CN110793432B - 非接触型位移传感器 - Google Patents

非接触型位移传感器 Download PDF

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Publication number
CN110793432B
CN110793432B CN201910677959.1A CN201910677959A CN110793432B CN 110793432 B CN110793432 B CN 110793432B CN 201910677959 A CN201910677959 A CN 201910677959A CN 110793432 B CN110793432 B CN 110793432B
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CN
China
Prior art keywords
lens
light
contact type
displacement sensor
type displacement
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Active
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CN201910677959.1A
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English (en)
Chinese (zh)
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CN110793432A (zh
Inventor
久保光司
宍户裕子
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Mitutoyo Corp
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Mitutoyo Corp
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Publication of CN110793432A publication Critical patent/CN110793432A/zh
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C3/00Measuring distances in line of sight; Optical rangefinders
    • G01C3/02Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06Systems determining position data of a target
    • G01S17/08Systems determining position data of a target for measuring distance only
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00Simple or compound lenses
    • G02B3/12Fluid-filled or evacuated lenses
    • G02B3/14Fluid-filled or evacuated lenses of variable focal length
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/56Cameras or camera modules comprising electronic image sensors; Control thereof provided with illuminating means
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60Control of cameras or camera modules
    • H04N23/67Focus control based on electronic image sensor signals
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/80Camera processing pipelines; Components thereof
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/95Computational photography systems, e.g. light-field imaging systems
    • H04N23/958Computational photography systems, e.g. light-field imaging systems for extended depth of field imaging
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C3/00Measuring distances in line of sight; Optical rangefinders
    • G01C3/02Details
    • G01C3/06Use of electric means to obtain final indication
    • G01C3/08Use of electric radiation detectors

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Computing Systems (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
CN201910677959.1A 2018-08-01 2019-07-25 非接触型位移传感器 Active CN110793432B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018144933A JP7224804B2 (ja) 2018-08-01 2018-08-01 非接触式変位計
JP2018-144933 2018-08-01

Publications (2)

Publication Number Publication Date
CN110793432A CN110793432A (zh) 2020-02-14
CN110793432B true CN110793432B (zh) 2023-04-18

Family

ID=69168532

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910677959.1A Active CN110793432B (zh) 2018-08-01 2019-07-25 非接触型位移传感器

Country Status (4)

Country Link
US (1) US10830585B2 (ja)
JP (1) JP7224804B2 (ja)
CN (1) CN110793432B (ja)
DE (1) DE102019120695A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7098474B2 (ja) * 2018-08-07 2022-07-11 株式会社ミツトヨ 非接触式変位計
CN111522019B (zh) * 2020-07-02 2020-10-20 中国地质大学(武汉) 一种水下光子位置的误差修正方法及装置
TWI795111B (zh) * 2021-12-06 2023-03-01 財團法人金屬工業研究發展中心 交錯光源取像系統

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2572515B1 (fr) * 1984-10-25 1993-06-18 Canon Kk Dispositif de detection de position
DE69014439T2 (de) * 1989-06-28 1995-04-06 Dainippon Screen Mfg Verschiebungsdetektionssystem.
JP3300803B2 (ja) * 1993-10-14 2002-07-08 株式会社キーエンス 変位計及び変位測定方法、厚み計
JPH1123219A (ja) 1997-07-01 1999-01-29 Komatsu Eng Kk 共焦点光学系による変位計測装置
JP4519594B2 (ja) 2004-09-30 2010-08-04 サンクス株式会社 変位センサ
WO2008106403A2 (en) 2007-02-26 2008-09-04 Trustees Of Princeton University Turnable acoustic gradient index of refraction lens and system
US7990522B2 (en) 2007-11-14 2011-08-02 Mitutoyo Corporation Dynamic compensation of chromatic point sensor intensity profile data selection
US9143674B2 (en) 2013-06-13 2015-09-22 Mitutoyo Corporation Machine vision inspection system and method for performing high-speed focus height measurement operations
US9726876B2 (en) * 2013-11-27 2017-08-08 Mitutoyo Corporation Machine vision inspection system and method for obtaining an image with an extended depth of field
JP6692651B2 (ja) * 2016-02-05 2020-05-13 株式会社ミツトヨ クロマティック共焦点センサ
JP6831698B2 (ja) * 2016-12-28 2021-02-17 株式会社ミツトヨ 焦点距離可変レンズ装置
JP6845737B2 (ja) 2017-04-28 2021-03-24 株式会社ミツトヨ 焦点距離可変レンズ装置および焦点距離可変レンズ制御方法

Also Published As

Publication number Publication date
CN110793432A (zh) 2020-02-14
US20200041267A1 (en) 2020-02-06
JP7224804B2 (ja) 2023-02-20
US10830585B2 (en) 2020-11-10
DE102019120695A1 (de) 2020-02-06
JP2020020682A (ja) 2020-02-06

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