CN110565166A - Temperature gradient adjusting device for crystal growth - Google Patents
Temperature gradient adjusting device for crystal growth Download PDFInfo
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- CN110565166A CN110565166A CN201911045262.9A CN201911045262A CN110565166A CN 110565166 A CN110565166 A CN 110565166A CN 201911045262 A CN201911045262 A CN 201911045262A CN 110565166 A CN110565166 A CN 110565166A
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- seed rod
- air
- rotary joint
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- 239000013078 crystal Substances 0.000 title claims abstract description 82
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 121
- 238000001816 cooling Methods 0.000 claims abstract description 28
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 11
- 229910052750 molybdenum Inorganic materials 0.000 claims description 11
- 239000011733 molybdenum Substances 0.000 claims description 11
- 239000003638 chemical reducing agent Substances 0.000 claims description 10
- 238000003466 welding Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 30
- 230000008569 process Effects 0.000 abstract description 14
- 239000007788 liquid Substances 0.000 abstract description 4
- 239000001307 helium Substances 0.000 description 14
- 229910052734 helium Inorganic materials 0.000 description 14
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 14
- 239000007789 gas Substances 0.000 description 12
- 229910052594 sapphire Inorganic materials 0.000 description 6
- 239000010980 sapphire Substances 0.000 description 6
- 230000008878 coupling Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 5
- 238000005859 coupling reaction Methods 0.000 description 5
- 239000002994 raw material Substances 0.000 description 5
- 239000000498 cooling water Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 239000000112 cooling gas Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 239000010431 corundum Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 238000009991 scouring Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000008400 supply water Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B17/00—Single-crystal growth onto a seed which remains in the melt during growth, e.g. Nacken-Kyropoulos method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/20—Aluminium oxides
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The application provides a temperature gradient adjusting device is used in crystal growth, including rotary joint, connecting seat and the cover are equipped with the seed rod of seed rod shell, through setting up water pipeling and gas pipeline simultaneously on the equipment of seed rod, a device technique that can realize water-cooling air cooling temperature gradient simultaneously and adjust for crystal growth is provided, flow and pressure through control gas and liquid, take away the heat on the seed rod, make the crystal follow the seed crystal to slow growth, in the growth process, can also be through changing the thermal field temperature, the rotation rate of seed rod and the growth rate of pulling the speed isoparametric control crystal. The application provides a temperature gradient adjusting device for crystal growth has solved among the prior art alone water-cooled seed crystal axial structure thermal field temperature and has difficult control, in case the design is stereotyped, the problem that temperature gradient can not be adjusted provides technical support for crystal growth technical field.
Description
Technical Field
The application relates to the technical field of crystal growth, in particular to a temperature gradient adjusting device for crystal growth.
Background
sapphire, commonly known as corundum, is a single crystal form of alumina, has very stable chemical properties, is usually not corroded by acid and alkali, is outstanding in mechanical properties and thermal properties, has excellent mechanical properties of high strength, high hardness and scouring resistance, and can work under severe conditions at high temperature close to 2000 ℃. Through practice and inspection for many years, sapphire becomes the first choice material for windows of infrared military and high-intensity laser in all countries in the world at present, and is widely applied to the fields of scientific technology, national defense, civil industry and the like. The mainstream sapphire crystal growth process in the world at present is a kyropoulos method, a pulling method, a guided mode method and a heat exchange method, and the sapphire crystal grown by the kyropoulos method accounts for about 70% of the current market, and the method has the advantages of few crystal defects and low dislocation density.
The sapphire single crystal growth process by the kyropoulos method is characterized in that a proper temperature is provided by a heater, a seed crystal is firmly fixed on a seed crystal rod before growth, and the seed crystal rod is directly contacted with working fluid in a heat exchanger, so that a heat exchange system is formed among a crystal, the seed crystal and the heat exchanger.
The existing single water-cooled seed crystal shaft structure has high requirement on distribution of a thermal field, a proper temperature gradient field with high temperature at the bottom of a crucible and low temperature at the upper part and high temperature at the outer part and low temperature at the center of the crucible needs to be constructed, when crystals such as sapphire grow, especially extra-large ultra-high crystals exceeding 260kg, the thermal field is difficult to construct due to the fact that the crystal size is large and the crucible is basically filled with an effective heating area of a heating body, once the crystal is designed and shaped, the temperature gradient is shaped, the adjustment of the temperature is not facilitated, and the seed crystal is difficult to control when the seed crystal is taken down, and the experience level of process personnel is completely relied on.
Disclosure of Invention
the application provides a temperature gradient adjusting device for crystal growth to solve among the prior art independent water-cooled seed crystal axial structure thermal field temperature and difficult control, in case the design is stereotyped, the problem that temperature gradient can not be adjusted provides technical support for crystal growth technical field.
The technical scheme adopted by the application for solving the technical problems is as follows:
A temperature gradient adjusting device for crystal growth comprises a rotary joint, a connecting seat and a seed rod sleeved with a seed rod shell, wherein one end of the connecting seat is in bolted connection with a first flange on the seed rod shell, and the other end of the connecting seat is connected with the rotary joint through a second flange;
The seed rod shell is provided with a first water inlet hole, a water isolating sleeve is arranged in the seed rod shell, the water isolating sleeve is arranged on the periphery of the seed rod, the seed rod penetrates through the water isolating sleeve and the seed rod shell, a molybdenum pipe is inserted into the seed rod, a first water outlet hole is formed in the water isolating sleeve, a first air inlet hole is formed in the molybdenum pipe, and a first air outlet hole is formed in the seed rod;
the device also comprises a cooling coil pipe provided with a second air inlet hole, a second water inlet hole, a second air outlet hole and a second water outlet hole, wherein the second air inlet hole and the second water inlet hole are arranged on the same side of the cooling coil pipe, the second air outlet hole and the second water outlet hole are arranged on the other side of the cooling coil pipe, and the cooling coil pipe is nested on the connecting seat;
the device also comprises a first air path pipe, a second air path pipe, a third air path pipe, a first water path pipe, a second water path pipe, a third water path pipe and a fourth water path pipe, wherein one end of the first air path pipe is connected to the rotary joint, the other end of the first air path pipe is connected with the first air inlet hole, one end of the second air path pipe is connected to the first air outlet hole, the other end of the second air path pipe is connected to the second air inlet hole, one end of the third air path pipe is connected to the second air outlet hole, the other end of the third air path pipe is connected to the rotary joint, one end of the first water path pipe is connected to the rotary joint, the other end of the first water path pipe is connected to the first water inlet hole, one end of the second water path pipe is connected to the first water outlet hole, the other end of the third water outlet pipe is connected to the rotary joint, and the other end of the third water outlet pipe is connected to the, one end of the fourth water outlet pipe is connected to the second water outlet hole, and the other end of the fourth water outlet pipe is connected to the rotary joint.
Optionally, the rotary joint is a six-way hydraulic rotary joint, and a plurality of pagoda joints and a plurality of double-sleeve threaded through joints are arranged on the six-way hydraulic rotary joint.
Optionally, the device further comprises a servo motor, a speed reducer and a coupler, wherein one end of the connecting seat is far away from the rotary joint and connected with the coupler, the servo motor is installed on the speed reducer, the speed reducer is connected with the coupler and drives the coupler to rotate, so that the whole device is driven to rotate.
Optionally, the first air inlet hole is formed in one side, close to the second flange, of the molybdenum pipe, the first air outlet hole is formed in one side, close to the second flange, of the seed rod, the first water inlet hole is formed in one side, close to the second flange, of the seed rod shell, and the first water outlet hole is formed in one side, close to the second flange, of the water separation sleeve.
Optionally, the device connecting pipeline is hermetically connected by adopting a welding process.
Optionally, the first air passage pipe, the second air passage pipe and the third air passage pipe are respectively a ferrule hose, and the first water passage pipe, the second water passage pipe, the third water passage pipe and the fourth water passage pipe are respectively a rubber hose.
Optionally, the device further comprises a mounting seat, wherein the mounting seat is sleeved on the cooling coil and is connected with the seed rod shell through a first flange.
The technical scheme provided by the application comprises the following beneficial technical effects:
the application provides a temperature gradient adjusting device is used in crystal growth, including rotary joint, connecting seat and the cover are equipped with the seed rod of seed rod shell, through setting up water pipeling and gas pipeline simultaneously on the equipment of seed rod, a device technique that can realize water-cooling air cooling temperature gradient simultaneously and adjust for crystal growth is provided, flow and pressure through control gas and liquid, take away the heat on the seed rod, make the crystal follow the seed crystal to slow growth, in the growth process, can also be through changing the thermal field temperature, the rotation rate of seed rod and the growth rate of pulling the speed isoparametric control crystal. The application provides a temperature gradient adjusting device for crystal growth has solved among the prior art alone water-cooled seed crystal axial structure thermal field temperature and has difficult control, in case the design is stereotyped, the problem that temperature gradient can not be adjusted provides technical support for crystal growth technical field.
drawings
In order to more clearly explain the technical solution of the present application, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious to those skilled in the art that other drawings can be obtained according to the drawings without any creative effort.
FIG. 1 is a schematic structural diagram of a temperature gradient adjustment device assembly for crystal growth according to an embodiment of the present disclosure;
FIG. 2 is a cross-sectional view of a seed rod structure provided in an embodiment of the present application;
FIG. 3 is a schematic view of an assembly structure of a temperature gradient adjustment apparatus for crystal growth according to an embodiment of the present disclosure;
fig. 4 is a schematic structural diagram of fig. 3 after the mounting base is connected according to an embodiment of the present application.
description of reference numerals:
1-a servo motor; 2, a speed reducer; 3, coupling; 4-a rotary joint; 5-a connecting seat; 6-seed rod shell; 7-cooling coil pipes; 8-a first gas line pipe; 9-a second gas circuit pipe; 10-a third gas line pipe; 11-a first water line pipe; 12-a second water line pipe; 13-a third water line pipe; 14-a fourth water path pipe; 15-water separating sleeve; 16-seed rods; 17-a molybdenum tube; 18-a second air intake; 19-a second water inlet hole; 20-a second water outlet; 21-a second air outlet; 22-a first water inlet hole; 23-a first outlet hole; 24-a first air intake; 25-a first water outlet; 26-mounting seat.
Detailed Description
in order to make the technical solutions in the present application better understood by those skilled in the art, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application; it is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
Referring to fig. 1 and 3, fig. 1 and 3 show a schematic structural view and an assembled schematic structural view of a temperature gradient adjusting device assembly for crystal growth provided by an embodiment of the present application, as shown in fig. 1, the temperature gradient adjusting device for crystal growth provided by the embodiment of the present application includes a rotary joint 4, a connecting seat 5, and a seed rod 16 sleeved with a seed rod housing 6, one end of the connecting seat 5 is bolted to a first flange on the seed rod housing 6, and the other end is connected to the rotary joint 4 through a second flange;
As shown in fig. 2, a first water inlet hole 22 is formed in the seed rod housing 6, a water separating sleeve 15 is installed in the seed rod housing 6, the water separating sleeve 15 is arranged on the periphery of the seed rod 16, the seed rod 16 penetrates through the water separating sleeve 15 and the seed rod housing 6, a molybdenum pipe 17 is inserted into the seed rod 16, a first water outlet hole 25 is formed in the water separating sleeve 15, a first air inlet hole 24 is formed in the molybdenum pipe 17, and a first air outlet hole 23 is formed in the seed rod 16;
the device further comprises a cooling coil 7 provided with a second air inlet hole 18, a second water inlet hole 19, a second air outlet hole 21 and a second water outlet hole 20, wherein the second air inlet hole 18 and the second water inlet hole 19 are arranged on the same side of the cooling coil 7, the second air outlet hole 21 and the second water outlet hole 20 are arranged on the other side of the cooling coil 7, and the cooling coil 7 is nested on the connecting seat 5;
The device also comprises a first air path pipe 8, a second air path pipe 9, a third air path pipe 10, a first water path pipe 11, a second water path pipe 12, a third water path pipe 13 and a fourth water path pipe 14, wherein one end of the first air path pipe 8 is connected to the rotary joint 4, the other end of the first air path pipe is connected with the first air inlet 24, one end of the second air path pipe 9 is connected to the first air outlet 23, the other end of the second air path pipe is connected to the second air inlet 18, one end of the third air path pipe 10 is connected to the second air outlet 21, the other end of the third air path pipe is connected to the rotary joint 4, one end of the first water path pipe 11 is connected to the rotary joint 4, the other end of the first air path pipe is connected to the first water inlet 22, one end of the second water path pipe 12 is connected to the first water outlet 25, the other end of the third water outlet is connected to the rotary joint 4, one end of the third water outlet is connected, the other end is connected to a second water inlet hole 19, one end of the fourth water outlet pipe is connected to the second water outlet hole 20, and the other end is connected to the rotary joint 4.
The temperature gradient adjusting device for crystal growth that this application embodiment provided, through set up water pipeling and gas pipeline simultaneously on seed rod 16's equipment, a device technique that can realize water cooling gas cooling temperature gradient simultaneously and adjust for crystal growth is provided, flow and pressure through control gas and liquid, take away the heat on seed rod 16, make the crystal slowly grow along the seed crystal orientation, in the growth process, can also be through changing the thermal field temperature, the growth rate of seed rod 16's rotation rate and pulling-up speed isoparametric control crystal.
Furthermore, the rotary joint 4 is a six-way hydraulic rotary joint 4, a plurality of pagoda joints and a plurality of double-clamping-sleeve threaded through joints are arranged on the six-way hydraulic rotary joint 4, and when the whole device is used, the pagoda joints and the double-clamping-sleeve threaded through joints are adopted to connect a water source and an air source.
Optionally, the device still includes servo motor 1, speed reducer 2 and shaft coupling 3, rotary joint 4 keeps away from the one end of connecting seat 5 with shaft coupling 3 connects, servo motor 1 is installed on speed reducer 2, speed reducer 2 connects shaft coupling 3, and the drive shaft coupling 3 is rotatory to drive whole device and rotate, during the specific use, drive servo motor 1 drives the rotation of seed rod 16, makes the seed crystal on the seed rod 16 contact fused raw materials, treats that the temperature is stable after, through the flow and the pressure of control gas, takes away the heat on the seed rod 16, makes the crystal slowly grow along the seed crystal orientation, in the growth-process, can also be through changing the growth rate of thermal field temperature, the rotation rate of seed rod 16 and pulling-up speed isoparametric control crystal.
Optionally, the first air inlet hole 24 is disposed on one side of the molybdenum pipe 17 close to the second flange, the first air outlet hole 23 is disposed on one side of the seed rod 16 close to the second flange, the first water inlet hole 22 is disposed on one side of the seed rod housing 6 close to the second flange, and the first water outlet hole 25 is disposed on one side of the water-proof sleeve 15 close to the second flange, wherein the first water inlet hole 22, the first air outlet hole 23, the first air inlet hole 24, and the first water outlet hole 25 are all disposed on one side close to the second flange, so that the whole seed rod 16 device is filled with an introduced water source and an introduced air source for circulating cooling.
optionally, the connecting pipelines of the seed crystal device are hermetically connected by adopting a welding process, so that better sealing performance is ensured, and cooling of circulating gas and circulating water of the seed crystal device can be realized.
Optionally, the first air pipe 8, the second air pipe 9, and the third air pipe 10 are all ferrule hoses, and the first water pipe 11, the second water pipe 12, the third water pipe 13, and the fourth water pipe 14 are all rubber hoses.
Optionally, the device further includes a mounting seat 26, the mounting seat 26 is sleeved on the cooling coil 7 and connected to the seed rod housing 6 through a first flange, as shown in fig. 4.
in order to make the technical solutions more clear to those skilled in the art to understand, in the embodiments of the present application, water and helium are respectively used as a water source and a gas source, a water supply device is connected to the rotary joint 4 to supply water to the whole device, and a compressor is connected to the rotary joint 4 to supply helium to the whole device, and a specific usage method of the technical solutions of the present application is as follows:
Firstly, seed crystals are arranged at the tail ends of seed crystal rods 16 and placed above a crucible, then raw materials are placed in the crucible, the raw materials in the crucible are melted by adopting high-frequency heating or other methods for heating until the raw materials reach a molten state, and meanwhile, the temperature of a thermal field and the temperature of a melt are controlled well to ensure that the seed crystals are not melted. Helium is used as cooling gas, water is used as cooling liquid, during operation, the helium is led into a first air inlet 24 of a molybdenum pipe 17 through a rotary joint 4 and a first air path pipe 8 to cool seed crystals arranged on a seed crystal rod 16, heat exchange is carried out to take away heat, then the helium flows out of a first air outlet 23 of the seed crystal rod 16, passes through a second air path pipe 9, is led into a cooling coil 7, then returns into the rotary joint 4 through a third air path pipe 10, and finally returns into a compressor. The helium has stable chemical property, has larger specific heat capacity and thermal conductivity, can directly act on a high-temperature section, and has stronger control effect on the crystal growth process.
In the whole helium cooling process, because the helium absorbs a large amount of heat to cause the temperature of the helium to rise, two paths of circulating cooling water are used for cooling the helium. The cooling water of all the ways is introduced into the first water inlet hole 22 of the seed rod shell 6 through the rotary joint 4 and the first water path pipe 11, so that the part of the seed rod 16 can be cooled to reduce the temperature of the upper end of the seed rod 16, meanwhile, the helium in the seed rod 16 can be cooled, and then flows out of the first water outlet hole 25 of the water stop sleeve 15 and returns to the rotary joint 4 through the second water path pipe 12. The cooling water in the second water path pipe 12 is introduced into the cooling coil 7 through the rotary joint 4 and the third water path pipe 13, and the purpose of the cooling water is to cool the helium flowing out of the seed rod 16, prevent the helium from being too high in temperature and damaging the conversion joint, and finally return to the rotary joint 4 through the fourth water path pipe 14.
When seeding, keep the invariant of fuse-element temperature, through the height of adjusting water cold air cold seed crystal device to drive servo motor 1 and drive the rotation of seed rod 16, make the seed crystal on the seed rod 16 contact fused raw materials, take the temperature stable back, through the flow and the pressure of control helium, take away the heat on the seed rod 16, make the crystal slowly grow along the seed crystal orientation, in the growth process, can also be through changing the thermal field temperature, the growth rate of the rotation rate of seed rod 16 and pulling-up speed isoparametric control crystal.
The utility model provides a temperature gradient adjusting device for crystal growth, including rotary joint 4, connecting seat 5 and the cover are equipped with seed rod 16 of seed rod shell 6, set up simultaneously on seed rod 16's equipment through with water pipeling and gas pipeling, a device technique that can realize water cooling gas cooling temperature gradient simultaneously and adjust for crystal growth is provided, flow and pressure through control gas and liquid, take away the heat on seed rod 16, make the crystal slowly grow to the seed crystal orientation along the seed crystal, in the growth process, can also be through changing the thermal field temperature, the rotation rate of seed rod 16 and the growth rate of drawing the isoparametric control crystal. The application provides a temperature gradient adjusting device for crystal growth has solved among the prior art alone water-cooled seed crystal axial structure thermal field temperature and has difficult control, in case the design is stereotyped, the problem that temperature gradient can not be adjusted provides technical support for crystal growth technical field.
It is noted that relational terms such as "first" and "second," and the like, may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that an article or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
The above description is merely exemplary of the present application and is presented to enable those skilled in the art to understand and practice the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
it will be understood that the present application is not limited to what has been described above and shown in the accompanying drawings, and that various modifications and changes can be made without departing from the scope thereof. The scope of the application is limited only by the appended claims.
Claims (7)
1. A temperature gradient adjusting device for crystal growth is characterized by comprising a rotary joint, a connecting seat and a seed rod sleeved with a seed rod shell, wherein one end of the connecting seat is in bolted connection with a first flange on the seed rod shell, and the other end of the connecting seat is connected with the rotary joint through a second flange;
The seed rod shell is provided with a first water inlet hole, a water isolating sleeve is arranged in the seed rod shell, the water isolating sleeve is arranged on the periphery of the seed rod, the seed rod penetrates through the water isolating sleeve and the seed rod shell, a molybdenum pipe is inserted into the seed rod, a first water outlet hole is formed in the water isolating sleeve, a first air inlet hole is formed in the molybdenum pipe, and a first air outlet hole is formed in the seed rod;
the device also comprises a cooling coil pipe provided with a second air inlet hole, a second water inlet hole, a second air outlet hole and a second water outlet hole, wherein the second air inlet hole and the second water inlet hole are arranged on the same side of the cooling coil pipe, the second air outlet hole and the second water outlet hole are arranged on the other side of the cooling coil pipe, and the cooling coil pipe is nested on the connecting seat;
The device also comprises a first air path pipe, a second air path pipe, a third air path pipe, a first water path pipe, a second water path pipe, a third water path pipe and a fourth water path pipe, wherein one end of the first air path pipe is connected to the rotary joint, the other end of the first air path pipe is connected with the first air inlet hole, one end of the second air path pipe is connected to the first air outlet hole, the other end of the second air path pipe is connected to the second air inlet hole, one end of the third air path pipe is connected to the second air outlet hole, the other end of the third air path pipe is connected to the rotary joint, one end of the first water path pipe is connected to the rotary joint, the other end of the first water path pipe is connected to the first water inlet hole, one end of the second water path pipe is connected to the first water outlet hole, the other end of the third water outlet pipe is connected to the rotary joint, and the other end of the third water outlet pipe is connected to the, one end of the fourth water outlet pipe is connected to the second water outlet hole, and the other end of the fourth water outlet pipe is connected to the rotary joint.
2. The apparatus of claim 1, wherein the rotary joint is a six-way hydraulic rotary joint having a plurality of pagoda joints and a plurality of double-bayonet threaded through joints.
3. The temperature gradient adjusting device for crystal growth according to claim 1, further comprising a servo motor, a speed reducer and a coupler, wherein one end of the rotary joint, which is far away from the connecting seat, is connected with the coupler, the servo motor is installed on the speed reducer, and the speed reducer is connected with the coupler and drives the coupler to rotate, so as to drive the whole device to rotate.
4. the temperature gradient adjusting device for crystal growth according to claim 1, wherein the first inlet hole is provided on a side of the molybdenum pipe close to the second flange, the first outlet hole is provided on a side of the seed rod close to the second flange, the first inlet hole is provided on a side of the seed rod housing close to the second flange, and the first outlet hole is provided on a side of the water-blocking jacket close to the second flange.
5. The temperature gradient adjusting device for crystal growth according to claim 1, wherein the connecting pipes of the device are hermetically connected by welding.
6. The temperature gradient adjusting device for crystal growth according to claim 1, wherein the first air passage pipe, the second air passage pipe and the third air passage pipe are all ferrule hoses, and the first water passage pipe, the second water passage pipe, the third water passage pipe and the fourth water passage pipe are all rubber hoses.
7. The apparatus of claim 1, further comprising a mounting block sleeved on the cooling coil and connected to the seed rod housing by a first flange.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911045262.9A CN110565166A (en) | 2019-10-30 | 2019-10-30 | Temperature gradient adjusting device for crystal growth |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911045262.9A CN110565166A (en) | 2019-10-30 | 2019-10-30 | Temperature gradient adjusting device for crystal growth |
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| CN110565166A true CN110565166A (en) | 2019-12-13 |
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| CN201911045262.9A Pending CN110565166A (en) | 2019-10-30 | 2019-10-30 | Temperature gradient adjusting device for crystal growth |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102677159A (en) * | 2012-05-22 | 2012-09-19 | 无锡力汇光电科技有限公司 | Water-cooling seed rod heat exchange device of crystal growth furnace |
| CN202530196U (en) * | 2012-01-21 | 2012-11-14 | 徐州协鑫光电科技有限公司 | Seed rod for growing single crystal and single crystal growing equipment comprising seed rod |
| CN103147121A (en) * | 2013-04-03 | 2013-06-12 | 中国科学院上海硅酸盐研究所 | Device for growing crystals by using lifting and Kyropoulos method |
| CN211256155U (en) * | 2019-10-30 | 2020-08-14 | 浙江昀丰新材料科技股份有限公司 | Temperature gradient adjusting device for crystal growth |
-
2019
- 2019-10-30 CN CN201911045262.9A patent/CN110565166A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202530196U (en) * | 2012-01-21 | 2012-11-14 | 徐州协鑫光电科技有限公司 | Seed rod for growing single crystal and single crystal growing equipment comprising seed rod |
| CN102677159A (en) * | 2012-05-22 | 2012-09-19 | 无锡力汇光电科技有限公司 | Water-cooling seed rod heat exchange device of crystal growth furnace |
| CN103147121A (en) * | 2013-04-03 | 2013-06-12 | 中国科学院上海硅酸盐研究所 | Device for growing crystals by using lifting and Kyropoulos method |
| CN211256155U (en) * | 2019-10-30 | 2020-08-14 | 浙江昀丰新材料科技股份有限公司 | Temperature gradient adjusting device for crystal growth |
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