CN110346042A - A kind of multisensor stray light elimination spectrometer - Google Patents
A kind of multisensor stray light elimination spectrometer Download PDFInfo
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- CN110346042A CN110346042A CN201910708195.8A CN201910708195A CN110346042A CN 110346042 A CN110346042 A CN 110346042A CN 201910708195 A CN201910708195 A CN 201910708195A CN 110346042 A CN110346042 A CN 110346042A
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0202—Mechanical elements; Supports for optical elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0262—Constructional arrangements for removing stray light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/04—Slit arrangements slit adjustment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
- G01J2003/2806—Array and filter array
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Abstract
A kind of multisensor stray light elimination spectrometer, including a y-type optical fiber, two identical entrance slits, concave grating, light insulation pad, two groups of identical linear array photoelectric sensors of model specification, several band resistance optical filters of processing in a wherein linear array photoelectric sensors, driving and signal processing module and tool housing composition.Tested light input y-type optical fiber is simultaneously divided into identical two beam of light intensity, concave grating is respectively radiated to by two entrance slits to be reflected into respectively again on two groups of photoelectric sensors, so that the photoelectric sensor equipped with bandreject filtering piece acquires stray light, another group of normal acquisition spectrum, the spectral signal after the signal difference that the output signal feeding difference channel of two sensors obtains two pieces of photoelectric sensors can be obtained to the removal noises such as stray light and dark current.The present invention realizes eliminating certainly for the noise signals such as stray light, can be applied to spectral signature, absorbance value detection etc. will be to the higher scene of spectral detection accuracy requirement.
Description
Technical field
The invention belongs to spectrometric instrument fields, and in particular to a kind of multisensor stray light elimination spectrometer.
Background technique
Spectral instrument has become the main measuring tool to structure of matter constituent analysis, is widely used in metallurgy, chemical industry,
Medical treatment, environment protection field, while being also military investigation, universe exploration, the essential remote sensing equipment such as resource and hydrology detection.
Technical indicator important and crucial in spectrometric instrument when stray light, main error when Shi Jinhang spectrum analysis
And noise source, it directly determines the sensitivity when reliability and detection when instrument works, and excessive stray light not only can
The accuracy for influencing spectral signal but will cover some weaker absorptions or radiation peak in spectrum, constrain the performance of instrument.
There are mainly two types of forms for influence of the stray light to spectrometer analysis: the first form is wavelength and the test of stray light
Wavelength is identical.It is to be shone directly on photoelectric converter test wavelength because deviateing normal optical path due to certain.
Most of this stray light be due to optical element, machine components reflection and diffusion caused by.Second of form refers to test
Light other than wavelength, deviateing normal light rate arrival photoelectric converter.It is usually to be drawn by certain defects of optical system
It rises.Adhere to as the surface of optical element is scratched dust granules, the Optical System Design of instrument is bad, machine components processing
It is bad etc. to cause.Stray light under normal conditions, the stray light including mainly above two stray light.
The mode that tradition eliminates stray light is generally done using the stray light that filter plate is one by one formed the light of different wave length
Measurement finally eliminates stray light using the empirical equation in host computer, and such method is not only not accurate enough, but also time-consuming and laborious, together
When processing speed it is slow, lacking real-time and adaptivity, another kind of method is such as arranged in instrument by physical means
Diaphragm and in instrument inner-wall spraying blacking needs design structure multiple although such methods can also inhibit stray light
Miscellaneous spuious Xanthophyll cycle diaphragm, and for non-visible lights band of light spectrometers such as current widely used infrared spectrometers, it is common black
Color coating is little to the stray light inhibiting effect of infrared spectrometer.And there is using face battle array in the mode of multisensor elimination stray light
Although the design of sensor also has good effect, the dedicated area array sensor of spectrometer is with respect to line array sensor price ten
Divide valuableness, and drive module design is also increasingly complex compared with linear array structure, shelling machine installation accuracy required very high, it is difficult to
It promotes.
Summary of the invention
To solve the above-mentioned problems, the present invention provides a kind of multisensor stray light elimination spectrometer, relatively tradition side
Case does not need especially complex working condition, and only in the case where slightly increasing instrument cost and complexity, it is miscellaneous to reach spectrometer
Purpose of the astigmatism from elimination.
A kind of multisensor stray light elimination spectrometer, the spectrometer includes entrance slit A, entrance slit B, concave surface light
Grid, linear array photoelectric sensors A, linear array photoelectric sensors B, light insulation pad, tool housing, driving and signal processing module, 1x2 formula Y
Type optical fiber composition;
Measured light is divided into the equal two-beam line of light intensity, and respectively from entrance slit A and entrance slit B by y-type optical fiber
Into instrument, it is respectively focused in linear array photoelectric sensors A and linear array photoelectric sensors B after dispersion occurs by concave grating,
Several band resistance optical filters along the arrangement of spatial distribution direction are installed in linear array photoelectric sensors A;
The output signal that linear array photoelectric sensors A and linear array photoelectric sensors B are generated passes after being sent into driving and signal processing module
Enter PC host computer.
Further, the entrance slit A and entrance slit B is two identical entrance slits, and two slits are several
What size is answered completely the same;
Mounting height of described two entrance slits on instrument respectively with linear array photoelectric sensors A and linear array photoelectric sensors B
It is consistent, and the seam length of slit is less than 2mm, slit width is 10um to 100um.
Further, the concave grating is holographic concave grating.
Further, the linear array photoelectric sensors A is identical with the model specification of linear array photoelectric sensors B, can be
CCD or photodiode linear array detector or cmos linear array detector or InGaAs linear array detector.
Further, two light propagation paths inside the spectrometer should be with holographic concave grating for referring to and
Complete mirror symmetry.
Further, the quantity of the band resistance optical filter is 10 to 20, and specification includes different band wave arrestment sections, institute
It states several bands and rents the measurement wave-length coverage that optical filter covers entire spectrometer.
Further, the light insulation pad, to be vertically mounted between linear array photoelectric sensors A and linear array photoelectric sensors B
One piece of opaque non-reflective material barrier, the light insulation pad length is wanted can completely isolated linear array photoelectric sensors A and linear array light
Electric transducer B, the light insulation pad width are 2mm to 5mm.
Further, the internal structure of the tool housing is symmetrical with plane where light insulation pad.
It further, include drive module and signal processing module in the driving and signal processing module;
The drive module can be the Timing driver module that FPGA or ARM single-chip microcontroller is core, be driven simultaneously with mode in parallel
Dynamic linear array photoelectric sensors A and linear array photoelectric sensors B;
The signal processing module can be the Analogical Electronics constituted using operational amplifier.
Further, the 1x2 formula y-type optical fiber be logical optical wavelength from 190nm to 2500nm using SMA905 interface
Silica fibre, the inner core diameter of optical fiber are 100um or 200um.
The present invention realizes the noise signals such as stray light under the premise of control instrument overall cost and complexity
From elimination, can be applied to spectral signature, absorbance value detection etc. will be to the higher scene of spectral detection accuracy requirement.
Detailed description of the invention
Fig. 1 is the instrument overall structure schematic diagram of spectrometer of the present invention.
Fig. 2 is the bandreject filtering piece arrangement exemplary graph of spectrometer of the present invention.
Fig. 3 is the 1x2 formula y-type optical fiber structure chart of spectrometer of the present invention.
Fig. 4 is 520nm to the 550nm band resistance section bandreject filtering piece characterisitic parameter figure that spectrometer of the present invention uses.
Fig. 5 is driving and the signal processing module block diagram of spectrometer of the present invention.
In figure, 1- entrance slit A, 2- entrance slit B, 3- concave grating, 4- linear array photoelectric sensors A, 4-1- band resistance filter
Mating plate, 4-2- band resistance optical filter, 4-3- band resistance optical filter, 5- linear array photoelectric sensors B, 6- light insulation pad, 7- tool housing, 8- drive
Dynamic and signal processing module, 8-1- drive module, 8-2- signal processing module, 9-1x2 formula y-type optical fiber, 9-1- bifurcated beam, 9-2-
Bifurcated beam.
Specific embodiment
Technical solution of the present invention is described in further detail with reference to the accompanying drawings of the specification.
A kind of multisensor stray light elimination spectrometer, the spectrometer includes entrance slit A1, entrance slit B2, concave surface
Grating 3, linear array photoelectric sensors A 4, linear array photoelectric sensors B5, light insulation pad 6, tool housing 7, driving and signal processing module
8,1x2 formula y-type optical fibers 9 composition.
Measured light 10 is divided into the equal two-beam line of light intensity by y-type optical fiber 9, and respectively from entrance slit A1 and
Entrance slit B2 enters instrument, is respectively focused on linear array photoelectric sensors A 4 and linear array light after dispersion occurs by concave grating 3
On electric transducer B5, several band resistance optical filters along the arrangement of spatial distribution direction are installed in linear array photoelectric sensors A 4,
Bandreject filtering piece is covered on spectra collection position corresponding to its stopband.Linear array photoelectric sensors B5 then normal acquisition spectrum.
Measured light 10 by 1x2 formula y-type optical fiber 9 enter instrument, the 1x2 formula y-type optical fiber 9 be logical optical wavelength from
The silica fibre using SMA905 interface of 190nm to 2500nm, the inner core diameter of optical fiber are 100um or 200um.Wherein bifurcated
Physical relationship such as Fig. 3, D1 of beam 9-1 and 9-2 are the inner core diameter of optical fiber at 9-1, and D2 is the inner core diameter of optical fiber at 9-2,1x2
D1 is equal to D2 in formula optical fiber, is 100um or 200um.Light enters instrument from entrance slit A1 and entrance slit B2 respectively, passes through
Concave grating 3 is respectively focused on A4 in linear array photoelectric sensors B5 and linear array photoelectric sensors, linear array photoelectric transfer after dispersion occurs
Several band resistance optical filters along the arrangement of spatial distribution direction are installed, such as 4-1,4-2,4-3 on sensor A.
By taking spectra collection range is near ultraviolet-visible-near-infrared spectrum instrument of 310nm to 910nm as an example, as shown in Figure 2
20 band resistance optical filters along the arrangement of spatial distribution direction are installed, with the band occurred in Fig. 2 in linear array photoelectric sensors A 4
Illustrate for resistance optical filter, the band wave arrestment section with resistance optical filter 4-1 is 310nm to 340nm, is arranged in corresponding spectra collection range
For the position of 310nm to 340nm;Band wave arrestment section with resistance optical filter 4-2 is 520nm to 550nm, is arranged in corresponding spectra collection
Range is the position of 520nm to 550nm;Band wave arrestment section with resistance optical filter 4-3 is 850nm to 880nm, is arranged in corresponding spectrum
Acquisition range is the position of 850nm to 880nm;Fig. 4 is 520nm to the 550nm of certain company production with resistance section bandreject filtering piece
Technical parameter, wherein L1 line represents light passing rate.
Linear array photoelectric sensors A 4 is equipped with bandreject filtering piece to acquire stray light, linear array photoelectric sensors B5 normal acquisition light
The signal difference that the output signal feeding difference channel of two sensors obtains two pieces of photoelectric sensors can be obtained and cleans by spectrum
Spectral signal after the noises such as astigmatism and dark current.
The output signal that linear array photoelectric sensors A 4 and linear array photoelectric sensors B5 are generated is sent into driving and signal processing mould
PC host computer is passed to after block 8.As Fig. 5 drive module 8-1 drives linear array photoelectric sensors A 4 and linear array simultaneously in parallel
The output end of photoelectric sensor B5, linear array photoelectric sensors A 4 and linear array photoelectric sensors B5 access signal processing module 8-2, and
By signal processing module 8-2 differential amplification, PC host computer is passed to after being converted to digital signal using AD conversion module.
The entrance slit A1 and entrance slit B2 is two identical entrance slits, and two slit geometric dimensions are answered
It is completely the same.
Mounting height of described two entrance slits on instrument respectively with linear array photoelectric sensors A 4 and linear array photoelectric transfer
Sensor B5 is consistent, and the seam length of slit is less than 2mm, and slit width is 10um to 100um.
The concave grating 3 is holographic concave grating.
The linear array photoelectric sensors A 4 is identical with the model specification of linear array photoelectric sensors B5, can be CCD or light
Electric diode linear array detector or cmos linear array detector or InGaAs linear array detector.
Two light propagation paths inside the spectrometer should be with holographic concave grating for referring to and complete mirror image
Symmetrically, two groups of entrance slit A1 and entrance slit B2 and linear array photoelectric sensors A 4 and linear array photoelectric sensors in internal structure
B5 is using holographic 6 place plane of light insulation pad as symmetrical structure, so that all kinds of light that can be obtained in two groups of linear array photoelectric sensors
It is distributed by force identical.
The light insulation pad 6, for one piece be vertically mounted between linear array photoelectric sensors A 4 and linear array photoelectric sensors B5
Opaque non-reflective material barrier, the light insulation pad length is wanted can completely isolated linear array photoelectric sensors A 4 and linear array photoelectric sensing
Device B5, the light insulation pad width are 2mm to 5mm.
It include drive module 8-1 and signal processing module 8-2 in the driving and signal processing module 8.The driving mould
Block 8-1 can be the Timing driver module that FPGA or ARM single-chip microcontroller is core, drive linear array photoelectric transfer simultaneously with mode in parallel
Sensor A4 and linear array photoelectric sensors B5.The signal processing module 8-2 can be the simulation electricity constituted using operational amplifier
Sub-circuit.
The foregoing is merely better embodiment of the invention, protection scope of the present invention is not with above embodiment
Limit, as long as those of ordinary skill in the art's equivalent modification or variation made by disclosure according to the present invention, should all be included in power
In the protection scope recorded in sharp claim.
Claims (10)
1. a kind of multisensor stray light eliminates spectrometer, it is characterised in that:
The spectrometer includes entrance slit A, entrance slit B, concave grating, linear array photoelectric sensors A, linear array photoelectric sensors
B, light insulation pad, tool housing, driving and signal processing module, 1x2 formula y-type optical fiber composition;
Measured light is divided into the equal two-beam line of light intensity, and respectively from entrance slit A and entrance slit B by y-type optical fiber
Into instrument, it is respectively focused in linear array photoelectric sensors A and linear array photoelectric sensors B after dispersion occurs by concave grating,
Several band resistance optical filters along the arrangement of spatial distribution direction are installed in linear array photoelectric sensors A;
The output signal that linear array photoelectric sensors A and linear array photoelectric sensors B are generated passes after being sent into driving and signal processing module
Enter PC host computer.
2. a kind of multisensor stray light according to claim 1 eliminates spectrometer, it is characterised in that: the entrance slit
A and entrance slit B is two identical entrance slits, and two slit geometric dimensions are answered completely the same;
Mounting height of described two entrance slits on instrument respectively with linear array photoelectric sensors A and linear array photoelectric sensors B
It is consistent, and the seam length of slit is less than 2mm, slit width is 10um to 100um.
3. a kind of multisensor stray light according to claim 1 eliminates spectrometer, it is characterised in that: the concave grating
For holographic concave grating.
4. a kind of multisensor stray light according to claim 1 eliminates spectrometer, it is characterised in that: the linear array photoelectricity
Sensors A is identical with the model specification of linear array photoelectric sensors B, can for CCD or photodiode linear array detector or
Cmos linear array detector or InGaAs linear array detector.
5. a kind of multisensor stray light according to claim 1 eliminates spectrometer, it is characterised in that: in the spectrometer
Two light propagation paths in portion should be with holographic concave grating for referring to and completely mirror symmetry.
6. a kind of multisensor stray light according to claim 1 eliminates spectrometer, it is characterised in that: the band resistance filters
The quantity of piece is 10 to 20, and specification includes different band wave arrestment section, and several bands rent optical filter and cover entire spectrometer
Measurement wave-length coverage.
7. a kind of multisensor stray light according to claim 1 eliminates spectrometer, it is characterised in that: the light insulation pad,
For one piece of opaque non-reflective material barrier being vertically mounted between linear array photoelectric sensors A and linear array photoelectric sensors B, institute
It states light insulation pad length and wants the completely isolated linear array photoelectric sensors A of energy and linear array photoelectric sensors B, the light insulation pad width is 2mm
To 5mm.
8. a kind of multisensor stray light according to claim 1 eliminates spectrometer, it is characterised in that: the tool housing
Internal structure be symmetrical with plane where light insulation pad.
9. a kind of multisensor stray light according to claim 1 eliminates spectrometer, it is characterised in that: the driving and letter
It include drive module and signal processing module in number processing module;
The drive module can be the Timing driver module that FPGA or ARM single-chip microcontroller is core, be driven simultaneously with mode in parallel
Dynamic linear array photoelectric sensors A and linear array photoelectric sensors B;
The signal processing module can be the Analogical Electronics constituted using operational amplifier.
10. a kind of multisensor stray light according to claim 1 eliminates spectrometer, it is characterised in that: the 1x2 formula Y
Type optical fiber is silica fibre using SMA905 interface of the logical optical wavelength from 190nm to 2500nm, and the inner core diameter of optical fiber is
100um or 200um.
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WO2023193287A1 (en) * | 2022-04-06 | 2023-10-12 | 杭州佰腾电子科技有限公司 | Dual-optical-path spectrometer, color measurement apparatus, and calibration method |
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CN103983354A (en) * | 2014-04-30 | 2014-08-13 | 中国科学院长春光学精密机械与物理研究所 | Double-beam splitting system |
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Patent Citations (4)
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WO2002097409A1 (en) * | 2001-05-31 | 2002-12-05 | Rap.Id Particle Systems Gmbh | Method for the automated recognition, spectroscopic analysis and identification of particles |
CN101813519A (en) * | 2010-02-02 | 2010-08-25 | 杭州远方光电信息有限公司 | Stray light correction method of spectrograph |
CN102175324A (en) * | 2011-01-26 | 2011-09-07 | 中国科学院长春光学精密机械与物理研究所 | Multichannel low-stray-light spectrograph based on area array detector |
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WO2023193287A1 (en) * | 2022-04-06 | 2023-10-12 | 杭州佰腾电子科技有限公司 | Dual-optical-path spectrometer, color measurement apparatus, and calibration method |
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