CN110763447B - Hydrostatic bearing characteristic testing device and method - Google Patents
Hydrostatic bearing characteristic testing device and method Download PDFInfo
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- CN110763447B CN110763447B CN201911049796.9A CN201911049796A CN110763447B CN 110763447 B CN110763447 B CN 110763447B CN 201911049796 A CN201911049796 A CN 201911049796A CN 110763447 B CN110763447 B CN 110763447B
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M13/00—Testing of machine parts
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M5/00—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings
- G01M5/0075—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings by means of external apparatus, e.g. test benches or portable test systems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
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Abstract
The invention belongs to the field of bearing characteristic test, and particularly discloses a hydrostatic bearing characteristic test device and a method, which comprises a support assembly, an auxiliary loading assembly and a main loading assembly, wherein the support assembly comprises a platform, a thrust plate and a support frame, the thrust plate and the support frame are fixed on the platform, a to-be-tested hydrostatic bearing part is placed at the center of the upper surface of the thrust plate, a support plate is installed on the to-be-tested hydrostatic bearing part, the auxiliary loading assembly is arranged above one end of the support plate, an acceleration sensor is fixed on the upper surface of the other end of the support plate, the main loading assembly is arranged above the center of the support plate, and a balancing weight is fixed on one; one end of the thrust plate is fixed with a loading support, the other end of the thrust plate is fixed with a magnetic meter seat, and the tail end of the magnetic meter seat support is connected with an eddy current displacement sensor which is positioned above the acceleration sensor. The invention realizes the measurement of hydrostatic bearing indexes including bearing capacity, micro-vibration, static rigidity, dynamic rigidity and angular rigidity, and has simple structure and easy operation.
Description
Technical Field
The invention belongs to the field of support characteristic testing, and particularly relates to a hydrostatic support characteristic testing device and method.
Background
The fields of aerospace, optical instruments, micro-nano manufacturing and the like provide higher and higher requirements for technical indexes such as machining precision, bearing capacity, machining efficiency and the like of a machine tool, and traditional bearing parts such as ball bearings, dynamic pressure sliding bearings and the like cannot meet the precision and stability required by ultra-precision machining of the machine tool.
The hydrostatic pressure bearing part has the advantages of high precision, small friction force, good stability, long service life and the like, and is widely applied to ultra-precision machining equipment. The hydrostatic pressure bearing part has large bearing capacity and strong vibration resistance, and can be applied to large-scale heavy precision part processing equipment; the aerostatic bearing part has extremely low friction and almost no abrasion, and the lubricating medium is air, so that the aerostatic bearing part can be applied to small-sized ultra-precision machining equipment and measuring instruments with higher requirements on working environments.
With the intensive research on hydrostatic bearing components, researchers find that the oil cavity structure, the restrictor structure, the material and the structure of an air floating cushion, the oil seal surface microstructure, a lubricating medium, a flow rate pressure control system thereof and other influencing factors in the hydrostatic bearing components have a remarkable influence on the bearing characteristics. In order to check and correct theoretical analysis, find the optimal structural parameters of the hydrostatic bearing component and verify the working performance of the hydrostatic bearing component, a high-precision hydrostatic bearing characteristic testing device and method are urgently needed.
Disclosure of Invention
In view of the above defects or improvement needs of the prior art, the present invention provides a hydrostatic bearing characteristic testing apparatus and method, and aims to combine a supporting component, an auxiliary loading component and a main loading component in the same apparatus, and set piezoelectric actuators in the auxiliary loading component and the main loading component respectively, so as to realize measurement of all hydrostatic bearing indexes including bearing capacity, micro-vibration, static stiffness, dynamic stiffness and angular stiffness, and have the advantages of high precision, simple structure and easy operation.
To achieve the above object, according to one aspect of the present invention, there is provided a hydrostatic bearing characteristic test apparatus including a support assembly, a sub-loading assembly, and a main loading assembly, wherein:
the supporting assembly comprises a platform, a thrust plate and a supporting frame, wherein the thrust plate and the supporting frame are fixed on the platform, a static pressure bearing part to be tested is placed at the center of the upper surface of the thrust plate, a supporting plate is installed on the static pressure bearing part to be tested, the auxiliary loading assembly is arranged above one end of the supporting plate, an acceleration sensor is fixed on the upper surface of the other end of the supporting plate, the main loading assembly is arranged above the center of the supporting plate, and a balancing weight is fixed on one side, close to the auxiliary loading assembly, of the upper surface of the supporting plate; a loading support is fixed at one end of the thrust plate, a magnetic meter seat is fixed at the other end of the thrust plate, an eddy current displacement sensor is connected to the tail end of the magnetic meter seat support, and the eddy current displacement sensor is positioned above the acceleration sensor;
the auxiliary loading assembly comprises an auxiliary weighing sensor, an auxiliary piezoelectric actuator and an auxiliary loading head which are sequentially connected from top to bottom, and the auxiliary weighing sensor is fixed on the loading bracket;
the main loading assembly comprises a speed reduction lifter, a main weighing sensor, a main piezoelectric actuator and a ball head ejector rod which are sequentially connected from top to bottom, the speed reduction lifter is fixed on the supporting frame, and a lead screw of the speed reduction lifter penetrates through the supporting frame downwards and is connected with the main weighing sensor.
More preferably, the probe plane of the eddy current displacement sensor is parallel to the upper surface of the acceleration sensor and is 0.2-0.3 mm away.
Further preferably, the horizontal distance from the measuring head of the secondary loading head and the horizontal distance from the measuring head of the eddy current displacement sensor to the axis of the ball-end mandril are equal.
Preferably, a locking nut is arranged at the lower end of the screw rod of the speed reduction elevator, and a compression spring is sleeved on the locking nut.
Preferably, the platform is provided with an oil return groove, and the oil return groove is arranged around the thrust plate.
According to another aspect of the present invention, there is provided a hydrostatic bearing characteristic test method, which is implemented by using the above apparatus, including the steps of:
s1, inserting a feeler gauge between the static pressure supporting component to be measured and the thrust plate, adjusting the elongation of the main piezoelectric actuator and the auxiliary piezoelectric actuator to a preset value, so that the auxiliary loading head is not contacted with the supporting plate, adjusting a screw rod of the speed reduction elevator, so that the screw rod drives a ball head ejector rod to prop the supporting plate on the static pressure supporting component to be measured, and the pressure value measured by the main weighing sensor is 0N, and then locking the screw rod;
s2, drawing out the feeler gauge, and simultaneously introducing fluid medium between the static pressure supporting component to be measured and the thrust plate, wherein the static pressure supporting component to be measured is suspended on the thrust plate, the pressure value measured by the main weighing sensor is the bearing capacity of the static pressure supporting component to be measured, and the vibration frequency measured by the acceleration sensor and the displacement value measured by the eddy current displacement sensor are the vibration characteristics of the micro-vibration of the static pressure supporting component to be measured.
Further preferably, the method further comprises the following steps: s3, increasing the elongation of the main piezoelectric actuator by 1/3-1/2 of the thickness of the feeler gauge, and obtaining the static rigidity of the static pressure support component to be measured according to the pressure value measured by the main weighing sensor and the displacement value measured by the eddy current displacement sensor.
More preferably, S3 is performed to adjust the excitation frequency of the main piezoelectric actuator, obtain the real-time vibration frequency by the acceleration sensor, and obtain the dynamic stiffness of the static pressure support member to be measured according to the pressure value measured by the main load cell, the variation of the displacement value measured by the eddy current displacement sensor with the vibration frequency, and the bearing capacity of the static pressure support member to be measured.
More preferably, S3 is performed to adjust the elongation of the sub piezoelectric actuator so that the sub loading head contacts the support plate, the pressure value measured by the sub load cell is 0N, the elongation of the sub piezoelectric actuator is increased by 1/3 to 1/2 the thickness of the feeler gauge, and the angular stiffness of the hydrostatic bearing member to be measured is obtained from the pressure value measured by the sub load cell, the displacement value measured by the eddy current displacement sensor, and the horizontal distance from the sub loading head to the axis of the ball nose jack shaft.
More preferably, the predetermined value of the extension amount of the main piezoelectric actuator and the sub-piezoelectric actuator is 1/3 to 2/3 of the maximum stroke.
Generally, compared with the prior art, the above technical solution conceived by the present invention mainly has the following technical advantages:
1. the invention combines the supporting component, the auxiliary loading component and the main loading component in the same device, realizes the measurement of all hydrostatic bearing indexes including bearing capacity, micro-vibration, static rigidity, dynamic rigidity and angular rigidity, overcomes the defect that the traditional measuring device can only measure a single index, and has high precision, simple structure and easy operation.
2. The angular stiffness is measured by designing the auxiliary loading assembly, and a basis is provided for stability analysis of the static pressure bearing for restraining unbalance loading; the piezoelectric actuators are respectively arranged in the auxiliary loading assembly and the main loading assembly, and are used as loading devices, so that the dynamic stiffness is measured, and a basis is provided for stability analysis of static pressure support disturbance inhibition; the micro-vibration measurement is realized through the acceleration sensor and the eddy current displacement sensor, and a basis is provided for the analysis of the static pressure support for inhibiting the micro-vibration.
3. The measuring head plane of the eddy current displacement sensor is parallel to the upper surface of the acceleration sensor and is 0.2-0.3 mm away, and the displacement of reciprocating vibration is accurately measured while the vibration of the device is not influenced.
4. The invention sets the preset values of the elongation of the main piezoelectric actuator and the auxiliary piezoelectric actuator to be 1/3-2/3 of the maximum stroke of the main piezoelectric actuator and the auxiliary piezoelectric actuator, and avoids the defects that the piezoelectric actuator cannot reach the required force output value due to overlarge elongation or the elongation is too small, the retraction distance is insufficient, and the adjustment of the fluid film thickness is not facilitated.
Drawings
FIG. 1 is a schematic structural diagram of a hydrostatic bearing characteristic testing apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of the general structure of a hydrostatic bearing characteristic testing device according to an embodiment of the present invention;
FIG. 3 is a schematic structural view of a chamfered lock nut according to an embodiment of the present invention.
The same reference numbers will be used throughout the drawings to refer to the same or like elements or structures, wherein: 1-a loading bracket, 2-a secondary loading head, 3-a secondary piezoelectric actuator, 4-a secondary weighing sensor, 5-a primary weighing sensor, 6-a first threaded adapter, 7-a compression spring, 8-a locking nut, 9-a lead screw, 10-a primary piezoelectric actuator, 11-a second threaded adapter, 12-a magnetic suction gauge stand, 13-an eddy current displacement sensor, 14-an acceleration sensor, 15-a ball head ejector rod, 16-a to-be-detected static pressure bearing part, 17-a balancing weight, 18-a supporting plate, 19-a thrust plate, 20-a speed reduction lifter, 21-a portal frame cross beam, 22-a portal frame longitudinal beam, 23-an oil return groove, 24-an oil return hole, 25-a platform and 26-a rigid bracket.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
An embodiment of the present invention provides a hydrostatic bearing characteristic testing apparatus, as shown in fig. 1 and fig. 2, including a supporting assembly, a secondary loading assembly, and a primary loading assembly, wherein:
the supporting assembly comprises a supporting frame, a thrust plate 19 and a platform 25, wherein the supporting frame comprises a portal frame cross beam 21 and a portal frame longitudinal beam 22 which are fixedly connected, and the thrust plate 19 and the portal frame longitudinal beam 22 are both fixed on the platform 25; a static pressure supporting part 16 to be tested is placed at the center of the upper surface of the thrust plate 19, a supporting plate 18 is installed on the static pressure supporting part 16 to be tested, the auxiliary loading assembly is arranged above one end of the supporting plate 18, an acceleration sensor 14 is fixed on the upper surface of the other end of the supporting plate, the main loading assembly is arranged above the center of the supporting plate 18, and a balancing weight 17 is fixed on one side, close to the auxiliary loading assembly, of the upper surface of the supporting plate 18, so that the static pressure supporting part 16 to be tested is prevented from being unparallel to the thrust plate; a loading support 1 is fixed at one end of the thrust plate 19, a magnetic meter base 12 is fixed at the other end of the thrust plate, an eddy current displacement sensor 13 is connected to the tail end of the magnetic meter base 12, the eddy current displacement sensor 13 is located above the acceleration sensor 14, and furthermore, the plane of a measuring head of the eddy current displacement sensor 13 is parallel to the upper surface of the acceleration sensor 14 and is 0.2-0.3 mm away;
the auxiliary loading assembly comprises an auxiliary weighing sensor 4, an auxiliary piezoelectric actuator 3 and an auxiliary loading head 2 which are sequentially in threaded connection from top to bottom, and the auxiliary weighing sensor 4 is connected to the loading support 1 through a bolt;
the main loading assembly comprises a speed reducing lifter 20, a first threaded adapter 6, a main weighing sensor 5, a main piezoelectric actuator 10, a second threaded adapter 11 and a ball head ejector rod 15 which are sequentially in threaded connection from top to bottom, and the ball head ejector rod 15 is positioned at a corresponding position of a ball socket on the upper surface of the static pressure supporting part 16; the speed reduction lifter 20 is fixed on the portal frame beam 21, a screw rod 9 of the speed reduction lifter 20 downwards penetrates through the portal frame beam 21 and is connected with the main weighing sensor 5 through a first threaded adapter 6, the screw rod 9 and the first threaded adapter 6 are vertical to the horizontal plane, and a locking nut 8 sleeved with a compression spring 7 is sleeved at the lower end of the trapezoidal screw rod 9 and can be locked with the portal frame beam 21; specifically, the screw rod 9 is a trapezoidal screw rod, and the lock nut 8 is a chamfer lock nut, as shown in fig. 3.
Further, the horizontal distance from the salient point of the auxiliary loading head 2 to the axis of the ball ejector rod 15 is equal to the horizontal distance from the center of the measuring head of the eddy current displacement sensor 13 to the axis of the ball ejector rod 15.
In particular, the primary 10 and secondary 3 piezoelectric actuators are preferably ceramic piezoelectric actuators, which comprise a closed-loop control of the displacement, cooperating with the load cell.
Specifically, the platform 25 is supported by a rigid support 26, an oil return groove 23 is formed in the platform 25, the oil return groove 23 surrounds the thrust plate 19, an oil return hole 24 is formed in the oil return groove 23, and the bottom of the oil return hole 24 is connected with a hydraulic oil pipe to an oil tank; when a hydrostatic bearing test is carried out, fluid medium flows out of the bearing suspension gap, and the oil return groove 23 is used for realizing the backflow of the fluid medium.
The device is used for testing the hydrostatic pressure bearing characteristics, and specifically comprises the following steps:
s1 selects the structural parameters of the hydrostatic bearing component 16 to be tested and the parameters of the gas or liquid power equipment associated with the component, as well as the structural parameters of the surface microstructure of the thrust plate 19 and the physical parameters of the fluid medium.
S2 a feeler gauge with the required fluid film thickness dimension is inserted between the static pressure supporting part 16 to be measured and the thrust plate 19, the elongation of the main piezoelectric actuator 10 and the auxiliary piezoelectric actuator 3 is adjusted to a preset value, the auxiliary loading head 2 is not contacted with the supporting plate 18, meanwhile, the screw rod 9 of the deceleration lifter 20 is adjusted to drive the ball ejector rod 15 to push the supporting plate 18 on the static pressure supporting part 16 to be measured, namely, the ball of the ball ejector rod 15 is attached to the upper surface ball socket of the static pressure supporting part 16, the pressure value measured by the main weighing sensor 5 is 0N, and then the screw rod 9 and the portal frame beam 21 are locked through the locking nut 8.
S3, slowly drawing out the feeler, and simultaneously introducing a fluid medium between the static pressure supporting part 16 to be measured and the thrust plate 19 to enable the static pressure supporting part 16 to be measured to be suspended on the thrust plate 19, wherein the pressure value measured by the main weighing sensor 5 is the bearing force F of the static pressure supporting part 16 to be measured; the vibration frequency measured by the acceleration sensor 14 and the displacement value measured by the eddy current displacement sensor 1 are the vibration characteristics of the micro-vibration of the static pressure support component 16 to be measured.
S4, static stiffness, dynamic stiffness and angular stiffness are measured respectively:
(1) measuring static rigidity: increasing the elongation of the main piezoelectric actuator 10 by 1/3-1/2 of the feeler gauge thickness according to the pressure value F measured by the main weighing sensor 5sCalculating the displacement value delta S measured by the eddy current displacement sensor 13 to obtain the static rigidity k of the static pressure supporting component 16 to be measureds＝Fs/ΔS；
(2) Measuring dynamic stiffness: setting the excitation frequency of the main piezoelectric actuator 10 as a small initial value, continuously increasing the excitation frequency of the main piezoelectric actuator 10 within the range of less than the natural frequency of the testing device, acquiring the real-time vibration frequency F through the acceleration sensor 14, and simultaneously measuring the real-time pressure value F through the main weighing sensor 5d(t) measuring the real-time displacement value S by the eddy current displacement sensor 13A(ii) a From Fd(t)＝F+FAsin (2 π × F × t) can be calculated to obtain the real-time amplitude FAWherein t is time, and F is bearing capacity of the static pressure supporting part 16 to be measured, so as to obtain dynamic stiffness k of the static pressure supporting part 16 to be measuredd＝FA/SA；
Specifically, in the process of increasing the excitation frequency, the displacement amplitude S collected by the eddy current displacement sensor 13AWhen the maximum value is reached, the minimum dynamic stiffness of the static pressure supporting component 16 to be measured can be obtained according to the maximum value; meanwhile, when the excitation frequency is set as the vibration frequency of the static pressure supporting part under the working condition, the dynamic stiffness under the working condition can be measured according to the method;
(3) measurement of angular stiffness: adjusting the elongation of the auxiliary piezoelectric actuator 3 to make the auxiliary loading head 2 attached to the support plate 18, determining the critical position when the value measured by the eddy current displacement sensor 13 changes, and weighing the auxiliary loadThe pressure value measured by the sensor 4 is 0N; the elongation of the auxiliary piezoelectric actuator 3 is increased by 1/3-1/2 of the thickness of the feeler gauge, and the pressure value F is measured according to the auxiliary weighing sensor 4θAnd the displacement value Delta S measured by the eddy current displacement sensor 13θObtaining the angular rigidity k of the static pressure supporting part 16 to be measured according to the horizontal distance L from the salient point of the auxiliary loading head 2 to the axis of the ball head ejector rod 15θ＝Fθ×L/arctan(ΔSθ/L)；
Thus, the bearing capacity, the micro-vibration, the static stiffness, the dynamic stiffness and the angular stiffness of the hydrostatic bearing part 16 to be tested are obtained, and the hydrostatic bearing characteristic test is completed.
Preferably, the predetermined value of the extension amount of the main piezoelectric actuator 10 and the sub-piezoelectric actuator 3 is 1/3 to 2/3 of the maximum stroke, and more preferably 1/2 of the maximum stroke.
Specifically, when the elongation of the main piezoelectric actuator 10 or the auxiliary piezoelectric actuator 3 is increased, the value is 1/3-1/2 of the thickness of the feeler gauge, specifically, the value is selected according to the actual thickness of the fluid film, and when the thickness of the film is larger, 1/2 can be selected, and otherwise, 1/3 can be selected.
Specifically, the throttler, oil seal surface, lubricating medium, oil supply or air supply system, etc. associated with the static pressure bearing component may affect the performance of the static pressure bearing component, the static pressure bearing component 16 to be measured is a liquid floating pad or an air floating pad, and the fluid medium is air, lubricating oil or water.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (10)
1. A hydrostatic bearing characteristic test device, characterized by comprising a support assembly, a secondary loading assembly and a primary loading assembly, wherein:
the supporting assembly comprises a platform (25), a thrust plate (19) and a supporting frame, wherein the thrust plate (19) and the supporting frame are fixed on the platform (25), a static pressure bearing part (16) to be tested is placed at the center of the upper surface of the thrust plate (19), a supporting plate (18) is installed on the static pressure bearing part (16) to be tested, the auxiliary loading assembly is arranged above one end of the supporting plate (18), an acceleration sensor (14) is fixed on the upper surface of the other end of the supporting plate, the main loading assembly is arranged above the center of the supporting plate (18), and a balancing weight (17) is fixed on one side, close to the auxiliary loading assembly, of the upper surface of the supporting plate (18); one end of the thrust plate (19) is fixed with a loading support (1), the other end of the thrust plate is fixed with a magnetic meter base (12), the tail end of the magnetic meter base (12) is connected with an eddy current displacement sensor (13), and the eddy current displacement sensor (13) is positioned above the acceleration sensor (14); the static pressure support component (16) to be measured is a liquid floating pad or an air floating pad;
the auxiliary loading assembly comprises an auxiliary weighing sensor (4), an auxiliary piezoelectric actuator (3) and an auxiliary loading head (2) which are sequentially connected from top to bottom, and the auxiliary weighing sensor (4) is fixed on the loading support (1);
the main loading assembly comprises a speed reduction lifter (20), a main weighing sensor (5), a main piezoelectric actuator (10) and a ball head ejector rod (15) which are sequentially connected from top to bottom, the speed reduction lifter (20) is fixed on the support frame, and a lead screw (9) of the speed reduction lifter (20) penetrates downwards the support frame and the main weighing sensor (5) are connected.
2. The hydrostatic bearing characteristic test device according to claim 1, wherein a probe plane of the eddy current displacement sensor (13) is parallel to an upper surface of the acceleration sensor (14) and spaced 0.2 to 0.3mm apart.
3. The hydrostatic bearing characteristic test device according to claim 1, wherein the horizontal distance from the measuring head of the secondary loading head (2) and the eddy current displacement sensor (13) to the axis of the ball ejector (15) is equal.
4. The hydrostatic bearing characteristic test device according to claim 1, wherein a lock nut (8) is provided at a lower end of the screw (9) of the deceleration lift (20), and the compression spring (7) is fitted over the lock nut (8).
5. The hydrostatic bearing characteristic test device according to any one of claims 1 to 4, wherein the land (25) is provided with an oil return groove (23), and the oil return groove (23) is provided around the thrust plate (19).
6. A hydrostatic bearing characteristic test method, implemented using the apparatus of any one of claims 1 to 5, comprising the steps of:
s1 a feeler gauge is inserted between a static pressure supporting part (16) to be measured and a thrust plate (19), the elongation of a main piezoelectric actuator (10) and an auxiliary piezoelectric actuator (3) is adjusted to a preset value, an auxiliary loading head (2) is not contacted with a supporting plate (18), a lead screw (9) of a speed reduction lifter (20) is adjusted at the same time to drive a ball head ejector rod (15) to push the supporting plate (18) on the static pressure supporting part (16) to be measured, the pressure value measured by a main weighing sensor (5) is 0N, and then the lead screw (9) is locked;
s2, drawing out the feeler gauge, introducing a fluid medium between the static pressure supporting component (16) to be measured and the thrust plate (19), suspending the static pressure supporting component (16) to be measured on the thrust plate (19), wherein the pressure value measured by the main weighing sensor (5) is the bearing capacity of the static pressure supporting component (16) to be measured, and the vibration frequency measured by the acceleration sensor (14) and the displacement value measured by the eddy current displacement sensor (13) are the vibration characteristics of micro-vibration of the static pressure supporting component (16) to be measured.
7. The hydrostatic bearing characteristic test method of claim 6, further comprising the steps of: s3, the elongation of the main piezoelectric actuator (10) is increased by 1/3-1/2 of the thickness of the feeler gauge, and the static stiffness of the static pressure support component (16) to be measured is obtained according to the pressure value measured by the main weighing sensor (5) and the displacement value measured by the eddy current displacement sensor (13).
8. The hydrostatic bearing characteristic test method of claim 6, further comprising the steps of: s3, adjusting the excitation frequency of the main piezoelectric actuator (10), acquiring the real-time vibration frequency through the acceleration sensor (14), and acquiring the dynamic stiffness of the static pressure supporting component (16) to be measured according to the pressure value measured by the main weighing sensor (5), the change situation of the displacement value measured by the eddy current displacement sensor (13) along with the vibration frequency and the bearing capacity of the static pressure supporting component (16) to be measured.
9. The hydrostatic bearing characteristic test method of claim 6, further comprising the steps of: s3, adjusting the elongation of the auxiliary piezoelectric actuator (3) to enable the auxiliary loading head (2) to be in contact with the support plate (18), setting the pressure value measured by the auxiliary weighing sensor (4) to be 0N, increasing the elongation of the auxiliary piezoelectric actuator (3) to be 1/3-1/2 of the feeler gauge thickness, and obtaining the angular stiffness of the to-be-measured static pressure supporting component (16) according to the pressure value measured by the auxiliary weighing sensor (4), the displacement value measured by the eddy current displacement sensor (13) and the horizontal distance from the auxiliary loading head (2) to the axis of the ball ejector rod (15).
10. The hydrostatic bearing characteristic test method according to any one of claims 6 to 9, wherein the predetermined values of the elongations of the primary piezoelectric actuator (10) and the secondary piezoelectric actuator (3) are 1/3 to 2/3 of the maximum stroke thereof.
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| CN102032988A (en) * | 2010-11-26 | 2011-04-27 | 西安交通大学 | Decoupling measurement method for dynamic rigidity of hydrodynamic thrust bearing |
| CN203502221U (en) * | 2013-10-11 | 2014-03-26 | 华中科技大学 | Hydrostatic bearing test bed |
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| JP2000202737A (en) * | 1999-01-13 | 2000-07-25 | Toshiba Mach Co Ltd | Measuring device for static rigidity and dynamic pressure effect during operation of pneumatic static pressure spindle |
| CN2741032Y (en) * | 2004-06-11 | 2005-11-16 | 西安工业学院 | Presure distribution testing table of air static pressure bearing |
| CN102147320B (en) * | 2011-02-28 | 2012-06-13 | 西安理工大学 | Method and device for testing axial rigidity and radial rigidity of rotary hydrostatic guide rail |
| CN102980755B (en) * | 2012-11-16 | 2015-05-20 | 北京工业大学 | Quantitive type experimental device for dynamic and static performances of static-pressure rotary table |
| CN106404400B (en) * | 2016-11-21 | 2018-09-14 | 西安工业大学 | A kind of monoblock type high rigidity gas thrust bearing dynamic performance testing experimental bench |
| CN110231171B (en) * | 2018-03-06 | 2020-07-14 | 华中科技大学 | Hydrostatic pressure gyration test bench |
| CN108507785B (en) * | 2018-04-10 | 2019-12-24 | 西安交通大学 | Device and method for testing dynamic characteristics of main shaft in rotation state |
| CN110057582B (en) * | 2019-05-23 | 2021-09-24 | 河南科技大学 | Hydrostatic bearing radial rigidity testing arrangement |
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| CN102032988A (en) * | 2010-11-26 | 2011-04-27 | 西安交通大学 | Decoupling measurement method for dynamic rigidity of hydrodynamic thrust bearing |
| CN203502221U (en) * | 2013-10-11 | 2014-03-26 | 华中科技大学 | Hydrostatic bearing test bed |
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