CN110071029A - A kind of sample platform of scanning electronic microscope - Google Patents
A kind of sample platform of scanning electronic microscope Download PDFInfo
- Publication number
- CN110071029A CN110071029A CN201910416926.1A CN201910416926A CN110071029A CN 110071029 A CN110071029 A CN 110071029A CN 201910416926 A CN201910416926 A CN 201910416926A CN 110071029 A CN110071029 A CN 110071029A
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- China
- Prior art keywords
- pedestal
- carrier module
- boss
- scanning electronic
- electronic microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 45
- 238000012360 testing method Methods 0.000 abstract description 14
- 238000013461 design Methods 0.000 abstract description 2
- 238000002474 experimental method Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 abstract description 2
- 238000012545 processing Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000001237 Raman spectrum Methods 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001887 electron backscatter diffraction Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000399 optical microscopy Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000012916 structural analysis Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The invention discloses a kind of sample platform of scanning electronic microscope, and including pedestal and at least one carrier module being detachably connected with pedestal, the carrier module is with the bearing bevel for carrying sample.The pedestal is made of pedestal and the boss being set on pedestal, and the carrier module has the contact surface to match with boss side surfaces shape, and the carrier module is detachably connected with pedestal, and the contact surface of the carrier module is engaged with boss side surfaces.The present invention does not need the more complicated component such as fixture and shaft, it can be realized while loading the purpose of multiple samples while multiangular measurement, have both plane and cross sectional testing function, it can reduce and put the waiting time that vacuum-is varied-vacuumized, improve the testing efficiency in experiment and production testing, present invention design is simple, and easy processing is easy to operate.
Description
Technical field
The invention belongs to scanning electron-microscopy fields, and in particular to a kind of sample platform of scanning electronic microscope.
Background technique
Scanning electron microscope is the specimen surface detected with the electron beam irradiation for focusing very thin, utilizes electron beam and substance phase
Secondary electron or backscattered electron that interaction inspires etc. carry out morphology observation.Scanning electron microscope overcomes optical microscopy amplification
The drawbacks of multiplying power is limited by optical wavelength, with enlargement ratio is high, adjustable extent is wide, sample preparation is simple, the depth of field is big, synthesis point
The advantages that analysis ability is strong is one of the most useful instrument of modern solid material micro-raman spectra and structural analysis, is widely used in teaching
It learns, in scientific research even industrial production.
Scanning electron microscope needs different vacuum degree conditions, the higher awkward silence at a meeting of resolution ratio according to its electron-optical system difference
Emitting scanning electron microscope to require vacuum degree is 10-8Magnitude, thermal field emission scanning electron microscope are about 10-7Magnitude, even if differentiating lower
Tungsten filament scanning electron microscope be also required to 10-3The vacuum degree of magnitude.Therefore, vacuumizing the waiting time is to cause scanning electron microscope detection effect
The low one of the major reasons of rate.Detection for more samples, it is common practice that multiple samples are prepared on a sample stage as far as possible,
Reduce the time that frequent extraction vacuum occupies.But for some samples for needing to convert angular observation, such as photovoltaic device surface
The observation of light trapping structure, porous structure material, material surface micro nanocrystalline etc., efficiency need to be improved.
Also occur in the prior art it is some may be implemented multi-angle scanning Electronic Speculum platforms, but still remain it is many not
Foot, such as the patent document that notification number is CN206460940U disclose a kind of multi-angle sample platform of scanning electronic microscope, can only be into
20 ° of row, 70 ° of EBSD test and common plane pattern test.Notification number is that the patent document of CN206864432U discloses
A kind of Multi-functional scanning electron microscopic sample platform realizes rotation function using shaft and rotor plate, can measure multi-angle, but angle
It needs to put vacuum when variation, the sample of multiple and different angles can not be measured simultaneously.
Summary of the invention
To solve the above-mentioned problems, the present invention provides a kind of sample platform of scanning electronic microscope, do not need fixture or shaft etc. compared with
For complicated component, multiple samples, multi-angle can be met while being loaded on sample stage, for carrying out the multiple of multiple samples
The observation of angle.
The technical solution of the present invention is as follows: a kind of sample platform of scanning electronic microscope, including pedestal and at least one is removable with pedestal
The carrier module of connection is unloaded, the carrier module is with the bearing bevel for carrying sample.
Can there is multiple carrier module in the present invention, the tilt angle of the bearing bevel on each carrier module can not
Together, when in use, it can be needed to select corresponding carrier module according to angle to carry sample, sample is placed on carrier module
When, it can be placed on loading end, such as sample can be pasted in bearing bevel using conducting resinl, be led to using various ways
It crosses and matches sample with the different bearer module with differing tilt angles, can be realized to multiple samples while carrying out multiple
Sem test at any angle saves the vacuum waiting time, improves testing efficiency.
In addition, there are many detachable connection methods in the present invention between carrier module and pedestal, such as can will carry
It is fixed between module bottom surface and pedestal by conducting resinl or screw.
In the present invention there are many structure types of pedestal, preferably, the pedestal is by pedestal and is set on pedestal
Boss composition, the carrier module have the contact surface to match with boss side surfaces shape, and the carrier module and pedestal are removable
Connection is unloaded, and the contact surface of the carrier module is engaged with boss side surfaces.Sample can also be placed in the present invention on boss
Product are tested, and the shape of pedestal can be circle in the present invention, can be open threaded hole on pedestal in the present invention, carried
Offer the corresponding threaded hole in and position identical as screw thread pore size in module, it, can be using countersunk head screw from lower past when connection
On sequentially pass through threaded hole on pedestal and carrier module so that carrier module and pedestal are fixed together, in the present invention
Directly carrier module can also be sticked on the pedestal of pedestal with conducting resinl.After carrier module installation on the base, size is not
Pedestal can be exceeded.
In the present invention there are many structure types of boss, preferably, the side of the boss is made of multiple rectangular surfaces,
The contact surface of the carrier module is identical as rectangular surfaces shape.
Preferably, the cross section of the boss is regular polygon.
In the present invention there are many structure types of carrier module, such as the side of carrier module can be trapezoidal or right angle
Triangle etc., preferably, the bottom surface of the carrier module is α close to the interior angle of the boss, wherein α≤(90+180/n)
Degree, n are the number of edges of the boss.
Preferably, n >=3.
Preferably, the tilt angle of the bearing bevel is 0~90 degree.
Preferably, the bearing bevel is isosceles-trapezium-shaped.
Preferably, the carrier module is multiple.
Preferably, multiple carrier modules along boss circumferentially.
Compared with prior art, the beneficial effects of the present invention are embodied in:
The present invention can need to select corresponding carrier module and base combination according to angle, can be realized same to multiple samples
The multiple sem tests at any angle of Shi Jinhang, angular transformation is difficult, time-consuming when solving scanning electron microscope example test
Problem, the present invention do not need the more complicated component such as fixture and shaft, can be realized while loading multiple samples, simultaneously it is polygonal
The purpose for spending measurement, has both plane and cross sectional testing function, can reduce and put the waiting time that vacuum-is varied-vacuumized, and improves
Testing efficiency in experiment and production testing, present invention design is simple, and easy processing is easy to operate.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is the structural schematic diagram of pedestal in the present invention.
Fig. 3 is the structural schematic diagram of the first embodiment of carrier module in the present invention.
Fig. 4 is the structural schematic diagram of second of embodiment of carrier module in the present invention.
Fig. 5 is the overlook direction structural schematic diagram of carrier module in Fig. 4.
Fig. 6 is overlook direction structural schematic diagram of the invention.
Specific embodiment
As depicted in figs. 1 and 2, the present invention includes pedestal 100 and at least one holds with what pedestal 100 was detachably connected
Module 200 is carried, carrier module 200 is with the bearing bevel 5 for carrying sample.
Can there is multiple carrier module 200 in the present invention, the tilt angle of the bearing bevel 5 on each carrier module 200
Can be different, when in use, it can be needed to select corresponding carrier module 200 according to angle to carry sample, sample, which is placed in, to be held
It when carrying in module 200, can be placed on loading end using various ways, such as sample can be pasted on using conducting resinl and be held
It carries on inclined-plane 5, by matching sample with the different bearer module 200 with differing tilt angles, can be realized to multiple
Sample carries out multiple sem tests at any angle simultaneously, saves the vacuum waiting time, improves testing efficiency.
In addition, there are many detachable connection methods in the present invention between carrier module 200 and pedestal 100, such as can be with
It will be fixed between 200 bottom surface of carrier module and pedestal 100 by conducting resinl or screw.
In the present invention there are many structure types of pedestal 100, such as shown in Fig. 2, pedestal 100 is by pedestal 1 in the present invention
It is formed with the boss 2 being set on pedestal 1, carrier module 200 has the contact surface to match with 2 side view of boss, carrying
Module 200 is detachably connected with pedestal 1, and the contact surface of carrier module 200 is engaged with 2 side of boss.In the present invention
Sample can also be placed on boss 2 to be tested, the shape of pedestal 1 can be circle in the present invention, can be the bottom of in the present invention
Threaded hole 4 is open on seat 1, the corresponding threaded hole 6 in and position identical as 4 size of threaded hole is offered on carrier module 200,
When connection, the threaded hole on pedestal 1 and carrier module 200 can be sequentially passed through using countersunk head screw from the bottom up, so that
Carrier module 200 and pedestal 1 are fixed together, and carrier module 200 directly can also be sticked to pedestal with conducting resinl in the present invention
On 100 pedestal 1.After carrier module 200 is mounted on pedestal 100, size cannot exceed pedestal 100.
As shown in Fig. 2, the side of boss 2 is made of multiple rectangular surfaces 3 in the present invention there are many structure types of boss 2,
The contact surface of carrier module 200 is identical as 3 shape of rectangular surfaces, and the cross section of boss 2 can be regular polygon.
In the present invention there are many structure types of carrier module 200, such as seen in figures 3-5, the side of carrier module can
Think trapezoidal or right angled triangle etc..As shown in fig. 6, the bottom surface of carrier module 200 is close to the interior angle of boss 2 in the present invention
α, wherein α≤(90+180/n) degree, n are the number of edges of boss 2, under normal circumstances, n >=3.The tilt angle of bearing bevel 5 is 0
~90 degree, bearing bevel 5 can be isosceles-trapezium-shaped.Under normal circumstances, carrier module 200 is multiple, multiple carrier modules
200 along boss 2 circumferentially.
Claims (10)
1. a kind of sample platform of scanning electronic microscope, which is characterized in that including pedestal and at least one hold with what pedestal was detachably connected
Module is carried, the carrier module is with the bearing bevel for carrying sample.
2. sample platform of scanning electronic microscope as described in claim 1, which is characterized in that the pedestal is by pedestal and is set on pedestal
Boss composition, the carrier module has the contact surface that matches with boss side surfaces shape, and the carrier module and pedestal can
Dismantling connection, and the contact surface of the carrier module is engaged with boss side surfaces.
3. sample platform of scanning electronic microscope as claimed in claim 2, which is characterized in that the side of the boss is by multiple rectangular surfaces groups
At the contact surface of the carrier module is identical as rectangular surfaces shape.
4. sample platform of scanning electronic microscope as claimed in claim 2 or claim 3, which is characterized in that the cross section of the boss is positive polygon
Shape.
5. sample platform of scanning electronic microscope as claimed in claim 4, which is characterized in that the bottom surface of the carrier module is close to described convex
The interior angle of platform is α, wherein α≤(90+180/n) degree, n are the number of edges of the boss.
6. sample platform of scanning electronic microscope as claimed in claim 5, which is characterized in that n >=3.
7. claims 1 to 3 and 5~6 it is any as described in sample platform of scanning electronic microscope, which is characterized in that the bearing bevel
Tilt angle is 0~90 degree.
8. sample platform of scanning electronic microscope as claimed in claim 7, which is characterized in that the bearing bevel is isosceles-trapezium-shaped.
9. the sample platform of scanning electronic microscope as described in claims 1 to 3,5,6 and 8 are any, which is characterized in that the carrier module is
It is multiple.
10. sample platform of scanning electronic microscope as claimed in claim 9, which is characterized in that multiple carrier modules along boss circumferential direction
Arrangement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910416926.1A CN110071029A (en) | 2019-05-20 | 2019-05-20 | A kind of sample platform of scanning electronic microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910416926.1A CN110071029A (en) | 2019-05-20 | 2019-05-20 | A kind of sample platform of scanning electronic microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110071029A true CN110071029A (en) | 2019-07-30 |
Family
ID=67371033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910416926.1A Pending CN110071029A (en) | 2019-05-20 | 2019-05-20 | A kind of sample platform of scanning electronic microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110071029A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008159294A (en) * | 2006-12-21 | 2008-07-10 | Toppan Printing Co Ltd | Specimen mount for auger spectral analysis |
| CN203312250U (en) * | 2013-06-08 | 2013-11-27 | 郑州大学 | Multi-angle tightening type SEM sample bench |
| CN203414328U (en) * | 2013-07-15 | 2014-01-29 | 江苏省沙钢钢铁研究院有限公司 | Multifunctional pre-inclined sample stage used for preparing sample of focused ion beam |
| CN206460940U (en) * | 2017-01-24 | 2017-09-01 | 福州大学 | A kind of multi-angle sample platform of scanning electronic microscope |
| CN206947293U (en) * | 2017-02-16 | 2018-01-30 | 无锡市产品质量监督检验院 | Pre-tilt angle specimen holder for SEM |
| CN209658130U (en) * | 2019-05-20 | 2019-11-19 | 天合光能股份有限公司 | A kind of sample platform of scanning electronic microscope |
-
2019
- 2019-05-20 CN CN201910416926.1A patent/CN110071029A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008159294A (en) * | 2006-12-21 | 2008-07-10 | Toppan Printing Co Ltd | Specimen mount for auger spectral analysis |
| CN203312250U (en) * | 2013-06-08 | 2013-11-27 | 郑州大学 | Multi-angle tightening type SEM sample bench |
| CN203414328U (en) * | 2013-07-15 | 2014-01-29 | 江苏省沙钢钢铁研究院有限公司 | Multifunctional pre-inclined sample stage used for preparing sample of focused ion beam |
| CN206460940U (en) * | 2017-01-24 | 2017-09-01 | 福州大学 | A kind of multi-angle sample platform of scanning electronic microscope |
| CN206947293U (en) * | 2017-02-16 | 2018-01-30 | 无锡市产品质量监督检验院 | Pre-tilt angle specimen holder for SEM |
| CN209658130U (en) * | 2019-05-20 | 2019-11-19 | 天合光能股份有限公司 | A kind of sample platform of scanning electronic microscope |
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