CN110512183A - A kind of vacuum coating equipment and the method that conductive magneto-conductive pallet is quickly heated - Google Patents
A kind of vacuum coating equipment and the method that conductive magneto-conductive pallet is quickly heated Download PDFInfo
- Publication number
- CN110512183A CN110512183A CN201910897466.9A CN201910897466A CN110512183A CN 110512183 A CN110512183 A CN 110512183A CN 201910897466 A CN201910897466 A CN 201910897466A CN 110512183 A CN110512183 A CN 110512183A
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- China
- Prior art keywords
- conductive
- pallet
- induction coil
- magneto
- cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
Abstract
The invention discloses a kind of vacuum coating equipments, including the quick preheating loading chamaer set gradually from left to right, heating cushion chamber for being heated to pallet, for carrying out the plating membrane cavity of plated film to the product on pallet, cooling cushion chamber for pallet slow cooling, for cooling down the cooling chamber of pallet, unload chamber, in loading chamaer, heat cushion chamber, plate membrane cavity, at least one chamber designs the induction coil being connected on medium-high frequency power supply in cooling cushion chamber, the alternating magnetic field for the polarity instantaneous variation that induction coil surrounding generates, when conductive magneto-conductive pallet is located in above-mentioned alternating magnetic field, it generates eddy current effect and hysteresis is heated, realize the technical effect of quickly heating pallet；And the method that conductive magneto-conductive pallet is quickly heated using above equipment, induction coil is connected using medium-high frequency power supply, pallet is made to pass through the mode for being generated the alternating magnetic field of polarity instantaneous variation by induction coil and being heated up, heating speed is fast, cavity design is simple, and temperature of tray is stablized.
Description
Technical field
The present invention relates to field of vacuum coating, and in particular to a kind of vacuum coating equipment and carries out to conductive magneto-conductive pallet fast
The method of speed heating.
Background technique
For vacuum coating equipment, quickly heating is carried out uniformly to the pallet for loading sample, reaches process requirements
Temperature is a crucial step.
In recent years, the heating method that most of vacuum coating equipments are taken is heat block (being equipped with heater strip) tyre thermal current
The form of heating is assisted, though can reach process requirements temperature, this mode heating speed is slow, and time-consuming, it is difficult in of short duration number
The pallet for loading sample is raised to technological temperature in time second.
For this problem, using it is infrared quickly heat by the way of applied, can satisfy tens seconds when
It is interior that the temperature of tray for loading sample is made to reach process requirements temperature, but corresponding heating power is slightly higher, duration or repeatability
Heating will lead to that vacuum chamber room temperature is excessively high and be difficult to stablize, and in addition cavity design is complicated；The mode of infrared lamp heating
The mode irradiated vertically downward in the surface of pallet is usually selected quickly to heat it, the heating method of this single side irradiation
Surface temperature thereon can only be quickly heated, pallet lower half temperature does not have larger change within the time of several seconds, due to pallet
With certain thickness, only to its upper surface single heating, effectively increased its bulk temperature, so pallet meeting
There are an apparent temperature gradients, in technical process, the temperature of pallet can gradually by it is compound fall, constantly reduce, to make
The bulk temperature of pallet is lower than process requirements temperature, causes undesirable influence to producing line.
Summary of the invention
Conductive magneto-conductive pallet is carried out the object of the present invention is to provide a kind of vacuum coating equipment and using the equipment quick
The method of heating, heating speed is fast, and conductive magneto-conductive temperature of tray is uniform, and cavity design is simple.
In order to achieve the above objectives, the product in the technical solution adopted by the present invention is a kind of vacuum coating equipment, comprising:
The multiple cavities being isolated by valve；
For transmitting the transmission device of conductive magneto-conductive pallet between the multiple cavity；
At least one plating membrane cavity in the cavity；
At least one preheating loading chamaer in the cavity；
The vacuum coating equipment further includes the induction coil as made of metal wire winding, and the induction coil is located at the vacuum
In one or more cavitys of filming equipment, the induction coil both ends are connected with medium-high frequency alternating current to form alternating magnetic field,
The conductive magneto-conductive pallet is located in the alternating magnetic field.
Preferably, the induction coil is by the metal wire using the axial line of cavity where the induction coil as axis spiral
It forms, the direction of axis line in the middle part of the induction coil along cavity where the induction coil, which has, places the conductive magneto-conductive support
The space of disk has the alternating magnetic field in the space.
It is further preferred that when the conductive magneto-conductive pallet is located at the alternating magnetic field, the conductive magneto-conductive pallet and institute
Stating has certain spacing between metal wire, the spacing can change according to actual needs.
Preferably, the induction coil is formed along a few font windings in the same plane by the metal wire.
It is further preferred that the plane where the induction coil is parallel to the axle center of induction coil place cavity
Line.
Preferably, the metal wire is hollow copper pipe, and the hollow space of the hollow copper pipe is connected with insulated type coolant liquid.
It is further preferred that the coolant liquid is pure water.
It is further preferred that temperature≤40 DEG C when the coolant liquid is passed through the hollow copper pipe.
Preferably, the cavity where the induction coil is provided with degaussing gear.
Preferably, the transmission device is made of insulating material.
In order to achieve the above objectives, the method in the technical solution adopted by the present invention is, according to any one of the above Vacuum Deposition
The method that film device quickly heats the progress of conductive magneto-conductive pallet, comprising the following steps:
A. induction coil is put into one or more cavitys of vacuum coating equipment by metal wire around induction coil is set as；
B. it is passed through medium-high frequency alternating current in induction coil in step, induction coil surrounding is made to generate polarity instantaneous variation
Alternating magnetic field；
C. the conductive magneto-conductive pallet is located in the alternating magnetic field in step B, eddy current effect and hysteresis is generated, thus by adding
Heat.
Preferably, the induction coil in step A is by the metal wire with the axle center of cavity where the induction coil
Line is that axis spiral forms, and has in the middle part of the induction coil along cavity direction of axis line where the induction coil and leads described in placement
The space of conductance magnetic pallet has the alternating magnetic field in the space.
It is further preferred that when conductive magneto-conductive pallet described in step C is located in the alternating magnetic field, the conductive magneto-conductive
Have at regular intervals between pallet and the metal wire, the spacing can change according to actual needs.
Preferably, induction coil described in step A is formed along a few font windings in the same plane by the metal wire.
It is further preferred that the plane where induction coil described in step A is parallel to cavity where the induction coil
Axial line.
Preferably, metal wire described in step A is hollow copper pipe, and it is cold that the hollow space of the hollow copper pipe is connected with insulated type
But liquid.
It is further preferred that coolant liquid described in step A is pure water.
It is further preferred that temperature≤40 DEG C when coolant liquid described in step A is passed through the hollow copper pipe.
Preferably, the cavity where induction coil described in step A is provided with degaussing gear.
Preferably, transmission device described in step C is made of insulating material
Due to the application of the above technical scheme, technical solution of the present invention has the advantage that compared with prior art
By the way that the induction coil formed by metal wire is arranged in the cavity, and medium-high frequency is passed through at the both ends of induction coil and is handed over
Galvanic electricity makes induction coil form the alternating magnetic field of polarity instantaneous variation, then is located at conductive magneto-conductive pallet in above-mentioned alternating magnetic field,
Make the conductive magneto-conductive pallet generate hysteresis to be heated, heating speed is fast, and conductive magneto-conductive temperature of tray is uniform, cavity design
Simply.
Detailed description of the invention
Attached drawing 1 is the longitudinal sectional view of vacuum coating equipment in the present invention；
Attached drawing 2 is the cross-sectional view in the direction A-A in attached drawing 1；
Attached drawing 3 is the bottom view of induction coil at B in attached drawing 1；
Wherein: 100, loading chamaer；101, assisted heating device；200, cushion chamber is heated；201, the first sealing valve；300, plated film
Chamber；301, cathode plate；302, process gas pipeline；400, cool down cushion chamber；500, cooling chamber；501, the second sealing valve；
502, heat exchanger；600, chamber is unloaded；601, third sealing valve；700, vacuum pipe；701, induction coil；703, coolant liquid；
704, hollow copper pipe；800, conductive magneto-conductive pallet；801, product substrate；900, transmission device；901, conveyer belt；902, demagnetization fills
It sets.
Specific embodiment
The preferred embodiments of the present invention will be described in detail with reference to the accompanying drawing, so that advantages and features of the invention are more
It is easy to be readily appreciated by one skilled in the art, apparent is explicitly defined to be made to protection scope of the present invention.
The left and right direction that the present invention describes refers to the left and right direction in Fig. 1.
As shown in Figure 1 to Figure 3, a kind of vacuum coating equipment provided by the invention, for being carried out on 801 surface of product substrate
Plated film, including being set gradually from left to right for quick preheating preheating loading chamaer 100, heating cushion chamber 200, plated film
Chamber 300, cooling cushion chamber 400, cooling chamber 500, unloading chamber 600, wherein heating cushion chamber 200, plating membrane cavity 300, cooling buffering
Chamber 400 interconnects, and heating cushion chamber 200 exists conductive magneto-conductive pallet 800 for heating to conductive magneto-conductive pallet 800
It is heated to 150-550 DEG C in short time, assisted heating device 101 is equipped in loading chamaer 100, for conductive magneto-conductive pallet
800 are preheated；It is provided with cathode plate 301 in plating membrane cavity 300, and is connected with process gas pipeline 302, so as in product base
Plated film on bottom 801；Cooling cushion chamber 400 is used to receive the conductive magneto-conductive pallet 800 in plating membrane cavity 300, and makes its slow cooling；
Cooling chamber 500 is provided with first between loading chamaer 100 and heating cushion chamber 200 for cooling down to conductive magneto-conductive pallet 800
Sealing valve 201 cools down and is provided with the second sealing valve 501 between cushion chamber 400 and cooling chamber 500, cooling chamber 500 and unloading chamber
It is provided with third sealing valve 601 between 600, adjusts each indoor vacuum degree of chamber by closing above-mentioned valve, it is ensured that each valve energy
It is enough normally-open, meanwhile, it is spaced by above-mentioned valve, it is ensured that vacuum degree when working normally each chamber.
As shown in Figure 1, above-mentioned vacuum coating equipment further includes in loading chamaer 100, heating cushion chamber 200, plating membrane cavity
300, cool down cushion chamber 400, cooling chamber 500, the transmission device 900 for unloading transport conductive magneto-conductive pallet between chamber 600, transmission dress
Setting 900 includes conveyer belt 901, and in the present embodiment, conveyer belt 901 is made of insulating materials.
According to actual needs, induction coil 701, induction coil 701 and medium-high frequency electricity are additionally provided in one or more chambers
Source (not shown) is connected, and in medium-high frequency power work, medium-high frequency alternating current, induction coil are passed through in induction coil 701
701 generate the high-intensity magnetic field of polarity instantaneous variation, when conductive magneto-conductive pallet 800 is located at high-intensity magnetic field region, since conduction is led
Magnetic pallet 800 itself has certain resistance, generates eddy current effect and hysteresis in conductive magneto-conductive pallet 800 and heats up, due to
The polarity instantaneous variation of high-intensity magnetic field, so that conductive magneto-conductive pallet 800 can quickly and uniformly heat up.
As shown in Fig. 2, induction coil 701 is in rectangular-ambulatory-plane, formed by metal wire by axis spiral of the axial line of chamber, the line of induction
701 middle part of circle is along chamber direction of axis line, wherein having the space placed for conductive magneto-conductive pallet 800, at 701 liang of induction coil
End is when being passed through medium-high frequency alternating current, formation alternating magnetic field in space, and when work, conductive magneto-conductive pallet 800 is located in alternating magnetic field,
Have at regular intervals between conductive magneto-conductive pallet 800 and metal wire, this spacing can change according to actual needs.
As shown in figure 3, induction coil 701 is formed along a few font windings in the same plane by the metal wire, zigzag shape
Size spacing will affect the heating effect of conductive magneto-conductive pallet 800, can determine according to actual needs, conductive magneto-conductive pallet 800
Positioned at the surface of a few font induction coils.
As Figure 2-3, induction coil 701 is formed by 704 winding of hollow copper pipe, in the cavity at 704 middle part of hollow copper pipe
It is connected with coolant liquid 703, which is insulated type coolant liquid, and in the present embodiment, which is pure water, coolant liquid
703 recycle between hollow copper pipe 704 and cooling-water machine, take away the heat of the generation of hollow copper pipe 704, then are carried out by cooling-water machine cold
But, temperature≤40 DEG C when coolant liquid 703 is passed through hollow copper pipe 704, to avoid equipment damage is caused.
When connecting medium-high frequency power supply due to induction coil 701, the high-intensity magnetic field of polarity instantaneous variation can be generated, in induction coil
701
Region between chamber inner wall can generate extra magnetic field, to avoid interference of the magnetic field to vacuum coating equipment, pre-
Heating loading chamaer 100 heating cushion chamber 200, plates membrane cavity 300, is equipped with degaussing gear 902 on the cushion chamber 400 that cools down.
The method that conductive magneto-conductive pallet is heated using above-mentioned vacuum coating equipment, comprising the following steps:
A. induction coil is put into one or more cavitys of vacuum coating equipment by metal wire around induction coil is set as；
B. it is passed through medium-high frequency alternating current in induction coil in step, induction coil surrounding is made to generate polarity instantaneous variation
Alternating magnetic field；
C. the conductive magneto-conductive pallet is located in the alternating magnetic field in step B, eddy current effect and hysteresis is generated, thus by adding
Heat.
Preferably, the induction coil in step A is by the metal wire with the axle center of cavity where the induction coil
Line is that axis spiral forms, and has in the middle part of the induction coil along cavity direction of axis line where the induction coil and leads described in placement
The space of conductance magnetic pallet has the alternating magnetic field in the space.
It is further preferred that when conductive magneto-conductive pallet described in step C is located in the alternating magnetic field, the conductive magneto-conductive
Have at regular intervals between pallet and the metal wire, the spacing can change according to actual needs.
Preferably, induction coil described in step A is formed along a few font windings in the same plane by the metal wire.
It is further preferred that the plane where induction coil described in step A is parallel to cavity where the induction coil
Axial line.
Preferably, metal wire described in step A is hollow copper pipe, and it is cold that the hollow space of the hollow copper pipe is connected with insulated type
But liquid.
It is further preferred that coolant liquid described in step A is pure water.
It is further preferred that temperature≤40 DEG C when coolant liquid described in step A is passed through the hollow copper pipe.
Preferably, degaussing gear is provided on the outside of cavity where induction coil described in step A.
Preferably, transmission device described in step C is made of insulating material.
By being passed through alternating current in induction coil, induction coil is set to form polar cycle changing magnetic field, conduction is led
When magnetic pallet is located in the magnetic field, generating eddy current effect and hysteresis is heated, heating speed is fast, and temperature of tray is uniform,
Cavity design is simple.
The above embodiments merely illustrate the technical concept and features of the present invention, and its object is to allow person skilled in the art
Scholar cans understand the content of the present invention and implement it accordingly, and it is not intended to limit the scope of the present invention, it is all according to the present invention
Equivalent change or modification made by Spirit Essence, should be covered by the protection scope of the present invention.
Claims (20)
1. a kind of vacuum coating equipment, comprising:
The multiple cavities being isolated by valve；
For transmitting the transmission device of conductive magneto-conductive pallet between the multiple cavity；
At least one plating membrane cavity in the cavity；
At least one preheating loading chamaer in the cavity；
It is characterized by:
The vacuum coating equipment further includes the induction coil as made of metal wire winding, and the induction coil is located at the vacuum
In one or more cavitys of filming equipment, the induction coil both ends are connected with medium-high frequency alternating current to form alternating magnetic field,
The conductive magneto-conductive pallet is located in the alternating magnetic field.
2. vacuum coating equipment according to claim 1, it is characterised in that: the induction coil is by the metal wire with institute
The axial line of cavity where stating induction coil is that axis spiral forms, along cavity where the induction coil in the middle part of the induction coil
Direction of axis line there is the space for placing the conductive magneto-conductive pallet, with the alternating magnetic field in the space.
3. vacuum coating equipment according to claim 2, it is characterised in that: the conductive magneto-conductive pallet is located at the alternation
When magnetic field, there is certain spacing, the spacing can be according to actual needs between the conductive magneto-conductive pallet and the metal wire
It changes.
4. vacuum coating equipment according to claim 1, it is characterised in that: the induction coil is by the metal wire same
It is formed in one plane along a few font windings.
5. the heating device of vacuum coating equipment conductive magneto-conductive pallet according to claim 4, it is characterised in that: the sense
The axial line of cavity where plane where answering coil is parallel to the induction coil.
6. vacuum coating equipment according to claim 1, it is characterised in that: the metal wire be hollow copper pipe, it is described in
The hollow space of empty copper pipe is connected with insulated type coolant liquid.
7. vacuum coating equipment according to claim 6, it is characterised in that: the coolant liquid is pure water.
8. vacuum coating equipment according to claim 6, it is characterised in that: when the coolant liquid is passed through the hollow copper pipe
Temperature≤40 DEG C.
9. vacuum coating equipment according to claim 1, it is characterised in that: the cavity where the induction coil is provided with
Degaussing gear.
10. vacuum coating equipment according to claim 1, it is characterised in that: the transmission device is made of insulating material.
11. the vacuum coating equipment in -10 described in any one quickly heats conductive magneto-conductive pallet according to claim 1
Method, comprising the following steps:
A. induction coil is put into one or more cavitys of vacuum coating equipment by metal wire around induction coil is set as；
B. it is passed through medium-high frequency alternating current in induction coil in step, induction coil surrounding is made to generate polarity instantaneous variation
Alternating magnetic field；
C. the conductive magneto-conductive pallet is located in the alternating magnetic field in step B, eddy current effect and hysteresis is generated, thus by adding
Heat.
12. the method according to claim 11 quickly heated to conductive magneto-conductive pallet, it is characterised in that: step A
In the induction coil formed using the axial line of cavity where the induction coil as axis spiral by the metal wire, the sense
Answer thiol that there is the space for placing the conductive magneto-conductive pallet along cavity direction of axis line where the induction coil, it is described
There is the alternating magnetic field in space.
13. the method according to claim 12 quickly heated to conductive magneto-conductive pallet, it is characterised in that: step C
Described in conductive magneto-conductive pallet when being located in the alternating magnetic field, have one between the conductive magneto-conductive pallet and the metal wire
Fixed spacing, the spacing can change according to actual needs.
14. the method according to claim 11 quickly heated to conductive magneto-conductive pallet, it is characterised in that: step A
Described in induction coil formed in the same plane along a few font windings by the metal wire.
15. the method according to claim 14 quickly heated to conductive magneto-conductive pallet, it is characterised in that: step A
Described in plane where induction coil be parallel to the induction coil where cavity axial line.
16. the method according to claim 11 quickly heated to conductive magneto-conductive pallet, it is characterised in that: step A
Described in metal wire be hollow copper pipe, the hollow space of the hollow copper pipe is connected with insulated type coolant liquid.
17. the method according to claim 16 quickly heated to conductive magneto-conductive pallet, it is characterised in that: step A
Described in coolant liquid be pure water.
18. the method according to claim 16 quickly heated to conductive magneto-conductive pallet, it is characterised in that: step A
Described in temperature≤40 DEG C of coolant liquid when being passed through the hollow copper pipe.
19. the method according to claim 11 quickly heated to conductive magneto-conductive pallet, it is characterised in that: step A
Described in cavity where induction coil be provided with degaussing gear.
20. the method that the progress according to claim 11 to conductive magneto-conductive pallet is quickly heated, it is characterised in that: step
Transmission device described in C is made of insulating material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910897466.9A CN110512183A (en) | 2019-09-23 | 2019-09-23 | A kind of vacuum coating equipment and the method that conductive magneto-conductive pallet is quickly heated |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910897466.9A CN110512183A (en) | 2019-09-23 | 2019-09-23 | A kind of vacuum coating equipment and the method that conductive magneto-conductive pallet is quickly heated |
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| CN110512183A true CN110512183A (en) | 2019-11-29 |
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| CN201910897466.9A Pending CN110512183A (en) | 2019-09-23 | 2019-09-23 | A kind of vacuum coating equipment and the method that conductive magneto-conductive pallet is quickly heated |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022027994A1 (en) * | 2020-08-03 | 2022-02-10 | 苏州迈正科技有限公司 | Coating apparatus, method and system, solar cell, module, and power generation system |
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| JPH03260048A (en) * | 1990-03-12 | 1991-11-20 | Komatsu Ltd | Rapid gas nitriding method |
| WO2009057185A1 (en) * | 2007-10-29 | 2009-05-07 | Shimadzu Corporation | Cvd device |
| CN103540914A (en) * | 2013-09-24 | 2014-01-29 | 中国科学院苏州纳米技术与纳米仿生研究所 | Bucket-type CVD (chemical vapor deposition) equipment reaction chamber using radio-frequency heating |
| CN104152985A (en) * | 2014-08-12 | 2014-11-19 | 中国电子科技集团公司第四十八研究所 | Induction heating apparatus for SiC epitaxy |
| CN104513971A (en) * | 2013-09-29 | 2015-04-15 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Reaction chamber and plasma processing apparatus |
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2019
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03260048A (en) * | 1990-03-12 | 1991-11-20 | Komatsu Ltd | Rapid gas nitriding method |
| WO2009057185A1 (en) * | 2007-10-29 | 2009-05-07 | Shimadzu Corporation | Cvd device |
| CN103540914A (en) * | 2013-09-24 | 2014-01-29 | 中国科学院苏州纳米技术与纳米仿生研究所 | Bucket-type CVD (chemical vapor deposition) equipment reaction chamber using radio-frequency heating |
| CN104513971A (en) * | 2013-09-29 | 2015-04-15 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Reaction chamber and plasma processing apparatus |
| CN104152985A (en) * | 2014-08-12 | 2014-11-19 | 中国电子科技集团公司第四十八研究所 | Induction heating apparatus for SiC epitaxy |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022027994A1 (en) * | 2020-08-03 | 2022-02-10 | 苏州迈正科技有限公司 | Coating apparatus, method and system, solar cell, module, and power generation system |
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Application publication date: 20191129 |