CN110553763A - Coplanar suspension type full-isolation sensor - Google Patents
Coplanar suspension type full-isolation sensor Download PDFInfo
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- CN110553763A CN110553763A CN201910854881.6A CN201910854881A CN110553763A CN 110553763 A CN110553763 A CN 110553763A CN 201910854881 A CN201910854881 A CN 201910854881A CN 110553763 A CN110553763 A CN 110553763A
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- core body
- shell
- suspension
- suspension core
- electrode plates
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
- G01L19/0672—Leakage or rupture protection or detection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0005—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using variations in capacitance
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
the invention discloses a coplanar suspension type full-isolation sensor, which comprises a shell, wherein a base is arranged at the bottom of the shell, a suspension core body is arranged in the shell, the suspension core body is of a cylindrical shell structure which is transversely arranged, electrode plates are symmetrically arranged at the left and right of the middle part in the suspension core body, and a central measurement diaphragm is arranged between the two electrode plates; mechanical and thermal isolation is realized, so that the suspension core is not in direct contact with a process heat source and a pressure source; the mechanical stress on the suspension core body is released, and the static pressure performance is improved; the large range ratio is up to 100: 1; according to the invention, the lead sintered by the rigid insulator and the mounting mode of the oil charging pipe and the suspension core are adopted, and the capacitor plate and the suspension core are connected by laser welding, so that full isolation is realized, the electrical insulation is ensured, and the flexibility, the performance and the transient voltage resistant protection capability of the electronic circuit board are improved; high precision up to 0.075% is realized.
Description
Technical Field
The invention belongs to the technical field of sensors, and particularly relates to a coplanar suspension type full-isolation sensor.
Background
A sensor (transmitter) is a transducer that converts the output signal of the sensor into a signal that can be recognized by a controller (or a signal source that converts the non-electrical quantity input by the sensor into an electrical signal while amplifying it for remote measurement and control). The sensor and the sensor together form an automatically controlled monitoring signal source. Different physical quantities require different sensors and corresponding sensors. The sensors are various, and the sensors used on the industrial control instrument mainly comprise a temperature sensor, a pressure sensor, a flow sensor, a current sensor, a voltage sensor and the like;
The capacitive pressure sensor is a common sensor product and mainly comprises a load cell sensor (also called as a pressure sensor), a measuring circuit and a process connecting piece, and the working principle of the capacitive pressure sensor is that two pressures of a measured medium are introduced into a high pressure chamber and a low pressure chamber, act on silicon oil on two sides of a delta element (namely a sensitive element) and are transmitted to two sides of a central measuring diaphragm through a spacer and filling liquid in the element. The capacitive pressure sensor is a capacitor formed by a central measuring diaphragm and electrodes on insulating sheets on two sides. When the pressures at the two sides are not consistent, the central measuring diaphragm is caused to generate displacement, the displacement is in direct proportion to the pressure difference, so that the capacitances at the two sides are unequal, and the signals are converted into signals in direct proportion to the pressures through oscillation and demodulation links. The working principle of the capacitance type pressure sensor and the capacitance type absolute pressure sensor is the same as that of the differential pressure sensor, except that the pressure of the low-pressure chamber is atmospheric pressure or vacuum;
However, the traditional capacitive pressure sensor has a rigid structure, cannot realize coplanar suspension and has a short service life, and therefore, the inventor provides a coplanar suspension type full-isolation sensor by combining various factors.
Disclosure of Invention
the invention aims to: in order to solve the technical problems related to the background technology, a coplanar suspension type full-isolation sensor is provided.
The technical scheme adopted by the invention is as follows:
A coplanar suspension type full-isolation sensor comprises a shell, wherein a base is arranged at the bottom of the shell, a suspension core body is arranged in the shell, the suspension core body is of a cylindrical shell structure which is transversely arranged, electrode plates are symmetrically arranged in the suspension core body in the left and right directions, a central measurement diaphragm is arranged between the two electrode plates, a rigid insulator is arranged outside the electrode plates, and the electrode plates extend to the outside of the rigid insulator and are in sealing connection with the suspension core body; the electrode plates on the two sides are connected with leads, the leads are sleeved on the oil filling pipe and sintered with the rigid insulator, and the leads extend out of the suspension core body; oil guide pipes are arranged in the shell corresponding to two sides of the suspension core body, the top of each oil guide pipe is bent and connected with the middle of the suspension core body, and each oil guide pipe penetrates through the suspension core body, the rigid insulator and the electrode plates on the corresponding sides; the bottom of the oil guide pipe penetrates through the bottom of the shell and extends to the base of the shell; the base of the shell is provided with a pressure interface corresponding to the bottom end of the oil guide pipe, the shell is connected with the first pressure containing chamber and the second pressure containing chamber through the two pressure interfaces at the bottom, an isolation diaphragm for sealing the oil guide pipe is arranged on the inner side of the pressure interface, and silicone oil is filled between the suspension core and the rigid insulator.
A mounting hole is formed in the side edge of the base of the shell;
The pressure interface protrudes out of the bottom surface of the shell, so that a mechanical sub-port installation mode is formed, leakage is avoided, pressure-resistant bearing capacity is increased, and the application range of high-pressure application places is enlarged.
The inner diameter of the pressure interface is 23mm, the outer diameter of the pressure interface is 28mm, and the pressure interface protrudes out of the bottom surface of the shell by 3 mm.
The electrode plates are connected on the suspension core body to form a joint and are connected in a sealing and welding mode, and a welding sealing ring is formed on the suspension core body;
The electrode plates are welded on the suspension core body in a laser welding mode.
The electrode plates are arc-shaped, the two electrode plates are buckled, and the central measuring diaphragm is positioned between the two electrode plates.
In summary, due to the adoption of the technical scheme, the invention has the beneficial effects that:
1. In the invention, the suspension core body is far away from the process pressure chamber; mechanical and thermal isolation is achieved. The floating core is not in direct contact with the process heat and pressure sources; the mechanical stress on the suspension core body is released, and the static pressure performance is improved; the large range ratio is up to 100: 1.
2. according to the invention, the lead sintered by the rigid insulator and the mounting mode of the oil charging pipe and the suspension core are adopted, and the capacitor plate and the suspension core are connected by laser welding, so that full isolation is realized, the electrical insulation is ensured, and the flexibility, the performance and the transient voltage resistant protection capability of the electronic circuit board are improved; high precision up to 0.075% is realized.
3. The oil guide pipe is further connected with the middle part of the suspension core body, and the oil guide pipe is placed in the middle, so that pressure oil guide is more uniform, measurement is more accurate, and the service life is prolonged.
4. The bottom of the shell is provided with a pressure interface corresponding to the bottom end of the oil guide pipe, and the pressure interface protrudes out of the bottom surface of the shell, so that an installation form of an isolation diaphragm is formed, the leakage is avoided, the pressure-resistant bearing capacity is increased, and the use of high-pressure application places is expanded.
Drawings
FIG. 1 is a structural cross-sectional view of the present invention;
the labels in the figure are: 1. a housing; 1-1, a base; 1-2, mounting holes; 2. a suspended core; 3. welding a sealing ring; 4. a joint; 5. a wire; 6. an oil-filled tube; 7. a central measurement diaphragm; 8. a pressure interface; 9. an isolation diaphragm; 10. a capacitor plate; 11. a rigid insulator; 12. an oil guide pipe; 13. a silicone oil.
Detailed Description
in order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; furthermore, unless expressly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, as they may be fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Referring to fig. 1, the coplanar suspension type full-isolation sensor comprises a shell 1, wherein a base is arranged at the bottom of the shell 1, a suspension core 2 is arranged in the shell 1, the suspension core 2 is of a transversely arranged cylindrical shell structure, electrode plates 10 are symmetrically arranged at the left and right sides of the middle part in the suspension core 2, a central measurement diaphragm 7 is arranged between the two electrode plates 10, a rigid insulator 11 is arranged at the outer side of each electrode plate 10, and the electrode plates 10 extend to the outer side of the rigid insulator 11 and are connected with the suspension core 2 in a sealing manner; the electrode plates 10 on the two sides are connected with leads 5, the leads 5 are sleeved on the oil filling pipe 6 and sintered with the rigid insulator 11, and the leads 5 extend out of the suspension core body 2; oil guide pipes 12 are arranged in the shell 1 corresponding to two sides of the suspension core body 2, the tops of the oil guide pipes 12 are bent and connected with the middle of the suspension core body 2, and penetrate through the suspension core body 2, the rigid insulators 11 and the electrode plates 10 on the corresponding sides; the bottom of the oil guide pipe 12 penetrates through the bottom of the shell 1 and extends to a base 1-1 of the shell 1; a pressure interface 8 is arranged on a base 1-1 of the shell 1 corresponding to the bottom end of an oil guide pipe 12, the shell 1 is connected with a first pressure chamber and a second pressure chamber through two pressure interfaces 8 at the bottom, an isolation diaphragm 9 for sealing the oil guide pipe 12 is arranged on the inner side of the pressure interface 8, and silicone oil 13 is filled between the suspension core 2 and the rigid insulator 11.
A mounting hole 1-2 is formed in the side edge of a base 1-1 of the shell 1;
The pressure interface 8 protrudes out of the bottom surface of the shell 1, so that a mechanical sub-port installation mode is formed, leakage is avoided, pressure-resistant bearing capacity is increased, and the application range of high-pressure application is expanded.
Wherein, the inner diameter of the pressure interface 8 is 23mm, the outer diameter is 28mm, and the pressure interface 8 protrudes out of the bottom surface of the shell 1 by 3 mm. The electrode plates 10 are connected on the suspension core body 2 to form a joint 4 and are connected in a sealing and welding mode, and a welding sealing ring 3 is formed on the suspension core body 2; wherein the electrode plate 10 is welded on the suspension core body 2 by adopting a laser welding mode. The electrode plates 10 are arc-shaped, the two electrode plates 10 are buckled, and the central measuring diaphragm 7 is positioned between the two electrode plates 10.
The working principle is as follows: 1. the invention provides a coplanar suspension type full-isolation sensor, which is characterized in that a suspension core body 2 is skillfully arranged, the suspension core body 2 is of a transversely arranged cylindrical shell structure, electrode plates 10 are symmetrically arranged at the left and right sides of the middle part in the suspension core body 2, a central measurement diaphragm 7 is arranged between the two electrode plates 10, the suspension core body 2 is supported and connected through an oil guide pipe 12, and the isolation diaphragms in a pressure interface 8 at the outer end of the oil guide pipe 12 are coplanar to realize coplanar suspension; in the invention, the suspension core body is far away from the process pressure chamber; mechanical and thermal isolation is achieved. The floating core is not in direct contact with the process heat and pressure sources; the mechanical stress on the suspension core body is released, and the static pressure performance is improved; a large range ratio (100: 1) is achieved. According to the invention, the lead sintered by the rigid insulator and the mounting mode of the oil charging pipe and the suspension core are adopted, and the capacitor plate and the suspension core are connected by laser welding, so that full isolation is realized, the electrical insulation is ensured, and the flexibility, the performance and the transient voltage resistant protection capability of the electronic circuit board are improved; the high precision reaches 0.075%; according to the invention, the oil guide pipe 12 is further connected with the middle part of the suspension core body 2, and the oil guide pipe 12 is placed in the middle, so that the pressure oil guide is more uniform, the measurement is more accurate, and the service life is prolonged; the bottom of the shell 1 is further provided with a pressure interface 8 corresponding to the bottom end of the oil guide pipe 12, and the pressure interface 8 protrudes out of the bottom surface of the shell 1, so that an installation form of an isolation diaphragm 9 is formed, the leakage is avoided, the pressure-resistant bearing capacity is increased, and the application to high-pressure application places is expanded.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (8)
1. the utility model provides a floated sensor of isolating entirely of coplanar, includes casing (1), and casing (1) bottom is provided with base (1-1), its characterized in that: the suspension core body (2) is arranged in the shell (1), the suspension core body (2) is of a cylindrical shell structure which is transversely arranged, electrode plates (10) are symmetrically arranged at the left and right of the middle part in the suspension core body (2), a central measuring diaphragm (7) is arranged between the two electrode plates (10), a rigid insulator (11) is arranged on the outer side of each electrode plate (10), and the electrode plates (10) extend to the outer side of the rigid insulator (11) and are in sealing connection with the suspension core body (2); oil guide pipes (12) are arranged in the shell (1) corresponding to the two sides of the suspension core body (2), the tops of the oil guide pipes (12) are bent and connected with the middle part of the suspension core body (2) and penetrate through the suspension core body (2), the rigid insulator (11) and the electrode plates (10) on the corresponding sides; the bottom of the oil guide pipe (12) penetrates through the bottom of the shell (1) and extends to a base (1-1) of the shell (1); the pressure connector (8) is arranged on a base (1-1) of the shell (1) corresponding to the bottom end of the oil guide pipe (12), the shell (1) is connected with the first pressure chamber and the second pressure chamber through the two pressure connectors (8) at the bottom, an isolation diaphragm (9) for sealing the oil guide pipe (12) is arranged on the inner side of the pressure connector (8), and silicone oil (13) is filled between the suspension core body (2) and the rigid insulator (11).
2. A coplanar suspension type fully isolated sensor as defined in claim 1 wherein: the side edge of a base (1-1) of the shell (1) is provided with a mounting hole (1-2).
3. A coplanar suspension type fully isolated sensor as defined in claim 1 wherein: the pressure interface (8) protrudes out of the bottom surface of the shell (1).
4. A coplanar suspension type fully isolated sensor as defined in claim 3 wherein: the inner diameter of the pressure interface (8) is 23mm, the outer diameter of the pressure interface is 28mm, and the pressure interface (8) protrudes out of the bottom surface of the shell (1) by 3 mm.
5. A coplanar suspension type fully isolated sensor as defined in claim 1 wherein: the electrode plate (10) is connected on the suspension core body (2) to form a joint (4) and is connected in a sealing and welding mode, and a welding sealing ring (3) is formed on the suspension core body (2).
6. A coplanar suspension type fully isolated sensor as defined in claim 5 wherein: the sealing welding connection is laser welding.
7. a coplanar suspension type fully isolated sensor as defined in any one of claims 1 to 6 wherein: the electrode plates (10) are arc-shaped, the two electrode plates (10) are buckled, and the central measuring diaphragm (7) is positioned between the two electrode plates (10).
8. A coplanar suspension type fully isolated sensor as defined in claim 7 wherein: the electrode plates (10) on the two sides are connected with leads (5), and the leads (5) are sleeved on the oil filling pipe (6) and extend out of the suspension core body (2) after being sintered with the rigid insulator (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910854881.6A CN110553763B (en) | 2019-09-10 | 2019-09-10 | Coplanar suspension type full-isolation sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910854881.6A CN110553763B (en) | 2019-09-10 | 2019-09-10 | Coplanar suspension type full-isolation sensor |
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| Publication Number | Publication Date |
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| CN110553763A true CN110553763A (en) | 2019-12-10 |
| CN110553763B CN110553763B (en) | 2021-03-19 |
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| CN201910854881.6A Active CN110553763B (en) | 2019-09-10 | 2019-09-10 | Coplanar suspension type full-isolation sensor |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111855073A (en) * | 2020-08-25 | 2020-10-30 | 武汉飞恩微电子有限公司 | EGR differential pressure sensor |
| CN112284426A (en) * | 2020-10-19 | 2021-01-29 | 上海恩邦自动化仪表股份有限公司 | High-precision metal capacitance sensor |
| WO2022077879A1 (en) * | 2020-10-18 | 2022-04-21 | 武汉飞恩微电子有限公司 | Core structure and pressure transducer |
| CN116380298A (en) * | 2023-03-07 | 2023-07-04 | 上海洛丁森工业自动化设备有限公司 | Metal capacitive pressure sensor |
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| WO1982001250A1 (en) * | 1980-10-06 | 1982-04-15 | Inc Rosemount | Capacitive pressure transducer with isolated sensing diaphragm |
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| US10312342B2 (en) * | 2014-04-30 | 2019-06-04 | Purdue Research Foundation | NEMS devices with series ferroelectric negative capacitor |
| CN209197965U (en) * | 2018-12-14 | 2019-08-02 | 上海恩邦自动化仪表有限公司 | A kind of floated pressure sensor |
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2019
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO1982001250A1 (en) * | 1980-10-06 | 1982-04-15 | Inc Rosemount | Capacitive pressure transducer with isolated sensing diaphragm |
| CN1065334A (en) * | 1987-05-18 | 1992-10-14 | 罗斯蒙德公司 | Modular pressure instrument |
| CN1864055A (en) * | 2003-10-02 | 2006-11-15 | 罗斯蒙德公司 | Pressure transmitter module with leak-resistant sensor housing |
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| US10312342B2 (en) * | 2014-04-30 | 2019-06-04 | Purdue Research Foundation | NEMS devices with series ferroelectric negative capacitor |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111855073A (en) * | 2020-08-25 | 2020-10-30 | 武汉飞恩微电子有限公司 | EGR differential pressure sensor |
| WO2022077879A1 (en) * | 2020-10-18 | 2022-04-21 | 武汉飞恩微电子有限公司 | Core structure and pressure transducer |
| CN112284426A (en) * | 2020-10-19 | 2021-01-29 | 上海恩邦自动化仪表股份有限公司 | High-precision metal capacitance sensor |
| CN116380298A (en) * | 2023-03-07 | 2023-07-04 | 上海洛丁森工业自动化设备有限公司 | Metal capacitive pressure sensor |
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| CN110553763B (en) | 2021-03-19 |
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Effective date of registration: 20210803 Address after: 510000 Room 302, third floor, main building, No. 336, Qingnian Road, Huangpu District, Guangzhou, Guangdong Patentee after: GUANGZHOU HUAMAO SENSING INSTRUMENT Co.,Ltd. Address before: 510653 Room 201, No.72, Mupi East Road, Lingtang village, Tianhe District, Guangzhou City, Guangdong Province Patentee before: GUANGZHOU MINGHUA INSTRUMENT METER Co.,Ltd. |
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