CN110423984A - A kind of preparation method of stannic selenide nanometer sheet - Google Patents

A kind of preparation method of stannic selenide nanometer sheet Download PDF

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Publication number
CN110423984A
CN110423984A CN201910745626.8A CN201910745626A CN110423984A CN 110423984 A CN110423984 A CN 110423984A CN 201910745626 A CN201910745626 A CN 201910745626A CN 110423984 A CN110423984 A CN 110423984A
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stannic selenide
nanometer sheet
substrate
preparation
vacuum
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简基康
杨文龙
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Guangdong University of Technology
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Guangdong University of Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0623Sulfides, selenides or tellurides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention belongs to the technical field of semiconductor material more particularly to a kind of preparation methods of stannic selenide nanometer sheet.This application provides a kind of preparation methods of stannic selenide nanometer sheet, the following steps are included: using vacuum coating method, using stannic selenide as evaporation source, with setting substrate above the stannic selenide evaporation source, the evaporation source is 2.4~2.6cm at a distance from the substrate, and the temperature of the vacuum coating is 460 DEG C -480 DEG C, and the time of the vacuum coating is 5~10min, under vacuum conditions, stannic selenide nanometer sheet is made in the surface of the substrate.The present invention is made the stannic selenide product with nanometer chip architecture, efficiently solves the technical issues of stannic selenide with nanometer sheet microstructure can not be made in existing vacuum thermal evaporation methods by the relevant parameter of improvement vacuum coating.

Description

A kind of preparation method of stannic selenide nanometer sheet
Technical field
The invention belongs to the technical field of semiconductor material more particularly to a kind of preparation methods of stannic selenide nanometer sheet.
Background technique
IV race selenide material is due to it with unique photoelectricity thermoelectricity capability, in earth resource rich reserves and at low cost The advantages that honest and clean and receive significant attention.
Stannic selenide SnSe is narrow bandgap semiconductor material, belongs to rhombic system, and crystal is in layer structure, and band gap is 1.0-1.5eV, due to its excellent photoelectric properties, nontoxicity, the advantage of cheap raw material and reserves relative abundance, close red There is important application prospect in outer photodetection, photovoltaic cell.In addition, SnSe is due to its ultralow thermal conductivity and excellent electrical property Energy and a kind of very promising thermoelectric material.
Currently, the preparation of SnSe nanostructure can pass through accomplished in many ways: South Korea Sung Yun-Mo etc. is heavy using gas phase Area method successfully prepares the two-dimentional SnSe nanometer sheet perpendicular to substrate in tube furnace, and this method uses the mixing of argon gas and hydrogen The growth source of gasification is transported on the substrate of downstream and grows as protective atmosphere and carrier gas by gas, refering to CrystEngComm, 2014,16,5080;The bismuth nano particle of dispersion is passed through solution-liquid-solid method (SLS) mechanism catalytic nanometer by Li Can etc. Line growth, with Sn [N (SiMe3)2]2With three pungent phosphine selenides (TOP-Se) in oleyl amine (OLA) or OLA/TOPO (trioctylphosphine oxygen Change phosphine) in the mixed solvent prepares SnSe nano wire.Refering to Angew.Chem.Int.Ed.2011,50,12050-12053;Liu Shuhao etc. uses chemical vapour deposition technique in tube furnace, using argon hydrogen gaseous mixture as carrier gas and protection gas, furnace temperature setting For 923K, the SnSe powder of gasification is transported on the substrate of downstream and is grown, substrate uses silicon wafer and mica sheet, growth time 20 Minute, it is prepared for two-dimensional surface SnSe nano flake.Above-mentioned report can be seen that, in existing SnSe nanostructure preparation method, Liquid phase method needs plurality of raw materials reaction growth for a long time in complicated solution system, and vapour deposition process needs specific gas to exist Growth is transported in tube furnace, the disadvantages of these method and processes are complicated, condition is harsh, long between growth limits it industrially Using.And Vacuum sublimation is a kind of traditional film plating process, has preparation process simple, easy to operate, deposition rate is high The advantages that, preparing SnSe nanostructure using vacuum thermal evaporation is a kind of new preparation thinking, still, using existing conventional true The SnSe product that empty thermal evaporation method is prepared, it is microcosmic on can not form conventional nanometer chip architecture, limit SnSe nanometers The application of piece.
Summary of the invention
This application provides a kind of preparation methods of stannic selenide nanometer sheet, efficiently solve existing vacuum thermal evaporation methods The technical issues of stannic selenide with nanometer sheet microstructure can not be made.
In view of this, this application provides a kind of preparation methods of stannic selenide nanometer sheet, comprising the following steps:
Using vacuum coating method, using stannic selenide as evaporation source, with setting substrate, institute above the stannic selenide evaporation source It is 2.4~2.6cm that evaporation source, which is stated, at a distance from the substrate, and the temperature of the vacuum coating is 460 DEG C -480 DEG C, the vacuum The time of plated film is 5~10min, and under vacuum conditions, stannic selenide nanometer sheet is made in the surface of the substrate.
It should be noted that suitable stannic selenide can be added according to actual needs.
It should be noted that poured into after SnSe powder is weighed as evaporation source in crucible, 2.4 above evaporation source~ Substrate is placed at 2.6cm, when vacuum degree reaches 2 × 10 in vacuum thermal evaporation coating machine-5Pa~5 × 10-5When Pa, by evaporation source 460~480 DEG C are equably warming up to, is kept for 5~10 minutes, the SnSe film sample of black deposit is finally obtained on substrate Product.
Preferably, the substrate is selected from quartz glass, silicon wafer, ITO electro-conductive glass or molybdenum foil.
Preferably, the vacuum degree of the vacuum environment is 2 × 10-5Pa~5 × 10-5Pa。
Preferably, the stannic selenide is selenizing tin powder, the particle size range of the selenizing tin powder is 50 mesh~200 Mesh.
Preferably, the equipment of the vacuum coating is multi-source high vacuum thermal evaporation coating machine.
Preferably, the stannic selenide nanometer sheet is the stannic selenide nanometer sheet of rhombic system.
Preferably, the purity of the selenizing tin powder is >=98%.
It should be noted that the quality of SnSe powder is 0.197g, purity is >=98%.
More preferably, the purity of the selenizing tin powder is 99.999%.
As can be seen from the above technical solutions, the application has the following advantages:
Using vacuum coating method, evaporation source material evaporation or distillation are that vapour particles are conveyed to substrate surface, in substrate Surface forming core, long great achievement solid film.The invention discloses a kind of preparation methods of stannic selenide nanometer sheet, using stannic selenide as steaming It rises, with setting substrate above stannic selenide evaporation source, evaporation source is 2.4~2.6cm, the temperature of vacuum coating at a distance from substrate It is 460 DEG C -480 DEG C, the time of vacuum coating is 5~10min, and under vacuum conditions, stannic selenide nanometer is made in the surface of substrate Piece.The stannic selenide product with nanometer chip architecture is made by the relevant parameter of improvement vacuum coating in the present invention, and the application is not necessarily to The stannic selenide of nanometer chip architecture is made without carrying out the extra process such as heating to substrate in catalyst auxiliary, nanometer chip architecture Stannic selenide is conducive to the preparation and application of various nano-devices, for example can make lithium ion battery due to its specific surface area height, Because big specific surface area is conducive to more lithium ion insertions and abjection, Er Feina which reduce the diffusion path of lithium ion Rice chip architecture is without this effect.The preparation method of the application is simple, and environmental pollution is small, and unprotect gas and carrier gas, used time are short, easy It in operation, promotes, large area preparation can be carried out, thus there is important researching value and wide application prospect.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below There is attached drawing needed in technical description to be briefly described.
Fig. 1 is the X ray diffracting spectrum of stannic selenide nanometer sheet made from the embodiment of the present application 1, and display sample is orthorhombic The SnSe of system, diffraction maximum are consistent with PDF#48-1224 standard card, and in addition there are the diffraction maximums from Si, from substrate Si piece;
Fig. 2 is the amplification 50k multiple surface Scanning Electron microscope of stannic selenide nanometer sheet made from the embodiment of the present application 1 Figure, display stannic selenide nanometer sheet are the continuous nanometer sheet perpendicular to substrate;
Fig. 3 is the amplification 20k multiple surface Scanning Electron microscope of stannic selenide nanometer sheet made from the embodiment of the present application 1 Figure, display stannic selenide nanometer sheet are the continuous nanometer sheet perpendicular to substrate;
Fig. 4 is the Sn distribution diagram of element of stannic selenide nanometer sheet made from the embodiment of the present application 1, it was demonstrated that Sn element is uniformly distributed In film;
Fig. 5 is the Se distribution diagram of element of stannic selenide nanometer sheet made from the embodiment of the present application 1, it was demonstrated that Se element is uniformly distributed In film;
Fig. 6 is the scanning electron microscope diagram of product surface made from the application comparative example 1;
Fig. 7 is the scanning electron microscope diagram of product surface made from the application comparative example 2;
Fig. 8 is the scanning electron microscope diagram of product surface made from the application comparative example 3.
Specific embodiment
The present invention provides a kind of preparation methods of stannic selenide nanometer sheet, efficiently solve existing vacuum thermal evaporation methods The technical issues of stannic selenide with nanometer sheet microstructure can not be made.
The technical scheme in the embodiments of the invention will be clearly and completely described below, it is clear that described implementation Example is only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field is common Technical staff's every other embodiment obtained without making creative work belongs to the model that the present invention protects It encloses.
Wherein, it is commercially available or self-control that following embodiment is raw materials used, following embodiment is raw materials used be it is commercially available or from System.
Embodiment 1
The embodiment of the present application 1 provides the preparation method of the first stannic selenide nanometer sheet, the specific steps are as follows:
It pours into crucible after the selenizing tin powder (its purity is 99.999%) of 0.197g is weighed as evaporation source, is steaming Silicon wafer is placed above rising at 2.5cm as substrate, when vacuum degree reaches 5 × 10 in multi-source high vacuum thermal evaporation coating machine-5Pa When, evaporation source is equably warming up to 470 DEG C, progress vacuum coating in 5 minutes is kept, black sediment is finally obtained on substrate Stannic selenide nanometer sheet is made in object.
X-ray diffraction detection is carried out to stannic selenide nanometer sheet made from the embodiment of the present application 1, as shown in Figure 1, it can be seen that Stannic selenide nanometer sheet is the SnSe of rhombic system, and diffraction maximum is consistent with PDF#48-1224 standard card, and in addition there are come from Si Diffraction maximum, from the Si piece of substrate.
Electron microscopy is scanned to stannic selenide nanometer sheet made from the embodiment of the present invention 1.As shown in figures 2-3, Fig. 2 is the scanning electron microscope diagram for amplifying 50k times, and Fig. 3 is the scanning electron microscope diagram for amplifying 20k times, it can be seen that selenium Changing tin nanometer sheet surface is the continuous film perpendicular to the nanometer sheet composition of substrate.
Elemental redistribution detection is carried out to the microcell of stannic selenide nanometer sheet made from the embodiment of the present invention 1.As shown in Figures 4 and 5, Fig. 4 is selected areas Sn distribution diagram of element, it can be seen that Sn element is evenly distributed in film.Fig. 5 is selected areas Se element point Butut, it can be seen that Se element is evenly distributed in film.In conclusion what this film was made of continuous SnSe nanometer sheet.
Embodiment 2
The embodiment of the present application 2 provides the preparation method of second of stannic selenide nanometer sheet, the specific steps are as follows:
It is poured into after the SnSe powder (99.999%) of 0.197g is weighed as evaporation source in crucible, above evaporation source ITO electro-conductive glass is placed at 2.4cm as substrate, when vacuum degree reaches 2 × 10 in vacuum thermal evaporation coating machine-5When Pa, it will steam It rises and is equably warming up to 460 DEG C, kept for 6 minutes, the stannic selenide nanometer sheet of black deposit is finally obtained on substrate.
X-ray diffraction result, scanning electron microscope result and the Elemental redistribution inspection of the stannic selenide nanometer sheet of the present embodiment It is similar to the X-ray diffraction result of embodiment 1, scanning electron microscope result and Elemental redistribution testing result to survey result.
Embodiment 3
The embodiment of the present application 3 provides the preparation method of the third stannic selenide nanometer sheet, the specific steps are as follows:
It is poured into after the SnSe powder (99.999%) of 0.197g is weighed as evaporation source in crucible, above evaporation source Molybdenum foil is placed at 2.6cm as substrate, when vacuum degree reaches 3.5 × 10 in vacuum thermal evaporation coating machine-5It is when Pa, evaporation source is equal It is warming up to 480 DEG C evenly, is kept for 5 minutes or so, the stannic selenide nanometer sheet of black deposit is finally obtained on substrate.
X-ray diffraction result, scanning electron microscope result and the Elemental redistribution inspection of the stannic selenide nanometer sheet of the present embodiment It is similar to the X-ray diffraction result of embodiment 1, scanning electron microscope result and Elemental redistribution testing result to survey result.
Embodiment 4
The embodiment of the present application 4 provides the preparation method of the 4th kind of stannic selenide nanometer sheet, the specific steps are as follows:
It is poured into after the SnSe powder (99.999%) of 0.197g is weighed as evaporation source in crucible, above evaporation source Silicon wafer is placed at 2.5cm as substrate, when vacuum degree reaches 5 × 10 in vacuum thermal evaporation coating machine-5It is when Pa, evaporation source is uniform Ground is warming up to 475 DEG C, is kept for 5 minutes or so, the stannic selenide nanometer sheet of black deposit is finally obtained on substrate.
X-ray diffraction result, scanning electron microscope result and the Elemental redistribution inspection of the stannic selenide nanometer sheet of the present embodiment It is similar to the X-ray diffraction result of embodiment 1, scanning electron microscope result and Elemental redistribution testing result to survey result.
Comparative example 1
The application provides and comparative example 1 similar in embodiment 1, the specific steps are as follows:
It pours into crucible after the selenizing tin powder (its purity is 99.999%) of 0.197g is weighed as evaporation source, is steaming Silicon wafer is placed above rising at 10cm as substrate, the temperature of substrate is 380 DEG C, when true in multi-source high vacuum thermal evaporation coating machine Reciprocal of duty cycle reaches 5 × 10-5When Pa, evaporation source is equably warming up to 450 DEG C, progress vacuum coating in 20 minutes is kept, finally in base On piece obtains deposited samples, and 1 product of comparative example is made.
Electron microscopy is scanned to product made from comparative example 1 of the present invention.As shown in fig. 6, Fig. 6 is comparative example The scanning electron microscope diagram of 1 product surface, as can be seen from Figure 6, the microcosmic of the product of comparative example 1 is not nanometer chip architecture.
Comparative example 2
The application provides and comparative example 2 similar in embodiment 1, the specific steps are as follows:
It pours into crucible after the selenizing tin powder (its purity is 99.999%) of 0.197g is weighed as evaporation source, is steaming Silicon wafer is placed above rising at 10cm as substrate, the temperature of substrate is 450 DEG C, when true in multi-source high vacuum thermal evaporation coating machine Reciprocal of duty cycle reaches 5 × 10-5When Pa, evaporation source is equably warming up to 400 DEG C, progress vacuum coating in 15 minutes is kept, finally in base On piece obtains deposited samples, and 2 product of comparative example is made.
Electron microscopy is scanned to product made from comparative example 2 of the present invention.As shown in fig. 7, Fig. 7 is comparative example The scanning electron microscope diagram of 2 product surfaces, as can be seen from Figure 7, the microcosmic of the product of comparative example 2 is not nanometer chip architecture.
Comparative example 3
The application provides and comparative example 3 similar in embodiment 1, the specific steps are as follows:
It pours into crucible after the selenizing tin powder (its purity is 99.999%) of 0.197g is weighed as evaporation source, is steaming Silicon wafer is placed above rising at 10cm as substrate, the temperature of substrate is 450 DEG C, when true in multi-source high vacuum thermal evaporation coating machine Reciprocal of duty cycle reaches 5 × 10-5When Pa, evaporation source is equably warming up to 400 DEG C, progress vacuum coating in 10 minutes is kept, finally in base On piece obtains deposited samples, and 3 product of comparative example is made.
Electron microscopy is scanned to product made from comparative example 3 of the present invention.As shown in figure 8, Fig. 8 is comparative example The scanning electron microscope diagram of 3 product surfaces, as it can be observed in the picture that the microcosmic of the product of comparative example 3 is not nanometer chip architecture.
The description of the present application and term " first " in above-mentioned attached drawing, " second ", " third ", " the 4th " etc. are (if deposited ) it is to be used to distinguish similar objects, without being used to describe a particular order or precedence order.It should be understood that use in this way Data are interchangeable under appropriate circumstances, so that embodiments herein described herein for example can be in addition to illustrating herein Or the sequence other than those of description is implemented.In addition, term " includes " and " having " and their any deformation, it is intended that Cover it is non-exclusive include, for example, containing the process, method, system, product or equipment of a series of steps or units need not limit In step or unit those of is clearly listed, but may include be not clearly listed or for these process, methods, produce The other step or units of product or equipment inherently.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also answered It is considered as protection scope of the present invention.

Claims (7)

1. a kind of preparation method of stannic selenide nanometer sheet, which comprises the following steps:
Using vacuum coating method, using stannic selenide as evaporation source, with setting substrate, the steaming above the stannic selenide evaporation source It rises for 2.4~2.6cm at a distance from the substrate, the temperature of the vacuum coating is 460 DEG C -480 DEG C, the vacuum coating Time be 5~10min, under vacuum conditions, stannic selenide nanometer sheet is made in the surface of the substrate.
2. preparation method according to claim 1, which is characterized in that the substrate is selected from quartz glass, silicon wafer, ITO Electro-conductive glass or molybdenum foil.
3. preparation method according to claim 1, which is characterized in that the vacuum degree of the vacuum environment is 2 × 10-5Pa~ 5×10-5Pa。
4. preparation method according to claim 1, which is characterized in that the stannic selenide is selenizing tin powder, the selenizing The particle size range of tin powder is 50 mesh~200 mesh.
5. preparation method according to claim 1, which is characterized in that the equipment of the vacuum coating is multi-source high vacuum heat Evaporation coating machine.
6. preparation method according to claim 1, which is characterized in that the stannic selenide nanometer sheet is the selenizing of rhombic system Tin nanometer sheet.
7. preparation method according to claim 1, which is characterized in that the purity of the selenizing tin powder is >=98%.
CN201910745626.8A 2019-08-13 2019-08-13 A kind of preparation method of stannic selenide nanometer sheet Pending CN110423984A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111261737A (en) * 2020-01-21 2020-06-09 广东工业大学 SnSe/Bi2Se3Nanosheet heterojunction and preparation method thereof
CN111908433A (en) * 2020-07-16 2020-11-10 深圳大学 Method for repairing selenium vacancy defect in stannous selenide nanosheet
CN113324662A (en) * 2021-05-17 2021-08-31 深圳先进技术研究院 Uncooled infrared detector and preparation method thereof
CN114583160A (en) * 2022-03-09 2022-06-03 广东工业大学 Tin selenide nanosheet array/carbon cloth composite cathode material structure for sodium ion battery

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KR101617953B1 (en) * 2014-08-06 2016-05-03 고려대학교 산학협력단 A method for manufacturing vertically aligned SnSe nanosheets via physical vapor deposition
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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111261737A (en) * 2020-01-21 2020-06-09 广东工业大学 SnSe/Bi2Se3Nanosheet heterojunction and preparation method thereof
CN111261737B (en) * 2020-01-21 2022-08-12 广东工业大学 SnSe/Bi 2 Se 3 Nanosheet heterojunction and preparation method thereof
CN111908433A (en) * 2020-07-16 2020-11-10 深圳大学 Method for repairing selenium vacancy defect in stannous selenide nanosheet
CN111908433B (en) * 2020-07-16 2022-06-14 深圳大学 Method for repairing selenium vacancy defect in stannous selenide nanosheet
CN113324662A (en) * 2021-05-17 2021-08-31 深圳先进技术研究院 Uncooled infrared detector and preparation method thereof
CN114583160A (en) * 2022-03-09 2022-06-03 广东工业大学 Tin selenide nanosheet array/carbon cloth composite cathode material structure for sodium ion battery
CN114583160B (en) * 2022-03-09 2024-04-26 广东工业大学 Tin selenide nano-sheet array/carbon cloth composite anode material structure for sodium ion battery

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Application publication date: 20191108