CN110994097B - 一种高频大带宽薄膜体波滤波器结构及其制备方法 - Google Patents
一种高频大带宽薄膜体波滤波器结构及其制备方法 Download PDFInfo
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- CN110994097B CN110994097B CN201911347704.5A CN201911347704A CN110994097B CN 110994097 B CN110994097 B CN 110994097B CN 201911347704 A CN201911347704 A CN 201911347704A CN 110994097 B CN110994097 B CN 110994097B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
- H01P1/201—Filters for transverse electromagnetic waves
- H01P1/203—Strip line filters
- H01P1/20327—Electromagnetic interstage coupling
- H01P1/20354—Non-comb or non-interdigital filters
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P11/00—Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
- H01P11/007—Manufacturing frequency-selective devices
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CN112350682B (zh) * | 2020-11-12 | 2024-03-26 | 厦门市三安集成电路有限公司 | 一种声表面滤波器的键合方法及其键合结构 |
CN112383288A (zh) * | 2020-11-16 | 2021-02-19 | 清华大学 | 一种温度补偿的免封装声表面波器件及其制备方法 |
CN114301413B (zh) * | 2021-12-29 | 2024-03-26 | 苏州达波新材科技有限公司 | 空腔型倒置声波器件及其制备方法 |
Citations (8)
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US5359250A (en) * | 1992-03-04 | 1994-10-25 | The Whitaker Corporation | Bulk wave transponder |
EP2128980A2 (en) * | 2008-05-30 | 2009-12-02 | Hitachi Ltd. | Acoustic wave device and high-frequency filter using the same |
CN104272592A (zh) * | 2013-03-27 | 2015-01-07 | 日本碍子株式会社 | 复合基板及弹性波装置 |
CN104868873A (zh) * | 2015-05-27 | 2015-08-26 | 上海交通大学 | 一种多层复合结构声表面波器件基底 |
CN106209002A (zh) * | 2016-06-29 | 2016-12-07 | 电子科技大学 | 一种新型薄膜体声波谐振器及其制备方法 |
WO2018063294A1 (en) * | 2016-09-30 | 2018-04-05 | Intel Corporation | Film bulk acoustic resonator (fbar) devices for high frequency rf filters |
CN110352557A (zh) * | 2017-03-09 | 2019-10-18 | 株式会社村田制作所 | 弹性波装置、高频前端电路以及通信装置 |
CN110574290A (zh) * | 2017-05-02 | 2019-12-13 | 日本碍子株式会社 | 弹性波元件及其制造方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107065232A (zh) * | 2016-12-12 | 2017-08-18 | 天津津航技术物理研究所 | 基于铌酸锂薄膜的宽带行波电光调制器及其制备方法 |
US10601397B2 (en) * | 2017-03-24 | 2020-03-24 | Zhuhai Crystal Resonance Technologies Co., Ltd. | RF resonator electrode and membrane combinations and method of fabrication |
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- 2019-12-24 CN CN201911347704.5A patent/CN110994097B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5359250A (en) * | 1992-03-04 | 1994-10-25 | The Whitaker Corporation | Bulk wave transponder |
EP2128980A2 (en) * | 2008-05-30 | 2009-12-02 | Hitachi Ltd. | Acoustic wave device and high-frequency filter using the same |
CN104272592A (zh) * | 2013-03-27 | 2015-01-07 | 日本碍子株式会社 | 复合基板及弹性波装置 |
CN104868873A (zh) * | 2015-05-27 | 2015-08-26 | 上海交通大学 | 一种多层复合结构声表面波器件基底 |
CN106209002A (zh) * | 2016-06-29 | 2016-12-07 | 电子科技大学 | 一种新型薄膜体声波谐振器及其制备方法 |
WO2018063294A1 (en) * | 2016-09-30 | 2018-04-05 | Intel Corporation | Film bulk acoustic resonator (fbar) devices for high frequency rf filters |
CN110352557A (zh) * | 2017-03-09 | 2019-10-18 | 株式会社村田制作所 | 弹性波装置、高频前端电路以及通信装置 |
CN110574290A (zh) * | 2017-05-02 | 2019-12-13 | 日本碍子株式会社 | 弹性波元件及其制造方法 |
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Inventor after: Wang Weibiao Inventor after: Lu Zengtian Inventor before: Wang Weibiao Inventor before: Fu Sulei Inventor before: Shen Junyao Inventor before: Su Rongxuan Inventor before: Lu Zengtian Inventor before: Pan Feng |
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