CN110071203A - Light emitting device - Google Patents

Light emitting device Download PDF

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Publication number
CN110071203A
CN110071203A CN201910206898.0A CN201910206898A CN110071203A CN 110071203 A CN110071203 A CN 110071203A CN 201910206898 A CN201910206898 A CN 201910206898A CN 110071203 A CN110071203 A CN 110071203A
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China
Prior art keywords
light emitting
lamination
emitting device
dielectric layer
electrode
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CN201910206898.0A
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Chinese (zh)
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CN110071203B (en
Inventor
简振伟
余子强
林筱雨
许琪扬
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Epistar Corp
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Epistar Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/44Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/36Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
    • H01L33/40Materials therefor
    • H01L33/405Reflective materials

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Led Devices (AREA)

Abstract

The present invention discloses a kind of light emitting device, includes: a luminous lamination includes a first surface;One pattern dielectric layer is formed on the first surface of luminous lamination, comprising a first part and and a second part generally around first part and identical as the thickness of first part;The first part of one first reflecting electrode overlay pattern dielectric layer;And one barrier layer cover the second part of the first reflecting electrode and pattern dielectric layer.

Description

Light emitting device
The application be Chinese invention patent application (application number: 201310659242.7, the applying date: on December 6th, 2013, Denomination of invention: light emitting device) divisional application.
Technical field
The present invention relates to a kind of light emitting devices, are located at the luminous dress on an electrically-conductive backing plate more particularly to a kind of luminous lamination It sets.
Background technique
The principle of luminosity of light emitting diode (LED) is released because electronics is displaced between n-type semiconductor and p-type semiconductor Energy.Since the principle of luminosity of light emitting diode is different from the incandescent lamp of heat filament, so light emitting diode is also referred to as cold light Source.Furthermore light emitting diode has preferable environmental resistance degree, longer service life, lighter and portability and lower Energy consumption allows it to be considered as another selection of light source in illumination application.Light emitting diode be applied to as traffic sign, backlight module, The different fields such as street lamp and Medical Devices, and gradually replace traditional light source.
The luminous lamination that light emitting diode has is epitaxial growth on an electrically-conductive backing plate or on an insulating substrate.With leading The light emitting diode of electric substrate can form an electrode, commonly referred to as vertical LED at the top of the lamination that shines.With exhausted The light emitting diode of edge substrate must then expose the semiconductor layer of two opposed polarities by etching process, and respectively in two halves Electrode, commonly referred to as horizontal light emitting diode are formed in conductor layer.The advantages of vertical LED, is electrode shading Area is few, good heat dissipation effect and without additional etching extension manufacture craft, but the electrically-conductive backing plate for the extension that is used to grow up at present has It is easy light-absorbing problem, thus influences the luminous efficiency of light emitting diode.The advantages of horizontal light emitting diode, is absolutely Edge substrate is generally also transparent substrate, and light can be projected from all directions of light emitting diode, however also have poor heat radiation, electrode shading The disadvantages of area is more, extension etching process loses light-emitting area.
Above-mentioned light emitting diode can be connected to other elements further to form a light emitting device.Light emitting diode can It is connected on a carrier by that side with substrate, or time carrier and light emitting diode is formed in solder or glue material Between, to form a light emitting device.In addition, secondary carrier can also comprising a circuit, it be electric for example, by the conductive structure for a metal wire It is connected to the electrode of light emitting diode.
Summary of the invention
To solve the above problems, the present invention discloses a kind of light emitting device, include: a luminous lamination includes a first surface; One pattern dielectric layer is formed on the first surface of luminous lamination, comprising a first part and and a second part generally around First part and identical as the thickness of first part;The first part of one first reflecting electrode overlay pattern dielectric layer;And One barrier layer covers the second part of the first reflecting electrode and pattern dielectric layer.
Detailed description of the invention
Fig. 1 is the first embodiment for showing light emitting device of the present invention;
Fig. 2 is the second embodiment for showing light emitting device of the present invention;
Fig. 3 A and Fig. 3 B are the 3rd embodiments for showing light emitting device of the present invention.
Symbol description
100,200,300 light emitting device
102,202,302 luminous lamination
202a, 202a, 302a first surface
102b, 202b, 302b second surface
104,204,304 first semiconductor layer
106,206,306 luminescent layer
108,208,308 second semiconductor layer
110,210,310 pattern dielectric layer
110a, 210a, 310a first part
110b, 210b, 310b second part
112,212,312 first reflecting electrode
114,214,314 protective layer
The first protective layer of 214a, 314a
The second protective layer of 214b, 314b
116,216,316 second electrode structure
316a electronic pads
316b extends dendritic electrode
118,218,318 first barrier layer
120,220,320 second barrier layer
122,222,322 barrier layer
124,224,324 articulamentum
126,226,326 permanent substrate
Specific embodiment
Referring to Fig. 1, being the first embodiment for showing light emitting device of the present invention.Light emitting device 100 is to include: one is permanent Substrate 126;One luminous lamination 102 be formed on permanent substrate 126 and include a first surface 102a towards permanent substrate 126 and One second surface 102b is with respect to first surface 102a;One pattern dielectric layer 110 is formed on first surface 102a, includes one the An a part of 110a and second part 110b is generally around first part 110a, and wherein first part 110a includes one first thick Degree, second part 110b include that a second thickness is identical to first thickness;Reflexive 112 coverage diagram of the first reflecting electrode of one tool The first part 110a of case dielectric layer 110, wherein the material of the first reflecting electrode 112 may include silver-colored (Ag), aluminium (Al) or its He has the metal of high reflectivity or the lamination or alloy of aforementioned metal;And one barrier layer 122 cover the first reflecting electrode and The second part 110a of pattern dielectric layer 110.It may include a second electrode structure on the second surface 102b of luminous lamination 102 The pattern of the 116 first part 110a with corresponding pattern dielectric layer 110.First reflecting electrode 112 is that Ohmic contact shines The first surface 102a of lamination 102, second electrode structure 116 are the second surface 102b of the luminous lamination 102 of Ohmic contact, and in The region that one vertical direction second electrode structure 116 contacts the lamination 102 that shines with the first reflecting electrode 112 is not overlap each other. One section width of barrier layer 122 can be slightly wider than luminous lamination 102, the outer rim of the second part 110b of pattern dielectric layer 110 Can the substantially aligned side wall in barrier layer 122 and it is laterally projecting in shine lamination 102 side wall.One protective layer 114 can comply with hair The second surface 102b that the shape of light lamination 102 is covered in luminous lamination 102 does not have the region of second electrode structure 116, and The side wall for the lamination 102 that shines is covered, the lower end of protective layer 114 is connected with the second part 110b of pattern dielectric layer 110.Figure The material of case dielectric layer 110 may include an insulation oxide, nitride, silicon oxide compound, titanium oxide, aluminium oxide, magnesium fluoride Or silicon nitride.The material of protective layer 114 may include silicon nitride or silica.The material of pattern dielectric layer 110 may differ from protecting The material of sheath 114.In the present embodiment, the material of pattern dielectric layer 110 can be titanium dioxide (TiO2), protective layer 114 Material can be silica (SiO2) or silicon nitride (SiNxOr Si3N4).If the second part of pattern-free dielectric layer 110 110b, barrier layer 110 are however the barrier layers 110 directly then in the lower end of protective layer 114 and partial first surface 102a Material is usually metal, and the adhesion between protective layer 114 is bad, thus may make lower end and the barrier layer 110 of protective layer 114 Between generate gap, moisture or other external interferences can be by the further shadows of the gap between protective layer 114 and barrier layer 110 at this time Ring barrier layer 110 and first surface 102a then, once barrier layer 110 falls off in first surface 102a, the first reflecting electrode 112, which are just possible to 102 side wall of self-luminous lamination, overflows, and increases the risk of 100 electric characteristic abnormality of light emitting device or failure.In this implementation In example, the part of the first reflecting electrode 112 also second part 110b of overlay pattern dielectric layer 110, and make barrier layer 122 not It is contacted with first surface 102a.
The lamination 102 that shines is growth substrate (not shown) of the prior epitaxial growth from a wafer scale, then in first surface After sequentially forming pattern dielectric layer 110, the first reflecting electrode 112 and barrier layer 122 on 102a, pattern dielectric layer 110 First part 110a is to be completed simultaneously under identical manufacture craft with second part 110b, thus thickness having the same and material Material.Then can by an articulamentum 124 by permanent substrate 126 then in luminous lamination 102, barrier layer 122 can be between articulamentum 124 and first between reflecting electrode 112, and articulamentum 124 can be between barrier layer 122 and permanent substrate 126.And permanent Growth substrate then after luminous lamination 102, can be removed and expose second surface 102b, and further land productivity by substrate 126 Second surface 102b is set to become a coarse surface with such as dry ecthing mode.Then etchable luminous lamination 102 formed groove with Multiple units insulated from each other are formed, can be obtained multiple light emitting devices 100 further along groove cut crystal.Second part 110b Outside also can be thinning due to together by cutting during cut crystal, and second part 110b is contacted with first surface 102a Section can generally remain second thickness above-mentioned.
The lamination 102 that shines may include one first semiconductor layer 104, one second semiconductor layer 108 and be formed in the first half and lead Luminescent layer 102 between body layer 104 and the second semiconductor layer 108, wherein the first semiconductor layer 104 can be for p-type and with the first table Face 102a, the second semiconductor layer 108 can be for N-shapeds and with second surface 102b.Barrier layer 122 may include one first barrier layer 118 and one second barrier layer 120 double-layer structure, and the material of barrier layer 122 may include such as titanium (Ti), tungsten (W), platinum (Pt), titanium-tungsten (TiW) or combinations thereof.The structure of luminous lamination 102 may include single heterojunction structure (single heterostructure;SH), double-heterostructure (double heterostructure;DH), bilateral double-heterostructure (double-side double heterostructure;) or multiple quantum well construction (multi-quantum well DDH; MQW).The lamination 102 that shines can be selected from aluminium (Al), indium (In), gallium (Ga), nitrogen (N) institute structure for the luminous lamination of mononitride, material At the combination of group, growth substrate can be a transparent insulation substrate such as sapphire (sapphire) substrate or electrically-conductive backing plate example Such as silicon (Si) or silicon carbide (SiC) substrate.The material of luminous lamination 102 is also selected from aluminium (Al), gallium (Ga), indium (In), phosphorus (P), the combination of arsenic (As) constituted group, growth substrate then can be GaAs (GaAs).
Referring to Fig. 2, being the second embodiment for showing light emitting device of the present invention.Light emitting device 200 is to include: one is permanent Substrate 226;One luminous lamination 202 be formed on permanent substrate 226 and include a first surface 202a towards permanent substrate 226 and One second surface 202b is with respect to first surface 202a;One pattern dielectric layer 210 is formed on first surface 202a, includes one the An a part of 210a and second part 210b is generally around first part 210a, and wherein first part 210a includes one first thick Degree, second part 210b include that a second thickness is identical to first thickness, and the material of first part 210a and second part 210b Expect identical;The first part 210a of the reflexive 212 overlay pattern dielectric layer 210 of the first reflecting electrode of one tool, wherein first The material of reflecting electrode 212 may include silver-colored (Ag), aluminium (Al), other metals or aforementioned metal with high reflectivity lamination or Alloy;And one barrier layer 222 cover the second part 210b of the first reflecting electrode and pattern dielectric layer 210.Shine lamination It may include the first part that a second electrode structure 216 has corresponding pattern dielectric layer 210 on 202 second surface 202b The pattern of 210a contacts the region for the lamination 202 that shines in a vertical direction second electrode structure 216 with the first reflecting electrode 212 It is not overlap each other.One section width of barrier layer 222 can be slightly wider than luminous lamination 202, and second of pattern dielectric layer 210 The outer rim of point 210b can the substantially aligned side wall in barrier layer 222 and the laterally projecting side wall in the lamination 202 that shines.One protective layer The second surface 202b that 214 shapes that can comply with luminous lamination 202 are covered in luminous lamination 202 does not have second electrode structure 216 region, and the side wall for the lamination 202 that shines is covered, the lower end of protective layer 214 is second with pattern dielectric layer 210 210b is divided to connect.The material of pattern dielectric layer 210 may include an insulation oxide, nitride, silica, titanium oxide, oxidation Aluminium, magnesium fluoride or silicon nitride.Protective layer 214 can have one first protective layer 214a then in the second of pattern dielectric layer 210 The side wall and one second protective layer 214b of the luminous lamination 202 of part 210b and at least covering cover the first protective layer 214a and cover Lid second surface 202b.First protective layer 214a includes a silicon nitride (Si3N4Or SiNx), and the second protective layer 214b includes oxygen SiClx (SiO2).In the present embodiment, the first reflecting electrode 212 and the second part 210b of pattern dielectric layer 210 are between one Every separating.Barrier layer 222 may include one first barrier layer 218 and one second barrier layer 220.One articulamentum 224 can be formed in resistance Between barrier layer 222 and permanent substrate 226.
Fig. 3 A and Fig. 3 B is please referred to, is the 3rd embodiment for showing light emitting device of the present invention.Light emitting device 300 is packet Contain: a permanent substrate 326;One luminous lamination 302 is formed on permanent substrate 326 and includes a first surface 302a towards permanently Substrate 326 and a second surface 302b are with respect to first surface 302a;One pattern dielectric layer 310 is formed in first surface 302a On, comprising an a first part 310a and second part 310b generally around first part 310a, wherein first part 310a has There is a first thickness, there is second part 310b a second thickness to be identical to first thickness, and first part 310a and second Divide the material of 310b identical;The first part of the reflexive 312 overlay pattern dielectric layer 310 of the first reflecting electrode of one tool 310a, wherein the material of the first reflecting electrode 312 may include silver-colored (Ag), aluminium (Al) or other metals with high reflectivity;With And one barrier layer 322 cover the second part 310a of the first reflecting electrode and pattern dielectric layer 310.Shine the of lamination 302 It may include the first part 310a and that a second electrode structure 316 has corresponding pattern dielectric layer 310 on two surface 302b The pattern of two part 310b.One section width of barrier layer 322 can be slightly wider than luminous lamination 302, and the of pattern dielectric layer 310 The outer rim of two part 310b can the substantially aligned side wall in barrier layer 322 and it is laterally projecting in shine lamination 302 side wall.One protects The second surface 302b that the shape that sheath 314 can comply with luminous lamination 302 is covered in luminous lamination 302 does not have second electrode knot The region of structure 316, and the side wall for the lamination 302 that shines is covered, the lower end of protective layer 314 is second with pattern dielectric layer 310 Part 310b connects.The material of pattern dielectric layer 310 may include an insulation oxide, nitride, silicon oxide compound, titanyl Close object or silicon nitride.Protective layer 314 can have one first protective layer 314a then in the second part of pattern dielectric layer 310 310b and the side wall and one second protective layer 314b covering the first protective layer 310a and second at least covering the lamination 302 that shines Surface 302b.First protective layer 314a includes a silicon nitride (Si3N4Or SiNx), the second protective layer 314b includes that silicon oxidation is closed Object is, for example, silica (SiO2).In the present embodiment, second of the first reflecting electrode 312 and pattern dielectric layer 310 Have between point 310b and is separated with an interval.Barrier layer 322 may include one first barrier layer 318 and one second barrier layer 320.One connection Layer 324 can be formed between barrier layer 322 and permanent substrate 326.
As shown in Figure 3B, second electrode structure 316 may include an at least electronic pads 316a and be connected to electronic pads 316a One extends dendritic electrode 316b, and the second part 310b of pattern dielectric layer 310 from upper view sight is to be overlapped in electronic pads 316a And extend dendritic electrode 316b.The second part 310b of pattern dielectric layer 310 may include the outer boundary around luminous lamination, And second part 310b is overlapped in and extends the width of the section of dendritic electrode 316b and be greater than and extend dendritic electrode 316b, and second Part 310b be overlapped in electronic pads 316a section be counter electrode pad 316a figure.
Although disclosing the present invention in conjunction with above description, the range that it is not intended to limiting the invention, implementation sequence, Or the material and process for making used.For various modifications and change made by the present invention, spirit of the invention is neither taken off With range.

Claims (10)

1. a kind of light emitting device, characterized by comprising:
Shine lamination, comprising first surface, the opposite first surface second surface and connect the first surface and second table The side in face;
Electrode structure, on the second surface of the lamination that shines, the electrode structure is comprising electronic pads and extends dendritic electrode, Wherein, it is seen from the top view of the light emitting device, which includes that a part is located at the outside of the electrode structure and surrounds The electrode structure;
Pattern dielectric layer is formed on the first surface of the lamination that shines, and includes a pattern, with the corresponding electrode structure One pattern;
First reflecting electrode is formed on the first surface of the lamination that shines comprising silver-colored (Ag) or aluminium (Al);
Barrier layer covers first reflecting electrode and the pattern dielectric layer, is wider than the lamination that shines comprising a section width;With And
Protective layer, coat this shine lamination the side and be formed in this shine lamination contact except the electrode structure it is all should On second surface.
2. light emitting device as described in claim 1, wherein the protective layer includes the first protective layer, being somebody's turn to do for the lamination that shines is coated Side, but the second surface of the uncoated lamination that shines.
3. light emitting device as claimed in claim 2, wherein the protective layer also includes the second protective layer, first protective layer is covered And it is formed in this and shines on all second surfaces that lamination contacts except the electrode structure.
4. light emitting device as claimed in claim 2, wherein the pattern dielectric layer includes that first part and second part are surround The first part, wherein the first part have a first thickness, the second part have a second thickness, be identical to this first Thickness, the second part of the pattern dielectric layer protrude from the side for shining lamination and connect with first protective layer, and The second part of the pattern dielectric layer is between the barrier layer and first protective layer.
5. light emitting device as claimed in claim 4, wherein the first part of the pattern dielectric layer is by the second surface It is upper depending on see be to be overlapped in the dendritic electrode of the extension.
6. light emitting device as claimed in claim 5, wherein the width of the first part Chong Die with the dendritic electrode of the extension is big In the width of the dendritic electrode of the extension.
7. light emitting device as described in claim 1, wherein the pattern dielectric layer includes insulation oxide or nitride.
8. light emitting device as claimed in claim 3, wherein first reflecting electrode cover the pattern dielectric layer this first Part, wherein first reflecting electrode and the second part of the pattern dielectric layer are separated with an interval and expose first table Face, first reflecting electrode do not cover the second part, and the part barrier layer is made to be contacted with the first surface of the lamination that shines.
9. light emitting device as claimed in claim 3, wherein first protective layer includes silicon nitride, which includes silicon Oxygen compound.
10. light emitting device as described in claim 1 includes also permanent substrate and articulamentum, wherein the articulamentum is formed in this Between barrier layer and the permanent substrate.
CN201910206898.0A 2013-12-06 2013-12-06 Light emitting device Active CN110071203B (en)

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CN201910206898.0A CN110071203B (en) 2013-12-06 2013-12-06 Light emitting device
CN201310659242.7A CN104701433B (en) 2013-12-06 2013-12-06 Light emitting device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10297719B2 (en) 2015-08-27 2019-05-21 Mikro Mesa Technology Co., Ltd. Micro-light emitting diode (micro-LED) device

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CN102097569A (en) * 2009-12-09 2011-06-15 Lg伊诺特有限公司 Light emitting device, light emitting device manufacturing method, light emitting package, and lighting system
CN102237464A (en) * 2010-04-26 2011-11-09 亿光电子工业股份有限公司 Light emitting diode structure and making method thereof
CN102255017A (en) * 2010-05-20 2011-11-23 Lg伊诺特有限公司 Light-emitting device
CN102339921A (en) * 2010-07-20 2012-02-01 夏普株式会社 Semiconductor light-emitting device and method of producing the same
CN103165802A (en) * 2011-12-16 2013-06-19 丰田合成株式会社 Group iii nitride semiconductor light-emitting device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100163894A1 (en) * 2008-12-26 2010-07-01 Toyoda Gosei Co., Ltd. Group III nitride-based compound semiconductor light-emitting device
CN102097569A (en) * 2009-12-09 2011-06-15 Lg伊诺特有限公司 Light emitting device, light emitting device manufacturing method, light emitting package, and lighting system
CN102237464A (en) * 2010-04-26 2011-11-09 亿光电子工业股份有限公司 Light emitting diode structure and making method thereof
CN102255017A (en) * 2010-05-20 2011-11-23 Lg伊诺特有限公司 Light-emitting device
CN102339921A (en) * 2010-07-20 2012-02-01 夏普株式会社 Semiconductor light-emitting device and method of producing the same
CN103165802A (en) * 2011-12-16 2013-06-19 丰田合成株式会社 Group iii nitride semiconductor light-emitting device

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CN104701433A (en) 2015-06-10
CN110071203B (en) 2021-10-26

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