CN110455410A - A kind of array resonant mode Terahertz receiver and its terahertz light spectrometer device - Google Patents
A kind of array resonant mode Terahertz receiver and its terahertz light spectrometer device Download PDFInfo
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Abstract
The invention discloses a kind of array resonant mode Terahertz receiver and its terahertz light spectrometer devices.The terahertz light spectrometer device is based on array resonant mode Terahertz receiver and receives terahertz wave signal.Array resonant mode Terahertz receiver includes by the aerial array of several groups difference resonance frequency.Aerial array is rearranged by resonant element by N × M ranks.Resonant element is the dual openings resonance ring structure based on inductance capacitance resonance principle.The central part of the dual openings resonance ring structure of the resonant element in aerial array bosom is equipped with superconductivity niobium nitride thermion bolometer, and is bridged by superconductivity niobium nitride thermion bolometer.It is demonstrated experimentally that the present invention has very high sensitivity, and fast response time when detecting terahertz light spectrum signal, and is easy on piece and integrates, preparation process is simple and convenient, and at low cost, system is simple, easy to spread.
Description
Technical field
The present invention relates to the detections of the tera-hertz spectra of based superconductive niobium nitride bolometer.
Background technique
Terahertz (terahertz, usual abbreviation THz) wave, typically refers to frequency in 0.1THz to the electromagnetism between 30THz
Wave.THz wave photon energy is low, has many characteristics, such as penetrability and dactylogram, it is made to be widely used in radio astronomy, safety check
The fields such as imaging, biological medicine.In recent decades, people deepen continuously to the research of THz wave, different types of Terahertz
Detector and radiation source are born one after another, and various terahertz light spectrometer detection techniques also accordingly generate.
The direct detector of Terahertz of based superconductive niobium nitride (NbN) bolometer (HEB), speed fast (response time
About 35ps) and high sensitivity (noise equivalent power NEP be 10-13~10-12W/ √ Hz), become the faint Terahertz short pulse of detection
The powerful of signal.Terahertz Meta Materials be by electric small-size, be repeated cyclically that unit constitutes be applied to terahertz wave band
Artificial electromagnetic Meta Materials.It can be prepared into narrowband inductance capacitance (LC) resonator using the Terahertz Meta Materials of open ring structure,
Have many advantages, such as that Q value is high, be easy to Planar integration.With the development of Terahertz Technology, the need of terahertz light spectrometer are integrated on piece
It asks and is stepped up.Traditional tera-hertz spectra detection mode has interferometer, such as Michelson (Michelson) interferometer, needs
The displacement platform optical system for wanting a set of control mobile, is unfavorable for being mounted on spacecraft.Time domain terahertz light spectrometer is
The mode of newer detection Terahertz frequency spectrum, but need subpicosecond or femto-second laser costly.Based on Schottky diode
The detector of (Schottky diode) also possesses faster speed, but sensitivity is not relatively high, and noise equivalent power NEP is about
It is 5.0 × 10-10W/Hz1/2, to faint terahertz pulse signal detection ability not as good as superconduction niobium nitride (NbN) bolometer
(HEB)。
Summary of the invention
Problem to be solved by this invention: while improving the sensitivity and response speed of terahertz signal spectral detection.
To solve the above problems, the scheme that the present invention uses is as follows:
A kind of array resonant mode Terahertz receiver according to the present invention, including several resonant elements；Resonant element by N ×
M ranks rearrange aerial array, including upper arm, lower arm, intermediate arm and two side arms；Upper and lower arms are parallel to each other, in
Between arm and side arm be parallel to each other；Intermediate arm is located between two side arms, and there are cavitys between intermediate arm and side arm；
The centre of two side arms is there are opening, so that side arm, which is divided into, is separately connected two sections of upper and lower arms, so that resonance
Two opposite C character form structures are presented in unit；With in a line, resonant element is .ed while passing through the upper arm bridge concatenation between upper arm
Adjacent resonant element, another side concatenate the adjacent resonant element in another side by the lower arm bridge between lower arm；Center resonance list
Member is the resonant element positioned at the antenna array center；The intermediate arm of center resonance unit is equipped with gap, so that intermediate arm point
At two sections of connection upper and lower arms；Superconductivity niobium nitride thermion bolometer is equipped in gap；Superconductivity niobium nitride thermion
Bolometer bridges two sections of intermediate arms that upper and lower arms are separately connected in center resonance unit, and by same where it
All resonant elements concatenation in row, one end of concatenation are grounding parts, and the other end is then as detection connection electrode.
Further, array resonant mode Terahertz receiver according to the present invention, further includes substrate；The aerial array is to cover
The mode of mould sputtering golden film is prepared over the substrate.
Further, array resonant mode Terahertz receiver according to the present invention, the antenna array show multiple groups；Same group of day
Resonant element resonance frequency having the same in linear array, the resonant element in the aerial arrays of difference group have different humorous
Vibration frequency.
A kind of terahertz light spectrometer device according to the present invention, including cryogenic vacuum optics Dewar, hemispherical silicon lens, battle array
Column resonant mode Terahertz receiver and reading circuit, the cryogenic vacuum optics Dewar are equipped with transparency window, enable THz wave
Enough enter the inside of the cryogenic vacuum optics Dewar by the transparency window；The hemispherical silicon lens enters institute for focusing
State the THz wave in cryogenic vacuum optics Dewar；It is saturating that the array resonant mode Terahertz receiver is tightly attached to the hemispherical silicon
The back flat of mirror, including several resonant elements；Resonant element rearranges aerial array by N × M ranks, including upper arm, under
Arm, intermediate arm and two side arms；Upper and lower arms are parallel to each other, and intermediate arm and side arm are parallel to each other；Intermediate arm is located at two
Between side arm, and there are cavitys between intermediate arm and side arm；There are openings for the centre of two side arms, so that side
Arm, which is divided into, is separately connected two sections of upper and lower arms, so that two opposite C character form structures are presented in resonant element；Same a line
Resonant element interior, that resonant element adjacents while passing through the upper arm bridge concatenation between upper arm, another side passes through between lower arm
The adjacent resonant element in lower arm bridge concatenation another side；Center resonance unit is the resonance list positioned at the antenna array center
Member；The intermediate arm of center resonance unit is equipped with gap, so that intermediate arm is divided into two sections of connection upper and lower arms；It is equipped in gap
Superconductivity niobium nitride thermion bolometer；Superconductivity niobium nitride thermion bolometer will be separately connected in center resonance unit
Two sections of intermediate arms of upper and lower arms bridge, and by concatenating where it with all resonant elements in a line, one end of concatenation
For grounding parts, the other end is then as detection connection electrode；The grounding parts ground connection；The detection connection electrode connects the reading
Circuit；The reading circuit by the current responsing signal of the aerial array for amplifying and being converted to voltage signal.
Further, terahertz light spectrometer device according to the present invention, the array resonant mode Terahertz receiver further include
Substrate；The aerial array is prepared over the substrate in such a way that mask sputters golden film.
Further, terahertz light spectrometer device according to the present invention, the antenna array show multiple groups；Same group of aerial array
Interior resonant element resonance frequency having the same, the resonant element in aerial array that difference is organized have different resonance frequencies
Rate；Every group of aerial array respectively corresponds one group of reading circuit.
Further, terahertz light spectrometer device according to the present invention, the reading circuit are the electricity of a kind of low noise, broadband
It flow to voltage converting amplifiers and provides voltage bias for the superconductivity niobium nitride thermion bolometer in the aerial array.
Technical effect of the invention is as follows:
1, it is integrated to be easy on piece, preparation process is simple and convenient, and at low cost, system is simple, easy to spread.
2, it is demonstrated experimentally that the present invention has very high sensitivity, and response speed when detecting terahertz light spectrum signal
Fastly.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of aerial array of the embodiment of the present invention.
Fig. 2 is the structural schematic diagram of resonant element of the embodiment of the present invention.
Fig. 3 is the structural schematic diagram of center resonance unit of the embodiment of the present invention.
In Fig. 1, Fig. 2, Fig. 3,1 is resonant element, and 10 be center resonance unit, and 11 be upper arm, and 12 be lower arm, and 13 be intermediate
Arm, 14 be side arm, and 16 be opening, and 19 be gap, and 21 be upper arm bridge, and 22 be lower arm bridge, and 24 be detection connection electrode, and 25 be to connect
Ground portion, 30 be superconductivity niobium nitride thermion bolometer.
Fig. 4 is the structural schematic diagram of terahertz light spectrometer device of the embodiment of the present invention.
Fig. 5 is the circuit diagram of reading circuit of the embodiment of the present invention.
In Fig. 4,91 be cryogenic vacuum optics Dewar, and 911 be transparency window, and 92 be hemispherical silicon lens, and 931 be antenna array
Column, 932 be electrode connecting line, and 933 be ground line, and 94 be reading circuit, and 941 be low noise wideband operational amplifier, and 942 be electricity
Resistance, 943 be voltage bias source.
Specific embodiment
The present invention is described in further details with reference to the accompanying drawing.
As shown in figure 4, a kind of terahertz light spectrometer device, including cryogenic vacuum optics Dewar 91, hemispherical silicon lens 92,
Array resonant mode Terahertz receiver and reading circuit 94.Cryogenic vacuum optics Dewar 91 is true by the inside of metal shell realization
Slack tank body, can be in 2K to adjusting temperature, vacuum degree 10 between 20K-5Pa.To make terahertz wave signal be able to enter low temperature
In vacuum optics Dewar 91, the optical clear window that can penetrate THz wave is provided on the tank wall of cryogenic vacuum optics Dewar 91
911.Transparency window 911 is made of wheat membrane (Mylar film).Hemispherical silicon lens 92 is used to collect and focusing passes through transparency window
911 enter the THz wave in cryogenic vacuum optics Dewar 91, and are mounted on cryogenic vacuum optics Dewar by anaerobic copper stent
In 91.Array resonant mode Terahertz receiver is tightly attached to the back flat of hemispherical silicon lens 92.Array resonant mode Terahertz connects
Receiving device includes substrate and setting multiple groups aerial array 931 on substrate, in the present embodiment, including four groups of aerial arrays 931.
Aerial array 931, as shown in Figure 1, being rearranged by N × M resonant element 1 by N × M ranks.Resonant element 1,
For the dual openings resonance ring structure based on inductance capacitance resonance principle, as shown in Fig. 2, including upper arm 11, lower arm 12, intermediate arm 13
With two side arms 14.Upper arm 11 and lower arm 12 are parallel to each other, and intermediate arm 13 and side arm 14 are parallel to each other.Intermediate arm 13 is located at
Between two side arms 14, and there are cavitys 15 between intermediate arm 13 and side arm 14.The centre of two side arms 14 there are
Opening 16, so that side arm 14, which is divided into, is separately connected two sections of upper arm 11 and lower arm 12, so that resonant element 1 is presented two
Opposite C character form structure, to form dual openings resonance ring structure.With in a line, resonant element 1 is on one side by between upper arm 11
The concatenation of upper arm bridge 21 adjacent resonant element 1, another side concatenate another side phase by the lower arm bridge 22 between lower arm 12 on one side
Adjacent resonant element 1.Center resonance unit 10 is the resonant element 1 positioned at antenna array center, it is, being located at aerial array
Central row and central series resonant element.In the aerial array arranged specific to the N row × M column of the present embodiment, if N is even
Number, central row is N/2 row or N/2+1 row；If N is odd number, central row is (N+1)/2 row；If M is even number, central series
It is M/2 column or M/2+1 column；If M is odd number, central series are that (M+1)/2 is arranged.As shown in figure 3, center resonance unit 10
Intermediate arm 13 is equipped with gap 19, so that intermediate arm 13 is divided into two sections of connection upper arm 11 and lower arm 12.Superconduction is equipped in gap 19
Niobium nitride thermion bolometer 30.Superconductivity niobium nitride thermion bolometer 30 is the thickness made of superconduction niobium nitride
The film of 3.0~5.0nm bridges two sections of intermediate arms 13 that upper arm 11 and lower arm 12 are separately connected in center resonance unit 10,
And by concatenating where it with all resonant elements 1 in a line, one end of concatenation is grounding parts 25, and the other end is then as detection
Connection electrode 24.It is, detection connection electrode 24 and grounding parts 25 are located at 10 place central row of center resonance unit
Both ends.In the present embodiment, N=30, M=40, that is, the present embodiment aerial array by 1200 resonant elements 1 by 30 rows ×
40 column arrange.
Resonant element 1 has specific resonance frequency.The resonance having the same of resonant element 1 in same group of aerial array
Frequency, the resonance frequency are also the resonance frequency of aerial array.Resonant element 1 in the aerial array of difference group has different
Resonance frequency.The resonance frequency of resonant element 1 is fallen in the frequency range of Terahertz.In the present embodiment, in four groups of aerial arrays
The resonance frequency of resonant element 1 be respectively as follows: 0.65THz, 0.79THz, 0.89THz and 1.05THz.The resonance of resonant element 1
Frequency is determined by the size of each component of resonant element 1.In the present embodiment, resonance frequency is the aerial array of 0.65THz
Resonant element 1 have the following size: h1=50.0 μm of the whole height of resonant element 1, w1=32.0 μm of overall width, upper arm
11 and h2=11.5 μm of width having the same of lower arm 12, intermediate arm 13 and w2=6.0 μm of width having the same of side arm 14,
H3=7.0 μm of width of the opening 16 of side arm 14, the center between 1 row of resonant element and row arrange and column away from being 70.0 μm
Between center away from being 44.0 μm, h0=0.20 μm of width of the gap 19 of center resonance unit 10, superconductivity niobium nitride thermion is surveyed
W0=1.80 μm of the width of bolometer 30.
In the present embodiment, the substrate of array resonant mode Terahertz receiver is made of High Resistivity Si with a thickness of 350 μm, side
The rectangular high resistant silicon wafer of a length of 4mm.The bottom of the substrate of rectangular high resistant silicon wafer is adhesive in the back of hemispherical silicon lens 92 with low temperature
Face center, the back side of hemispherical silicon lens 92 are the circular flats that diameter is 9mm.Four groups of aerial arrays sputter thickness about with mask
It is prepared on the substrate of rectangular high resistant silicon wafer for the mode of 200nm golden film, and is equipped with a ground line 933 and four on substrate
Electrode connecting line 932.The grounding parts 25 of 933 four groups of aerial arrays of connection of ground line.Four strip electrode connecting lines 932 correspond to four groups of days
Linear array, and the detection connection electrode 24 of one group of aerial array is respectively connected respectively.Four strip electrode connecting lines 932 correspond to four groups of readings
Circuit 94 out, and one group of reading circuit 94 is respectively connected respectively, so that the respectively one group of reading of connection respectively of four groups of aerial arrays
Circuit 94 out.The common grounding connection of ground line of ground line 933 and reading circuit 94.
In the present embodiment, reading circuit 94 is a kind of low noise, the electric current in broadband to voltage converting amplifiers and is antenna
Array provides voltage bias, and specific structure is as shown in Figure 5.Reading circuit 94 includes low noise wideband operational amplifier 941, electricity
Resistance 942 and voltage bias source 943.Low noise wideband operational amplifier 941 and resistance 942 form negative-feedback circuit.Negative-feedback electricity
Road provides voltage bias by connection voltage bias source 943 for aerial array.Thus reading circuit 94 is by superconduction in aerial array
The current responsing signal of niobium nitride thermion bolometer 30 is amplified and converted to voltage signal output.
The working principle of the present embodiment is as follows:
THz wave enters to inject the optical clear window of cryogenic vacuum optics Dewar 91, the focusing through hemispherical silicon lens 92,
THz wave further converges on each aerial array of array resonant mode Terahertz receiver.When terahertz signal frequency to be measured
Rate is consistent with the wherein resonance frequency of one group of aerial array, and when E field polarization direction is vertical with dual openings ring electricity wall direction, should
Group aerial array is in strong electrical field mode of resonance, is equivalent to a narrowband LC resonance device.At this time this group of aerial array to it is to be measured too
The absorption of hertz signal ability is most strong, and is farthest detected by superconductivity niobium nitride thermion bolometer 30, is converted to electricity
Response signal is flowed, which exports through detection connection electrode 24 and electrode connecting line 932 to reading circuit 94, by reading
Circuit 94 is amplified and converted to voltage signal output out.When reading circuit 94 is there are when voltage signal output, the reading circuit 94
The resonance frequency of corresponding aerial array is the frequency of detected THz wave.
The present embodiment has very high sensitivity and quick response to the detection of THz wave.It is tested, experiment test number
It is about 4.0 × 10 according to showing that the present embodiment measures optimum noise equivalent power NEP in the THz wave that frequency is 0.65THz- 12W/Hz1/2。
In addition it should be pointed out that in the present embodiment, the aerial array that array resonant mode Terahertz receiver is included is
Four groups, it will be appreciated by those skilled in the art that the aerial array that array resonant mode Terahertz receiver is included may be one group, two
Group or other quantity.Resonant element in aerial array is arranged by 30 × 40 ranks, it will be appreciated by those skilled in the art that resonance list
Member can also be arranged by the ranks of other quantity.The resonance frequency of aerial array is big by the size of each component of resonant element 1
Small to determine, those skilled in the art obtain various different resonance frequencies after can adjusting according to the dimensional parameters of aforementioned resonant unit 1
The aerial array of rate, to detect the terahertz wave signal of different frequency.
Claims (7)
1. a kind of array resonant mode Terahertz receiver, which is characterized in that including several resonant elements (1)；Resonant element (1) is pressed
N × M ranks rearrange aerial array, including upper arm (11), lower arm (12), intermediate arm (13) and two side arms (14)；On
Arm (11) and lower arm (12) are parallel to each other, and intermediate arm (13) and side arm (14) are parallel to each other；Intermediate arm (13) is located at two sides
Between side arm (14), and there are cavity (15) between intermediate arm (13) and side arm (14)；The centre of two side arms (14)
There are opening (16), so that side arm (14), which is divided into, is separately connected two sections of upper arm (11) and lower arm (12), so that resonance
Two opposite C character form structures are presented in unit (1)；With in a line, resonant element (1) passes through the upper arm between upper arm (11) on one side
The adjacent resonant element (1) in bridge (21) concatenation one side, another side concatenates another side by the lower arm bridge (22) between lower arm (12)
Adjacent resonant element (1)；Center resonance unit (10) is the resonant element (1) positioned at the antenna array center；Center is humorous
The intermediate arm (13) of unit (10) of shaking is equipped with gap (19), so that intermediate arm (13) is divided into connection upper arm (11) and lower arm (12)
Two sections；Superconductivity niobium nitride thermion bolometer (30) are equipped in gap (19)；Superconductivity niobium nitride thermion bolometer
(30) two sections of intermediate arms (13) for being separately connected upper arm (11) and lower arm (12) in center resonance unit (10) are bridged, and passed through
With all resonant elements (1) concatenation in a line where it, one end of concatenation is grounding parts (25), and the other end then connects as detection
Receiving electrode (24).
2. array resonant mode Terahertz receiver as described in claim 1, which is characterized in that further include substrate；The antenna
Array is prepared over the substrate in such a way that mask sputters golden film.
3. array resonant mode Terahertz receiver as described in claim 1, which is characterized in that the antenna array shows multiple groups；
Resonant element (1) resonance frequency having the same in same group of aerial array, the resonant element in aerial array that difference is organized
(1) there is different resonance frequencies.
4. a kind of terahertz light spectrometer device, which is characterized in that including cryogenic vacuum optics Dewar, hemispherical silicon lens, array
Resonant mode Terahertz receiver and reading circuit, the cryogenic vacuum optics Dewar are equipped with transparency window, enable THz wave
Enter the inside of the cryogenic vacuum optics Dewar by the transparency window；The hemispherical silicon lens is for focusing described in entrance
THz wave in cryogenic vacuum optics Dewar；The array resonant mode Terahertz receiver is tightly attached to the hemispherical silicon lens
Back flat, including several resonant elements (1)；Resonant element (1) rearranges aerial array, including upper arm by N × M ranks
(11), lower arm (12), intermediate arm (13) and two side arms (14)；Upper arm (11) and lower arm (12) are parallel to each other, intermediate arm
(13) it is parallel to each other with side arm (14)；Intermediate arm (13) is located between two side arms (14), and intermediate arm (13) and side
There are cavity (15) between side arm (14)；There are opening (16) for the centre of two side arms (14), so that side arm (14) is divided into
Two sections of upper arm (11) and lower arm (12) are separately connected, so that two opposite C character form structures are presented in resonant element (1)；
With the resonant element that in a line, resonant element (1) adjacents while passing through upper arm bridge (21) concatenation between upper arm (11)
(1), another side concatenates the adjacent resonant element (1) in another side by the lower arm bridge (22) between lower arm (12)；Center resonance list
First (10) are the resonant elements (1) positioned at the antenna array center；Between the intermediate arm (13) of center resonance unit (10) is equipped with
Gap (19), so that intermediate arm (13) is divided into two sections of connection upper arm (11) and lower arm (12)；Superconduction is equipped in gap (19) to nitrogenize
Niobium thermoelectron bolometer (30)；Superconductivity niobium nitride thermion bolometer (30) is interior respectively by center resonance unit (10)
Two sections of intermediate arms (13) bridge joint of upper arm (11) and lower arm (12) is connected, and by its place with all resonant elements in a line
(1) it concatenates, one end of concatenation is grounding parts (25), and the other end is then as detection connection electrode (24)；The grounding parts (25) connect
Ground；The detection connection electrode (24) connects the reading circuit；The reading circuit is used for the electric current of the aerial array
Response signal amplifies and is converted to voltage signal.
5. terahertz light spectrometer device as claimed in claim 4, which is characterized in that the array resonant mode Terahertz receiver
It further include substrate；The aerial array is prepared over the substrate in such a way that mask sputters golden film.
6. terahertz light spectrometer device as claimed in claim 4, which is characterized in that the antenna array shows multiple groups；Same group
Resonant element (1) resonance frequency having the same in aerial array, the resonant element (1) in aerial array that difference is organized have
Different resonance frequencies；Every group of aerial array respectively corresponds one group of reading circuit.
7. terahertz light spectrometer device as claimed in claim 4, which is characterized in that the reading circuit be a kind of low noise,
The electric current in broadband is provided to voltage converting amplifiers and for the superconductivity niobium nitride thermion bolometer in the aerial array
Voltage bias.
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