CN110108218B - Adjusting system for glue dispensing rate - Google Patents
Adjusting system for glue dispensing rate Download PDFInfo
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- CN110108218B CN110108218B CN201910417443.3A CN201910417443A CN110108218B CN 110108218 B CN110108218 B CN 110108218B CN 201910417443 A CN201910417443 A CN 201910417443A CN 110108218 B CN110108218 B CN 110108218B
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- 239000003292 glue Substances 0.000 title claims abstract description 199
- 239000007888 film coating Substances 0.000 claims abstract description 84
- 238000009501 film coating Methods 0.000 claims abstract description 84
- 238000005259 measurement Methods 0.000 claims abstract description 81
- 238000005507 spraying Methods 0.000 claims abstract description 15
- 238000007599 discharging Methods 0.000 claims description 47
- 238000012795 verification Methods 0.000 claims description 2
- 230000003750 conditioning effect Effects 0.000 claims 1
- 238000012545 processing Methods 0.000 description 21
- 239000000758 substrate Substances 0.000 description 17
- 239000011248 coating agent Substances 0.000 description 11
- 238000000576 coating method Methods 0.000 description 11
- 239000012528 membrane Substances 0.000 description 11
- 229920002120 photoresistant polymer Polymers 0.000 description 11
- 238000010586 diagram Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000006870 function Effects 0.000 description 4
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- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000005250 beta ray Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/251—Colorimeters; Construction thereof
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
Abstract
The application provides a system for adjusting glue spitting rate, the system includes: the device comprises a color film coating device and a first measuring device; the first measuring device is used for obtaining a wet film parameter difference value between a wet film measurement parameter of a first wet film and a wet film preset parameter, and feeding the wet film parameter difference value back to the color film coating device, the first wet film is a wet film formed by the color film coating device based on the current glue spitting rate, and the wet film measurement parameter and the wet film preset parameter both comprise: chroma or thickness; and the color film coating device is used for adjusting the current glue spraying rate according to the wet film parameter difference and the corresponding relation between the wet film parameter difference and the glue spraying rate difference, so that the wet film parameter difference of the second wet film is smaller than the difference threshold, and the second wet film is a wet film formed by the color film coating device based on the adjusted glue spraying rate. The system provided by the application can improve the adjustment efficiency by adjusting the glue spitting rate according to the wet film parameter difference of the wet film.
Description
Technical Field
The application relates to a color film preparation technical field, in particular to a glue spitting rate adjusting system.
Background
The display panel is formed by an array substrate and a color film substrate in a matched mode, and liquid crystal is arranged between the array substrate and the color film substrate. The color film substrate comprises a plurality of color film units, and each color film unit is composed of three color pixel units, namely red, blue and green pixel units. At present, a color filter substrate is formed by coating color photoresist on a substrate by a color filter coating device.
In the prior art, the chromaticity or thickness of a dry film formed by coating color photoresist on a substrate is measured by a measuring device, and when the chromaticity or thickness of the dry film is determined to be abnormal (for example, the deviation from a set value is large), a technician adjusts the glue-discharging rate of a coating device so as to enable the chromaticity or thickness of the dry film to reach the set value. The adjustment efficiency of the mode on the glue discharging speed is low, and long time is needed for measuring the chroma or the thickness of the dry film.
Disclosure of Invention
The application provides a spit adjustment system of gluey rate can improve and spit gluey rate adjustment efficiency.
The application provides a system for adjusting glue spitting rate, includes: the device comprises a color film coating device and a first measuring device;
the first measuring device is configured to obtain a wet film parameter difference between a wet film measurement parameter of a first wet film and a wet film preset parameter, and feed back the wet film parameter difference to the color film coating device, where the first wet film is a wet film formed by the color film coating device based on a current glue-spitting rate, and the wet film measurement parameter and the wet film preset parameter both include: chroma or thickness;
the color film coating device is configured to adjust the current glue-spitting rate according to the wet film parameter difference and the corresponding relationship between the wet film parameter difference and the glue-spitting rate difference, so that the wet film parameter difference of a second wet film is smaller than a difference threshold, and the second wet film is a wet film formed by the color film coating device based on the adjusted glue-spitting rate.
Optionally, the adjusting system further includes: a second measuring device;
the second measuring device is configured to obtain a dry film parameter difference between a dry film measurement parameter and a dry film preset parameter of a dry film formed after the first wet film is subjected to high temperature treatment, and feed back the dry film parameter difference to the color film coating device, where the dry film measurement parameter and the dry film preset parameter both include: chroma or thickness;
the color film coating device is further used for checking the adjusted glue dispensing rate according to the dry film parameter difference value and the corresponding relation between the dry film parameter difference value and the glue dispensing rate difference value.
Optionally, the first measuring device is further configured to measure the first wet film before obtaining the wet film parameter difference of the first wet film, so as to obtain the wet film measurement parameter of the first wet film.
Optionally, the second measuring device is further configured to measure the dry film to obtain the dry film measurement parameter before obtaining the dry film parameter difference.
Optionally, the color film coating device is specifically configured to determine that the adjusted glue dispensing rate passes verification if the expected glue dispensing rate obtained according to the dry film parameter difference is the same as the adjusted glue dispensing rate;
and if the expected glue dispensing rate obtained according to the dry film parameter difference is different from the adjusted glue dispensing rate, determining that the adjusted glue dispensing rate fails to check, and outputting alarm information.
Optionally, the color film coating device is further configured to adjust the glue dispensing rate of the ith cycle period to: the sum of the glue discharging rate of the i-1 th cycle period and the preset glue discharging rate; i is an integer greater than or equal to 1, and the glue spitting rate of the first cycle is a first glue spitting rate;
the first measuring device is further configured to measure a wet film formed in each cycle period, obtain a wet film measurement parameter of each cycle period, and feed back the wet film measurement parameter of each cycle period to the color film coating device;
the second measuring device is further configured to measure a dry film formed in each cycle period, obtain a dry film measurement parameter of each cycle period, and feed back the dry film measurement parameter of each cycle period to the color film coating device;
the color film coating device is further used for obtaining a corresponding relation between a wet film parameter difference value and a glue discharging speed difference value and a corresponding relation between a dry film parameter difference value and a glue discharging speed difference value according to the glue discharging speed, the wet film measurement parameter and the dry film measurement parameter of each cycle period.
Optionally, the color film coating device is specifically configured to obtain a corresponding relationship between a wet film parameter difference and a glue dispensing rate difference and a corresponding relationship between a dry film parameter difference and a glue dispensing rate difference according to the wet film parameter difference, the dry film parameter difference, and the glue dispensing rate difference between the first cycle period and each of the remaining cycle periods.
Optionally, the color film coating device is specifically configured to determine whether the corresponding relationship between the wet film parameter difference and the glue dispensing rate difference includes a glue dispensing rate difference corresponding to the wet film parameter difference of the first wet film;
if not, determining the glue spitting rate difference corresponding to the wet film parameter difference of the first wet film according to the corresponding relation between the wet film parameter difference and the glue spitting rate difference;
and adjusting the current glue-spitting rate according to the glue-spitting rate difference corresponding to the current glue-spitting rate and the wet film parameter difference of the first wet film.
Optionally, the difference of the glue-spitting rates corresponding to the difference of the wet film parameters of the first wet film is as follows: in the corresponding relation between the wet film parameter difference and the glue spitting rate difference, the glue spitting rate difference corresponding to the wet film parameter difference with the minimum wet film parameter difference of the first wet film; or the average value of the glue spitting rate difference corresponding to the two wet film parameter differences with smaller difference with the first wet film parameter difference.
Optionally, the adjusting system further includes: a high-temperature treatment device;
and the high-temperature treatment device is used for carrying out high-temperature treatment on the first wet film to obtain the dry film.
The application provides a system for adjusting glue spitting rate, the system includes: the device comprises a color film coating device and a first measuring device; the first measuring device is used for obtaining a wet film parameter difference value between a wet film measurement parameter of a first wet film and a wet film preset parameter, and feeding the wet film parameter difference value back to the color film coating device, the first wet film is a wet film formed by the color film coating device based on the current glue spitting rate, and the wet film measurement parameter and the wet film preset parameter both comprise: chroma or thickness; and the color film coating device is used for adjusting the current glue spraying rate according to the wet film parameter difference and the corresponding relation between the wet film parameter difference and the glue spraying rate difference, so that the wet film parameter difference of the second wet film is smaller than the difference threshold, and the second wet film is a wet film formed by the color film coating device based on the adjusted glue spraying rate. The system provided by the application can improve the adjustment efficiency by adjusting the glue spitting rate according to the wet film parameter difference of the wet film.
Drawings
Fig. 1 is a first schematic structural diagram of a system for adjusting a glue dispensing rate according to the present application;
fig. 2 is a schematic structural diagram of a system for adjusting the glue dispensing rate according to the present application;
fig. 3 is a schematic structural diagram of a color film coating apparatus provided in the present application;
FIG. 4 is a schematic structural diagram of a first measuring device provided in the present application;
fig. 5 is a schematic structural diagram of a second measurement device provided in the present application.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the embodiments of the present application, and it is obvious that the described embodiments are some but not all of the embodiments of the present application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
At present, in order to ensure the display quality of the display panel, the thickness of the color film substrate needs to be strictly controlled, that is, the thickness of the color photoresist formed on the color film substrate needs to be controlled within an effective range of a set thickness value. In the prior art, a method for measuring the chromaticity or thickness of a dry film formed by a color photoresist adhesive is mostly adopted to determine whether the thickness of the color photoresist adhesive is normal.
Due to the formation of the color film substrate, color photoresist needs to be coated on the substrate. The color photoresist is coated to form a wet film, and the wet film is subjected to high-temperature treatment to form a dry film. The process from coating the color photoresist on the substrate to forming the dry film needs about half an hour, and under the condition, the chroma or the thickness of the dry film is measured in the prior art, the glue discharging rate is adjusted in a manual adjustment mode, and the mode has low efficiency of adjusting the glue discharging rate and has hysteresis.
In order to solve the problem, the application provides an adjustment system of glue-spitting rate, through the measurement to the parameter of wet membrane, can be timely effective, automatic realization to the adjustment of glue-spitting rate to reach the mesh that improves the adjustment efficiency of glue-spitting rate.
Fig. 1 is a schematic structural diagram of a system for adjusting a glue dispensing rate according to the present application. As shown in fig. 1, the system for adjusting the glue dispensing rate provided by the present application includes: a color film coating device 100 and a first measuring device 200.
It should be understood that the color filter coating apparatus 100 in this embodiment can implement the function of a color filter coating apparatus in the prior art, and can coat color photoresist on a substrate to form a wet film.
The first measuring device 200 is configured to measure the first wet film, and obtain a wet film measurement parameter of the first wet film. Wherein the wet film measurement parameters may include: chroma or thickness. I.e., the first measuring device 200 in this embodiment is used to obtain the chromaticity or thickness of the first wet film. It should be understood that the first wet film is a wet film formed by the color film coating apparatus 100 based on the current glue dispensing rate, i.e., the wet film formed before the glue dispensing rate is adjusted.
In the present embodiment, in order to distinguish the wet films formed before and after the adjustment of the discharge rate of the color filter coating apparatus 100, the first wet film and the second wet film are used for distinguishing. The first wet film is a wet film formed by the color film coating device 100 based on the current glue-spitting rate, and the second wet film is a wet film formed by the color film coating device 100 based on the adjusted glue-spitting rate.
The first measuring device 200 in this embodiment may store a preset wet film parameter. Wherein, the wet film preset parameters may include: chroma or thickness. It should be understood that the wet film measurement parameter and the wet film preset parameter are the same in type, that is, if the wet film preset parameter is chroma, the wet film measurement parameter is chroma; if the preset parameter of the wet film is the thickness, the measured parameter of the wet film is also the thickness. Alternatively, when the wet film measurement parameter is thickness, the first measurement device 200 in this embodiment may be any one of a laser thickness gauge, an infrared ray reflection spectrum thickness gauge, or a β -ray thickness gauge. Alternatively, when the wet film measurement parameter is a chromaticity, the first measurement device 200 in this embodiment may be any one of a spectroradiometer, a spectrophotometer, or a tristimulus colorimeter.
After acquiring the preset wet film parameter of the first wet film, the first measurement device 200 may acquire a wet film parameter difference between the measured wet film parameter of the first wet film and the preset wet film parameter, where the wet film parameter difference is a difference between the measured wet film parameter of the first wet film and the preset wet film parameter. And the first measuring device 200 can feed back the wet film parameter difference to the color film coating device 100.
In the color film coating apparatus 100 in this embodiment, after receiving the wet film parameter difference of the first wet film fed back by the first measurement device 200, the current glue dispensing rate may be adjusted according to the wet film parameter difference and the corresponding relationship between the wet film parameter difference and the glue dispensing rate difference. The corresponding relationship between the wet film parameter difference and the glue-spitting rate difference can comprise glue-spitting rate differences corresponding to different wet film parameter differences. After the color film coating device 100 obtains the wet film parameter difference of the first wet film, the glue dispensing rate difference corresponding to the wet film parameter difference of the first wet film may be obtained in the corresponding relationship, and then the current glue dispensing rate is adjusted according to the glue dispensing rate difference. It should be understood that the corresponding relationship between the wet film parameter difference and the spitting rate difference can be stored in the color film coating apparatus 100 in advance.
The following table illustrates the corresponding relationship between the wet film parameter difference (chromaticity difference) and the glue dispensing rate difference in a table form, and other forms may also be adopted in this embodiment to store the corresponding relationship between the wet film parameter difference and the glue dispensing rate difference.
Watch 1
As shown in the first table, if the current glue discharging rate is 25000ul/s and the difference between the wet film parameters of the first wet film fed back by the first measuring device 200 is-0.0008 degrees, the color film coating device 100 may determine that the difference between the glue discharging rates is-100 ul/s according to one of the stored corresponding relationships in the table, and may decrease the current glue discharging rate by 100ul/s, and the adjusted glue discharging rate is 24900 ul/s.
It should be understood that the corresponding relationship between the wet film parameter difference and the glue dispensing rate difference in this embodiment is obtained by the color film coating apparatus 100 according to a large amount of historical data, the historical data may include glue dispensing rates corresponding to different wet film parameters, and then the corresponding relationship between the wet film parameter difference and the glue dispensing rate difference is established according to the difference between every two adjacent wet film parameters.
It should be noted that in this embodiment, after the current glue dispensing rate of the color film coating apparatus 100 is adjusted according to the parameter difference of the first wet film and the corresponding relationship between the wet film parameter difference and the glue dispensing rate difference, the wet film parameter difference of the second wet film may be smaller than the difference threshold, and the second wet film is a wet film formed by the color film coating apparatus 100 based on the adjusted glue dispensing rate. That is, in this embodiment, the wet film parameter difference of the second wet film formed by coating the color film coating apparatus 100 on the substrate after adjusting the glue dispensing rate is smaller than the difference threshold. It should be understood that the difference of the wet film parameter of the second wet film is also fed back by the first measuring device 200, wherein the first measuring device 200 can obtain and feed back the difference of the wet film parameter of the second wet film in the same way as the difference of the wet film parameter of the first wet film is obtained and fed back, and the description can be referred to the fir tree.
Optionally, in this embodiment, when the color film coating apparatus 100 determines the glue dispensing rate difference corresponding to the wet film parameter difference of the first wet film according to the wet film parameter difference of the first wet film and the corresponding relationship between the wet film parameter difference and the glue dispensing rate difference, it needs to determine whether the glue dispensing rate difference corresponding to the wet film parameter difference of the first wet film is included in the corresponding relationship between the wet film parameter difference and the glue dispensing rate difference.
When the wet film parameter difference value and the glue spitting rate difference value correspond to each other, the glue spitting rate difference value corresponding to the wet film parameter difference value of the first wet film is included, and the glue spitting rate difference value corresponding to the wet film parameter difference value of the first wet film can be directly used as the glue spitting rate difference value for adjusting the current glue spitting rate. When the corresponding relationship between the wet film parameter difference and the glue-spitting rate difference does not include the glue-spitting rate difference corresponding to the wet film parameter difference of the first wet film, the glue-spitting rate difference corresponding to the wet film parameter difference of the first wet film needs to be determined according to the corresponding relationship between the wet film parameter difference and the glue-spitting rate difference, and then the current glue-spitting rate is adjusted according to the current glue-spitting rate and the glue-spitting rate difference corresponding to the wet film parameter difference of the first wet film.
Optionally, in this embodiment, an interpolation method may be used to determine the glue dispensing rate difference corresponding to the wet film parameter difference of the first wet film. For example, a function between the wet film parameter difference and the glue dispensing rate difference is fitted according to the obtained corresponding relation between the wet film parameter difference and the glue dispensing rate difference, and the wet film parameter difference of the first wet film is substituted into the function to obtain the glue dispensing rate difference corresponding to the wet film parameter difference of the first wet film.
For example, as shown in the first table, if the difference of the wet film parameter of the first wet film fed back by the first measuring device 200 is-0.0008 degrees, the correspondence relationship stored in the table includes that the difference of the glue discharging rate corresponding to-0.0008 degrees is-100 ul/s. If the difference of the wet film parameter of the first wet film fed back by the first measuring device 200 is-0.0006 degree, the table does not include the difference of the glue discharging rate corresponding to-0.0006 degree in the stored corresponding relationship.
Specifically, in the embodiment, when the corresponding relationship between the wet film parameter difference and the glue dispensing rate difference does not include the glue dispensing rate difference corresponding to the wet film parameter difference of the first wet film, the glue dispensing rate difference corresponding to the wet film parameter difference having the smallest difference from the wet film parameter difference of the first wet film may be used as the glue dispensing rate difference corresponding to the wet film parameter difference of the first wet film. For example, when the wet film parameter difference of the first wet film is-0.0006 degrees, the glue discharge rate difference corresponding to the wet film parameter difference may be-100 ul/s corresponding to-0.0008 degrees
Or, in the corresponding relationship between the wet film parameter difference and the glue dispensing rate difference, when the glue dispensing rate difference corresponding to the wet film parameter difference of the first wet film is not included, the average value of the glue dispensing rate differences corresponding to the two wet film parameter differences with smaller difference with the wet film parameter difference of the first wet film may be used as the glue dispensing rate difference corresponding to the wet film parameter difference of the first wet film.
For example, when the difference of the wet film parameters of the first wet film is-0.0006 degrees, the glue-spitting rate differences corresponding to-0.0008 degrees and 0.000 degrees can be obtained as-100 ul/s and 0-50 ul/s, and the-50 ul/s is taken as the glue-spitting rate difference corresponding to the difference of the wet film parameters.
This embodiment provides a system for adjusting spit gluey rate, and this system includes: the device comprises a color film coating device and a first measuring device; the first measuring device is used for obtaining a wet film parameter difference value between a wet film measurement parameter of a first wet film and a wet film preset parameter, and feeding the wet film parameter difference value back to the color film coating device, the first wet film is a wet film formed by the color film coating device based on the current glue spitting rate, and the wet film measurement parameter and the wet film preset parameter both comprise: chroma or thickness; and the color film coating device is used for adjusting the current glue spraying rate according to the wet film parameter difference and the corresponding relation between the wet film parameter difference and the glue spraying rate difference, so that the wet film parameter difference of the second wet film is smaller than the difference threshold, and the second wet film is a wet film formed by the color film coating device based on the adjusted glue spraying rate. According to the system, the glue spraying rate is adjusted according to the wet film parameter difference of the wet film, on one hand, compared with a dry film measuring mode in the prior art, the measuring time is shortened, and the adjusting efficiency is improved; on the other hand, the corresponding relation between the wet film parameter difference and the glue discharging speed difference is adopted in the application, so that the glue discharging speed can be automatically and quickly adjusted, and the adjusting efficiency is further improved.
In addition to the above embodiments, in this embodiment, a system for adjusting the glue dispensing rate provided by the present application is further described with reference to fig. 2. Fig. 2 is a schematic structural diagram of a system for adjusting the glue dispensing rate according to the present application. As shown in fig. 2, the system for adjusting the glue dispensing rate provided by the present application may further include: a second measuring device 300 and a high temperature processing device 400.
The color film coating apparatus 100 coats the color resist on the substrate to form a first wet film, and the first wet film may further form a corresponding dry film. The high-temperature processing device 400 is configured to perform high-temperature processing on the first wet film to obtain the dry film. It is to be understood that the high temperature processing apparatus 400 in the present embodiment may be identical in structure and function to those in the related art.
And the second measuring device 300 is used for measuring the dry film to obtain dry film measurement parameters. Wherein the dry film measurement parameters may include: chroma or thickness. In this embodiment, the second measuring device 300 may store a dry film preset parameter, where the dry film preset parameter may include: chroma or thickness. It should be understood that the dry film measurement parameters and the dry film preset parameters are the same type as the wet film measurement parameters and the wet film preset parameters. Alternatively, the method for measuring the dry film measurement parameter in this embodiment may be the same as the method for measuring the wet film measurement parameter in the above embodiment.
The second measuring device 300 may be configured to obtain a dry film parameter difference between the dry film measurement parameter of the dry film and the dry film preset parameter after obtaining the dry film measurement parameter, and feed back the dry film parameter difference to the color film coating device 100. It is understood that the dry film parameter difference is the difference between the dry film measured parameter and the dry film preset parameter of the dry film.
In the color film coating apparatus 100 in this embodiment, a corresponding relationship between a dry film parameter difference and a glue dispensing rate difference is stored in advance. After the color film coating device 100 receives the dry film parameter difference of the dry film fed back by the second measuring device 300, the glue dispensing rate difference corresponding to the dry film parameter difference can be determined according to the dry film parameter difference and the corresponding relationship between the dry film parameter difference and the glue dispensing rate difference.
Optionally, the corresponding relationship between the dry film parameter difference and the glue dispensing rate difference in this embodiment may be in the same form as that in the above table one, as shown in the following table two:
watch two
| Differential rate of glue-spitting (ul/s) | Chroma difference (degree) |
| -200 | -0.0008 |
| -100 | -0.0004 |
| 0 | 0.0000 |
| 100 | 0.0004 |
| 200 | 0.0008 |
As shown in the second table, if the current glue discharging rate is 25000ul/s and the difference between the wet film parameters of the first wet film fed back by the second measuring device 300 is-0.0004 degrees, the color film coating device 100 may determine that the difference between the glue discharging rates is-100 ul/s according to one of the stored corresponding relationships in the second table, and may decrease the current glue discharging rate by 100ul/s, and the adjusted glue discharging rate is 24900 ul/s.
The color film coating device 100 in this embodiment is further configured to check the adjusted glue dispensing rate according to the dry film parameter difference and the corresponding relationship between the dry film parameter difference and the glue dispensing rate difference.
The color film coating device 100 is specifically configured to determine that the adjusted glue dispensing rate passes the check if the expected glue dispensing rate obtained according to the dry film parameter difference is the same as the adjusted glue dispensing rate. For example, the expected glue-spitting rate obtained according to the dry film parameter difference is 24900ul/s, and the adjusted glue-spitting rate obtained according to the wet film parameter difference of the first wet film is 24900ul/s, so that the adjusted glue-spitting rate passes the check.
And if the expected glue-spitting rate obtained according to the dry film parameter difference is different from the adjusted glue-spitting rate, determining that the adjusted glue-spitting rate fails to be checked, and outputting alarm information. For example, if the expected glue discharging rate obtained according to the dry film parameter difference is 24900ul/s, and the adjusted glue discharging rate obtained according to the wet film parameter difference of the first wet film is 24000ul/s, it is determined that the adjusted glue discharging rate check fails, and alarm information is output.
Optionally, the manner of outputting the alarm information by the color film coating device 100 in this embodiment may be displaying the alarm information, for example, "failure in adjusting the glue-spitting rate"; or a beep may be sounded to alert the technician that the adjustment of the glue dispensing rate has failed.
In the above embodiments, the corresponding relationship between the wet film parameter difference and the glue dispensing rate difference and the corresponding relationship between the dry film parameter difference and the glue dispensing rate difference are stored in the color film coating apparatus 100. In the following, how to obtain the corresponding relationship between the wet film parameter difference and the glue dispensing rate difference and the corresponding relationship between the dry film parameter difference and the glue dispensing rate difference in the pre-production process will be described in this embodiment.
It should be understood that the color film coating apparatus 100 is configured to obtain the above two corresponding relationships according to the wet film measurement parameters of the wet film and the dry film measurement parameters of the dry film obtained multiple times in the pre-production process.
The color film coating device 100 is further configured to adjust the glue dispensing rate of the ith cycle to be: the sum of the glue discharging rate of the i-1 th cycle period and the preset glue discharging rate; i is an integer greater than or equal to 1, and the glue-spitting rate of the first cycle is the first glue-spitting rate.
For example, the first glue discharging rate is 20000ul/s, the preset glue discharging rate is 100ul/s, the glue discharging rate in the second cycle is 20100ul/s, the glue discharging rate in the third cycle is 20200ul/s … …, and so on, the color film coating apparatus 100 may adjust the glue discharging rate in each cycle. In each cycle, the color film coating apparatus 100 coats the color photoresist on the substrate according to the corresponding photoresist spitting rate.
Further, in the pre-production process, the first measuring device 200 is further configured to measure the wet film formed in each cycle, obtain a wet film measurement parameter in each cycle, and feed back the wet film measurement parameter in each cycle to the color film coating device 100. For example, the wet film measurement parameters fed back from the first measurement device 200 from the first cycle are 1.0000 degrees, 1.0008 degrees, and 1.0016 degrees … …, respectively.
The second measuring device 300 is further configured to measure a dry film formed in each cycle period, obtain a dry film measurement parameter of each cycle period, and feed back the dry film measurement parameter of each cycle period to the color film coating device 100. For example, the wet film measurement parameters fed back from the first measurement device 200 from the beginning of the first cycle are 2.0000 degrees, 2.0004 degrees, 2.0008 degrees … …, respectively.
The color film coating device 100 is further configured to obtain a corresponding relationship between a wet film parameter difference value and a glue dispensing rate difference value and a corresponding relationship between a dry film parameter difference value and a glue dispensing rate difference value according to the glue dispensing rate, the wet film measurement parameter, and the dry film measurement parameter of each cycle period.
Optionally, in this embodiment, the color film coating device 100 is specifically configured to obtain a corresponding relationship between the wet film parameter difference and the glue dispensing rate difference, and a corresponding relationship between the dry film parameter difference and the glue dispensing rate difference according to the wet film parameter difference, the dry film parameter difference, and the glue dispensing rate difference between the first cycle period and each of the remaining cycle periods. Wherein each of the remaining cycle periods is a cycle period other than the first cycle period among the i cycle periods.
The difference value of the glue discharging speed of each cycle period and the first cycle period is integral multiple of the preset glue discharging speed. For example, the difference of the glue-discharging rates of the first cycle of the second cycle is 100ul/s, and the difference of the glue-discharging rates of the first cycle of the third cycle is 200ul/s … …, and the difference of the glue-discharging rates of the first cycle of the ith cycle is 200 × i ul/s.
In the embodiment, the wet film parameter difference value and the glue-spitting rate difference value of the ith cycle and the first cycle are correspondingly stored, so that the corresponding relation between the wet film parameter difference value and the glue-spitting rate difference value can be obtained; and correspondingly storing the dry film parameter difference value and the glue-dispensing rate difference value of the ith cycle period and the first cycle period, so as to obtain the corresponding relation between the dry film parameter difference value and the glue-dispensing rate difference value.
For example, the difference between the wet film parameter, the dry film parameter and the glue dispensing rate in the second cycle period and the first cycle period is 0.0008 degree, 0.0004 degree and 100ul/s, respectively, and then the glue dispensing rate differences corresponding to the difference between the wet film parameter and the dry film parameter of 0.0008 degree and the difference between the dry film parameter and the dry film parameter of 0.0004 degree are all 100 ul/s. As shown in the following table three, in this embodiment, a corresponding relationship between the wet film parameter difference, the dry film parameter difference, and the glue dispensing rate difference in each cycle period may be pre-established, and the corresponding relationship between the wet film parameter difference, the dry film parameter difference, and the glue dispensing rate difference may include: the corresponding relation between the wet film parameter difference and the glue-dispensing rate difference, and the corresponding relation between the dry film parameter difference and the glue-dispensing rate difference.
Watch III
| Differential rate of glue-spitting (ul/s) | Dry film chromaticity difference (degree) | Wet film color difference (degree) |
| 0 | 0.0000 | 0.0000 |
| 100 | 0.0004 | 0.0008 |
| 200 | 0.0008 | 0.0016 |
In the adjustment system for the glue dispensing rate provided by this embodiment, the color film coating device is further configured to check the adjusted glue dispensing rate according to the dry film parameter difference and the corresponding relationship between the dry film parameter difference and the glue dispensing rate difference, so that the accuracy of adjusting the glue dispensing rate is improved. In addition, in the color film coating device in this embodiment, according to the wet film parameter difference, the dry film parameter difference, and the glue discharging rate difference between the ith cycle period and the first cycle period in the pre-production process, the corresponding relationship between the wet film parameter difference and the glue discharging rate difference, and the corresponding relationship between the dry film parameter difference and the glue discharging rate difference can be obtained, so that the current glue discharging rate of the color film coating device can be adjusted.
Fig. 3 is a schematic structural diagram of a color film coating apparatus provided in the present application. As shown in fig. 3, a color filter coating apparatus 100 provided in the present application includes: a transceiver module 101 and a processing module 102.
The transceiver module 101 is configured to receive a wet film parameter difference of the first wet film fed back by the first measuring device.
The processing module 102 is configured to adjust the current glue dispensing rate according to the wet film parameter difference and the corresponding relationship between the wet film parameter difference and the glue dispensing rate difference, so that the wet film parameter difference of a second wet film is smaller than a difference threshold, and the second wet film is a wet film formed by the color film coating device based on the adjusted glue dispensing rate.
Optionally, the transceiver module 101 is further configured to receive a dry film parameter difference of the dry film fed back by the second measuring device.
Optionally, the processing module 102 is further configured to verify the adjusted glue dispensing rate according to the dry film parameter difference and a corresponding relationship between the dry film parameter difference and the glue dispensing rate difference.
Optionally, the processing module 102 is specifically configured to determine that the adjusted glue dispensing rate passes the check if the expected glue dispensing rate obtained according to the dry film parameter difference is the same as the adjusted glue dispensing rate; and if the expected glue-spitting rate obtained according to the dry film parameter difference is different from the adjusted glue-spitting rate, determining that the adjusted glue-spitting rate fails to be checked, and outputting alarm information.
Optionally, the processing module 102 is further configured to adjust the glue dispensing rate of the ith cycle period to: the sum of the glue discharging rate of the i-1 th cycle period and the preset glue discharging rate; i is an integer greater than or equal to 1, and the glue-spitting rate of the first cycle is the first glue-spitting rate.
Optionally, the transceiver module 101 is further configured to receive, during the pre-production process, the wet film measurement parameter of each cycle period fed back by the first measurement device, and receive the dry film measurement parameter of each cycle period fed back by the second measurement device.
Optionally, the processing module 102 is further configured to obtain a corresponding relationship between a wet film parameter difference and a glue-dispensing rate difference and a corresponding relationship between a dry film parameter difference and a glue-dispensing rate difference according to the glue-dispensing rate, the wet film measurement parameter, and the dry film measurement parameter of each cycle period.
Optionally, the processing module 102 is specifically configured to obtain a corresponding relationship between the wet film parameter difference and the glue dispensing rate difference, and a corresponding relationship between the dry film parameter difference and the glue dispensing rate difference according to the wet film parameter difference, the dry film parameter difference, and the glue dispensing rate difference between the first cycle period and each of the remaining cycle periods.
Optionally, the processing module 102 is specifically configured to determine whether a corresponding relationship between the wet film parameter difference and the glue dispensing rate difference includes a glue dispensing rate difference corresponding to the wet film parameter difference of the first wet film; if not, determining the glue spraying rate difference corresponding to the wet film parameter difference of the first wet film according to the corresponding relation between the wet film parameter difference and the glue spraying rate difference; and adjusting the current glue-spitting rate according to the glue-spitting rate difference corresponding to the current glue-spitting rate and the wet film parameter difference of the first wet film.
Optionally, the difference of the glue-spitting rates corresponding to the difference of the wet film parameters is as follows: the difference value of the wet film parameter corresponding to the wet film parameter difference value with the minimum difference value of the wet film parameter difference values of the first wet film; or the average value of the glue spitting rate difference corresponding to the two wet film parameter differences with smaller difference with the wet film parameter difference of the first wet film.
Fig. 4 is a schematic structural diagram of a first measurement device provided in the present application. As shown in fig. 4, the first measurement device 200 provided by the present application includes: a transceiver module 201 and a processing module 202.
Wherein, processing module 202 for obtain the wet membrane parameter difference between the wet membrane measurement parameter of first wet membrane and the wet membrane preset parameter, first wet membrane is the wet membrane that various membrane coating device formed based on the current glue rate of telling, and wet membrane measurement parameter and wet membrane preset parameter all include: chroma or thickness.
And the transceiver module 201 is configured to feed back the wet film parameter difference to the color film coating apparatus.
Optionally, the processing module 202 is further configured to measure the first wet film before obtaining the wet film parameter difference of the first wet film, so as to obtain a wet film measurement parameter of the first wet film.
Optionally, the processing module 202 is further configured to measure the wet film formed in each cycle in the pre-production process, and obtain a wet film measurement parameter in each cycle.
Optionally, the transceiver module 201 is further configured to feed back the wet film measurement parameter of each cycle to the color film coating apparatus.
Fig. 5 is a schematic structural diagram of a second measurement device provided in the present application. As shown in fig. 4, the second measuring device 300 provided by the present application includes: a transceiver module 301 and a processing module 302.
Wherein, processing module 302 for obtain the dry film parameter difference between the dry film parameter measurement parameter and the dry film parameter presetting of the dry film that first wet membrane formed after carrying out high temperature process, dry film parameter measurement and dry film parameter presetting all include: chroma or thickness.
And the transceiver module 301 is configured to feed back the dry film parameter difference to the color film coating apparatus.
Optionally, the processing module 302 is further configured to measure the first wet film before obtaining the wet film parameter difference of the first wet film, so as to obtain a wet film measurement parameter of the first wet film.
Optionally, the processing module 302 is further configured to measure a dry film formed in each cycle period in a pre-production process, and obtain a dry film measurement parameter in each cycle period.
Optionally, the transceiver module 301 is further configured to feed back the dry film measurement parameter of each cycle period to the color film coating apparatus.
In the several embodiments provided in the present application, it should be understood that the disclosed apparatus and method may be implemented in other ways. For example, the above-described apparatus embodiments are merely illustrative, and for example, the division of the modules is merely a logical division, and in actual implementation, there may be other divisions, for example, multiple modules or components may be combined or integrated into another system, or some features may be omitted, or not implemented. In addition, the shown or discussed mutual coupling or direct coupling or communication connection may be an indirect coupling or communication connection through some interfaces, devices or modules, and may be in an electrical, mechanical or other form.
The modules described as separate parts may or may not be physically separate, and parts displayed as modules may or may not be physical modules, may be located in one place, or may be distributed on a plurality of network modules. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of the present embodiment.
In addition, functional modules in the embodiments of the present application may be integrated into one processing module, or each of the modules may exist alone physically, or two or more modules are integrated into one module. The integrated module can be realized in a hardware form, and can also be realized in a form of hardware and a software functional module.
The integrated module implemented in the form of a software functional module may be stored in a computer-readable storage medium. The software functional module is stored in a storage medium and includes several instructions for enabling a computer device (which may be a personal computer, a server, or a network device) or a processor (processor) to execute some steps of the methods according to the embodiments of the present application. And the aforementioned storage medium includes: a U disk, a removable hard disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a magnetic disk or an optical disk, and other various media capable of storing program codes.
Finally, it should be noted that: the above embodiments are only used for illustrating the technical solutions of the present application, and not for limiting the same; although the present application has been described in detail with reference to the foregoing embodiments, it should be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present application.
Claims (7)
1. A system for adjusting glue dispensing rate is characterized by comprising: the device comprises a color film coating device and a first measuring device;
the first measuring device is configured to obtain a wet film parameter difference between a wet film measurement parameter of a first wet film and a wet film preset parameter, and feed back the wet film parameter difference to the color film coating device, where the first wet film is a wet film formed by the color film coating device based on a current glue-spitting rate, and the wet film measurement parameter and the wet film preset parameter both include: chroma or thickness;
the color film coating device is used for adjusting the current glue spraying rate according to the wet film parameter difference and the corresponding relation between the wet film parameter difference and the glue spraying rate difference, so that the wet film parameter difference of a second wet film is smaller than a difference threshold value, and the second wet film is a wet film formed by the color film coating device based on the adjusted glue spraying rate;
the color film coating device is specifically used for determining whether the corresponding relationship between the wet film parameter difference and the glue spitting rate difference comprises the glue spitting rate difference corresponding to the wet film parameter difference of the first wet film;
if not, determining the glue spitting rate difference corresponding to the wet film parameter difference of the first wet film according to the corresponding relation between the wet film parameter difference and the glue spitting rate difference;
adjusting the current glue-spitting rate according to the glue-spitting rate difference corresponding to the current glue-spitting rate and the wet film parameter difference of the first wet film;
the adjustment system further comprises: a second measuring device;
the second measuring device is configured to obtain a dry film parameter difference between a dry film measurement parameter and a dry film preset parameter of a dry film formed after the first wet film is subjected to high temperature treatment, and feed back the dry film parameter difference to the color film coating device, where the dry film measurement parameter and the dry film preset parameter both include: chroma or thickness;
the color film coating device is further used for verifying the adjusted glue dispensing rate according to the dry film parameter difference value and the corresponding relation between the dry film parameter difference value and the glue dispensing rate difference value;
the color film coating device is also used for adjusting the glue spitting rate of the ith cycle period to be as follows: the sum of the glue discharging rate of the i-1 th cycle period and the preset glue discharging rate; i is an integer greater than or equal to 1, and the glue spitting rate of the first cycle is a first glue spitting rate;
the first measuring device is further configured to measure a wet film formed in each cycle period, obtain a wet film measurement parameter of each cycle period, and feed back the wet film measurement parameter of each cycle period to the color film coating device;
the second measuring device is further configured to measure a dry film formed in each cycle period, obtain a dry film measurement parameter of each cycle period, and feed back the dry film measurement parameter of each cycle period to the color film coating device;
the color film coating device is further used for obtaining a corresponding relation between a wet film parameter difference value and a glue discharging speed difference value and a corresponding relation between a dry film parameter difference value and a glue discharging speed difference value according to the glue discharging speed, the wet film measurement parameter and the dry film measurement parameter of each cycle period.
2. The conditioning system of claim 1, wherein the first measuring device is further configured to measure the first wet film to obtain the wet film measurement parameter of the first wet film before obtaining the wet film parameter difference of the first wet film.
3. The tuning system of claim 1, wherein the second measuring device is further configured to measure the dry film to obtain the dry film measurement parameter before obtaining the dry film parameter difference.
4. The adjustment system according to any one of claims 1 to 3,
the color film coating device is specifically configured to determine that the adjusted glue dispensing rate passes verification if the expected glue dispensing rate obtained according to the dry film parameter difference is the same as the adjusted glue dispensing rate;
and if the expected glue dispensing rate obtained according to the dry film parameter difference is different from the adjusted glue dispensing rate, determining that the adjusted glue dispensing rate fails to check, and outputting alarm information.
5. The adjustment system according to any one of claims 1 to 3,
the color film coating device is specifically used for acquiring the corresponding relation between the wet film parameter difference and the glue-dispensing rate difference and the corresponding relation between the dry film parameter difference and the glue-dispensing rate difference according to the wet film parameter difference, the dry film parameter difference and the glue-dispensing rate difference of the first cycle period and each residual cycle period.
6. The adjustment system according to any one of claims 1 to 3, wherein the difference of the wet film parameters of the first wet film corresponds to the difference of the spitting rates: in the corresponding relation between the wet film parameter difference and the glue spitting rate difference, the glue spitting rate difference corresponding to the wet film parameter difference with the minimum wet film parameter difference of the first wet film; or the average value of the glue spitting rate difference corresponding to the two wet film parameter differences with smaller difference with the wet film parameter difference of the first wet film.
7. The adjustment system according to any one of claims 1 to 3, characterized in that the adjustment system further comprises: a high-temperature treatment device;
and the high-temperature treatment device is used for carrying out high-temperature treatment on the first wet film to obtain the dry film.
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Address after: No. 1778, Qinglan Road, Huangjia Street, Shuangliu District, Chengdu, Sichuan 610200 Patentee after: Chengdu BOE Display Technology Co.,Ltd. Country or region after: China Address before: No. 1778, Qinglan Road, Gongxing street, Shuangliu District, Chengdu, Sichuan 610200 Patentee before: CHENGDU ZHONGDIAN PANDA DISPLAY TECHNOLOGY Co.,Ltd. Country or region before: China |