CN110398795A - Scanning mirror, scanning means and irradiation unit - Google Patents
Scanning mirror, scanning means and irradiation unit Download PDFInfo
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- CN110398795A CN110398795A CN201910307770.3A CN201910307770A CN110398795A CN 110398795 A CN110398795 A CN 110398795A CN 201910307770 A CN201910307770 A CN 201910307770A CN 110398795 A CN110398795 A CN 110398795A
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- scanning mirror
- scanning
- matrix
- mirror
- laser beam
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/20—Bonding
- B23K26/21—Bonding by welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/02—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of crystals, e.g. rock-salt, semi-conductors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0808—Mirrors having a single reflecting layer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Laser Beam Processing (AREA)
Abstract
The present invention relates to a kind of scanning mirrors (9a) for deflecting laser beam, comprising: matrix (12) and the mirror surface (15) for reflected laser beam.Matrix (12) has dimensional structured back side (14) and by glass, especially quartz glass or is made of glass ceramics, especially devitrified glass.The present invention also relates to a kind of scanning means and a kind of irradiation unit with this scanning means at least one this scanning mirror (9a).
Description
Technical field
The present invention relates to it is a kind of for make laser beam deflect scanning mirror comprising: matrix and be used for reflection laser
The mirror surface of beam.The present invention also relates to a kind of corresponding scanning means, at least one, preferably two scanning mirror, and
It is related to a kind of irradiation unit with this scanning means.
Background technique
Processing light for Materialbearbeitung mit Laserlicht, which has, bears strong pollution since material removes in industrial application.Strong pollution
Especially occur in the process for consumingly forming splash.The scan geometry of determination with small deflection amplitude
(such as round) by high dynamic is scanned, which makes molten bath become tranquil during laser welding and thereby make
The splash of formation substantially reduces.
Be desirable for generate this scan geometry, make laser beam high dynamic deflect, this typically by
Optical element in the form of one or more scanning mirrors of scanning means carries out.For this purpose, scanning mirror typically by
Servo-driver, such as galvanometer-driver are pivoted around corresponding rotation axis.In order to realize the as big as possible of scanning mirror
Dynamic, it is desirable that: so that corresponding scanning mirror is moved rapidly and is especially rapidly accelerated.This acceleration brings big
Power, the power are applied to the deformation that on scanning mirror and will lead to scanning mirror.
Therefore, on the one hand scanning mirror should have the moment of inertia as small as possible around its rotation axis, so as to make this
Scanning mirror moves and accelerates as quickly as possible, and on the other hand should be configured to as far as possible rigidly, to guarantee resonant frequency
Except working range in scan frequency, to avoid deforming during movement.The scanning mirror of lightweight form is typical
Ground is manufactured by silicon carbide, silicon or beryllium, but these materials are not suitable for high laser power.
It is proposed in 10 2,016 114 064 A1 of DE, scanning mirror is made by two components, i.e., by with the more of cavity
Carrier structure made of Porous materials and the runner plate being attached thereto, the runner plate have mirror surface on the side away from carrier structure.It is more
Porous materials can have the density of reduction, such as the largest of about 25% compared with corresponding solid material.
The scanning mirror being made of matrix and plate reflective optical devices is as known to 10 2,013 001 417 A1 of DE.Plate
Reflective optical devices can be made of silicon, optical glass, sapphire, ULE glass or devitrified glass and on the surface of matrix
Upper material in locking manner and face formula connect by soldering with matrix.Matrix can be for example by metal, ceramics, composite material or fiber
Reinforcing material is made.
A kind of scanning mirror is described in 1 094 343 B1 of EP, which has the reflection with edge and back side
Face, wherein holder carrier is disposed on back side, which extends from holder, can will sweep by the holder
Retouch mirror installation on the motor.Holder carrier has multiple ribs, these ribs extend to the edge of optical surface from holder carrier
On, to improve the rigidity of scanning mirror.A pair of of scanning mirror with rib is also as known to 642,265 S of U.S. patent Nos D.
Summary of the invention
Task of the invention lies in providing a kind of scanning mirror, which to be able to achieve high scanning dynamic and can be with
It is used in the case where high laser power, a kind of scanning means and a kind of irradiation at least one this scanning mirror is provided
Device.
The scanning mirror that the task passes through the type being initially mentioned solves, and in the scanning mirror, matrix has dimensional structured
Back side and constituted by glass or by glass ceramics.It is different from the silicon carbide, silicon or beryllium of manufacture scanning mirror is typically used in, (light
Learn) glass ceramics can more easily be equipped with coating to glass in other words, even if so that these materials are the high laser power the case where
Under also can be used.Different from above-cited 10 2,013 001 417 A1 of DE, these materials are not used in manufacture and matrix connects
The plate-shaped optical element connect, but their own constitutes matrix.The glass typically relates to oxidation glass, relates generally to silication
Glass.The glass phase of glass ceramics also typically relates to siliceous glass.Siliceous glass can adulterate former with foreign atom, such as Ti
Son, to obtain the material with thermal expansion coefficient as small as possible.
In the sense of the present invention, dimensional structured back side is interpreted as, the back side of scanning mirror and flat geometry
It is different.Therefore, back side constitutes Three-dimensional thickness profile on front side of typically flat scanning mirror, wherein back side relative to
The spacing of front side relatively changes with place.Dimensional structured back side especially can have constitutes rib formations in other words.It sweeps
The basic geometry for retouching the back side of mirror is typically shown as free shape face herein, thickness from the central axes of scanning mirror or
Two side edges for saying mid-plane towards scanning mirror reduce, and the rotation axis of scanning mirror is intermediate in other words flat along the central axes
Face extends.Generally, the thickness in the free shape face on the back side of matrix is also typically equally from the section with maximum gauge
The end side opposite with section is kept along central axes towards scanning mirror reduces, this has the section of maximum gauge and is used for admittedly
The holding section for determining scanning mirror is adjacent to composition.The moment of inertia of scanning mirror can be further decreased by this way.
The rigid phase of the scanning mirror can be made for tradition by dimensional structured/rib formations on the back side of scanning mirror
Scanning mirror with flat back side improve: that is, scanning mirror according to the present invention can be bigger than traditional scanning mirror thick by having
The flat substrate of degree manufactures.The material of thick substrate is selectively removed herein, wherein the material removal carries out until scanning
The case where minimum thickness of mirror, which is generally less than traditional scanning mirror.It is remaining on back side in the case where removing material
The maximum gauge that the three-dimensional structure stayed typically has is greater than the thickness of traditional scanning mirror with flat back side.
Preferably, matrix is by quartz glass (SiO2) or devitrified glass composition.These materials are other than high laser tolerance
Also there is lesser density so that using these materials the moment of inertia of scanning mirror with other of higher density
Material is compared and can be substantially reduced.Devitrified glass provides attendant advantages: the devitrified glass is based between glass phase and crystalline phase
It properly adjusts the ratio set and there is extremely low thermal expansion coefficient.
In one embodiment, it is made up of for the mirror surface of reflected laser beam the reflectance coating being applied on matrix.
It is anti-can directly or when necessary apply using functional interlayer on above-mentioned material, typically be vapor-deposited
Penetrate coating.This reflectance coating can have the wavelength of laser beam about 99% or more high reflectance.For this purpose,
Reflectance coating can have multiple layers made of dielectric substance.In this scanning with high reflectivity for laser beam
In mirror, although can also cancel in the case where laser power height cooling (blowing air) with air.
In one embodiment, the maximum gauge that matrix has is between 5 millimeters to 8 millimeters.In the regulation codomain
Maximum gauge typically uses in the scanning mirror with following mirror size: the mirror is sized to fit into 30 millimeters of aperture.More
It can be worked in small scanning mirror with smaller (maximum) thickness.In the case where the material stated in use, scanning mirror base in other words
Body yet has enough rigidity even if in the case where relatively small thickness, so that matrix is surrounding its axis to the scanning mirror in other words
Line is actually indeformable in the case where rotating, which is equivalent to rotation axis.By small thickness, scanning mirror also have compared with
Small the moment of inertia, the moment of inertia can be further decreased by the suitable structuring of the back side away from mirror surface of matrix.Scanning
The matrix of mirror can have such as 1.0 millimeters or smaller minimum thickness.
In another embodiment, matrix surface region with taper on its back side away from optical surface, wherein
The axis of the surface region of the taper is preferably oriented relative to the optical surface of scanning mirror with the angle less than 30 °.Such as above
As description, scanning mirror is typically the dimensional structured free shape of composition in other words face on its back side.Free shape
The surface region of the taper in face can be interrupted in partial region by the recess portion of pouch-shaped, i.e., the surface region of taper is not when necessary
Coherent face is constituted, but has the thickness more predetermined than the conical by its shape by surface region small in corresponding partial region
Thickness.
The thickness of scanning mirror can be made to further decrease by the surface region of taper, and the rigidity in this scanning mirror is not shown
It writes and reduces.(rotation) axis of the surface region of taper and the vertex of centrum are typically in except scanning mirror herein.Cone
Vertex generally compared with scanning mirror back side farther out from (flat) mirror surface.
In one embodiment, matrix has a central connection strap on its back side away from mirror surface, and the connection strap is from being used for
The central axes extension that the holding section of scanning constant mirror sets out along scanning mirror, more specifically typically extends up to scanning mirror
Terminal side edge.Section is kept to can have the thickness smaller than the maximum gauge of scanning mirror, but this is not to force needs.It keeps
Section especially can have flat surface, which moves towards with being parallel to the flat forward of scanning mirror, so as to preferably
Be fixedly clamped the scanning mirror.
The height of central connection strap in other words thickness can from typically with keep section be adjacent to the maximum gauge occupied
Terminal side edge towards scanning mirror reduces, to reduce the moment of inertia of scanning mirror.Scanning mirror is typically constructed to about central axes mirror
As symmetrical in other words about the mid-plane mirror symmetry for extending through central axes, front side of the mid-plane perpendicular to scanning mirror
Ground orientation.
In another embodiment, the width of central connection strap with person with keep section spacing increase and reduce.It is excellent
The opening angle that the central axes of selection of land, central connection strap and scanning mirror surround is less than 10 °, especially less than 8 °.By this way may be used
To improve the stability of scanning mirror and at the same time reducing the moment of inertia of scanning mirror.
In another expansion scheme, multiple ribs are constituted on the back side of matrix, these ribs from central connection strap towards
The direction of the side edge of matrix extends, and especially extends up to the side edge of matrix.Preferably, these ribs substantially with scanning mirror
Central axes orient at a right angle.
The rib is used to enhance the rigidity of scanning mirror and is typically transverse to, i.e. perpendicular to the center company than the rib width
It moves towards to narrow bars, which extends along the longitudinally of scanning mirror.Each two in the rib generally moved towards in parallel
Pouch-shaped recess portion is typically mounted between rib on the back side of matrix, the pouch-shaped recess portion can be in the transition to central connection strap
Rounding in portion.
In an expansion scheme, rib has the maximum width less than 1 millimeter, preferably smaller than 0.7 millimeter.It is certified as advantageous
, multiple thin ribs with smaller width are constituted on the back side of matrix.Relatively narrow ribs also assigns scanning mirror high rigidity.
The quantity for the pouch-shaped recess portion that the quantity of rib is constituted between the ribs in other words depends on scanning mirror along the length and example of longitudinally
It such as may be in the order of magnitude of about 5 or 10 ribs.The thickness of rib is typically from central connection strap to the matrix of scanning mirror
Side edge reduce.
In an expansion scheme, the upside of each rib is at least bowed, especially convex in the near side edges of matrix
It is curved.Particularly with the upside of rib there is the case where convex bending may be implemented, the rib reduced on thickness is in the side of matrix
Do not gather wedge angle in fringe region and thus less easily snaps off.
In another expansion scheme, pouch-shaped recess portion is constituted between the ribs on matrix back side, wherein the bottom of each pouch-shaped recess portion
Spacing between portion and front side is preferably smaller than 1.0 millimeters.It can make bag by the rigidity of the rib formations on the back side of matrix
Implement that there is very high rigidity, so that the bottom surface of the panel-shaped base body constituted between the ribs matrix in other words is implemented very
Thin, this greatly reduces the moment of inertia of scanning mirror again.
Another aspect of the present invention relates to a kind of scanning means for deflecting laser beam, comprising: at least one is such as
Scanning mirror recited above and at least one servo-driver for being used to that scanning mirror to be made to surround the rotation of its central axes, the axis
Line typically corresponds to the rotation axis of servo-driver.Scanning means especially can have two scanning mirrors, to make laser
Beam deflects in two directions.Due to typically biggish meeting area, deflected under the meeting area by the first scanning mirror
Laser beam meet with the second scanning mirror, the two scanning mirrors typically have different sizes, especially along longitudinally
Different extension scales.Scanning mirror keeps section to be fixed on corresponding servo-driver by it, is more specifically fixed on
In the drive shaft of corresponding servo-driver.Other than servo-driver additionally, scanning means can have control control
Device, which manipulates servo-driver, to deflect laser beam with desired way.
Another aspect of the present invention relates to a kind of irradiation units for by laser beam irradiation processing district, comprising: uses
It is as described above to be used to laser beam being directed to the scanning means on processing district in the laser source for generating laser beam, and
For laser beam to be focused on to the tool of the focusing light in processing district.
Irradiation unit can be used for being arranged in the laser processing of the workpiece in (typically flat) processing district, such as laser
Welding, laser cutting.When necessary, only one scanning mirror can be equipped in this irradiation unit, i.e., laser beam is by the scanning
Device is only deflected along a direction in space.The two dimension processing of workpiece, such as label can carry out in this case, mode
It is to keep workpiece movably supported along second space direction.
Irradiation unit also may be constructed the component Parts of the processing machine for manufacturing three-dimensional structure by irradiation powder bed, should
Processing machine has processing cavity, which has flat processing district, powder bed to be illuminated can be disposed in processing district.
In this case, laser source can be related to (but can also refer in other application) optical fiber laser, solid state laser etc..Focus light
Tool is such as can be configured to lens, focus lamp.
Detailed description of the invention
Other advantage of the invention can be obtained by the description and the appended drawings.Above-mentioned feature and the spy also enumerated later
Sign can be equally used alone with itself or be used in any combination in the case where multiple features.Shown in and the embodiment party
Formula is not construed as exhaustion, but more specifically has example feature for explaining the present invention.
The schematic diagram of Fig. 1 irradiation unit has the scanning means with two scanning mirrors for deflecting laser beam,
Three perspective views and a side view of the first scanning mirror of Fig. 2 a-2d Fig. 1, and
Three perspective views and a side view of the second scanning mirror of Fig. 3 a-3d Fig. 1.
In attached drawing description below, component identical for identical or function is equipped with identical appended drawing reference.
Specific embodiment
Fig. 1 shows the representative configuration of the irradiation unit 1 for laser machining in flat processing district 3 to workpiece 2.Irradiation
Device 1 has the laser source 4 in solid state laser form.Obviously, replace solid state laser that can also also use in irradiation unit 1
Other laser sources.Laser source 4 generates processing laser beam 5, which is mapped on focusing device 6, the focusing device
For laser beam 5 to be focused on workpiece 2.
Laser beam 5 is mapped on scanning means 7 after passing through focusing device 6, which has in this example
Two scanning mirrors 9a, 9b, they can surround corresponding rotation axis by a galvanometer-servo-driver 8a, 8b respectively
10a, 10b rotation pivot in other words, as passed through illustrated by a four-headed arrow respectively in Fig. 1.Scanning means 7 is in other words
Two scanning mirrors 9a, 9b to be able to achieve two-dimensional deflection of the laser beam 5 in flat processing district 3, which shows in Fig. 1
Shown with rectangular on workpiece 2 to meaning property.
By the maximum deflection of two scanning mirrors 9a, 9b, maximum rotation angle is restricted in other words for processing district 3.Two scannings
Mirror 9a, 9b are disposed so as the first scanning mirror 9a in Fig. 1 makes laser beam 5 along in Fig. 1 when rotating about axis rotation
Shown in XYZ coordinate system Y-direction deflection, and the second scanning mirror 9b deflects laser beam 5 in X direction.But two scannings
This vertical orientation of rotation axis 10a, 10b of mirror 9a, 9b are not to force needs.Two galvanometer-servo-driver 8a,
The movement for deflecting laser beam 5 of 8b is controlled by the control device 11 of scanning means 7, to determine laser beam 5
Position is on the desired position on processing district 3.
Compared with the second scanning mirror 9b shown in Fig. 3 a-3d of the first scanning mirror 9a as shown in a-2d according to fig. 2
It can be seen that as, two scanning mirrors 9a, 9b basically by its different size, especially along respective central axes
The different scales that extend in the longitudinally of 10a, 10b distinguish, and the central axes are being schemed corresponding to servo-driver 8a, 8b's
Rotation axis 10a, 10b shown in 1.Subsequent description is related to the first scanning mirror 9a shown in Fig. 2 a-2d, but also similar
Ground is suitable for the second scanning mirror 9b shown in Fig. 3 a-3d.
First scanning mirror 9a integrally constructs and has matrix 12 made of quartz glass, which has flat
Front side 13 and dimensional structured back side 14.It is in (high reflection) that the partial region of the flat front side 13 of first scanning mirror 9a, which is constituted,
The mirror surface of 15 form of coating is (referring to fig. 2 d).In this example, reflectance coating 15 is made of dielectric laminated coating.Reflection applies
Layer 15 is high reflection for about 1 micron of wavelength of laser beam 5, i.e., the reflectance coating has about 99% or more reflection
Rate.The laser tolerance of high reflectance and silica glass material based on coating 15, the first scanning mirror 9a can bear high to swash
Optical power, and first scanning mirror need not be for example cooling by air stream.Alternatively, matrix 12 can also be by devitrified glass or must
By being suitable for applying reflectance coating 15 and there are other glass or glass ceramics of high rigidity and smaller density to constitute when wanting.
In order to generate high dynamic movement of the laser beam 5 on processing district 3, it is advantageous to which the first scanning mirror 9a has to the greatest extent
May small weight and thereby in terms of around central axes 10a rotation with the moment of inertia as small as possible.In order to guarantee this point,
Advantageously, the matrix 12 of scanning mirror 9a has (maximum) thickness D as small as possible, (referring to fig. 2 d), the thickness is in this example
In codomain between about 5 millimeters to about 8 millimeters.In order to reduce the moment of inertia, it may be particularly advantageous to, the matrix 12 of scanning mirror 9a
Quality be predominantly located near the 10a of central axes.
In order to reduce the moment of inertia of scanning mirror 9a while obtaining rigidity as high as possible, make the back side 14 3 of matrix 12
Tie up structuring: matrix 12 has central connection strap 16 on its back side 14, and the center connection strap is from for scanning constant mirror 9a's
End side holding section 17 sets out to be extended along the direction of central axes 10a towards the terminal side edge 18 of scanning mirror 9a of scanning mirror 9a.
The direction of opposite end side 18 of the thickness of central connection strap 16 from maximum gauge D towards matrix 12 reduces, adjacent to guarantor
The central connection strap 16 for holding section 17 occupies the maximum gauge.From central connection strap 16s, in the two sides of central connection strap 16
On, multiple ribs 19 extend up to respective side edge 20a, 20b of matrix 12.Here, central axes 10a of the rib perpendicular to matrix 12
Trend.Constituting on the back side 14 of matrix 12 between rib 19 has a pouch-shaped recess portion 21, and the pouch-shaped recess portion is from corresponding side edge
20a, 20b set out and extend to central connection strap 16 and in the lateral limit center connection strap.
Central connection strap 16 perpendicular to central axes 10a measurement width B towards matrix 12 terminal side edge 18 direction with
Relative to keep section 17 spacing increase and reduce.In this example, the central axes of central connection strap 16 and matrix 12
The opening angle α that 10a is surrounded is less than about 10 °, typically less than about 8 °.Opening angle α along central connection strap 18 widthwise edge
Edge measurement, the transverse edge is predetermined by the maximum extension scale of pouch-shaped recess portion 21 in transverse direction, and the pouch-shaped recess portion exists
Rounding on to the transition of central connection strap 18.Pouch-shaped recess portion 21 is introduced into matrix 12 typically via milling.
Rib 19 is respectively provided with lesser (maximum) the width b less than about 1 millimeter, even if because the enough quantity of rib 19
The sufficient of the rigidity of matrix 12 is also caused to improve in the lesser situation of width b.Realized by the small width of rib 19: pouch-shaped is recessed
Portion 21 has big width.This is favourable, because of the front side 13 of matrix 12 and corresponding recessed in the region of pouch-shaped recess portion 21
Spacing A between the bottom 22 in portion 21 can select to obtain very little and for example, less than about 1.0 millimeters.Nevertheless, in pouch-shaped recess portion
The suitable selection of material of the relatively thin panel-shaped base body 12 based on the dimensional structured of back side 14 and for matrix 12 in 21 region
And there is enough rigidity, thus scanning mirror 9a 13 on front side of it in the case where high dynamic movement not with undesirable side
Formula deformation.
As in Fig. 2 a-2d it is likewise seen that as, rib 19 on its respective upside 19a have arch trend, should
Arch trend has convex bending, i.e. rib 19 does not move towards on 19a as the crow flies on it.This is conducive to for manufacturing matrix
Prevent rib 19 from rolling near corresponding side edge 20a, 20b of matrix 12 during operation in 12 Milling Process or when necessary
It is disconnected.
As in Fig. 2 a-2d it is likewise seen that as, the back side 14 of matrix 12 has the surface region 23 of taper, the table
Face region extends past a section of central connection strap 16 and partial region and is adjacent to the center by rib 19 in other words
Section on connection strap.Fig. 2 d shows the rotation axis 24 for being associated with the conical surface of conical surface region 23 and its side in taper week
25 extended line, the extended line meet in the rotation axis 24 of apex (not shown) and the conical surface.The surface region 23 of taper
The front side 13 of rotation axis 24 and matrix 12 surrounds angle δ, which is less than about 30 °, is, for example, about 25 °.
To sum up, the group of the structuring of the back side 14 of the selection and matrix 12 of the suitable material of matrix 12 can be passed through
Close the dynamic for being substantially reduced the moment of inertia of scanning mirror 9a, 9b and thereby improving scanning motion, wherein while ensure that scanning
Enough rigidity of mirror 9a, 9b.
Claims (15)
1. scanning mirror (9a, 9b) of the one kind for deflecting laser beam (5), comprising: matrix (12) and described for reflecting
The mirror surface (15) of laser beam (5),
It is characterized in that,
Described matrix (12) has dimensional structured back side (14) and is made of glass or glass ceramics.
2. scanning mirror according to claim 1, in the scanning mirror, described matrix (12) is by devitrified glass or quartz glass
It constitutes.
3. scanning mirror according to claim 1 or 2, in the scanning mirror, the mirror surface composition is applied to described matrix
(12) reflectance coating (15) on.
4. the scanning mirror according to one of preceding claims, in the scanning mirror, described matrix (12) has at 5 millimeters extremely
Maximum gauge (D) between 8 millimeters.
5. the scanning mirror according to one of preceding claims, in the scanning mirror, back of the described matrix (12) in the matrix
With the surface region (23) of conical camber on back side (14) from the mirror surface (15), wherein the surface of the conical camber
The axis (24) in region (23) is preferably determined relative to the front side (13) of the scanning mirror (9a, 9b) with the angle (δ) less than 30 °
To.
6. the scanning mirror according to one of preceding claims, in the scanning mirror, back of the described matrix (12) in the matrix
There is central connection strap (16), the center connection strap is from for fixing the scanning mirror on back side (14) from the mirror surface (15)
Central axes (the 10a, 10b) extension that the holding section (17) of (9a, 9b) sets out along the scanning mirror (9a, 9b).
7. scanning mirror according to claim 6, in the scanning mirror, the width (B) of the center connection strap (16) with
Relative to it is described keep section (17) spacing increase and reduce.
8. scanning mirror according to claim 7, in the scanning mirror, the center connection strap (16) and the scanning mirror
The central axes (10a, 10b) of (9a, 9b) surround the opening angle (α) less than 10 °, preferably smaller than 8 °.
9. the scanning mirror according to one of claim 6 to 8, in the scanning mirror, in the back side of described matrix (12)
(14) constituting on has multiple ribs (19), and the rib is respectively from the central connection strap (side of 16)s towards described matrix (12)
The direction at edge (20a, 20b) extends, and especially extends up to the side edge (20a, 20b) of described matrix (12).
10. scanning mirror according to claim 9, in the scanning mirror, the rib (19) is substantially perpendicular to the scanning
Orient to the central axes (10a, 10b) of mirror (9a, 9b).
11. scanning mirror according to claim 9 or 10, in the scanning mirror, the rib (19) is respectively provided with less than 1 milli
Rice, preferably smaller than 0.7 millimeter of maximum width (b).
12. the scanning mirror according to one of claim 9 to 11, in the scanning mirror, the upside (19a) of each rib (19) is extremely
Few in the side edge (20a, 20b) is nearby bowed, especially convex bending.
13. the scanning mirror according to one of claim 9 to 12, in the scanning mirror, in the back of described matrix (12)
Constituting between the rib (19) on side (14) has pouch-shaped recess portion (21), wherein in the bottom (22) of each pouch-shaped recess portion (21)
Spacing (A) between the front side (13) of described matrix (12) is preferably smaller than 1.0 millimeters.
14. one kind for make laser beam (5) deflect scanning means (7), comprising: at least one according to preceding claims it
Scanning mirror described in one (9a, 9b) and at least one central axes for being used to that the scanning mirror (9a, 9b) to be made to surround the scanning mirror
The servo-driver (8a, 8b) of (10a, 10b) rotation.
15. one kind is for the irradiation unit (1) by laser beam (5) irradiation processing district (3), comprising:
For generating the laser source (4) of the laser beam (5),
Scanning means according to claim 14 for being directed to the laser beam (5) on the processing district (3)
(7), and
For the laser beam (5) to be focused on to the focusing device (6) in the processing district (3).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102018205786.9A DE102018205786A1 (en) | 2018-04-17 | 2018-04-17 | Scanner mirror, scanner device and irradiation device |
| DE102018205786.9 | 2018-04-17 |
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| CN110398795A true CN110398795A (en) | 2019-11-01 |
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| CN118091932A (en) * | 2024-04-28 | 2024-05-28 | 深圳活力激光技术有限公司 | Laser scanning device |
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| CN113899705B (en) * | 2021-10-08 | 2024-06-21 | 中国科学院合肥物质科学研究院 | Ultraviolet hyperspectral atmospheric component detector limb scanning mirror assembly |
| DE102021126360A1 (en) * | 2021-10-12 | 2023-04-13 | Lpkf Laser & Electronics Aktiengesellschaft | Method for processing a workpiece by laser radiation in the form of Lissajous figures and a scanner and a mirror element intended for this purpose |
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| CN118091932B (en) * | 2024-04-28 | 2024-06-28 | 深圳活力激光技术有限公司 | Laser scanning device |
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| DE102018205786A1 (en) | 2019-10-17 |
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