CN110345157A - A kind of more drivings surveys Coupled Rigid-flexible complex controll experiment porch - Google Patents
A kind of more drivings surveys Coupled Rigid-flexible complex controll experiment porch Download PDFInfo
- Publication number
- CN110345157A CN110345157A CN201910514884.5A CN201910514884A CN110345157A CN 110345157 A CN110345157 A CN 110345157A CN 201910514884 A CN201910514884 A CN 201910514884A CN 110345157 A CN110345157 A CN 110345157A
- Authority
- CN
- China
- Prior art keywords
- platform
- removably mounted
- driver
- rigid support
- rigid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
A kind of more drivings of the invention surveys Coupled Rigid-flexible complex controll experiment porch, which includes: main platform body, sliding block, platform base, the linear guide being fixed on the platform base, the first driver, the first displacement detecting unit, the second driver, second displacement detection unit;The main platform body includes: rigid support platform, nucleus movement platform and flexible hinge chain group, and the flexible hinge chain group connects the rigid support platform and the nucleus movement platform;First driver is removably mounted on the nucleus movement platform;First displacement detecting unit is removably mounted on the nucleus movement platform;Second driver is removably mounted on the rigid support platform;The second displacement detection unit is removably mounted on the rigid support platform.This can save cost and space by disassembly to driver and displacement detecting element and assembly come the effect for realizing different Rigid-flexible Coupled Motion platforms.
Description
Technical field
The present invention relates to high-accuracy motion platform technical fields, and more survey Coupled Rigid-flexibles are driven more particularly, to one kind more
Complex controll experiment porch.
Background technique
Nowadays the research of flexible hinge platform is more and more extensive, in high speed and precision Sports Field, Coupled Rigid-flexible platform wound
Newly the high precision displacement of micromotion platform is combined with the movement of the large travel high-speed of mechanical guide, for point precision positioning, only
It needs to start a little and target point precise displacement.Wherein, using lower-cost single drive scheme, hard and soft adaptive switching control is realized
System;Overall process high speed and precision is moved, rigid motion is realized by the separation of motion error signal using double drive scheme
With the grading compensation of elastic vibration deviation.However, usual control experiment porch can be only done a kind of driving measurement method
Experiment, this has resulted in the increase of the increase of experimental cost, lab space.
Summary of the invention
The present invention in order to overcome at least one of the drawbacks of the prior art described above, provides one kind and drives more survey Coupled Rigid-flexibles more
Complex controll experiment porch, the platform pass through disassembly and the assembly carried out to driver and measuring device, and it is in parallel that double drives can be obtained
Macro micro- compound platform, the double feedback Coupled Rigid-flexible platforms of single drive, double drive single-lens reflex cameras feedback Coupled Rigid-flexible platform, the single measurement Coupled Rigid-flexible of single drive
Four kinds of Coupled Rigid-flexible platforms of platform;Macro platform and microfluidic platform are locked by connecting plate, platform becomes rigid platfor.The present invention adopts
Technical solution is as follows.
A kind of more drivings surveys Coupled Rigid-flexible complex controll experiment porch, and more drivings surveys Coupled Rigid-flexible complex controll
Experiment porch includes: main platform body, sliding block, platform base, the linear guide being fixed on the platform base, the first driving
Device, the first displacement detecting unit, the second driver, second displacement detection unit;The main platform body passes through the guide rail slide block
It is connected with the linear guide;The main platform body includes: rigid support platform, nucleus movement platform and flexible hinge chain group, institute
It states flexible hinge chain group and connects the rigid support platform and the nucleus movement platform;First driver is removably installed
On the nucleus movement platform;First displacement detecting unit is removably mounted on the nucleus movement platform;Institute
The second driver is stated to be removably mounted on the rigid support platform;The second displacement detection unit is removably installed
On the rigid support platform.
Further, first driver is removably mounted on the nucleus movement platform by bolt, and described
One displacement detecting unit is removably mounted on the nucleus movement platform by bolt, and second driver passes through bolt
It is removably mounted on the rigid support platform, the second displacement detection unit is removably mounted on institute by bolt
It states on rigid support platform.
Further, it further includes connecting plate that Coupled Rigid-flexible complex controll experiment porch is surveyed in more drivings more;The connection
Plate is removably mounted on the rigid support platform and the nucleus movement platform, connects the rigid support platform and institute
State nucleus movement platform.
Coupled Rigid-flexible complex controll experiment porch are surveyed in the more drivings of one kind more, which is characterized in that the more surveys of mostly driving are hard and soft
Coupling complex controll experiment porch includes: that main platform body, sliding block, platform base, the straight line being fixed on the platform base are led
Rail, the first driver, the first displacement detecting unit, second displacement detection unit;
The main platform body is connected by the guide rail slide block with the linear guide;
The main platform body includes: rigid support platform, nucleus movement platform and flexible hinge chain group, the flexible hinge chain group
Connect the rigid support platform and the nucleus movement platform;
First driver is removably mounted on the nucleus movement platform;
First displacement detecting unit is removably mounted on the nucleus movement platform;
The second displacement detection unit is removably mounted on the rigid support platform.
A kind of more drivings surveys Coupled Rigid-flexible complex controll experiment porch, and more drivings surveys Coupled Rigid-flexible complex controll
Experiment porch includes: main platform body, sliding block, platform base, the linear guide being fixed on the platform base, the first driving
Device, the first displacement detecting unit, the second driver;The main platform body passes through the guide rail slide block and the linear guide phase
Even;The main platform body includes: rigid support platform, nucleus movement platform and flexible hinge chain group, the flexible hinge chain group connection
The rigid support platform and the nucleus movement platform;It is flat that first driver is removably mounted on the nucleus movement
On platform;First displacement detecting unit is removably mounted on the nucleus movement platform;Second driver is removable
It is mounted on unloading on the rigid support platform.
A kind of more drivings surveys Coupled Rigid-flexible complex controll experiment porch, and more drivings surveys Coupled Rigid-flexible complex controll
Experiment porch includes: main platform body, sliding block, platform base, the linear guide being fixed on the platform base, the first driving
Device, the second driver, second displacement detection unit;The main platform body passes through the guide rail slide block and the linear guide phase
Even;The main platform body includes: rigid support platform, nucleus movement platform and flexible hinge chain group, the flexible hinge chain group connection
The rigid support platform and the nucleus movement platform;It is flat that first driver is removably mounted on the nucleus movement
On platform;Second driver is removably mounted on the rigid support platform;The second displacement detection unit is removable
It is mounted on unloading on the rigid support platform.
A kind of more drivings surveys Coupled Rigid-flexible complex controll experiment porch, and more drivings surveys Coupled Rigid-flexible complex controll
Experiment porch includes: main platform body, sliding block, platform base, the linear guide being fixed on the platform base, the first displacement inspection
Survey unit, the second driver, second displacement detection unit;The main platform body passes through the guide rail slide block and the linear guide
It is connected;The main platform body includes: rigid support platform, nucleus movement platform and flexible hinge chain group, and the flexible hinge chain group connects
Connect the rigid support platform and the nucleus movement platform;First displacement detecting unit is removably mounted on the core
On heart motion platform;Second driver is removably mounted on the rigid support platform;The second displacement detection
Unit is removably mounted on the rigid support platform.
Further, it further includes connecting plate that Coupled Rigid-flexible complex controll experiment porch is surveyed in more drivings more;The connection
Plate is removably mounted on the rigid support platform and the nucleus movement platform, connects the rigid support platform and institute
State nucleus movement platform.
Compared with prior art, beneficial effect is:
1. combined type drives more survey Coupled Rigid-flexible complex controll experiment porch more can be by drive by Design of Mechanical Structure
Disassembly and the assembly of device and displacement detecting element are moved to realize the effect of four kinds of Rigid-flexible Coupled Motion platforms, the platform is in very great Cheng
Experimental cost has been saved on degree, has saved lab space.
2. combined type drives the drivers for surveying Coupled Rigid-flexible complex controll experiment porch more more and displacement detecting element is to pass through
Bolt is connect with platform, convenient for disassembly and assembly, convenient for the transformation between four kinds of platforms.
3. on the basis of Coupled Rigid-flexible complex controll experiment porch, by connecting plate by main platform body nucleus movement platform
It is connect with rigid support platform, constitutes rigidity driving flexible measuring platform, can be used for doing comparative experiments with Coupled Rigid-flexible platform, make
Platform is utilized and is maximized.
Detailed description of the invention
Fig. 1 is overall structure of the present invention.
Fig. 2 is main platform body schematic diagram of the present invention.
Fig. 3 is schematic diagram when motion platform measures for double drive is double.
Fig. 4 is sectional cross section schematic diagram when motion platform measures for double drive is double.
Fig. 5 is schematic diagram when motion platform measures for double drive list.
Fig. 6 is sectional cross section schematic diagram when motion platform measures for double drive list.
Fig. 7 is schematic diagram when motion platform measures for single driving is double.
Fig. 8 is sectional cross section schematic diagram when motion platform measures for single driving is double.
Fig. 9 is schematic diagram when motion platform measures for single driving is single.
Figure 10 is sectional cross section schematic diagram when motion platform measures for single driving is single.
Figure 11 is schematic diagram when motion platform measures for the single driving of rigidity is double.
Figure 12 is sectional cross section schematic diagram when motion platform measures for the single driving of rigidity is double.
Figure 13 is schematic diagram when motion platform measures for the single driving of rigidity is single.
Figure 14 is sectional cross section schematic diagram when motion platform measures for the single driving of rigidity is single.
Figure 15 is rigid platfor main body schematic diagram.
Specific embodiment
The attached figures are only used for illustrative purposes and cannot be understood as limitating the patent;In order to better illustrate this embodiment, attached
Scheme certain components to have omission, zoom in or out, does not represent the size of actual product;To those skilled in the art,
The omitting of some known structures and their instructions in the attached drawings are understandable.Being given for example only property of positional relationship is described in attached drawing
Illustrate, should not be understood as the limitation to this patent.
Include: main platform body 1, lead as shown in Figure 1, Coupled Rigid-flexible complex controll experiment porch is surveyed in more drivings of the invention more
Rail sliding block 3, platform base 2, the linear guide 4 being fixed on the platform base, main platform body 1 is by guide rail slide block 3 and directly
Line guide rail 4 is connected.As shown in Fig. 2, main platform body 1 includes: rigid support platform 101, nucleus movement platform 102 and flexible hinge
Group 110, flexible hinge chain group 110 connect rigid support platform 102 and the nucleus movement platform 101.
As shown in Figure 3,4, which surveys Coupled Rigid-flexible complex controll experiment porch more further include: the first driver 104,
First displacement detecting unit 103, the second driver 106 and second displacement detection unit 105.First driver 104 is removably
It is mounted on nucleus movement platform 102, driving nucleus movement platform 102 moves.First displacement detecting unit 103 is removably pacified
On nucleus movement platform 102, for reading the displacement of nucleus movement platform 102.Second driver 106 is removably installed
On rigid support platform 101, driving rigid support platform 101 is moved.Second displacement detecting element 105 is removably mounted on
On rigid support platform 101, for reading the displacement of rigid support platform 101.Preferably, above detachable structure is spiral shell
Bolt mounting structure.
Since the second driver 106 and the second displacement detection of Coupled Rigid-flexible complex controll experiment porch are surveyed in more drivings more
Unit 105 is dismountable structure, can pass through disassembly and the dress to the second driver 106 and second displacement detection unit 105
Match to realize that (the double measuring tables of double drive, double drive list measuring table, list drive double measurements flat to four kinds of Rigid-flexible Coupled Motion platforms
Platform and single drive single measuring table) effect.
As shown in Figure 5,6, second displacement inspection is removed from the double measurement Rigid-flexible Coupled Motion platforms of double drive shown in Fig. 3,4
Unit 105 is surveyed, the Rigid-flexible Coupled Motion platform of double drive list measurement is formd.
As shown in Figure 7,8, the second driver is removed from the double measurement Rigid-flexible Coupled Motion platforms of double drive shown in Fig. 3,4
106, form the Rigid-flexible Coupled Motion platform of the double measurements of single driving.
As shown in Figures 9 and 10, the second driving is removed from the double measurement Rigid-flexible Coupled Motion platforms of double drive shown in Fig. 3,4
Device 106 and second displacement detection unit 105 form the Rigid-flexible Coupled Motion platform for singly driving and singly measuring.
As shown in Figure 11,12, the first driving is removed from the double measurement Rigid-flexible Coupled Motion platforms of double drive shown in Fig. 3,4
Device 104 forms the Rigid-flexible Coupled Motion platform of the double measurements of the single driving of rigidity.
As shown in Figure 13,14, the first driving is removed from the double measurement Rigid-flexible Coupled Motion platforms of double drive shown in Fig. 3,4
Device 104 and second displacement detection unit 105 form rigidity and singly drive the Rigid-flexible Coupled Motion platform singly measured.
It is, of course, understood that it is not only that Coupled Rigid-flexible complex controll experiment porch is surveyed in more drivings of the invention more
It is to remove corresponding driver and/or displacement detecting unit from the double measurement Rigid-flexible Coupled Motion platforms of double drive, it can also be from
It originally is that list driving pair measures Rigid-flexible Coupled Motion platforms and script is removed in double drive list measurement Rigid-flexible Coupled Motion platform
Corresponding driver and/or displacement detecting unit, to play the effect of the transformation between various platforms.
As shown in figure 15, it further includes connecting plate 5 which surveys Coupled Rigid-flexible complex controll experiment porch more;The connection
Plate is removably mounted on the rigid support platform and the nucleus movement platform, connects the rigid support platform and institute
Nucleus movement platform is stated, stiff experiment platform is constituted.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, all should be considered as described in this specification.
Obviously, the above embodiment of the present invention be only to clearly illustrate example of the present invention, and not be pair
The restriction of embodiments of the present invention.For those of ordinary skill in the art, may be used also on the basis of the above description
To make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.It is all this
Made any modifications, equivalent replacements, and improvements etc., should be included in the claims in the present invention within the spirit and principle of invention
Protection scope within.
Claims (8)
1. a kind of more drivings surveys Coupled Rigid-flexible complex controll experiment porch, which is characterized in that more drivings surveys hard and soft coupling
Close complex controll experiment porch include: main platform body, sliding block, platform base, the linear guide being fixed on the platform base,
First driver, the first displacement detecting unit, the second driver, second displacement detection unit;
The main platform body is connected by the guide rail slide block with the linear guide;
The main platform body includes: rigid support platform, nucleus movement platform and flexible hinge chain group, the flexible hinge chain group connection
The rigid support platform and the nucleus movement platform;
First driver is removably mounted on the nucleus movement platform;
First displacement detecting unit is removably mounted on the nucleus movement platform;
Second driver is removably mounted on the rigid support platform;
The second displacement detection unit is removably mounted on the rigid support platform.
2. more driving according to claim 1 surveys Coupled Rigid-flexible complex controll experiment porch, which is characterized in that described the
One driver is removably mounted on the nucleus movement platform by bolt,
First displacement detecting unit is removably mounted on the nucleus movement platform by bolt,
Second driver is removably mounted on the rigid support platform by bolt,
The second displacement detection unit is removably mounted on the rigid support platform by bolt.
3. more drivings according to claim 1 or 2 surveys Coupled Rigid-flexible complex controll experiment porch, which is characterized in that institute
It further includes connecting plate that Coupled Rigid-flexible complex controll experiment porch is surveyed in the more drivings stated more;
The connecting plate is removably mounted on the rigid support platform and the nucleus movement platform, connects the rigidity
Support platform and the nucleus movement platform.
4. a kind of more drivings surveys Coupled Rigid-flexible complex controll experiment porch, which is characterized in that more drivings surveys hard and soft coupling
Close complex controll experiment porch include: main platform body, sliding block, platform base, the linear guide being fixed on the platform base,
First driver, the first displacement detecting unit, second displacement detection unit;
The main platform body is connected by the guide rail slide block with the linear guide;
The main platform body includes: rigid support platform, nucleus movement platform and flexible hinge chain group, the flexible hinge chain group connection
The rigid support platform and the nucleus movement platform;
First driver is removably mounted on the nucleus movement platform;
First displacement detecting unit is removably mounted on the nucleus movement platform;
The second displacement detection unit is removably mounted on the rigid support platform.
5. a kind of more drivings surveys Coupled Rigid-flexible complex controll experiment porch, which is characterized in that more drivings surveys hard and soft coupling
Close complex controll experiment porch include: main platform body, sliding block, platform base, the linear guide being fixed on the platform base,
First driver, the first displacement detecting unit, the second driver;
The main platform body is connected by the guide rail slide block with the linear guide;
The main platform body includes: rigid support platform, nucleus movement platform and flexible hinge chain group, the flexible hinge chain group connection
The rigid support platform and the nucleus movement platform;
First driver is removably mounted on the nucleus movement platform;
First displacement detecting unit is removably mounted on the nucleus movement platform;
Second driver is removably mounted on the rigid support platform.
6. a kind of more drivings surveys Coupled Rigid-flexible complex controll experiment porch, which is characterized in that more drivings surveys hard and soft coupling
Close complex controll experiment porch include: main platform body, sliding block, platform base, the linear guide being fixed on the platform base,
First driver, the second driver, second displacement detection unit;
The main platform body is connected by the guide rail slide block with the linear guide;
The main platform body includes: rigid support platform, nucleus movement platform and flexible hinge chain group, the flexible hinge chain group connection
The rigid support platform and the nucleus movement platform;
First driver is removably mounted on the nucleus movement platform;
Second driver is removably mounted on the rigid support platform;
The second displacement detection unit is removably mounted on the rigid support platform.
7. a kind of more drivings surveys Coupled Rigid-flexible complex controll experiment porch, which is characterized in that more drivings surveys hard and soft coupling
Close complex controll experiment porch include: main platform body, sliding block, platform base, the linear guide being fixed on the platform base,
First displacement detecting unit, the second driver, second displacement detection unit;
The main platform body is connected by the guide rail slide block with the linear guide;
The main platform body includes: rigid support platform, nucleus movement platform and flexible hinge chain group, the flexible hinge chain group connection
The rigid support platform and the nucleus movement platform;
First displacement detecting unit is removably mounted on the nucleus movement platform;
Second driver is removably mounted on the rigid support platform;
The second displacement detection unit is removably mounted on the rigid support platform.
8. surveying Coupled Rigid-flexible complex controll experiment porch according to the described in any item more drivings of claim 4-7, feature exists
In it further includes connecting plate that Coupled Rigid-flexible complex controll experiment porch is surveyed in more drivings more;
The connecting plate is removably mounted on the rigid support platform and the nucleus movement platform, connects the rigidity
Support platform and the nucleus movement platform.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910514884.5A CN110345157A (en) | 2019-06-14 | 2019-06-14 | A kind of more drivings surveys Coupled Rigid-flexible complex controll experiment porch |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910514884.5A CN110345157A (en) | 2019-06-14 | 2019-06-14 | A kind of more drivings surveys Coupled Rigid-flexible complex controll experiment porch |
Publications (1)
Publication Number | Publication Date |
---|---|
CN110345157A true CN110345157A (en) | 2019-10-18 |
Family
ID=68182039
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910514884.5A Pending CN110345157A (en) | 2019-06-14 | 2019-06-14 | A kind of more drivings surveys Coupled Rigid-flexible complex controll experiment porch |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN110345157A (en) |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0747165A1 (en) * | 1995-06-07 | 1996-12-11 | BIESSE S.p.A. | A multitrack machine tool for working panels |
JP2004284000A (en) * | 2003-03-25 | 2004-10-14 | Sumitomo Heavy Ind Ltd | Straightness control stage |
CN203092144U (en) * | 2013-03-01 | 2013-07-31 | 广东工业大学 | Coaxial macro-micro composite linear motion platform device |
CN104440343A (en) * | 2014-11-26 | 2015-03-25 | 广东工业大学 | Co-stator double-drive macro and micro integration high-speed precision movement one-dimensional platform for linear motor |
CN106002312A (en) * | 2016-06-29 | 2016-10-12 | 广东工业大学 | Single-driven rigid-flexible coupled precision motion platform as well as realizing method and application thereof |
CN107705822A (en) * | 2017-09-26 | 2018-02-16 | 广东工业大学 | A kind of big carrying flexible hinge guiding mechanism |
CN109243520A (en) * | 2018-10-23 | 2019-01-18 | 安徽理工大学 | The macro micro- double drive precisely locating platform of one kind and its control method |
CN109465652A (en) * | 2018-11-30 | 2019-03-15 | 广东工业大学 | Contact rigidity switching device and the Rigid-flexible Coupled Motion platform and method for using it |
CN109613824A (en) * | 2018-12-13 | 2019-04-12 | 广东工业大学 | A kind of the Rigid-flexible Coupled Motion platform and control method of ball-screw driving |
-
2019
- 2019-06-14 CN CN201910514884.5A patent/CN110345157A/en active Pending
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0747165A1 (en) * | 1995-06-07 | 1996-12-11 | BIESSE S.p.A. | A multitrack machine tool for working panels |
JP2004284000A (en) * | 2003-03-25 | 2004-10-14 | Sumitomo Heavy Ind Ltd | Straightness control stage |
CN203092144U (en) * | 2013-03-01 | 2013-07-31 | 广东工业大学 | Coaxial macro-micro composite linear motion platform device |
CN104440343A (en) * | 2014-11-26 | 2015-03-25 | 广东工业大学 | Co-stator double-drive macro and micro integration high-speed precision movement one-dimensional platform for linear motor |
CN106002312A (en) * | 2016-06-29 | 2016-10-12 | 广东工业大学 | Single-driven rigid-flexible coupled precision motion platform as well as realizing method and application thereof |
CN107705822A (en) * | 2017-09-26 | 2018-02-16 | 广东工业大学 | A kind of big carrying flexible hinge guiding mechanism |
CN109243520A (en) * | 2018-10-23 | 2019-01-18 | 安徽理工大学 | The macro micro- double drive precisely locating platform of one kind and its control method |
CN109465652A (en) * | 2018-11-30 | 2019-03-15 | 广东工业大学 | Contact rigidity switching device and the Rigid-flexible Coupled Motion platform and method for using it |
CN109613824A (en) * | 2018-12-13 | 2019-04-12 | 广东工业大学 | A kind of the Rigid-flexible Coupled Motion platform and control method of ball-screw driving |
Non-Patent Citations (1)
Title |
---|
白有盾等: "刚柔分级并联驱动宏微复合运动平台设计", 《中国科学:技术科学》 * |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9254992B2 (en) | Method of making a MEMS gyroscope having a magnetic source and a magnetic sensing mechanism | |
US20150033854A1 (en) | Mems gyroscope | |
CN110281036A (en) | A kind of single driving Rigid-flexible Coupled Motion platform of double measurements | |
JP5798397B2 (en) | Electromagnetic induction type absolute position measurement encoder | |
CN104094507A (en) | Linear motor having a plurality of sensor units and a modular stator structure | |
CN100535765C (en) | 6-freedom micro-motion platform capable of isolating exterior vibration | |
US9969606B2 (en) | Microelectromechanical structure and device | |
CN103267210A (en) | Six-freedom-degree parallel pointing platform | |
CN109093571B (en) | Compact two-dimensional nanometer servo platform | |
CN103400603B (en) | In parallel pair of anti-torsion drives mobile decoupling servo platform | |
KR101677955B1 (en) | Electromechanic microsensor | |
CN101745921B (en) | Human eye and human neck simulating vision device | |
CN202448118U (en) | Two-translation long-stroke parallel precise location platform | |
CN107328366B (en) | Two-dimensional nano flexible motion platform and grating measurement method thereof | |
CN110345157A (en) | A kind of more drivings surveys Coupled Rigid-flexible complex controll experiment porch | |
CN1109583A (en) | Instrument for measuring length or angles | |
CN117268361A (en) | MEMS single-axis gyroscope | |
CN103604028A (en) | Superspeed precision positioning tandem one-dimensional platform | |
CN101846487A (en) | Magnetic array position sensing device and positioning method thereof | |
CN104753391A (en) | Piezoelectric driving/locking reciprocating step driving platform and method | |
CN100406850C (en) | Angle detection device and scan-type actuator using the same | |
US7994688B2 (en) | Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution | |
CN102288173B (en) | Static-driving capacitance-detection micro solid modal gyroscope | |
CN205526371U (en) | Linear transmission module piece and transmission module group that constitutes thereof | |
EP3074776B1 (en) | High bandwidth linear flexure bearing |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
RJ01 | Rejection of invention patent application after publication | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20191018 |