CN110614361A - Method for preparing block getter by microwave sintering - Google Patents

Method for preparing block getter by microwave sintering Download PDF

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Publication number
CN110614361A
CN110614361A CN201910984190.8A CN201910984190A CN110614361A CN 110614361 A CN110614361 A CN 110614361A CN 201910984190 A CN201910984190 A CN 201910984190A CN 110614361 A CN110614361 A CN 110614361A
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alloy
getter
preparing
microwave
sintering
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CN110614361B (en
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鲁涛
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Shanghai Jingwei Material Technology Co Ltd
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Shanghai Jingwei Material Technology Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/05Metallic powder characterised by the size or surface area of the particles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/02Compacting only
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10Sintering only
    • B22F3/105Sintering only by using electric current other than for infrared radiant energy, laser radiation or plasma ; by ultrasonic bonding
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C14/00Alloys based on titanium
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C16/00Alloys based on zirconium
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/10Sintering only
    • B22F3/105Sintering only by using electric current other than for infrared radiant energy, laser radiation or plasma ; by ultrasonic bonding
    • B22F2003/1054Sintering only by using electric current other than for infrared radiant energy, laser radiation or plasma ; by ultrasonic bonding by microwave
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00Aspects linked to processes or compositions used in powder metallurgy

Abstract

The invention discloses a method for preparing a bulk getter by microwave sintering, which comprises the following steps of preparing a getter alloy according to a certain formula, preparing an alloy ingot by a smelting method, carrying out heat treatment on the alloy ingot, crushing and ball-milling the alloy ingot under a protective atmosphere to obtain getter alloy powder of 300 meshes and ~ 80 meshes, filling the getter alloy powder into a mold, pressing to form a compact, and carrying out microwave sintering under the vacuum degree of 3 ~ 5 multiplied by 10 to obtain the getter alloy powder‑3Introducing high-purity argon in a protective atmosphere in a vacuum environment of Pa, and sintering a pressed blank by using a microwave oven; after microwave sintering is finished, the mixture is put in a nitrogen atmosphereCooling to room temperature, and discharging to obtain the block getter with strong pulverization resistance. The invention has the advantages of low sintering temperature, high temperature rise speed, integral heating, uniform heating, fine and uniform alloy structure and the like, and the used time can be greatly shortened, thereby improving the preparation efficiency of the bulk getter.

Description

Method for preparing block getter by microwave sintering
Technical Field
The invention relates to the field of powder metallurgy, in particular to a method for preparing a block getter by microwave sintering.
Background
The microwave sintering is a method for generating heat by coupling a special wave band of microwaves with a basic fine structure of a material, and dielectric loss of the material is utilized to heat the whole material to a sintering temperature to realize densification.
Disclosure of Invention
The invention aims to provide a method for preparing a bulk getter by microwave sintering, which has uniform heating and high efficiency.
The purpose of the invention is realized as follows: the method for preparing the bulk getter by microwave sintering comprises the following steps:
1) preparing a getter alloy according to a certain formula, preparing an alloy ingot by a smelting method, carrying out heat treatment on the alloy ingot, and then crushing and ball-milling the alloy ingot in a protective atmosphere to obtain getter alloy powder of 300 meshes and ~ 80 meshes;
2) and filling the getter alloy powder into a die, and pressing to form a compact.
3) Introducing high-purity argon in protective atmosphere in a vacuum environment with the vacuum degree of 3-5 multiplied by 10 < -3 > Pa, and sintering the pressed compact by a microwave oven.
4) After microwave sintering is finished, the mixture is cooled to room temperature under the protection of nitrogen atmosphere and taken out of the furnace, and the block getter with strong anti-pulverization capability can be obtained.
Compared with the prior art, the invention has the advantages that microwave heating converts microwave energy absorbed by the material into kinetic energy and potential energy of molecules in the material, heat is generated from the inside of the material instead of other heating bodies, and the thermodynamic gradient and heat conduction generated by the internal body heating are different from the traditional heating, in the body heating process, electromagnetic energy permeates into the getter material compact in a wave form to cause medium loss and generate heat, so that the material is integrally and uniformly heated, and the temperature gradient in the material is small or zero, so that the internal thermal stress of the material can be reduced to the minimum degree, and the heat cannot be generated (500 ~ 600 ℃/min) even under the condition of fast temperature rise, the defect that the getter material compact cracks due to the thermal stress caused by the fast temperature rise in the traditional sintering is overcome, the production efficiency is improved.
In a preferred embodiment of the present invention, the getter alloy includes the following types:
a) Zr-Al alloy, Zr-Al-RE alloy, Zr-Al-TE-RE alloy, wherein TE comprises transition group elements of Ti, Fe, Co, Ni, Mn, Pd, Ru, Pt, V, Cr, Nb, Mo, Tc, Rh, Hf, Ta, W, Re, Os and Ir;
b) Zr-C alloy, Zr-C-RE alloy, Zr-C-TE-RE alloy, wherein TE comprises transition group elements of Ti, Fe, Co, Ni, Mn, Pd, Ru, Pt, V, Cr, Nb, Mo, Tc, Rh, Hf, Ta, W, Re, Os and Ir;
c) Zr-V-Fe alloy, Zr-V-Fe-RE alloy, Zr-V-Fe-TE alloy, Zr-V-Fe-RE-TE alloy, wherein TE comprises transition elements of Ti, Co, Ni, Mn, Pd, Ru, Pt, Cr, Nb, Mo, Tc, Rh, Hf, Ta, W, Re, Os and Ir;
d) Zr-Co alloy, Zr-Co-RE alloy, Zr-Co-TE alloy, Zr-Co-RE-TE alloy, wherein TE comprises transition group elements of Ti, Fe, Ni, Mn, Pd, Ru, Pt, V, Cr, Nb, Mo, Tc, Rh, Hf, Ta, W, Re, Os and Ir;
e) Ti-Mo alloy, Ti-Mo-RE alloy, Ti-Mo-TE alloy, Ti-Mo-RE-TE alloy, wherein TE comprises transition group elements of Zr, Fe, Co, Ni, Mn, Pd, Ru, Pt, V, Cr, Nb, Tc, Rh, Hf, Ta, W, Re, Os and Ir;
f) Ti-Zr-V alloy, Ti-Zr-V-RE alloy, Ti-Zr-V-TE-RE alloy, wherein TE comprises transition group elements of Fe, Co, Ni, Mn, Pd, Ru, Pt, Cr, Nb, Mo, Tc, Rh, Hf, Ta, W, Re, Os and Ir;
g) Zr-Co-Re (rhenium) alloy, Zr-Co-Re-RE-TE alloy, wherein TE comprises transition elements of Ti, Fe, Co, Ni, Mn, Pd, Ru, Pt, V, Cr, Nb, Mo, Tc, Rh, Hf, Ta, W, Os and Ir.
In a further preferred embodiment of the present invention, RE is a rare earth element Y, Sc, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu.
In a further preferred embodiment of the present invention, the getter alloy powder is loaded into a die and pressed to obtain a molding pressure of 1 ~ 8t/cm2 while maintaining the pressure for 1 ~ 30 s.
In a more preferred embodiment of the present invention, the relative density of the green compact is 30 ~ 60%.
In a further preferred embodiment of the present invention, the microwave power used for sintering in the microwave oven is 2Kw, and the microwave frequency is 2.45 GHz.
In a further preferable embodiment of the present invention, the sintering process of the microwave oven sintering is performed by maintaining the temperature at 850 ~ 1000 ℃ for 50 ~ 150 s.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The method for preparing the bulk getter by microwave sintering comprises the following steps:
1) preparing a getter alloy according to a certain formula, preparing an alloy ingot by a smelting method, carrying out heat treatment on the alloy ingot, and then crushing and ball-milling the alloy ingot in a protective atmosphere to obtain getter alloy powder of 300 meshes and ~ 80 meshes;
2) and filling the getter alloy powder into a die, and pressing to form a compact.
3) Introducing high-purity argon in protective atmosphere in a vacuum environment with the vacuum degree of 3-5 multiplied by 10 < -3 > Pa, and sintering the pressed compact by a microwave oven.
4) After microwave sintering is finished, the mixture is cooled to room temperature under the protection of nitrogen atmosphere and taken out of the furnace, and the block getter with strong anti-pulverization capability can be obtained.
The above getter alloys include the following:
a) Zr-Al alloy, Zr-Al-RE alloy, Zr-Al-TE-RE alloy, wherein TE comprises transition group elements of Ti, Fe, Co, Ni, Mn, Pd, Ru, Pt, V, Cr, Nb, Mo, Tc, Rh, Hf, Ta, W, Re, Os and Ir;
b) Zr-C alloy, Zr-C-RE alloy, Zr-C-TE-RE alloy, wherein TE comprises transition group elements of Ti, Fe, Co, Ni, Mn, Pd, Ru, Pt, V, Cr, Nb, Mo, Tc, Rh, Hf, Ta, W, Re, Os and Ir;
c) Zr-V-Fe alloy, Zr-V-Fe-RE alloy, Zr-V-Fe-TE alloy, Zr-V-Fe-RE-TE alloy, wherein TE comprises transition elements of Ti, Co, Ni, Mn, Pd, Ru, Pt, Cr, Nb, Mo, Tc, Rh, Hf, Ta, W, Re, Os and Ir;
d) Zr-Co alloy, Zr-Co-RE alloy, Zr-Co-TE alloy, Zr-Co-RE-TE alloy, wherein TE comprises transition group elements of Ti, Fe, Ni, Mn, Pd, Ru, Pt, V, Cr, Nb, Mo, Tc, Rh, Hf, Ta, W, Re, Os and Ir;
e) Ti-Mo alloy, Ti-Mo-RE alloy, Ti-Mo-TE alloy, Ti-Mo-RE-TE alloy, wherein TE comprises transition group elements of Zr, Fe, Co, Ni, Mn, Pd, Ru, Pt, V, Cr, Nb, Tc, Rh, Hf, Ta, W, Re, Os and Ir;
f) Ti-Zr-V alloy, Ti-Zr-V-RE alloy, Ti-Zr-V-TE-RE alloy, wherein TE comprises transition group elements of Fe, Co, Ni, Mn, Pd, Ru, Pt, Cr, Nb, Mo, Tc, Rh, Hf, Ta, W, Re, Os and Ir;
g) Zr-Co-Re (rhenium) alloy, Zr-Co-Re-RE-TE alloy, wherein TE comprises transition elements of Ti, Fe, Co, Ni, Mn, Pd, Ru, Pt, V, Cr, Nb, Mo, Tc, Rh, Hf, Ta, W, Os and Ir.
The RE is rare earth elements Y, Sc, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu.
The getter alloy powder is loaded into a die and pressed to obtain a molding pressure of 1 ~ 8t/cm2, and the pressure is maintained for 1 ~ 30 s.
The relative density of the green compact was 30 ~ 60%.
The microwave power used for sintering in the microwave oven is 2Kw, and the microwave frequency is 2.45 GHz.
The sintering process of the microwave oven sintering is to preserve heat for 50 ~ 150 s at 850 ~ 1000 ℃ and 1000 ℃.
Example 1
Based on a stoichiometric formula of Zr51.44V40.46Fe8.10 (weight ratio), an alloy ingot is prepared by a vacuum induction melting method, the alloy ingot is subjected to homogenization heat treatment at 1050 ℃ for 5 h, then is rapidly cooled to room temperature, the cooled ingot is crushed and ball-milled to powder of 325 meshes ~ 200 meshes, the powder is filled into a rigid mold, and the temperature is 1.5 t/cm2Pressing under a pressure of (1) to obtain a green compact, loading the green compact into a vacuum microwave oven for sintering, wherein the vacuum degree is 4 x 10-3Pa, microwave power of 1.6 Kw and microwave frequency of 2.45 GHz. The sintering process comprises the following steps: at 900 ℃ for 70 s. After microwave sintering is finished, the mixture is cooled to room temperature under the protection of nitrogen atmosphere and taken out of the furnace, and the bulk getter with strong anti-pulverization capability can be obtained. After the getter is activated for 15 min at 480 ℃, the total hydrogen absorption amount is as follows: 230 cm3·Pa/g。
Example 2
Based on a stoichiometric formula of Ti92Mo8 (weight ratio), preparing an alloy ingot by a vacuum induction melting method, carrying out homogenization heat treatment on the alloy ingot at 1150 ℃ for 6 h, then carrying out quick cooling to room temperature, crushing and ball-milling the cooled ingot to powder of 325 meshes, ~ 200 meshes, putting the powder into a rigid mold, and carrying out vacuum melting at 5 t/cm2 Pressing under a pressure of (3) to obtain a green compact, loading the green compact into a vacuum microwave oven for sintering, wherein the vacuum degree is 3 x 10-3 Pa, microwave power of 1.5Kw and microwave frequency of 2.45 GHz. The sintering process comprises the following steps: at 950 ℃ for 50 s. After microwave sintering is finished, the mixture is put in a nitrogen atmosphereCooling to room temperature, and discharging to obtain the block getter with strong pulverization resistance. After the getter is activated at 300 ℃ for 20 min, the total hydrogen absorption amount is as follows: 163 cm3·Pa/g。
The present invention is not limited to the above-mentioned embodiments, and based on the technical solutions disclosed in the present invention, those skilled in the art can make some substitutions and modifications to some technical features without creative efforts according to the disclosed technical contents, and these substitutions and modifications are all within the protection scope of the present invention.

Claims (7)

1. The method for preparing the bulk getter by microwave sintering is characterized in that the method for preparing the bulk getter material by the microwave sintering method comprises the following steps:
1) preparing a getter alloy according to a certain formula, preparing an alloy ingot by a smelting method, carrying out heat treatment on the alloy ingot, and then crushing and ball-milling the alloy ingot in a protective atmosphere to obtain getter alloy powder of 300 meshes and ~ 80 meshes;
2) and filling the getter alloy powder into a die, and pressing to form a compact.
3) Under the vacuum degree of 3-5X 10-3 And introducing high-purity argon in protective atmosphere in a vacuum environment of Pa, and sintering the pressed compact by using a microwave oven.
4) After microwave sintering is finished, the mixture is cooled to room temperature under the protection of nitrogen atmosphere and taken out of the furnace, and the block getter with strong anti-pulverization capability can be obtained.
2. The method for preparing the bulk getter by microwave sintering according to claim 1, wherein: the getter alloys are of the following types:
a) Zr-Al alloy, Zr-Al-RE alloy, Zr-Al-TE-RE alloy, wherein TE comprises transition group elements of Ti, Fe, Co, Ni, Mn, Pd, Ru, Pt, V, Cr, Nb, Mo, Tc, Rh, Hf, Ta, W, Re, Os and Ir;
b) Zr-C alloy, Zr-C-RE alloy, Zr-C-TE-RE alloy, wherein TE comprises transition group elements of Ti, Fe, Co, Ni, Mn, Pd, Ru, Pt, V, Cr, Nb, Mo, Tc, Rh, Hf, Ta, W, Re, Os and Ir;
c) Zr-V-Fe alloy, Zr-V-Fe-RE alloy, Zr-V-Fe-TE alloy, Zr-V-Fe-RE-TE alloy, wherein TE comprises transition elements of Ti, Co, Ni, Mn, Pd, Ru, Pt, Cr, Nb, Mo, Tc, Rh, Hf, Ta, W, Re, Os and Ir;
d) Zr-Co alloy, Zr-Co-RE alloy, Zr-Co-TE alloy, Zr-Co-RE-TE alloy, wherein TE comprises transition group elements of Ti, Fe, Ni, Mn, Pd, Ru, Pt, V, Cr, Nb, Mo, Tc, Rh, Hf, Ta, W, Re, Os and Ir;
e) Ti-Mo alloy, Ti-Mo-RE alloy, Ti-Mo-TE alloy, Ti-Mo-RE-TE alloy, wherein TE comprises transition group elements of Zr, Fe, Co, Ni, Mn, Pd, Ru, Pt, V, Cr, Nb, Tc, Rh, Hf, Ta, W, Re, Os and Ir;
f) Ti-Zr-V alloy, Ti-Zr-V-RE alloy, Ti-Zr-V-TE-RE alloy, wherein TE comprises transition group elements of Fe, Co, Ni, Mn, Pd, Ru, Pt, Cr, Nb, Mo, Tc, Rh, Hf, Ta, W, Re, Os and Ir;
g) Zr-Co-Re (rhenium) alloy, Zr-Co-Re-RE-TE alloy, wherein TE comprises transition elements of Ti, Fe, Co, Ni, Mn, Pd, Ru, Pt, V, Cr, Nb, Mo, Tc, Rh, Hf, Ta, W, Os and Ir.
3. The method for preparing the bulk getter by microwave sintering according to claim 2, wherein: the TE is transition group elements of Ti, Fe, Co, Ni, Mn, Pd, Ru, Pt, V, Cr, Nb, Mo, Tc, Rh, Hf, Ta, W, Os and Ir; and RE is rare earth elements Y, Sc, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu.
4. The method for preparing the bulk getter by microwave sintering according to claim 1, wherein the getter alloy powder is filled in a die and pressed to obtain a forming pressure of 1 ~ 8t/cm2While maintaining the pressure for 1 ~ 30 s.
5. The method for preparing bulk getter through microwave sintering according to claim 1, wherein the relative density of the green compact is 30 ~ 60%.
6. The method for preparing the bulk getter by microwave sintering according to claim 1, wherein: the microwave power adopted by the microwave oven for sintering is 2Kw, and the microwave frequency is 2.45 GHz.
7. The method for preparing the bulk getter by microwave sintering according to claim 1, wherein the sintering process of microwave sintering is heat preservation at 850 ~ 1000 ℃ for 50 ~ 150 s.
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CN115449690A (en) * 2022-09-20 2022-12-09 浙江安胜科技股份有限公司 High-strength high-air-suction-performance Zr-V system air suction material and preparation method thereof

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Denomination of invention: A Method for Preparing Block Absorbent by Microwave Sintering

Granted publication date: 20221014

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