CN110793432B - 非接触型位移传感器 - Google Patents
非接触型位移传感器 Download PDFInfo
- Publication number
- CN110793432B CN110793432B CN201910677959.1A CN201910677959A CN110793432B CN 110793432 B CN110793432 B CN 110793432B CN 201910677959 A CN201910677959 A CN 201910677959A CN 110793432 B CN110793432 B CN 110793432B
- Authority
- CN
- China
- Prior art keywords
- lens
- light
- contact type
- displacement sensor
- type displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 64
- 239000007788 liquid Substances 0.000 claims abstract description 65
- 238000005259 measurement Methods 0.000 claims abstract description 65
- 238000001514 detection method Methods 0.000 claims abstract description 20
- 230000004044 response Effects 0.000 claims abstract description 6
- 238000012545 processing Methods 0.000 claims description 15
- 238000003384 imaging method Methods 0.000 claims description 11
- 210000001747 pupil Anatomy 0.000 claims description 7
- 230000001360 synchronised effect Effects 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 description 36
- 238000000034 method Methods 0.000 description 30
- 239000013307 optical fiber Substances 0.000 description 26
- 230000008569 process Effects 0.000 description 9
- 230000007246 mechanism Effects 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
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- 230000001678 irradiating effect Effects 0.000 description 1
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C3/00—Measuring distances in line of sight; Optical rangefinders
- G01C3/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/12—Fluid-filled or evacuated lenses
- G02B3/14—Fluid-filled or evacuated lenses of variable focal length
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/56—Cameras or camera modules comprising electronic image sensors; Control thereof provided with illuminating means
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/60—Control of cameras or camera modules
- H04N23/67—Focus control based on electronic image sensor signals
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/80—Camera processing pipelines; Components thereof
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/95—Computational photography systems, e.g. light-field imaging systems
- H04N23/958—Computational photography systems, e.g. light-field imaging systems for extended depth of field imaging
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C3/00—Measuring distances in line of sight; Optical rangefinders
- G01C3/02—Details
- G01C3/06—Use of electric means to obtain final indication
- G01C3/08—Use of electric radiation detectors
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Signal Processing (AREA)
- Multimedia (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Computing Systems (AREA)
- Theoretical Computer Science (AREA)
- Computer Networks & Wireless Communication (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018144933A JP7224804B2 (ja) | 2018-08-01 | 2018-08-01 | 非接触式変位計 |
JP2018-144933 | 2018-08-01 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110793432A CN110793432A (zh) | 2020-02-14 |
CN110793432B true CN110793432B (zh) | 2023-04-18 |
Family
ID=69168532
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910677959.1A Active CN110793432B (zh) | 2018-08-01 | 2019-07-25 | 非接触型位移传感器 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10830585B2 (ja) |
JP (1) | JP7224804B2 (ja) |
CN (1) | CN110793432B (ja) |
DE (1) | DE102019120695A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7098474B2 (ja) * | 2018-08-07 | 2022-07-11 | 株式会社ミツトヨ | 非接触式変位計 |
CN111522019B (zh) * | 2020-07-02 | 2020-10-20 | 中国地质大学(武汉) | 一种水下光子位置的误差修正方法及装置 |
TWI795111B (zh) * | 2021-12-06 | 2023-03-01 | 財團法人金屬工業研究發展中心 | 交錯光源取像系統 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2572515B1 (fr) * | 1984-10-25 | 1993-06-18 | Canon Kk | Dispositif de detection de position |
DE69014439T2 (de) * | 1989-06-28 | 1995-04-06 | Dainippon Screen Mfg | Verschiebungsdetektionssystem. |
JP3300803B2 (ja) * | 1993-10-14 | 2002-07-08 | 株式会社キーエンス | 変位計及び変位測定方法、厚み計 |
JPH1123219A (ja) | 1997-07-01 | 1999-01-29 | Komatsu Eng Kk | 共焦点光学系による変位計測装置 |
JP4519594B2 (ja) | 2004-09-30 | 2010-08-04 | サンクス株式会社 | 変位センサ |
WO2008106403A2 (en) | 2007-02-26 | 2008-09-04 | Trustees Of Princeton University | Turnable acoustic gradient index of refraction lens and system |
US7990522B2 (en) | 2007-11-14 | 2011-08-02 | Mitutoyo Corporation | Dynamic compensation of chromatic point sensor intensity profile data selection |
US9143674B2 (en) | 2013-06-13 | 2015-09-22 | Mitutoyo Corporation | Machine vision inspection system and method for performing high-speed focus height measurement operations |
US9726876B2 (en) * | 2013-11-27 | 2017-08-08 | Mitutoyo Corporation | Machine vision inspection system and method for obtaining an image with an extended depth of field |
JP6692651B2 (ja) * | 2016-02-05 | 2020-05-13 | 株式会社ミツトヨ | クロマティック共焦点センサ |
JP6831698B2 (ja) * | 2016-12-28 | 2021-02-17 | 株式会社ミツトヨ | 焦点距離可変レンズ装置 |
JP6845737B2 (ja) | 2017-04-28 | 2021-03-24 | 株式会社ミツトヨ | 焦点距離可変レンズ装置および焦点距離可変レンズ制御方法 |
-
2018
- 2018-08-01 JP JP2018144933A patent/JP7224804B2/ja active Active
-
2019
- 2019-07-23 US US16/519,117 patent/US10830585B2/en active Active
- 2019-07-25 CN CN201910677959.1A patent/CN110793432B/zh active Active
- 2019-07-31 DE DE102019120695.2A patent/DE102019120695A1/de active Pending
Also Published As
Publication number | Publication date |
---|---|
CN110793432A (zh) | 2020-02-14 |
US20200041267A1 (en) | 2020-02-06 |
JP7224804B2 (ja) | 2023-02-20 |
US10830585B2 (en) | 2020-11-10 |
DE102019120695A1 (de) | 2020-02-06 |
JP2020020682A (ja) | 2020-02-06 |
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