CN110088312A - Oriented electrical steel and its magnetic domain thinning method - Google Patents

Oriented electrical steel and its magnetic domain thinning method Download PDF

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Publication number
CN110088312A
CN110088312A CN201780079234.1A CN201780079234A CN110088312A CN 110088312 A CN110088312 A CN 110088312A CN 201780079234 A CN201780079234 A CN 201780079234A CN 110088312 A CN110088312 A CN 110088312A
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groove
oriented electrical
electrical steel
magnetic domain
mask layer
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CN110088312B (en
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朴世珉
韩奎锡
权五烈
权玟锡
朴钟泰
闵基荣
李原杰
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Posco Holdings Inc
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Posco Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D10/00Modifying the physical properties by methods other than heat treatment or deformation
    • C21D10/005Modifying the physical properties by methods other than heat treatment or deformation by laser shock processing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/362Laser etching
    • B23K26/364Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D10/00Modifying the physical properties by methods other than heat treatment or deformation
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D8/00Modifying the physical properties by deformation combined with, or followed by, heat treatment
    • C21D8/12Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of articles with special electromagnetic properties
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D8/00Modifying the physical properties by deformation combined with, or followed by, heat treatment
    • C21D8/12Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of articles with special electromagnetic properties
    • C21D8/1294Modifying the physical properties by deformation combined with, or followed by, heat treatment during manufacturing of articles with special electromagnetic properties involving a localized treatment
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F4/00Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23GCLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G1/00Cleaning or pickling metallic material with solutions or molten salts
    • C23G1/02Cleaning or pickling metallic material with solutions or molten salts with acid solutions
    • C23G1/08Iron or steel

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing Of Steel Electrode Plates (AREA)
  • Soft Magnetic Materials (AREA)
  • Laser Beam Processing (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

The magnetic domain thinning method of oriented electrical steel according to an embodiment of the invention, it includes: the step of preparing oriented electrical steel;In the step of forming mask layer on the surface of oriented electrical steel;Laser beam is irradiated to part mask layer to remove mask layer and form pre-groove in the step on oriented electrical steel;And the step of pickling is to form groove is carried out to oriented electrical steel.

Description

Oriented electrical steel and its magnetic domain thinning method
Technical field
The present invention relates to oriented electrical steel and its magnetic domain thinning methods.
Background technique
Oriented electrical steel is used as the core material of the electric products such as transformer.Therefore, in order to reduce the function of electrical equipment Rate loss improves energy conversion efficiency, and the iron loss of core material should be excellent, and needs to be laminated and duty ratio is high when batching Steel plate.
Oriented electrical steel refers to the crystal grain by hot rolling, cold rolling and annealing process secondary recrystallization along rolling direction It is arranged in the functional steel plate of the texture (also known as " goss texture ") of { 110 }<001>orientation.
As the method for reducing oriented electrical steel iron loss, it is known to magnetic domain thinning method.That is, it is directed to magnetic domain, By forming scratch or applying energy impact, so that the size of big magnetic domain possessed by oriented electrical steel refines.In this feelings Under condition, when magnetic domain magnetizes and changes direction, compared with when domain size is big, energy consumption can be reduced.Magnetic domain refinement side Method also keeps the permanent magnetic domain of improvement to refine and the interim magnetic domain of improvement will not be kept to refine after having heat treatment.
Also show that iron loss improves after destressing heat treatment more than the heat treatment temperature for occurring replying (Recovery) The permanent magnetic domain thinning method of effect can be divided into etching method, roll-in method and laser method.Etching method is by the selectivity in solution Electrochemical reaction forms groove (groove) on surface of steel plate, therefore, it is difficult to control groove shape, to be difficult to along width Direction equably ensures the iron loss characteristic of final products.Simultaneously as being used as the acid solution of solvent, have the defects that not environmentally.
Permanent magnetic domain thinning method based on pressure roller is the magnetic domain refinement technology with iron loss improvement, is added on pressure roller After work goes out shape for lugs, press to pressure roller or plate, so that the groove with one fixed width and depth is formed in plate surface, Then it anneals, so that generating the recrystallization of channel bottom on part.The shortcomings that roll-in method, is, to the stabilization of machining Property, be difficult to ensure that the reliability of the stabilization iron loss based on thickness and craftsmanship are complicated, and form (stress relief annealing after groove Before) iron loss and magnetic flux density characteristic be deteriorated.
Method used by permanent magnetic domain thinning method based on laser is shone to the electric steel plate surface element fast moved High output laser is penetrated, forms the groove (groove) generated with basal part fusing by laser irradiation.In order to quickly add Work goes out groove, needs using the biggish laser of output, therefore there is the very high disadvantage of cost bought and safeguard laser.This Outside, when forming the trench, the protuberance (hill-up) of fusing iron will necessarily be generated, and the generation swelled will cause leakage field.Therefore, The increased trend of iron loss will be will appear.The formation of protuberance can also have an impact insulation, to cause permanent magnetic domain refinement steel plate Magnetic property be deteriorated.In order to remove swell used by method using washing, brush, pickling.But surface is being scraped with brush The process of brush or during being melted by acid, roughness can be badly damaged, and be not easy removal protuberance.
Summary of the invention
(1) technical problems to be solved
The present invention is intended to provide a kind of improve magnetic and account for by combination etching method and laser method with faster speed of production The oriented electrical steel and its magnetic domain thinning method of empty ratio.
(2) technical solution
The magnetic domain thinning method of oriented electrical steel according to an embodiment of the invention, it includes: prepare orientation electricity The step of work steel plate;In the step of forming mask layer on the surface of oriented electrical steel;To part mask layer irradiate laser beam with It removes mask layer and forms pre-groove in the step on oriented electrical steel;And pickling is carried out to be formed to oriented electrical steel The step of groove.
Mask layer may include aluminium, magnesium, manganese or their oxide or compound organic matter.
The thickness of mask layer can be 1 μm to 10 μm.
The output of laser beam can be 1kW to 3kW, and irradiation speed can be 70m/s to 100m/s.
The difference on the surface of the focal position and oriented electrical steel of laser beam is smaller than equal to 200 μm.
The depth of pre-groove can be 2 μm to 5 μm.
In the step of forming groove, part protuberance can be removed.
In the step of forming groove, the acid concentration of pickling solution can be 30 volume % to 50 volume %, and temperature can be 50 DEG C To 90 DEG C.
In the step of forming groove, the depth of groove can be 15 μm to 30 μm.
It also may include the step to form insulating film layer above mask layer and above groove after the step of forming groove Suddenly.
Oriented electrical steel according to an embodiment of the invention, it includes groove, from the surface of electric steel plate to The internal direction of electric steel plate is formed;And mask layer, it is formed on the surface of electric steel plate, the rough surface of trench portions Spending (Ra) can be 0.1 μm to 0.7 μm.
Groove width W of the groove at trench depth 1/2bWith the width W on the groove on electric steel plate surfaceaThe ratio between (Wb/Wa) It can be 0.3 to 0.8.
The depth of the groove can be 15 μm to 30 μm.
The oriented electrical steel also may include the insulating film layer being formed on mask layer and groove.
(3) beneficial effect
An exemplary implementation scheme according to the present invention, can faster speed of production form the groove of required shape.
In addition, an exemplary implementation scheme according to the present invention, can improve magnetic and duty ratio.
Detailed description of the invention
Fig. 1 is the ideograph of oriented electrical steel plate surface according to an embodiment of the invention.
Fig. 2 is the flow chart of magnetic domain thinning method according to an embodiment of the invention.
Fig. 3 is the ideograph in the oriented electrical steel section after forming mask layer.
Fig. 4 is the ideograph for irradiating the oriented electrical steel section after laser.
Fig. 5 is the ideograph in the oriented electrical steel section after pickling.
Fig. 6 is the ideograph in the oriented electrical steel section after forming insulating film layer.
Fig. 7 is the ideograph for amplifying trench cross section.
Fig. 8 is the schematic diagram of the width and depth for illustrating groove.
Specific embodiment
Term first, second, third, etc. is for describing various parts, ingredient, region, layer and/or section, but these portions in text Point, ingredient, region, layer and/or section should not be limited by these terms.These terms are only used to distinguish certain a part, ingredient, area Domain, layer and/or section and another part, ingredient, region, layer and/or section.Therefore, without departing from the scope of the present invention, retouch below First part, ingredient, region, layer and/or the section stated can also be described as second part, ingredient, region, layer and/or section.
Term as used herein only for description specific embodiment, is not intended to limit the present invention.Unless context In separately provide obvious opposite meaning, otherwise singular used herein is also intended to comprising plural form.It should also be appreciated that , term "comprising" can refer specifically to a certain characteristic, field, integer, step, movement, element and/or ingredient, but not arrange Except the presence of other characteristics, field, integer, step, movement, element, ingredient and/or group or additional.
If certain a part is described as be on another part, can directly on another part or its Between there are other parts.When certain a part is described as directly on another part, there is no other parts therebetween.
Although without separately defining, the meaning of all terms (including technical terms and scientific terms) used herein with Those skilled in the art is normally understood equivalent in meaning.For the term being defined inside dictionary, it should be interpreted have Have with relevant technical literature and the consistent meaning of content disclosed herein, without should with idealization or meaning too formal To explain their meaning.
The embodiment of the present invention is described below in detail, so that those skilled in the art are easy to implement this Invention.The present invention being capable of deformation implementation in a variety of different ways, it is not limited to embodiment as described herein.
The mode for the oriented electrical steel 10 that magnetic domain according to one embodiment of present invention is refined is shown in Fig. 1 Figure.As shown in Figure 1, being formed with multiple grooves 30 along rolling direction on the surface of oriented electrical steel 10.
The magnetic domain thinning method of oriented electrical steel according to an embodiment of the invention is schematically shown in Fig. 2 Flow chart.The flow chart of the magnetic domain thinning method of Fig. 2 is only intended to illustrate the present invention, and the present invention is not limited to streams shown in Fig. 2 Journey.Therefore, various modifications can be carried out to magnetic domain thinning method.
As shown in Fig. 2, the magnetic domain thinning method of oriented electrical steel according to an embodiment of the invention, it includes: Prepare the step S10 of oriented electrical steel;The step S20 of mask layer is formed on the surface of oriented electrical steel;To partially covering Film layer irradiates laser beam to remove mask layer and form pre-groove in the step S30 on oriented electrical steel;And to orientation electricity Work steel plate carries out pickling to form the step S40 of groove.It is described in detail below as each step.
Firstly, preparing oriented electrical steel in step slo.In one embodiment of the invention, oriented electrical steel It is characterized in that magnetic domain thinning method and is formed by groove shape, and can be with as the oriented electrical steel of magnetic domain refined object Any oriented electrical steel is used without restriction.In particular, the alloy compositions regardless of oriented electrical steel, can all play this The effect of invention.Therefore, the detailed description to oriented electrical steel alloy compositions is omitted.
In one embodiment of the invention, oriented electrical steel can be used through hot rolling and cold rolling from slab rolling at pre- Determine the oriented electrical steel of thickness.
Next, forming mask layer on the surface of the oriented electrical steel prepared in step S20.In Fig. 3 schematically Show the oriented electrical steel 10 for being formed with mask layer 20.The effect of mask layer 20 is kept away in following acid pickling step S40 Exempt from steel plate mother metal to be affected because of acid.In addition, in following laser irradiation step S30, only at the position of irradiation laser Upper mask layer 20 is removed, therefore the part of only removal mask layer 20 is exposed to acid, Jin Ercong in following acid pickling step S40 Pre-groove can form the deeper groove of depth.
Mask layer 20 may include aluminium, magnesium, manganese or their oxide or compound organic matter.Do not have to the method for forming mask layer There is special limitation, but by coating can include the exposure mask application composition of the slurry form of aluminium, magnesium, manganese or their oxide The mode that is dried afterwards forms mask layer.
The thickness of mask layer 20 can be 1 μm to 10 μm.If the thickness of mask layer 20 is excessively thin, following acid pickling steps S40 light plate base material is influenced by acid, and then the roughness of surface of steel plate can rise, it is possible to generate bad shadow to magnetism It rings.If the thickness of mask layer 20 is blocked up, pre-groove possibly can not form appropriate thickness in following laser irradiation step S30 Degree.It therefore, can be by the thickness control of mask layer 20 in aforementioned range.
In one embodiment of the invention, mask layer 20 will not be removed, and can remain.Remaining mask layer 20 plays Further assign the effect of tension.
Next, in step s 30, irradiating laser beam to part mask layer, pre-groove is formed to remove mask layer 20 31 on oriented electrical steel 10.Removal part mask layer 20 is schematically shown in Fig. 4 and forms taking for pre-groove 31 To electric steel plate 10.
In following acid pickling step S40, the deeper groove 30 of depth can be formed by pickling.Therefore, in step S30 In, speed can be irradiated faster uses the lower laser beam of output.Specifically, the output of laser beam can be 1kW to 3kW, shine Firing rate degree can be 70m/s to 100m/s.If the output of laser beam is too low or irradiates excessive velocities, it would not be formed to have and fitted When the pre-groove 31 of depth.In addition, steel plate largely melts if the output of laser beam is excessively high or irradiation speed is excessively slow, Protuberance 32 caused by being likely to result in becomes large-sized or generates a large amount of protuberance 32.It therefore, can be by the output of laser beam And irradiation speed control is in aforementioned range.
The difference on the surface of the focal position and oriented electrical steel 10 of laser beam is smaller than equal to 200 μm.If focus is inclined It is many from surface, then due to the energy loss of laser beam, the depth of pre-groove 31 can not be properly formed.
The depth of pre-groove 31 can be 5 μm to 10 μm.At this point, the depth of pre-groove 31 refers to never formation groove Oriented electrical steel plate surface to formed along thickness direction (direction z) most deep trench portions length.Of the invention In one embodiment, pre-groove 31 is formed by irradiation laser, prefabricated ditch is then made by pickling in acid pickling step S40 The depth of slot 31 forms deeper, can rapidly form the groove 30 with specific shape by this way.
For the shot shape of laser beam, can be irradiated according to the shape for being formed by pre-groove 31 and groove 30. Specifically, disclosed as shown in figure 1, groove is formed as threadiness, and multiple along rolling direction (direction y) formation, can basis This shape irradiates laser beam.Interval between groove can be 1mm to 5mm.
In addition, the width direction (direction x) relative to steel plate, can discontinuously form 2 to 6 grooves, and phase It is in 82 ° to 98 ° angles for rolling direction (direction y), laser beam can be irradiated according to this shape.
The type of laser beam is not particularly limited, can be used single fiber laser (single fiber laser).
Next, in step s 40, pickling is carried out to oriented electrical steel 10, to form groove 30.In Fig. 5 schematically Ground shows the oriented electrical steel 10 for being formed with groove 30.As previously mentioned, logical in step S30 in one embodiment of the present of invention Irradiation laser is crossed to form pre-groove 31, therefore even if in step s 40 the time of pickling it is short, can also form required depth Groove 30.In addition, being different from generally by way of forming groove, spy being formed in trench portions by pickling irradiation laser Fixed surface roughness.In addition, being different from the method for generally forming groove by etching, swashed in step s 30 by irradiation Light forms pre-groove 31, so as to forming down the wide relatively narrow and deeper depth groove with specific shape.
In step s 40, groove 30 is not only formed, also can remove the part protuberance 32 formed in step S30.For general Irradiation laser come by way of forming groove, in order to remove protuberance 32, additional technique is needed, but a reality of the invention It applies without any additional technique in example, protuberance 32 can be also removed simultaneously during forming groove 30.It swells removal part 32 refer to be formed by it is multiple protuberance 32 in a part be removed or it is higher-height protuberance 32 a part be removed and Height is lower.These protuberances 32 are possible to superficiality and magnetic generation adverse effect to electric steel plate, it is therefore necessary to appropriate Ground removal.
Pickling solution used in pickling, acid concentration can be 30 volume % to 50 volume %.If fruit acid concentration is too low, just not It will form the groove 30 with appropriate depth.As fruit acid concentration is excessively high, it is likely that the surface roughness of 30 part of groove occurs Excessively coarse problem.Therefore, the pickling solution of the concentration with aforementioned range can be used.
In acid pickling step, temperature can be 50 DEG C to 90 DEG C.Under temperature range appropriate, pickling effect can further improve Rate.
The type of pickling solution is not particularly limited, common aqueous acid such as hydrochloric acid, sulfuric acid, hydrofluoric acid etc. can be used.
The depth D of the groove 30 formed in step S40 can be 15 μm to 30 μm.
After the step s 40, it can be further formed insulating film layer as needed.It schematically shows and is formed in Fig. 6 The oriented electrical steel 10 of insulating film layer 30.As shown in fig. 6, insulating film layer 30 is formed on mask layer 20 and groove 30.As Specific method can form insulating film layer 30 by way of coating comprising phosphatic insulation coating liquid.As this exhausted Edge coating liquid is, it is preferable to use the coating liquid comprising colloidal silicon dioxide and metal phosphate.At this point, metal phosphate can be Al Phosphate, Mg phosphate or their combination, and the weight relative to insulation coating liquid, Al, Mg or their combination contain Amount can be more than or equal to 15 weight %.
Oriented electrical steel 10 according to an embodiment of the invention, it includes: groove 30, from the table of electric steel plate Internal direction towards electric steel plate is formed;And mask layer 20, it is formed on the surface of electric steel plate, 30 part of groove Surface roughness is 0.1Ra to 0.7Ra.About oriented electrical steel 10, mask layer 20 and groove 30, refined in magnetic domain above-mentioned It was had been described in method, therefore omits repetitive description.
Fig. 7 is the enlarged drawing of 30 part of groove in Fig. 6.As shown in fig. 7, will form roughness on 30 part of groove.This The roughness of sample is formed because of the pickling in acid pickling step S40.Groove is formed different from generally passing through laser irradiation or etching Method, the roughness of 30 part of groove forms coarse.When being properly formed the roughness of 30 part of groove, it will improve Duty ratio, and have the effect of improving magnetic.In addition, electric steel plate 10 and insulation can be improved when forming insulating film layer 40 Adhesion between film layer 40.When the roughness of 30 part of groove is excessive, it is possible to react and connect with insulating film layer 40 Problem occurs for touching aspect.In one embodiment of the invention, roughness refers to the roughness measured according to JIS97 method.
Groove width W of the groove 30 at trench depth 1/2bWith the width W on the groove on electric steel plate surfaceaThe ratio between (Wb/ Wa) it can be 0.3 to 0.8.The width W on the groove on electric steel plate surface is shown in Fig. 8aWith the ditch groove width at trench depth 1/2 Spend Wb.Groove width W at trench depth 1/2bWith the upper width W of the groove on electric steel plate surfaceaThe ratio between (Wb/Wa) closer 1, it will the smaller groove of the difference of formation width, when using general engraving method, it will form the groove of this form.? Groove width W at trench depth 1/2bWith the width W on the groove on electric steel plate surfaceaThe ratio between (Wb/Wa) closer to 0 and depth It is deeper, it will the groove that formation width sharply narrows, width WbNarrower and depth is deeper, can be into terms of magnetic and duty ratio One step is improved.
The depth D of groove 30 can be 15 μm to 30 μm.If depth D is shallower, it is likely that sufficient magnetic domain will not be generated Thinning effect.If depth is too deep, heat affecting position increases, it is possible to produce to the growth of goss texture (Goss Texture) Raw adverse effect.
The oriented electrical steel also may include the insulating film layer 40 being formed on mask layer 20 and groove 30.About insulation Film layer 40, had been described in above, therefore omitted repetitive description.
The present invention is described in further detail below by embodiment.However, following embodiments are only intended to illustrate the present invention, The present invention is not limited to following embodiments.
Embodiment 1: pre-groove is formed
Prepare the oriented electrical steel with a thickness of 0.20mm Jing Guo cold rolling.MgO and water are coated on the electric steel plate surface After the coating liquid mixed with the weight ratio of 1:1, it is dried at 100 DEG C and forms the mask layer with a thickness of 5 μm.It will tool There is the single fiber laser for arranging the output in the following table 1 to be irradiated with the irradiation speed arranged in the following table 1.At this point, steel plate Movement speed also arrange in the following table 1.In addition, laser beam focal position and oriented electrical steel plate surface interval arrange in In the following table 1.The width of the pre-groove formed by laser irradiation and depth are arranged in the following table 1.The width of pre-groove Degree refers to the width on surface of steel plate.
[table 1]
Embodiment 2: groove is formed
Acid is carried out with the hydrochloric acid for arranging the concentration in the following table 2 to the steel plate for forming pre-groove in example 1 to 7 It washes, pickling time arranges in the following table 2.The upper width W for the groove being finally madeaKeep certain for 120 μm.By the depth D of groove, In the middle width W of 1/2 depthb, the upper wide (W the ratio between with middle widthb/Wa), the roughness of trench portions arranges in the following table 2.Roughness is adopted With JIS97 standard.
[table 2]
Comparative example 1: groove is formed by etching method
Prepare the oriented electrical steel with a thickness of 0.20mm Jing Guo cold rolling.Coating forms patterning on the surface of the steel plate At the photoresist layer of groove shape, and with 30A/dm in NaCl electrobath2Current density carry out electrolytic etching formed groove, So as to form groove of the arrangement in the following table 3.The upper width W for the groove being finally madeaKeep certain for 120 μm.By groove Depth D, the middle width W in 1/2 depthb, the upper wide (W the ratio between with middle widthb/Wa), the roughness of trench portions arranges in the following table 3.
Comparative example 2: groove is formed by laser irradiation
Prepare the oriented electrical steel with a thickness of 0.23mm Jing Guo cold rolling.To the surface of the steel plate with the speed of 100m/s The laser beam that irradiation output is 2kW, to form groove.The upper width W for the groove being finally madeaKeep certain for 120 μm.By ditch The depth D of slot, the middle width W in 1/2 depthb, the upper wide (W the ratio between with middle widthb/Wa), the roughness of trench portions arranges in the following table 3 In.
[table 3]
Classification Trench depth (μm) In groove wide (μm) Wb/WaThan Roughness (μm)
Comparative example 1 20 110 0.91 0.2
Comparative example 2 20 50 0.42 0.16
Embodiment 3: insulating film layer and measurement magnetism, duty ratio are formed
Example 8 to 17 and comparative example 1 will be coated in comprising the insulation coating liquid of colloidal silicon dioxide and metal phosphate With 2 in formed on the oriented electrical steel of groove and be heat-treated, to form insulating film layer on a surface of a steel sheet, and Magnetic and duty ratio final finishing is determined in the following table 4.
For iron loss improvement rate, the iron loss (W of the electric steel plate before groove is formed to irradiation laser1) and irradiation laser shape At the iron loss (W after groove2) be measured after, pass through (W1-W2)/W1To calculate iron loss improvement rate.
For duty ratio, after the sample of 60mm × 300mm is stacked 14, by calculating relative to the untouchable of total area Product is to determine duty ratio.
[table 4]
Classification Iron loss improvement rate (%) Duty ratio (%)
Example 8 7 96.2
Example 9 6 95.8
Example 10 7 96.4
Example 11 6 96.5
Example 12 5 95.9
Example 13 10 97.7
Example 14 10 96.8
Example 15 9 97.2
Example 16 10 97.3
Example 17 10 97
Comparative example 1 4 95
Comparative example 2 6 97
Shown in table 4 as above, with the comparative example 1 and comparison for forming groove by existing normal etch method and laser irradiation Example 2 is compared, and example 8 to 17 can get obvious excellent iron loss improvement rate and duty ratio.Further, groove shape is controlled It can get superior iron loss improvement rate and duty ratio at the example 13 to 17 of specific shape.
The present invention can implement to be not limited to the embodiment described in a variety of different ways, of the art common Technical staff is understood that in the case where not changing technical idea or essential feature of the invention through other concrete mode energy It is enough to implement the present invention.It will therefore be appreciated that the above embodiments are exemplary, rather than it is used to limit of the invention.
Description of symbols
10: electric steel plate 20: mask layer
30: groove 31: pre-groove
32: protuberance 40: insulating film layer

Claims (14)

1. a kind of magnetic domain thinning method of oriented electrical steel, it includes:
The step of preparing oriented electrical steel;
In the step of forming mask layer on the surface of the oriented electrical steel;
Pre-groove is formed on the oriented electrical steel to the part mask layer irradiation laser beam to remove mask layer Step;And
The step of pickling is to form groove is carried out to the oriented electrical steel.
2. the magnetic domain thinning method of oriented electrical steel according to claim 1, wherein
The mask layer includes aluminium, magnesium, manganese or their oxide.
3. the magnetic domain thinning method of oriented electrical steel according to claim 1, wherein
The mask layer with a thickness of 1 μm to 10 μm.
4. the magnetic domain thinning method of oriented electrical steel according to claim 1, wherein
The output of the laser beam is 1kW to 3kW, and irradiation speed is 70m/s to 100m/s.
5. the magnetic domain thinning method of oriented electrical steel according to claim 1, wherein
The difference on the surface of the focal position and oriented electrical steel of the laser beam is less than or equal to 200 μm.
6. the magnetic domain thinning method of oriented electrical steel according to claim 1, wherein
The depth of the pre-groove is 5 μm to 10 μm.
7. the magnetic domain thinning method of oriented electrical steel according to claim 1, wherein
In the formation groove the step of, part protuberance is removed.
8. the magnetic domain thinning method of oriented electrical steel according to claim 1, wherein
In the formation groove the step of, the acid concentration of pickling solution is 30 volume % to 50 volume %, and temperature is 50 DEG C to 90 ℃。
9. the magnetic domain thinning method of oriented electrical steel according to claim 1, wherein
In the formation groove the step of, the depth of groove is 15 μm to 30 μm.
10. the magnetic domain thinning method of oriented electrical steel according to claim 1, wherein
After the formation groove the step of, also comprising forming step of the insulating film layer above the mask layer and the groove Suddenly.
11. a kind of oriented electrical steel, it includes:
Groove is formed from the surface of electric steel plate to the internal direction of electric steel plate;And
Mask layer is formed on the surface of the electric steel plate,
The surface roughness of the trench portions is 0.1 μm to 0.7 μm.
12. oriented electrical steel according to claim 11, wherein
Groove width (W of the groove at trench depth 1/2b) and the width (W on the groove on the electric steel plate surfacea) it Than (Wb/Wa) it is 0.3 to 0.8.
13. oriented electrical steel according to claim 11, wherein
The depth of the groove is 15 μm to 30 μm.
14. oriented electrical steel according to claim 11, also includes:
Insulating film layer is formed on the mask layer and the groove.
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