CN110449916A - The two-dimensional stage and its working method driven using electromagnetic levitation type linear motor - Google Patents
The two-dimensional stage and its working method driven using electromagnetic levitation type linear motor Download PDFInfo
- Publication number
- CN110449916A CN110449916A CN201910640920.2A CN201910640920A CN110449916A CN 110449916 A CN110449916 A CN 110449916A CN 201910640920 A CN201910640920 A CN 201910640920A CN 110449916 A CN110449916 A CN 110449916A
- Authority
- CN
- China
- Prior art keywords
- stator coil
- magnetic
- fixed
- suspension
- force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005339 levitation Methods 0.000 title claims abstract description 14
- 238000000034 method Methods 0.000 title claims abstract description 12
- 239000000725 suspension Substances 0.000 claims abstract description 103
- 238000006073 displacement reaction Methods 0.000 claims description 57
- 238000001514 detection method Methods 0.000 claims description 25
- 230000033001 locomotion Effects 0.000 claims description 25
- 230000003993 interaction Effects 0.000 claims description 11
- 239000007787 solid Substances 0.000 claims description 8
- 230000008859 change Effects 0.000 claims description 6
- 230000005611 electricity Effects 0.000 claims description 6
- 238000013519 translation Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims 1
- 238000003754 machining Methods 0.000 abstract description 5
- 230000005484 gravity Effects 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000004807 localization Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000009991 scouring Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Linear Motors (AREA)
Abstract
The invention discloses the two-dimensional stages and its working method using the driving of electromagnetic levitation type linear motor.Existing magnetic suspension two-coordinate platform is all that driving force and suspending power are provided separately, and realize shape constraint to be oriented to by guide rail.The present invention includes bottom base, the first magnetic-suspension linear motor of X-direction, the second magnetic-suspension linear motor of X-direction, intermediate connected unit, the first magnetic-suspension linear motor of Y-direction, the second magnetic-suspension linear motor of Y-direction and Y-direction moving parts.The two symmetrical slant settings of magnetic-suspension linear motor of the present invention in a single direction, the active force of permanent magnet array and coil includes horizontal actuator force and electromagnetic repulsion force, two electromagnetic repulsion force component in the horizontal direction are cancelled out each other on single direction, can carry out force constraint to be oriented to；Suspending power is equal to the sum of the power of two electromagnetic repulsion forces in the vertical direction, and gravity and suspending power are implemented in combination with force constraint to be oriented to, and avoid reducing requirement on machining accuracy using guide rail.
Description
Technical field
The invention belongs to field of nanofabrication, it is related to a kind of nano-scale two-dimensional motion platform, more particularly to uses magnetic suspension
The two-dimensional stage and its working method of formula linear motor driving.
Background technique
With the fast development of hyundai electronics industry, the demand to precision machining industry is being stepped up.High-precision and height
Resolution ratio becomes the index that motion locating platform is indispensable in this field, they are in precision instrument production and scientific domain
It occupies an important position in research.The state of development of precision movement platform directly affect precision cutting process, accurate measurement with
And the production level in the fields such as large scale integrated circuit manufacture.Nanometer positioning can only using piezoelectric ceramics cooperation flexible hinge at present
Small range positioning is realized, while there are some problems for structure design, so that there is also technologies for big stroke and high-precision realization
Difficulty；In response to this, it is thus proposed that flat as the mover building magnetic suspension of linear motor using Halbach permanent magnet array
Platform realizes big stroke, high-precision two-dimensional localization scheme.
Structure type used by high-precision two-dimensional locating platform is mainly macro micro- secondary drive locating platform, air bearing support
Locating platform, electromagnetic levitation type locating platform.It is now most commonly seen with macro micro- secondary drive locating platform, using piezoelectric ceramics as drive
Dynamic cooperation flexure hinge mechanism constitutes micromotion platform, and linear motor theoretically can achieve as macro dynamic driving, this mode
Very high precision, but due to being Two-stage control, control process is extremely complex, reduces positioning accuracy.And existing magnetic suspension nanometer
Two-dimensional localization platform is all that motor provides horizontal actuator force, and magnet or electromagnet provide suspending power, and rely on special magnetic suspension
Guide rail realizes shape constraint to be oriented to, and this structure type is complicated, higher to requirement on machining accuracy, if precision do not reach requirement or
Fretting wear in use process, then nano grade positioning precision not can guarantee.
Summary of the invention
In view of the deficiencies of the prior art, it is an object of the present invention to provide a kind of using the two of the driving of electromagnetic levitation type linear motor
Platform and its working method, the mode which is provided using suspending power and driving force by linear motor simultaneously are tieed up, and is adopted
Force constraint is implemented in combination with to be oriented to gravity and suspending power, is avoided using guide rail, also avoiding fretting wear causes
The problem of positioning accuracy declines, while reducing requirement on machining accuracy.
In order to achieve the above object, the technical solution adopted by the present invention is that:
The present invention uses the two-dimensional stage of electromagnetic levitation type linear motor driving, including bottom base, the first magnetic suspension of X-direction
Linear motor, the second magnetic-suspension linear motor of X-direction, intermediate connected unit, the first magnetic-suspension linear motor of Y-direction, Y-direction second
Magnetic-suspension linear motor, Y-direction moving parts, motion detection apparatus and suspension detection device.
The bottom base includes the first fixed side panel, the first stator coil of X-direction fixed plate, the second stator of X-direction
Coil mounting plate and the second fixed side panel；First fixed side panel and the second fixed side panel are vertically arranged, X-direction the first stator line
Circle fixed plate and X-direction the second stator coil fixed plate are obliquely installed, and symmetrical about vertical plane；X-direction the first stator line
The both ends of circle fixed plate are fixed with the first fixed side panel and the second fixed side panel respectively；X-direction the second stator coil fixed plate
Both ends are fixed with the first fixed side panel and the second fixed side panel respectively.
First magnetic-suspension linear motor of X-direction includes the first yoke plate of X-direction, X-direction the first magnetic array and the side X
To the first stator coil；First stator coil of X-direction is fixed on what the first stator coil of X-direction fixed plate inside opened up
In coil resettlement groove；The first yoke plate of X-direction and X-direction the first magnetic array are fixed, and are arranged at the first stator coil of X-direction
Top；Second magnetic-suspension linear motor of X-direction includes the second yoke plate of X-direction, X-direction the second magnetic array and X-direction
Second stator coil；Second stator coil of X-direction is fixed on the line opened up on the inside of the second stator coil of X-direction fixed plate
It encloses in resettlement groove；The second yoke plate of X-direction and X-direction the second magnetic array are fixed, and are arranged on the second stator coil of X-direction
Side；The first stator coil of X-direction is identical with the structure of the second stator coil of X-direction, X-direction the first magnetic array and X-direction
The structure of second magnetic array is identical, and the first stator coil of X-direction and the second stator coil of X-direction are about vertical plane pair
Claim, X-direction the first magnetic array and X-direction the second magnetic array are symmetrical about vertical plane.
The intermediate connected unit is opened in hollow and inverted truncated rectangular pyramids shape, two lateral surfaces parallel with X-direction
Equipped with X-direction notch, two medial surfaces parallel with Y-direction offer coil resettlement groove；The first yoke plate of X-direction and the side X
It is bolted respectively to the second yoke plate and two X-direction notches；The rib of intermediate connected unit and the angle of bottom surface and X-direction
The inclination angle of first stator coil fixed plate is equal.
First magnetic-suspension linear motor of Y-direction includes the first yoke plate of Y-direction, Y-direction the first magnetic array and the side Y
To the first stator coil；The first stator coil of Y-direction is fixed in a coil resettlement groove of intermediate connected unit；Y-direction first
Yoke plate and Y-direction the first magnetic array are fixed, and are arranged above the first stator coil of Y-direction；Second magnetic of Y-direction
Suspension straight-line electric unit includes the second stator coil of the second yoke plate of Y-direction, Y-direction the second magnetic array and Y-direction；Y-direction
Two stator coils are fixed in another coil resettlement groove of intermediate connected unit；The second yoke plate of Y-direction and Y-direction the second magnetic battle array
Column are fixed, and are arranged above the second stator coil of Y-direction；The second stator coil of the first stator coil of Y-direction and Y-direction
Structure is identical, and Y-direction the first magnetic array is identical with the structure of Y-direction the second magnetic array, and Y-direction the first stator line
Circle and the second stator coil of Y-direction are symmetrical about vertical plane, and Y-direction the first magnetic array and Y-direction the second magnetic array are about vertical
Face is symmetrical.
The Y-direction moving parts include Y-direction the first magnetic array fixed plate, third fixed side panel, Y-direction the second magnetic battle array
Column fixed plate and the 4th fixed side panel；Y-direction the first magnetic array fixed plate and Y-direction the second magnetic array fixed plate is inclined
Tiltedly setting, and symmetrical about vertical plane, the inclination angle of Y-direction the first magnetic array fixed plate and the centre rib of connected unit and the folder of bottom surface
Angle is equal；The third fixed side panel and the 4th fixed side panel is vertically arranged；The both ends of Y-direction the first magnetic array fixed plate
It is fixed respectively with third fixed side panel and the 4th fixed side panel；The both ends of Y-direction the second magnetic array fixed plate are solid with third respectively
Determine side plate and the 4th fixed side panel is fixed；Y-direction the first magnetic array fixed plate and the first yoke plate of Y-direction are bolted, Y
Direction the second magnetic array fixed plate and the second yoke plate of Y-direction are bolted.
The motion detection apparatus includes that first laser device fixing piece, first laser interferometer, second laser are fixed
Part and second laser interferometer；The first laser interferometer includes first laser device, the first spectroscope, the first fixation reflex
Mirror, the first moving reflector and the first recipient；The second laser interferometer include second laser, the second spectroscope,
Second stationary mirror, the second moving reflector and the second recipient；First laser device fixing piece is fixed with the first fixed side panel,
And it is fixed first laser device, the first spectroscope, the first stationary mirror and the first recipient；Second laser fixing piece with
First stator coil fixed plate is fixed, and is fixed second laser, the second spectroscope, the second stationary mirror and second and is connect
Receiver；The both ends of top layer platform and the top of third fixed side panel and the 4th fixed side panel are fixed respectively；Described first is movable
Reflecting mirror and the second moving reflector are each attached on top layer platform.
The suspension detection device includes that the first suspension of X-direction detector bar, the second suspension of X-direction detector bar, X-direction are micro-
Displacement sensor, the first suspension of Y-direction detector bar, the suspension of Y-direction second detection and Y-direction micro-displacement sensor；The side X
The second stator coil fixed plate and the first stator line are separately fixed to the first suspension detector bar and X-direction the second suspension detector bar
Enclose fixed plate bottom；Two X-direction connectors are separately fixed at the intermediate connected unit two medial surface bottoms parallel with X-direction,
Each X-direction connector is fixed an X-direction micro-displacement sensor；Two X-direction micro-displacement sensors are located at the side X
To the surface of the first suspension detector bar and X-direction the second suspension detector bar；Y-direction the first suspension detector bar and Y-direction second
The detection that suspends is fixed on the intermediate connected unit two medial surface bottoms parallel with Y-direction；Two Y-direction connectors are separately fixed at
Y-direction the first magnetic array fixed plate and Y-direction the second magnetic array fixed plate bottom, each Y-direction connector are fixed a Y
Direction micro-displacement sensor；Two Y-direction micro-displacement sensors are located at Y-direction the first suspension detector bar and Y-direction second
Suspend the surface detected.
The inclination angle of X-direction the first stator coil fixed plate and X-direction the second stator coil fixed plate is 45 °.
The detection of first recipient, the second recipient, X-direction micro-displacement sensor and Y-direction micro-displacement sensor
Signal is transmitted to controller, the first stator coil of X-direction, the second stator coil of X-direction, the first stator coil of Y-direction and Y-direction
The electrical current of second stator coil is controlled by controller.
The first magnetic of X-direction array, the second magnetic of X-direction array, Y-direction the first magnetic array and Y-direction the second magnetic array
Permanent magnet arrangement mode according to the arrangement mode of Halbach permanent magnet array.
The working method of the two-dimensional stage driven using electromagnetic levitation type linear motor is divided into translation in X direction and along the side Y
To translation, Z-direction equal associated movement while being translatable and be translatable along Y-direction in X direction, specifically:
Be translatable in X direction: it is identical that the first stator coil of X-direction and the second stator coil of X-direction are passed through size, direction simultaneously
Alternating current so that the first stator coil of X-direction and the second stator coil of X-direction generate sinusoidal magnetic field；And X-direction the first magnetic battle array
Column and X-direction the second magnetic array generate stationary magnetic field.The magnetic field force phase of the first stator coil of X-direction and X-direction the first magnetic array
Interaction generates horizontal actuator force Fx1With the first electromagnetic repulsion force, the magnetic field of the second stator coil of X-direction and X-direction the second magnetic array
Power interaction generates horizontal actuator force Fx2With the second electromagnetic repulsion force, Fx1And Fx2In the same direction；In Fx1And Fx2It is common driving under, in
Between connected unit move in X direction, and the direction of motion changes with the change in AC current direction；Intermediate connected unit is in X direction
The displacement of movement is detected by second laser interferometer.The direction of first electromagnetic repulsion force is perpendicular to the first yoke plate, the second electromagnetism reprimand
The direction of power is perpendicular to the second yoke plate；First electromagnetic repulsion force is decomposed into the horizontal force F along Y-directiony1With along the vertical of Z-direction
Power Fz1, the second electromagnetic repulsion force is decomposed into the horizontal force F along Y-directiony2With the vertical force F along Z-directionz2, because of Fy1And Fy2Size
It is equal, contrary, it cancels out each other, and Fz1And Fz2It is equal in magnitude, direction is identical, Fz1And Fz2The sum of formed to intermediate connected unit
Magnetic suspension force, to be lifted intermediate connected unit；After intermediate connected unit lifting, magnetic suspension force becomes smaller, at final intermediate connected unit
In an equilbrium position；When intermediate connected unit is in equilbrium position wherein the Uplifting amount of side by an X-direction micro-displacement sensing
Device is detected with respect to the displacement of X-direction the first suspension detector bar, and the Uplifting amount of the other side is by another X-direction micro-displacement sensor
It is detected with respect to the displacement of the second suspension of X-direction detector bar；When intermediate connected unit is in equilbrium position, the Uplifting amount of two sides is poor
When value is greater than preset value, controller adjusts the electricity exchange width that the first stator coil of X-direction or the second stator coil of X-direction are passed through
Value, the Uplifting amount difference of two sides is less than or equal to preset value when intermediate connected unit is in equilbrium position.
Be translatable along Y-direction: it is identical that the first stator coil of Y-direction and the second stator coil of Y-direction are passed through size, direction simultaneously
Alternating current so that the first stator coil of Y-direction and the second stator coil of Y-direction generate sinusoidal magnetic field；And Y-direction the first magnetic battle array
Column and Y-direction the second magnetic array generate sinusoidal class magnetic field.The magnetic field force of the first stator coil of Y-direction and Y-direction the first magnetic array
Interaction generates horizontal actuator force Fx3With third electromagnetic repulsion force, the magnetic of the second stator coil of Y-direction and Y-direction the second magnetic array
Field force interaction generates horizontal actuator force Fx4With the 4th electromagnetic repulsion force, Fx3And Fx4In the same direction；In Fx3And Fx4It is common driving under,
Y-direction moving parts are moved along Y-direction, and the direction of motion changes with the change in AC current direction；Y-direction moving parts are along Y
The displacement of direction movement is detected by first laser interferometer.The direction of third electromagnetic repulsion force is perpendicular to the first yoke plate of Y-direction, and
The direction of four electromagnetic repulsion forces is perpendicular to the second yoke plate of Y-direction；Third electromagnetic repulsion force is decomposed into horizontal force F in X directionx5With
Along the vertical force F of Z-directionz3, the 4th electromagnetic repulsion force is decomposed into horizontal force F in X directionx6With the vertical force F along Z-directionz4, because
For Fx5And Fx6It is equal in magnitude, contrary, it cancels out each other, and Fz3And Fz4It is equal in magnitude, direction is identical, Fz3And Fz4The sum of formed
To the magnetic suspension force of Y-direction moving parts, to be lifted Y-direction moving parts.After the lifting of Y-direction moving parts, magnetic suspension force becomes smaller, most
Whole Y-direction moving parts are in an equilbrium position；When Y-direction moving parts are in equilbrium position, Y-direction the first magnetic array fixed plate
Uplifting amount detected by a Y-direction micro-displacement sensor with respect to the suspend displacement of detection of Y-direction second, Y-direction the second magnetic
The Uplifting amount of array fixed plate is examined by another Y-direction micro-displacement sensor with respect to the displacement of the first suspension of Y-direction detector bar
It surveys；When Y-direction moving parts are in equilbrium position, if the Uplifting amount of Y-direction the first magnetic array fixed plate and the second magnetic of Y-direction array
The Uplifting amount difference of fixed plate is greater than preset value, then controller adjusts the first stator coil of Y-direction and the second stator coil of Y-direction
The electric alternating-current magnitude being passed through, when Y-direction moving parts are in equilbrium position, the Uplifting amount of Y-direction the first magnetic array fixed plate
It is less than or equal to preset value with the Uplifting amount difference of Y-direction the second magnetic array fixed plate.
The invention has the benefit that
The present invention utilizes each two pairs of X, Y both direction each two pairs had altogether on four groups of stator winding coils and X, Y-direction forever
The interaction of magnetic array generates electromagnetic force, so that it is suspended and generates the movement of both direction；And it is detected and is moved by laser interferometer
Precision, capacitance micro-displacement sensor detect hoverheight.Two magnetic-suspension linear motors pair of the present invention in a single direction
The active force of title slant setting, permanent magnet array and coil includes horizontal actuator force and electromagnetic repulsion force, and electromagnetic repulsion force can be decomposed into
The component of one horizontal direction and the component of a vertical direction, vertical direction is buoyancy, and generate in a single direction
Two electromagnetic repulsion force component in the horizontal direction are cancelled out each other, and the power of horizontal direction can carry out force constraint to being oriented to,
Prevent the movement in single direction from horizontal looseness occurs；Suspending power is equal to the sum of the power of two electromagnetic repulsion forces in the vertical direction, and
Force constraint is implemented in combination with to be oriented to using gravity and suspending power, avoids simplifying structure using guide rail, also avoids rubbing
The problem of scouring damage causes positioning accuracy to decline, while requirement on machining accuracy is reduced, facilitate the control of movement.The present invention can gather around
There are 100 millimetre-sized shift motions while reaching nanoscale positioning manufacture and requires.
Detailed description of the invention
Fig. 1 is bottom base of the invention, the first magnetic-suspension linear motor of X-direction and X-direction the second magnetic suspension linear electricity
The structural schematic diagram of machine；
Fig. 2 is the assembling schematic diagram of the first magnetic-suspension linear motor of intermediate connected unit and Y-direction of the invention；
Fig. 3 is the structural schematic diagram after present invention removal Y-direction moving parts；
Fig. 4 is overall structure stereogram of the invention；
Fig. 5 is the integrally-built bottom schematic view of the present invention.
Specific embodiment
The present invention is described in detail with reference to the accompanying drawing.
As shown in Fig. 1,2,3,4 and 5, the two-dimensional stage driven using electromagnetic levitation type linear motor, including bottom base, X
The first magnetic-suspension linear motor of direction, the second magnetic-suspension linear motor of X-direction, intermediate connected unit 14, the first magnetic suspension of Y-direction are straight
Line motor, the second magnetic-suspension linear motor of Y-direction, Y-direction moving parts, motion detection apparatus, suspension detection device and controller.
Bottom base includes the first fixed side panel 1, the first stator coil of X-direction fixed plate 5, the second stator coil of X-direction
Fixed plate 9 and the second fixed side panel 10；First fixed side panel 1 and the second fixed side panel 10 are vertically arranged, the first stator of X-direction
Coil mounting plate 5 and the second stator coil of X-direction fixed plate 9 are obliquely installed, and symmetrical about vertical plane, in the present embodiment, X
The inclination angle of direction the first stator coil fixed plate 5 and the second stator coil of X-direction fixed plate 9 is 45 °；The first stator of X-direction
The both ends of coil mounting plate 5 are fixed with the first fixed side panel 1 and the second fixed side panel 10 respectively；The second stator coil of X-direction is solid
The both ends of fixed board 9 are fixed with the first fixed side panel 1 and the second fixed side panel 10 respectively.
The first magnetic-suspension linear motor of X-direction includes the first yoke plate of X-direction 2, the first magnetic of X-direction array 3 and X-direction
One stator coil 4；The first stator coil of X-direction 4 is fixed on the coil peace opened up on the inside of the first stator coil of X-direction fixed plate 5
It sets in slot；The first yoke plate of X-direction 2 and the first magnetic of X-direction array 3 hold together admittedly, act on X-direction by magnetic suspension
It is moved horizontally in X direction on first stator coil 4；The second magnetic-suspension linear motor of X-direction include the second yoke plate of X-direction 6,
The second magnetic of X-direction array 7 and the second stator coil of X-direction 8；The second stator coil of X-direction 8 is fixed on X-direction the second stator line
On the inside of circle fixed plate 9 in the coil resettlement groove that opens up, it is one that the second yoke plate of X-direction 6 and the second magnetic of X-direction array 7, which are connected,
It is whole, it is acted on the second stator coil of X-direction 8 by magnetic suspension and is moved horizontally in X direction；The first stator coil of X-direction 4
Identical with the structure of the second stator coil of X-direction 8, the structure of the first magnetic of X-direction array 3 and the second magnetic of X-direction array 7 is complete
It is exactly the same, and the first stator coil of X-direction 4 and X-direction the second stator coil 8 are symmetrical about vertical plane, X-direction the first magnetic array
3 and X-direction the second magnetic array 7 it is symmetrical about vertical plane so that the first yoke plate of X-direction 2 is synchronous with X-direction the second yoke plate 6
Movement.
Intermediate connected unit 14 offers X in hollow and inverted truncated rectangular pyramids shape, two lateral surfaces parallel with X-direction
Direction notch, two medial surfaces parallel with Y-direction offer coil resettlement groove；The first yoke plate of X-direction 2 and X-direction
Two yoke plates 6 are bolted respectively with two X-direction notches；The rib of intermediate connected unit 14 and the angle and X-direction of bottom surface
The inclination angle of first stator coil fixed plate 5 is equal.
The first magnetic-suspension linear motor of Y-direction includes the first yoke plate of Y-direction 11, the first magnetic of Y-direction array 12 and Y-direction
First stator coil 13；The first stator coil of Y-direction 13 is fixed in a coil resettlement groove of intermediate connected unit 14, Y-direction
First yoke plate 11 and the first magnetic of Y-direction array 12 hold together admittedly, act on the first stator line in the Y direction by magnetic suspension
It is moved horizontally on circle 13 along Y-direction；Y-direction the second magnetic-suspension linear motor group includes the second yoke plate of Y-direction 16, Y-direction
Second magnetic array 17 and the second stator coil of Y-direction 15；The second stator coil of Y-direction 15 is fixed on the another of intermediate connected unit 14
In a coil resettlement groove；The second yoke plate of Y-direction 16 and the second magnetic of Y-direction array 17 hold together admittedly, pass through magnetic suspension
It acts on and being moved horizontally on the second stator coil 15 in the Y direction along Y-direction；The first stator coil of Y-direction 13 and Y-direction second are fixed
The structure of subcoil 15 is identical, and the first magnetic of Y-direction array 12 is identical with the structure of the second magnetic of Y-direction array 17, and Y
The first stator coil of direction 13 and Y-direction the second stator coil 15 are symmetrical about vertical plane, the first magnetic of Y-direction array 12 and the side Y
It is symmetrical about vertical plane to the second magnetic array 17, so that the fortune synchronous with Y-direction the second yoke plate 16 of the first yoke plate of Y-direction 11
It is dynamic.
Y-direction moving parts include Y-direction the first magnetic array fixed plate 20, third fixed side panel 26, Y-direction the second magnetic array
Fixed plate 27 and the 4th fixed side panel 28；Y-direction the first magnetic array fixed plate 20 and Y-direction the second magnetic array fixed plate 27 are inclined
Tiltedly setting, and, the rib and bottom surface of the inclination angle of Y-direction first magnetic array fixed plate 20 and intermediate connected unit 14 symmetrical about vertical plane
Angle it is equal；Third fixed side panel 26 and the 4th fixed side panel 28 are vertically arranged；Y-direction the first magnetic array fixed plate 20
Both ends are fixed with third fixed side panel 26 and the 4th fixed side panel 28 respectively；The both ends of Y-direction the second magnetic array fixed plate 27 point
It is unfixed with third fixed side panel 26 and the 4th fixed side panel 28；Y-direction the first magnetic array fixed plate 20 and the first magnetic yoke of Y-direction
Plate 11 is bolted, and Y-direction the second magnetic array fixed plate 27 and the second yoke plate of Y-direction 16 are bolted.Y-direction fortune
Dynamic component is by the first yoke plate of Y-direction 11 and the second yoke plate of Y-direction 16 by the first magnetic-suspension linear motor of Y-direction, Y-direction
Second magnetic-suspension linear motor drives edge Y-direction moves synchronously.
As shown in figure 4, motion detection apparatus includes first laser device fixing piece 18, first laser interferometer, second laser
Device fixing piece 22 and second laser interferometer；First laser interferometer includes first laser device 19, the first spectroscope, the first fixation
Reflecting mirror, the first moving reflector 21 and the first recipient；Second laser interferometer includes that second laser 23, second is divided
Mirror, the second stationary mirror, the second moving reflector 24 and the second recipient；First laser device fixing piece 18 and the first affixed side
Plate 1 is fixed, and is fixed first laser device 19, the first spectroscope, the first stationary mirror and the first recipient；Second laser
Device fixing piece 22 and the first stator coil fixed plate 5 are fixed, and are fixed second laser 23, the second spectroscope, second solid
Determine reflecting mirror and the second recipient；The both ends of top layer platform 25 and the top part of third fixed side panel 26 and the 4th fixed side panel 28
Gu Ding not；First moving reflector 21 and the second moving reflector 24 are each attached on top layer platform 25.First laser device 19
Emergent light is divided into two-way through the first spectroscope, and reflects meeting from the first stationary mirror and the first moving reflector 21 respectively
Conjunction generates interference fringe on the first spectroscope, and the first recipient receives interference fringe, and calculates the first moving reflector
Displacement；Similarly, the emergent light of second laser 23 is divided into two-way through the second spectroscope, and respectively from the second stationary mirror and
Second moving reflector 24 reflects congregation and generates interference fringe on the second spectroscope, and the second recipient receives interference item
Line, and calculate the displacement of the second moving reflector.
As shown in figure 5, suspension detection device includes the first suspension of X-direction detector bar 29, X-direction the second suspension detector bar
36, X-direction micro-displacement sensor 35, the first suspension of Y-direction detector bar 30, Y-direction second, which suspend, detects 31 and Y-direction micro-displacement
Sensor 32；It is solid that the first suspension of X-direction detector bar 29 and the second suspension of X-direction detector bar 36 are separately fixed at the second stator coil
5 bottom of fixed board 9 and the first stator coil fixed plate；Two X-direction connectors 34 are separately fixed at intermediate connected unit 14 and X-direction
Two parallel medial surface bottoms, each X-direction connector 34 are fixed an X-direction micro-displacement sensor 35；Two sides X
The surface of the first suspension of X-direction detector bar 29 and the second suspension of X-direction detector bar 36 is located to micro-displacement sensor 35；
The first suspension of Y-direction detector bar 30 and the suspension of Y-direction second detection 31 are fixed on two parallel with Y-direction of intermediate connected unit 14
Medial surface bottom；Two Y-direction connectors 33 are separately fixed at Y-direction the first magnetic array fixed plate 20 and Y-direction the second magnetic battle array
27 bottom of column fixed plate, each Y-direction connector 33 are fixed a Y-direction micro-displacement sensor 32；Two Y-direction microbits
Displacement sensor 32 is located at the surface of the first suspension of Y-direction detector bar 30 and the suspension of Y-direction second detection 31.
The detection of first recipient, the second recipient, X-direction micro-displacement sensor 35 and Y-direction micro-displacement sensor 32
Signal is transmitted to controller, the first stator coil of X-direction 4, the second stator coil of X-direction 8, the first stator coil of Y-direction 13 and Y
The electrical current of the second stator coil of direction 15 is controlled by controller.
The first magnetic of X-direction array 3, the second magnetic of X-direction array 7, the first magnetic of Y-direction array 12 and Y-direction the second magnetic array
17 permanent magnet arrangement mode is according to the arrangement mode of Halbach permanent magnet array.
As shown in figure 4, the working method of the two-dimensional stage using the driving of electromagnetic levitation type linear motor, is divided into X direction
It is translatable and is translatable along Y-direction, due to the relationship of suspending power, Z-direction is adjoint while being translatable and be translatable in X direction along Y-direction
Displacement movement, specifically:
Be translatable in X direction: the first stator coil of X-direction 4 is passed through size, direction phase with the second stator coil of X-direction 8 simultaneously
Same alternating current, so that the first stator coil of X-direction 4 and the second stator coil of X-direction 8 generate sinusoidal magnetic field；And X-direction first
Magnetic array 3 and the second magnetic of X-direction array 7 generate stationary magnetic field, and (i.e. the sinusoidal class magnetic field of Halbach permanent magnet array generation is public
Know technology).The interaction of the magnetic field force of the first stator coil of X-direction 4 and the first magnetic of X-direction array 3 generates horizontal actuator force Fx1
With the first electromagnetic repulsion force, the magnetic field force interaction of the second stator coil of X-direction 8 and the second magnetic of X-direction array 7 generates horizontal drive
Power Fx2With the second electromagnetic repulsion force, Fx1And Fx2In the same direction；In Fx1And Fx2It is common driving under, intermediate connected unit 14 is transported in X direction
It is dynamic, and the direction of motion changes with the change in AC current direction；The displacement that intermediate connected unit 14 moves in X direction is by second
Laser interferometer detection.The direction of first electromagnetic repulsion force is perpendicular to the first yoke plate 2, and the direction of the second electromagnetic repulsion force is perpendicular to
Two yoke plates 6；First electromagnetic repulsion force is decomposed into the horizontal force F along Y-directiony1With the vertical force F along Z-directionz1, the second electromagnetism
Repulsion is decomposed into the horizontal force F along Y-directiony2With the vertical force F along Z-directionz2, because of Fy1And Fy2It is equal in magnitude, contrary,
It cancels out each other, thus to intermediate connected unit 14 progress force constraint, and Fz1And Fz2It is equal in magnitude, direction is identical, Fz1And Fz2The sum of shape
The magnetic suspension force of intermediate connected unit 14 in pairs, to be lifted intermediate connected unit 14；After intermediate connected unit 14 is lifted, magnetic suspension force becomes
Small, final intermediate connected unit 14 is in an equilbrium position；The wherein lifting of side when intermediate connected unit 14 is in equilbrium position
Amount is detected by an X-direction micro-displacement sensor 35 with respect to the displacement of the first suspension of X-direction detector bar 29, the lifting of the other side
Amount is detected by another X-direction micro-displacement sensor 35 with respect to the displacement of the second suspension of X-direction detector bar 36；When centre connects
When platform 14 is in equilbrium position the Uplifting amount difference of two sides be greater than preset value when, controller adjust the first stator coil of X-direction 4 or
The electric alternating-current magnitude that the second stator coil of X-direction 8 is passed through, the Uplifting amount of two sides when intermediate connected unit 14 is in equilbrium position
Difference is less than or equal to preset value.
Be translatable along Y-direction: the first stator coil of Y-direction 13 and the second stator coil of Y-direction 15 are passed through size, direction simultaneously
Identical alternating current, so that the first stator coil of Y-direction 13 and the second stator coil of Y-direction 15 generate sinusoidal magnetic field；And Y-direction
First magnetic array 12 and the second magnetic of Y-direction array 17 generate sinusoidal class magnetic field (the i.e. sinusoidal class magnetic of Halbach permanent magnet array generation
, it is well-known technique).The interaction of the magnetic field force of the first stator coil of Y-direction 13 and the first magnetic of Y-direction array 12 generates horizontal
Driving force Fx3With third electromagnetic repulsion force, the magnetic field force of the second stator coil of Y-direction 15 and the second magnetic of Y-direction array 17 interacts
Generate horizontal actuator force Fx4With the 4th electromagnetic repulsion force, Fx3And Fx4In the same direction；In Fx3And Fx4It is common driving under, Y-direction moving parts
It is moved along Y-direction, and the direction of motion changes with the change in AC current direction；Y-direction moving parts are along the position that Y-direction moves
Shifting is detected by first laser interferometer.The direction of third electromagnetic repulsion force is perpendicular to the first yoke plate of Y-direction 11, the 4th electromagnetic repulsion force
Direction perpendicular to the second yoke plate of Y-direction 16；Third electromagnetic repulsion force is decomposed into horizontal force F in X directionx5With along Z-direction
Vertical force Fz3, the 4th electromagnetic repulsion force is decomposed into horizontal force F in X directionx6With the vertical force F along Z-directionz4, because of Fx5With
Fx6It is equal in magnitude, contrary, it cancels out each other, thus to Y-direction moving parts progress force constraint, and Fz3And Fz4Equal in magnitude, side
To identical, Fz3And Fz4The sum of formed to the magnetic suspension forces of Y-direction moving parts, to be lifted Y-direction moving parts.Y-direction moving parts
After lifting, magnetic suspension force becomes smaller, and final Y-direction moving parts are in an equilbrium position；Y-direction moving parts are in equilbrium position
When, the Uplifting amount of Y-direction the first magnetic array fixed plate 20 is suspended by a Y-direction micro-displacement sensor 32 with respect to Y-direction second
31 displacement is detected to detect, the Uplifting amount of Y-direction the second magnetic array fixed plate 27 is by another Y-direction micro-displacement sensor 32
It is detected with respect to the displacement of the first suspension of Y-direction detector bar 30；When Y-direction moving parts are in equilbrium position, if the first magnetic of Y-direction
The Uplifting amount of array fixed plate 20 and the Uplifting amount difference of Y-direction the second magnetic array fixed plate 27 are greater than preset value, then controller
The electric alternating-current magnitude that the first stator coil of Y-direction 13 and the second stator coil of Y-direction 15 are passed through is adjusted, until Y-direction moving parts
When in equilbrium position, the Uplifting amount of Y-direction the first magnetic array fixed plate 20 and the lifting of Y-direction the second magnetic array fixed plate 27
It measures difference and is less than or equal to preset value.
Claims (5)
1. using the two-dimensional stage of electromagnetic levitation type linear motor driving, including bottom base, X-direction the first magnetic suspension linear electricity
Machine, the second magnetic-suspension linear motor of X-direction, intermediate connected unit, the first magnetic-suspension linear motor of Y-direction, the second magnetic suspension of Y-direction
Linear motor, Y-direction moving parts, motion detection apparatus and suspension detection device, it is characterised in that: the bottom base includes
First fixed side panel, the first stator coil of X-direction fixed plate, X-direction the second stator coil fixed plate and the second fixed side panel；The
One fixed side panel and the second fixed side panel are vertically arranged, the second stator coil of X-direction the first stator coil fixed plate and X-direction
Fixed plate is obliquely installed, and symmetrical about vertical plane；The both ends of X-direction the first stator coil fixed plate are fixed with first respectively
Side plate and the second fixed side panel are fixed；The both ends of X-direction the second stator coil fixed plate respectively with the first fixed side panel and second
Fixed side panel is fixed；
First magnetic-suspension linear motor of X-direction includes the first yoke plate of X-direction, X-direction the first magnetic array and X-direction
One stator coil；First stator coil of X-direction is fixed on the coil opened up on the inside of the first stator coil of X-direction fixed plate
In resettlement groove；The first yoke plate of X-direction and X-direction the first magnetic array are fixed, and are arranged on the first stator coil of X-direction
Side；Second magnetic-suspension linear motor of X-direction includes the second yoke plate of X-direction, X-direction the second magnetic array and X-direction
Two stator coils；Second stator coil of X-direction is fixed on the coil opened up on the inside of the second stator coil of X-direction fixed plate
In resettlement groove；The second yoke plate of X-direction and X-direction the second magnetic array are fixed, and are arranged on the second stator coil of X-direction
Side；The first stator coil of X-direction is identical with the structure of the second stator coil of X-direction, X-direction the first magnetic array and X-direction
The structure of second magnetic array is identical, and the first stator coil of X-direction and the second stator coil of X-direction are about vertical plane pair
Claim, X-direction the first magnetic array and X-direction the second magnetic array are symmetrical about vertical plane；
The intermediate connected unit offers X in hollow and inverted truncated rectangular pyramids shape, two lateral surfaces parallel with X-direction
Direction notch, two medial surfaces parallel with Y-direction offer coil resettlement groove；The first yoke plate of X-direction and X-direction second
Yoke plate is bolted respectively with two X-direction notches；The rib of intermediate connected unit and the angle of bottom surface and X-direction first are fixed
The inclination angle of subcoil fixed plate is equal；
First magnetic-suspension linear motor of Y-direction includes the first yoke plate of Y-direction, Y-direction the first magnetic array and Y-direction
One stator coil；The first stator coil of Y-direction is fixed in a coil resettlement groove of intermediate connected unit；The first magnetic yoke of Y-direction
Plate and Y-direction the first magnetic array are fixed, and are arranged above the first stator coil of Y-direction；Second magnetic suspension of Y-direction
Straight-line electric unit includes the second stator coil of the second yoke plate of Y-direction, Y-direction the second magnetic array and Y-direction；Y-direction second is fixed
Subcoil is fixed in another coil resettlement groove of intermediate connected unit；The second yoke plate of Y-direction and Y-direction the second magnetic array are solid
It is fixed, and be arranged above the second stator coil of Y-direction；The structure of the second stator coil of the first stator coil of Y-direction and Y-direction
Identical, Y-direction the first magnetic array is identical with the structure of Y-direction the second magnetic array, and the first stator coil of Y-direction and
The second stator coil of Y-direction is symmetrical about vertical plane, and Y-direction the first magnetic array and Y-direction the second magnetic array are about vertical plane pair
Claim；
The Y-direction moving parts include that Y-direction the first magnetic array fixed plate, third fixed side panel, Y-direction the second magnetic array are solid
Fixed board and the 4th fixed side panel；Y-direction the first magnetic array fixed plate and Y-direction the second magnetic array fixed plate is tilted and is set
It sets, and symmetrical about vertical plane, the rib and the angle phase of bottom surface at the inclination angle of Y-direction the first magnetic array fixed plate and intermediate connected unit
Deng；The third fixed side panel and the 4th fixed side panel is vertically arranged；Distinguish at the both ends of Y-direction the first magnetic array fixed plate
It is fixed with third fixed side panel and the 4th fixed side panel；The both ends of Y-direction the second magnetic array fixed plate respectively with third affixed side
Plate and the 4th fixed side panel are fixed；Y-direction the first magnetic array fixed plate and the first yoke plate of Y-direction are bolted, Y-direction
Second magnetic array fixed plate and the second yoke plate of Y-direction are bolted；
The motion detection apparatus include first laser device fixing piece, first laser interferometer, second laser fixing piece and
Second laser interferometer；The first laser interferometer include first laser device, the first spectroscope, the first stationary mirror,
First moving reflector and the first recipient；The second laser interferometer includes second laser, the second spectroscope, second
Stationary mirror, the second moving reflector and the second recipient；First laser device fixing piece is fixed with the first fixed side panel, and is pressed
Fasten first laser device, the first spectroscope, the first stationary mirror and the first recipient；Second laser fixing piece and first
Stator coil fixed plate is fixed, and is fixed second laser, the second spectroscope, the second stationary mirror and second and is received
Device；The both ends of top layer platform and the top of third fixed side panel and the 4th fixed side panel are fixed respectively；Described first is movable anti-
It penetrates mirror and the second moving reflector is each attached on top layer platform；
The suspension detection device includes the first suspension of X-direction detector bar, the second suspension of X-direction detector bar, X-direction micro-displacement
Sensor, the first suspension of Y-direction detector bar, the suspension of Y-direction second detection and Y-direction micro-displacement sensor；The X-direction
One suspension detector bar and X-direction the second suspension detector bar are separately fixed at the second stator coil fixed plate and the first stator coil is solid
Fixed board bottom；Two X-direction connectors are separately fixed at the intermediate connected unit two medial surface bottoms parallel with X-direction, each X
Direction connector is fixed an X-direction micro-displacement sensor；Two X-direction micro-displacement sensors are located at X-direction
The surface of one suspension detector bar and X-direction the second suspension detector bar；Y-direction the first suspension detector bar and Y-direction second suspend
Detection is fixed on the intermediate connected unit two medial surface bottoms parallel with Y-direction；Two Y-direction connectors are separately fixed at the side Y
To the first magnetic array fixed plate and Y-direction the second magnetic array fixed plate bottom, each Y-direction connector is fixed the side Y
To micro-displacement sensor；Two Y-direction micro-displacement sensors are located at Y-direction the first suspension detector bar and Y-direction second is outstanding
The surface of floating detection.
2. the two-dimensional stage according to claim 1 driven using electromagnetic levitation type linear motor, it is characterised in that: the X
The inclination angle of direction the first stator coil fixed plate and X-direction the second stator coil fixed plate is 45 °.
3. the two-dimensional stage according to claim 1 driven using electromagnetic levitation type linear motor, it is characterised in that: described the
One recipient, the second recipient, X-direction micro-displacement sensor and Y-direction micro-displacement sensor detection signal be transmitted to control
Device, the first stator coil of X-direction, the second stator coil of X-direction, the first stator coil of Y-direction and Y-direction the second stator coil
Electrical current is controlled by controller.
4. the two-dimensional stage according to claim 1 driven using electromagnetic levitation type linear motor, it is characterised in that: the X
The permanent magnet arrangement side of direction the first magnetic array, the second magnetic of X-direction array, Y-direction the first magnetic array and Y-direction the second magnetic array
Formula is according to the arrangement mode of Halbach permanent magnet array.
5. the working method of the two-dimensional stage according to claim 3 using the driving of electromagnetic levitation type linear motor, feature
It is: is divided into translation in X direction and be translatable along Y-direction, Z-direction is with fortune while being translatable and be translatable in X direction along Y-direction
It is dynamic, specifically:
Be translatable in X direction: the first stator coil of X-direction and the second stator coil of X-direction are passed through the identical friendship in size, direction simultaneously
Galvanic electricity, so that the first stator coil of X-direction and the second stator coil of X-direction generate sinusoidal magnetic field；And X-direction the first magnetic array and
X-direction the second magnetic array generates stationary magnetic field；The magnetic field force phase interaction of the first stator coil of X-direction and X-direction the first magnetic array
With generation horizontal actuator force Fx1With the first electromagnetic repulsion force, the magnetic field force phase of the second stator coil of X-direction and X-direction the second magnetic array
Interaction generates horizontal actuator force Fx2With the second electromagnetic repulsion force, Fx1And Fx2In the same direction；In Fx1And Fx2It is common driving under, centre connects
It is consecutive to move in X direction, and the direction of motion changes with the change in AC current direction；Intermediate connected unit moves in X direction
Displacement detected by second laser interferometer；The direction of first electromagnetic repulsion force perpendicular to the first yoke plate, the second electromagnetic repulsion force
Direction is perpendicular to the second yoke plate；First electromagnetic repulsion force is decomposed into the horizontal force F along Y-directiony1With the vertical force along Z-direction
Fz1, the second electromagnetic repulsion force is decomposed into the horizontal force F along Y-directiony2With the vertical force F along Z-directionz2, because of Fy1And Fy2Size phase
Deng, it is contrary, cancel out each other, and Fz1And Fz2It is equal in magnitude, direction is identical, Fz1And Fz2The sum of formed to intermediate connected unit
Magnetic suspension force, to be lifted intermediate connected unit；After intermediate connected unit lifting, magnetic suspension force becomes smaller, and final intermediate connected unit is in
One equilbrium position；When intermediate connected unit is in equilbrium position wherein the Uplifting amount of side by an X-direction micro-displacement sensor
It is detected with respect to the displacement of the first suspension of X-direction detector bar, the Uplifting amount of the other side is by another X-direction micro-displacement sensor phase
The displacement of X-direction the second suspension detector bar is detected；The Uplifting amount difference of two sides when intermediate connected unit is in equilbrium position
When greater than preset value, controller adjusts the electric alternating-current magnitude that the first stator coil of X-direction or the second stator coil of X-direction are passed through,
The Uplifting amount difference of two sides is less than or equal to preset value when intermediate connected unit is in equilbrium position；
Be translatable along Y-direction: the first stator coil of Y-direction and the second stator coil of Y-direction are passed through the identical friendship in size, direction simultaneously
Galvanic electricity, so that the first stator coil of Y-direction and the second stator coil of Y-direction generate sinusoidal magnetic field；And Y-direction the first magnetic array and
Y-direction the second magnetic array generates sinusoidal class magnetic field；The magnetic field force of the first stator coil of Y-direction and Y-direction the first magnetic array is mutual
Effect generates horizontal actuator force Fx3With third electromagnetic repulsion force, the magnetic field force of the second stator coil of Y-direction and Y-direction the second magnetic array
Interaction generates horizontal actuator force Fx4With the 4th electromagnetic repulsion force, Fx3And Fx4In the same direction；In Fx3And Fx4It is common driving under, Y-direction
Moving parts are moved along Y-direction, and the direction of motion changes with the change in AC current direction；Y-direction moving parts are along Y-direction
The displacement of movement is detected by first laser interferometer；The direction of third electromagnetic repulsion force is perpendicular to the first yoke plate of Y-direction, the 4th electricity
The direction of magnetic repulsion is perpendicular to the second yoke plate of Y-direction；Third electromagnetic repulsion force is decomposed into horizontal force F in X directionx5With along Z
The vertical force F in directionz3, the 4th electromagnetic repulsion force is decomposed into horizontal force F in X directionx6With the vertical force F along Z-directionz4, because of Fx5
And Fx6It is equal in magnitude, contrary, it cancels out each other, and Fz3And Fz4It is equal in magnitude, direction is identical, Fz3And Fz4The sum of formed to Y
To the magnetic suspension force of moving parts, to be lifted Y-direction moving parts；After the lifting of Y-direction moving parts, magnetic suspension force becomes smaller, final Y
An equilbrium position is in moving parts；When Y-direction moving parts are in equilbrium position, Y-direction the first magnetic array fixed plate
Uplifting amount is detected by a Y-direction micro-displacement sensor with respect to the displacement of the suspension detection of Y-direction second, Y-direction the second magnetic battle array
The Uplifting amount of column fixed plate is detected by another Y-direction micro-displacement sensor with respect to the displacement of the first suspension of Y-direction detector bar；
When Y-direction moving parts are in equilbrium position, if the Uplifting amount of Y-direction the first magnetic array fixed plate and Y-direction the second magnetic array are solid
The Uplifting amount difference of fixed board is greater than preset value, then controller adjusts the first stator coil of Y-direction and the second stator coil of Y-direction is logical
The electric alternating-current magnitude entered, when Y-direction moving parts are in equilbrium position, the Uplifting amount and Y of Y-direction the first magnetic array fixed plate
The Uplifting amount difference of direction the second magnetic array fixed plate is less than or equal to preset value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910640920.2A CN110449916B (en) | 2019-07-16 | 2019-07-16 | Two-dimensional platform driven by magnetic suspension type linear motor and working method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910640920.2A CN110449916B (en) | 2019-07-16 | 2019-07-16 | Two-dimensional platform driven by magnetic suspension type linear motor and working method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110449916A true CN110449916A (en) | 2019-11-15 |
| CN110449916B CN110449916B (en) | 2024-05-17 |
Family
ID=68482743
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910640920.2A Active CN110449916B (en) | 2019-07-16 | 2019-07-16 | Two-dimensional platform driven by magnetic suspension type linear motor and working method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110449916B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110941081A (en) * | 2019-12-13 | 2020-03-31 | 南通大学 | Magnetic suspension type object stage and control method thereof |
| CN114362471A (en) * | 2021-12-10 | 2022-04-15 | 浙江大学杭州国际科创中心 | Two-stage multi-degree-of-freedom space position precision stabilizing system |
| WO2022099797A1 (en) * | 2020-11-12 | 2022-05-19 | 复旦大学 | Displacement device |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080265688A1 (en) * | 2005-01-21 | 2008-10-30 | Nikon Corporation | Linear Motor, Stage Apparatus and Exposure Apparatus |
| CN101681988A (en) * | 2007-05-18 | 2010-03-24 | 大陆汽车有限责任公司 | Electromechanical motor, particularly piezoelectric type micro-stepping drive unit |
| CN101834550A (en) * | 2010-04-27 | 2010-09-15 | 西安交通大学 | Positioning device based on maglev planar motor |
| CN101900952A (en) * | 2010-08-02 | 2010-12-01 | 中南大学 | Mask aligner mask platform adopting magnetic suspension technology |
| CN101972933A (en) * | 2010-11-19 | 2011-02-16 | 沈阳工业大学 | Magnetic suspension motion platform of precision heavy machine tool driven by double linear synchronous motors |
| CN103226296A (en) * | 2013-04-27 | 2013-07-31 | 清华大学 | Rough-fine-movement laminated workbench with laser interferometer measurement |
| CN103296862A (en) * | 2013-01-14 | 2013-09-11 | 哈尔滨工业大学 | Long-stroke magnetic levitation planar motor with superconductivity magnetic levitation structure |
| KR101489928B1 (en) * | 2013-08-27 | 2015-02-06 | 한국전기연구원 | Electromagnetic linear propulsion and guide system |
| CN109654333A (en) * | 2018-11-07 | 2019-04-19 | 天津大学 | A kind of space multistory formula three-dimensional large-stroke nanometer operating platform |
| CN109713942A (en) * | 2019-03-13 | 2019-05-03 | 哈尔滨工业大学 | Passive type two dimension magnetic levitation worktable |
| CN210189044U (en) * | 2019-07-16 | 2020-03-27 | 杭州电子科技大学 | Two-dimensional platform driven by magnetic suspension type linear motor |
-
2019
- 2019-07-16 CN CN201910640920.2A patent/CN110449916B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080265688A1 (en) * | 2005-01-21 | 2008-10-30 | Nikon Corporation | Linear Motor, Stage Apparatus and Exposure Apparatus |
| CN101681988A (en) * | 2007-05-18 | 2010-03-24 | 大陆汽车有限责任公司 | Electromechanical motor, particularly piezoelectric type micro-stepping drive unit |
| CN101834550A (en) * | 2010-04-27 | 2010-09-15 | 西安交通大学 | Positioning device based on maglev planar motor |
| CN101900952A (en) * | 2010-08-02 | 2010-12-01 | 中南大学 | Mask aligner mask platform adopting magnetic suspension technology |
| CN101972933A (en) * | 2010-11-19 | 2011-02-16 | 沈阳工业大学 | Magnetic suspension motion platform of precision heavy machine tool driven by double linear synchronous motors |
| CN103296862A (en) * | 2013-01-14 | 2013-09-11 | 哈尔滨工业大学 | Long-stroke magnetic levitation planar motor with superconductivity magnetic levitation structure |
| CN103226296A (en) * | 2013-04-27 | 2013-07-31 | 清华大学 | Rough-fine-movement laminated workbench with laser interferometer measurement |
| KR101489928B1 (en) * | 2013-08-27 | 2015-02-06 | 한국전기연구원 | Electromagnetic linear propulsion and guide system |
| CN109654333A (en) * | 2018-11-07 | 2019-04-19 | 天津大学 | A kind of space multistory formula three-dimensional large-stroke nanometer operating platform |
| CN109713942A (en) * | 2019-03-13 | 2019-05-03 | 哈尔滨工业大学 | Passive type two dimension magnetic levitation worktable |
| CN210189044U (en) * | 2019-07-16 | 2020-03-27 | 杭州电子科技大学 | Two-dimensional platform driven by magnetic suspension type linear motor |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110941081A (en) * | 2019-12-13 | 2020-03-31 | 南通大学 | Magnetic suspension type object stage and control method thereof |
| CN110941081B (en) * | 2019-12-13 | 2021-07-30 | 南通大学 | Magnetic suspension type object stage and control method thereof |
| WO2022099797A1 (en) * | 2020-11-12 | 2022-05-19 | 复旦大学 | Displacement device |
| CN114362471A (en) * | 2021-12-10 | 2022-04-15 | 浙江大学杭州国际科创中心 | Two-stage multi-degree-of-freedom space position precision stabilizing system |
| CN114362471B (en) * | 2021-12-10 | 2023-07-14 | 浙江大学杭州国际科创中心 | Double-stage multi-degree-of-freedom space position precise stabilizing system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110449916B (en) | 2024-05-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110449916A (en) | The two-dimensional stage and its working method driven using electromagnetic levitation type linear motor | |
| CN101807010B (en) | Nano-precision six-freedom-degree magnetic suspension jiggle station and application | |
| EP0811899B1 (en) | Supporting apparatus using magnetic power | |
| CN103021473B (en) | Direct drive type motion decoupling high-accuracy servo platform | |
| CN101241314B (en) | 6 freedom degrees precision positioning station capable of compensating Z-direction position | |
| CN100492177C (en) | System for balancing and positioning work table of photoetching device | |
| Torralba et al. | Large range nanopositioning stage design: A three-layer and two-stage platform | |
| CN100444023C (en) | Accurate magnetic suspension worktable for photo etching under extra ultraviolet | |
| CN102097982B (en) | Permanent-magnet synchronous magnetic suspension planar motor | |
| CN102681349B (en) | Work-piece platform | |
| CN102722089B (en) | Non-contact coarse-motion and fine-motion cascading SDOF (six-degree of freedom) positioning device | |
| CN101900952A (en) | Mask aligner mask platform adopting magnetic suspension technology | |
| CN103019046B (en) | Six-freedom-degree magnetic levitation micropositioner based on multi-group individual drive decoupling control | |
| US20100100990A1 (en) | High-scan rate positioner for scanned probe microscopy | |
| CN103226296A (en) | Rough-fine-movement laminated workbench with laser interferometer measurement | |
| JP2004172557A (en) | Stage apparatus and its control method | |
| US5962937A (en) | X-Y table for moving loads in a highly exact and dynamic manner | |
| CN103901734A (en) | Workbench cable device | |
| CN210189044U (en) | Two-dimensional platform driven by magnetic suspension type linear motor | |
| CN103698984B (en) | A kind of superfinishing scanning plated film and location lithographic equipment | |
| CN110524500B (en) | Magnetic suspension guide rail motion platform | |
| CN103048891B (en) | Six-degree-of-freedom magnetic levitation micropositioner | |
| CN110524499B (en) | Magnetic suspension guide rail motion platform | |
| CN117055298A (en) | Measuring machine | |
| CN112436711B (en) | Displacement device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |