and outputting an effective working voltage to the piezoelectric pump; and
the inverter receives the modulation signal, controls the first electrode and the second electrode of the piezoelectric pump to receive the effective working voltage or be grounded by the modulation signal, and when the first electrode receives the effective working voltage, the second electrode is grounded; and
a feedback circuit electrically connected between the piezoelectric pump and the microprocessor for generating a feedback voltage by the effective working voltage of the piezoelectric pump;
the microprocessor receives the feedback voltage transmitted by the feedback circuit, and adjusts the modulation signal according to the feedback voltage, so that the effective working voltage output by the transformer approaches the ideal working voltage.
2. A miniature piezoelectric pump module according to claim 1, wherein the feedback circuit comprises a first resistor, a second resistor, a third resistor and a capacitor, the first resistor has a first node and a second node, the second resistor has a third node and a fourth node, the third resistor has a fifth node and a sixth node, the capacitor has a seventh node and an eighth node, the first node of the first resistor is electrically connected to the first electrode of the piezoelectric pump, the third node of the second resistor is electrically connected to the second electrode of the piezoelectric pump, the sixth node of the third resistor is electrically connected to the eighth node of the capacitor and grounded, the fifth node of the third resistor is electrically connected to the seventh node of the capacitor, so that the third resistor and the capacitor are electrically connected to the second node of the first resistor after being connected in parallel, The fourth connection point of the second resistor and the microprocessor divide the effective working voltage between the first electrode and the second electrode of the piezoelectric pump to generate the feedback voltage to feed back to the microprocessor.
3. A miniature piezoelectric pump module as defined in claim 2, wherein the first resistor and the second resistor have the same resistance.
4. A miniature piezoelectric pump module as defined in claim 3, wherein the transformer further comprises a voltage output terminal, a voltage transforming feedback terminal and a voltage transforming feedback circuit, the voltage output terminal is electrically connected to the inverter, and the voltage transforming feedback circuit is electrically connected between the microprocessor and the voltage transforming feedback terminal.
5. A miniature piezoelectric pump module as defined in claim 4, wherein the voltage-transforming feedback circuit comprises a fourth resistor and a fifth resistor, the fourth resistor has a first terminal and a second terminal, the fifth resistor has a third terminal and a fourth terminal, the first terminal of the fourth resistor is electrically connected to the voltage output terminal, the third terminal of the fifth resistor is electrically connected to the second terminal of the fourth resistor and the voltage-transforming feedback terminal, and the fourth terminal is grounded.
6. A miniature piezoelectric pump module as defined in claim 5, wherein the fifth resistor is a variable resistor.
7. A miniature piezoelectric pump module as defined in claim 5, wherein the fifth resistor is a digital variable resistor.
8. A miniature piezoelectric pump module as defined in claim 7, wherein the microprocessor further comprises a conversion unit and a communication unit, the communication unit is connected to the digital variable resistor, the conversion unit receives the feedback voltage, converts the feedback voltage into the modulation signal of the digital signal, and transmits the modulation signal to the digital variable resistor via the communication unit, and the digital variable resistor is changed to modulate the effective working voltage output by the transformer, so that the effective working voltage approaches the ideal working voltage.
9. A miniature piezoelectric pump module as defined in claim 1, wherein the inverter comprises:
a buffer gate having a buffer input terminal and a buffer output terminal;
an inverter having an inverting input terminal and an inverting output terminal;
a first P-type metal oxide semiconductor field effect transistor, a second P-type metal oxide semiconductor field effect transistor, a first N-type metal oxide semiconductor field effect transistor and a second N-type metal oxide semiconductor field effect transistor, wherein the first P-type metal oxide semiconductor field effect transistor, the second P-type metal oxide semiconductor field effect transistor, the first N-type metal oxide semiconductor field effect transistor and the second N-type metal oxide semiconductor field effect transistor are respectively provided with a grid electrode, a drain electrode and a source electrode;
wherein the buffer input terminal of the buffer gate and the inverting input terminal of the inverter are electrically connected to the microprocessor for receiving the control signal, the buffer output terminal of the buffer gate is electrically connected to the gate of the first P-type MOSFET and the gate of the first N-type MOSFET, the inverting output terminal of the inverter is electrically connected to the gate of the second P-type MOSFET and the gate of the second N-type MOSFET, the drain of the first P-type MOSFET and the drain of the second P-type MOSFET are electrically connected to the voltage output terminal of the transformer for receiving the effective operating voltage, the source of the first P-type MOSFET is electrically connected to the source of the first N-type MOSFET and the second electrode of the piezoelectric pump, the source of the second P-type MOSFET is electrically connected to the drain of the second N-type MOSFET and the second electrode of the piezoelectric pump And the source electrode of the first N-type metal oxide semiconductor field effect transistor is electrically connected with the source electrode of the second N-type metal oxide semiconductor field effect transistor and is grounded.
10. A miniature piezoelectric pump module as defined in claim 9, wherein the control signal is a pulse width modulation signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811344076.0A CN111173722B (en) | 2018-11-13 | 2018-11-13 | Miniature piezoelectric pump module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811344076.0A CN111173722B (en) | 2018-11-13 | 2018-11-13 | Miniature piezoelectric pump module |
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| Publication Number | Publication Date |
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| CN111173722A CN111173722A (en) | 2020-05-19 |
| CN111173722B true CN111173722B (en) | 2022-03-18 |
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Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005080793A1 (en) * | 2004-02-23 | 2005-09-01 | Nec Corporation | Piezoelectric pump driving circuit, and cooling system using the same |
| JP2005315225A (en) * | 2004-04-30 | 2005-11-10 | Konica Minolta Holdings Inc | Driving circuit and trapezoidal wave generation circuit for micro pump |
| JP4631921B2 (en) * | 2008-03-26 | 2011-02-16 | ソニー株式会社 | Piezoelectric element driving apparatus and piezoelectric element driving frequency control method |
| CN111140482B (en) * | 2018-11-06 | 2022-01-21 | 研能科技股份有限公司 | Micro fluid delivery module |
| CN208966532U (en) * | 2018-11-13 | 2019-06-11 | 研能科技股份有限公司 | Miniature piezoelectric pump module |
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