CN114608716A - Flexible temperature and pressure bimodal sensor and preparation and test method thereof - Google Patents
Flexible temperature and pressure bimodal sensor and preparation and test method thereof Download PDFInfo
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- CN114608716A CN114608716A CN202210300789.7A CN202210300789A CN114608716A CN 114608716 A CN114608716 A CN 114608716A CN 202210300789 A CN202210300789 A CN 202210300789A CN 114608716 A CN114608716 A CN 114608716A
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- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/34—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using capacitative elements
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- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
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Abstract
The invention relates to a flexible temperature and pressure bimodal sensor and a preparation and test method thereof, relating to the technical field of sensors. The flexible temperature and pressure dual-mode sensor comprises a first flexible electrode, a second flexible electrode and an ionic gel layer, wherein the ionic gel layer is fixed between the first flexible electrode and the second flexible electrode, and the ionic gel layer has a porous structure. According to the invention, the upper surface and the lower surface of the ionic gel layer are respectively provided with the flexible electrodes to form a sandwich structure, the sensitive layers of pressure and temperature adopt the same material of the ionic gel as the sensitive response layer, and the ionic gel type pressure and temperature sensor has two functions of monitoring pressure and temperature simultaneously. The principle of temperature response is that the change of electrical properties (resistance and capacitance) of an ionic gel layer is caused by the fact that the movement rates of ions at different temperatures are different; the principle of pressure response is to utilize the change of the distance between the ionic gel layer and the flexible electrodes on the upper and lower surfaces under the action of pressure, so as to influence the capacitance change of the ionic gel layer.
Description
Technical Field
The invention relates to the technical field of sensors, in particular to a flexible temperature and pressure bimodal sensor and a preparation and test method thereof.
Background
With the development of artificial intelligence, health monitoring and human body repair technology, the development of electronic skin capable of simulating the function of human skin, acquiring external environment information and interacting with the external environment information becomes a research hotspot. Due to the complexity of external stimulation, the multifunctional electronic skin with multiple sensing functions and capable of sensing and distinguishing multiple types of stimulation simultaneously is a future development trend of the electronic skin. At present, the multifunctional electronic skin mainly integrates a plurality of devices with different functions, and the method has high cost and is difficult to miniaturize and even miniaturize.
In recent years, multi-parameter detection of a single device is attempted by stacking multiple sensitive layer materials, but the device is greatly limited in the precision of simultaneously detecting and effectively distinguishing various stimuli due to the fact that the multiple stimuli easily cause interference of output signals.
Disclosure of Invention
The invention provides a flexible temperature and pressure bimodal sensor and a preparation and test method thereof, aiming at solving one or more of the technical problems.
The technical scheme for solving the technical problems is as follows: the utility model provides a flexible temperature pressure bimodulus sensor, includes first flexible electrode, second flexible electrode and ion gel layer, the ion gel layer is fixed between first flexible electrode and the second flexible electrode, the ion gel layer has porous structure.
The invention has the beneficial effects that: according to the flexible temperature and pressure dual-mode sensor, the upper surface and the lower surface of the ionic gel layer are respectively provided with the flexible electrodes to form a sandwich structure, the sensitive layers of pressure and temperature adopt the same material of the ionic gel as the sensitive response layer, and the flexible temperature and pressure dual-mode sensor has two functions of monitoring the pressure and the temperature simultaneously. The principle of temperature response is that the change of electrical properties (resistance and capacitance) of an ionic gel layer is caused by the fact that the movement rates of ions at different temperatures are different; the principle of pressure response is to utilize the change of the distance between the ionic gel layer and the flexible electrodes on the upper and lower surfaces under the action of pressure, so as to influence the capacitance change of the ionic gel layer.
The flexible temperature and pressure dual-mode sensor has the advantages in small (micro) modeling integration, and can solve the problem of miniaturization of the existing multifunctional electronic skin.
On the basis of the technical scheme, the invention can be further improved as follows.
Further, the preparation material of the ionic gel layer comprises ionic liquid and polymer.
Further, the ionic liquid includes: any one of tris (2-hydroxyethyl) ethyl methyl ammonium sulfate, 1-ethyl-3-methylimidazole hexafluorophosphate, 1-ethyl-3-methylimidazole bifluoromethane sulfonate and 1-ethyl-3-methylimidazole bifluoromethane sulfonate.
The beneficial effect of adopting the further scheme is that: the ionic liquids are water insoluble ionic liquids and can be compatible with the following wet etching.
Further, the polymer is a vinylidene fluoride-hexafluoropropylene copolymer.
The beneficial effect of adopting the further scheme is that: the polymer has excellent chemical stability and elasticity, is not easy to dissolve in the etching process, and is easy to deform when being subjected to external force.
Further, the first flexible electrode and the second flexible electrode each include a flexible substrate and a conductive layer obtained by evaporating a metal film or printing a conductive material on the flexible substrate.
A preparation method of a flexible temperature and pressure dual-mode sensor comprises the following steps:
s1, preparing a first flexible electrode and a second flexible electrode;
s2, preparing an ionic gel precursor solution, and putting the foam metal into the prepared ionic gel precursor solution to enable the ionic gel precursor solution to completely fill the pores of the foam metal;
s3, solidifying the foam metal filled with the ionic gel precursor solution to form an ionic gel material;
s4, soaking the ionic gel material obtained in the step S3 in a preset solution to enable the foam metal to be completely dissolved to obtain an ionic gel layer with a porous structure;
and S5, fixedly connecting the upper surface and the lower surface of the ionic gel layer obtained in the step S4 with the first flexible electrode and the second flexible electrode respectively to form the flexible temperature and pressure dual-mode sensor.
The invention has the beneficial effects that: according to the preparation method, the foam metal is placed into the prepared ionic gel precursor solution and dissolved after solidification, so that the ionic gel layer with a porous structure can be formed by utilizing the foam metal, the operation is simple, and the original ions cannot be damaged.
Further, in S2, preparing an ionic gel precursor solution includes dissolving the polymer in a solvent, adding an ionic liquid, mixing and stirring to form an ionic gel precursor solution;
in S3, the curing temperature is 70-150 ℃;
in S4, the predetermined solution is aqua regia.
The beneficial effect of adopting the further scheme is that: aqua regia can dissolve metal materials, but aqua regia does not dissolve the ionic gel materials and polymers.
The testing method of the flexible temperature and pressure dual-mode sensor comprises the following steps: and respectively obtaining the changes of the temperature and the pressure on the electrical properties of the flexible bimodal sensor by switching the test frequency.
The invention has the beneficial effects that: according to the testing method, the relation between the electrical property of the ionic gel layer and the input frequency is utilized, so that the change of the temperature and the pressure on the electrical property of the flexible dual-mode sensor can be obtained, and the mutual interference between signals is effectively avoided.
Further, the method comprises the following steps: testing the impedance change of the flexible bimodal sensor under the first test frequency condition to obtain temperature change, and testing the capacitance change of the flexible bimodal sensor under the second test frequency condition to obtain pressure change; wherein the second test frequency is higher than the first test frequency.
The beneficial effect of adopting the further scheme is that: the electrical properties of the ionic gel material change with frequency, and the curves of the impedance change with frequency can be seen in fig. 3a and 3b, in which the impedance is mainly divided into 3 sections, and the diagonal line segment 1 is when the input frequency is very low (ω < ω)1Omega is frequency) material is expressed as an ion capacitance mode, and the capacitance value is formed by the upper surface, the lower surface and the flexibilityThe micro-capacitance of the contact between the electrodes is characterized by an electric double layer. The smoothing section 2 is the input frequency when the input frequency is the intermediate frequency (ω)1＜ω＜ω2) When the ion gel layer is formed, the impedance value is maintained and the curve becomes smooth, so that the ion gel layer as a whole is an ion conductor and the impedance Z isreR is approximately distributed; the diagonal line 3 has a high frequency (ω > ω) when the input frequency is high2) The ionic gel layer as a whole exhibits a molecular capacitance characteristic, Zre≈1/ωC；
Therefore, when the input frequency is low frequency (ω < ω)1Omega is frequency), when being stimulated by external pressure (P), the ionic gel layer and the flexible electrode can cause the contact area between the ionic gel layer and the flexible electrode to further cause the micro-capacitance to change; in addition, when external temperature changes, the flexible temperature and pressure sensor is heated, and the ion moving rate can also be changed, so that the concentration of ions between the positive electrode and the negative electrode is changed, and further the change of micro-capacitance is caused, therefore, the change of the capacitance is influenced by the double stimulation of temperature and pressure, the signal interference is strong, and the distinguishing is difficult.
When the input frequency is the first test frequency, i.e. the intermediate frequency (ω)1＜ω＜ω2) When the electrode is in contact with the electrode, the resistance R is d/delta A, R is the resistance, d is the thickness of the ionic gel layer, delta is the ionic conductivity, and A is the contact area with the electrode; wherein the delta value changes with temperature, thereby causing a change in resistance, which decreases with increasing temperature, as previously described for the impedance ZreR, thus impedance ZreAnd becomes small, and the external pressure can be ignored to the resistance change at this time, as shown in fig. 3a, wherein the solid line is the impedance variation with frequency curve at low temperature, and the dotted line is the impedance variation with frequency curve at high temperature.
When the input frequency is a second test frequency, i.e. high frequency (ω > ω)2) When the external stimulus is applied, d becomes smaller, so that C becomes larger, as mentioned above, Z is largerre1/ω C, so impedance ZreBecomes smaller and the temperature-to-capacitance change is negligibly small at this time, as shown in fig. 3b, where the solid line is notThe curve of the impedance with frequency under the condition of external pressure, and the dotted line is the curve of the impedance with frequency under the condition of external pressure (P).
In conclusion, temperature and pressure monitoring can be realized by simply switching the test frequency in the actual test process.
Drawings
FIG. 1 is a schematic structural diagram of a flexible temperature pressure dual-mode sensor of the present invention;
FIG. 2 is a schematic flow chart of a method for manufacturing a flexible temperature pressure bimodal sensor according to the present invention;
FIG. 3a is a schematic diagram of the operation of the flexible temperature pressure dual-mode sensor of the present invention when stimulated by temperature;
FIG. 3b is a schematic diagram of the operation of the flexible temperature pressure dual-mode sensor of the present invention when stimulated by pressure;
FIG. 4 is a graph of the test results of the impedance of the flexible temperature pressure dual-modal sensor of the present invention as a function of frequency;
FIG. 5 is a temperature response plot obtained for a flexible temperature pressure dual-mode sensor of the present invention at a first test frequency;
FIG. 6 is a graph of the pressure response of the flexible temperature pressure dual-mode sensor of the present invention at a second test frequency.
In the drawings, the components represented by the respective reference numerals are listed below:
1. a first flexible electrode; 2. a second flexible electrode; 3. an ionic gel layer.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the invention and are not to be construed as limiting the invention.
As shown in fig. 1, the present invention provides a flexible temperature and pressure dual-mode sensor, comprising a first flexible electrode 1, a second flexible electrode 2 and an ionic gel layer 3, wherein the ionic gel layer 3 is fixed between the first flexible electrode 1 and the second flexible electrode 2, and the ionic gel layer 3 has a porous structure.
The first flexible electrode 1 and the second flexible electrode 2 of the present invention each include a flexible substrate and a conductive layer obtained by evaporating a metal film or printing a conductive material on the flexible substrate. Specifically, a vacuum evaporation method can be used to deposit metal on the surface of the flexible substrate or print conductive ink, such as poly 3, 4-ethylenedioxythiophene: polystyrene sulfonic acid (PEDOT: PSS), silver nanowires, copper inks, and the like; wherein the flexible substrate adopts polyethylene terephthalate (PDMS) or Polyimide (PI).
The preparation material of the ionic gel layer comprises ionic liquid and polymer. The ionic liquid comprises: tris (2-hydroxyethyl) sulfatoethylmethylammonium ([ MTEOA)]+[MeOSO3]-) 1-ethyl-3-methylimidazolium hexafluorophosphate ([ EMIM ]]+[PF6]-) 1-Ethyl-3-methylimidazolium bis (fluoromethanesulfonate) [ EMIm ]]+[Tf2N]-) 1-Ethyl-3-methylimidazolium bis (fluoromethanesulfonate) [ EMIm ]]+[TFSI]-) Any one of them. The polymer is vinylidene fluoride-hexafluoropropylene copolymer (P (VDF-HFP)).
According to the flexible temperature and pressure dual-mode sensor, the upper surface and the lower surface of the ionic gel layer are respectively provided with the flexible electrodes to form a sandwich structure, the sensitive layers of pressure and temperature adopt the same material of the ionic gel as the sensitive response layer, and the flexible temperature and pressure dual-mode sensor has two functions of monitoring the pressure and the temperature simultaneously. The principle of temperature response is that the change of electrical properties (resistance and capacitance) of an ionic gel layer is caused by the fact that the movement rates of ions at different temperatures are different; the principle of pressure response is to utilize the change of the distance between the ionic gel layer and the flexible electrodes on the upper and lower surfaces under the action of pressure, so as to influence the capacitance change of the ionic gel layer.
The preparation method of the flexible temperature and pressure dual-mode sensor disclosed by the invention comprises the following steps of:
s1, preparing a first flexible electrode 1 and a second flexible electrode 2;
s2, preparing an ionic gel precursor solution, and putting the foam metal into the prepared ionic gel precursor solution to enable the ionic gel precursor solution to completely fill the pores of the foam metal;
the preparation of the ionic gel precursor solution comprises the steps of dissolving a polymer in a solvent, adding an ionic liquid, mixing and stirring to form the ionic gel precursor solution; the solvent can be a volatile solvent such as acetone;
s3, solidifying the foam metal filled with the ionic gel precursor solution to form an ionic gel material; the curing temperature is 70-150 ℃;
s4, soaking the ionic gel material obtained in the step S3 in aqua regia to enable the foam metal to be completely dissolved to obtain an ionic gel layer 3 with a porous structure;
and S5, fixedly connecting the upper surface and the lower surface of the ionic gel layer 3 obtained in the step S4 with the first flexible electrode 1 and the second flexible electrode 2 respectively (for example, the ionic gel layer can be fixed by gluing, and the used glue is conductive glue), so as to form the flexible temperature and pressure dual-mode sensor.
According to the preparation method, the foam metal is placed into the prepared ionic gel precursor solution and dissolved after solidification, so that the ionic gel layer with a porous structure can be formed by utilizing the foam metal, the operation is simple, and the original ions cannot be damaged.
The invention discloses a testing method of a flexible bimodal sensor, which comprises the following steps: the change of the electrical performance of the temperature and pressure to the flexible temperature and pressure dual-mode sensor is obtained by switching the testing frequency.
The method specifically comprises the following steps: testing the impedance change of the flexible temperature and pressure dual-mode sensor under the condition of a first testing frequency so as to obtain the temperature change, and testing the capacitance change of the flexible temperature and pressure dual-mode sensor under the condition of a second testing frequency so as to obtain the pressure change; wherein the second test frequency is higher than the first test frequency. When the input frequency is the first test frequency (intermediate frequency omega)2) The bulk material exhibits a resistive characteristic, the resistance value of which varies with the materialThe change in temperature changes, with the ambient pressure being negligible for the change in resistance. And when the input frequency is the second test frequency (high frequency omega)3) When the external environment is stimulated by pressure, the change of the contact area between the surface microstructure and the electrode or the change of the contact distance between the material and the upper and lower electrodes is caused, so that the whole capacitance value is changed, and the change of the temperature to the capacitance is negligible.
Example 1
This embodiment provides a flexible temperature pressure bimodal sensor, including first flexible electrode 1, second flexible electrode 2 and ion gel layer 3, ion gel layer 3 fixes between first flexible electrode 1 and the second flexible electrode 2, ion gel layer 3 has porous structure.
The flexible substrates of the first flexible electrode 1 and the second flexible electrode 2 are both flexible PI films, the first flexible electrode 1 and the second flexible electrode 2 are both gold electrodes, the gold electrodes are gold films with the thickness of 200nm formed by vacuum evaporation on the flexible PI films, and the first flexible electrode and the second flexible electrode are respectively obtained.
The ionic gel layer 3 is prepared by thermal polymerization of materials of tris (2-hydroxyethyl) ethyl methyl ammonium sulfate and vinylidene fluoride-hexafluoropropylene copolymer.
The preparation method of the flexible temperature and pressure dual-mode sensor of the embodiment is as follows:
s1, forming a first flexible electrode 1 and a second flexible electrode 2 by vacuum evaporation of a 200nm gold film on the flexible PI film;
s2, dissolving the vinylidene fluoride-hexafluoropropylene copolymer in an acetone solvent, adding a certain amount of tris (2-hydroxyethyl) ethyl methyl ammonium sulfate, mixing and stirring to form an ionic gel precursor solution, wherein the mass ratio of the vinylidene fluoride-hexafluoropropylene copolymer to the tris (2-hydroxyethyl) ethyl methyl ammonium sulfate is 5: 4;
s3, soaking the nickel foam into the ionic gel precursor solution prepared in the S2 to ensure that the ionic gel precursor solution completely fills the gap of the nickel foam;
s4, placing the nickel foam attached with the ionic gel precursor solution in a heating table to react and solidify at 120 ℃ to form an ionic gel material;
s5, putting the nickel foam attached with the ionic gel material into the prepared aqua regia solution, soaking and etching until the nickel foam is completely dissolved, taking out and drying to obtain an ionic gel layer with a porous structure;
s6, packaging the ionic gel layer with the porous structure prepared in the S5 and the first flexible electrode and the second flexible electrode prepared in the S1, and fixing the first flexible electrode and the second flexible electrode on the upper surface and the lower surface of the ionic gel layer respectively to form the sandwich-type flexible temperature and pressure dual-mode sensor.
The flexible temperature and pressure dual-mode sensor provided in example 1 is used for temperature and pressure detection, and temperature-pressure sensing performance is represented as follows:
(1) impedance characteristics: the change rule of the impedance of the flexible temperature and pressure dual-mode sensor along with the frequency and the temperature is obtained by testing the relation that the impedance changes along with the input frequency at different temperatures, as shown in fig. 4, the abscissa in fig. 4 is the frequency, the ordinate is the impedance, and the impedances of the flexible temperature and pressure sensor at different temperatures (20 ℃, 25 ℃, 30 ℃, 35 ℃, 40 ℃, 45 ℃ and 50 ℃) are respectively detected. At low frequencies (less than 10)3Hz), the impedance of the flexible temperature and pressure sensor remains almost constant at the same temperature, appearing as an ionic conductor, and the impedance of the flexible temperature and pressure sensor at different temperatures decreases with increasing temperature. But at a frequency greater than 104In Hz, the impedance of the flexible temperature and pressure sensor at different temperatures is linearly reduced along with the increase of the frequency, which is equivalent to a stable capacitor, and the size of the capacitor is not influenced by the temperature.
(2) Pressure sensing performance: connecting the upper and lower electrodes to an external circuit at a frequency of 105Under Hz condition, respectively applying different pressures at different temperatures, testing the change curve of the capacitance value of the flexible bimodal sensor along with the change of the external pressure value at different temperatures, and the result is shown in figure 5, wherein the abscissa is the pressure and the ordinate is C ^ and/or the pressureC0Respectively detecting the C/C of the flexible temperature and pressure sensor in the process of changing the pressure at different temperatures (30 ℃, 35 ℃ and 40 ℃)0The value is obtained. Where C is the capacitance after the application of pressure, C0Is the initial capacitance. The C/C of the flexible pressure temperature sensor can be seen from the figure0The capacitance value is increased along with the increase of the external pressure, the capacitance value changes the same under different temperature conditions, and the detection of the pressure signal is not influenced by the temperature change.
(3) Temperature-sensitive sensing performance: the upper and lower electrodes are also connected to an external circuit, as shown in FIG. 6, at a frequency of 103Under the condition of Hz (hertz), the curves of the electrical properties of the sensor along with the change of temperature are tested under different external pressure conditions (0Pa, 100Pa, 150Pa, 200Pa, 500Pa and 1000Pa), the electrical properties are represented by external circuit charge relaxation time tau, wherein tau is R C, wherein R is the resistance of the flexible bimodal sensor, C is the capacitance value, as shown in figure 6, the abscissa is temperature (DEG C) and the ordinate is ln (tau). As can be seen from fig. 6, the charge relaxation time of the flexible temperature and pressure sensor increases linearly with the increase of temperature, and the electrical property changes under the same temperature condition under different external pressure stimulation conditions are the same, which indicates that the change of pressure does not affect the detection of the temperature signal.
Example 2
As another improvement, example 2 provides a flexible temperature pressure bimodal sensor, compared to example 1, with the difference that the ionic liquid in the ionic gel layer is [ EMIM ]]+[PF6]-(ii) a The flexible electrode was 80nm PEDOT printed on the PDMS surface: PSS conductive polymers.
The rest is the same as embodiment 1, and is not described herein again.
The flexible temperature and pressure dual-mode sensor provided in the embodiment 2 is used for respectively detecting temperature and pressure, the temperature-pressure sensing performance is represented, and the obtained rule is basically consistent with that of the embodiment 1.
Example 3
As another modification, example 3 provides a flexible temperature and pressure sensor, which is different from example 1 in thatThe ionic liquid in the ionic gel layer is [ EMIm]+[TFSI]-(ii) a The flexible electrode is an Ag nanowire film printed on the surface of PDMS.
The rest is the same as embodiment 1, and is not described herein again.
The flexible temperature and pressure dual-mode sensor provided by the embodiment 3 is respectively subjected to temperature and pressure detection, the temperature-pressure sensing performance of the sensor is represented, and the obtained rule is basically consistent with that of the embodiment 1.
Example 4
As another improvement, example 4 provides a flexible temperature pressure bimodal sensor, compared to example 1, with the difference that the ionic liquid in the ionic gel material is [ EMIm]+[TFSI]-(ii) a The flexible electrode is a 60nm Cu film deposited on the PI substrate.
The rest is basically the same as embodiment 1, and is not described herein again.
The flexible temperature and pressure dual-mode sensor provided in example 4 is used for temperature and pressure detection respectively, the temperature-pressure sensing performance is represented, and the obtained rule is basically consistent with that in example 1.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
Claims (10)
1. The utility model provides a flexible temperature pressure bimodulus sensor which characterized in that, includes first flexible electrode, the flexible electrode of second and ion gel layer, the ion gel layer is fixed between first flexible electrode and the flexible electrode of second, the ion gel layer has porous structure.
2. A flexible temperature pressure dual-modality sensor according to claim 1, wherein the ionic gel layer is made of a material comprising an ionic liquid and a polymer.
3. A flexible temperature pressure dual-modality sensor according to claim 2, wherein the ionic liquid comprises: any one of tris (2-hydroxyethyl) ethyl methyl ammonium sulfate, 1-ethyl-3-methylimidazole hexafluorophosphate, 1-ethyl-3-methylimidazole bifluoromethane sulfonate and 1-ethyl-3-methylimidazole bifluoromethane sulfonate.
4. A flexible temperature pressure dual-mode sensor according to claim 2, wherein the polymer is a vinylidene fluoride-hexafluoropropylene copolymer.
5. A flexible temperature pressure dual-mode sensor according to any one of claims 1 to 4, wherein the first flexible electrode and the second flexible electrode each comprise a flexible substrate and a conductive layer obtained by evaporating a metal film or printing a conductive material on the flexible substrate.
6. A method for preparing a flexible temperature pressure dual-mode sensor according to any one of claims 1 to 5, comprising the steps of:
s1, preparing a first flexible electrode and a second flexible electrode;
s2, preparing an ionic gel precursor solution, and putting the foam metal into the prepared ionic gel precursor solution to enable the ionic gel precursor solution to completely fill the pores of the foam metal;
s3, solidifying the foam metal filled with the ionic gel precursor solution to form an ionic gel material;
s4, soaking the ionic gel material obtained in the step S3 in a preset solution to enable the foam metal to be completely dissolved to obtain an ionic gel layer with a porous structure;
and S5, fixedly connecting the upper surface and the lower surface of the ionic gel layer obtained in the step S4 with the first flexible electrode and the second flexible electrode respectively to form the flexible dual-mode sensor.
7. The method of claim 6, wherein, in S2, the preparing the ionic gel precursor solution includes dissolving the polymer in a solvent, adding an ionic liquid, mixing and stirring to form the ionic gel precursor solution.
8. The method for preparing the flexible temperature and pressure dual-mode sensor according to claim 6, wherein in S3, the curing temperature is 70-150 ℃;
in S4, the predetermined solution is aqua regia.
9. The method of testing a flexible temperature pressure dual-mode sensor according to any one of claims 1 to 5, comprising: the change of the temperature and the pressure on the electrical property of the flexible dual-mode sensor is respectively obtained by switching the test frequency.
10. The method of testing a flexible temperature pressure dual-mode sensor of claim 9, comprising: testing the impedance change of the flexible dual-mode sensor under the condition of a first testing frequency so as to obtain the temperature change, and testing the capacitance change of the flexible dual-mode sensor under the condition of a second testing frequency so as to obtain the pressure change; wherein the second test frequency is higher than the first test frequency.
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|---|---|---|---|---|
| CN116499522A (en) * | 2023-04-11 | 2023-07-28 | 山东大学 | High-sensitivity flexible temperature and pressure dual-mode decoupling and sensor |
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