CN110987246A - Flexible sensor and preparation and use methods thereof - Google Patents
Flexible sensor and preparation and use methods thereof Download PDFInfo
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- CN110987246A CN110987246A CN201911300627.8A CN201911300627A CN110987246A CN 110987246 A CN110987246 A CN 110987246A CN 201911300627 A CN201911300627 A CN 201911300627A CN 110987246 A CN110987246 A CN 110987246A
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- signal measuring
- cavity
- flexible substrate
- flexible
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
- G01L5/165—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using variations in capacitance
Abstract
The application relates to a flexible sensor and a preparation and use method of the flexible sensor, wherein the flexible sensor comprises a containing cavity and at least two electric signal measuring devices; wherein: the accommodating cavity is filled with a liquid conductive medium; at least two electrical signal measuring devices are respectively communicated with the accommodating cavity, and an included angle is formed between any two electrical signal measuring devices and a connecting line between the accommodating cavities. By utilizing the fluidity of the liquid conductive medium in the containing cavity, when the flexible sensor is extruded under the action of external force in a certain direction, different amounts of the liquid conductive medium can flow into the electric signal measuring devices in different directions, and the stress direction and the stress magnitude of the flexible sensor can be further determined according to the inflow amount of the liquid conductive medium.
Description
Technical Field
The invention relates to the technical field of flexible devices, in particular to a flexible sensor and a preparation and use method of the flexible sensor.
Background
Flexible electronics is gaining wide attention and various aspects of support as a core technology for personalizing wearable medical equipment in the future. Flexible electronic devices (including circuits, sensors, electrodes, chips, etc.) have the advantages of good skin affinity, stretchability, bendability, etc. as aspects of the device. At present, the demand for flexible electronic devices is no longer satisfied with the functions of bending, stretching, etc., and sensor devices with directionality or directivity are also an important research part of flexible electronic sensors.
The flexible sensor based on the liquid metal deforms due to the tension, so that the resistance change of the liquid metal is caused, and the resistance change value of the liquid metal is detected and converted into the tension change. However, the existing flexible sensor is mainly based on the change of the material, and cannot have directionality or directivity, so that the application range of the flexible sensor of the liquid metal is greatly limited.
Disclosure of Invention
The application provides a flexible sensor and a preparation and use method thereof, which can lead the flexible sensor to sense the size and the direction of an external force and enlarge the application range of the flexible sensor.
A flexible sensor comprises a containing cavity and at least two electric signal measuring devices; wherein:
the accommodating cavity is filled with a liquid conductive medium;
at least two electric signal measuring devices respectively with hold the chamber intercommunication, and arbitrary two electric signal measuring device with hold the line between the chamber and have the contained angle, be used for holding the liquid conductive medium of intracavity and receive pressure and fill respectively to each electric signal measuring device after, detect each electric signal measuring device's parameter, according to the parameter is confirmed flexible sensor's atress direction and atress size.
In an embodiment, the electrical signal measurement device comprises a valve structure and a capacitive sensor; the capacitive sensor comprises a first electrode cavity and a second electrode cavity; the first electrode cavity and the second electrode cavity are arranged at intervals;
the first electrode cavity and the second electrode cavity are respectively communicated with the accommodating cavity through the valve structure and used for inducing corresponding capacitance according to the capacity of the liquid conductive medium entering the first electrode cavity and the second electrode cavity;
the valve structure is used for adjusting the valve opening according to the magnitude of the pressure and the direction;
when the flexible sensor is under pressure, the liquid conductive medium in the containing cavity is filled into the first electrode cavity and the second electrode cavity through the valve structure.
In an embodiment, the electrical signal measurement device further comprises solid state electrodes comprising a first electrode and a second electrode; the first electrode is connected with the first electrode cavity, and the second electrode is connected with the second electrode cavity and used for detecting the capacitance value of the capacitance sensor.
In one embodiment, the valve structure comprises a first conduit and a second conduit that are nested;
the first end of the first conduit is connected with the accommodating cavity, the first end of the second conduit is connected with the capacitive sensor, and the second end of the second conduit extends into the first conduit from the second end of the first conduit and is connected with the first conduit.
In one embodiment, the capacitive sensor comprises an interdigital capacitor.
In an embodiment, a plurality of support structures are disposed within the receiving cavity, the support structures extending along a center of the receiving cavity toward the electrical signal measurement device.
In one embodiment, the connection included angles between any two adjacent electric signal measuring devices and the accommodating cavity are equal.
A method of making a flexible sensor, the method comprising:
s1, providing a flexible substrate mould, filling a flexible substrate precursor in the flexible substrate mould and solidifying to form a flexible substrate;
s2, preparing a containing cavity and at least two electric signal measuring devices on the flexible substrate, and filling a liquid conductive medium in the containing cavity; the electric signal measuring devices comprise valve structures and capacitance sensors, the capacitance sensors are communicated with the accommodating cavities through the valve structures, and connecting lines between any two electric signal measuring devices and the accommodating cavities form included angles;
and S3, packaging the liquid conductive medium to finish the preparation of the flexible sensor.
In one embodiment, step S1 includes:
providing a rigid substrate;
printing a first mold on the surface of the rigid substrate according to the corresponding shapes of the accommodating cavity and the electric signal measuring device, and curing to obtain the flexible substrate mold;
and filling a flexible substrate precursor into the flexible substrate mould until the flexible substrate mould is filled with the precursor and solidified to form the flexible substrate.
In one embodiment, step S2 includes:
printing the accommodating cavity on the flexible substrate, and printing the electric signal measuring device in at least two directions of the accommodating cavity;
and filling a liquid conductive medium into the accommodating cavity, and oxidizing the surface of the liquid conductive medium to form a fixed shape.
In one embodiment, step S2 includes:
printing a second mold on the flexible substrate and/or the flexible substrate mold according to the corresponding shapes of the accommodating cavity and the electric signal measuring device and curing;
filling a precursor liquid material into the second mold until the second mold is filled with the precursor liquid material and is solidified;
removing the second mold located in the accommodating cavity and the electrical signal measuring device;
and filling a liquid conductive medium into the accommodating cavity, and oxidizing the surface of the liquid conductive medium to form a fixed shape.
In an embodiment, the electrical signal measuring device further comprises a solid-state electrode connected to the capacitive sensor.
In one embodiment, step S3 includes:
printing an upper layer mold on the flexible substrate mold and/or the flexible substrate according to the corresponding shapes of the accommodating cavity and the electric signal measuring device and curing;
filling the flexible substrate precursor in the upper layer die until the flexible substrate precursor is filled and solidified, so that the flexible substrate precursor coats the liquid conductive medium;
and removing the flexible substrate mould and the upper layer mould to obtain the flexible sensor.
A method of using the flexible sensor, the method comprising:
placing the accommodating cavity of the flexible sensor on the surface of the body to be measured, and adhering the plurality of electric signal measuring devices to different directions of the surface of the body to be measured;
acquiring parameters of each electric signal measuring device;
and determining the stress direction and stress magnitude of the surface of the body to be tested according to the parameters.
The application provides a flexible sensor and a preparation and use method of the flexible sensor, wherein the flexible sensor comprises a containing cavity and at least two electric signal measuring devices; wherein: the accommodating cavity is filled with a liquid conductive medium; the electric signal measuring devices are respectively communicated with the containing cavities, and any two electric signal measuring devices are connected with a connecting line between the containing cavities to form included angles, so that after liquid conductive media in the containing cavities are pressurized and respectively filled into the electric signal measuring devices, parameters of the electric signal measuring devices are detected, and the stress direction and the stress size of the flexible sensor are determined according to the parameters. The application provides a flexible sensor sets up the electrical signal measuring device through a plurality of directions holding the chamber, utilizes the mobility that holds the interior liquid conductive medium of chamber, when external force action extrusion, can flow into the liquid conductive medium of equidimension in the electrical signal measuring device of equidirectional not, and then can confirm flexible sensor's atress direction and atress size according to liquid conductive medium's inflow.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a flexible sensor according to an embodiment;
FIG. 2 is a schematic structural diagram of a flexible sensor according to another embodiment;
FIG. 3 is a schematic structural diagram of a flexible sensor according to another embodiment when an external force is applied;
FIG. 4 is a schematic structural diagram of a valve structure according to another embodiment;
FIG. 5 is a schematic diagram of the valve structure of FIG. 4 under longitudinal tension according to one embodiment;
FIG. 6 is a schematic diagram of another embodiment of the valve structure of FIG. 4 in a laterally stretched configuration;
FIG. 7 is a flow chart of a method of making a flexible sensor provided in one embodiment;
FIG. 8 is a flow diagram of a method for using a flexible sensor provided in one embodiment.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present application more comprehensible, embodiments accompanying the present application are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth to provide a thorough understanding of the present application, and in the accompanying drawings, preferred embodiments of the present application are set forth. This application may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete. This application is capable of embodiments in many different forms than those described herein and those skilled in the art will be able to make similar modifications without departing from the spirit of the application and it is therefore not intended to be limited to the specific embodiments disclosed below.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present application, "plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise. In the description of the present application, "a number" means at least one, such as one, two, etc., unless specifically limited otherwise.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Fig. 1 is a schematic structural diagram of a flexible sensor provided in an embodiment of the present application, and as shown in fig. 1, the flexible sensor includes a housing 110 and at least two electrical signal measuring devices 120; wherein:
the receiving chamber 110 is filled with a liquid conductive medium. At least two electric signal measuring devices 120 are respectively communicated with the accommodating cavity 110, and a connecting line between any two electric signal measuring devices 120 and the accommodating cavity 110 has an included angle, so that after the liquid conductive medium in the accommodating cavity 110 is pressurized and respectively filled in each electric signal measuring device 120, parameters of each electric signal measuring device 120 are detected, and the stress direction and the stress magnitude of the flexible sensor are determined according to the parameters.
The accommodating cavity 110 is used for filling a liquid conductive medium, and a hard mold for accommodating the cavity 110 can be prepared by 3D printing of a rigid material. Specifically, a filling space may be first prepared for the flexible substrate precursor liquid material through the mold, the flexible substrate precursor liquid material is filled into the filling space, and is heated and cured to form the flexible substrate, then the structure of the liquid conductive medium storage region is prepared on the flexible substrate, the liquid conductive medium is filled into the liquid conductive medium storage region, and finally the flexible substrate precursor liquid material is filled again on the surface of the liquid conductive medium, so as to complete the encapsulation of the structure of the liquid conductive medium storage region, and form the accommodating cavity 110. It is understood that the receiving cavity 110 can be obtained in other ways, and the embodiment is not limited.
The shape of the accommodating cavity 110 can be circular, polygonal, oval, etc., and the specific shape is selected according to actual conditions. In the embodiment of the present application, the accommodating cavity 110 is circular, the circular accommodating cavity 110 can form runners in more directions, and the flow of the liquid conductive medium is not affected by the shape of the accommodating cavity 110, so that the stress direction and the stress size of the flexible sensor can be more accurately determined.
The liquid conductive medium can be liquid metal, salt water, sulfuric acid solution and the like, as long as a large number of anions and cations exist in the liquid, the application takes the liquid conductive medium as the liquid metal for example, and the liquid metal with a certain oxidation degree is easy to form. Liquid metal refers to an amorphous metal that can be viewed as a mixture of a positively ionic fluid and a free electron gas. Liquid metal is also a flowable liquid metal. This application is filled into and is held chamber 110 with liquid metal, utilizes liquid metal's mobility, receives the exogenic action when holding chamber 110, and the liquid metal that holds in the chamber 110 can receive the extrusion of exogenic force to flow. In this application, the liquid metal filled in the accommodating cavity 110 mainly includes liquid metal such as gallium indium tin alloy (Galinstan), gallium indium alloy (EGaIn), gallium zinc alloy (GaZn), or gallium tin alloy (GaSn), and the specific composition of the liquid metal filled in the accommodating cavity 110 is not limited in this embodiment.
The flexible sensor provided by the present application includes at least two electrical signal measuring devices 120, where the at least two electrical signal measuring devices 120 are respectively communicated with the accommodating cavity 110, and a connection line between any two electrical signal measuring devices 120 and the accommodating cavity 110 has an included angle. In one embodiment, the connection angles between two adjacent electrical signal measuring devices 120 and the accommodating cavity 110 are equal.
As shown in fig. 1, the flexible sensor includes four electrical signal measuring devices 120, the four electrical signal measuring devices 120 are disposed in different directions of the accommodating cavity 110, and the connection included angles between any two adjacent electrical signal measuring devices 120 and the accommodating cavity 110 are equal, so that the liquid metal in the accommodating cavity 110 has flow channels in multiple directions, and when the accommodating cavity 110 is subjected to an external force, the liquid metal flows into different electrical signal measuring devices 120 along the flow channels in different directions according to the direction and the size of the applied force. The electric signal measuring device 120 senses corresponding parameters according to the flow of the liquid metal, and the stress direction and the stress magnitude of the flexible sensor can be determined by analyzing the parameters of the electric signal measuring devices 120. The flexible sensor provided by the application conforms to the kinematic design of a human body, and simultaneously realizes the determination of the directivity through the parameters measured by the plurality of electric signal measuring devices 120. The parameters may include electrical performance parameters such as capacitance and voltage.
It is understood that the number and the arrangement positions of the electrical signal measuring devices 120 in fig. 1 are only illustrative and are not limited to the specific number and arrangement positions. The number and the arrangement position of the electric signal measuring devices 120 can be freely adjusted according to the actual situation, and the number of the electric signal measuring devices 120 should be at least two due to the requirement of the directional function.
The flexible sensor provided by the embodiment of the application comprises a containing cavity 110 and at least two electric signal measuring devices 120; wherein: the accommodating chamber 110 is filled with liquid metal; the at least two electric signal measuring devices 120 are respectively communicated with the accommodating cavity 110, and a connecting line between any two electric signal measuring devices 120 and the accommodating cavity 110 has an included angle, so that after the liquid metal in the pressure accommodating cavity 110 is filled in the electric signal measuring devices 120, parameters of the at least two electric signal measuring devices 120 are detected, and the stress direction and the stress magnitude of the flexible sensor are determined according to the parameters. The application provides a flexible sensor sets up electric signal measuring device 120 through a plurality of directions at holding chamber 110, utilizes the mobility that holds liquid metal in chamber 110, when external force action extrusion, can flow into the liquid metal of equidimension in the electric signal measuring device 120 of equidirectional not, and then can confirm flexible sensor's atress direction and atress size according to liquid metal's inflow.
In another embodiment, as shown in fig. 2, the electrical signal measuring device 120 includes a valve structure 121 and a capacitive sensor 122; the capacitive sensor 122 includes a first electrode cavity 1221 and a second electrode cavity 1222; the first electrode cavity 1221 is spaced apart from the second electrode cavity 1222;
the first electrode cavity 1221 and the second electrode cavity 1222 are respectively communicated with the accommodating cavity 110 through the valve structure 121, and are used for inducing corresponding capacitance according to the capacity of the liquid conductive medium entering the first electrode cavity 1221 and the second electrode cavity 1222;
the valve structure 121 adjusts the valve opening according to the magnitude of the pressure and the direction;
when the flexible sensor is under pressure, the liquid conductive medium in the accommodating cavity 110 fills the first electrode cavity 1221 and the second electrode cavity 1222 through the valve structure 121.
Referring to fig. 2 and 3, a valve structure 121 is disposed adjacent to the receiving chamber 110, and the liquid metal in the receiving chamber 110 flows into the capacitive sensor 122 through the valve structure 121. In the use process of the flexible sensor, when a human body performs directional stretching action and performs directional stretching on the accommodating cavity 110 of the flexible sensor (for example, under the combined action of stretching and bending of the elbow part), the liquid metal in the accommodating cavity 110 is squeezed into the capacitive sensor 122 due to the fluidity of the liquid metal. In addition, because the valve structure 121 has elasticity, the valve structure 121 in each direction has different deformation under the action of external force in a certain direction, so that the valve structure 121 has different blocking capabilities on the liquid metal, the amount of the liquid metal flowing into the electric signal measuring device 120 in each direction is different, and the force direction and the force magnitude are judged according to the magnitude of the electric signal. Specifically, the valve structure 121 in the stretching direction is stretched longitudinally, the flow channel of the valve structure 121 is elongated and thinned, which is not beneficial to the liquid metal intrusion, and the valve structure 121 perpendicular to the stretching direction is stretched transversely, the flow channel of the valve structure 121 is enlarged, which is beneficial to the liquid metal intrusion, so that under the directional stretching action, different amounts of liquid metal rush into the capacitive sensors 122 in different directions, and thus the capacitances sensed by the capacitive sensors 122 in different directions are different.
In another embodiment, a plurality of support structures 111 are disposed within the receiving cavity 110, the support structures 111 extending toward the electrical signal measuring device 120 with the center of the receiving cavity 110.
The number of the supporting structures 111 and the number of the electrical signal measuring devices 120 may be equal, and the material of the supporting structures 111 side may be the same as the material of the substrate, for example, PDMS. The present embodiment can prevent the inlet position of the valve structure 121 from being blocked during the pressing of the receiving chamber 110 by providing the supporting structure 111 in the receiving chamber 110.
In another embodiment, as shown in fig. 4, the valve structure 121 includes a first conduit 1211 and a second conduit 1212 that are flexible and sleeved; the first end of the first conduit 1211 is connected to the accommodating cavity 110, the first end of the second conduit 1212 is connected to the capacitive sensor 122, the second end of the second conduit 1212 extends into the first conduit 1211 from the second end of the first conduit 1211 and is connected to the first conduit 1211, and the tube diameters of the first conduit 1211 and the second conduit 1212 are gradually reduced in a direction extending from the first end to the second end.
When the valve structure 121 is longitudinally stretched, as shown in fig. 5, the flow paths of the first conduit 1211 and the second conduit 1212 are in a contracted state, the second end of the first conduit 1211 is pressed against the second end of the second conduit 1212, so that the opening of the valve structure 121 is reduced, the larger the force applied, the smaller the opening of the valve structure 121 is until the opening is closed, and the liquid metal in the accommodating cavity 110 is difficult to flush into the capacitance sensor 122 through the valve structure 121. When the receiving chamber 110 is restored, the liquid metal flowing into the capacitive sensor 122 flows into the first conduit 1211 communicating with the receiving chamber 110 through the second conduit 1212, and then flows into the receiving chamber 110.
When the valve structure 121 is stretched in the transverse direction, as shown in fig. 6, the flow paths of the first conduit 1211 and the second conduit 1212 are in the expanded state, and the second end of the second conduit 1212 is no longer pressed by the second end of the first conduit 1211, so that the valve structure 121 is in the open state, and the liquid metal in the accommodating cavity 110 can easily pass through the valve structure 121, so that the liquid metal can easily flush into the capacitance sensor 122. When the receiving chamber 110 is restored, the liquid metal flowing into the capacitive sensor 122 flows into the first conduit 1211 communicating with the receiving chamber 110 through the second conduit 1212, and then flows into the receiving chamber 110.
The amount of liquid metal in the capacitive sensor 122 parallel to the stretching direction is less, and the amount of liquid metal in the capacitive sensor 122 perpendicular to the stretching direction is more, so that the capacitance value of the capacitive sensor 122 perpendicular to the stretching direction is high, and the capacitance value of the capacitive sensor 122 parallel to the stretching direction is low, so that the magnitude and the direction of the stress can be judged according to the magnitude of the capacitance.
The capacitive sensor 122 is formed by injecting a liquid metal layer between two flexible substrates, so that the two flexible substrates can be prevented from being adhered together during the manufacturing process. In another embodiment, the capacitive sensor 122 comprises an interdigital capacitor. The interdigital capacitor can be printed by a 3D printing method, the interdigital capacitor is arranged on a flexible substrate and is composed of a first electrode cavity 1221 and a second electrode cavity 1222 which are arranged in a crossed mode, the number and the distance of the interdigital can be selected according to the requirement of sensitivity, and a capacitor structure is formed between the first electrode cavity 1221 and the second electrode cavity 1222 and used for inducing corresponding capacitance according to the capacity of liquid metal. In another embodiment, the interdigital capacitor has a certain thickness, and in this embodiment, the interdigital capacitor has a certain thickness, for example, 20 μm, so as to prevent the first electrode cavity 1221 and the second electrode cavity 1222 from being stuck. The specific thickness of the interdigital capacitor can also be selected according to the actual situation, and the present embodiment is not particularly limited.
In another embodiment, referring to fig. 2, the electrical signal measuring device 120 further includes solid-state electrodes including a first electrode 131 and a second electrode 132; the first electrode 131 is connected to the first electrode chamber 1221, and the second electrode 132 is connected to the second electrode chamber 1222, for detecting a capacitance value of the capacitive sensor 122. And the position of the solid electrode is connected with an electric signal receiver, the capacitance value induced by each capacitor is measured, and the stress direction and the stress size of the flexible sensor are determined according to the measured capacitance values. The capacitive sensor 122 and the electrical signal receiver may be connected by a solid metal wire or a conductive polymer.
The present application further provides a method for manufacturing a flexible sensor, as shown in fig. 7, including steps S1 to S3, wherein:
step S1, providing a flexible substrate mold, filling a flexible substrate precursor in the flexible substrate mold and curing to form a flexible substrate;
step S2, preparing a containing cavity and at least two electric signal measuring devices on the flexible substrate, and filling a liquid conductive medium in the containing cavity; the electric signal measuring devices comprise valve structures and capacitance sensors, the capacitance sensors are communicated with the accommodating cavities through the valve structures, and connecting lines between any two electric signal measuring devices and the accommodating cavities form included angles;
and step S3, packaging the liquid conductive medium to finish the preparation of the flexible sensor.
According to the preparation method of the flexible sensor, the accommodating cavity and the valve structure are prepared on the flexible substrate, the accommodating cavity is filled with the liquid conductive medium, the capacitive sensor is prepared in at least two directions of the accommodating cavity, the liquid conductive medium in the accommodating cavity has fluidity, when the capacitive sensor is extruded under the action of external force, different amounts of the liquid conductive medium flow into the capacitive sensors in different directions, and then the stress direction and the stress size of the flexible sensor can be determined according to the inflow amount of the liquid conductive medium.
In one embodiment, the providing a flexible substrate mold, filling a flexible substrate precursor in the flexible substrate mold and curing to form a flexible substrate includes:
providing a rigid substrate;
printing a first mold on one side of the rigid substrate according to the corresponding shapes of the accommodating cavity and the electric signal measuring device and curing to obtain the flexible substrate mold;
and filling a flexible substrate precursor into the flexible substrate mould until the flexible substrate mould is filled with the precursor and solidified to form the flexible substrate.
When the flexible substrate mould is printed, the flexible substrate mould can be printed on the surface of the rigid substrate through a 3D printing technology. The material for forming the mold comprises terpolymer ABS of polyvinyl chloride (PVC), Polyamide (PA) and styrene, and the like, and the flexible substrate can be Polydimethylsiloxane (PDMS), Polyimide (PI), polymethyl methacrylate (PMMA) and the like.
In one embodiment, the preparing the accommodating cavity and the at least two electrical signal measuring devices on the flexible substrate includes:
printing the accommodating cavity on the flexible substrate, and printing the electric signal measuring device in at least two directions of the accommodating cavity;
and filling a liquid conductive medium into the accommodating cavity, and oxidizing the surface of the liquid conductive medium to form a fixed shape.
In this embodiment, by using a 3D printing technique, the accommodating cavity is first printed on the flexible substrate, the accommodating cavity is filled with the liquid conductive medium, and then the plurality of electrical signal measuring devices are printed in different directions of the prepared accommodating cavity, thereby completing the preparation of the accommodating cavity and the electrical signal measuring devices.
In one embodiment, the preparing the accommodating cavity and the at least two electrical signal measuring devices on the flexible substrate includes:
printing a second mold on the flexible substrate and/or the flexible substrate mold according to the corresponding shapes of the accommodating cavity and the electric signal measuring device and curing;
filling a precursor liquid material into the second mold until the second mold is filled with the precursor liquid material and is solidified;
removing the second mold located in the accommodating cavity and the electrical signal measuring device;
and filling a liquid conductive medium into the accommodating cavity, and oxidizing the surface of the liquid conductive medium to form a fixed shape.
In the embodiment, when the accommodating cavity and the electrical signal measuring device are prepared, the second mold is printed on the flexible substrate and/or the flexible substrate mold according to the shapes of the accommodating cavity and the electrical signal measuring device, and the accommodating cavity, the valve structure and the capacitive sensor are prepared by filling the flexible substrate precursor into the second mold. Because the hard mould material solidifies fast, the structure is difficult for collapsing, the three-dimensional structure that the chamber and the signal of telecommunication measuring device that use hard mould preparation are more accurate. In addition, different size requirements of the accommodating cavity and the electric signal measuring device can be met by controlling the height of the die or printing a plurality of layers of dies in a stacking mode. The material of the containing cavity and the valve structure can be the same as that of the flexible substrate, and is Polydimethylsiloxane (PDMS), Polyimide (PI), polymethyl methacrylate (PMMA) and the like. The liquid conductive medium can be liquid metal, and it should be noted that if only one layer of structure is provided, there is no special requirement on the oxidation degree of the liquid metal; if a hard mold needs to be printed on the surface of the upper layer flexible substrate of the liquid metal, the liquid metal with the oxidation degree of 1-3 wt% is adopted, namely the ratio of gallium oxide to gallium is 1-3 wt%, and the liquid metal in the state is easy to form and can play a certain supporting role. The filling amount (the volume of the accommodating cavity) of the liquid conductive medium is more than or equal to the total volume of the whole capacitive sensor.
In an embodiment, referring to fig. 2, the electrical signal measuring device further comprises solid-state electrodes connected to the capacitive sensor, the solid-state electrodes comprising a first electrode and a second electrode;
printing the capacitive sensor 122 in at least two directions of the receiving cavity by a 3D printing technique, the capacitive sensor 122 comprising a first electrode cavity 1221 and a second electrode cavity 1222;
printing a layer of the liquid conductive medium on the corresponding positions of the valve structure and the capacitance sensor by a 3D printing technology;
the first electrode 131 is disposed in the first electrode chamber 1221, and the second electrode 132 is disposed in the second electrode chamber 1222.
The liquid conductive medium used in the process can be liquid metal with the oxidation degree of 1.0 wt% -3.0 wt%, so that the forming is easier, and the upper and lower flexible substrates can be prevented from being adhered during packaging; and the flexible substrate has better interface bonding and good wettability. The solid-state electrode may be disposed adjacent to the valve structure 121, and thus, the solid-state electrode may be prevented from being debonded from the flexible substrate during the stretching process.
In one embodiment, the encapsulating the liquid conductive medium includes:
printing an upper layer mold on the flexible substrate mold and/or the flexible substrate according to the corresponding shapes of the accommodating cavity and the electric signal measuring device and curing;
filling the flexible substrate precursor in the upper layer die until the flexible substrate precursor is filled and solidified, so that the flexible substrate precursor coats the liquid conductive medium;
and removing the flexible substrate mould and the upper layer mould to obtain the flexible sensor.
Specifically, during packaging, an upper layer mold of the accommodating cavity, the valve structure and the corresponding structure of the capacitive sensor is printed on the flexible substrate mold and/or the flexible substrate, a flexible substrate precursor is filled into the upper layer mold, the flexible substrate precursor is coated with a liquid conductive medium, and the upper layer flexible substrate is formed after curing, so that the accommodating cavity, the valve structure and the capacitive sensor are packaged. In addition, after the second mold located inside the containing cavity and the electric signal measuring device is removed, the upper mold of the containing cavity, the valve structure and the corresponding structure of the capacitive sensor can be printed only on the second mold outside the containing cavity, and the packaging is completed by filling the flexible substrate precursor. Of course, the second mold of the accommodating cavity and the corresponding position of the electrical signal measuring device can be removed, and when packaging is performed, the upper mold is printed on the flexible substrate mold, and the packaging is completed by filling the flexible substrate precursor. If the prepared flexible sensor has special shape requirements, a hard mold with a corresponding shape can be printed on the surface of the upper layer flexible substrate, and then a flexible substrate precursor is filled in, and the flexible substrate precursor is solidified to form a corresponding shape.
Since there are differences in the structure of the flexible sensor used at different locations, the present application will be described by taking as an example a method of manufacturing a flexible sensor having four electrical signal measuring devices for the knee region.
The preparation method of the flexible sensor specifically comprises the following steps:
(1) printing a first mold on the polylactic acid rigid substrate according to the corresponding shapes of the four electric signal measuring devices 120 and one accommodating cavity 110 by using a PVC material through a 3D printing technology and curing to obtain a flexible substrate mold, wherein the height of the first mold is 20 mm.
(2) And filling the PDMS flexible substrate precursor liquid material into the flexible substrate mold until the flexible substrate mold is filled. Heating to 80 ℃ by a heating plate, and heating for 20min to finish curing to form the PDMS flexible substrate.
(3) Using a PDMS flexible substrate precursor liquid material, the accommodating chamber 110 having the support structure 111, the capacitive sensors 122, and the valve structures 121 corresponding to each capacitive sensor 122 are prepared by 3D printing on the PDMS flexible substrate and cured. Or printing and curing a second mold on the PDMS flexible substrate and/or the flexible substrate mold using a PVC material according to the shapes of the accommodating cavity 110, the capacitive sensor 122, and the valve structure 121, then filling a liquid material of a precursor of the PDMS flexible substrate into the second mold until the second mold is filled and cured, and removing the accommodating cavity and the second mold having the corresponding shapes of the electrical signal measuring device. The capacitive sensor 122 area is rectangular, 4cm by 3 cm. The four electrical signal measuring devices 120 form a cross; the receiving chamber 110 is circular and has a diameter of 7 cm.
(4) The liquid metal EGaIn is filled in the liquid conductive medium storage region of the accommodating chamber 110, so that the surface of the liquid metal is naturally oxidized to form a fixed shape and a fixed region.
(5) A corresponding pattern was printed in the capacitance sensing region by a 3D printing method using EGaIn having a high viscosity and an oxidation degree of 1.7 wt% in a thickness of 20 μm according to the shapes of the valve structure 121 and the capacitive sensor 122.
(6) The solid electrode is arranged near the valve structure 121, the deformation of the middle position is large, and the deformation of the two sides is small during stretching, so that the solid electrode and the flexible substrate are prevented from being debonded during stretching.
(7) And printing an upper layer mold on the flexible substrate mold, filling a flexible substrate precursor liquid material on the surface of the liquid metal and the solid electrode again, and heating and curing to complete the integral packaging of the flexible sensor.
(8) And removing the rigid substrate and the upper layer die, and connecting the solid-state electrode with an electric signal receiver to finish the preparation of the flexible sensor.
The present application further provides a method for using the flexible sensor, as shown in fig. 8, the method for using the flexible sensor includes steps 810 to 830, where:
and 830, determining the stress direction and the stress magnitude of the surface of the body to be tested according to the parameters.
The present application illustrates the use of the flexible sensor for the knee region prepared as described above. The method is characterized in that the accommodating cavity 110 of the prepared flexible sensor is arranged on the surface of a body to be measured, and the method specifically comprises the following steps of:
(1) two electric signal measuring devices 120 of the flexible sensor are pasted to the knee part in parallel with the muscle stretching direction, and the other two electric signal measuring devices 120 are pasted to the two sides of the knee in perpendicular to the muscle stretching direction. The flexible sensor is adhered around the accommodating cavity 110 and the electrical signal measuring device 120 in a point mode through an adhesive dressing, so that the pressing of the accommodating cavity 110 and the stretching process of the electrical signal measuring device 120 are relatively independent.
(2) The knee can produce the squeezing action to holding chamber 110 when crooked, simultaneously, parallel and when the valve structure 121 of atress direction received longitudinal stretching, valve structure 121 closed, and liquid metal is more difficult to gush into electric signal measuring device 120, and perpendicular and valve structure 121 of atress direction receive transverse stretching, valve structure 121 opening enlarges, and liquid metal more easily gushes into electric signal measuring device 120. The amount of liquid metal poured into the capacitance sensors 122 in the four electrical signal measuring devices 120 is different, the amount of liquid metal in the capacitance sensors 122 parallel to the stretching direction is less, and the amount of liquid metal in the capacitance sensors 122 perpendicular to the stretching direction is more, so that the capacitance value of the vertical capacitance sensor 122 is high, and the capacitance value of the parallel capacitance sensor 122 is low, and therefore, the motion state of the knee is judged to be curved, the difference between the two capacitance values is larger, and the degree of curve of the knee is larger. The motion state of the knee is deduced from the difference of the electrical signals.
(3) When the liquid conductive medium storage area is restored, the liquid metal easily flows out of the electric signal measuring device 120 and returns to the accommodating chamber 110 due to the valve structure 121.
(4) Repeating the above circulation actions to complete the measurement of the knee motion state.
It should be understood that, although the steps in the flowcharts of fig. 7 and 8 are shown in order as indicated by the arrows, the steps are not necessarily performed in order as indicated by the arrows. The steps are not performed in the exact order shown and described, and may be performed in other orders, unless explicitly stated otherwise. Moreover, at least some of the steps in fig. 7 and 8 may include multiple sub-steps or multiple stages that are not necessarily performed at the same time, but may be performed at different times, and the order of performing the sub-steps or stages is not necessarily sequential, but may be performed alternately or alternately with other steps or at least some of the sub-steps or stages of other steps.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (14)
1. A flexible sensor is characterized by comprising a containing cavity and at least two electric signal measuring devices; wherein:
the accommodating cavity is filled with a liquid conductive medium;
the electric signal measuring devices are communicated with the containing cavity, any two electric signal measuring devices are connected with a connecting line between the containing cavities to form included angles, liquid conductive media in the containing cavities are filled into the electric signal measuring devices respectively under pressure, parameters of the electric signal measuring devices are detected, and the stress direction and the stress size of the flexible sensor are determined according to the parameters.
2. The flexible sensor of claim 1, wherein the electrical signal measurement device comprises a valve structure and a capacitive sensor; the capacitive sensor comprises a first electrode cavity and a second electrode cavity; the first electrode cavity and the second electrode cavity are arranged at intervals;
the first electrode cavity and the second electrode cavity are respectively communicated with the accommodating cavity through the valve structure and used for inducing corresponding capacitance according to the capacity of the liquid conductive medium entering the first electrode cavity and the second electrode cavity;
the valve structure is used for adjusting the valve opening according to the magnitude of the pressure and the direction;
when the flexible sensor is under pressure, the liquid conductive medium in the containing cavity is filled into the first electrode cavity and the second electrode cavity through the valve structure.
3. The flexible sensor of claim 2, wherein the electrical signal measurement device further comprises solid state electrodes comprising a first electrode and a second electrode; the first electrode is connected with the first electrode cavity, and the second electrode is connected with the second electrode cavity and used for detecting the capacitance value of the capacitance sensor.
4. The flexible sensor of claim 2, wherein the valve structure comprises a first conduit and a second conduit that are nested;
the first end of the first conduit is connected with the accommodating cavity, the first end of the second conduit is connected with the capacitive sensor, and the second end of the second conduit extends into the first conduit from the second end of the first conduit and is connected with the first conduit.
5. The flexible sensor of claim 2, wherein the capacitive sensor comprises an interdigital capacitor.
6. The flexible sensor of claim 1, wherein a plurality of support structures are disposed within the receiving cavity, the support structures extending along a center of the receiving cavity toward the electrical signal measuring device.
7. The flexible sensor of claim 1, wherein the included angles of the connecting lines between any two adjacent electrical signal measuring devices and the accommodating cavity are equal.
8. A method of making a flexible sensor, the method comprising:
s1, providing a flexible substrate mould, filling a flexible substrate precursor in the flexible substrate mould and solidifying to form a flexible substrate;
s2, preparing a containing cavity and at least two electric signal measuring devices on the flexible substrate, and filling a liquid conductive medium in the containing cavity; the electric signal measuring devices comprise valve structures and capacitance sensors, the capacitance sensors are communicated with the accommodating cavities through the valve structures, and connecting lines between any two electric signal measuring devices and the accommodating cavities form included angles;
and S3, packaging the liquid conductive medium to finish the preparation of the flexible sensor.
9. The method for manufacturing a flexible sensor according to claim 8, wherein the step S1 includes:
providing a rigid substrate;
printing a first mold on the surface of the rigid substrate according to the corresponding shapes of the accommodating cavity and the electric signal measuring device, and curing to obtain the flexible substrate mold;
and filling a flexible substrate precursor into the flexible substrate mould until the flexible substrate mould is filled with the precursor and solidified to form the flexible substrate.
10. The method for manufacturing a flexible sensor according to claim 8, wherein the step S2 includes:
printing the accommodating cavity on the flexible substrate, and printing the electric signal measuring device in at least two directions of the accommodating cavity;
and filling a liquid conductive medium into the accommodating cavity, and oxidizing the surface of the liquid conductive medium to form a fixed shape.
11. The method for manufacturing a flexible sensor according to claim 8, wherein the step S2 includes:
printing a second mold on the flexible substrate and/or the flexible substrate mold according to the corresponding shapes of the accommodating cavity and the electric signal measuring device and curing;
filling a precursor liquid material into the second mold until the second mold is filled with the precursor liquid material and is solidified;
removing the second mold located in the accommodating cavity and the electrical signal measuring device;
and filling a liquid conductive medium into the accommodating cavity, and oxidizing the surface of the liquid conductive medium to form a fixed shape.
12. The method of claim 8, wherein the electrical signal measuring device further comprises a solid-state electrode connected to the capacitive sensor.
13. The method for manufacturing a flexible sensor according to claim 8, wherein the step S3 includes:
printing an upper layer mold on the flexible substrate mold and/or the flexible substrate according to the corresponding shapes of the accommodating cavity and the electric signal measuring device and curing;
filling the flexible substrate precursor in the upper layer die until the flexible substrate precursor is filled and solidified, so that the flexible substrate precursor coats the liquid conductive medium;
and removing the flexible substrate mould and the upper layer mould to obtain the flexible sensor.
14. Use of a flexible sensor according to any of claims 1 to 7, wherein the method comprises:
placing the accommodating cavity of the flexible sensor on the surface of the body to be measured, and adhering the plurality of electric signal measuring devices to different directions of the surface of the body to be measured;
acquiring parameters of each electric signal measuring device;
and determining the stress direction and stress magnitude of the surface of the body to be tested according to the parameters.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110987089A (en) * | 2019-12-26 | 2020-04-10 | 华中科技大学 | Multifunctional flexible metamorphic sensor with single metal layer electrode, preparation method and application |
| US20200249197A1 (en) * | 2019-01-31 | 2020-08-06 | Kuan-Chien Chou | Stretchable and flexible sensing device |
| CN111551294A (en) * | 2020-05-21 | 2020-08-18 | 浙江大学 | Flexible pressure sensor based on liquid metal photocuring printing technology |
| CN113776699A (en) * | 2021-09-18 | 2021-12-10 | 太原理工大学 | Positive pressure insensitive interdigital capacitive strain sensor and preparation method thereof |
| CN115014590A (en) * | 2022-06-16 | 2022-09-06 | 东华大学 | Piezoelectric sensor and preparation method thereof |
| US11486744B1 (en) | 2021-08-20 | 2022-11-01 | Toyota Research Institute, Inc. | Valve based deformable sensor having rigidity adjustment capability |
| CN116237321A (en) * | 2023-03-15 | 2023-06-09 | 清华大学深圳国际研究生院 | Flexible pipeline robot |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090091329A1 (en) * | 2006-03-15 | 2009-04-09 | Advanced Hydrocarbon Mapping As | Electric field sensor for marine environments |
| US20100238636A1 (en) * | 2009-03-20 | 2010-09-23 | Stephen Mascaro | Stretchable circuit configuration |
| JP2014528079A (en) * | 2011-09-24 | 2014-10-23 | プレジデント・アンド・フェロウズ・オブ・ハーバード・カレッジ | Artificial skin and elastic strain sensor |
| US20150292968A1 (en) * | 2012-10-27 | 2015-10-15 | President And Fellows Of Harvard College | Multi-axis force sensing soft artificial skin |
| CN105025809A (en) * | 2013-03-15 | 2015-11-04 | C·R·巴德股份有限公司 | Urine monitoring systems and methods |
| US20180243924A1 (en) * | 2015-09-08 | 2018-08-30 | The Regents Of The University Of California | Tactile sensors and methods of fabricating tactile sensors |
| CN208736580U (en) * | 2018-10-22 | 2019-04-12 | 河北工业大学 | A kind of hybrid flexible touch sensation sensor |
| CN109724720A (en) * | 2018-11-20 | 2019-05-07 | 浙江大学 | A kind of condenser type pliable pressure sensor and preparation method thereof |
| CN109788657A (en) * | 2018-12-26 | 2019-05-21 | 浙江清华柔性电子技术研究院 | The printing preparation method of device |
| WO2019119286A1 (en) * | 2017-12-20 | 2019-06-27 | 深圳先进技术研究院 | Flexible electronic pressure sensing device and preparation method therefor |
| CN110095211A (en) * | 2019-05-24 | 2019-08-06 | 清华大学深圳研究生院 | A kind of stretchable tactile sensor array and preparation method thereof |
| CN110132457A (en) * | 2019-05-28 | 2019-08-16 | 华中科技大学 | A kind of flexible sensor of multifunctional sensing and preparation method thereof |
-
2019
- 2019-12-17 CN CN201911300627.8A patent/CN110987246B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090091329A1 (en) * | 2006-03-15 | 2009-04-09 | Advanced Hydrocarbon Mapping As | Electric field sensor for marine environments |
| US20100238636A1 (en) * | 2009-03-20 | 2010-09-23 | Stephen Mascaro | Stretchable circuit configuration |
| JP2014528079A (en) * | 2011-09-24 | 2014-10-23 | プレジデント・アンド・フェロウズ・オブ・ハーバード・カレッジ | Artificial skin and elastic strain sensor |
| US20150292968A1 (en) * | 2012-10-27 | 2015-10-15 | President And Fellows Of Harvard College | Multi-axis force sensing soft artificial skin |
| CN105025809A (en) * | 2013-03-15 | 2015-11-04 | C·R·巴德股份有限公司 | Urine monitoring systems and methods |
| US20180243924A1 (en) * | 2015-09-08 | 2018-08-30 | The Regents Of The University Of California | Tactile sensors and methods of fabricating tactile sensors |
| WO2019119286A1 (en) * | 2017-12-20 | 2019-06-27 | 深圳先进技术研究院 | Flexible electronic pressure sensing device and preparation method therefor |
| CN208736580U (en) * | 2018-10-22 | 2019-04-12 | 河北工业大学 | A kind of hybrid flexible touch sensation sensor |
| CN109724720A (en) * | 2018-11-20 | 2019-05-07 | 浙江大学 | A kind of condenser type pliable pressure sensor and preparation method thereof |
| CN109788657A (en) * | 2018-12-26 | 2019-05-21 | 浙江清华柔性电子技术研究院 | The printing preparation method of device |
| CN110095211A (en) * | 2019-05-24 | 2019-08-06 | 清华大学深圳研究生院 | A kind of stretchable tactile sensor array and preparation method thereof |
| CN110132457A (en) * | 2019-05-28 | 2019-08-16 | 华中科技大学 | A kind of flexible sensor of multifunctional sensing and preparation method thereof |
Non-Patent Citations (3)
| Title |
|---|
| L.E. HELSETH: "Interdigitated electrodes based on liquid metal encapsulated in elastomer as capacitive sensors and triboelectric nanogenerators", vol. 50, pages 266 - 272 * |
| YIDA LI 等: "A Soft Polydimethylsiloxane Liquid Metal Interdigitated Capacitor Sensor and Its Integration in a Flexible Hybrid System for On-Body Respiratory Sensing", vol. 12, no. 9, pages 1 - 12 * |
| 卢凯 等: "基于PVDF 的柔性压力传感器阵列的制备及仿真研究", vol. 35, no. 3, pages 40 - 43 * |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20200249197A1 (en) * | 2019-01-31 | 2020-08-06 | Kuan-Chien Chou | Stretchable and flexible sensing device |
| CN110987089A (en) * | 2019-12-26 | 2020-04-10 | 华中科技大学 | Multifunctional flexible metamorphic sensor with single metal layer electrode, preparation method and application |
| CN110987089B (en) * | 2019-12-26 | 2021-01-15 | 华中科技大学 | Multifunctional flexible metamorphic sensor with single metal layer electrode, preparation method and application |
| CN111551294A (en) * | 2020-05-21 | 2020-08-18 | 浙江大学 | Flexible pressure sensor based on liquid metal photocuring printing technology |
| CN111551294B (en) * | 2020-05-21 | 2021-03-30 | 浙江大学 | Flexible pressure sensor based on liquid metal photocuring printing technology |
| US11486744B1 (en) | 2021-08-20 | 2022-11-01 | Toyota Research Institute, Inc. | Valve based deformable sensor having rigidity adjustment capability |
| CN113776699A (en) * | 2021-09-18 | 2021-12-10 | 太原理工大学 | Positive pressure insensitive interdigital capacitive strain sensor and preparation method thereof |
| CN113776699B (en) * | 2021-09-18 | 2024-01-30 | 太原理工大学 | Positive pressure insensitive interdigital capacitive strain sensor and preparation method thereof |
| CN115014590A (en) * | 2022-06-16 | 2022-09-06 | 东华大学 | Piezoelectric sensor and preparation method thereof |
| CN115014590B (en) * | 2022-06-16 | 2023-10-20 | 东华大学 | Piezoelectric sensor and preparation method thereof |
| CN116237321A (en) * | 2023-03-15 | 2023-06-09 | 清华大学深圳国际研究生院 | Flexible pipeline robot |
| CN116237321B (en) * | 2023-03-15 | 2023-10-17 | 清华大学深圳国际研究生院 | Flexible pipeline robot |
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