CN110170887A - A kind of laser couples burnishing device with magnetorheological fluid - Google Patents

A kind of laser couples burnishing device with magnetorheological fluid Download PDF

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Publication number
CN110170887A
CN110170887A CN201910532986.XA CN201910532986A CN110170887A CN 110170887 A CN110170887 A CN 110170887A CN 201910532986 A CN201910532986 A CN 201910532986A CN 110170887 A CN110170887 A CN 110170887A
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China
Prior art keywords
magnetorheological fluid
support
laser
fixed
axis
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CN201910532986.XA
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Chinese (zh)
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CN110170887B (en
Inventor
张争艳
耿康
杨浩飞
乔国朝
张慧慧
戴立达
张建华
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Hebei University of Technology
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Hebei University of Technology
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/005Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/005Blocking means, chucks or the like; Alignment devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00Drives or gearings; Equipment therefor
    • B24B47/20Drives or gearings; Equipment therefor relating to feed movement
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The invention discloses a kind of laser to couple burnishing device with magnetorheological fluid, which includes laser emitter, laser rail, electromagnet, polishing wheel, rotatable support frame, laser rail sliding block, pedestal, workpiece feed arrangement and magnetorheological fluid circulator.The present apparatus is used to polish by magnetorheological with laser coupled, and processing efficiency and machining accuracy are high, and processing quality is good, and processing conditions is easy to control.Magnetorheological fluid becomes class solid under the magnetic fields of electromagnet, and relative to flexible bistrique one by one, under polishing wheel drive and workpiece generates relative motion, plays the role of sanding and polishing.Laser can transfer heat to the surface of workpiece by heat transfer, reduce the anti-shearing force of workpiece surface, soften surface, improve polishing efficiency and quality.Workpiece feed arrangement realizes the Precision Machining to each position of part in irregular shape.Magnetorheological fluid circulator realizes recycling for magnetorheological fluid.Present apparatus Machine Design is ingenious, and manufacturing cost is low.

Description

A kind of laser couples burnishing device with magnetorheological fluid
Technical field
The present invention relates to Ultra-precision Turning field, specifically a kind of laser couples burnishing device with magnetorheological fluid.
Background technique
With the development of science and technology, requirement of the people to precision instrument and measurement accuracy is also higher and higher, especially In optical field.Due to currently pursuing the features such as optical system possesses high-resolution, big visual field, therefore generallys use aspherical mirror and set Meter, but influenced by factors such as polishing tool sizes, the ultraprecise of small radius of curvature concave aspherical surface and free form surface element Processing technology is the huge difficult problem that current optical manufacturing is faced.
Polishing technology is roughly divided into directly contact polishing, interfacial reaction polishing (quasi- contact polishing) and non-contact throwing at present Light.Directly contact polishing is that polishing disk and workpiece directly contact during the polishing process, is acted on by the mechanical grinding of polish abrasive Rubbing action with polishing disk removes material, its advantage is that equipment is simple, process conditions are easy to guarantee, but inefficiency, period Long, at high cost and processing quality not can guarantee.Interfacial reaction polishing is using solid phase reaction or hydration reaction in workpiece surface Reactant is generated, then is removed it by the frictional force of polishing disk.Non-contact polishing refers to that workpiece is not contacted with polishing disk, non- The method for only allowing abrasive material to flow through surface to be machined to be polished under contact condition.The removal amount of non-contact polishing is minimum, can use In machining function crystalline material element and optical element.These polishing technologies all exist in cost, efficiency and polishing precision More or less defect, it is therefore desirable to a kind of polishing method that comparison is comprehensive, and Magnetorheological Polishing has proved to be a kind of effective The low damage of ultra-smooth processing technology.
Magnetorheological fluid is not when adding magnetic field, as common fluid is the same;In addition magnetorheological fluid can be fast behind some strength magnetic field Speed becomes having viscoplastic Bingham medium, the liquid that magnetic field can become again after disappearing again as flowing.Technique of Magnetorheological Finishing Exactly using the flexibility " small abrasive nose " with glutinous modeling behavior that in gradient magnetic rheology occurs for Magnetorheologicai polishing liquid and is formed and Quick relative movement between workpiece makes workpiece surface by very big shearing force, so that workpiece surface material be made to be removed.
Application No. is 201310229989.9 documents to disclose a kind of magnetorheological flatness and reciprocator burnishing device, and workpiece is fixed On non-magnetic fixture, soft magnet plate is equipped between fixture and workpiece spindle, the carrier fluid slot position equipped with magnetorheological fluid is thrown in fixture lower part Light time workpiece immerses in magnetorheological fluid.Working region generates uniform magnetic field under soft magnet plate and electromagnet effect, when work, is located at The electromagnet of carrier fluid slot lower part is driven by reciprocating transmission mechanism, " small abrasive nose " and workpiece polished surface that such magnetorheological fluid is formed Make straight reciprocating in parallel, cooperation workpiece rotation achievees the purpose that precise polished.This burnishing device advantage is structure letter It is single, easy to operate, long and narrow working face easy to process;The disadvantage is that processing efficiency is low, surface roughness is not up to standard, workpieces processing shape It is restricted, each point can not be polished, magnetorheological fluid can not be recycled.
Summary of the invention
In view of the deficiencies of the prior art, the technical issues of present invention intends to solve is to provide a kind of laser and magnetorheological fluid coupling Close burnishing device.
The technical solution that the present invention solves the technical problem, which is to provide a kind of laser and couple to polish with magnetorheological fluid, to be filled It sets, it is characterised in that the device includes laser emitter, laser rail, electromagnet, polishing wheel, rotatable support frame, laser rail Sliding block, pedestal, workpiece feed arrangement and magnetorheological fluid circulator;The magnetorheological fluid circulator includes recycling funnel, returns Receive magnetorheological fluid peristaltic pump, magnetorheological fluid agitator tank, injection magnetorheological fluid peristaltic pump, magnetorheological fluid nozzle, hollow support tube, spray Mouth turntable and nozzle positioning disk;
The laser rail is fixed on pedestal;Laser emitter is installed, bottom is fixed at the top of rotatable support frame Laser rail sliding block;Laser rail sliding block and laser rail cooperate;The polishing wheel is pivotally mounted on pedestal;The electromagnetism Ferropexy is located at immediately below polishing wheel on pedestal;The recycling funnel is fixed on pedestal by hollow support tube;Recycling leakage Bucket is connected to hollow support tube;Nozzle positioning disk is fixed on pedestal;Spray nozzle turntable is pivotally mounted in nozzle positioning disk simultaneously It is realized and is positioned by nozzle positioning disk;Magnetorheological fluid nozzle is fixed in spray nozzle turntable;Recycle funnel by hollow support tube and Conduit is connected to magnetorheological fluid agitator tank, and recycling magnetorheological fluid peristaltic pump is equipped on conduit;Magnetorheological fluid nozzle passes through conduit It is connected to magnetorheological fluid agitator tank, injection magnetorheological fluid peristaltic pump is installed on conduit.
Compared with prior art, the beneficial effects of the invention are that:
(1) present apparatus is used to polish by magnetorheological with laser coupled, and processing efficiency and machining accuracy are high, processing quality Good, processing conditions is easy to control, environmentally protective noise-less pollution, and surface roughness is low, can achieve 0.1 μm.Magnetorheological fluid is in electricity Become class solid under the magnetic fields of magnet, relative to flexible bistrique one by one, is generated relatively under polishing wheel drive with workpiece Movement, plays the role of sanding and polishing.Laser can transfer heat to the surface of workpiece by heat transfer, reduce workpiece surface Anti-shearing force, soften surface, improve polishing efficiency and quality.
(2) by workpiece feed arrangement clamp strap part of starting building is moved freely along X, Y and Z-direction, realizes to shape The Precision Machining of each position of the irregular part of shape, workpiece shapes are unrestricted and polishing is controllable, realize full side Position fixed point polishing.
(3) liquid can be become again when magnetorheological fluid leaves magnetic field, taken under polishing wheel effect by centrifugal force magnetorheological In liquid circulating device, recycling for magnetorheological fluid is realized.
(4) control magnetic field strength by the way of electromagnet, can need real-time control field strength according to polishing, cooperation workpiece into High-precision polishing workpiece is realized to device.
(5) Laser emission can be adjusted by rotatable support frame and laser rail sliding block according to the position of workpiece and polishing wheel Laser is accurately emitted on the magnetorheological fluid acted on workpiece by the position of device and angle.
(6) magnetorheological fluid nozzle is mounted in spray nozzle turntable, and the suitable elevation angle can be rotated to according to Working position, passes through spray Mouth positioning disk is fixed, and realizes Precision Machining.
(7) present apparatus enormously simplifies structure and scale, and Machine Design is ingenious, easy to operate, and manufacturing cost is low, universality By force, ensure that high quality polished also reduces maintenance cost while improving efficiency.
Detailed description of the invention
Fig. 1 is the overall structure axonometric schematic diagram of an embodiment of the present invention.
Fig. 2 is the overall structure schematic front view of an embodiment of the present invention.
Fig. 3 is the overall structure schematic top plan view of an embodiment of the present invention.
Fig. 4 is the workpiece feed arrangement axonometric schematic diagram of an embodiment of the present invention.
Fig. 5 is the top-support and Z axis bracket scheme of installation of an embodiment of the present invention.
Fig. 6 is the fixture top beam and top-support scheme of installation of an embodiment of the present invention.
Fig. 7 is that the overall structure of an embodiment of the present invention removes the axonometric schematic diagram after workpiece feed arrangement.
Fig. 8 is the magnetorheological fluid circulator axonometric schematic diagram of an embodiment of the present invention.
Fig. 9 is the fixture axonometric schematic diagram of an embodiment of the present invention.
In figure: 1, fixture top beam;2, top-support;3, Z axis bracket;4, Z axis main backstop;5, laser emitter;6, it returns Receive funnel;7, laser rail;8, magnetorheological fluid peristaltic pump is recycled;9, magnetorheological fluid agitator tank;10, injection magnetorheological fluid is wriggled Pump;11, electromagnet;12, polishing wheel;13, magnetorheological fluid nozzle;14, hydraulic stem;15, fixture;16, Z axis carriage motor;17,Z Bracing strut ball-screw;18, top-support motor;19, top-support ball-screw;20, hollow support tube;21, workpiece;22, Column support;23, Z axis support guide;24, top-support guide rail;25, column support guide rail;26, rotatable support frame;27, column Support guide sliding block;28, Z axis support guide sliding block;29, top-support guide rail slide block;30, laser rail sliding block;31, polishing wheel Bearing block;32, spray nozzle turntable;33, nozzle positioning disk;34, pedestal;35, top-support feed screw nut;36, fixture top beam lead screw Nut.
Specific embodiment
Specific embodiments of the present invention are given below.Specific embodiment is only used for that present invention be described in more detail, unlimited The protection scope of the claim of this application processed.
The present invention provides a kind of laser to couple burnishing device (abbreviation device, referring to Fig. 1-9), feature with magnetorheological fluid It is that the device includes laser emitter 5, laser rail 7, electromagnet 11, polishing wheel 12, rotatable support frame 26, laser rail cunning Block 30, pedestal 34, workpiece feed arrangement and magnetorheological fluid circulator;
Workpiece feed arrangement includes fixture top beam 1, top-support 2, Z axis bracket 3, Z axis main backstop 4, hydraulic stem 14, folder Have 15, Z axis carriage motor 16, Z axis bracket ball-screw 17, top-support motor 18, top-support ball-screw 19, column branch Frame 22, Z axis support guide 23, top-support guide rail 24, column support guide rail 25, column support guide rail slide block 27, Z axis bracket are led Rail sliding block 28, top-support guide rail slide block 29, top-support feed screw nut 35 and fixture top beam feed screw nut 36;It is described magnetorheological Liquid circulating device includes recycling funnel 6, recycling magnetorheological fluid peristaltic pump 8, magnetorheological fluid agitator tank 9, injection magnetorheological fluid wriggling Pump 10, magnetorheological fluid nozzle 13, hollow support tube 20, spray nozzle turntable 32 and nozzle positioning disk 33;
A plurality of uprights bracket 22 is uniformly fixed on pedestal 34 that (the present embodiment is that four columns bracket 22 is fixed on pedestal 34 quadrangle), it is respectively and fixedly provided with column support guide rail 25 thereon;Column support guide rail slide block 27 is uniformly fixed on Z axis bracket 3 (the present embodiment is that the quadrangle of Z axis bracket 3 is respectively and fixedly provided with a column support guide rail slide block 27), column support guide rail slide block 27 with Respective column support guide rail 25 cooperates;Z axis main backstop 4 is fixed on pedestal 34, is fixed with 14 (this implementation of hydraulic stem thereon Example is that two Z axis main backstops 4 are symmetrically fixed on 34 middle part of pedestal, fixes a hydraulic stem 14 respectively thereon);Hydraulic stem 14 Output end is connect with Z axis bracket 3, realizes the moving along Z-direction of Z axis bracket 3;The top of Z axis bracket 3 is fixed with Z axis support guide 23, the bottom of top-support 2 is fixed with Z axis support guide sliding block 28, and Z axis support guide sliding block 28 is led with respective Z axis bracket Rail 23 cooperates;Z axis carriage motor 16 is fixed on Z axis bracket 3, and output end is fixedly connected with Z axis bracket ball-screw 17;Top Bracket 2 bottom in portion's is fixed with top-support feed screw nut 35, and Z axis bracket ball-screw 17 is matched with top-support feed screw nut 35 It closes, realizes the moving along Y-direction of top-support 2;The top of top-support 2 is fixed with top-support guide rail 24, the bottom of fixture top beam 1 Portion is fixed with top-support guide rail slide block 29, and top-support guide rail slide block 29 and respective top-support guide rail 24 cooperate;Top Carriage motor 18 is fixed on top-support 2, and output end is fixedly connected with top-support ball-screw 19;Fixture top beam 1 Bottom is fixed with fixture top beam feed screw nut 36, and top-support ball-screw 19 and fixture top beam feed screw nut 36 cooperate, realize Fixture top beam 1 along X to move;Fixture 15 is fixed on fixture top beam 1;Workpiece 21 is fixed on 15 bottom of fixture when processing, folder 15 drive workpiece 21 of tool may be implemented in moving freely for X, Y and Z-direction, realize the essence to each position of irregular shape part Really processing;
The laser rail 7 is fixed on pedestal 34;The top of rotatable support frame 26 is equipped with laser emitter 5, can root The Laser emission elevation angle is adjusted according to Working position, bottom is fixed with laser rail sliding block 30;Laser rail sliding block 30 and laser rail 7 Sliding is realized in cooperation, and the position of mobile laser emitter 5 is needed according to processing;The polishing wheel 12 passes through polishing wheel bearing seat 31 It is pivotally mounted on pedestal 34 with bearing, positioned at the inside of center, Z axis main backstop 4 in pedestal 34;The electromagnetism Iron 11 is fixed on pedestal 34, is located at immediately below polishing wheel 12, and the size of electric current is passed through by changing, it is strong to obtain suitable magnetic field Degree;The recycling funnel 6 is fixed on pedestal 34 by hollow support tube 20, between laser emitter 5 and polishing wheel 12; Recycling funnel 6 is connected to hollow support tube 20;Nozzle positioning disk 33 is fixed on pedestal 34;Spray nozzle turntable 32 passes through rolling bearing It is pivotally mounted in nozzle positioning disk 33 with axis cooperation and realizes that (the present embodiment is to adjust for positioning by nozzle positioning disk 33 Pass through the position of key fixed nozzle turntable 32 behind position);Magnetorheological fluid nozzle 13 is fixed in spray nozzle turntable 32;Magnetorheological fluid spray Mouth 13 and recycling funnel 6 are located at 12 two sides of polishing wheel, and the center of three is point-blank;Recycling funnel 6 passes through hollow support Pipe 20 and conduit are connected to magnetorheological fluid agitator tank 9, and recycling magnetorheological fluid peristaltic pump 8 is equipped on conduit;Magnetorheological fluid nozzle 13 are connected to by conduit with magnetorheological fluid agitator tank 9, and injection magnetorheological fluid peristaltic pump 10 is equipped on conduit.
Preferably, Z axis carriage motor 16 and top-support motor 18 are all made of three-phase progress motor.
Preferably, Z axis main backstop 4 is conllinear with the polishing central axes of wheel bearing seat 31.
Preferably, the bell mouth setting for recycling funnel 6 (is recycling funnel 6 apart from polishing wheel at polishing wheel 1-2mm 12 minimum distance is 1-2mm), the mounting height of recycling funnel 6 is polishing wheel radius.
The working principle of the invention and workflow are:
1, workpiece 21 is fixed on fixture 15, workpiece is controlled by Z axis carriage motor 16 and Z axis bracket ball-screw 17 21 move along Y-direction, control workpiece 21 along X to moving by top-support motor 18 and top-support ball-screw 19, pass through liquid Compression bar 14 controls workpiece 21 and moves along Z-direction, so that a position of workpiece 21 is located at polished region.
2, start to polish this position of workpiece 21, adjust the revolving speed of polishing wheel 12 as needed, it is big to change electric current as needed The magnetic field strength that small control electromagnet 11 is formed.The transmitting of magnetorheological fluid nozzle 13 can be adjusted by spray nozzle turntable 32 as needed The elevation angle.Then, recycling magnetorheological fluid peristaltic pump 8 and injection magnetorheological fluid peristaltic pump 10 are successively opened, magnetorheological fluid is in injection magnetic Under the driving of rheology liquid peristaltic pump 10, magnetorheological fluid is sprayed to polishing wheel 12 by magnetorheological fluid nozzle 13, in electromagnet 11 Become the magnetorheological fluid of class solid state under effect.The power supply for connecting laser emitter 5, is led by rotatable support frame 26 and laser Rail sliding block 30 adjusts position and the angle of laser emitter 5, and Laser emission (is polished to the magnetorheological fluid acted on workpiece 21 The magnetorheological fluid at 12 top of wheel) on, reduce the anti-shearing force of workpiece surface.The magnetorheological fluid of the drive class solid state of polishing wheel 12 Relative motion is formed with workpiece 21, is polished.Magnetorheological fluid becomes colloid or liquid after leaving magnetic fields region, due to field Strong decline, the frictional force of magnetorheological fluid and polishing wheel 12 is less than the centrifugal force of polishing wheel 12 at this time, is polished the centrifugal force of wheel 12 It takes on recycling funnel 6, magnetorheological fluid agitator tank 9 is entered under the action of recycling magnetorheological fluid peristaltic pump 8, after mixing, It under the action of spraying magnetorheological fluid peristaltic pump 10, is sprayed on workpiece 21 through magnetorheological fluid nozzle 13 again, realizes magnetorheological fluid Recycle.
3, the position that workpiece 21 is adjusted by workpiece feed arrangement, so that another position of workpiece 21 is located at polished area Domain.According to step 2, the polishing at this position is completed.
4, step 3 is repeated, the polishing of entire workpiece 21 is completed.

Claims (5)

1. a kind of laser couples burnishing device with magnetorheological fluid, it is characterised in that the device include laser emitter, laser rail, Electromagnet, polishing wheel, rotatable support frame, laser rail sliding block, pedestal, workpiece feed arrangement and magnetorheological fluid circulator;Institute Stating magnetorheological fluid circulator includes recycling funnel, recycling magnetorheological fluid peristaltic pump, magnetorheological fluid agitator tank, injection magnetorheological fluid Peristaltic pump, magnetorheological fluid nozzle, hollow support tube, spray nozzle turntable and nozzle positioning disk;
The laser rail is fixed on pedestal;Laser emitter is installed, bottom is fixed with laser at the top of rotatable support frame Guide rail slide block;Laser rail sliding block and laser rail cooperate;The polishing wheel is pivotally mounted on pedestal;The electromagnet is solid Due on pedestal, it is located at immediately below polishing wheel;The recycling funnel is fixed on pedestal by hollow support tube;Recycle funnel with Hollow support tube connection;Nozzle positioning disk is fixed on pedestal;Spray nozzle turntable is pivotally mounted in nozzle positioning disk and passes through Nozzle positioning disk realizes positioning;Magnetorheological fluid nozzle is fixed in spray nozzle turntable;It recycles funnel and passes through hollow support tube and conduit It is connected to magnetorheological fluid agitator tank, recycling magnetorheological fluid peristaltic pump is installed on conduit;Magnetorheological fluid nozzle passes through conduit and magnetic Rheology liquid agitator tank is connected to, and injection magnetorheological fluid peristaltic pump is equipped on conduit.
2. laser according to claim 1 couples burnishing device with magnetorheological fluid, it is characterised in that magnetorheological fluid nozzle with Recycling funnel is located at polishing wheel two sides, and the center of three is point-blank.
3. laser according to claim 1 couples burnishing device with magnetorheological fluid, it is characterised in that recycle the funnel of funnel Mouth setting is polishing wheel radius in the mounting height at polishing wheel 1-2mm, recycling funnel.
4. laser according to claim 1 couples burnishing device with magnetorheological fluid, it is characterised in that workpiece feed arrangement packet Include fixture top beam, top-support, Z axis bracket, Z axis main backstop, hydraulic stem, fixture, Z axis carriage motor, Z axis bracket ball wire Thick stick, top-support motor, top-support ball-screw, column support, Z axis support guide, top-support guide rail, column support are led Rail, column support guide rail slide block, Z axis support guide sliding block, top-support guide rail slide block, top-support feed screw nut and fixture top Beam feed screw nut;A plurality of uprights bracket is uniformly fixed on the base, and is respectively and fixedly provided with column support guide rail thereon;On Z axis bracket It is uniformly fixed with column support guide rail slide block, column support guide rail slide block and respective column support guide rail cooperate;The main support of Z axis Frame is fixed on the base, and is fixed with hydraulic stem thereon;The output end of hydraulic stem is connect with Z axis bracket;The top of Z axis bracket is fixed There is Z axis support guide, the bottom of top-support is fixed with Z axis support guide sliding block, Z axis support guide sliding block and respective Z axis Support guide cooperation;Z axis carriage motor is fixed on Z axis bracket, and output end is fixedly connected with Z axis bracket ball-screw;Top Portion's frame bottom is fixed with top-support feed screw nut, and Z axis bracket ball-screw and top-support feed screw nut cooperate;Top branch Top-support guide rail is fixed at the top of frame, the bottom of fixture top beam is fixed with top-support guide rail slide block, top-support guide rail Sliding block and respective top-support guide rail cooperate;Top-support motor is fixed on top-support, output end and top-support Ball-screw is fixedly connected;The bottom of fixture top beam is fixed with fixture top beam feed screw nut, top-support ball-screw and fixture The cooperation of top beam feed screw nut;Fixture is fixed on fixture top beam.
5. laser according to claim 4 couples burnishing device with magnetorheological fluid, it is characterised in that Z axis carriage motor and top Portion's carriage motor is all made of three-phase progress motor.
CN201910532986.XA 2019-06-19 2019-06-19 Laser and magnetorheological fluid coupling polishing device Active CN110170887B (en)

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