CN111102442A - Compact rigid-flexible coupling platform connecting structure and multi-axis motion platform formed by same - Google Patents
Compact rigid-flexible coupling platform connecting structure and multi-axis motion platform formed by same Download PDFInfo
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- CN111102442A CN111102442A CN201911274694.7A CN201911274694A CN111102442A CN 111102442 A CN111102442 A CN 111102442A CN 201911274694 A CN201911274694 A CN 201911274694A CN 111102442 A CN111102442 A CN 111102442A
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- 238000001514 detection method Methods 0.000 claims abstract description 26
- 238000006073 displacement reaction Methods 0.000 claims abstract description 16
- 230000007246 mechanism Effects 0.000 claims description 48
- 238000003825 pressing Methods 0.000 claims description 3
- 230000005484 gravity Effects 0.000 abstract description 5
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 239000002131 composite material Substances 0.000 description 4
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- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/043—Allowing translations
- F16M11/045—Allowing translations adapted to left-right translation movement
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/043—Allowing translations
- F16M11/048—Allowing translations adapted to forward-backward translation movement
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/16—Details concerning attachment of head-supporting legs, with or without actuation of locking members thereof
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/18—Heads with mechanism for moving the apparatus relatively to the stand
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Abstract
The invention discloses a compact rigid-flexible coupling platform connecting structure and a multi-axis motion platform formed by the same, wherein the compact rigid-flexible coupling platform connecting structure comprises an upper layer platform, a lower layer platform, a motion detection element and a driving device, wherein a base of the upper layer platform is designed into a rigid-flexible coupling structure and is arranged on a guide rail of the lower layer platform, the driving device is arranged on the lower layer platform, and the driving device drives the upper layer platform to move along the direction of the guide rail; the motion detection element detects the displacement or speed of the upper platform frame, and the second detection element can be selected to detect the deformation amount or deformation speed of the flexible hinge. The multi-freedom-degree high-precision motion platform integrates the bottom of the upper-layer platform with the lower-layer platform, an intermediate connecting plate is omitted, the overall gravity center of the platform is reduced, the structure is compact, the Z direction is flatter, the multi-layer platforms can be superposed, multi-freedom-degree motion is realized, and the required multi-freedom-degree high-precision motion platform is flexibly built. In addition, the rigid-flexible coupling connection structure adopts a sandwich type flexible hinge, and meanwhile, assembly error is avoided and the fatigue life is prolonged.
Description
Technical Field
The invention relates to a rigid-flexible coupling platform, in particular to a compact rigid-flexible coupling platform connecting structure and a multi-axis motion platform formed by the same.
Background
The large-stroke high-precision motion platform is widely applied to the fields of semiconductor packaging and the like. In order to comprehensively meet the requirements of both large stroke and high precision, macro-micro composite motion platforms are generally used for designing the large stroke high precision motion platforms. In a typical macro-micro composite motion platform, the problem of friction dead zones can be effectively solved based on a flexible hinge, and the positioning precision is greatly improved on the premise of not increasing the cost, so that the micro motion platform often adopts a design scheme based on the flexible hinge. For example, patent No. CN201310065603.5 discloses a coaxial macro-micro composite linear motion platform device and a precision compensation method thereof, and patent No. CN201410696217.0 also discloses a common stator dual-drive macro-micro integrated high-speed precision motion one-dimensional platform of a wire motor, both of which adopt a single degree of freedom guide mechanism based on a flexible hinge. Meanwhile, the patent number CN201610508540.X also discloses a single-drive rigid-flexible coupling precision motion platform, a realization method and application thereof, and the motion platform for realizing large-stroke high-precision motion in the patent also adopts a similar single-degree-of-freedom flexible hinge mechanism.
However, the flexible hinge mechanisms of the above types generally have the problems of weak bearing capacity and the like, so that the single-degree-of-freedom large-stroke high-precision motion platform constructed based on the flexible hinge mechanisms of the above types is difficult to simply adopt a module stacking mode for constructing a multi-degree-of-freedom motion platform. In order to realize multi-degree-of-freedom large-stroke high-precision motion, a two-dimensional micro-motion platform with adjustable rigidity frequency based on a stress rigidization principle is disclosed in the patent No. CN201410214646.X, and a two-dimensional micro-motion mechanism based on a flexible hinge is adopted in a linear motor common-stator multi-drive macro-micro integrated high-speed precision motion two-dimensional platform, so that the two-dimensional micro-motion mechanism can be well used for designing a two-dimensional macro-micro composite motion platform. However, the two-dimensional micro-motion mechanism based on the flexible hinges of the two patents also has weak bearing capacity, and is difficult to be continuously used for building a large-stroke high-precision motion platform with higher degree of freedom. Therefore, patent No. CN201710883865.0 discloses a combination mode of a large-bearing flexible hinge and multiple degrees of freedom, which adopts a large-bearing space flexible mechanism to realize the multi-degree of freedom mechanism by stacking rigid-flexible coupled platforms, but the whole base of the upper platform is mounted on the flexible platform, so that the center of gravity is high, the tilting moment is large, and deformation is easily generated.
Disclosure of Invention
In order to overcome at least one defect in the prior art, the invention provides a compact rigid-flexible coupling platform connection structure, a control method thereof and a multi-axis motion platform formed by the same. The structure directly integrates the bottom of the upper platform with the lower platform, and saves an intermediate excessive connecting plate, so that the overall gravity center of the platform is reduced, the structure is compact, the Z direction is flatter, multiple layers of platforms can be superposed to realize multi-degree-of-freedom motion, and the multi-degree-of-freedom high-precision motion platform with required degree of freedom is flexibly built.
The purpose of the invention can be achieved by adopting the following technical scheme:
a compact rigid-flexible coupling platform connecting structure comprises an upper platform, a lower platform, a motion detection element and a driving device, wherein an upper platform base of the upper platform is designed into a rigid-flexible coupling structure and is installed on a lower platform guide rail, the driving device is installed on the lower platform, and a bottom plate and the upper platform are driven by the driving device to move along the guide rail direction; the motion detection element detects a displacement or velocity of the upper stage.
Furthermore, the bottom plate comprises a frame and a flexible hinge guide mechanism, the frame is externally connected with a power output end of a driving device, the driving device drives the frame to move along the direction of the guide rail, the side surface of the flexible hinge guide mechanism in the direction of the guide rail is connected to the frame through a flexible hinge, and two end surfaces of the flexible hinge guide mechanism in the direction of the guide rail are arranged on the frame through spring pieces; the flexible hinge guide mechanisms are arranged in an even number and are respectively symmetrical with the center of the frame; the flexible hinge guide mechanism is arranged on the lower platform through the guide mechanism.
As a preferred scheme, the upper platform comprises a working platform and a platform frame, the platform frame is connected with the working platform through a second flexible hinge, and the working platform is connected with the bottom plate through a guide mechanism; the working platform is connected with a driving force output end of the driving device, and the driving device drives the working platform and transfers the driving force to the platform frame through the second flexible hinge so as to enable the upper-layer platform to integrally move along the direction of the guide rail; the single edges of the second flexible hinges are at least provided with two groups, and the second flexible hinges are arranged on two opposite side surfaces of the working platform.
Further, the detection elements comprise a first group of detectors to a fourth group of detectors, the first group of detectors to the fourth group of detectors each comprise a detection head and a scale element, and the detection heads and the scale elements of the first group of detectors are respectively arranged on the frame and the lower platform so as to detect the overall movement displacement or speed of the bottom of the upper platform; the detection head and the scale element of the second group of detectors are respectively arranged on the frame and the flexible hinge guide mechanism so as to detect the displacement or the speed of the first flexible hinge motion platform; the detection head and the scale element of each detector of the third group are respectively arranged on the working platform and the frame so as to detect the movement displacement or the speed of the working platform; and the detection head and the scale element of the fourth group of detectors are respectively arranged on the working platform and the platform frame so as to detect the movement displacement or speed of the platform frame.
Preferably, the flexible hinge guide mechanism includes a linear guide and a slider movably mounted on the linear guide.
Furthermore, the bottom end of the working platform is connected with the sliding block, the sliding block is movably arranged on the linear guide rail, and the linear guide rail is fixedly connected to the bottom plate through the mounting block.
As a preferable scheme, the driving device comprises a guide rail driving device and a Y-axis driving device, the guide rail driving device is mounted on the lower platform, and a power output end of the guide rail driving device is connected with the bottom plate; the Y-axis driving device is arranged on the bottom plate, and the power output end of the Y-axis driving device is connected with the working platform.
Preferably, the side surface of the flexible hinge guide mechanism in the guide rail direction is connected with the flexible hinge spring piece through a pressing block.
As a preferable scheme, a notch is formed in the side face of the working platform, the second flexible hinge is fixed to the notch, a protrusion is arranged on the side face of the platform frame, and the protrusion extends into the notch and is fixedly connected with the second flexible hinge.
The multi-axis motion platform is characterized in that the guide rail driving device and the Y-axis driving device are linear motors.
The implementation of the invention has the following beneficial effects:
1. the multi-freedom-degree high-precision motion platform directly integrates the bottom plate and the lower-layer platform, saves an intermediate connecting plate, reduces the integral gravity center of the platform system, has a compact structure, is flatter in the Z direction, can be superposed with a multi-layer platform structure, flexibly builds a multi-freedom-degree high-precision motion platform with required freedom degree, realizes multi-freedom-degree motion, and solves the problem that the existing rigid-flexible coupling platform is difficult to be applied to the building of a high-stroke high-precision motion platform with higher freedom degree.
2. Two side surfaces of the guide rail direction of the flexible hinge guide mechanism are connected with the frame by adopting an integrated flexible hinge, and two side surfaces of the guide rail direction of the first flexible hinge are connected with the frame by adopting flexible hinge spring pieces to form a sandwich type flexible hinge structure. The structure ensures no assembly error and also ensures the fatigue life, and the thickness and the working width (Z direction) of the spring piece can be increased or decreased according to the size of the required bearing to adjust the rigidity, so that the problems of weak bearing capacity and deformation resistance in the non-working direction of the rigid-flexible coupling platform can be solved.
3. When the rigidity of the flexible hinge needs to be adjusted, the flexible hinge arranged outside the working platform only needs to be replaced by the flexible hinge with different thicknesses, the whole platform does not need to be disassembled, the replacement is simple, convenient, quick and flexible, and the problem that the rigidity is adjusted more complicatedly is solved skillfully. In addition, the flexible hinges are arranged in at least two groups and arranged outside the working platform, and the structure has the following 3 advantages: 1. when the rigidity of the flexible hinge is adjusted, the original assembly relation can be ensured by replacing one group of flexible hinges. 2. Each group can adopt spring pieces with different thicknesses respectively, and the spring pieces with different thicknesses can be arranged and combined to adapt to various working occasions. 3. When each group of spring pieces respectively adopts the spring pieces with different thicknesses, the distribution of the spring force can be changed according to the requirement so as to realize the optimal working assembly condition.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a bottom plate of the compact rigid-flexible coupling platform connection structure according to the present invention.
Fig. 2 is a partially enlarged view of a portion a of fig. 1.
Fig. 3 is a rear view of fig. 1.
Fig. 4 is a top view of fig. 3.
Fig. 5 is a top view of fig. 4.
Fig. 6 is a schematic structural diagram of a compact rigid-flexible coupling platform connection structure and a linear motor-driven two-degree-of-freedom motion platform formed by the same according to the present invention.
Fig. 7 is an exploded view of fig. 6.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Examples
Referring to fig. 1 to 5, the present embodiment relates to a compact rigid-flexible coupling platform connection structure, which includes an upper platform 1, a lower platform 2, a motion detection element, and a driving device, wherein the bottom of the upper platform 1 is movably mounted on the lower platform 2 through a bottom plate 3, the driving device is mounted on the lower platform 2, and the driving device drives the bottom plate 3 and the upper platform 1 to move along a guide rail direction; the motion detection element detects the displacement or velocity of the upper stage 1.
This structure is direct to be fused bottom plate 3 and lower floor's platform 2 as an organic whole, has saved the excessive connecting plate in centre for the whole focus of platform reduces, compact structure, and the Z direction is more flat, and can superpose multilayer platform structure, builds out the multi freedom high accuracy motion platform of required degree of freedom in a flexible way, realizes the multi freedom motion, thereby has solved the problem that current rigid-flexible coupling platform is difficult to be applied to the large stroke high accuracy motion platform of higher degree of freedom and has built.
The bottom plate 3 comprises a frame 31 and a flexible hinge guide mechanism 32, the center of the frame 31 is externally connected with a power output end of a driving device, the driving device drives the frame 31 to move along the direction of a guide rail, the side surface of the flexible hinge guide mechanism 32 in the direction of the guide rail is connected to the frame 31 through a flexible hinge 33, and two end surfaces of the flexible hinge guide mechanism 32 in the direction of the guide rail are installed on the frame 31 through spring pieces 34; the number of the flexible hinge guide mechanisms 32 is even and is symmetrical to the center of the frame 31; the flexible hinge guide mechanism 32 is mounted on the lower deck 2 through the guide mechanism 4.
The flexible hinge guide mechanism 32 employs both the integrated flexible hinge 33 and the flexible hinge spring plate 34. The integral flexible hinge 33 is composed of an array of flexible hinges symmetrically disposed on both sides of the flexible hinge guide mechanism 32. The flexible hinge spring pieces 34 are fitted between the flexible hinge guide mechanism 32 and the frame 31 by screws or the like. The flexible hinge guide mechanism 32 is divided into two separate parts and symmetrically arranged on the guide mechanism 4 of the lower platform 2, and forms a structure of 'frame 31-flexible hinge guide mechanism 32-frame 31' from left to right.
The two sides of the flexible hinge guide mechanism 32 in the guide rail direction are connected with the frame 31 by adopting an integrated flexible hinge 33, and the two sides of the first flexible hinge in the guide rail direction are connected with the frame 31 by adopting a flexible hinge spring sheet 34, so that a sandwich type flexible hinge structure is formed. The structure ensures no assembly error and also ensures the fatigue life, and the thickness and the working width (Z direction) of the spring piece can be increased or decreased according to the size of the required bearing to adjust the rigidity, so that the problems of weak bearing capacity and deformation resistance in the non-working direction of the rigid-flexible coupling platform can be solved.
The upper-layer platform 1 comprises a working platform 11 and a platform frame 12, the platform frame 12 is connected with the working platform 11 through a second flexible hinge 13, and the working platform 11 is connected with the bottom plate 3 through a guide mechanism 4; the working platform 11 is connected with a driving force output end of a driving device, the driving device drives the working platform 11 and transfers the driving force to the platform frame 12 through the second flexible hinge 13 so as to enable the upper layer platform 1 to integrally move along the length direction of the guide mechanism 4; the single side of the second flexible hinge 13 is at least provided with two groups, and the second flexible hinge 13 is arranged on two opposite side surfaces of the working platform 11.
When the rigidity of the second flexible hinge 13 needs to be adjusted, the second flexible hinge 13 arranged outside the working platform 11 only needs to be replaced by different thicknesses, the whole platform does not need to be detached, the replacement is simple, convenient, quick and flexible, and the problem that the rigidity is adjusted more complicatedly is solved ingeniously. In addition, the second flexible hinges 13 are arranged in at least two groups and arranged outside the working platform 11, and the structure has the following 3 advantages:
1. when the rigidity of the second flexible hinge 13 is adjusted, the original assembly relationship can be ensured by replacing one group. If only one group is available, the original assembly relationship is destroyed during replacement.
2. Each group can adopt spring pieces with different thicknesses respectively, and the spring pieces with different thicknesses can be arranged and combined to adapt to various working occasions. If only one group of spring plates is provided, a large number of spring plates with different thicknesses are required, so that the cost is increased, and the spring plates are difficult to adapt to various working conditions.
3. In addition, when each group of spring pieces respectively adopts the spring pieces with different thicknesses, the distribution of the spring force can be changed according to the requirement, so that the optimal working assembly condition is realized. If there is only one group, it cannot be realized.
As shown in fig. 6 and 7, the motion detection elements include a first set of detectors to a fourth set of detectors, each of which includes a detection head and a scale element, and the detection head 51 and the scale element of the first set of detectors are respectively mounted on the frame 31 and the lower stage 2 to detect the overall motion displacement or speed of the upper stage 1; the detection head 53 and the scale element of the second group of detectors are respectively arranged on the frame 31 and the flexible hinge guide mechanism 32 so as to detect the displacement or the speed of the movement of the flexible hinge guide mechanism 32, and the detection head 53 is connected to the frame 31 through the mounting block 52; the detection head and the scale element 55 of the third group of detectors are respectively arranged on the working platform 11 and the frame 31 so as to detect the movement displacement or the speed of the working platform 11; the detection head 57 and the scale elements of the fourth set of detectors are mounted on the working platform 11 and the platform frame 12, respectively, to detect the movement displacement or speed of the platform frame 12. The displacement or speed of the upper platform 1, the flexible hinge guide mechanism 32, the working platform 11 and the platform frame 12 is detected by the first group of detectors to the fourth group of detectors respectively, so that the displacement or speed data of each platform can be obtained in real time, and the accurate control of motion compensation is further realized.
The guide mechanism 4 comprises a linear guide 41 and a slider 42 movably mounted on the linear guide 41. The bottom end of the working platform 11 is connected with a sliding block 42, the sliding block 42 is movably installed on a linear guide rail 41, and the linear guide rail 41 is fixedly connected to the bottom plate 3 through an installation block 43. Similarly, a sliding block 42 is fixedly installed at the bottom end of the bottom plate 3, the sliding block 42 is movably installed on a linear guide rail 41, and the linear guide rail 41 is fixedly installed on the lower platform 2.
The driving device comprises a guide rail driving device 61 and a Y-axis driving device 62, the guide rail driving device 61 is arranged on the lower platform 2, and the power output end of the guide rail driving device 61 is connected with the bottom plate 3; the Y-axis driving device 62 is installed on the bottom plate 3, and the power output end of the Y-axis driving device 62 is connected with the working platform 11.
The side surface of the flexible hinge guide mechanism 32 in the guide rail direction is connected with the flexible hinge spring piece 34 through a pressing block 321. The structure can adjust the effective length of the flexible hinge guide mechanism 32 and further adjust the rigidity of the flexible hinge spring piece 34 by replacing press blocks with different lengths, so that the platform can meet the use requirements under different working conditions.
The side of the working platform 11 is provided with a notch 111, the second flexible hinge 13 is fixed on the notch 111, the side of the platform frame 12 is provided with a protrusion, and the protrusion extends into the notch 111 and is fixedly connected with the second flexible hinge 13.
The bulge can be connected with the second flexible hinge 13 after penetrating through the notch 111, so that the platform frame 12 is connected with the second flexible hinge 13, the platform frame 12 is guaranteed to be sleeved in the working platform 11 in a suspended mode, meanwhile, the second flexible hinge 13 can be installed on the working platform 11, the second flexible hinge 13 is convenient to replace, the whole platform is not required to be disassembled, and the replacement is simple, convenient, rapid and flexible.
In summary, the main advantages of the present invention are: 1. a multi-degree-of-freedom high-precision motion platform with required degree of freedom can be flexibly set up according to specific requirements; 2. the gravity center of the motion platform is lowered, the structure is compact, the stability is better, and the application range is wide; 3. the rigidity adjusting range is large, and the thickness and the working width (Z direction) of the spring piece can be adjusted; 4. and each single-degree-of-freedom large-stroke high-precision motion platform assembly is machined and manufactured in a universal machining mode, special parts such as air floatation and magnetic suspension are not adopted, and the cost is low.
The guide rail driving device 61 and the Y-axis driving device 62 are linear motors, so that a rigid-flexible coupling motion platform which is driven by the linear motors and easy to maintain can be formed. Of course, the rail driving device 61 and the Y-axis driving device 62 may be configured by using a servo motor, a ball screw, and a nut.
While the invention has been described in connection with what is presently considered to be the most practical and preferred embodiment, it is to be understood that the invention is not to be limited to the disclosed embodiment, but on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims.
Claims (9)
1. A compact rigid-flexible coupling platform connecting structure is characterized by comprising an upper layer platform, a lower layer platform, a motion detection element and a driving device, wherein an upper layer platform base of the upper layer platform is designed into a rigid-flexible coupling structure and is installed on a lower layer platform guide rail, the driving device is installed on the lower layer platform, and a bottom plate and the upper layer platform are driven by the driving device to move along the guide rail direction; the motion detection element detects the displacement or the speed of the frame of the upper platform, or simultaneously detects the displacement or the speed of the frame of the upper platform and the deformation amount or the deformation speed of the flexible hinge;
the upper-layer platform base comprises a frame and a flexible hinge guide mechanism, the frame is connected with a power output end of a driving device, the driving device drives the frame to move along the direction of a guide rail, the side surface of the flexible hinge guide mechanism in the direction of the guide rail is connected onto the frame through a flexible hinge, and the end surface of the flexible hinge guide mechanism in the direction of the guide rail is installed on the frame through a spring piece; the flexible hinge guide mechanism is arranged on the lower platform guide rail through a sliding block.
2. The multi-axis motion platform formed by the compact rigid-flexible coupling platform connection structure as claimed in claim 1, wherein the upper platform comprises a working platform and a platform frame, the working platform is connected with the platform frame through a second flexible hinge, and the platform frame is connected with the upper platform guide rail through a sliding block; the working platform is connected with a driving force output end of the driving device, and the driving device drives the working platform and transfers the driving force to the platform frame through the second flexible hinge so as to enable the upper-layer platform to integrally move along the direction of the guide rail; the single edges of the second flexible hinges are at least provided with two groups, and the second flexible hinges are arranged on two opposite side surfaces of the working platform.
3. The multi-axis motion platform formed by the compact rigid-flexible coupling platform connection structure of claim 1, wherein the motion detection elements of each axis platform comprise a first set of detectors or a first set of detectors and a second set of detectors, the first set of detectors to the second set of detectors each comprise a detection head and a scale element, and the detection heads and the scale elements of the first set of detectors are respectively mounted on the frame and the lower platform so as to detect the overall motion displacement or speed of the bottom of the upper platform; and the detection head and the scale element of the second group of detectors are respectively arranged on the frame and the flexible hinge guide mechanism so as to detect the deformation amount and the deformation speed of the flexible hinge.
4. The multi-axis motion platform formed by the compact rigid-flexible coupling platform connection structure as claimed in claim 1 or 2, wherein the flexible hinge guide mechanism comprises a linear guide rail and a slide block movably mounted on the linear guide rail.
5. The multi-axis motion platform formed by the compact rigid-flexible coupling platform connection structure as claimed in claim 4, wherein the bottom end of the work platform is connected with a slide block, the slide block is movably mounted on a linear guide rail, and the linear guide rail is fixedly connected to the bottom plate through a mounting block.
6. The multi-axis motion platform formed by the compact rigid-flexible coupling platform connection structure as claimed in claim 1 or 2, wherein the driving device comprises a guide rail driving device and a Y-axis driving device, the guide rail driving device is mounted on the lower platform, and a power output end of the guide rail driving device is connected with the bottom plate; the Y-axis driving device is arranged on the bottom plate, and the power output end of the Y-axis driving device is connected with the working platform.
7. The multi-axis motion platform formed by the compact rigid-flexible coupling platform connection structure as claimed in claim 1, wherein the side surface of the flexible hinge guide mechanism in the guide rail direction is connected with the flexible hinge spring sheet through a pressing block.
8. The multi-axis motion platform formed by the compact rigid-flexible coupling platform connection structure as claimed in claim 2, wherein a notch is formed on a side surface of the working platform, the second flexible hinge is fixed on the notch, and a protrusion is arranged on a side surface of the platform frame, extends into the notch and is fixedly connected with the second flexible hinge.
9. The multi-axis motion platform formed by the compact rigid-flexible coupling platform connection structure as claimed in claim 6, wherein the guide rail driving device and the Y-axis driving device are linear motors.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112081822A (en) * | 2020-08-05 | 2020-12-15 | 佛山市华道超精科技有限公司 | Novel guide rail rigid-flexible coupling platform |
| CN112946909A (en) * | 2021-03-12 | 2021-06-11 | 南京航空航天大学 | Precise two-dimensional image stabilizing platform |
| CN113183054A (en) * | 2021-03-19 | 2021-07-30 | 哈工大机器人(中山)无人装备与人工智能研究院 | Panel movement device |
| CN114486740A (en) * | 2022-02-08 | 2022-05-13 | 江苏集萃苏科思科技有限公司 | Two-degree-of-freedom motion platform |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103557412A (en) * | 2013-11-06 | 2014-02-05 | 山东大学 | Bipolar two-dimensional fully flexible high-precision servo platform |
| GB2541171A (en) * | 2015-07-29 | 2017-02-15 | Skf Ab | A device for adjusting the positioning of an apparatus relative to a foundation in a shaft alignment process and a method thereof |
| CN107705822A (en) * | 2017-09-26 | 2018-02-16 | 广东工业大学 | A kind of big carrying flexible hinge guiding mechanism |
| CN108015561A (en) * | 2017-12-19 | 2018-05-11 | 广东工业大学 | A kind of motion platform for expanding single driving Coupled Rigid-flexible work area |
| CN109648354A (en) * | 2018-12-13 | 2019-04-19 | 广东工业大学 | A kind of the Coupled Rigid-flexible platform and motion platform of intermediate regulations rigidity |
| CN110281033A (en) * | 2019-05-28 | 2019-09-27 | 广东工业大学 | A kind of multiaxis Rigid-flexible Coupled Motion platform |
-
2019
- 2019-12-12 CN CN201911274694.7A patent/CN111102442B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103557412A (en) * | 2013-11-06 | 2014-02-05 | 山东大学 | Bipolar two-dimensional fully flexible high-precision servo platform |
| GB2541171A (en) * | 2015-07-29 | 2017-02-15 | Skf Ab | A device for adjusting the positioning of an apparatus relative to a foundation in a shaft alignment process and a method thereof |
| CN107705822A (en) * | 2017-09-26 | 2018-02-16 | 广东工业大学 | A kind of big carrying flexible hinge guiding mechanism |
| CN108015561A (en) * | 2017-12-19 | 2018-05-11 | 广东工业大学 | A kind of motion platform for expanding single driving Coupled Rigid-flexible work area |
| CN109648354A (en) * | 2018-12-13 | 2019-04-19 | 广东工业大学 | A kind of the Coupled Rigid-flexible platform and motion platform of intermediate regulations rigidity |
| CN110281033A (en) * | 2019-05-28 | 2019-09-27 | 广东工业大学 | A kind of multiaxis Rigid-flexible Coupled Motion platform |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112081822A (en) * | 2020-08-05 | 2020-12-15 | 佛山市华道超精科技有限公司 | Novel guide rail rigid-flexible coupling platform |
| CN112946909A (en) * | 2021-03-12 | 2021-06-11 | 南京航空航天大学 | Precise two-dimensional image stabilizing platform |
| CN113183054A (en) * | 2021-03-19 | 2021-07-30 | 哈工大机器人(中山)无人装备与人工智能研究院 | Panel movement device |
| CN114486740A (en) * | 2022-02-08 | 2022-05-13 | 江苏集萃苏科思科技有限公司 | Two-degree-of-freedom motion platform |
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