CN110682680B - 液体喷出特性检测装置及液体喷出装置 - Google Patents
液体喷出特性检测装置及液体喷出装置 Download PDFInfo
- Publication number
- CN110682680B CN110682680B CN201910556207.XA CN201910556207A CN110682680B CN 110682680 B CN110682680 B CN 110682680B CN 201910556207 A CN201910556207 A CN 201910556207A CN 110682680 B CN110682680 B CN 110682680B
- Authority
- CN
- China
- Prior art keywords
- liquid
- nozzle
- characteristic detection
- liquid ejection
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 208
- 238000001514 detection method Methods 0.000 title claims abstract description 48
- 238000005286 illumination Methods 0.000 claims abstract description 36
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 230000001681 protective effect Effects 0.000 claims description 5
- 239000000463 material Substances 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000007599 discharging Methods 0.000 description 3
- 229920003002 synthetic resin Polymers 0.000 description 3
- 239000000057 synthetic resin Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/0456—Control methods or devices therefor, e.g. driver circuits, control circuits detecting drop size, volume or weight
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/165—Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
- B41J2/16579—Detection means therefor, e.g. for nozzle clogging
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04563—Control methods or devices therefor, e.g. driver circuits, control circuits detecting head temperature; Ink temperature
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04586—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads of a type not covered by groups B41J2/04575 - B41J2/04585, or of an undefined type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/1433—Structure of nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/21—Ink jet for multi-colour printing
- B41J2/2132—Print quality control characterised by dot disposition, e.g. for reducing white stripes or banding
- B41J2/2142—Detection of malfunctioning nozzles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
- G01N21/3151—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths using two sources of radiation of different wavelengths
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14354—Sensor in each pressure chamber
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Coating Apparatus (AREA)
- Quality & Reliability (AREA)
Abstract
一种液体喷出特性检测装置及液体喷出装置。本发明实施例的液体喷出特性检测装置包括:液体供应单元,供应液体;液体引导单元,包括供从液体供应单元供应的液体通过的流路和与流路连通且安装喷嘴的喷嘴安装部,液体引导单元将从液体供应单元供应的液体向安装于喷嘴安装部的喷嘴引导;照明单元,向通过液体引导单元的流路的液体照射光;以及,摄像机,朝向喷嘴配置,并获取从喷嘴喷出的液体的图像。
Description
技术领域
本发明涉及一种用于检测从喷嘴喷出的液体的喷出特性的装置。
背景技术
通常,喷出液体的喷嘴用于各种产业领域。液体应以定量且符合条件的形态从喷嘴喷出。因此,为了判断液体从喷嘴是否正常喷出,使用检测从喷嘴喷出的液体的喷出特性的液体喷出特性检测装置。
以往的液体喷出特性检测装置由配置在喷嘴外部的光源和以喷嘴为基准配置在光源的相反侧的摄像机构成。这样的液体喷出特性检测装置在使用光源照明喷嘴及喷嘴周边的状态下,使用摄像机获得从喷嘴喷出的液体的图像,分析获得的液体的图像,从而检测液体的喷出特性。
然而,在以往的液体喷出特性检测装置中,光源配置在喷嘴外部而整体上照明喷嘴及喷嘴周围的装置或部件,因此从光源照射的光在喷嘴周围的环境中散射,或者被喷嘴或者喷嘴周围的装置或部件衍射或漫反射。因此,由于这样的光的散射、衍射或者漫反射,难以获得清晰的图像,存在为了获得清晰的图像而调节光源位置、从光源照射的光的光量、光源的数量等的过程复杂的问题。
现有技术文献
专利文献
韩国公开专利第10-2016-0127949号
发明内容
本发明为了解决上述以往的技术问题,本发明的目的在于提供一种液体喷出特性检测装置,其能够有效地检测从喷嘴喷出的液体的喷出特性。
用于达到上述目的的本发明实施例的液体喷出特性检测装置,可以是,包括:液体供应单元,供应液体;液体引导单元,包括供从液体供应单元供应的液体通过的流路和与流路连通且安装喷嘴的喷嘴安装部,液体引导单元将从液体供应单元供应的液体向安装于喷嘴安装部的喷嘴引导;照明单元,向通过液体引导单元的流路的液体照射光;以及,摄像机,朝向喷嘴配置,并获取从喷嘴喷出的液体的图像。
可以是,液体引导单元包括:主体,具有内部空间;以及,管道,配置在主体的内部空间内,并与液体供应单元及喷嘴安装部连接,形成流路。
可以是,构成内部空间的主体的内表面由光反射面构成。
可以是,光反射面由光反射构件或光反射涂层构成。
照明单元可包括多个光源,多个光源可沿流路的圆周配置。
照明单元可包括多个光源,多个光源可沿流路的长度配置。
可以是,照明单元包括:多个照明构件,沿流路的圆周彼此以预定间隔配置;多个光源,在多个照明构件的每个中排列一列以上多个光源;以及,多个连接构件,与多个照明构件的每个以能够拆卸的方式连接,并与多个照明构件电连接。
可以是,多个连接构件构成为能够调节多个照明构件之间的角度。
可以是,照明单元还包括保护膜,保护膜构成为覆盖多个光源而保护多个光源。
可以是,多个光源中至少一部分发出互不相同波长的光。
可以是,多个光源分成多个组配置,多个组中任意一个组内的光源发出具有与从其他组内的光源发出的光的波长不同波长的光。
可以是,液体引导单元包括安装摄像机的摄像机安装部。
本发明实施例的液体喷出特性检测装置可还包括温度调节单元,温度调节单元调节从液体供应单元供应的液体的温度。
本发明实施例的液体喷出特性检测装置可还包括压力调节单元,压力调节单元调节从液体供应单元供应的液体的压力。
本发明提供一种液体喷出装置,通过喷嘴喷出液体,其中,液体喷出装置包括:液体引导单元,在内部具备供液体通过的流路;以及,照明单元,向通过流路的液体照射光,液体以被照明单元照亮的状态通过喷嘴喷出。
可以是,所述照明单元设置在所述液体引导单元的内部或外部。
根据本发明实施例的液体喷出特性检测装置,通过液体引导单元内的流路的液体能够以在液体引导单元的内部被照明单元照亮的状态,从喷嘴的喷口喷出。因此,能够以在喷嘴的外部不存在光的散射、喷嘴及喷嘴周围装置或部件导致的光衍射及漫反射的方式获得液体的清晰图像,能够基于获得的液体的清晰图像有效地检测液体的喷出特性。
附图说明
图1是简要示出本发明实施例的液体喷出特性检测装置的截面图。
图2是简要示出本发明实施例的液体喷出特性检测装置的液体引导单元及照明单元的截面图。
图3是简要示出本发明实施例的液体喷出特性检测装置的照明单元的图。
图4是简要示出本发明实施例的液体喷出特性检测装置的照明单元的另一例的截面图。
图5是简要示出本发明实施例的液体喷出特性检测装置的其他例的图。
图6是简要示出本发明实施例的液体喷出特性检测装置的再其他例的图。
图7是本发明实施例的液体喷出特性检测装置显示的喷出的液体的喷出特性的图像。
附图标记说明
10:液体供应单元;20:喷嘴;30:液体引导单元;40:照明单元;50:摄像机。
具体实施方式
以下,参照附图,说明本发明实施例的液体喷出特性检测装置。
本发明实施例的液体喷出特性检测装置可应用于检测从各种喷嘴喷出的液体的喷出特性。例如,本发明的实施例的液体喷出特性检测装置可用于检测从打印装置中用于喷出墨水的喷嘴、光刻工序等半导体制作工序中用于在晶片或基板上涂布光致抗蚀剂等液体的喷嘴、为了清洗各种产业用设备及/或部件而喷出清洗液的喷嘴、显示器制作工序中用于在面板上涂布液晶或浆料的喷嘴等用于喷出液体的各种产业用喷嘴喷出的液体的特性。
此外,本发明实施例的液体喷出特性检测装置可应用于检测从将液体以各种形态喷出的喷嘴喷出的液体的喷出特性。例如,液体喷出特性检测装置可用于检测从喷嘴以液柱、雾化或液滴状态喷出的液体的喷出特性。
例如,液体的喷出特性可以是从喷嘴喷出的液体的形状、角度、宽度、长度、大小、规模、液滴直径、液滴形状、液滴个数、雾化形状、化宽度等。
如图1所示,本发明实施例的液体喷出特性检测装置包括:液体供应单元10,供应液体;液体引导单元30,具有流路31和喷嘴安装部32,该流路31供从液体供应单元10供应的液体通过,该喷嘴安装部32安装有喷嘴20;照明单元40,配置在液体引导单元30的内部,并向通过流路31的液体照射光;以及,摄像机50,朝向安装在喷嘴安装部32的喷嘴20配置而获取从喷嘴20喷出的液体的图像。
液体供应单元10可由泵等构成。本发明实施例的液体喷出特性检测装置可改变从液体供应单元10供应的液体的温度(粘度)、压力等条件来检测从喷嘴20喷出的液体的喷出特性。为此,液体喷出特性检测装置可包括:压力调节单元60,调节从液体供应单元10供应的液体的压力;以及,温度调节单元70,调节从液体供应单元10供应的液体的温度。压力调节单元60可由液体调节器等构成。温度调节单元70可包括加热液体的加热器及冷却液体的冷却器。如此,液体喷出特性检测装置包括用于调节从液体供应单元10供应的液体的压力及温度的压力调节单元60及温度调节单元70,因此可通过对液体的条件进行各种改变来检测从喷嘴20喷出的液体的喷出特性。
液体引导单元30起到将从液体供应单元10供应的液体向安装在喷嘴安装部32的喷嘴20引导的作用。液体引导单元30可包括具有内部空间331的主体33和配置在主体33的内部空间331内并连接于液体供应单元10及喷嘴安装部32而形成流路31的管道34。
喷嘴安装部32可设置在主体33的外表面。喷嘴安装部32可与流路31连通。当由管道34形成流路31时,喷嘴安装部32可与管道34连通。
在喷嘴安装部32可连接各种类型的喷嘴20。喷嘴安装部32可构成为通过螺纹接合方式、卡扣接合方式、路厄锁(luer lock)方式或螺栓等紧固构件的接合方式将喷嘴20接合到喷嘴安装部32。如此,在喷嘴安装部32可连接各种类型的喷嘴20,因此可检测从各种类型的喷嘴20喷出的液体的喷出特性。在此,各种类型的喷嘴20可包括具备一个或多个喷口21的喷嘴、喷口21以缝隙形态形成的喷嘴。
主体33可具备用于安装摄像机50的摄像机安装部35。摄像机安装部35可构成为通过螺纹接合方式、卡扣接合方式、路厄锁(luer lock)方式或螺栓等紧固构件的接合方式将摄像机50接合到摄像机安装部35。如此,摄像机50可安装在主体33所具备的摄像机安装部35,因此摄像机50可一体连接于主体33,由此,无需配置用于固定摄像机50的另外装置,可简单地构成液体喷出特性检测装置。另一方面,摄像机安装部35可构成为能够调整摄像机50相对于主体33的位置。
优选的是,构成流路31的管道34由透明或半透明材质构成,以使得从照明单元40照射的光可达到通过流路31的光。例如,管道34可由PVC等合成树脂构成。
此外,主体33可由能够切断光的材料构成,以便防止向通过流路31的液体照射的光向外部漏出。此外,优选的是,形成内部空间331的主体33的内表面由光反射面332构成,以便能够防止向通过流路31的液体照射的光向外部漏出并使光集中到液体。当主体33由金属构成时,主体33的内表面可通过研磨加工来形成光反射面332。作为其他例,可通过在主体33的内表面附着由光反射材料构成的光反射构件或将主体33的内表面用光反射物质进行涂层,形成光反射面332。通过这样的光反射面332,可防止照射到液体的光向外部漏出,并且光可集中到液体。
如图1至3所示,照明单元40可包括:多个照明构件41,沿流路31的圆周以预定间隔配置;多个光源42,在多个照明构件41的每个中排列一列以上;以及,多个连接构件43,可拆卸地连接于多个照明构件41的每个,将多个照明构件41电连接。
多个照明构件41沿流路31的圆周以预定间隔配置,由此多个光源42可沿流路31的圆周配置。此外,在多个照明构件41的每个中排列一列以上的多个光源42,由此多个光源42可沿流路31的长度配置。如此,多个光源42可沿流路31的圆周及/或长度配置,因此可向通过流路31的液体均匀传递光。
多个光源42可根据喷嘴20的特性及/或液体的特性同时打开/关闭或选择性打开/关闭多个光源20中的一部分。例如,可根据喷嘴20的喷口21的大小、喷口21的数量、喷嘴20的数量等喷嘴20的特性及/或液体的温度、液体的压力、液体的粘度等液体的特性,多个光源42同时打开/关闭或选择性打开/关闭多个光源20中的一部分,以便能够适当调节从多个光源42照射的光的光量。多个光源20中的一部分选择性工作,由此可改变被照射光的流路31的宽度及/或长度。
此外,可构成为多个光源42中的至少一部分发出互不相同波长的光。例如,多个光源42可构成为分别发出包括红外光、紫外光、红光、绿光和蓝光的各种波长的光。例如,可构成为,多个光源42分成多个组配置,多个组中任一个组内的光源42发出具有与从另一个组内的光源42发出的光的波长不同波长的光。在这种情况下,可以是,一个组内的多个光源42沿流路31的圆周配置一列以上,多个组沿流路31的长度依次配置。因此,发出具有互不相同波长的光的多个光源42可沿流路31的长度配置。作为其他例,可以是,一个组内的多个光源42沿流路31的长度配置一列以上,多个组沿流路31的圆周依次配置。因此,发出具有互不相同波长的光的多个光源42可沿流路31的圆周配置。如此,多个光源42可构成为发出多种波长的光,因此可根据液体的温度、液体的压力、液体的粘度等液体的特性,向液体照射各种波长中任一个波长的光,或者向液体照射由具有互不相同波长的多个光组合的光。因此,根据液体的特性,可获得从喷嘴20喷出的液体的清晰的图像,并且基于液体的清晰的图像,可有效地检测液体的喷出特性。
连接构件43可以可装卸地连接于照明构件41。例如,连接构件43可通过紧配合、螺丝或螺母等紧固构件可装卸地连接于照明构件41。因此,多个照明构件41能够以所需数量通过多个连接构件43彼此连接。
多个连接构件43可构成为能够调节多个照明构件41之间的角度。例如,可构成为各个连接构件43具备铰链轴而多个照明构件41能够彼此之间以铰链轴为中心相对旋转。作为其他例,各个连接构件43可由可弯曲且能够保持弯曲形状的导电材质构成。如此,可调节多个照明构件41之间的角度,因此可根据流路21的大小及数量适当配置多个照明构件41。例如,如图4所示,当在一个主体33的内部配置多个管道34而构成多个流路31时,多个照明构件41配置成适当数量,适当调节多个照明构件41之间的角度,由此多个照明构件41可配置在多个流路31的圆周。因此,可根据流路31的大小及数量适当配置多个照明构件41,由此,能够向通过多个流路31的液体均匀传递光,从而可获得从喷嘴20喷出的液体的清晰的图像,并且能够基于液体的清晰的图像,有效地检测喷出特性。
照明单元40可还包括保护膜44,该保护膜44构成为覆盖多个光源42而保护多个光源42。由此,在搬运多个照明构件41的过程中或在配置于主体33的内部的过程中,可在外部冲击或污染中保护多个光源42。保护膜44可由硅胶等具有冲击吸收力以及耐污染性的合成树脂构成。例如,保护膜44可通过在照明构件41上配置多个光源42的状态下将合成树脂等涂布到多个光源42上来形成。
另一方面,如图1及图2所示,多个照明构件41中至少一个照明构件41可固定到固定在主体33的内部的固定构件45上。因此,多个照明构件41可在通过多个连接构件43保持形状的状态下固定于主体33的内部。例如,固定构件45可包括导电构件,可与电源80连接。因此,可从电源80向固定于固定构件45的照明构件41施加电流,并且施加到固定于固定构件45的照明构件41的电流通过多个连接构件43可向多个连接构件45施加。
图5示出本发明实施例的液体喷出特性检测装置的其他例。如图5所示,在主体33的内部空间331内不具备另外管道34,主体33的内部空间331可构成流路31。在这种情况下,照明单元40可固定到形成内部空间331的主体33的内表面。
图6示出本发明实施例的液体喷出特性检测装置的再其他例。如图6所示,照明单元40可配置在主体33的外部,而未配置在主体33的内部。而且,配置照明单元40的主体33的部分可由光透射部333构成,该光透射部333由可透射从照明单元40发出的光的材料构成。根据这种构成,从配置在主体33的外部的照明单元40发出的光通过光透射部333可向流路31中的液体传递。
根据本发明实施例的液体喷出特性检测装置,沿液体引导单元30内的流路31流动的液体能够以在液体引导单元30的内部被照明单元40照亮的状态从喷嘴20的喷口21喷出。由此,如图7所示,能够以在喷嘴20的外部不存在光的散射、喷嘴20及喷嘴20周围装置或部件导致的光衍射及漫反射的方式获得液体的清晰图像,能够基于获得的液体的清晰图像有效地检测液体的喷出特性。而且,可基于检测到的液体的喷出特性来检侧或评价液体的特性和喷嘴的特性。
虽示例性说明了本发明的优选实施例,但是本发明的范围并不限于这样的特定实施例,在权利要求书中记载范围内可适当变更。
Claims (16)
1.一种液体喷出特性检测装置,包括:
液体供应单元,供应液体;
液体引导单元,包括供从所述液体供应单元供应的液体通过的流路和与所述流路连通且安装喷嘴的喷嘴安装部,所述液体引导单元将从所述液体供应单元供应的液体向安装于所述喷嘴安装部的喷嘴引导;
照明单元,向通过所述液体引导单元的流路的液体照射光;以及,
摄像机,朝向所述喷嘴配置,并获取从所述喷嘴喷出的液体的图像。
2.根据权利要求1所述的液体喷出特性检测装置,其中,
所述液体引导单元包括:
主体,具有内部空间;以及,
管道,配置在所述主体的内部空间内,并与所述液体供应单元及所述喷嘴安装部连接,形成所述流路。
3.根据权利要求2所述的液体喷出特性检测装置,其中,
构成所述内部空间的所述主体的内表面由光反射面构成。
4.根据权利要求3所述的液体喷出特性检测装置,其中,
所述光反射面由光反射构件或光反射涂层构成。
5.根据权利要求1所述的液体喷出特性检测装置,其中,
所述照明单元包括多个光源,
所述多个光源沿所述流路的圆周配置。
6.根据权利要求1所述的液体喷出特性检测装置,其中,
所述照明单元包括多个光源,
所述多个光源沿所述流路的长度配置。
7.根据权利要求1所述的液体喷出特性检测装置,其中,
所述照明单元包括:
多个照明构件,沿所述流路的圆周彼此以预定间隔配置;
多个光源,在所述多个照明构件的每个中排列一列以上所述多个光源;以及,
多个连接构件,与所述多个照明构件的每个以能够拆卸的方式连接,并与所述多个照明构件电连接。
8.根据权利要求7所述的液体喷出特性检测装置,其中,
所述多个连接构件构成为能够调节所述多个照明构件之间的角度。
9.根据权利要求7所述的液体喷出特性检测装置,其中,
所述照明单元还包括保护膜,所述保护膜构成为覆盖所述多个光源而保护所述多个光源。
10.根据权利要求5至9中任一项所述的液体喷出特性检测装置,其中,
所述多个光源中至少一部分发出互不相同波长的光。
11.根据权利要求10所述的液体喷出特性检测装置,其中,
所述多个光源分成多个组配置,所述多个组中任意一个组内的光源发出具有与从其他组内的光源发出的光的波长不同波长的光。
12.根据权利要求1所述的液体喷出特性检测装置,其中,
所述液体引导单元包括安装所述摄像机的摄像机安装部。
13.根据权利要求1所述的液体喷出特性检测装置,其中,
所述液体喷出特性检测装置还包括温度调节单元,所述温度调节单元调节从所述液体供应单元供应的液体的温度。
14.根据权利要求1所述的液体喷出特性检测装置,其中,
所述液体喷出特性检测装置还包括压力调节单元,所述压力调节单元调节从所述液体供应单元供应的液体的压力。
15.一种液体喷出装置,通过喷嘴喷出液体,其中,所述液体喷出装置包括:
液体引导单元,在内部具备供所述液体通过的流路;
照明单元,向通过所述流路的液体照射光,从而使得所述液体以被照亮的状态通过所述喷嘴喷出,以及,
摄像机,获取从所述喷嘴喷出的液体的图像。
16.根据权利要求15所述的液体喷出装置,其中,
所述照明单元设置在所述液体引导单元的内部或外部。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2018-0077816 | 2018-07-04 | ||
KR1020180077816A KR102120952B1 (ko) | 2018-07-04 | 2018-07-04 | 액체 토출 특성 검출 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110682680A CN110682680A (zh) | 2020-01-14 |
CN110682680B true CN110682680B (zh) | 2021-07-20 |
Family
ID=69101819
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910556207.XA Active CN110682680B (zh) | 2018-07-04 | 2019-06-25 | 液体喷出特性检测装置及液体喷出装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US10751990B2 (zh) |
KR (1) | KR102120952B1 (zh) |
CN (1) | CN110682680B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102254184B1 (ko) * | 2020-03-27 | 2021-05-21 | 무진전자 주식회사 | 광학 카메라 기반의 반도체 장비 안전 인터락 시스템 |
KR102254185B1 (ko) * | 2020-03-27 | 2021-05-21 | 무진전자 주식회사 | 포토 센서 기반의 반도체 장비 안전 인터락 시스템 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008012671A1 (en) * | 2006-07-28 | 2008-01-31 | Antonio Maccari | System for controlling operation of the nozzles of a printing head |
CN201120349Y (zh) * | 2007-10-19 | 2008-09-24 | 黄文笔 | 加载光束的喷水头 |
CN203920030U (zh) * | 2014-06-03 | 2014-11-05 | 广州市爱司凯科技股份有限公司 | 墨滴观测仪 |
CN107696700A (zh) * | 2017-08-18 | 2018-02-16 | 华中科技大学 | 一种具有复合检测功能的电喷印喷头 |
CN108212636A (zh) * | 2017-12-20 | 2018-06-29 | 李万 | 光影人工喷泉 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10264411A (ja) * | 1997-03-28 | 1998-10-06 | Ricoh Co Ltd | 液体回収機 |
US7325894B2 (en) * | 2004-03-23 | 2008-02-05 | Fujifilm Corporation | Liquid droplet discharge head, liquid droplet discharge device, and image forming apparatus |
JP4887310B2 (ja) * | 2008-01-29 | 2012-02-29 | 東京エレクトロン株式会社 | 液処理装置 |
KR101675784B1 (ko) | 2015-04-28 | 2016-11-14 | 세메스 주식회사 | 노즐 검사 장치 및 방법 |
-
2018
- 2018-07-04 KR KR1020180077816A patent/KR102120952B1/ko active IP Right Grant
-
2019
- 2019-06-25 CN CN201910556207.XA patent/CN110682680B/zh active Active
- 2019-07-03 US US16/503,427 patent/US10751990B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008012671A1 (en) * | 2006-07-28 | 2008-01-31 | Antonio Maccari | System for controlling operation of the nozzles of a printing head |
CN201120349Y (zh) * | 2007-10-19 | 2008-09-24 | 黄文笔 | 加载光束的喷水头 |
CN203920030U (zh) * | 2014-06-03 | 2014-11-05 | 广州市爱司凯科技股份有限公司 | 墨滴观测仪 |
CN107696700A (zh) * | 2017-08-18 | 2018-02-16 | 华中科技大学 | 一种具有复合检测功能的电喷印喷头 |
CN108212636A (zh) * | 2017-12-20 | 2018-06-29 | 李万 | 光影人工喷泉 |
Also Published As
Publication number | Publication date |
---|---|
KR102120952B1 (ko) | 2020-06-09 |
US10751990B2 (en) | 2020-08-25 |
KR20200004664A (ko) | 2020-01-14 |
US20200009861A1 (en) | 2020-01-09 |
CN110682680A (zh) | 2020-01-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN110682680B (zh) | 液体喷出特性检测装置及液体喷出装置 | |
ES2930424T3 (es) | Sistema de inspección | |
US5856833A (en) | Optical sensor for ink jet printing system | |
KR20130056845A (ko) | 다수 열의 확장·축소가능한 led-uv 모듈 | |
US8231252B2 (en) | Lamp unit and projector employing same | |
JP6185864B2 (ja) | 積分球 | |
US20190162594A1 (en) | Spectral Reflectometer | |
US9553214B2 (en) | Positioning method of photoelectric conversion device, and liquid ejecting apparatus | |
KR101333361B1 (ko) | 광조사 장치 | |
JPH0749267A (ja) | 吐出された加熱材料からの放射エネルギを監視する方法および装置 | |
US10479104B2 (en) | Optical module and electronic apparatus | |
US9992383B2 (en) | Color measurement apparatus and printing apparatus | |
US8500235B2 (en) | Recording apparatus | |
US10989855B2 (en) | Illumination device for projecting light in a predetermined illumination pattern on a surface | |
US7671988B2 (en) | Detection of particles | |
TW201700306A (zh) | 長條殼體、長條殼體的支撐機構、以及光照射裝置 | |
JPH11260568A (ja) | 照明装置 | |
KR20100128075A (ko) | 도광판 제조장치 | |
US20150286093A1 (en) | Light source system and liquid crystal display device including the same | |
JP2010125599A (ja) | 記録装置、その記録ヘッドの位置決め方法、及び、その製造方法 | |
EP3932571B1 (en) | Air purge unit | |
US6300621B1 (en) | Color calibration device and method | |
JP2006062263A (ja) | インクジェット記録装置 | |
JP2003215036A (ja) | 光伝送構造及びこれを備えたダスト測定装置 | |
CN105983784A (zh) | 保护屏障和激光照射*** |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |