CN110270493B - Ultrasonic transducer, acoustic impedance matching layer and preparation method thereof - Google Patents

Ultrasonic transducer, acoustic impedance matching layer and preparation method thereof Download PDF

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CN110270493B
CN110270493B CN201910467188.3A CN201910467188A CN110270493B CN 110270493 B CN110270493 B CN 110270493B CN 201910467188 A CN201910467188 A CN 201910467188A CN 110270493 B CN110270493 B CN 110270493B
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matching layer
magnetic particles
acoustic impedance
low
density material
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CN110270493A (en
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任福杰
鹿祥鹏
徐璐
杨东升
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Jurong Medical Technology Hangzhou Co ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/16Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/162Selection of materials
    • G10K11/165Particles in a matrix

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)

Abstract

The invention discloses an ultrasonic transducer, an acoustic impedance matching layer and a preparation method thereof. The acoustic impedance matching layer comprises magnetic particles coated with a low-density material layer and an adhesive, wherein the magnetic particles coated with the low-density material layer are distributed in the adhesive in a gradient mode according to different acoustic impedances of the magnetic particles, so that the acoustic impedance of the matching layer is distributed in a gradient mode from one end of the matching layer to the other end of the matching layer. The method for preparing the acoustic impedance matching layer has moderate difficulty and simple operation equipment, the acoustic impedance of the prepared acoustic impedance matching layer is uniformly and gradiently changed, the thickness can be accurately controlled, the transmission efficiency of sound waves in the ultrasonic transducer can be improved, and the sensitivity and the bandwidth of the ultrasonic transducer are improved.

Description

Ultrasonic transducer, acoustic impedance matching layer and preparation method thereof
Technical Field
The invention belongs to the technical field of ultrasonic transducers, and particularly relates to an ultrasonic transducer, an acoustic impedance matching layer and a preparation method thereof.
Background
In biomedical ultrasound engineering, a large amount of acoustic energy is lost between a high acoustic impedance piezoelectric layer (about 30MRayl) and a low acoustic impedance working medium (about 1.5MRayl) due to impedance mismatch. In addition, the significant difference in impedance also causes the piezoelectric element to resonate at a high Q value, resulting in a longer pulse width and a narrower bandwidth, thereby seriously affecting the sensitivity, axial resolution, and richness of information of the ultrasonic transducer. In order to solve the problem, the product preparation is mostly carried out by additionally arranging a matching layer between the piezoelectric layer and the working medium. To ensure the matching effect, multiple (generally no more than three) matching layers are used, as shown in fig. 1, where 101 is the backing block, 102 is the piezoelectric element, 103 is the first matching layer, 104 is the second matching layer, 105 is the third matching layer, and 106 is the acoustic lens. The acoustic impedance value of each matching layer can be calculated by a theoretical calculation method, and the thickness is calculated by adopting a lambda/4 (wherein lambda is the wavelength of sound waves in the matching layer) theory.
However, even if the ultrasonic transducer is manufactured by adopting the matching layer theory, a plurality of problems still exist:
1) Impedance mismatch still exists between the matching layers, so that energy loss is caused;
2) Because the transmitted wave is a pulse wave and contains a plurality of frequency components, the wavelength difference in the matching layer is large, the theoretical thicknesses calculated according to lambda/4 are different, and the thickness of the matching layer with fixed thickness inevitably causes different losses of the sound waves with different frequency components in the matching layer, thereby causing the problem of signal integrity;
3) The high-frequency ultrasonic transducer has high frequency, the thickness of a matching layer calculated according to a lambda/4 theory is small, the processing difficulty is increased, and the precision is difficult to control.
The best method for solving the problems is to prepare a matching layer material with gradually changed impedance, however, in the related patents disclosed at present, some matching layer materials with larger preparation difficulty or continuously and uniformly changed impedance cannot be obtained, and more importantly, the thickness of the matching layer cannot be accurately controlled, so that the preparation difficulty of the products at the later stage is larger (such as array element cutting and the like).
Disclosure of Invention
In order to solve the above problems in the prior art, the present invention aims to provide an ultrasonic transducer, an acoustic impedance matching layer and a method for manufacturing the same. The method for preparing the acoustic impedance matching layer has moderate difficulty and simple operation equipment, the acoustic impedance of the prepared acoustic impedance matching layer is uniformly and gradiently changed, the thickness can be accurately controlled, the transmission efficiency of sound waves in the ultrasonic transducer can be improved, and the sensitivity and the bandwidth of the ultrasonic transducer are improved.
In order to achieve the purpose, the invention adopts the following technical scheme:
The matching layer comprises magnetic particles coated with a low-density material layer and an adhesive, wherein the magnetic particles coated with the low-density material layer are distributed in the adhesive in a gradient mode according to different acoustic impedances of the magnetic particles, so that the acoustic impedances of the matching layer are distributed in a gradient mode from one end of the matching layer to the other end of the matching layer.
Further, the low-density material includes one of resin, plastic, and rubber.
Further, the magnetic particles comprise particles of a ferromagnetic material or a composite comprising particles of a ferromagnetic material. Preferably, the ferromagnetic material is selected from one of iron, nickel and cobalt.
Further, the adhesive includes one of silicone rubber, epoxy resin, and hot melt plastic.
Further, the acoustic impedance of the matching layer is graded in a range of 30MRayl-1.5MRayl from one end to the other end of the matching layer.
The invention also provides a preparation method of the acoustic impedance matching layer, which comprises the following steps:
(1) Screening the magnetic particles, and coating a low-density material on the surface of the magnetic particles to ensure that the particle size of the magnetic particles or the thickness of the low-density material is in gradient distribution;
(2) Dispersing the magnetic particles coated with the low-density material obtained in the step (1) in a container filled with a liquid adhesive, applying a magnetic field to the container from top to bottom, and keeping for a certain time to ensure that the magnetic particles in the container are stably distributed in the liquid adhesive;
(3) And curing the material in the container, taking out the cured material, and grinding the two sides to obtain the acoustic impedance matching layer.
Further, in the step (1), when the thickness of the low-density material is distributed in a gradient manner, the magnetic particles with the same particle size are screened; when the thickness of the low-density material is the same, magnetic particles with the particle size in gradient distribution are screened.
Further, the screening includes one or both of sieving and cyclone separation.
Further, the surface of the magnetic particles is coated by sputtering, vapor deposition, in-situ polymerization, or rotary evaporation.
An ultrasonic transducer comprising the acoustic impedance matching layer described above.
Further, the acoustic impedance matching layers are disposed on both sides of the piezoelectric element, while serving as a matching layer and a backing block.
The invention has the beneficial effects that:
(1) The method for preparing the acoustic impedance matching layer has moderate difficulty, and the density of the final material is controlled by selecting proper magnetic filling particles and coating the surface of the particles with a low-density material by a physical or chemical method; and then dispersing the magnetic filler particles in a proper adhesive, applying a magnetic field to the adhesive, and finally enabling the magnetic filler particles to be in gradient dispersion in the selected adhesive under the comprehensive action of buoyancy, gravity and magnetic force to finally obtain the acoustic impedance uniform gradient change matching layer.
(2) The acoustic impedance matching layer is controllable in thickness, and the thickness of the matching layer can be accurately controlled by grinding the solidified material through the surface grinding machine on the two sides.
(3) The matching layer material with the uniformly changed impedance gradient can improve the transmission efficiency of sound waves in the ultrasonic transducer, improve the sensitivity and bandwidth of the ultrasonic transducer, reduce the pulse width, improve the axial resolution and the richness of information, and improve the image display quality on the ultrasonic diagnostic apparatus and the diagnosis efficiency of doctors.
Drawings
Fig. 1 is a side view of a prior art medical ultrasound transducer.
Fig. 2 is a schematic diagram of an embodiment of preparing magnetic filler particles by a coating-followed-by-screening method.
FIG. 3(a) is a schematic diagram of an embodiment of a specific method for fabricating a matching layer; (b) stress analysis of magnetic particles.
Fig. 4 is a schematic diagram of a medical ultrasonic transducer prepared by the matching layer of the present invention.
Fig. 5 is a schematic diagram of an embodiment of preparing magnetic filler particles by a screening-first and coating-second method.
FIG. 6 is a schematic diagram of an embodiment of a specific method for fabricating a matching layer.
Fig. 7 is a schematic diagram of an ultrasonic transducer in which the matching layer material of the present invention is used as both the matching layer and backing block of the ultrasonic transducer.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below. It is to be understood that the embodiments described are only a few embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the described embodiments of the invention without any inventive step, are within the scope of protection of the invention.
Unless defined otherwise, technical or scientific terms used herein shall have the ordinary meaning as understood by one of ordinary skill in the art to which this invention belongs.
< Acoustic impedance matching layer >
The invention provides an acoustic impedance matching layer which comprises magnetic particles coated with a low-density material layer and an adhesive, wherein the magnetic particles coated with the low-density material layer are distributed in the adhesive in a gradient manner according to different acoustic impedances of the magnetic particles, so that the acoustic impedance of the matching layer is distributed in a gradient gradual manner from one end of the matching layer to the other end of the matching layer.
Magnetic particles refer to particles having a ferromagnetic material or a composite containing particles of a ferromagnetic material, selected according to the target acoustic impedance and the frequency range of use. The inventors have found through research that the magnetic particles are generally selected on the basis that the density is as low as possible and the speed of sound is as high as possible. Preferably, the magnetic particles may be selected from, but not limited to, iron, nickel, cobalt, or composites comprising iron, nickel, cobalt.
The low-density material is used for coating the magnetic particles, so that the material with lower density is selected for coating the magnetic particles, and the subsequent coating thickness and the whole particle size are conveniently regulated and controlled. The low density material may be selected from, but not limited to, resins, plastics, rubbers.
The adhesive material can be selected from but not limited to silicone rubber, epoxy resin and hot melt plastic, the viscosity of the adhesive material cannot be too large, the viscosity is too large, the magnetic particles are not favorably moved under the action of buoyancy, gravity and a magnetic field, the selection principle is that the density is generally as small as possible, the subsequent mixing uniformity and the degassing thoroughness are convenient, and on the basis, the larger the density is, the better the density is.
In theory, the gradient of the acoustic impedance change of the acoustic impedance matching layer of the present invention can be in any range, but is selected according to the practical application, and is generally a uniform change from 30MRayl to 1.5 MRayl.
< method for producing Acoustic impedance matching layer >
The invention also provides a preparation method of the acoustic impedance matching layer, which comprises the following steps: screening the magnetic particles, and coating a low-density material on the surface of the magnetic particles to ensure that the particle size of the magnetic particles or the thickness of the low-density material is in gradient distribution; dispersing the obtained magnetic particles coated with the low-density material in a container filled with a liquid adhesive, applying a magnetic field to the container from top to bottom, and keeping for a certain time to ensure that the magnetic particles in the container are stably distributed in the liquid adhesive; and curing the material in the container, taking out the cured material, and grinding the two sides to obtain the acoustic impedance matching layer.
Magnetic particles with the same particle size can be screened out through screening the magnetic particles, then particle coating is carried out through physical or chemical methods such as sputtering, vapor deposition, in-situ polymerization, rotary evaporation and the like, and materials with different coating layer thicknesses are prepared through changing the conditions and parameters of a coating process, such as raising the temperature, prolonging the reaction time, increasing the concentration of a reaction solution and the like; or the magnetic particles with the gradient distribution of the particle size can be screened firstly and then the low-density material with the same thickness is coated. By the method, the composite material with the magnetic property or the density in gradient distribution can be obtained, so that when a magnetic field is applied to the composite material subsequently, the composite material can be arranged in the adhesive in a gradient manner under the combined action of three forces of buoyancy in the adhesive, magnetic force of the magnetic field and self gravity, and a matching layer with the acoustic impedance in gradient gradual distribution is finally obtained.
The curing process is carried out according to the curing conditions of the adhesive material, and the shaking is forbidden in the curing process so as to avoid damaging the acceptance balance of the particles.
< ultrasonic transducer >
The ultrasonic transducer includes an acoustic impedance matching layer, a piezoelectric element, and a backing block to which the present invention pertains.
The inventors have also found that the selection of the backing block may significantly affect the bandwidth and sensitivity of the ultrasonic transducer, and that the piezoelectric element radiates acoustic energy both forward and backward when vibrating, but rather than being an echo signal in the front, it is most desirable to avoid echo interference in the rear, and therefore the backing block needs to consume all of the acoustic interference radiated backward. According to the sound wave transmission theory, the backing block made of the material with the acoustic impedance gradient change helps to ensure that sound energy radiated from the back when the piezoelectric element vibrates enters the inside of the backing block as much as possible, so that the sound energy is effectively consumed. Thus, the acoustic impedance matching layer of the present invention may also find application in ultrasonic transducers as a backing block.
Example 1
The preparation of the magnetic filling particles is carried out by adopting a method of screening firstly and then coating.
As shown in FIG. 2, iron particles having a particle size of (10-15) μm and a density of about 7g/cm were first sieved out through an upper and lower sample-separating sieve 3The acoustic impedance is about 33 MRayl. Coating a layer of silicon rubber material on the surface of the silicon rubber material by an in-situ polymerization method, wherein the density of the selected silicon rubber material is about 1g/cm 3The acoustic impedance is about 1 MRayl. Coating a layer with the thickness of 0-120 μm on the surface of the iron microparticles by controlling the reaction temperature and prolonging the reaction time, wherein the density of the obtained composite particles is in the range of about (1.1-7) g/cm 3And screening to obtain mixed particles with gradient particle size (or density).
Selecting epoxy resin with low viscosity as adhesive, such as EPOTEK 301, DER 332, etc., and the density is 1.1g/cm 3Left and right. The resultant of the gravity and buoyancy of the selected composite particles in the adhesive exhibits a gradient distribution from 0N to 10N, the direction pointing in the direction of gravity, i.e. vertically downwards.
As shown in fig. 3(a), by adjusting and calculating the magnetic sizes of the upper magnet 301 and the lower magnet 303, and the distances Z1 and Z2 between the two magnets and the dispersing material, it is found that the gradient of the required magnetic force (the magnetic force is inversely proportional to the square of the distance) is 0N to 10N in the range of the thickness of the target dimension (generally within 5 mm), and the direction is vertically upward (opposite to the resultant direction of the composite particles), and the stress analysis diagram is shown in fig. 3 (b). Then, the target matching layer material 302 is placed at a designated position after being sufficiently stirred, and after standing for a period of time, particles which are not at the point where the resultant force is 0 gradually adhere to the upper and lower surfaces of the matching layer material. Curing is carried out according to the required curing conditions, and the target matching layer material 302 is prevented from obviously shaking in the curing process so as to avoid damaging the stress balance of the original particles. After the solidification is finished, the layer surface of the upper surface and the lower surface which is adhered with a certain amount of particles due to unbalanced stress is ground, and the matching layer material with the acoustic impedance varying in a gradient manner from 1.5MRayl to 33MRayl is obtained.
The schematic diagram of the medical ultrasonic transducer prepared by adopting the newly prepared matching layer with the acoustic impedance gradient change is shown in fig. 4, compared with fig. 1, the product is simplified from the bonding of a plurality of matching layers into the bonding of a single matching layer in the preparation process, the adverse effect of bonding materials in the transducer is reduced, and the thickness of the newly prepared matching layer is thicker than that of the previous single matching layer, so that the processing is easy, the product quality is convenient to control, and the production efficiency is improved.
Example 2
The preparation of the magnetic filling particles is carried out by adopting a method of screening firstly and then coating.
As shown in fig. 5, magnetic particles with a gradient particle size distribution are screened out by screening or cyclone separation, conditions are precisely controlled, a layer of low-density material is equivalently coated on the surfaces of the particles by physical or chemical methods such as sputtering, vapor deposition, in-situ polymerization, rotary evaporation and the like, and the density of the coated composite material is also in a gradient distribution because the particle size of the uncoated particles is in a gradient distribution, namely, the coated composite material is stressed in a gradient distribution. Then, by designing according to the same principle as in the first embodiment, a matching layer material 601 with a gradient distribution of acoustic impedance is obtained, as shown in fig. 6.
Example 3
The invention provides an ultrasonic transducer, as shown in fig. 7, which comprises an acoustic lens 106, a matching layer material 302 or 601 of the invention, a piezoelectric element and the matching layer material 302 or 601 of the invention from top to bottom in sequence.
By adopting the matching layer material of the invention to replace the common backing block, the acoustic wave interference radiated backwards by the piezoelectric element can be effectively consumed, and the bandwidth and the sensitivity of the ultrasonic transducer are improved.
The above description of the embodiments is only intended to facilitate the understanding of the method of the invention and its core ideas. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention.

Claims (9)

1. The preparation method of the acoustic impedance matching layer comprises the steps that the acoustic impedance matching layer comprises magnetic particles coated with a low-density material layer and an adhesive, and the magnetic particles coated with the low-density material layer are distributed in the adhesive in a gradient mode according to different acoustic impedances of the magnetic particles, so that the acoustic impedance of the matching layer is distributed in a gradient mode from one end of the matching layer to the other end of the matching layer; the method is characterized in that: the preparation method comprises the following steps:
(1) Screening the magnetic particles, and coating a low-density material on the surface of the magnetic particles to ensure that the particle size of the magnetic particles or the thickness of the low-density material is in gradient distribution;
(2) Dispersing the magnetic particles coated with the low-density material obtained in the step (1) in a container filled with a liquid adhesive, applying a magnetic field to the container from top to bottom, and keeping for a certain time to ensure that the magnetic particles in the container are stably distributed in the liquid adhesive;
(3) And curing the material in the container, taking out the cured material, and grinding the two sides to obtain the acoustic impedance matching layer.
2. The method of claim 1, wherein the low density material comprises one of a resin, a plastic, and a rubber.
3. The method of claim 1, wherein the magnetic particles comprise ferromagnetic material particles or a composite comprising ferromagnetic material particles.
4. The method of claim 1, wherein the adhesive comprises one of silicone rubber, epoxy, and hot melt plastic.
5. The method of claim 1, wherein the acoustic impedance of the matching layer is graded from one end of the matching layer to the other end of the matching layer in the range of 30MRayl-1.5 MRayl.
6. The manufacturing method according to claim 1, wherein in the step (1), when the thickness of the low-density material is distributed in a gradient, magnetic particles having the same particle size are screened; when the thickness of the low-density material is the same, magnetic particles with the particle size in gradient distribution are screened.
7. The production method according to claim 1, wherein the surface of the magnetic particles is coated by sputtering, vapor deposition, in-situ polymerization, or rotary evaporation.
8. An ultrasonic transducer comprising an acoustic impedance matching layer produced by the production method according to any one of claims 1 to 7.
9. The ultrasonic transducer of claim 8, said acoustic impedance matching layers disposed on both sides of the piezoelectric element, acting as both a matching layer and a backing mass.
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CN111887888A (en) * 2020-07-09 2020-11-06 聚融医疗科技(杭州)有限公司 Method and system for evaluating impedance of ultrasonic probe matching layer based on lens echo
CN112040382B (en) * 2020-08-10 2021-07-30 上海船舶电子设备研究所(中国船舶重工集团公司第七二六研究所) High-bandwidth underwater acoustic transducer based on acoustic impedance gradient matching layer

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US20050039323A1 (en) * 2003-08-22 2005-02-24 Simens Medical Solutions Usa, Inc. Transducers with electically conductive matching layers and methods of manufacture
CN101605288B (en) * 2008-06-13 2013-06-12 上海爱培克电子科技有限公司 Ultrasonic energy transducer with continuously changed acoustic impedances
CN102143423A (en) * 2010-02-01 2011-08-03 北京汇福康医疗技术有限公司 Ultrasonic impedance matching layer of ultrasonic transducer, manufacturing method thereof and ultrasonic transducer
CN103540152B (en) * 2012-07-24 2016-08-10 常州波速传感器有限公司 Gradual transition acoustic impedance match material compound method
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JP6780553B2 (en) * 2017-03-16 2020-11-04 コニカミノルタ株式会社 Manufacturing method of ultrasonic vibrator, ultrasonic diagnostic equipment and ultrasonic vibrator
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