CN110473764A - 一种基于射频电源的阻抗调节方法及射频电源*** - Google Patents
一种基于射频电源的阻抗调节方法及射频电源*** Download PDFInfo
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- CN110473764A CN110473764A CN201910843137.6A CN201910843137A CN110473764A CN 110473764 A CN110473764 A CN 110473764A CN 201910843137 A CN201910843137 A CN 201910843137A CN 110473764 A CN110473764 A CN 110473764A
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/248—Components associated with high voltage supply
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
- H01J37/32183—Matching circuits
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111371473A (zh) * | 2020-03-10 | 2020-07-03 | 捷开通讯(深圳)有限公司 | 射频电路的调试方法 |
CN112014762A (zh) * | 2020-10-21 | 2020-12-01 | 佛仪科技(佛山)有限公司 | 射频电源的阻抗匹配测试方法、装置、介质及测试平台 |
CN112272031A (zh) * | 2020-08-26 | 2021-01-26 | 华南理工大学 | 一种天线阻抗自动匹配方法和*** |
CN112566297A (zh) * | 2020-12-07 | 2021-03-26 | 清华四川能源互联网研究院 | 等离子光源驱动***和方法 |
CN112799315A (zh) * | 2020-12-29 | 2021-05-14 | 成都沃特塞恩电子技术有限公司 | 射频控制方法、装置及射频源 |
CN113241296A (zh) * | 2021-04-29 | 2021-08-10 | 北京北方华创微电子装备有限公司 | 射频电源及其阻抗匹配方法、半导体工艺设备 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5077499A (en) * | 1990-04-18 | 1991-12-31 | Mitsubishi Denki Kabushiki Kaisha | High-frequency feeding method for use in plasma apparatus and device for carrying out the method |
CN107294879A (zh) * | 2016-03-31 | 2017-10-24 | 宇龙计算机通信科技(深圳)有限公司 | 一种阻抗匹配方法及装置、移动终端 |
CN109104001A (zh) * | 2018-10-11 | 2018-12-28 | 宁夏全福电子科技有限公司 | 中功率中距离无线电能传输***阻抗实时调节方法 |
CN109257116A (zh) * | 2018-09-05 | 2019-01-22 | 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) | 用于检测输出端电压驻波比的***及方法 |
-
2019
- 2019-09-06 CN CN201910843137.6A patent/CN110473764B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5077499A (en) * | 1990-04-18 | 1991-12-31 | Mitsubishi Denki Kabushiki Kaisha | High-frequency feeding method for use in plasma apparatus and device for carrying out the method |
CN107294879A (zh) * | 2016-03-31 | 2017-10-24 | 宇龙计算机通信科技(深圳)有限公司 | 一种阻抗匹配方法及装置、移动终端 |
CN109257116A (zh) * | 2018-09-05 | 2019-01-22 | 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) | 用于检测输出端电压驻波比的***及方法 |
CN109104001A (zh) * | 2018-10-11 | 2018-12-28 | 宁夏全福电子科技有限公司 | 中功率中距离无线电能传输***阻抗实时调节方法 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111371473A (zh) * | 2020-03-10 | 2020-07-03 | 捷开通讯(深圳)有限公司 | 射频电路的调试方法 |
CN112272031A (zh) * | 2020-08-26 | 2021-01-26 | 华南理工大学 | 一种天线阻抗自动匹配方法和*** |
CN112014762A (zh) * | 2020-10-21 | 2020-12-01 | 佛仪科技(佛山)有限公司 | 射频电源的阻抗匹配测试方法、装置、介质及测试平台 |
CN112566297A (zh) * | 2020-12-07 | 2021-03-26 | 清华四川能源互联网研究院 | 等离子光源驱动***和方法 |
CN112566297B (zh) * | 2020-12-07 | 2021-12-07 | 清华四川能源互联网研究院 | 等离子光源驱动***和方法 |
CN112799315A (zh) * | 2020-12-29 | 2021-05-14 | 成都沃特塞恩电子技术有限公司 | 射频控制方法、装置及射频源 |
CN112799315B (zh) * | 2020-12-29 | 2022-02-01 | 成都沃特塞恩电子技术有限公司 | 射频控制方法、装置及射频源 |
CN113241296A (zh) * | 2021-04-29 | 2021-08-10 | 北京北方华创微电子装备有限公司 | 射频电源及其阻抗匹配方法、半导体工艺设备 |
CN113241296B (zh) * | 2021-04-29 | 2024-06-04 | 北京七星华创流量计有限公司 | 射频电源及其阻抗匹配方法、半导体工艺设备 |
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Inventor after: Lin Weiqun Inventor after: Yue Weiping Inventor after: Tang Yahai Inventor after: Lin Guihao Inventor before: Lin Weiqun Inventor before: Yue Weiping Inventor before: Zhang Guidong Inventor before: Tang Yahai Inventor before: Lin Guihao |
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Address after: 518102 Room 101, 201, 301, Building B, Functional Support Area, Taohuayuan Zhichuang Town, Tiegang Community, Xixiang Street, Baoan District, Shenzhen, Guangdong Province Patentee after: Shenzhen Hengyunchang Vacuum Technology Co.,Ltd. Address before: 518000 functional supporting area B, Taohuayuan Zhichuang Town, Tiegang community, Xixiang street, Bao'an District, Shenzhen, Guangdong 101201301 Patentee before: SHENZHEN HENGYUNCHANG VACUUM TECHNOLOGY CO.,LTD. |
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