CN105928606A - Surface acoustic wave optical interference scanning detection system - Google Patents
Surface acoustic wave optical interference scanning detection system Download PDFInfo
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- CN105928606A CN105928606A CN201610548397.7A CN201610548397A CN105928606A CN 105928606 A CN105928606 A CN 105928606A CN 201610548397 A CN201610548397 A CN 201610548397A CN 105928606 A CN105928606 A CN 105928606A
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- acoustic wave
- surface acoustic
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- laser
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- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 28
- 238000001514 detection method Methods 0.000 title claims abstract description 19
- 230000003287 optical effect Effects 0.000 title claims abstract description 7
- 238000006073 displacement reaction Methods 0.000 claims abstract description 14
- 230000001427 coherent effect Effects 0.000 claims abstract description 3
- 239000000523 sample Substances 0.000 claims description 35
- 238000005259 measurement Methods 0.000 claims description 8
- 230000010287 polarization Effects 0.000 claims description 7
- 230000005540 biological transmission Effects 0.000 claims description 5
- 239000013078 crystal Substances 0.000 claims description 5
- 238000005086 pumping Methods 0.000 claims description 3
- 238000013075 data extraction Methods 0.000 claims description 2
- 238000000605 extraction Methods 0.000 claims 1
- 230000005284 excitation Effects 0.000 abstract description 2
- 239000000284 extract Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 12
- 230000007613 environmental effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/002—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means for representing acoustic field distribution
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- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The invention provides a surface acoustic wave optical interference scanning detection system including a signal generator, a power amplifier, a displacement platform, a heterodyne detection laser interferometer, a low-noise amplifier, an oscilloscope, and a computer. The excitation signal generated by the signal generator acts on a sample to generate surface acoustic wave after being amplified by the power amplifier, the measuring arm laser emitted by the heterodyne detection laser interferometer irradiates the sample surface and is returned to be in coherent superposition with the reference arm laser to generate an interference signal, the detected interference signal is displayed on the oscilloscope in the corresponding waveform in real time after being amplified by the low-noise amplifier, the oscilloscope and the displacement platform are connected with the computer, and the computer controls the scanning path and extracts the amplitude and phase information of the interference signal waveform. The system, through the combination with heterodyne laser detection and two-dimensional plane scanning, can realize the fine scanning of the small area on the surface of a minisize surface acoustic wave device, the resolution precision reaches 1 micrometer, and the scanning total area reaches 10*10millimeters.
Description
Technical field
The present invention relates to a kind of heterodyne laser detection interferometer, particularly to a kind of surface acoustic wave interference of light scanning probe system.
Background technology
In surface acoustic wave research field, detect and determine that the feature of little amplitude surface vibration is very important.For more than MHz
The application of frequency, typical maximum amplitude is probably in several nanometer scale.In this case, the disturbance of environment is to device measuring essence
That spends affects highly significant, and non-contacting measuring method is particularly important.Laser interferometer provides non-contacting optical measurement side
Method, can be used to detect this surface vibration, and the method that one of which is easy uses homodyne Michelson's interferometer exactly, and it includes surveying
Amount arm and reference arm, be placed on the sample of surface vibration on measurement arm path.Surface vibration causes the optical path difference measured on arm to occur
Changing, correspondingly produce change with the phase difference of reference arm, phase difference is changed in two-arm after beam combination by such laser interferometer
Strength Changes, final light intensity signal is received by photo-detector.So between the light intensity received and surface amplitudes, establish connection
System.The interference term of light intensity is represented by formula (1), I1And I2Being respectively reference arm and measure the light intensity of arm, A is shaking of surface vibration
Width, fSAWFor the frequency of surface vibration, λ is the wavelength of laser,The slow phase place caused before two-beam for environmental factor becomes
Change.
Another method uses heterodyne detection laser interferometer exactly, and the light that lasing light emitter sends is divided into two bundles through spectroscope, makes afterwards
Small frequency displacement f is there is in the frequency of certain light beam in reference arm and measurement arm for original frequency fm(fm< < f) become f+fm.Survey
Amount arm interferes effect through final and reference arm the light of sample surfaces reflection, and the interference term obtaining light intensity is:
In heterodyne detection, the slow phase place change that environmental factor causesA part in changing as just total phase place, the most this
Measuring method the most detectable on common working face (without high-precision optical table), and it is little affected by sample surfaces
Impact coarse, that step rises and falls, reflectivity rises and falls.
The upper frequency limit that sample surfaces vibration information can be measured by business equipment at present is mostly below several megahertzs, it is difficult to higher
The Vibration Condition of frequency is effectively measured, and therefore suffers from limiting.
Summary of the invention
It is analyzed for the above state of the art, it is contemplated that unavoidably there is noise jamming in laboratory environment, the present invention carries
Go out the surface acoustic wave interference of light scanning probe system that the detection of a kind of heterodyne laser combines with surface sweeping platform, to obtain tiny sampler two dimension
The field distribution information on surface.
In order to realize the purpose of above-mentioned acquisition sample surfaces field distribution information, the technical solution used in the present invention is:
A kind of surface acoustic wave interference of light scanning probe system, including signal generator, power amplifier, displacement platform, heterodyne detection
Laser interferometer, low-noise amplifier, oscillograph and computer, the pumping signal that signal generator produces is amplified through power amplifier
After, the surface acting on the sample being positioned on displacement platform produces surface acoustic wave, and the measurement arm laser of heterodyne detection laser interferometer shines
Penetrating and be reflected return at described sample surfaces, superpose generation interference signal with reference arm laser coherence, the interference signal detected is through low
Noise amplifier demonstrates corresponding waveform after amplifying on oscillograph；Described oscillograph and displacement platform are connected with computer respectively,
Scanning pattern and the amplitude extracting interference signal waveform and phase information is controlled by computer；Information data is entered by described computer
Row processes the surface acoustic wave field distribution information obtaining sample.
The surface acoustic wave interference of light scanning probe system of the present invention combines heterodyne laser detection and two dimensional surface scans, wherein, and heterodyne
Laser acquisition can obtain the surface acoustic wave vibration information completely of sample surfaces a single point, without the need for high-precision optical table
And ambient noise is had the strongest immunocompetence, the use in laboratory in most cases can be met；By interferometer is detected light
Spot diameter focuses on 10 μm, coordinates the photodetector using high sensitivity and fast-response speed can will shake sample surfaces simultaneously
The look-in frequency upper limit of dynamic information brings up to 100MHz.Two dimensional surface in conjunction with precision displacement platform (minimum step 0.1 μm) is swept
Retouching, it is possible to achieve the tiny area on miniature SAW device surface is carried out accurate scan, its resolving accuracy reaches 1 micron, real
The overall area now scanned is up to 10 millimeters * 10 millimeters.Meanwhile, the interference signal of each point can be shown in real time by oscillograph, and
Utilize labview program that the vibration information of each point carries out data extraction and include coordinate, phase and amplitude, final utilization matlab
Carrying out Data Post and obtain the field distribution information of scanning area, the method is easy to be reliable.
Accompanying drawing explanation
Fig. 1 is the surface acoustic wave interference of light scanning probe system schematic of the present invention；
Fig. 2 be the present invention surface acoustic wave interference of light scanning probe system in the inside light path schematic diagram of heterodyne laser interferometer；
Fig. 3 is that the two dimensional surface scanning of the present invention realizes process schematic；
Fig. 4 is (a) phase place and (b) amplitude distribution figure of the scanning area that the system of the present invention records；
Fig. 5 is the field pattern of the scanning area that the system of the present invention records.
Detailed description of the invention
Scanning platform and oscillograph and computer interconnection, and utilize labview program to arrange scanning area and scanning accuracy (step-length).
Oscillograph shows the interference signal waveform of each point in scanning area in real time, the coordinate of each point of labview Program extraction, phase place and
Amplitude information.The information obtained is stored in file, finally utilizes matlab to carry out Data Post and obtains field pattern.
As it is shown in figure 1, the surface acoustic wave interference of light scanning probe system of the present invention, including signal generator, power amplifier, position
Move platform, heterodyne detection laser interferometer, low-noise amplifier, oscillograph and computer.The excitation that wherein signal generator produces
Signal, after power amplifier amplifies, acts on generation surface acoustic wave on sample.Heterodyne detection laser interferometer sends measures swashing of arm
Light is radiated at sample surfaces return and superposes generation interference signal with reference arm laser coherence, and the interference signal detected is through low noise amplification
Device demonstrates corresponding waveform after amplifying on oscillograph.Oscillograph and displacement platform and computer interconnection, and utilize labview journey
Sequence controls scanning pattern and the amplitude extracting interference signal waveform and phase information.
In the present embodiment, signal generator is the AFG3252C dual-channel type that Tektronix company produces, and bandwidth 240MHz is used
In exciting radiofrequency signal.Power amplifier uses the MWPA-000500M04 of microwave electron net, maximum input radio frequency signal power
For 10dBm, gain 36dB, peak power output 4W, it is placed in signal generator rear end, is used for amplifying surface acoustic wave and drives merit
Rate.Displacement platform is made up of the M405-CG piezoelectric scanning platform of Liang Kuai PI Corp., two pieces of platform overlapping placements up and down.Pass through
PI Corp.'s C-843 board can realize the driving to two block scan platforms, i.e. realizes two-dimensional scan.Wherein M405-CG piezoelectricity is swept
Retouch platform maximum moving range 50mm, minimum step 0.1 μm, maximum translational speed 0.7mm/s.Oscillograph is that LeCroy is public
The wavepro 725Zi of department, is used for display interference signal waveform in real time.Low-noise amplifier is produced by Mini Circuits company,
Model is ZFL-1000+, gain 17dB, is used for amplifying the interference signal of interferometer output.
Heterodyne detection laser interferometer is used for realizing measuring each point in scanning process, obtains the vibration letter of each point
Breath.Fig. 2 show the inside light path of the present embodiment heterodyne laser interferometer, including 532nm laser instrument (300mW), three and half
Wave plate, three polarization spectroscopes, two speculums, two quarter wave plates, condenser lens, photorefractive crystal and detector.Laser
The light that device sends is divided into transmission light and reflection light after half-wave plate and polarization spectroscope, and wherein transmission light (measurement arm) sequentially passes through
Speculum, polarization spectroscope, quarter wave plate and lens entrance return after reflection to sample surfaces.Reflection light (reference arm) is passed through
Incide on the photorefractive crystal of phase grating with the transmission light reflected through sample surfaces after half-wave plate and speculum, send out afterwards
Raw coherent superposition, photodetector detection the light intensity after interfering.Spot diameter is focused on 10 μm simultaneously, and with the use of height
The HCA-S-200M-SI type photodetector of sensitivity and fast-response speed can make the measurement upper limit reach 100MHz.
Fig. 3 show the two dimensional surface scanning of the present invention and realizes process schematic.Excite surface acoustic wave on the left side, incide right side
Plane domain, heterodyne laser interferometer detects the vibration information of each point, and displacement platform carries out two dimensional surface with certain precision and moves,
Thus can obtain the Vibration Condition in region, surface.Right figure represents the vibration in scanning process arrived sample surfaces specified point measurement
Information, it is possible to use the vibration information of these points measured draws sample surfaces field pattern.
Fig. 4 show the Vibration Condition data of the measured zone utilizing labview to extract, the 73MHz obtained after matlab processes
Surface acoustic wave phase place (a figure) and amplitude (b figure) distribution map under pumping signal.
Fig. 5 show the amplitude of each point corresponding with Fig. 4 and is multiplied by the field pattern that the cosine of phase place obtains, it can be observed that substantially
Plane wave form.
Claims (6)
1. a surface acoustic wave interference of light scanning probe system, including signal generator, power amplifier, displacement platform, heterodyne
Exploring laser light interferometer, low-noise amplifier, oscillograph and computer, it is characterised in that the pumping signal that signal generator produces
After power amplifier amplifies, the surface acting on the sample being positioned on displacement platform produces surface acoustic wave, heterodyne detection laser interference
The measurement arm laser of instrument is radiated at described sample surfaces and is reflected return, superposes generation interference signal, detection with reference arm laser coherence
To interference signal through low-noise amplifier amplify after on oscillograph, demonstrate corresponding waveform；Described oscillograph and displacement platform divide
It is not connected with computer, controls scanning pattern and the amplitude extracting interference signal waveform and phase information by computer；Described meter
Information data is carried out processing the surface acoustic wave field distribution information obtaining sample by calculation machine.
A kind of surface acoustic wave interference of light scanning probe system the most according to claim 1, it is characterised in that described displacement is put down
Platform is made up of about the two pieces overlapping scanning platforms placed, and two block scan platforms are driven by described computer by board, it is achieved
Two-dimensional scan.
A kind of surface acoustic wave interference of light scanning probe system the most according to claim 1, it is characterised in that described heterodyne swashs
Optical interferometer include laser instrument, three half-wave plates, three polarization spectroscopes, two speculums, two quarter wave plates, condenser lens,
Photorefractive crystal and detector；The light that laser instrument sends is divided into transmission light and reflection after the first half-wave plate and the first polarization spectroscope
Light, wherein transmission light sequentially passes through the first speculum, the second polarization spectroscope, the first quarter wave plate and condenser lens and incides sample
Surface returns after reflection, after the light beam of return is by passing through the 3rd half-wave plate and the second speculum with reflection light after the second half-wave plate
Light beam incides on photorefractive crystal together, occurs coherent superposition to produce interference signal, and interference signal is through the second quarter wave plate and the
Three polarization spectroscopes are by the light intensity after photodetector detection interference.
A kind of surface acoustic wave interference of light scanning probe system the most according to claim 3, it is characterised in that described Preset grating
Crystal uses phase grating.
5. according to a kind of surface acoustic wave interference of light scanning probe system one of Claims 1-4 Suo Shu, it is characterised in that institute
Stating signal generator is AFG3252C dual-channel type, carries a width of 240MHz.
6. according to a kind of surface acoustic wave interference of light scanning probe system one of Claims 1-4 Suo Shu, it is characterised in that institute
Stating computer utilizes labview program that the vibration information of point each on sample is carried out data extraction, the data of extraction include coordinate,
Phase and amplitude, final utilization matlab software carries out Data Post and obtains the field distribution information of scanning area.
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| CN201610548397.7A CN105928606B (en) | 2016-07-12 | 2016-07-12 | A kind of surface acoustic wave interference of light scanning probe system |
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| CN201610548397.7A CN105928606B (en) | 2016-07-12 | 2016-07-12 | A kind of surface acoustic wave interference of light scanning probe system |
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| CN105928606B CN105928606B (en) | 2019-04-16 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109341840A (en) * | 2018-10-10 | 2019-02-15 | 南开大学 | A kind of Visual retrieval device of surface acoustic wave and application |
| CN110376596A (en) * | 2019-07-18 | 2019-10-25 | 华中科技大学 | A kind of body surface three-dimensional coordinate measuring system and measurement method |
| CN114112009A (en) * | 2021-10-25 | 2022-03-01 | 南京大学 | Acoustic wave excitation device, detection system and field distribution measurement method for non-piezoelectric material |
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Cited By (4)
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| CN109341840A (en) * | 2018-10-10 | 2019-02-15 | 南开大学 | A kind of Visual retrieval device of surface acoustic wave and application |
| CN110376596A (en) * | 2019-07-18 | 2019-10-25 | 华中科技大学 | A kind of body surface three-dimensional coordinate measuring system and measurement method |
| CN110376596B (en) * | 2019-07-18 | 2021-05-18 | 华中科技大学 | Object surface three-dimensional coordinate measuring system and measuring method |
| CN114112009A (en) * | 2021-10-25 | 2022-03-01 | 南京大学 | Acoustic wave excitation device, detection system and field distribution measurement method for non-piezoelectric material |
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| CN105928606B (en) | 2019-04-16 |
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Effective date of registration: 20191224 Address after: 210046 Key Laboratory of Emerging Industries Incubation Base, Nanda Science Park, Weidi Road, Qixia District, Nanjing City, Jiangsu Province, 3 buildings and 7 floors Patentee after: Nanjing Academy of Photoacoustic Superstructure Materials Co., Ltd. Address before: 210093 Nanjing, Gulou District, Jiangsu, No. 22 Hankou Road Patentee before: Nanjing University |