CN110044930A - A kind of bend glass subsurface defects detection method based on dark-ground illumination - Google Patents
A kind of bend glass subsurface defects detection method based on dark-ground illumination Download PDFInfo
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- CN110044930A CN110044930A CN201910330755.0A CN201910330755A CN110044930A CN 110044930 A CN110044930 A CN 110044930A CN 201910330755 A CN201910330755 A CN 201910330755A CN 110044930 A CN110044930 A CN 110044930A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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Abstract
The bend glass subsurface defects detection method based on dark-ground illumination that the invention discloses a kind of, comprising: the laser that laser light source generates impinges perpendicularly on devating prism and obtains the orthogonal P wave of exit direction and S wave；S wave is blocked, P wave is incident on bend glass to be measured after expanding, and P the wave light of experiences total internal reflection and P wave in bend glass to be measured form standing wave and carry out first time dark-ground illumination to bend glass to be measured；Bend glass subsurface to be measured under illuminating to first time is focused, according to fixed after defocused Image Adjusting P wave incident direction；P wave is blocked, is overlapped S wave with P glistening light of waves road, bend glass to be measured is incident on after expanding, S the wave light of experiences total internal reflection and S wave in bend glass to be measured form standing wave and carry out second of dark-ground illumination to bend glass to be measured；The lower image comprising bend glass surface defect of second of illumination of acquisition.The present invention is illuminated twice, can be used to carry out non break down test for the defect inside bend glass, be improved detection efficiency and detection contrast.
Description
Technical field
The invention belongs to technical field of vision detection, more particularly, to a kind of bend glass based on dark-ground illumination
Detection method of surface flaw.
Background technique
For glass as a kind of higher nonmetallic materials of smoothness, application field is rather extensive, but is producing and processing
Easily it is caused to damage in the process, not only surface damage, internal injury influences the service life of material also very big.
The detection method of internal injury is generally divided into destructive measurement and non-destroyed measurement, in recent years, due to computer
The fast-developing non-destroyed measurement of technology is since many advantages, such as its is untouchable, non-destructive, repeatability, is by extensive
Using.Current existing non-destroyed measurement technology is mostly used in the Inner Defect Testing for planar object, in curved face object
It is studied in defects detection less.Directly its most of lighting method of the method for borrow planar object defects detection is used in bend glass
On will lead to the imaging of bend glass curved edge and be blocked so as to cause defect invisible, therefore the illumination of bend glass is set
It counts just particularly important.The reflected light of dark-ground illumination incident light not directly enters video camera, is a kind of scattering properties using particle
And the lighting method being imaged, it is possible to reduce the defect of bright field illumination bend glass edge imaging improves pair of defect image
Degree of ratio.
It is not designed than more complete intelligent detecting method temporarily now for the defects detection of bend glass, it is main at present
It is detected by staff's prolonged exercise and observation by human eye, detection efficiency is low, subjective impact is more.
Summary of the invention
In view of the drawbacks of the prior art, the purpose of the present invention is to provide a kind of bend glass based on dark-ground illumination time tables
Planar defect detection method, it is intended to solve the problems, such as existing detection technique by low efficiency caused by artificial experience subjective observation.
To achieve the above object, the present invention provides a kind of bend glass subsurface defects detection side based on dark-ground illumination
Method, comprising:
The laser that laser light source generates impinges perpendicularly on devating prism and obtains the orthogonal P wave of exit direction and S wave, thoroughly
Penetrating light is P wave, and reflected light is S wave, and the direction of vibration of the two is mutually perpendicular to, the direction of propagation is mutually perpendicular to, respectively to two-beam point
It propagates in scattered direction；
S wave is blocked, P wave is incident on bend glass to be measured, P wave experiences total internal reflection in bend glass to be measured after expanding
Light and P wave formed standing wave to bend glass to be measured carry out first time dark-ground illumination；
Bend glass subsurface to be measured under illuminating to first time is focused, and is entered according to defocused Image Adjusting P wave
It is fixed after penetrating direction；
The P wave is blocked, S wave changes optical path by plane mirror and 45 ° of semi-transparent semi-reflecting lens at this time, with P glistening light of waves road weight
It closes, bend glass to be measured is incident on after expanding, S wave light of experiences total internal reflection in bend glass to be measured is stayed with the formation of S wave
Wave carries out second of dark-ground illumination to bend glass to be measured；
It acquires described second and illuminates the lower image comprising bend glass surface defect.
Wherein, for the laser that laser light source issues by polarization spectroscope, transmitted light is P wave, and reflected light is S wave, the two
The direction that direction of vibration is mutually perpendicular to, the direction of propagation is mutually perpendicular to, is dispersed respectively to two-beam is propagated, and S wave passes through two planes
Reflecting mirror changes optical path and propagates with direction of propagation when being emitted from polarization spectroscope on the contrary, converging direction with P wave direction two-beam,
Two-beam convergent point places 45 ° of semi-transparent semi-reflecting lens, and S wave is by the reflected light and P wave of 45 ° of semi-transparent semi-reflecting lens by 45 ° semi-transparent half
The transmission light propagation optical path of anti-mirror coincides, and is incident on beam expanding lens respectively with same direction, same position not having to the moment, and first
Cut off diaphragm and the second cut off diaphragm block S wave perhaps P wave a branch of P wave or S not blocked therein in different moments respectively
Wave is incident on beam expanding lens, by beam expanding lens by beam collimation, is then adjusted the angle by third plane mirror along part to be measured
Side is incident, and adjustment incident angle makes incident light meet total reflection condition, incident polarized light in bend glass internal reflected light
With polarization by reflection light bend glass depth direction formed standing wave illumination, using this standing wave for bend glass subsurface defects into
Row dark-ground illumination, the defect inside bend glass, which illuminates this, forms scattering, scattering envelope containing the damage information inside part to be measured,
Scattered light image is received using the microscopical depth of field, is obtained by the photosurface that condenser lens focuses on CCD comprising curved surface to be measured
The image of glass subsurface defects is transmitted to computer and is shown and handled.
When incident light is S wave, direction of vibration is also perpendicularly to incidence perpendicular to the plane of incidence, the direction of vibration of reflected light
Face, therefore meet the condition that standing wave is superimposed with reflected light in sample to be tested depth direction incident light, it can indicate are as follows:
ES=a cos (kz cos θ+wt)
E′S=a ' cos (kz cos θ-wt+ δS)
It is at this time total internal reflection, therefore a '=a, δSPhase jump when for S wave reflection.Superimposed stationary field are as follows:Largest light intensity relative to incident light wave are as follows:When S wave illuminates as a result, close
Maximum intensity at standing wave is 4 times of incident light.
When incidence wave is P wave, polarization direction is parallel to the plane of incidence, the vibration of reflected light reversely with incident light vibration side
To no longer identical, it is therefore desirable to be decomposed along interface is parallel to perpendicular to interface both direction:
EP||=a cos θ cos (kz cos θ+wt)
EP⊥=a sin θ cos (kz cos θ+wt)
After reflection are as follows:
E′P||=-a cos θ cos (kz cos θ-wt+ δP)
E′P⊥=a sin θ cos (kz cos θ-wt+ δP)
Superimposed stationary field are as follows:
Maximum intensity relative to incident light wave are as follows:
It can be seen that the opposite illumination intensity that two components of P wave are formed has the phase difference of π, so in depth direction
Relatively uniform standing wave illumination can be formed.But its maximum intensity is weak compared with the maximum intensity of S wave, so the defect image formed
Contrast is lower, the position suitable for observation defect.
Preferably, the laser that laser light source generates is one-wavelength laser.
Preferably, the laser that laser light source issues, which impinges perpendicularly on after polarization spectroscope, to be divided into polarization direction and mutually hangs down
Directly, the two beam polarised lights that optical path is mutually perpendicular to, propagates to dispersion direction, i.e. P wave and S wave are propagated.
Preferably, setting is placed with 135 ° of horizontal primary optical axis positive direction angle and with horizontal 45 ° of primary optical axis positive direction angle
Two plane mirrors change the direction of propagation of the S wave direction converged with the P wave towards the two propagated, then pass through
45 ° of semi-transparent semi-reflecting lens for being placed on two-beam convergent point are overlapped the reflected light of the S wave and the transmitted light optical path of the P wave.
Preferably, it blocks S wave or blocks P wave by two cut off diaphragm to realize.
Preferably, first time illumination is carried out using P wave, S wave carries out second and illuminates.
Preferably, be incident on bend glass to be measured P wave or S wave in bend glass through superrefraction or reflection, from glass
The incidence angle that glass is incident on air meets:
sinθ≥n2/n1
Wherein, θ is incidence angle when being incident on Air Interface from glass, n2For the refractive index of air, n1For bend glass
Refractive index.
Preferably, when the image comprising bend glass subsurface defects is dark background, subsurface is free of defect；Include curved surface
Subsurface contains defect when the image of glass subsurface defects is bright defect.
Contemplated above technical scheme through the invention, compared with prior art, can obtain it is following the utility model has the advantages that
1, bend glass subsurface defects detection method provided by the invention carries out dark field photograph using the principle of total internal reflection
Bright design avoids exterior lighting mean camber glass curved edges edge imaging and blocks defect formation to sightless problem, can
To be used to carry out non break down test for the defect inside bend glass, detection efficiency is improved；
2, bend glass subsurface defects detection method provided by the invention is generated using polarization spectroscope as polarization
Device is spare to obtain the orthogonal two beams polarised light in polarization direction, recycles plane mirror, cut off diaphragm and semi-transparent half
Anti- mirror is changed and controls to optical path, obtain two-way optical path coincidence illumination light to part to be measured carry out dark-ground illumination, all the way according to
Mingguang City is used to substantially position defect, and another way illumination light is used to be accurately positioned defect, can improve the contrast of detection device；
3, the part to be measured of bend glass subsurface defects detection method provided by the invention can be revolved with objective table four directions
Turn, obtains different scattered informations using four different sides as the plane of incidence respectively, so that different defect images is obtained, it is comprehensive
Complete defect information can be obtained by closing four images, and in combination with the tetragonal symmetry of bend glass, incident light is relative to side
Incident angle it is constant, thus do not have to readjust optical path can also form total internal reflection dark-ground illumination, enormously simplify operation.
Detailed description of the invention
Fig. 1 is the device signal of the bend glass subsurface defects detection method provided by the invention based on dark-ground illumination
Figure；
Fig. 2 is sample to be tested total internal reflection illumination schematic diagram provided by the invention；
Appended drawing reference:
1, laser light source, 2, polarization spectroscope, the 3, first plane mirror, the 4, first cut off diaphragm, the 5, second plane are anti-
Penetrate mirror, the 6, second cut off diaphragm, 7,45 ° of semi-transparent semi-reflecting lens, 8, beam expanding lens, 9, third plane mirror, 10, objective table, 11, to
Survey part, 12, microcobjective, 13, condenser lens, 14, CCD, 15, computer, 111, defect, 112, standing wave layer depth.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting conflict each other can be combined with each other.
The bend glass subsurface defects detection method based on dark-ground illumination that the present invention provides a kind of, as shown in Figure 1, swashing
Radiant 1 issues beam of laser, impinges perpendicularly on the preceding light pass surface of polarization spectroscope 2, two beams are divided into after polarization spectroscope 2
Polarization direction is mutually perpendicular to, the orthogonal P wave in the direction of propagation and S wave, polarization spectroscope transmission export as P wave, direction of vibration
It is parallel to paper, polarization spectroscope reflection outlet is S wave, and direction of vibration is perpendicular to paper.Two-beam is emitted from polarization spectroscope
When the direction of propagation be mutually perpendicular to, respectively to the dispersion direction of two-beam propagate, cannot be in different moments with the same direction, identical bits
Merging is mapped to the same point of beam expanding lens, so S wave to be passed through to the first plane placed with horizontal 135 ° of primary optical axis positive direction angle
After reflecting mirror 3 and the second plane mirror 5 placed with horizontal 45 ° of primary optical axis positive direction angle, optical path direction still hangs down with P wave
Directly, it but is propagated to two-beam convergence direction, is incident on the same point of 45 ° of semi-transparent semi-reflecting lens.S wave passes through 45 ° of semi-transparent semi-reflecting lens
Reflected light and P wave be overlapped by the transmitted light optical path of 45 ° of semi-transparent semi-reflecting lens.S wave is blocked with the first cut off diaphragm 4, simultaneously
The second cut off diaphragm 6 is opened, only allows P wave by semi-transparent semi-reflecting lens 7, beam expanding lens 8 is again incident on and is converted into directional light, then passes through the
Three plane mirrors 9 change optical path direction, and the radiation direction for being incident on part 11 to be measured is adjusted by third plane mirror 9, protect
Card incident light forms total internal reflection dark-ground illumination on the inside of part 11 to be measured, and the illumination of P wave, the defect inside part 11 to be measured is consequently formed
It will scatter, the scattering light with defect information is received by microcobjective 12, focuses on CCD's 14 by condenser lens 13
Photosurface obtains the image comprising the defects of part 11 to be measured information, is transmitted to computer 15 and is shown, is calculated by observation
Machine 15 shows the case where image, is finely adjusted to the angle of third plane mirror 9, obvious visible scarce until finding one
Sunken position, this is fixed.
P wave is blocked with the second cut off diaphragm 6, the first cut off diaphragm 4 is opened simultaneously, S wave is only allowed to pass through semi-transparent semi-reflecting lens
7, it is again incident on beam expanding lens 8 and is converted into directional light, i.e., change the illumination of P wave the illumination of into S wave.Equally, 11 internal flaw of part to be measured will
Scatter incident light, then pass through Computer display and analysis image；
Objective table 10 is successively rotated, so that 4 sides of part 11 to be measured is successively used as the plane of incidence, obtains 4 damage acquisition figures
Picture, comprehensive 4 damage images obtain complete defect information.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (7)
1. a kind of bend glass subsurface defects detection method based on dark-ground illumination, which comprises the following steps:
The laser that laser light source generates impinges perpendicularly on polarization spectroscope and obtains the orthogonal P wave of exit direction and S wave；
The S wave is blocked, the P wave is incident on bend glass to be measured after expanding, and the P wave is in the bend glass to be measured
The light of experiences total internal reflection and the P wave form standing wave and carry out first time dark-ground illumination to the bend glass to be measured；
Bend glass subsurface to be measured under illuminating to first time is focused, according to defocused Image Adjusting P wave incidence side
It fixes backward；
The P wave is blocked, is overlapped the S wave with P glistening light of waves road, bend glass to be measured, the S wave are incident on after expanding
The light of experiences total internal reflection and the S wave form standing wave and carry out the to the bend glass to be measured in the bend glass to be measured
Secondary dark-ground illumination；
It acquires described second and illuminates the lower image comprising bend glass surface defect.
2. the method according to claim 1, wherein the laser that the laser light source generates is one-wavelength laser.
3. the method according to claim 1, wherein the polarization spectroscope is by one piece of block prism diagonally face
It cuts, then alternately plates high low-index film on section, then compose one piece of block prism, incident light vertical incidence
To first piece of prism, film layer interface is incident on 45° angle, it is 90 ° with incident ray angle that reflected light, which is S wave, transmitted light
For P wave, exit direction is parallel with incident ray direction, and polarization direction is vertical when two beam polarised lights are emitted, the direction of propagation is vertical, point
It is not propagated towards the direction that the two is dispersed, Refractive Index of Material meets:
Wherein, n3It is the refractive index of block prism glass medium, n2、n1It is the refractive index of high low-index film respectively.
4. the method according to claim 1, wherein described be overlapped the S wave and P glistening light of waves road including setting
It sets and changes with 135 ° of horizontal primary optical axis positive direction angle and two plane mirrors placed with horizontal 45 ° of primary optical axis positive direction angle
The direction of propagation for becoming the S wave to propagate with the P wave towards the direction that the two converges, then by being placed on two-beam convergent point
45 ° of semi-transparent semi-reflecting lens are overlapped the reflected light of the S wave and the transmitted light optical path of the P wave.
5. blocking the S wave or described to block the P wave logical the method according to claim 1, wherein described
Two cut off diaphragm of setting are crossed to realize.
6. the method according to claim 1, wherein the P wave or S wave for being incident on bend glass to be measured,
The incidence angle θ for being incident on air from glass meets:
sinθ≥n2/n1
Wherein, θ is incidence angle when being incident on Air Interface from glass, n2For the refractive index of air, n1For the refraction of bend glass
Rate.
7. the method according to claim 1, wherein the image packet comprising bend glass subsurface defects
It includes:
When image is dark background, subsurface is free of defect；
When image is bright defect, subsurface contains defect.
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Cited By (5)
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| CN110404816A (en) * | 2019-07-29 | 2019-11-05 | 海南梯易易智能科技有限公司 | A kind of 3D bend glass defect detecting device and method based on mechanical arm |
| CN111739021A (en) * | 2020-08-05 | 2020-10-02 | 武汉精立电子技术有限公司 | Method and device for detecting foreign matters inside and outside display panel glass |
| CN112964726A (en) * | 2021-02-05 | 2021-06-15 | 上海御微半导体技术有限公司 | Defect detection device and method |
| CN113008796A (en) * | 2021-03-03 | 2021-06-22 | 赤壁精迈光电科技有限公司 | Detection device for subsurface defects |
| CN113030124A (en) * | 2021-03-03 | 2021-06-25 | 赤壁精迈光电科技有限公司 | Imaging device for subsurface |
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| CN110404816A (en) * | 2019-07-29 | 2019-11-05 | 海南梯易易智能科技有限公司 | A kind of 3D bend glass defect detecting device and method based on mechanical arm |
| CN110404816B (en) * | 2019-07-29 | 2021-05-04 | 海南梯易易智能科技有限公司 | 3D curved surface glass defect detection device and method based on mechanical arm |
| CN111739021A (en) * | 2020-08-05 | 2020-10-02 | 武汉精立电子技术有限公司 | Method and device for detecting foreign matters inside and outside display panel glass |
| CN111739021B (en) * | 2020-08-05 | 2020-12-08 | 武汉精立电子技术有限公司 | Method and device for detecting foreign matters inside and outside display panel glass |
| CN112964726A (en) * | 2021-02-05 | 2021-06-15 | 上海御微半导体技术有限公司 | Defect detection device and method |
| CN113008796A (en) * | 2021-03-03 | 2021-06-22 | 赤壁精迈光电科技有限公司 | Detection device for subsurface defects |
| CN113030124A (en) * | 2021-03-03 | 2021-06-25 | 赤壁精迈光电科技有限公司 | Imaging device for subsurface |
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Application publication date: 20190723 |