CN110219846B - High-speed driving device for two-dimensional valve - Google Patents

High-speed driving device for two-dimensional valve Download PDF

Info

Publication number
CN110219846B
CN110219846B CN201910434746.6A CN201910434746A CN110219846B CN 110219846 B CN110219846 B CN 110219846B CN 201910434746 A CN201910434746 A CN 201910434746A CN 110219846 B CN110219846 B CN 110219846B
Authority
CN
China
Prior art keywords
valve core
valve
pressure
dimensional
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201910434746.6A
Other languages
Chinese (zh)
Other versions
CN110219846A (en
Inventor
左强
王迦勒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hongfujin Precision Industry Shenzhen Co Ltd
Original Assignee
Hongfujin Precision Industry Shenzhen Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hongfujin Precision Industry Shenzhen Co Ltd filed Critical Hongfujin Precision Industry Shenzhen Co Ltd
Priority to CN201910434746.6A priority Critical patent/CN110219846B/en
Publication of CN110219846A publication Critical patent/CN110219846A/en
Application granted granted Critical
Publication of CN110219846B publication Critical patent/CN110219846B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/004Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/007Piezoelectric stacks

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Electrically Driven Valve-Operating Means (AREA)

Abstract

The invention discloses a high-speed driving device for a two-dimensional valve, which comprises a driver and a couple transmission mechanism; the two-dimensional hydraulic valve adopting the high-speed driving device is driven by an electrostriction piece (such as a piezoelectric stack), a high-pressure hole and a low-pressure hole on the shoulder of the end part of the two-dimensional valve core are respectively intersected with an oblique waist-shaped through hole on a valve sleeve to form two tiny opening areas so as to form a hydraulic resistance half bridge, and the pressure of a sensitive cavity is controlled by the hydraulic resistance half bridge; two piezoelectric stacks which are symmetrically arranged about a valve core axis generate a couple by utilizing an inverse piezoelectric effect, and then a couple transmission mechanism acts on a two-dimensional valve core to rotate the two-dimensional valve core, so that the pressure of a sensitive cavity is changed, and the axial movement of the valve core is controlled; the piezoelectric actuator uses an electrostrictive element (such as a piezoelectric stack) as a driver, and has the characteristics of high frequency response and high output force; the volume is small, the energy density is large, and the structure is compact; low power consumption, no electromagnetic interference and the like; the couple transmission mechanism is combined with the two-dimensional valve, the order-crossing amplification of small displacement of the electrostriction piece (such as a piezoelectric stack) is realized, and the two-dimensional valve has the effects of large amplification factor, high control precision and capability of realizing high pressure and large flow simultaneously.

Description

High-speed driving device for two-dimensional valve
Technical Field
The present invention relates to the field of electro-hydraulic control systems, and more particularly to high speed drives for two-dimensional valves.
Background
The development of novel functional materials and the application of the novel functional materials as driving elements provide a new way for realizing high frequency response of the hydraulic control valve, so that the novel material driving hydraulic valve such as Piezoelectric ceramics (PZT), shape memory alloy, giant magnetostriction and the like is widely concerned, wherein the Piezoelectric ceramic material has the advantages of quick dynamic response, high control precision, large energy density, compact structure, no electromagnetic interference and the like, and becomes a hotspot of research in recent years.
At present, the mode that adopts novel functional material's hydrovalve to directly push the case is mostly adopted to the hydrovalve to piezoelectric valve is the example, because piezoceramics material itself's physical characteristic, even adopt the structure of pile formula, its output displacement still is very little, leads to output flow very little, and this is almost all piezoceramics driven hydrovalves include the bottleneck difficult problem that all face such as ooff valve, proportional valve and servo valve. At present, mechanical displacement method mechanisms such as lever type and bridge type are commonly adopted to solve the bottleneck problem of small displacement of a piezoelectric ceramic driver, the amplification mechanisms generally adopt flexible hinge structures, the problems of small bearing load, poor impact resistance and the like generally exist, the method for amplifying the displacement of the valve core through the flexible hinge reaches the limit, and the problem of displacement amplification is difficult to break through, so that the key for realizing high frequency response and high flow rate of a hydraulic control valve driven by piezoelectric ceramic is solved.
Disclosure of Invention
The object of the present invention is to provide a high-speed drive for two-dimensional valves that is simple and compact in construction, in view of the above-mentioned drawbacks of the prior art.
The technical scheme adopted by the invention for solving the technical problems is as follows: there is provided a high speed drive for a two dimensional valve comprising: the actuating part is used for generating linear variable displacement in a tangential direction relative to a valve core shaft body of the two-dimensional valve in an electrostrictive mode; and the transmission part is connected with the actuating part and used for transmitting the linear variable displacement generated by the actuating part to the valve core or the valve sleeve of the two-dimensional valve so as to drive the shaft body of the valve core or the valve sleeve to rotate, and simultaneously, different rotating displacement amplification effects are generated by changing the length of the force arm of the tangential acting force of the actuating part, so that the axial opening of the valve core is controlled by a spiral servo mechanism.
Preferably, the actuating part comprises an actuating element and an adjusting device, and the transmission part comprises a valve core clamping device and a resetting device. In one embodiment, the actuating element is a piezoelectric stack, the adjusting device is a pair of self-locking wedges and an adjusting bolt, the valve core clamping device is one or more locking coupling blocks, the valve core or the valve sleeve is locked through the bolt, and the reset device is preferably a reset spring.
In other embodiments, the actuating element may be other devices, the configurations of the adjusting device and the resetting device may be changed, and the locking manner of the valve core clamping device and the valve core or the valve sleeve is not limited to bolt fastening, and the two can be integrally formed.
In one embodiment, the actuating portion further includes a step for preventing the actuating portion from interfering with the shaft of the valve core when the valve core or the valve sleeve is driven to rotate in both directions.
Further, the transmission portion includes a support member for reducing friction of the actuator portion with the transmission portion during transmission of the linear displacement.
Still further, the actuating portion includes pretensioning means for ensuring effective transmission of linear displacement of the actuating portion to the transmission portion.
On the basis of the above embodiments, a high-speed driving method for a two-dimensional valve is realized, including: generating linear variable displacement relative to the tangential direction of a valve core shaft body of the two-dimensional valve in an electrostriction mode; the linear variable displacement generated by the actuating part is transmitted to the valve core or the valve sleeve of the two-dimensional valve to drive the valve core or the valve sleeve to rotate, meanwhile, different rotating displacement amplification effects are generated by changing the length of the force arm of the tangential acting force of the actuating part, and then the axial opening of the valve core is controlled by a spiral servo mechanism.
The device or the method for implementing the invention can produce the following beneficial effects: the high-speed driving device for the two-dimensional valve adopts a high-frequency actuating element (such as a piezoelectric stack) to drive a transmission mechanism arranged in a valve body of the two-dimensional valve so as to drive a valve core of the two-dimensional valve to rotate, linear deformation energy generated by the piezoelectric stack is used as kinetic energy for driving a shaft body of the valve core to rotate, and meanwhile, the length of a force arm of tangential acting force of an actuating part can be changed so as to generate different rotating displacement amplification effects, and further, an axial opening of the valve core is controlled through a proper spiral servo mechanism. According to the fact that an eccentric distance (namely a force arm) exists when a couple of the actuating part acts on the transmission mechanism, the couple transmission mechanism has a primary amplification effect, and in combination with a rotation-linear displacement amplification effect (secondary amplification) of a two-dimensional (2D) spiral servo mechanism, deformation displacement generated by an electrostrictive piece (such as a piezoelectric stack) is amplified twice under a valve body structure which is obviously simplified compared with the prior art, and the driving device takes the piezoelectric stack as a driver and has the characteristics of high frequency response and high output force; the volume is small, the energy density is large, and the structure is compact; low power consumption, no electromagnetic interference and the like; the couple transmission mechanism is combined with the two-dimensional valve, the order-crossing amplification of small displacement of the electrostriction piece (such as a piezoelectric stack) is realized, and the two-dimensional valve has the effects of large amplification factor, high control precision and capability of realizing high pressure and large flow simultaneously.
Drawings
The invention will be further described with reference to the accompanying drawings and examples, in which:
FIG. 1 is a high speed drive for a two-dimensional valve in accordance with a preferred embodiment of the present invention;
FIG. 2 is a schematic cross-sectional view of a wet piezoelectric two-dimensional (2D)) electrohydraulic high-speed switch valve according to a preferred embodiment of the present invention;
FIG. 3 is a view showing the coupling of the spool, the piezoelectric actuator and the couple transmission mechanism in the switching valve shown in FIG. 1;
fig. 4 is a sectional view of a spool in the switching valve shown in fig. 1;
FIG. 5 is a structural position relationship diagram of a piezoelectric actuator and a couple transmission mechanism in the switching valve shown in FIG. 1;
fig. 6 is a lock coupling block in the couple transmission mechanism of the on-off valve shown in fig. 1.
Fig. 7 is a sealing cap in the on-off valve shown in fig. 1.
FIG. 8 is an exploded view showing the operation of the switching valve shown in FIG. 1;
FIG. 9 is an explanatory view of an enlarged relationship view of the displacement of the spool in any of the embodiments of the present invention;
FIG. 10 is a schematic structural diagram of a half-bridge piezoelectric two-dimensional (2D) electro-hydraulic proportional pressure reducing valve according to a preferred embodiment of the present invention;
FIG. 11 is a schematic cross-sectional view of a two-dimensional (2D) electro-hydraulic proportional pressure relief valve of the present invention;
FIG. 12 is a cross-sectional view of the relief valve body shown in FIG. 10;
FIG. 13 is a schematic structural view of a piezoelectric control portion of the pressure reducing valve shown in FIG. 10;
FIG. 14 is a structural view of a valve cartridge of the pressure reducing valve shown in FIG. 10;
FIG. 15 is a simplified full bridge piezoelectric two dimensional (2D) electro-hydraulic high speed reversing valve in accordance with a preferred embodiment of the present invention;
FIG. 16 is a schematic view of the internal construction of the reversing valve shown in FIG. 15;
FIG. 17 is a view of the internal structure of the reversing valve body shown in FIG. 15;
fig. 18 is a schematic diagram of the structure of the piezoelectric module of the reversing valve shown in fig. 15.
FIG. 19 is a schematic view of the reversing valve piezoelectric module mounting arrangement shown in FIG. 15;
FIG. 20 is a cross-sectional view of the spool of the reversing valve of FIG. 15;
FIG. 21 is a schematic cross-sectional view of a half-bridge piezoelectric two-dimensional (2D) threaded cartridge valve in accordance with a preferred embodiment of the present invention;
FIG. 22 is a schematic view of the side piezoelectric actuator of the threaded cartridge valve of FIG. 21.
FIG. 23 is a side view of the integral bellows shaft of the threaded cartridge valve of FIG. 21.
Detailed Description
For a more clear understanding of the technical features, objects and effects of the present invention, embodiments of the present invention will now be described in detail with reference to the accompanying drawings. In the description of the present invention, it is to be understood that the terms "left", "right", and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In one general aspect of the present invention, a high speed driving apparatus for such a two-dimensional valve may include: an actuator for generating a linear displacement in a tangential direction with respect to a spool shaft of the two-dimensional valve by, for example, electrostrictive, optical, pyroelectric, or magnetostrictive manner; and the transmission part is connected with the actuating part and is used for transmitting the linear variable displacement generated by the actuating part to the valve core or the valve sleeve of the two-dimensional valve so as to drive the valve core or the valve sleeve to rotate, and simultaneously, different rotating displacement amplification effects are generated by changing the length of the force arm of the tangential acting force of the actuating part, so that the axial opening of the valve core is controlled by a spiral servo mechanism.
Fig. 1 shows a high-speed driving device for a two-dimensional valve according to a preferred embodiment of the present invention, specifically, in a typical example, an actuating portion 1 includes an adjusting bolt 3 and a piezoelectric stack 4; the transmission part comprises a pre-tightening reset spring 5, a locking connection block 6 and a linear bearing 7. The adjusting bolt 3 and the piezoelectric stack 4 are coaxially and fixedly connected to form a driving unit, the pair of driving units are axially and symmetrically arranged relative to the valve core shaft, and the shaft centers of the pair of driving units are not overlapped; a pair of linear bearings 7 are arranged on a pair of cylinders which are axially and symmetrically arranged on the surface of the locking coupling block 6 and are arranged on the axis of the valve core, and the piezoelectric stack 4 is pressed on the surface of the linear bearings 7 through a pre-tightening return spring 5; the center of the locking connecting block 6 is provided with a spline which has the same direction with the valve core shaft and can be matched with the valve core, and a thread through hole is arranged in the direction vertical to the valve core shaft and used for fastening the valve core; and a spring seat matched with the pre-tightening reset spring 5 is arranged on the clamping connection block 5.
As shown in fig. 2 to 8, there is provided a two-dimensional electro-hydraulic switching valve implementing the above-described high-speed driving apparatus for a two-dimensional valve, which mainly includes a switching valve and the high-speed driving apparatus. The switch valve adopts a piezoelectric stack as a driver. In some embodiments, other suitable actuating elements may also be used.
Specifically, the switching valve includes a sealing cover 11, a valve body 12, a right cover plate 13, a valve core 14, a valve sleeve 15, a plug 16, and a left plug ring 17. The sealing cover 11 has a cavity enough for installing the piezoelectric driver and the transmission part, and two threaded holes 112 are opened on two sides to be connected with the adjusting stud 31, and the other side is tightly attached to the valve body 14 and the left piston ring 17 to form a sealing cavity.
Under the structure, a slender damping hole is formed between the left plug ring 17 and the valve core 14, oil outside the two-dimensional valve system is introduced into the sealed cavity to form a wet environment, and heat generated by the piezoelectric stack or generated by mutual friction of parts in transmission can be taken away by flowing low-pressure oil, so that the problems of displacement deviation, nonlinearity and the like caused by heating of the piezoelectric stack in long-time work are effectively solved, a lubricating effect is achieved, the transmission effect is improved, and the service life of the device is prolonged. The left end of the valve body 12 is provided with an oil return hole 121 communicated with an oil return port (T port), communicated with the sealed cavity and positioned near the top of the switch valve. The choke plug 16 and the left plug ring 17 are tightly attached to two ends of the valve sleeve 15, and the right cover plate 13 is tightly attached to the valve body 12 and the choke plug 16. In the embodiment of the present invention, the spiral servo mechanism may be mainly formed by a high pressure through hole 141, a low pressure counter bore 142, a sloped waist-shaped through hole 151, and a sensitive chamber 152.
The left end of the valve core 14 is provided with an external spline 145, and the shoulder of the right end of the valve core 14 is provided with a high-pressure through hole 141 and communicated with a system pressure port (P port) through a first valve core internal channel 144. The valve core is provided with a pair of low-pressure counter bores 142 on the right end shoulder and communicated with an oil return port (T port) through a second valve core internal channel 143, and the pair of low-pressure counter bores 142 are not communicated with each other and are positioned at the same circumferential position as the high-pressure through hole 141.
The valve sleeve 15 is provided with an oblique waist-shaped through hole 151, the valve sleeve 15 is provided with a sensing channel on the oblique waist-shaped through hole 151, the sensing channel is communicated with a right end sensing cavity 152 of the valve core, two arch-shaped holes can be obtained by intersecting the oblique waist-shaped through hole 151 with the high-low pressure holes when the oblique waist-shaped through hole 151 works, and when the opening of the valve core of the piezoelectric type 2D electro-hydraulic switch valve is zero, the areas of the two arch-shaped holes obtained by intersecting the oblique waist-shaped through hole 151 with the high-low pressure holes on the.
In one embodiment of the present invention, the number of the high pressure through holes 141 and the low pressure counter bore holes 142 in the circumferential direction of the valve core can be increased, but the number of the high pressure through holes and the low pressure counter bore holes must be equal and distributed at intervals. When the processing conditions are met, the number of the high-pressure holes 141 and the low-pressure counter bore holes 142 is increased, so that on one hand, the speed gain of the valve core 14 during rotation can be improved, and finally the dynamic response of the valve core is faster, on the other hand, the control redundancy of the pilot stage can be increased, and under the condition that one or some high-pressure holes are blocked, other high-pressure holes can work. The two numbers must be equal and distributed at intervals, so as to ensure the valve core 14 to be stressed in the radial direction to be balanced, and the processing is simpler and more convenient.
Preferably, the actuating part comprises an actuating element and an adjusting device, and the transmission part comprises a valve core clamping device and a resetting device. In one embodiment, the valve core clamping device is one or more locking coupling blocks, and the reset device is preferably a reset spring. In other embodiments, the configuration of the cartridge clamping device and the reset device may vary.
In one embodiment, the actuating portion further comprises an actuating element and an adjusting device coupled to the actuating element, and the transmitting portion further comprises a rotatable valve sleeve and the above-mentioned resetting device. As previously mentioned, in some embodiments a piezoelectric driver is used as the actuation element. As shown in fig. 3 and 5, each piezoelectric driver may include an adjusting stud 31 and a piezoelectric stack 32, and each piezoelectric stack 32 may be the same cylinder and is fixedly connected to the adjusting stud 31. Each adjustment stud 31 is threadedly coupled to an internally threaded hole 112 of the sealing cap 11, and each piezoelectric stack 32 is concentrically and fixedly coupled to each corresponding adjustment stud 31 on one side and is in contact with the outer circumferential surface of the corresponding linear bearing 21 on the other side, and each adjustment stud 31 can adjust the initial position of the corresponding piezoelectric stack 32. The projections of each adjusting stud 31 on the vertical plane are not coincident. When the spool 14 opening is zero, the central axis of each adjusting stud 31 intersects and is perpendicular to the central axis of the corresponding contacting linear bearing 21.
In one embodiment, the transmission portion comprises a support element for reducing friction between the actuator portion and the transmission portion during transmission of the linear deformation energy. In the present embodiment, the support member is a linear bearing 21.
The actuating part comprises a pre-tightening device for ensuring the linear deformation energy transmission efficiency of the actuating part. In the present embodiment, the support member is a return spring 24 optionally pre-compressed.
As shown in fig. 3, 5 and 6, the transmitting portion specifically includes a locklinear bearing 21, a set screw 22, a lockcoupling piece 23, and a return spring 24. The position where the locking connecting block 23 contacts each return spring 24 is provided with a circular counter bore 231 with a radius slightly larger than that of the return spring to play a limiting role, and the position where the sealing cover 11 contacts the return spring 24 is provided with a circular boss 111 with a radius slightly smaller than that of the return spring to play a limiting role. The locking coupling piece 23 has an internal spline 233 in the middle in the axial direction of the valve body 14, and a threaded hole 234 opened in the radial direction to communicate with each other. The locking coupling piece 23 comprises two centrosymmetric protruding rods 232 on which the same linear bearing 21 is mounted. Each return spring 24 is arranged in central symmetry about the locking coupling block 23, one end face of each return spring is tightly attached to the locking coupling block 23, the other end face of each return spring is tightly attached to the sealing cover 11, and the projections of each return spring 24 on the horizontal plane are not overlapped. The left end external spline 145 of the valve core 14 is tightly matched with the locking connecting block internal spline 233, and the set screw 22 is matched with the radial threaded hole 234 of the locking connecting block, so that the purpose of locking the valve core 14 is achieved.
On the basis of the above-described embodiments, a high-speed driving method for a wet piezoelectric type high-pressure large-flow two-dimensional switching valve is realized, including:
generating linear variable displacement relative to the valve core shaft body of the two-dimensional valve in a tangential direction in an electrostrictive or magnetostrictive mode; and
the linear variable displacement generated by the actuating part is transmitted to the valve core or the valve sleeve of the two-dimensional valve to drive the valve core or the valve sleeve to rotate, meanwhile, different rotating displacement amplification effects are generated by changing the length of the force arm of the tangential acting force of the actuating part, and then the axial opening of the valve core is controlled by a spiral servo mechanism.
In the high-speed driving method of the switch valve, as shown in fig. 8-a, the opening of the valve core 14 is zero in the initial state, the areas of two arch holes formed by the intersection of the kidney-shaped through hole 151 and the high-low pressure hole of the valve core shoulder are equal, the pressure of the sensing cavity 152 is half P/2 of the system pressure, the effective area of the oil in the sensing cavity 152 acting on the valve core 14 is S, meanwhile, the pressure of the oil cavity at the leftmost end is the system pressure P, and the effective area of the step surface acting on the valve core is S/2, at this time, the valve core 14 is in a balanced state.
When the piezoelectric driver is powered on, as shown in fig. 8-b, when the two pairs of piezoelectric stacks 32 extend by Δ Xy to push the corresponding linear bearings 21, the locking coupling block 23 is driven to rotate by Δ θ, and the valve element 14 is driven to rotate, so that the intersection areas of the oblique waist-shaped through holes 151 and the high-pressure through holes 141 and the low-pressure counter bores 142 are respectively changed.
as shown in fig. 8-c, the pressure in the sensing chamber 152 changes, the left and right pressures of the valve element 14 are unbalanced, and then the axial movement Δ Xm occurs, because of the helix angle α of the oblique waist-shaped through hole 151, in the axial movement process of the valve element 14, the intersection areas of the oblique waist-shaped through hole 151 and the high-pressure through hole 141 and the low-pressure counterbore 142 are the same again, the pressure in the sensing chamber 152 is restored to P/2, the axial stress of the valve element 14 is balanced again, and therefore the opening size of the final valve element 14 is controlled by controlling the voltage signal input to the piezoelectric stack 32, and the electro-hydraulic control is completed.
Compared with other electro-hydraulic switch valves, the two-dimensional (2D) electro-hydraulic switch valve adopts the piezoelectric driver to drive the transmission part and drive the valve core 14 to rotate, so that the linear displacement of the piezoelectric stack 32 is changed into the rotary motion of the valve core 14, the axial displacement amplification of the valve core 14 is realized by combining the principle of the 2D valve, and the change of the amplification factor can be easily realized by changing the eccentric distance or the helix angle of the oblique waist-shaped through hole 151 during the action of the couple.
in the method, the amplification relation of the deformation displacement generated by the rotation of the valve core is extracted, and as shown in fig. 9, the displacement amplification factor of the valve core is calculated as follows, when preset e is 0.5mm and α is 3.12 degrees, delta X is inputyAnd (3) the amplification factor K is approximately equal to 208, namely the micron-sized output of the piezoelectric stack is amplified by the switching valve of the high-speed driving device for implementing the two-dimensional valve, and the valve core is displaced by approximately 208 times to reach an opening of 2 mm.
Figure GDA0002419227180000071
Figure GDA0002419227180000072
Figure GDA0002419227180000073
Wherein
Figure GDA0002419227180000074
The magnification factor can be obtained from the above formula (3)
Figure GDA0002419227180000075
In the above formula:
o-the axis of the valve core,
a-the axis of the initial extension rod,
a' -the final shaft center of the extension rod,
d, the piezoelectric stack and the linear bearing bear the initial contact,
d' -the piezoelectric stack and the linear bearing bear the final contact,
the rest of the letters are auxiliary points,
ΔXy-the amount of expansion and contraction of the piezoelectric stack,
ΔXm-an axial displacement of the valve spool,
r1the distance between the axis of the extension rod and the axis of the valve core,
r2-the radius of the valve spool,
b-the tangential right-angle side length of the oblique waist-shaped through hole,
alpha-the helix angle of the oblique waist-shaped through hole,
beta-the deflection angle of the zero position,
delta theta is the rotation angle of the valve core,
e-the eccentricity of the roller, the eccentric distance,
k-displacement magnification.
As shown in fig. 10 to 14, there is provided a two-dimensional electro-hydraulic proportional pressure reduction implementing the above-described high-speed driving apparatus for a two-dimensional valve, which includes a pressure reducing valve, a connecting plate, and a pressure electric control mechanism. Specifically, as shown in fig. 10, 11, 12 and 14, the pressure reducing valve includes an end cap 26, a valve body 1, a valve core 7, a reset mechanism and a shaft end sealing cover plate 14; the reset mechanism comprises an adjusting gasket 8, a pressure spring 15 and a spring seat 9; the adjusting gasket 8 and the spring seat 9 are respectively matched with the valve core 7 and the connecting block to enable the valve core 7 to be in a positive opening state; two identical piezoelectric actuators and couple transmission mechanisms in the piezoelectric control mechanism are installed in the sealed cover 3. A sensitive cavity is formed between the left end of the valve core 7 and the end cover 26 through the left end rectangular sensing channel 16 of the valve body 1; two pairs of high-pressure and low-pressure holes are formed in the shoulder at the left end of the valve core 7; a pair of high-pressure through holes 25 are formed in the right side of the piston section 24 of the valve core 7; a high-pressure hole on a shoulder at the left end of the valve core 7 is connected with a high-pressure through hole 25 at the right side of a piston section 24 of the valve core 7 through an internal channel of the valve core 7, and the high-pressure through hole 25 is communicated with a high-pressure port P at the right side of the valve body 1; a low-pressure hole 23 on a shoulder at the left end of the valve core 7 is communicated with an oil return port T at the left side of the valve body 1; the rectangular sensing channel 16 can be intersected with the high-low pressure hole in the rotation process of the valve core 7; when the half-bridge piezoelectric type 2D electro-hydraulic proportional pressure reducing valve core 7 is opened, the areas of the rectangular sensing channels 16 which are intersected with the high-low pressure holes of the shoulder of the valve core 7 are equal.
As shown in fig. 11 and 13, each piezoelectric actuator includes an adjusting stud 13 and a piezoelectric stack 27, and each piezoelectric stack 27 is a same cylinder and is fixedly connected to the adjusting stud 13. Each adjusting stud 13 is connected with the threaded hole in the sealing cover 3 through threads, one surface of each piezoelectric stack 27 is concentrically and fixedly connected with each corresponding adjusting stud 13, the other surface of each piezoelectric stack 27 is in contact with the outer circular surface of the corresponding linear bearing 11, and each adjusting stud 13 can adjust the initial position of the corresponding piezoelectric stack 27. The projections of the adjusting studs 13 on the vertical plane are not coincident. When the valve core 7 is opened, the central axis of each adjusting stud 13 intersects with and is perpendicular to the central axis of the corresponding linear bearing 11.
A shaft hole is arranged in the right middle of the locking connecting block 10, and a threaded through hole 21 is formed in the radial direction of the shaft hole of the locking connecting block 10; the locking coupling block 10 comprises two centrosymmetric cylinders; the same linear bearings 11 are arranged on the two cylinders of the locking connecting block 10; each return spring 12 and each piezo-electric stack 27 are arranged in a central symmetrical manner with respect to the locking coupling piece 10; a circular counter bore with the radius slightly larger than that of the return spring 12 is arranged at the position where the locking connecting block 10 is contacted with each return spring 12; the sealing cover 3 is contacted with the other end of the return spring 12; the projections of each return spring 12 on the horizontal plane are not coincident; the right end of the valve core 7 is tightly matched with the shaft hole of the locking connecting block 10; the set screw is matched with the radial thread through hole 21 of the shaft hole of the locking connecting block 10, and the purpose of locking the valve core 7 is achieved.
The working principle of the half-bridge piezoelectric two-dimensional (2D) electro-hydraulic proportional pressure reducing valve is as follows: in an initial state, the valve core 7 is in a positive opening, two areas obtained by intersection of the rectangular sensing channel 16 and the high-low pressure hole on the shoulder of the valve core 7 are equal, the pressure of the sensing cavity is half of the system pressure, the effective area of oil in the sensing cavity acting on the valve core 7 is S, meanwhile, the pressure of the oil cavity on the rightmost side is the system pressure, the effective area of the oil cavity acting on the step surface of the valve core 7 is S/2, and the valve core 7 is in a working state at the. When the piezoelectric actuator is powered on, the two pairs of piezoelectric stacks 27 extend to push the corresponding linear bearings 11, the locking connection block 10 is driven to rotate anticlockwise, and the valve core 7 is driven to rotate, so that the intersection areas of the rectangular sensing channel 16 and the high-pressure through hole 25 and the low-pressure through hole 23 are changed respectively, the intersection area of the rectangular sensing channel 16 and the high-pressure through hole 25 is increased, the intersection area of the rectangular sensing channel 16 and the low-pressure through hole 23 is decreased, the pressure of the sensitive cavity is increased, the pressure on the left side of the valve core 7 is increased and moves rightwards, the opening area of the valve core 7 is decreased, and the pressure. The valve core 7 moves rightwards to enable the pressure spring 15 to generate elastic force to be gradually increased, and when the force of the left end and the force of the right end of the valve core 7 are equal, the valve core 7 is balanced again, so that the voltage signal input to the piezoelectric stack 27 is controlled to control the opening size of the valve core 7 finally, and electro-hydraulic control is completed. Compared with other electro-hydraulic pressure reducing valves, the two-dimensional electro-hydraulic pressure reducing valve adopts the piezoelectric actuator to drive the couple transmission mechanism and drive the valve core 7 to rotate, so that the linear displacement of the piezoelectric stack 27 is changed into the rotary motion of the valve core 7, and the axial displacement amplification of the valve core 7 is realized by combining the principle of a two-dimensional (2D) valve.
As shown in fig. 15 to 20, a wet simplified full bridge piezoelectric type 2D electro-hydraulic high speed directional valve implementing the above high speed drive apparatus for a two-dimensional valve is provided, which includes a directional valve body, a piezoelectric driver actuating element, and a couple transmission mechanism mechanically coupling the directional valve body and the actuating element. In an embodiment of the invention, the actuating element and the couple transmission mechanism are arranged in the main body structure of the reversing valve body.
Specifically, as shown in fig. 15, 16, 17 and 20, the shape of the reversing valve can be defined by assembling the end cover 1, the valve body 2 and the valve sleeve 3 with each other. Sometimes, the actuating member may also be provided separately from the reversing valve body. A cavity is defined in the end cap 1 sufficient to receive and mount an actuating element (e.g., piezoelectric driver, thermocouple) and a couple transmission mechanism). In one embodiment, the end cap 1 is tightly attached to the valve body 2 to form a sealed cavity 6 with a plug 5, two sides of the plug 5 are respectively tightly attached to the valve sleeve 3 and the end cap 1, a drainage groove 7 is formed in a contact surface of the end cap 1 and the valve body 2, the drainage groove 7 is connected with the sealed cavity 6, and a threaded hole 8 is formed in the end cap 1 and is used for respectively coupling with an adjusting stud 9 of an actuating element and a tightening stud 10 of a force couple transmission mechanism.
In one embodiment, the valve body 2 is provided with a long damping hole 11 connected with the oil return cavity 27, and oil at an oil return port (T port) is introduced into the sealing cavity 6 through the drainage groove 7 to form a wet environment. The shoulders at the two ends of the valve core 4 and the plugs 5 form sensitive cavities 12, high-pressure through holes 13 are formed in the shoulders at the left end and the right end of the valve core 4, an axis channel 14 is formed in the axis position of the valve core 4 and is communicated with the high-pressure through holes 13 at the two ends, oblique waist-shaped holes 15 are formed in the centrosymmetric positions of the two ends of the valve sleeve 3, sensing channels 16 are formed in the oblique waist-shaped holes 15 in the surface of the valve sleeve 3, and the sensing channels 16 are communicated with the sensitive cavities 12. The two ends of the valve core 4 are provided with external splines 17, the middle part of the valve core 4 is provided with a high-pressure hole 18, the axle center channel 14 of the valve core 4 is communicated with a system pressure port (P port) through the high-pressure hole 18, high-pressure oil is introduced into the high-pressure through hole 13 through the axle center channel 14 through the high-pressure hole 18, the inclined waist-shaped hole 15 can be intersected with the high-pressure through hole 13 in the rotation process of the valve core 4, and high-pressure oil is introduced into the sensitive cavities 12 on the left side and the right. When the opening of the valve core 4 of the wet simplified full-bridge piezoelectric type 2D electro-hydraulic high-speed reversing valve is zero, the areas obtained by intersection of the high-pressure through holes 13 of the shoulders on the two sides of the valve core 4 and the bevel edges of the corresponding inclined waist-shaped holes 15 are equal.
As shown in fig. 2, 4 and 5, each piezoelectric driver comprises an adjusting stud 9 and a piezoelectric stack 19, and the couple transmission mechanism comprises a contact steel ball 20, a locking coupling block 21, a return spring 22 and a tightening stud 10. Each piezoelectric stack 19 is the same cylinder, one end is concentrically connected with the adjusting stud 9, and the other end is cut into a semicircular step along the axis direction. Each adjusting stud 9 is connected with the end cover 1 through a thread pair; the piezoelectric stack 19 is in contact with the surface of the steel contact ball 20 at the center of the step.
When the piezoelectric stacks 19 push the corresponding contact steel balls 20, two sets of couples with opposite directions can be generated, in order to avoid mutual interference of the two sets of piezoelectric stacks 19, the directions of the step notches during installation of the piezoelectric stacks 19 are opposite to the axial movement directions of the valve core 4 when the self-driven valve core 4 rotates, and micron-scale interference between the piezoelectric stacks 19 and the corresponding contact steel balls 20 is avoided through axial millimeter-scale displacement.
The couple transmission mechanism comprises a contact steel ball 20, a locking connection block 21, a return spring 22 and a tightening stud 10, and is arranged in the left end cover 1 and the right end cover 1. Two groups of centrosymmetric cylinders 25 are eccentrically arranged on the locking connecting block 21 in the horizontal and vertical directions, and the projections of each group of adjusting studs 9 on the vertical plane are not coincident. Each cylinder 25 of the locking coupling piece 21 has a spherical groove for receiving the contact steel ball 20. The locking connecting block 21 is provided with two circular counter bores 26 with the radius slightly larger than that of the return spring 22, the two circular counter bores 26 are connected with the return spring 22, and the axes of the two circular counter bores 26 are overlapped. The return springs 22 of the force couple transmission mechanism in the two end covers 1 are vertically arranged.
The right middle of the locking coupling block 21 is provided with an internal spline 23, and a threaded through hole 24 is formed in the radial direction of the internal spline 23. The external splines 17 at the two ends of the valve core 4 are tightly matched with the internal splines 23 of the locking and connecting block 21, and a screw is arranged in the threaded through hole 24 to fix the locking and connecting block 21 and the valve core 4.
The working principle of the wet-type simplified full-bridge piezoelectric 2D electro-hydraulic high-speed reversing valve is as follows: in the initial state, the opening of the valve core 4 is zero, the areas of two arched holes formed by the intersection of the inclined waist-shaped hole 15 and the high-pressure through hole 13 of the shoulder of the valve core 4 are equal, the pressure of the sensitive cavities 12 on the two sides is the system pressure P, and the valve core 4 is in a balanced state at the moment.
When the piezoelectric driver is powered on, the two pairs of piezoelectric stacks 19 extend under the inverse piezoelectric effect to push the corresponding contact steel balls 20 to drive the locking connection block 21 to rotate, the locking connection block 21 drives the valve core 4 to rotate, so that the intersection areas of the inclined waist-shaped holes 15 on the two sides and the high-pressure through holes 13 respectively change, the pressure of the sensitive cavities 12 on the two sides changes, the left pressure and the right pressure of the valve core 4 are unbalanced, and then axial movement is generated, because of the existence of the right-angled trapezoid inclined edges, in the process of axial movement of the valve core 4, the intersection areas of the inclined waist-shaped holes 15 and the high-pressure through holes 13 on the two sides are the same again, the pressure of the sensitive cavities 12 on the two sides is restored to be P, and the valve core 4 is balanced again, so that the voltage signal input.
Compared with other electrohydraulic switch valves, the 2D electrohydraulic reversing valve adopts the piezoelectric driver to drive the couple transmission mechanism and drive the valve core 4 to rotate, so that the linear displacement of the piezoelectric stack 19 is changed into the rotary motion of the valve core 4, the axial displacement amplification of the valve core 4 is realized by combining the principle of the 2D valve, and the change of the amplification factor can be easily realized by changing the eccentric distance or the inclination angle of the bevel edge of the inclined waist-shaped hole 15 during the action of the couple.
In one embodiment, the helical angle of the oblique waist-shaped hole (15) is 1-3 degrees.
In one embodiment, the length of the piezoelectric stack (19) is 15mm to 25mm, and the output displacement is 0 μm to 25 μm.
In one embodiment, the eccentric distance of the centrosymmetric cylinder (25) on the horizontal and vertical eccentric arrangement of the locking coupling block (21) is 0.2-0.5 mm.
As shown in fig. 21 to 23, a half-bridge piezoelectric two-dimensional screw cartridge valve for implementing the high-speed drive device for a two-dimensional valve includes a screw cartridge valve body, a piezoelectric actuator, and a transmission portion.
Specifically, the threaded cartridge valve shown in fig. 21 mainly includes a cover plate 1, a piezoelectric stack 2, an integral bellows coupling 3, an annular sleeve 4, a plug 5, a cartridge valve body 6, a two-dimensional valve element 7, a pin 8, a sealing element, and the like. The piezoelectric actuating part comprises a piezoelectric stack 2 and an integrated corrugated pipe coupler 3, and the transmission part comprises the integrated corrugated pipe coupler 3 and a pin 8. The plug 5 and the valve core 7 are in coaxial clearance fit, an O-shaped seal ring is arranged between the plug 5 and the valve core 7, and a left high-pressure cavity e with constant high pressure is formed between the plug 5 and the left end face of the step a on the valve core 7 due to a high-pressure flow passage b in the valve core 7; meanwhile, the high-pressure flow passage b is connected with a high-pressure through hole 701 arranged on a step c at the right section of the valve core 7; a parallelogram groove 601 is formed in the high-pressure through hole corresponding to the inner wall of the valve body 6, the parallelogram groove 601 is connected with a right sensitive cavity d, the parallelogram groove 601 is also connected with a T port, the three parts form a guide-control stage sensitive oil cavity d, and the pressure of the sensitive oil cavity d is determined by the dynamic liquid resistance among the three parts;
as shown in fig. 22 and 23, the present embodiment employs a pair of piezoelectric stacks 2 that are circumferentially symmetric about the valve core axis, and the projections of the piezoelectric stacks 2 on the horizontal plane do not completely coincide; the piezoelectric stack 2 is bonded with the silicon steel sheet 10 to protect the piezoelectric stack from being damaged due to stress concentration; the integrated corrugated pipe 2 is connected with the valve core through a corrugated pipe part h in a pin mode; the integrated corrugated pipe comprises a retainer g tightly holding the piezoelectric stack 2 and an elastic cross beam f arranged in the center; the elastic cross beam f is symmetrically provided with a pair of circular grooves in the circumferential direction of the valve core shaft and used for being filled with the cylindrical rollers 11, so that radial friction generated between the piezoelectric stack 2 and the elastic cross beam f of the integrated corrugated pipe 3 during working can be reduced; when the piezoelectric stack is installed in the holder g, the elastic beam f is in a pre-twisted state so as to achieve the effect of pre-tightening the piezoelectric stack, and ensure that the linear variable displacement of the actuating part is effectively transmitted to the transmitting part, and in other embodiments, the structures of the pre-tightening device and the friction reducing device can be changed.
The working principle of the threaded cartridge valve is as follows: the parallelogram groove 601 is intersected with the high-pressure master mouse through hole 701 to obtain a tiny arch hole area, the right side of the parallelogram groove 601 is always intersected with the pressure sensitive cavity d in the motion process of the valve core 7, the right side of the parallelogram groove 601 is always intersected with the oil return port to form two tiny opening areas to form a hydraulic resistance half bridge, and the pressure of the sensitive cavity d is controlled by the hydraulic resistance half bridge; the damping effect of the sensitive cavity d and the low-pressure oil cavity in the movement process is determined by the radial sectional area of the parallelogram groove, and the value is invariable, so that the pressure of the sensitive cavity d can be obtained only by analyzing the throttle area of the arch hole; during balancing, the right side area of the step c acted by the oil hydraulic pressure is twice of the left side area of the step a, the pressure of the pressure sensitive sensor d is half of the system pressure, namely P/2, at the moment, the left and right stress of the valve element shoulders a and c are balanced, and the valve element is in a balanced state.
When the valve core is actuated, the piezoelectric stack outputs and displaces voltage, acts on the eccentrically arranged cylindrical roller 11 to generate a couple which enables the cylindrical roller to rotate anticlockwise, a rotation angle is transmitted to the valve core through the bellows h part, the high-pressure through hole 701 on the valve core step c moves anticlockwise, the area of the arch hole is increased, the pressure of the pressure sensitive cavity d is reduced, the left and right stress of the valve core steps a and c is unbalanced, the valve core is pushed to move leftwards, the area of the arch hole is gradually reduced in the leftward movement process, the pressure of the sensitive cavity d rises until the left and right stress of the valve core 7 are equal again, the valve core stops moving, the valve core displacement, namely the opening is delta X, the spiral servo positioning control process is completed, the electro-hydraulic control is completed, the size of the valve core opening is determined by the rotation angle of the valve core, the two are in one-to-one correspondence, only the piezoelectric stack is powered off during, the principle of axial return is the same as above. The arrangement of the corrugated pipe h enables the rotation angle to be transmitted to the valve core 7, but when the valve core 7 moves axially, the corrugated pipe h stretches axially, the piezoelectric stack 2 part of the driving part is not affected, and the friction between the actuating part and the transmission part in the linear variable displacement transmission process is reduced.
While the present invention has been described with reference to the embodiments shown in the drawings, the present invention is not limited to the embodiments, which are illustrative and not restrictive, and it will be apparent to those skilled in the art that various changes and modifications can be made therein without departing from the spirit and scope of the invention as defined in the appended claims.

Claims (4)

1. A high speed drive for a two dimensional valve, comprising:
the actuating part is used for generating linear variable displacement relative to the tangential direction of a valve core shaft body of the two-dimensional valve in an electrostrictive mode; and
the transmission part is connected with the actuating part and is used for transmitting the linear variable displacement generated by the actuating part to the valve core or the valve sleeve of the two-dimensional valve so as to drive the valve core or the valve sleeve to rotate, and simultaneously, different rotating displacement amplification effects are generated by changing the length of the force arm of the tangential acting force of the actuating part, so that the axial opening of the valve core is controlled by a spiral servo mechanism;
the actuating part comprises an adjusting bolt and a piezoelectric stack; the transmission part comprises a pre-tightening reset spring, a locking connection block and a linear bearing, the adjusting bolt and the piezoelectric stack are fixedly connected into a driving unit with the same axle center, the pair of driving units are axially and symmetrically arranged relative to the axle center of the valve core, and the axle centers of the pair of driving units are not overlapped; a pair of linear bearings are arranged on a pair of cylinders which are axially and symmetrically arranged relative to the valve core shaft on the surface of the locking coupling block, and the piezoelectric stack is tightly pressed on the surface of the linear bearings through a pre-tightening return spring; the center of the locking connecting block is provided with a spline which is consistent with the direction of the valve core shaft and can be matched with the valve core, and a thread through hole is arranged in the direction vertical to the valve core shaft and used for fastening the valve core; and a spring seat matched with the pre-tightening reset spring is arranged on the locking connecting block.
2. A high-speed drive apparatus according to claim 1, wherein: the actuating part also comprises a step for preventing the actuating part from interfering with the shaft body of the valve core when the valve core or the valve sleeve is driven to rotate in two directions.
3. A high-speed drive apparatus according to claim 1 or 2, characterized in that: the transmission part comprises a supporting part for reducing friction between the actuating part and the transmission part in the process of transmitting the linear variable displacement.
4. A high-speed drive apparatus according to claim 1 or 2, characterized in that: the actuating part comprises pretensioning means for ensuring an effective transmission of the linear deformation displacement of the actuating part to the transmission part.
CN201910434746.6A 2019-05-23 2019-05-23 High-speed driving device for two-dimensional valve Active CN110219846B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910434746.6A CN110219846B (en) 2019-05-23 2019-05-23 High-speed driving device for two-dimensional valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910434746.6A CN110219846B (en) 2019-05-23 2019-05-23 High-speed driving device for two-dimensional valve

Publications (2)

Publication Number Publication Date
CN110219846A CN110219846A (en) 2019-09-10
CN110219846B true CN110219846B (en) 2020-06-02

Family

ID=67818266

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910434746.6A Active CN110219846B (en) 2019-05-23 2019-05-23 High-speed driving device for two-dimensional valve

Country Status (1)

Country Link
CN (1) CN110219846B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111536264B (en) * 2020-05-14 2021-09-28 威仕喜(浙江)流体技术有限公司 Pilot valve structure and have its sliding valve
CN114427554B (en) * 2021-12-28 2023-06-20 南京航空航天大学 Slide valve type high-speed switching valve driven by piezoelectric stack and control method

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101319688A (en) * 2007-06-04 2008-12-10 北京航空航天大学 Novel intelligent piezo-electricity type electrohydraulic servo valve
CN102213243A (en) * 2011-06-01 2011-10-12 武汉科技大学 Composite high-efficiency high-flow servo valve
CN103470419A (en) * 2013-08-16 2013-12-25 浙江展途动力科技有限公司 Piezoelectric direct-driven fuel injector with rotation type valve core
CN203627917U (en) * 2013-04-27 2014-06-04 浙江工业大学 Pretensioning-pretwisting type full bridge 2D electric-hydraulic proportional reversing valve
CN104534124A (en) * 2014-12-01 2015-04-22 浙江工业大学 Displacement amplifying type 2D electro-hydraulic proportional directional valve
CN105465083A (en) * 2016-01-25 2016-04-06 浙江大学城市学院 Symmetrical full-bridge bi-directional 2D electro-hydraulic proportional reversing valve
WO2019054352A1 (en) * 2017-09-12 2019-03-21 川崎重工業株式会社 Spool valve device, and spool valve

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101319688A (en) * 2007-06-04 2008-12-10 北京航空航天大学 Novel intelligent piezo-electricity type electrohydraulic servo valve
CN102213243A (en) * 2011-06-01 2011-10-12 武汉科技大学 Composite high-efficiency high-flow servo valve
CN203627917U (en) * 2013-04-27 2014-06-04 浙江工业大学 Pretensioning-pretwisting type full bridge 2D electric-hydraulic proportional reversing valve
CN103470419A (en) * 2013-08-16 2013-12-25 浙江展途动力科技有限公司 Piezoelectric direct-driven fuel injector with rotation type valve core
CN104534124A (en) * 2014-12-01 2015-04-22 浙江工业大学 Displacement amplifying type 2D electro-hydraulic proportional directional valve
CN105465083A (en) * 2016-01-25 2016-04-06 浙江大学城市学院 Symmetrical full-bridge bi-directional 2D electro-hydraulic proportional reversing valve
WO2019054352A1 (en) * 2017-09-12 2019-03-21 川崎重工業株式会社 Spool valve device, and spool valve

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
二维电液比例换向阀动态特性及稳定性分析;李胜等;《机械工程学报》;20160131;第52卷(第2期);第202-211页 *

Also Published As

Publication number Publication date
CN110219846A (en) 2019-09-10

Similar Documents

Publication Publication Date Title
CN110219846B (en) High-speed driving device for two-dimensional valve
US4995587A (en) Motion amplifier employing a dual piston arrangement
JP2008523314A (en) Small eccentric screw pump
JP4903778B2 (en) Variable pump or hydraulic motor
CN102057168B (en) Fluid servo and applications
WO2014173102A1 (en) Pre-tensioning-pre-twisting full-bridge 2d electro-hydraulic proportional directional valve
US20090232590A1 (en) Joint for a motor vehicle
US20140360348A1 (en) Rotary actuator
US6570298B2 (en) Vibration control device and driving method thereof
JP3638286B2 (en) Pilot operated servo valve
US6291928B1 (en) High bandwidth, large stroke actuator
JPH10509790A (en) Electro-hydraulic drive
CN111005907A (en) Electro-hydraulic control valve capable of regulating flow gain
US4329877A (en) Adjustable overload mechanism for a differential pressure transmitter
WO2005073565A1 (en) Hydraulic actuator control valve
CN116045055A (en) Piezoelectric actuator and fluid control valve
CN116221476A (en) Pilot valve and pilot type reversing valve
US11218089B2 (en) Rotary motor with ultrasonic actuator
US6272852B1 (en) High speed actuators and vibrators based on electro-rheological fluids
CN115921261A (en) Piezoelectric type large-amplitude high-frequency electro-hydraulic excitation driver
CN112081938A (en) Piezoelectric driving large-flow fuel valve
JPH0478383A (en) Minute displacement enlarging mechanism
CN114321440B (en) Intelligent material driven differential redundancy servo valve and working method thereof
CN218863394U (en) High-frequency deflection plate jet flow servo valve based on piezoelectric drive and variable cross-section beam deflection
JPS63169779A (en) Displacement enlarging structure for piezoelectric actuator

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant