CN110265329B - Inner pipe fixing device - Google Patents
Inner pipe fixing device Download PDFInfo
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- CN110265329B CN110265329B CN201910525953.2A CN201910525953A CN110265329B CN 110265329 B CN110265329 B CN 110265329B CN 201910525953 A CN201910525953 A CN 201910525953A CN 110265329 B CN110265329 B CN 110265329B
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- inner tube
- groove
- support
- mounting groove
- sliding track
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The technical scheme of the invention discloses an inner tube fixing device, which is used for fixing an inner tube of a furnace tube machine table and comprises: the inner pipe table is provided with at least one mounting groove, and a sliding track groove arranged beside the at least one mounting groove and communicated with the mounting groove; the cover is located the support ring outside the inner tube, the edge of support ring be equipped with at least one with mounting groove complex support ear, support the ear be suitable for remove to the end in order to fix of slip track groove the inner tube. The inner tube fixing device adopting the technical scheme of the invention can avoid the phenomenon of inner tube deviation, does not need manual adjustment at high temperature, greatly improves the manufacturing efficiency of the wafer, improves the uniformity of the wafer and ensures the yield of products.
Description
Technical Field
The invention relates to the technical field of semiconductor equipment, in particular to an inner pipe fixing device.
Background
The furnace platen is an important apparatus in the semiconductor manufacturing field, and many processes requiring a high temperature environment, such as a wafer processing process, are performed in the furnace platen during the semiconductor manufacturing process.
In the process of processing the wafer, the inner tube is easy to deviate, so that the reaction gas in the furnace tube is not uniformly distributed, the uniformity of the wafer is affected, the yield of the product is reduced, and even the product is possibly scrapped.
At present, the mode of solving the inner tube offset still adopts manual adjustment. During adjustment, the furnace tube machine table needs to be cooled to 400 ℃, the position of the inner tube needs to be manually adjusted by using high-temperature gloves, the machine is tested again, and when the deviation is serious, equipment maintenance (PM) needs to be carried out again. The manual adjustment process needs to be operated in a high-temperature environment, the safety coefficient is low, and time and labor are wasted.
Disclosure of Invention
The technical problem to be solved by the technical scheme of the invention is that the inner pipe of the existing furnace tube machine table is easy to deviate, and the uniformity of the furnace tube processing technology is influenced.
In order to solve the above technical problems, the present invention provides an inner tube fixing device for fixing an inner tube of a furnace tube platform, comprising: the inner pipe platform is provided with at least one mounting groove; the sliding track groove is arranged beside at least one mounting groove and communicated with the mounting groove; the cover is located the support ring outside the inner tube, the edge of support ring be equipped with at least one with mounting groove complex support ear, support the ear be suitable for remove to the end in order to fix of slip track groove the inner tube.
Optionally, when the support lug moves to the end of the sliding track groove, the geometric center of the inner tube coincides with that of the inner tube platform.
Optionally, the number of the mounting grooves, the sliding rail grooves and the supporting lugs is equal.
Optionally, the sliding track grooves are arranged clockwise or counterclockwise, and if two or more sliding track grooves are provided, the opening directions of the sliding track grooves are the same.
Optionally, the support ear includes a first support member extending outwardly from the support ring.
Optionally, the support ear further comprises a second support extending downwardly from the first support.
Optionally, the sliding track groove is followed the inner wall of the inner pipe table is opened, the sliding track groove comprises a first groove body and a second groove body, one end of the first groove body is communicated with the installation groove, the other end of the first groove body is communicated with the second groove body, and the depth of the second groove body is larger than that of the first groove body.
Optionally, the sliding rail groove extends from the mounting groove to a direction far away from the inner wall of the inner pipe table.
Optionally, the sliding rail groove is in a pawl shape.
Compared with the prior art, the technical scheme of the invention has the following beneficial effects:
according to the technical scheme, the sliding track groove communicated with the installation groove is formed in the inner tube table, and when the supporting lug on the supporting ring sleeved with the inner tube moves to the tail end of the sliding track groove from the installation groove along the sliding track groove, the tail end of the sliding track groove can apply force for blocking the movement of the supporting lug, so that the supporting ring and the inner tube are fixed, and the inner tube is prevented from deviating.
The sliding track groove is arranged along the inner wall of the inner pipe table and comprises a first groove body and a second groove body, the second groove body is deeper than the first groove body, the first groove body can smoothly guide the supporting lug to the second groove body from the mounting groove, and the second groove body can clamp the supporting ring in a groove cavity of the second groove body, so that the inner pipe is effectively prevented from deviating.
The sliding track groove extends from the mounting groove to the direction of keeping away from the inner tube platform inner wall, supports the ear and removes to the sliding track groove when terminal along the sliding track groove, and the root that supports the ear can support the root edge in sliding track groove, and the root restriction in sliding track groove supports the ear motion, and then realizes the fixed of inner tube.
Drawings
FIG. 1 is a schematic view of a furnace platen;
FIG. 2 is a top view of an inner tube mounting structure;
FIG. 3A is a schematic top view of an inner tube fixing device (the inner tube is not fixed) according to an embodiment of the present invention;
FIG. 3B is a schematic top view of the inner tube fixing device (with the inner tube fixed) according to the embodiment of the present invention;
FIG. 4 is a schematic view of a support ear of the inner tube fixing device according to the embodiment of the present invention;
fig. 5A is a schematic view illustrating an internal structure of an installation groove and a sliding rail groove (an internal pipe is not fixed) in the internal pipe fixing device shown in fig. 3A;
FIG. 5B is a schematic view of the inner tube fixing device shown in FIG. 3B showing the inner structure of the mounting groove and the sliding track groove (the inner tube is fixed);
FIG. 6A is a schematic top view of an inner tube fixing device (the inner tube is not fixed) according to another embodiment of the present invention;
fig. 6B is a schematic top view of an inner tube fixing device (with an inner tube fixed) according to another embodiment of the present invention.
Detailed Description
As shown in fig. 1, the furnace platform includes a heater 1, and an outer tube (outer tube)2, an inner tube (inner tube)3, and a boat (boat)4 are sequentially disposed in the heater 1 from outside to inside, and the boat 4 is used for carrying devices requiring heat treatment, such as wafers.
Referring to fig. 1 and 2, a flange 5 is disposed at a bottom position of the outer tube 2, an inner tube table (inner tube)6 is disposed at an inner ring of the flange 5, the inner tube 3 is fixed on a support ring 7, the support ring 7 is placed on the inner tube table 6, and the inner tube table 6 is free of any limiting device and fixing device, so that the position of the inner tube 3 is easily deviated.
The causes of the deflection of the inner tube 3 are many, mainly the following two aspects: on one hand, when PM is carried out on a furnace tube machine table, the position of the inner tube 3 is influenced; on the other hand, the vibration generated by the furnace tube machine during operation will also cause the deflection of the inner tube 3. The deviation of the inner tube 3 directly causes the uneven distribution of the reaction gas in the furnace tube, thereby affecting the uniformity of the wafer, reducing the yield of the product and even possibly causing the product to be scrapped.
In order to overcome the above-mentioned disadvantages, the inventors have studied and proposed that a sliding rail groove is provided on an inner tube stage, and a support member is provided on a support ring, and when the support member moves to the end of the sliding rail groove, the end of the sliding rail groove can restrict the movement of the support member, thereby effectively preventing the movement of the inner tube.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
Referring to fig. 3A, an inner tube fixing device according to an embodiment of the present invention includes: an inner tube stand 10, a support ring 11 and a sliding rail groove 141. The inner tube fixing device is used for fixing the inner tube 12 of the furnace tube machine table and preventing the inner tube 12 from deviating.
Wherein, be equipped with at least one mounting groove 13 on the inner tube platform 10, mounting groove 13 is seted up along the axial direction of inner tube platform 10, sets up mounting groove 13 and is favorable to the installation and the dismantlement of inner tube 12, and does not make the requirement to the quantity of mounting groove 13, and the three mounting groove 13 of the exemplary mark of 3A-3B of attached drawings, and evenly distributed is on inner tube platform 10.
The sliding rail groove 141 is disposed beside the at least one mounting groove 13, and the sliding rail groove 141 is communicated with the mounting groove 13. In this embodiment, the sliding track groove 141 is formed along the inner wall of the inner pipe table 10. The number of the sliding rail grooves 141 is not required, and specifically, the sliding rail grooves 141 may be provided beside one installation groove 13, the sliding rail grooves 141 may be provided beside a plurality of installation grooves 13, the sliding rail grooves 141 may be provided beside a plurality of adjacent installation grooves 13, or the sliding rail grooves 141 may be provided beside a plurality of spaced installation grooves 13. As shown in fig. 3A, the embodiment of the present invention exemplarily provides the sliding rail groove 141 beside each of the three mounting grooves 13.
Referring to fig. 3A and 4, a support ring 11 is sleeved outside the inner tube 12, the inner tube 12 and the support ring 11 are relatively fixed, at least one support lug 15 is disposed at an edge of the support ring 11, the support lug 15 and the support ring 11 may be integrally formed or may be connected to each other, the inner tube 12, the support ring 11 and the support lug 15 belong to a whole, one of the components moves, and the other components move along with the movement.
The shape and structure of the supporting lug 15 are matched with the installation groove 13 and the sliding track groove 141. The support ear 15 of the present embodiment may include a first support 151 extending outward from the support ring 11 and a second support 152 extending downward from the first support 151. The upper surface of the first support 151 is on the same plane as the upper surface of the support ring 11, and the second support 152 is located below the first support 151 and may be perpendicular to the first support 151. The first supporting member 151 and the second supporting member 152 may be integrally formed, for example, a plate-shaped material bent downward, or two parts connected to each other, and the shapes of the first supporting member 151 and the second supporting member 152 are matched with the mounting groove 13 and the sliding rail groove 141.
The number of the supporting lugs 15 is determined according to actual conditions, if only one supporting lug 15 is arranged, only the position of the supporting lug 15 is required to be ensured at the edge of the supporting ring 11, but if the number of the supporting lugs 15 is more than two, whether the position of the supporting lug 15 can be matched with the position of the mounting groove 13 or not needs to be considered, so that the inner pipe 12 can be smoothly assembled and disassembled.
For the present invention, the more the number of the supporting lugs 15, the better the fixing effect of the inner tube 12, but the less the number of the supporting lugs 15, the more complicated the structure of the parts, the less assembly, and the less the number of the supporting lugs 15 than the number of the mounting grooves 13. In the embodiment of the present invention, the number of the supporting lugs 15, the mounting grooves 13 and the sliding track grooves 141 is equal, and the distribution positions of the supporting lugs 15 and the mounting grooves 13 correspond to each other.
When the inner tube 12 is assembled, the support lugs 15 are aligned with the mounting grooves 13, when the support lugs 15 reach a preset position, the inner tube 12 is rotated along the sliding track grooves 141, so that the support lugs 15 on the support ring 11 move to the sliding track grooves 141, when the support lugs 15 reach the tail ends of the sliding track grooves 141, the inner tube 12 is fixed, and the inner tube 12 is assembled, as shown in fig. 3B. After the inner tube 12 is assembled, the geometric center of the inner tube 12 coincides with that of the inner tube stage 10, so that the reaction gas received by the wafers on the wafer boat in the inner tube 12 is distributed uniformly, and the uniformity of the wafers is improved to the greatest extent.
Referring to fig. 3A and 5A, in the inner tube fixing device of the present embodiment, the sliding rail grooves 141 are disposed along the inner wall of the inner tube base 10, and the disposed direction may be a clockwise direction or a counterclockwise direction, and it should be noted that, if the number of the sliding rail grooves 141 is greater than or equal to two, each sliding rail groove 141 must be opened in the same direction, and each sliding rail 141 shown in fig. 3A is opened in a clockwise direction.
The sliding rail groove 141 includes a first groove body 141a and a second groove body 141b, wherein the front end of the first groove body 141a is communicated with the installation groove 13, the rear end of the first groove body 141a is communicated with the second groove body 141b, and the depth of the second groove body 141b is greater than that of the first groove body 141 a.
Referring to fig. 3B and fig. 5B, during assembly, the supporting lug 15 aligns with the mounting groove 13 and moves along the mounting groove 13, moves to the notch of the first groove 141a of the sliding rail groove 141, continues to move along the first groove 141a, moves to the second groove 141B, since the second groove 141b is deeper than the first groove 141a, the second supporting member 152 can enter the bottom of the second groove 141b by gravity, thereby being clamped into the second slot 141b and being blocked by the sidewall of the second slot 141b, the second supporting member 152 cannot move continuously, when the second support 152 is positioned at the bottom of the second groove 141b, the first support 151 supported by the second support 152 is positioned at a predetermined height position (determined by the height of the second support 152 and the depth of the second groove 141 b), so that the inner pipe 12, which is surrounded by the support ring 11, can be fixed at a predetermined height position, i.e., the fixation of the inner pipe 12 is achieved. When the second supporting member 152 is clamped into the second groove 141b, the inner tube is overlapped with the geometric center of the inner tube platform and is located at the circle center O1.
It should be understood that in other embodiments, the support ear 15 may not include the second support 152, only the first support 151, and the first support 151 may have a thickness. When the first support 151 moves to the second groove 141b, the inner tube 12 moves along the groove depth direction of the second groove 141b until the first support 151 is engaged with the second groove 141b, and the first support 151 is positioned at a predetermined height position (determined by the thickness of the first support 151 and the depth of the second groove 141 b).
Referring to fig. 6A, in the inner tube fixing device according to another embodiment of the present invention, a sliding rail groove 142 may extend from the mounting groove 13 to a direction away from the inner wall of the inner tube base 10, and a notch of the sliding rail groove 142 is communicated with the mounting groove 13. The sliding rail groove 142 may have a ratchet shape. The sliding rail groove 142 may be integrally formed with the inner pipe stand 10 or may be connected to each other.
The direction in which the sliding rail grooves 142 are disposed may be clockwise or counterclockwise, and it should be noted that, if the number of the sliding rail grooves 142 is greater than or equal to two, each sliding rail groove 142 must be opened in the same direction, and each sliding rail 142 shown in fig. 6A is opened in the clockwise direction.
During assembly, the supporting lug 15 aligns with the mounting groove 13 and moves along the mounting groove 13, moves to the notch of the sliding track groove 142, continues to move along the sliding track groove 142, and moves to the end of the sliding track groove 142, because the sliding track groove 142 extends from the mounting groove 13 to the direction far away from the inner wall of the inner tube table 10, the arc radius of the root of the sliding track groove 142 is smaller than that of the notch, so that the root of the supporting lug 15 abuts against the root edge of the sliding track groove 142, and the root edge of the sliding track groove 142 blocks or limits the movement of the supporting lug 15, thereby fixing the inner tube 12, as shown in fig. 6B. When the root of the support lug 15 is pressed against the edge of the sliding track groove 142, the inner tube is coincident with the geometric center of the inner tube platform and is positioned at the circle center O2.
In conclusion, the inner tube fixing device adopting the technical scheme of the invention has the advantages that the sliding track groove is formed in the inner tube table, so that the inner tube is fixed during assembly, the phenomenon of inner tube deviation caused by various factors is avoided, the problem that manual adjustment needs to be carried out at high temperature due to inner tube deviation in the prior art is avoided, the manufacturing efficiency of wafers is greatly improved, the uniformity of the wafers is improved, and the product yield is ensured.
Although the present invention has been described with reference to the preferred embodiments, it is not intended to limit the present invention, and those skilled in the art can make modifications and variations of the present invention without departing from the spirit and scope of the present invention.
Claims (8)
1. The utility model provides an inner tube fixing device for the inner tube of fixed boiler tube board, its characterized in that includes:
the inner pipe platform is provided with at least one mounting groove;
the sliding track groove is arranged beside at least one mounting groove and communicated with the mounting groove;
the cover is located the support ring of interior outside of tubes, the edge of support ring be equipped with at least one with mounting groove complex supports the ear, it is suitable for to remove to support the ear the end in slip track groove is in order to fix the inner tube, slip track groove is followed interior pipe support inner wall is seted up, slip track groove includes first cell body and second cell body, the one end of first cell body with the mounting groove intercommunication, the other end with second cell body intercommunication, just the degree of depth of second cell body is greater than the degree of depth of first cell body.
2. The internal tube fixation device of claim 1 wherein the internal tube coincides with the geometric center of the internal tube table when the support ears are moved to the ends of the sliding track slots.
3. The internal tube fixing device according to claim 1, wherein the number of the mounting grooves, the sliding rail grooves and the supporting lugs is equal.
4. The inner pipe fixing device according to claim 1, wherein the sliding track grooves are formed clockwise or counterclockwise, and if two or more sliding track grooves are formed, the opening directions of the sliding track grooves are the same.
5. The internal tube fixation device of claim 1 wherein the support ears comprise a first support member extending outwardly from the support ring.
6. The internal tube fixation device of claim 5 wherein said support ear further comprises a second support member extending downwardly from said first support member.
7. The pipe fitting of claim 1, wherein the sliding track groove extends from the mounting groove in a direction away from the inner wall of the inner pipe stand.
8. The internal tube fixation device according to claim 7 wherein said sliding track slot is ratchet-shaped.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910525953.2A CN110265329B (en) | 2019-06-18 | 2019-06-18 | Inner pipe fixing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910525953.2A CN110265329B (en) | 2019-06-18 | 2019-06-18 | Inner pipe fixing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110265329A CN110265329A (en) | 2019-09-20 |
| CN110265329B true CN110265329B (en) | 2020-12-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910525953.2A Active CN110265329B (en) | 2019-06-18 | 2019-06-18 | Inner pipe fixing device |
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| Country | Link |
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| CN (1) | CN110265329B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6168427B1 (en) * | 1999-10-05 | 2001-01-02 | Taiwan Semiconductor Manufacturing Co., Ltd | Apparatus for guiding the removal of a processing tube from a semiconductor furnace |
| US6538237B1 (en) * | 2002-01-08 | 2003-03-25 | Taiwan Semiconductor Manufacturing Co., Ltd | Apparatus for holding a quartz furnace |
| CN101499410A (en) * | 2008-01-31 | 2009-08-05 | 东京毅力科创株式会社 | Thermal processing furnace |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4929199B2 (en) * | 2008-02-01 | 2012-05-09 | 株式会社日立国際電気 | Substrate processing apparatus and semiconductor device manufacturing method |
| KR20100073571A (en) * | 2008-12-23 | 2010-07-01 | 주식회사 동부하이텍 | Vertical diffusion furnace for manufacturing semiconductor |
| CN208674076U (en) * | 2018-08-07 | 2019-03-29 | 德淮半导体有限公司 | Cassette pedestal and furnace tube apparatus |
-
2019
- 2019-06-18 CN CN201910525953.2A patent/CN110265329B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6168427B1 (en) * | 1999-10-05 | 2001-01-02 | Taiwan Semiconductor Manufacturing Co., Ltd | Apparatus for guiding the removal of a processing tube from a semiconductor furnace |
| US6538237B1 (en) * | 2002-01-08 | 2003-03-25 | Taiwan Semiconductor Manufacturing Co., Ltd | Apparatus for holding a quartz furnace |
| CN101499410A (en) * | 2008-01-31 | 2009-08-05 | 东京毅力科创株式会社 | Thermal processing furnace |
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| Publication number | Publication date |
|---|---|
| CN110265329A (en) | 2019-09-20 |
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Effective date of registration: 20230721 Address after: 223001 Room 318, Building 6, east of Zhenda Steel Pipe Company, south of Qianjiang Road, Huaiyin District, Huai'an City, Jiangsu Province Patentee after: Huaian Xide Industrial Design Co.,Ltd. Address before: 223300 no.599, East Changjiang Road, Huaiyin District, Huai'an City, Jiangsu Province Patentee before: HUAIAN IMAGING DEVICE MANUFACTURER Corp. |
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