CN110900858A - Quartz groove rod slotting equipment - Google Patents
Quartz groove rod slotting equipment Download PDFInfo
- Publication number
- CN110900858A CN110900858A CN201911021837.3A CN201911021837A CN110900858A CN 110900858 A CN110900858 A CN 110900858A CN 201911021837 A CN201911021837 A CN 201911021837A CN 110900858 A CN110900858 A CN 110900858A
- Authority
- CN
- China
- Prior art keywords
- wax
- quartz
- grooving
- dimensional moving
- lead screw
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
- B28D5/023—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a cutting blade mounted on a carriage
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
- B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The invention discloses quartz groove rod slotting equipment which comprises a base (1), wherein a conveying device (2) is arranged on the base (1), a wax pouring device (3), a slotting device (4) and a wax melting device (5) are sequentially connected to the base (1) in a sliding mode along the conveying direction, a working platform (6) is arranged below the conveying device (2), and a plurality of vacuum suckers (61) are arranged on the working platform (6) and correspond to the slotting device (4). The quartz groove rod fixing device has the characteristics of high working efficiency, stable fixation and easy taking out of the quartz groove rod.
Description
Technical Field
The invention relates to a quartz groove rod processing device, in particular to a quartz groove rod slotting device.
Background
At present, in the semiconductor product manufacturing industry, a quartz boat is widely used as a wafer carrier in the semiconductor oxidation diffusion process, a plurality of wafers can be inserted into a groove of a groove rod for diffusion processing, and the shape structure, the groove opening precision, the distance between grooves and the like of the quartz boat have great influence on the semiconductor silicon quality. Therefore, when the quartz boat is processed, the slotting of the quartz groove rods is undoubtedly the most critical step. For a long quartz boat, the length of a quartz groove rod is long, and how to position and fix the quartz groove rod is a difficult point during grooving, which directly influences the quality and precision of the grooved quartz groove rod.
At present, the grooving of a quartz groove rod is usually carried out by placing the quartz groove rod on a numerical control machine tool working table surface with a V-shaped groove, so that the grooving precision reduction caused by the movement of the quartz groove rod in the grooving process is prevented. In the actual processing process, the quartz groove rod is fixed in the V-shaped groove and is in a static state, the whole quartz groove rod is subjected to grooving treatment mainly through the movement of the grooving device, the working efficiency is low, the fixed grooving mode enables the quartz groove rod to generate slight vertical vibration in the grooving process, the grooving position is not uniform if the quartz groove rod is light, and the quartz groove rod is integrally broken if the quartz groove rod is heavy; because in order to reduce the temperature of the cutting grooving part in the grooving process, cooling liquid needs to be continuously sprayed to the grooving position, and the cooling liquid easily enters the V-shaped groove, so that the quartz groove rod is tightly connected with the V-shaped groove, and the quartz groove rod is difficult to directly take out.
Therefore, the slotting equipment of the existing quartz groove rod has the problems of low working efficiency, unstable fixation and difficulty in taking out the quartz groove rod.
Disclosure of Invention
The invention aims to provide a quartz grooved bar slotting device. The quartz groove rod fixing device has the characteristics of high working efficiency, stable fixation and easy taking out of the quartz groove rod.
The technical scheme of the invention is as follows: the utility model provides a quartz groove stick fluting equipment, includes the base, is equipped with conveyor on the base, and still sliding connection has in proper order along direction of delivery on the base to water wax device, fluting device and change the wax device, and conveyor's below is equipped with work platform, and the department that corresponds with the fluting device on the work platform is equipped with a plurality of vacuum chuck.
Among the aforementioned quartz groove stick fluting equipment, the device of watering wax is equipped with first two-dimensional mobile device including the mounting bracket of watering wax on the mounting bracket of watering wax, is equipped with the kettle of watering wax on the first two-dimensional mobile device, and it has the heating wire to surround on the periphery wall of kettle of watering wax, and the outside of kettle of watering wax is equipped with the safety cover.
In the quartz groove rod grooving equipment, the grooving device comprises a grooving mounting frame, a second two-dimensional moving device is arranged on the grooving mounting frame, and a grooving machine is arranged on the second two-dimensional moving device.
In the quartz grooved bar grooving equipment, at least two grooving devices are adopted, and the blade of the grooving machine is a five-grooved blade.
In the quartz groove rod slotting equipment, the wax melting device comprises a wax melting mounting frame, a third two-dimensional moving device is arranged on the wax melting mounting frame, and a wax melting torch is arranged on the third two-dimensional moving device.
In the quartz groove rod slotting device, the conveying device comprises a conveying crawler belt, and through holes are formed in the surface of the conveying crawler belt.
In the aforesaid quartz groove stick fluting equipment, first two dimension mobile device includes first motor, is connected with first lead screw on the first motor, is equipped with first slider on the first lead screw, is equipped with first cylinder on the first slider, and the piston rod and the kettle of watering with water of first cylinder are connected.
In the quartz groove rod slotting device, the second two-dimensional moving device comprises a second motor, a second lead screw is connected to the second motor, a second sliding block is arranged on the second lead screw, a second air cylinder is arranged on the second sliding block, and a piston rod of the second air cylinder is connected with the slotting machine.
In the quartz groove rod slotting device, the third two-dimensional moving device comprises a third motor, a third lead screw is connected to the third motor, a third sliding block is arranged on the third lead screw, a third air cylinder is arranged on the third sliding block, and a piston rod of the third air cylinder is connected with a wax melting torch.
In the above quartz groove rod slotting device, the working platform is provided with the wax receiving groove corresponding to the wax pouring device and the wax melting device.
Compared with the prior art, the quartz groove rods are conveyed to different processing positions for processing through the conveying device, the whole grooving device does not need to move, the plurality of grooving devices and the five-groove blade are adopted for cutting during grooving, a plurality of grooves can be cut at one time, and the working efficiency is greatly improved; the quartz groove bar fixing device disclosed by the invention firstly carries out wax casting treatment through the wax casting device for preliminary fixing, and then further adsorbs the quartz groove bar in a grooving area through the vacuum chuck, so that the fixing performance of the quartz groove bar is greatly improved, the problems of deviation, shaking and the like are not easy to occur, the cutting accuracy is high, the stability is good, and the quartz groove bar is not easy to damage in the grooving process; after the grooving is finished, the wax is melted through the subsequent wax melting device, and then the wax is directly output along with the conveying device, so that the material taking is convenient and fast. The whole grooving work can process a plurality of quartz rods at one time, thereby greatly improving the working efficiency by 10 times compared with the working efficiency of the existing equipment. In addition, the whole quartz boat which is installed can be placed on the conveying device to be conveyed, wax-poured, cut and wax-dissolved, so that the quartz boat is suitable for slotting small articles such as quartz groove rods and the like, is also suitable for slotting the whole quartz boat, and has the advantages of wider application range, more convenient operation and stronger practicability. Therefore, the quartz groove rod fixing device has the characteristics of high working efficiency, stable fixation and easy taking out of the quartz groove rod.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural view of the grooving apparatus;
fig. 3 is an enlarged view of a portion of a structure shown in fig. 1.
The labels in the figures are: 1. a base; 2. a conveying device; 21. a conveying crawler belt; 22. a through hole; 3. a wax casting device; 31. a wax casting mounting frame; 32. a first two-dimensional mobile device; 33. a wax pot is poured; 34. an electric heating wire; 35. a protective cover; 36. a first motor; 37. a first lead screw; 38. A first slider; 39. a first cylinder; 4. a slotting device; 41. slotting a mounting rack; 42. a second two-dimensional moving device; 43. a grooving machine; 5. a wax melting device; 51. melting the wax mounting rack; 52. A third two-dimensional moving device; 53. melting wax torch; 6. a working platform; 61. and (4) vacuum chuck.
Detailed Description
The present invention is further illustrated by the following examples, which are not to be construed as limiting the invention.
Examples are given.
As shown in fig. 1-3, a quartz groove rod slotting device comprises a base 1, a conveying device 2 is arranged on the base 1, a wax pouring device 3, a slotting device 4 and a wax melting device 5 are sequentially connected to the base 1 along a conveying direction in a sliding manner, a working platform 6 is arranged below the conveying device 2, and a plurality of vacuum suction cups 61 are arranged on the working platform 6 corresponding to the slotting device 4.
The wax-pouring device 3 comprises a wax-pouring mounting frame 31, a first two-dimensional moving device 32 is arranged on the wax-pouring mounting frame 31, a wax-pouring pot 33 is arranged on the first two-dimensional moving device 32, a heating wire 34 surrounds the peripheral wall of the wax-pouring pot 33, and a protective cover 35 is arranged outside the wax-pouring pot 33. The wax pot 33 can move up and down, left and right on the first two-dimensional moving device 32, the heating wire 34 melts the wax in the wax pot 33, the fluidity of the wax is improved, the temperature of the wax pot 33 is high due to the operation of the heating wire 34, and the protective cover 35 is arranged for protecting, so that the safety is improved. The wax casting device 3 may also employ a conventional wax casting apparatus.
The slotting device 4 comprises a slotting mounting frame 41, a second two-dimensional moving device 42 is arranged on the slotting mounting frame 41, and a slotting machine 43 is arranged on the second two-dimensional moving device 42.
At least two grooving devices 4 are adopted, and the blade of the grooving machine 43 is a five-groove blade.
The wax melting device 5 comprises a wax melting mounting frame 51, a third two-dimensional moving device 52 is arranged on the wax melting mounting frame 51, and a wax melting torch 53 is arranged on the third two-dimensional moving device 52.
The conveying device 2 comprises a conveying crawler 21, and the surface of the conveying crawler 21 is provided with a through hole 22. The through hole 22 is matched with the vacuum chuck 61, and the vacuum chuck 61 is aligned with the through hole 22, so that the grooved rod can be smoothly adsorbed.
The first two-dimensional moving device 32 comprises a first motor 36, a first lead screw 37 is connected to the first motor 36, a first sliding block 38 is arranged on the first lead screw 37, a first air cylinder 39 is arranged on the first sliding block 38, and a piston rod of the first air cylinder 39 is connected with the wax pot 33. The second two-dimensional moving device 42 includes a second motor, a second lead screw is connected to the second motor, a second slider is disposed on the second lead screw, a second cylinder is disposed on the second slider, and a piston rod of the second cylinder is connected to the grooving machine 43. The third two-dimensional moving device 52 includes a third motor, a third lead screw is connected to the third motor, a third slider is disposed on the third lead screw, a third cylinder is disposed on the third slider, and a piston rod of the third cylinder is connected to the wax melting torch 53.
The first two-dimensional moving device 32, the second two-dimensional moving device 42 and the third two-dimensional moving device 52 can be freely combined by adopting the conventional linear reciprocating mechanism, besides the combination, the combination form of a transverse linear module and a longitudinal linear module can also be adopted, a motor lead screw structure is adopted, the longitudinal linear module moves back and forth left and right on the transverse linear module, the wax pouring kettle 33, the grooving machine 43 and the wax melting torch 53 are respectively arranged on the longitudinal linear module and can move up and down along the longitudinal linear module, the wax pouring mounting frame 31, the grooving mounting frame 41 and the wax melting mounting frame 51 respectively move back and forth along the conveying direction through the linear module arranged on the base 1, and therefore the up-down, left-right and front-back movement of the wax pouring kettle 33, the grooving machine 43 and the wax melting torch 53 is realized.
And the working platform (6) is provided with a wax receiving groove corresponding to the wax pouring device (3) and the wax melting device (5). The cleanness of the workshop is ensured, and meanwhile, the working workshop can be recycled.
When the device works practically, a plurality of quartz groove rods are arranged on the conveying crawler 21 in parallel to be conveyed, after the quartz groove rods are conveyed to the wax pouring device 3, the wax pouring kettle 33 adjusts the position to accurately align the quartz groove rods to pour wax, the quartz groove rods are fixed on the conveying crawler, the quartz groove rods are tightly fixed, the quartz groove rods are sealed, and subsequent adsorption and grooving are facilitated; then the quartz groove rods are conveyed to the grooving device 4 through the conveying crawler 21 and are adsorbed by the vacuum chuck 61, so that the quartz groove rods are further fixed, the fixing stability and the grooving accuracy are improved, then the five-groove blades on the grooving device 4 which are distributed in parallel are used for simultaneously cutting and grooving, a plurality of notches can be cut at one time, and the grooving efficiency is greatly improved; after the grooving is finished, the quartz groove rods are conveyed to a wax melting torch 53 through the conveying crawler 21 to melt wax on the quartz groove rods, and finally the wax is output through the conveying crawler 21, so that the workpiece can be conveniently and quickly taken.
Claims (10)
1. The utility model provides a quartz groove stick fluting equipment which characterized in that: the wax melting device comprises a base (1), wherein a conveying device (2) is arranged on the base (1), a wax pouring device (3), a grooving device (4) and a wax melting device (5) are sequentially connected to the base (1) in a sliding mode along the conveying direction, a working platform (6) is arranged below the conveying device (2), and a plurality of vacuum suckers (61) are arranged on the working platform (6) corresponding to the grooving device (4).
2. The quartz grooved bar notching apparatus of claim 1, wherein: watering wax device (3) are equipped with first two-dimensional mobile device (32) including watering wax mounting bracket (31) on watering wax mounting bracket (31), are equipped with watering wax kettle (33) on first two-dimensional mobile device (32), and it has heating wire (34) to surround on the periphery wall of watering wax kettle (33), and the outside of watering wax kettle (33) is equipped with safety cover (35).
3. The quartz grooved bar notching apparatus of claim 1, wherein: the grooving device (4) comprises a grooving mounting frame (41), a second two-dimensional moving device (42) is arranged on the grooving mounting frame (41), and a grooving machine (43) is arranged on the second two-dimensional moving device (42).
4. A quartz grooved bar notching apparatus as set forth in claim 3 wherein: at least two grooving devices (4) are adopted, and the blade of the grooving machine (43) is a five-groove blade.
5. The quartz grooved bar notching apparatus of claim 1, wherein: the wax melting device (5) comprises a wax melting mounting rack (51), a third two-dimensional moving device (52) is arranged on the wax melting mounting rack (51), and a wax melting torch (53) is arranged on the third two-dimensional moving device (52).
6. The quartz grooved bar notching apparatus of claim 1, wherein: the conveying device (2) comprises a conveying crawler belt (21), and through holes (22) are formed in the surface of the conveying crawler belt (21).
7. A quartz grooved bar notching apparatus as set forth in claim 2 wherein: the first two-dimensional moving device (32) comprises a first motor (36), a first lead screw (37) is connected onto the first motor (36), a first sliding block (38) is arranged on the first lead screw (37), a first air cylinder (39) is arranged on the first sliding block (38), and a piston rod of the first air cylinder (39) is connected with the wax pot (33).
8. A quartz grooved bar notching apparatus as set forth in claim 3 wherein: the second two-dimensional moving device (42) comprises a second motor, a second lead screw is connected to the second motor, a second sliding block is arranged on the second lead screw, a second air cylinder is arranged on the second sliding block, and a piston rod of the second air cylinder is connected with the grooving machine (43).
9. The quartz grooved bar notching apparatus of claim 5, wherein: the third two-dimensional moving device (52) comprises a third motor, a third lead screw is connected to the third motor, a third sliding block is arranged on the third lead screw, a third air cylinder is arranged on the third sliding block, and a piston rod of the third air cylinder is connected with a wax melting torch (53).
10. The quartz grooved bar notching apparatus of claim 1, wherein: and the working platform (6) is provided with a wax receiving groove corresponding to the wax pouring device (3) and the wax melting device (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911021837.3A CN110900858A (en) | 2019-10-25 | 2019-10-25 | Quartz groove rod slotting equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911021837.3A CN110900858A (en) | 2019-10-25 | 2019-10-25 | Quartz groove rod slotting equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110900858A true CN110900858A (en) | 2020-03-24 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911021837.3A Pending CN110900858A (en) | 2019-10-25 | 2019-10-25 | Quartz groove rod slotting equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110900858A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2122836U (en) * | 1992-03-19 | 1992-11-25 | 营口火柴厂 | Wax-melting device |
| CN101734484A (en) * | 2008-11-24 | 2010-06-16 | Sfa工程股份有限公司 | Substrate conveyer |
| CN201985077U (en) * | 2011-01-17 | 2011-09-21 | 江阴市江海光伏科技有限公司 | Wax melting device for processing of semiconductor chip |
| BR102016011436A2 (en) * | 2015-05-27 | 2016-11-29 | Haas Food Equipment Gmbh | inserter for loose articles such as almond pits, hazelnut pits etc |
| CN206598407U (en) * | 2016-12-25 | 2017-10-31 | 山东赫峰石材高端装备研究院有限公司 | Quartzite slate cutting all-in-one machine |
| CN110000943A (en) * | 2019-05-27 | 2019-07-12 | 湖州东科电子石英有限公司 | The slot stick grooving processes of quartz long boat |
| CN211682923U (en) * | 2019-10-25 | 2020-10-16 | 浙江鸿达石英电子科技有限公司 | Slotting device for quartz products |
-
2019
- 2019-10-25 CN CN201911021837.3A patent/CN110900858A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2122836U (en) * | 1992-03-19 | 1992-11-25 | 营口火柴厂 | Wax-melting device |
| CN101734484A (en) * | 2008-11-24 | 2010-06-16 | Sfa工程股份有限公司 | Substrate conveyer |
| CN201985077U (en) * | 2011-01-17 | 2011-09-21 | 江阴市江海光伏科技有限公司 | Wax melting device for processing of semiconductor chip |
| BR102016011436A2 (en) * | 2015-05-27 | 2016-11-29 | Haas Food Equipment Gmbh | inserter for loose articles such as almond pits, hazelnut pits etc |
| CN206598407U (en) * | 2016-12-25 | 2017-10-31 | 山东赫峰石材高端装备研究院有限公司 | Quartzite slate cutting all-in-one machine |
| CN110000943A (en) * | 2019-05-27 | 2019-07-12 | 湖州东科电子石英有限公司 | The slot stick grooving processes of quartz long boat |
| CN211682923U (en) * | 2019-10-25 | 2020-10-16 | 浙江鸿达石英电子科技有限公司 | Slotting device for quartz products |
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Application publication date: 20200324 |
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| RJ01 | Rejection of invention patent application after publication |