CN110044929A - A kind of bend glass subsurface defects detection device based on dark-ground illumination - Google Patents
A kind of bend glass subsurface defects detection device based on dark-ground illumination Download PDFInfo
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- CN110044929A CN110044929A CN201910329425.XA CN201910329425A CN110044929A CN 110044929 A CN110044929 A CN 110044929A CN 201910329425 A CN201910329425 A CN 201910329425A CN 110044929 A CN110044929 A CN 110044929A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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Abstract
The bend glass subsurface defects detection device based on dark-ground illumination that the invention discloses a kind of, including lighting module, image capture module and image processing module；Lighting module includes laser light source, polarization spectroscope, the first plane mirror, the first cut off diaphragm, second plane mirror, the second cut off diaphragm, 45 ° of semi-transparent semi-reflecting lens, beam expanding lens and third plane mirror；Image capture module includes microcobjective, condenser lens and the CCD that total primary optical axis is set gradually；Image processing module is connected with image capture module；Laser light incident obtains the orthogonal polarised light P wave in two beam polarization directions and S wave to polarization spectroscope after polarization spectroscope, carries out two-way dark-ground illumination to part to be measured respectively and obtains the scattering light comprising part defect to be measured.The present invention obtains two-way illumination light using polarization spectroscope, and illumination light is used to substantially position defect all the way, and another way illumination light is used to be accurately positioned defect, improves the contrast of detection device, also simplify operation.
Description
Technical field
The invention belongs to technical field of vision detection, more particularly, to a kind of bend glass based on dark-ground illumination
Surface defect detection apparatus.
Background technique
As the popularity of electronic product is higher and higher, people also gradually increase the performance requirement of electronic product.
In recent years, traditional plane screen is no longer satisfied the demand of market development, and bend glass is due to its radian and human retina
It is more bonded, observation experience can be greatly improved, therefore become the hot spot of production and application in recent years.Due to bend glass
Quality is affected for intellectual product, thus for bend glass in process of production caused by various internal flaws inspection
Survey is just particularly important.
For the detection technique of element internal flaw, it is broadly divided into destructive detection and two sides of non-damaged data at present
It needs to destroy element to, destructive detection technique and then observe again, not only damaged element, and can also be according in operating process
Rely the experience in staff.Non-destructive detection technique is since its is untouchable and the rapid hair of computer technology in recent years
Exhibition, can convert defect to image information, and analysis is handled in a computer, therefore has obtained extensive research.
But current Inner Defect Testing technology is mostly used for the defects detection of plane component, for lacking for curved surface elements
Sunken detection is related to less.The experience of the long-term observation and accumulation of observer is depended on for the defects detection of bend glass at present
Carry out artificial detection, low efficiency, subjective impact are more, are not suitable for the demand for development of current intelligent mass production.Due to curved surface glass
The curved edge of glass, requirement when detecting bend glass internal flaw using non-destructive technique for illumination are also higher.Secretly
Field illumination is a kind of lighting method being imaged using Particle Scattering characteristic, and the comparison of bend glass defect image can be improved
Degree.
Summary of the invention
In view of the drawbacks of the prior art, the purpose of the present invention is to provide a kind of bend glass based on dark-ground illumination time tables
Planar defect detection device, it is intended to solve the problems, such as existing detection technique by low efficiency caused by artificial experience subjective observation.
To achieve the above object, the present invention provides a kind of, and the bend glass subsurface defects based on dark-ground illumination detect dress
It sets, including lighting module, image capture module and image processing module；
The lighting module includes the laser light source set gradually along optical path direction, polarization spectroscope, the first plane reflection
Mirror, the first cut off diaphragm, second plane mirror, the second cut off diaphragm, 45 ° of semi-transparent semi-reflecting lens, beam expanding lens and third plane are anti-
Penetrate mirror；
Image capture module includes microcobjective, condenser lens and the CCD that total primary optical axis is set gradually；
Image processing module is connected with image capture module；
The laser that laser light source issues impinges perpendicularly on polarization spectroscope, and polarization direction phase is divided into after polarization spectroscope
The P wave and S wave that mutually vertical, propagation optical path is mutually perpendicular to, propagates to dispersion direction, transmitted light are P wave, and reflected light is S wave, the two
Optical path angle is 90 °, and S wave changes optical path by the first plane mirror and second plane mirror, and P wave is still vertical passes
It broadcasts, the two direction of propagation meets at the same point of 45 ° of semi-transparent semi-reflecting lens, and wherein S wave passes through the reflected light and P of 45 ° of semi-transparent semi-reflecting lens
Wave coincides by the transmission light propagation optical path of 45 ° of semi-transparent semi-reflecting lens, is being entered respectively without the moment with same direction, same position
Be mapped on beam expanding lens, in different moments, the first cut off diaphragm blocks S wave, and the second cut off diaphragm blocks P wave, the P wave that does not block or
Person's S wave is incident on beam expanding lens, by beam expanding lens by beam collimation, is then adjusted the angle by third plane mirror along part to be measured
Side it is incident, form total reflection inside part to be measured, dark-ground illumination formed to part internal flaw to be measured, is obtained comprising part to be measured
The scattering light of defect, microscope receive scattering light, obtain by the photosurface that condenser lens focuses on CCD comprising part defect to be measured
Image, be transmitted to computer and shown and handled.
Preferably, when work, objective table upper surface is plane, and part to be measured is lain in a horizontal plane on objective table, and part to be measured has
Two longitudinally asymmetric faces, and be mutually perpendicular to, it is incident on the parallel rays of part to be measured and one of them longitudinally asymmetric face of part to be measured
In parallel.
Preferably, laser light source is monochromatic source.
Preferably, the laser that laser light source issues, which impinges perpendicularly on after polarization spectroscope, to be divided into polarization direction and mutually hangs down
Directly, P wave and S wave that optical path is mutually perpendicular to, propagates to dispersion direction are propagated.
Preferably, the first plane mirror placement direction with horizontal 135 ° of primary optical axis positive direction angle, second plane
Reflecting mirror placement direction with horizontal 45 ° of primary optical axis positive direction angle.
Preferably, S wave after the first plane mirror and second plane mirror change optical path with P wave direction two-beam
It converges direction to propagate, the two is incident on the same point of 45 ° of semi-transparent semi-reflecting lens.
Preferably, S wave passes through the transmission light propagation of 45 ° of semi-transparent semi-reflecting lens by the reflected light and P wave of 45 ° of semi-transparent semi-reflecting lens
Direction coincides, and is incident on beam expanding lens in different moments with same direction, same position.
Preferably, the first cut off diaphragm is placed between the first plane mirror and second plane mirror, and second blocks light
Diaphragm is placed between the transmission light-emitting face of polarization spectroscope and 45 ° of semi-transparent semi-reflecting lens, and the first cut off diaphragm and second blocks light
Diaphragm selected to block S wave or P wave in different moments respectively.
Preferably, objective table has the central axis of vertical direction, can rotate horizontally around central axis, be rotated by 90 ° every time,
Part to be measured can be rotated as objective table rotates horizontally, and when not changing optical path, light beam can be respectively from four sides of part to be measured
Side is incident, obtains four sub-pictures.
Preferably, the focal plane of condenser lens is overlapped with the photosurface of CCD.
Contemplated above technical scheme through the invention, compared with prior art, can obtain it is following the utility model has the advantages that
1, the bend glass subsurface defects detection device provided by the invention based on dark-ground illumination uses polarization spectroscope
The device generated as polarization is spare to obtain the orthogonal two beams polarised light in polarization direction, recycles plane mirror, 45 °
Semi-transparent semi-reflecting lens and cut off diaphragm are changed and control to optical path, obtain two-way illumination light and carry out in different moments to part to be measured
Dark-ground illumination, illumination light is used to substantially position defect all the way, and another way illumination light is used to be accurately positioned defect, can improve detection dress
The contrast set；
2, the objective table that bend glass subsurface defects detection device provided by the invention is used to place part to be measured can be with four
Fang Xuanzhuan obtains different scattered informations using four different sides as the plane of incidence respectively, to obtain different defect maps
Picture, comprehensive four images can obtain complete defect information；
3, bend glass subsurface defects detection device provided by the invention is used to place the every rotation of objective table of part to be measured
Once, in conjunction with the tetragonal symmetry of bend glass, incident light is constant relative to the incident angle of side, to not have to readjust
Optical path can also form total internal reflection dark-ground illumination, enormously simplify operation.
Detailed description of the invention
Fig. 1 is the structural representation of the bend glass subsurface defects detection device provided by the invention based on dark-ground illumination
Figure；
Fig. 2 is objective table provided by the invention placement position top view opposite with part to be measured；
Appended drawing reference:
1, laser light source, 2, polarization spectroscope, the 3, first plane mirror, the 4, first cut off diaphragm, the 5, second plane are anti-
Penetrate mirror, the 6, second cut off diaphragm, 7,45 ° of semi-transparent semi-reflecting lens, 8, beam expanding lens, 9, third plane mirror, 10, objective table, 11, to
Survey part, 12, microcobjective, 13, condenser lens, 14, CCD, 15, computer.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting conflict each other can be combined with each other.
The bend glass subsurface defects detection device based on dark-ground illumination that the present invention provides a kind of, as shown in Figure 1, packet
Include lighting module, image capture module and image processing module；
The lighting module includes that the laser light source 1, polarization spectroscope 2, the first plane that set gradually along optical path direction are anti-
Penetrate mirror 3, the first cut off diaphragm 4, second plane mirror 5,6,45 ° of semi-transparent semi-reflecting lens 7 of the second cut off diaphragm, beam expanding lens 8 and
Three plane mirrors 9；
Image capture module includes microcobjective 12, condenser lens 13 and the CCD 14 that total primary optical axis is set gradually；
Image processing module is computer 15, is connected with image capture module；
Laser light source 1 issues beam of laser, the preceding light pass surface of polarization spectroscope 2 is impinged perpendicularly on, by polarization spectroscope 2
After be divided into two beam polarization directions be mutually perpendicular to, the orthogonal P wave in the direction of propagation and S wave, polarization spectroscope transmission outlet is P
Wave, direction of vibration are parallel to paper, and polarization spectroscope reflection outlet is S wave, and direction of vibration is perpendicular to paper.Two-beam is from polarization
The direction of propagation is mutually perpendicular to, respectively to the propagation of the dispersion direction of two-beam when spectroscope is emitted, cannot be in different moments with identical
The same point of beam expanding lens is incident in direction, same position, is placed so passing through S wave with horizontal 135 ° of primary optical axis positive direction angle
The first plane mirror 3 and with horizontal 45 ° of primary optical axis positive direction angle place second plane mirror 5 after, optical path direction
It is still vertical with P wave, but propagated to two-beam convergence direction, it is incident on the same point of 45 ° of semi-transparent semi-reflecting lens.S wave passes through 45 ° half
The reflected light of saturating semi-reflective mirror is overlapped with P wave by the transmitted light optical path of 45 ° of semi-transparent semi-reflecting lens.S wave is hidden with the first cut off diaphragm 4
Gear, opens simultaneously the second cut off diaphragm 6, only allows P wave by semi-transparent semi-reflecting lens 7, is again incident on beam expanding lens 8 and is converted into directional light,
Optical path direction is changed by third plane mirror 9 again, the light for being incident on part 11 to be measured is adjusted by third plane mirror 9
Direction guarantees that incident light forms total internal reflection dark-ground illumination on the inside of part 11 to be measured, and P wave is consequently formed and illuminates, in part 11 to be measured
The defect in portion will scatter, and the scattering light with defect information is received by microcobjective 12, focus on by condenser lens 13
The photosurface of CCD 14 obtains the image comprising 11 defect of part to be measured, is transmitted to computer 15 and is shown, is calculated by observation
Machine 15 shows the case where image, is finely adjusted to the angle of third plane mirror 9, obvious visible scarce until finding one
Sunken position, this is fixed.
P wave is blocked with the second cut off diaphragm 6, the first cut off diaphragm 4 is opened simultaneously, S wave is only allowed to pass through semi-transparent semi-reflecting lens
7, it is again incident on beam expanding lens 8 and is converted into directional light, i.e., change the illumination of P wave the illumination of into S wave.Equally, 11 internal flaw of part to be measured will
Scatter incident light, then pass through Computer display and analysis image；
Objective table 10 is successively rotated, so that 4 sides of part 11 to be measured is successively used as the plane of incidence, obtains 4 defect images.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (10)
1. a kind of bend glass subsurface defects detection device based on dark-ground illumination, which is characterized in that including lighting module, figure
As acquisition module and image processing module；
The lighting module includes laser light source (1), polarization spectroscope (2), the first plane mirror (3), the first cut off diaphragm
(4), second plane mirror (5), the second cut off diaphragm (6), 45 ° of semi-transparent semi-reflecting lens (7), beam expanding lens (8) and third plane are anti-
Penetrate mirror (9)；
Described image acquisition module includes microcobjective (12), condenser lens (13), the CCD (14) that total primary optical axis is set gradually；
Described image processing module is connected with described image acquisition module；
The laser light incident that the laser light source (1) issues obtains two beams after polarization spectroscope (2) to polarization spectroscope (2)
The orthogonal polarised light P wave in polarization direction and S wave, the two optical path angle are 90 °, and the S wave passes through the first plane mirror
(3) change optical path and the P wave with second plane mirror (5) and converge to 45 ° of semi-transparent semi-reflecting lens (7), described in the S wave passes through
The reflected light of 45 ° of semi-transparent semi-reflecting lens (7) and the P wave are carved by the transmitted light timesharing of 45 ° of semi-transparent semi-reflecting lens (7) to be mapped to
On beam expanding lens (8)；In different moments, first cut off diaphragm (4) blocks the S wave, and the P wave carries out first time illumination；
Second cut off diaphragm (6) blocks the P wave, and the S wave carries out second and illuminates；The P wave or S wave are incident on beam expanding lens
(8), the light beam after collimation is adjusted the angle incident along the side of part to be measured (11) by third plane mirror (9), in part to be measured
(11) internal to form total reflection, dark-ground illumination is formed to part to be measured (11) internal flaw, is obtained comprising part to be measured (11) defect
Light is scattered, the microscope (12) receives the scattering light, the light of (14) the CCD is focused on by the condenser lens (13)
Quick face obtains the image comprising part (11) defect to be measured, is transmitted to image processing module and is shown and handled.
2. the apparatus according to claim 1, which is characterized in that when work, objective table (10) upper surface is plane, institute
It states part to be measured (11) to lie in a horizontal plane on the objective table (10), part (11) the to be measured tool is there are two longitudinally asymmetric face, and phase
Mutually vertical, one of them longitudinally asymmetric face of the parallel rays and the part (11) to be measured that are incident on the part to be measured (11) is flat
Row.
3. the apparatus according to claim 1, which is characterized in that the laser light source (1) is monochromatic source.
4. the apparatus according to claim 1, which is characterized in that the beam orthogonal that the laser light source (1) issues is incident on
Polarization spectroscope (2) is divided into polarization direction after polarization spectroscope and is mutually perpendicular to, propagates the mutually perpendicular P wave of optical path and S
Wave.
5. the apparatus according to claim 1, which is characterized in that the first plane mirror (3) placement direction and level
135 ° of primary optical axis positive direction angle, second plane mirror (3) placement direction with horizontal 45 ° of primary optical axis positive direction angle,
The direction of the third plane mirror (9) is adjustable.
6. the apparatus according to claim 1, which is characterized in that 45 ° of semi-transparent semi-reflecting lens (7) center is by the
One plane mirror (3) and second plane mirror (5) change the S wave of optical path and the point of intersection of P wave, and described 45 ° semi-transparent semi-reflecting
The placement direction of mirror (7) with horizontal 45 ° of primary optical axis positive direction angle.
7. according to claim 1 with device described in 4, which is characterized in that the S wave is incident on 45 ° semi-transparent half after changing optical path
The position of anti-mirror (7) is identical as the position that the P wave is incident on 45 ° of semi-transparent semi-reflecting lens (7), and the S wave is semi-transparent semi-reflecting by 45 °
The reflected light of mirror (7) coincides with optical path of the P wave after the transmitted light of 45 ° of semi-transparent semi-reflecting lens (7), with same direction,
Same position, different moments are incident on respectively on beam expanding lens (8), coincide by the subsequent optical path of beam expanding lens (8).
8. according to claim 1 with device described in 4, which is characterized in that first cut off diaphragm (4) is placed on described first
Between plane mirror (3) and the second plane mirror (5), second cut off diaphragm (6) is placed on the polarization point
Between the transmission light-emitting face of light microscopic (2) and 45 ° of semi-transparent semi-reflecting lens (7), the first cut off diaphragm (4) and the second cut off diaphragm (6)
It selects to block the S wave or P wave respectively in different moments.
9. the apparatus according to claim 1, which is characterized in that the objective table (10) has the central axis of vertical direction,
The objective table (10) rotates horizontally around central axis, is rotated by 90 ° every time, the part (11) to be measured rotates horizontally with objective table
And it rotates.
10. the apparatus according to claim 1, which is characterized in that the focal plane of the condenser lens (13) and the CCD
(14) photosurface is overlapped.
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| CN201910329425.XA CN110044929B (en) | 2019-04-23 | 2019-04-23 | Curved surface glass subsurface defect detection device based on dark field illumination |
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| CN201910329425.XA CN110044929B (en) | 2019-04-23 | 2019-04-23 | Curved surface glass subsurface defect detection device based on dark field illumination |
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Cited By (4)
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| CN110426397A (en) * | 2019-08-14 | 2019-11-08 | 深圳市麓邦技术有限公司 | Systems for optical inspection, device and method |
| CN112222012A (en) * | 2020-11-03 | 2021-01-15 | 合肥泰禾光电科技股份有限公司 | Detection system and sorter based on time-sharing coaxial illumination imaging |
| CN113640318A (en) * | 2021-10-19 | 2021-11-12 | 四川京龙光电科技有限公司 | Four mirror surface intellectual detection system equipment of monocular |
| CN118225806A (en) * | 2024-05-27 | 2024-06-21 | 苏州未蓝科技有限公司 | Optical workpiece defect detection method and detection device based on image technology |
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| CN110426397A (en) * | 2019-08-14 | 2019-11-08 | 深圳市麓邦技术有限公司 | Systems for optical inspection, device and method |
| CN112222012A (en) * | 2020-11-03 | 2021-01-15 | 合肥泰禾光电科技股份有限公司 | Detection system and sorter based on time-sharing coaxial illumination imaging |
| CN113640318A (en) * | 2021-10-19 | 2021-11-12 | 四川京龙光电科技有限公司 | Four mirror surface intellectual detection system equipment of monocular |
| CN118225806A (en) * | 2024-05-27 | 2024-06-21 | 苏州未蓝科技有限公司 | Optical workpiece defect detection method and detection device based on image technology |
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