CN109974591A - The method that particle micro-displacement measurement device and measurement fine particle generate displacement - Google Patents
The method that particle micro-displacement measurement device and measurement fine particle generate displacement Download PDFInfo
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- CN109974591A CN109974591A CN201910221558.5A CN201910221558A CN109974591A CN 109974591 A CN109974591 A CN 109974591A CN 201910221558 A CN201910221558 A CN 201910221558A CN 109974591 A CN109974591 A CN 109974591A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
The present invention provides a kind of methods that particle micro-displacement measurement device and measurement fine particle generate displacement, the laser that laser is launched passes through intermediate foraminate first reflecting mirror, it is focused on particulate matter through skewed slot surface again, after the scattering light incident beamsplitter that the sample particle irradiated by laser beam generates, it is divided into two and generates two beam laser, light beam is incident on top the second reflecting mirror back reflection after being reflected by optical beam-splitter returns beam splitter, is received later transmitted through beam splitter by lens focus by CCD camera；Another beam light transmission crosses after beam splitter the third reflecting mirror for being incident on right side, is reflected again after reflected back into beam splitter later, by lens focus to CCD camera.The laser specklegram that CCD camera is generated by image card record, and be transmitted to computer and carry out correlation values calculation processing.The present invention solves the problems, such as that original measuring device and method are unable to measure particle displacement；It can measure the displacement that fine particle movement of the diameter between 1mm-1.5mm generates.
Description
Technical field
The present invention relates to the measurement of measurement particle micro-displacement more particularly to a kind of particle micro-displacement measurement device and surveys
Measure the method that fine particle generates displacement.
Background technique
The main method of current measurement particle displacement and velocity field has: spatial filtering method is based on the relevant particle figure of image
As tachometric survey (PIV), the Particle tracking tachometric survey (PTV) based on fluid motion displacement.Wherein, spatial filtering method measurement is single
The speed of a particle may be comparatively laborious, and when granule density is smaller, PIV technology is unable to the biggish particle of measuring speed gradient
Stream, and the PTV method for being suitable for low concentration needs to be tracked particle, increases workload.Laser speckle technique is to utilize
Coherent light is radiated at coarse body surface, is formed by speckle in space, realizes body surface displacement and deformation detection.It has
The features such as having can be with measurement of full field, and optical path is simple, easy to adjust, low to environmental requirement, can overcome in existing measurement method
It is insufficient.
Pass between the principle and displacement derivatives and striped of the laser speckle art that current discussion is based primarily upon Mechelson, A. A.
System.Accuracy and validity of the laser speckle technique in the detection of object acoplanarity displacement are able to demonstrate that by related experiment.But
Due to the limitation of design principle, current laser speckle photography method is not used to the micro-displacement of measurement particle.
Summary of the invention
The technical problems to be solved by the present invention are: providing a kind of particle micro-displacement measurement device, it can measure diameter and exist
The displacement that the particle movement of millimeter magnitude generates.
A kind of particle micro-displacement measurement device, comprising:
Laser；
First reflecting mirror has hole among the first reflecting mirror；
Skewed slot is equipped with sample particle, and the laser that laser is launched is by intermediate porose first reflecting mirror, then penetrates oblique
Rooved face focuses on sample particle substance；
Beam splitter, after the scattering light incident beamsplitter of the sample particle generation of laser beam irradiation, be divided into two generation two
Shu Jiguang；
Second reflecting mirror and third reflecting mirror, the second reflecting mirror and third reflecting mirror are respectively used to return two beam laser reflections
Beam splitter；
Lens and CCD camera, first optical path being reflected back through the second reflecting mirror is through beam splitter through lens focus by CCD
Camera receives, and the Article 2 optical path laser being reflected back through third reflecting mirror is after beam splitter again secondary reflection by lens focus quilt
CCD camera receives；
Wherein, by having angle between two optical paths of lens.
It further, further include image card, image card is connected with CCD camera and computer, and CCD camera is remembered by image card
The laser specklegram generated is recorded, and is transmitted to computer and carries out correlation values calculation processing.
Further, the inclined-plane of skewed slot is provided with several observation points；
Skewed slot is configured with powder collection notch and particles filled mouth.
Further, the aperture among the first reflecting mirror is adjustable.
Position is generated using above-mentioned particle micro-displacement measurement device measurement fine particle the present invention also provides a kind of simultaneously
The method of shifting, includes the following steps:
It uses laser to emit laser beam as light source, smooth stable scattering is reflected by intermediate porose reflecting mirror
Light focuses on particulate matter by skewed slot surface；
After the scattering light incident beamsplitter that the particulate matter irradiated by laser beam generates, it is divided into two and generates two beam laser；
In two beam laser,
First optical path is reflected back first optical path original road by beam splitter reflection to the second reflecting mirror, the second reflecting mirror
And received through lens focus by CCD camera after penetrating beam splitter,
Article 2 optical path is transmitted through beam splitter and by third reflecting mirror reflected back into beam splitter, after beam splitter again secondary reflection
It is received by lens focus by CCD camera；
The laser specklegram that CCD camera is generated by image card record, and be transmitted to computer and carry out correlation values calculating
Processing.
Further, steps are as follows for computer progress correlation values calculation processing:
S1, when tested particle remains static, CCD camera because reference light wave with object plane speckle field interference record
Intensity distribution is expressed as
In formula (1), a indicates the amplitude of reflecting light,Indicate that the phase of light wave between two shearing points is poor；
S2, when particle stream start generate small movements when, the intensity distribution that CCD camera records at any time is expressed as
In formula (2), TfIndicate the period of CCD camera acquisition image, δ is expressed as being contacted with each other by movement between particle caused
Particle object light wave t moment phase change, when using coherent light vertical irradiation measured point and in the x-direction (direction of displacement)
When shearing, phase changing capacity δ is expressed as
In formula (3), λ indicates coherent light waves wavelength, AopFor the average displacement of observation scope endoparticle,It is expressed as along x
The displacement derivatives in direction, Δ x are the shearing displacement on the direction x, are measured by equation, and what ω was indicated is within the unit exposure time
The population frequency of grain making contact；
S3, formula (3) are substituted into formula (2), while the collected first width speckle pattern of when static using particle institute subtracts vibration
The speckle pattern acquired afterwards finally obtains particle Motion laser speckle pattern light distribution:
?Bright fringes will be formed by taking at maximum, i.e. n-th of maximum point corresponds to n-th layer
Bright fringes (n=1,2,3 ...)；?Dark fringe, i.e. n-th of minimum are formed at minimalization
Point is corresponding n-th layer dark fringe (n=1,2,3 ...), extrapolates the displacement of particle in x in conjunction with the series of extreme point and light and shade striped
The partial derivative in direction
S4, according to displacement partial derivativeIt obtains, obtains in adjacent double exposure time interval, the displacement that particle generates:
In formula (5), t1、t2Indicate time interval it is initial with ending, β be it is parameter-embedded, after the system of having built,
Know displacement, displacement partial derivative, time interval experiment condition under, it is counter to extrapolate β.
In conclusion fine particle micro-displacement measurement device proposed by the present invention and measurement method, solve original survey
The problem of amount device and method are unable to measure particle displacement；It can measure fine particle of the diameter between 1mm-1.5mm and move production
Raw displacement.
Detailed description of the invention
It to describe the technical solutions in the embodiments of the present invention more clearly, below will be to embodiment or description of the prior art
Needed in attached drawing be briefly described, it should be apparent that, the accompanying drawings in the following description is only of the invention some
Embodiment for those of ordinary skill in the art without any creative labor, can also be according to these
Attached drawing obtains other attached drawings.
Fig. 1 is particle micro-displacement measurement functional block diagram；
Fig. 2 is particle specimens and measurement point schematic diagram；
Fig. 3 is that the speckle interference diagram for utilizing " size reduction mode " to generate in the present invention is intended to.
Specific embodiment
In the following description, a large amount of concrete details are given so as to provide a more thorough understanding of the present invention.So
And it is obvious to the skilled person that the present invention may not need one or more of these details and be able to
Implement.In other examples, in order to avoid confusion with the present invention, for some technical characteristics well known in the art not into
Row description.
In order to thoroughly understand the present invention, detailed step and detailed structure will be proposed in following description, so as to
Illustrate technical solution of the present invention.Presently preferred embodiments of the present invention is described in detail as follows, however other than these detailed descriptions, this
Invention can also have other embodiments.
Referring to Fig. 1, Fig. 1 be particle micro-displacement measurement functional block diagram, particle micro-displacement measurement device of the invention,
Including laser 1, intermediate foraminate first reflecting mirror 2, the skewed slot 3 equipped with particulate matter, beam splitter 4, the second reflecting mirror 5,
Third reflecting mirror 6 that angle is slightly tilted, lens 7, CCD camera 8, image card 9, computer.
Fig. 2 is particle specimens and measurement point schematic diagram, and 22 one end of skewed slot of packed particle is configured with powder collection notch 21,
The other end is configured with particles filled mouth 23, several observation points A, B, C, D are provided on the inclined-plane of skewed slot 22.
The laser that laser 1 is launched is focused on by intermediate foraminate first reflecting mirror 2, then through 3 surface of skewed slot
On particulate matter, after the scattering light incident beamsplitter 4 that the sample particle irradiated by laser beam generates, being divided into two, it is sharp to generate two beams
Light, light beam is incident on top 5 back reflection of the second reflecting mirror (plane mirror) after being reflected by optical beam-splitter 4 return beam splitter, it
It is focused transmitted through beam splitter by lens 7 and is received by CCD camera afterwards；Another beam light transmission crosses after beam splitter the third for being incident on right side
Reflecting mirror (plane mirror) 6 is reflected again after reflected back into beam splitter 4 later, is focused in CCD camera 8 by lens 7.CCD phase
The laser specklegram that machine 8 is generated by the record of image card 9, and be transmitted to computer and carry out correlation values calculation processing.The present invention
Specific measuring process are as follows:
1) laser 1 is used to focus on particulate matter by 3 surface of skewed slot by intermediate foraminate reflecting mirror 2 as light source
Matter；
2) after the scattering light incident beamsplitter 4 that the sample particle irradiated by laser beam generates, being divided into two, it is sharp to generate two beams
Light；
3) in two beam laser, first optical path does not penetrate light beam device, but reflexes to second reflecting mirror 5 and quilt on top
The half of secondary reflection again, current reflected light passes downwardly through beam splitter, reaches CCD camera 8 by imaging len 7；
4) Article 2 optical path is to travel on one piece of inclined third reflecting mirror 6 across the transmitted light of beam splitter the first round,
And deviation is reflected back at an angle, reaches CCD camera 8 by imaging len 7；
5) laser specklegram that CCD camera (8) is generated by image card (9) record, and be transmitted to computer and carry out correlation
Numerical value calculation processing.
Specific processing is as follows:
S1, when tested particle remains static, CCD camera 8 because reference light wave with object plane speckle field interference record
Intensity distribution be represented by
In formula, a indicates the amplitude of reflecting light, it is assumed that the light intensity of two adjacent shearing points is equal,Indicate two shearings
Phase of light wave between point is poor, is a random quantity.
S2, when particle stream start generate small movements when, the intensity distribution that CCD camera 8 records at any time can indicate
For
In formula, TfIndicate the period of CCD acquisition image, δ is expressed as by moving the caused particle that contacts with each other between particle
Phase change of the object light wave in t moment.When using coherent light vertical irradiation measured point and (direction of displacement) shearing in the x-direction
When, phase changing capacity δ can be expressed as
In formula, λ indicates coherent light waves wavelength, AopFor the average displacement of observation scope endoparticle,It is expressed as along the side x
To displacement derivatives, Δ x be the direction x on shearing displacement, can be measured by equation, ω indicate be within the unit exposure time,
The population frequency of particles collision contact.
S3, (3) formula is substituted into (2) formula, while uses " size reduction mode ", i.e., collected first width of institute dissipates when static with particle
Spot figure subtracts the speckle pattern acquired after vibration, finally obtains particle Motion laser speckle pattern light distribution are as follows:
Obviously, existBright fringes will be formed by taking at maximum, i.e., n-th of maximum point is corresponding
N-th layer bright fringes (n=1,2,3 ...)；?Dark fringe, i.e. n-th of pole are formed at minimalization
The corresponding n-th layer dark fringe of small value point (n=1,2,3 ...).The position of particle is extrapolated in combination with the series of extreme point and light and shade striped
Move the partial derivative in the direction x
S4, according to displacement partial derivativeIt obtains, obtains in adjacent double exposure time interval, the displacement that particle generates is
In formula, t1、t2Then indicate the initial of time interval and ending, β be it is parameter-embedded, can be after the system of having built,
Know displacement, displacement partial derivative, time interval experiment condition under, counter push away can calculate β.
An embodiment is set forth below to be illustrated: test uses wavelength for λ0=532nm, the green light that power is 300mW swash
Light device is as light source, and when candidate particles partial size is the particle of diameter 1mm, the hole diameter of adjustment aperture diaphragm first is obtained
Smooth stable scattering light；Secondly, CCD is because reference light wave is the same as the interference of object plane speckle field when tested particle remains static
The intensity distribution of record is represented byWhen tested particle setting in motion generates displacement, CCD exists
Any time intensity distribution of record is represented byWherein With particle when static collected first width speckle pattern subtract the speckle pattern that acquires after vibration, most
Particle Motion laser speckle pattern light distribution is obtained eventually are as follows: In combination with light and shade striped series withPole
Value point extrapolates partial derivative of the displacement in the direction x of particleUtilize formula Obtain adjacent two
Secondary exposure time interval (t1~t2) in, the displacement of fine particle generation.
In conclusion fine particle micro-displacement measurement device proposed by the present invention and measurement method, solve original survey
The problem of amount device and method are unable to measure particle displacement；It can measure fine particle of the diameter between 1mm-1.5mm and move production
Raw displacement.
Presently preferred embodiments of the present invention is described above.It is to be appreciated that the invention is not limited to above-mentioned
Particular implementation, devices and structures not described in detail herein should be understood as gives reality with the common mode in this field
It applies；Anyone skilled in the art, without departing from the scope of the technical proposal of the invention, all using the disclosure above
Methods and technical content many possible changes and modifications are made to technical solution of the present invention, or be revised as equivalent variations etc.
Embodiment is imitated, this is not affected the essence of the present invention.Therefore, anything that does not depart from the technical scheme of the invention, foundation
Technical spirit of the invention any simple modifications, equivalents, and modifications made to the above embodiment, still fall within the present invention
In the range of technical solution protection.
Claims (6)
1. a kind of particle micro-displacement measurement device characterized by comprising
Laser (1)；
First reflecting mirror (2), the first reflecting mirror (2) is intermediate hole；
Skewed slot (3) is equipped with sample particle, and the laser that laser (1) is launched passes through intermediate porose first reflecting mirror (2), then
It is focused on sample particle substance through skewed slot (3) surface；
Beam splitter (4), after the scattering light incident beamsplitter (4) of the sample particle generation of laser beam irradiation, be divided into two generation
Two beam laser；
Second reflecting mirror (5) and third reflecting mirror (6), the second reflecting mirror (5) and third reflecting mirror (6) are respectively used to swash two beams
Light reflected back into beam splitter (4)；
Lens (7) and CCD camera (8), first optical path being reflected back through the second reflecting mirror (5) is through beam splitter (4) through lens
(7) it focuses and is received by CCD camera (8), the Article 2 optical path laser being reflected back through third reflecting mirror (6) passes through beam splitter (4) again
It is focused after secondary reflection by lens (7) and (8) is received by CCD camera；
Wherein, by having angle between two optical paths of lens (7).
2. particle micro-displacement measurement device as described in claim 1, which is characterized in that further include image card (9), image card
(9) it is connected with CCD camera (8) and computer, the laser specklegram that CCD camera (8) is generated by image card (9) record, and pass
It is sent to computer and carries out numerical value calculation processing.
3. particle micro-displacement measurement device as described in claim 1, which is characterized in that skewed slot (3) if inclined-plane be provided with
Dry observation point；
Skewed slot (3) is configured with powder collection notch (21) and particles filled mouth (23).
4. particle micro-displacement measurement device as described in claim 1, which is characterized in that the intermediate hole of the first reflecting mirror (2)
Diameter is adjustable.
5. a kind of generate displacement using the particle micro-displacement measurement device measurement fine particle as described in claim 1-4 is any one
Method, which comprises the steps of:
It uses laser (1) to emit laser beam as light source, smooth stable scattering is reflected by intermediate porose reflecting mirror (2)
Light focuses on particulate matter by skewed slot (3) surface；
After the scattering light incident beamsplitter (4) that the particulate matter irradiated by laser beam generates, it is divided into two and generates two beam laser；
In two beam laser,
First optical path is reflexed to the second reflecting mirror (5) by beam splitter (4), and the second reflecting mirror (5) is anti-by first optical path original road
It is emitted back towards and penetrates beam splitter (4) and focus by lens (7) by CCD camera (8) reception,
Article 2 optical path is transmitted through beam splitter (4) and by third reflecting mirror (6) reflected back into beam splitter (4), again by beam splitter (4)
It is focused after secondary reflection by lens (7) and (8) is received by CCD camera；
The laser specklegram that CCD camera (8) is generated by image card (9) record, and be transmitted to computer and carry out at numerical value calculating
Reason.
6. the method that measurement fine particle generates displacement as claimed in claim 5, which is characterized in that computer carries out correlation values
Steps are as follows for calculation processing:
S1, when tested particle remains static, CCD camera (8) because reference light wave with object plane speckle field interference record
Intensity distribution is expressed as
In formula (1), a indicates the amplitude of reflecting light,Indicate that the phase of light wave between two shearing points is poor；
S2, when particle stream start generate small movements when, the intensity distribution that CCD camera (8) records at any time is expressed as
In formula (2), TfIndicate the period of CCD camera (8) acquisition image, δ be expressed as by moved between particle contact with each other it is caused
Particle object light wave is in the phase change of t moment, and when use coherent light vertical irradiation measured point and (direction of displacement) is cut in the x-direction
When cutting, phase changing capacity δ is expressed as
In formula (3), λ indicates coherent light waves wavelength, AopFor the average displacement of observation scope endoparticle,It is expressed as in the x-direction
Displacement derivatives, Δ x be the direction x on shearing displacement, measured by equation, ω indicate be to be touched in unit exposure time endoparticle
Hit the population frequency of contact；
S3, the collected first width speckle pattern of institute is adopted after subtracting vibration when formula (3) being substituted into formula (2), while using particle static
The speckle pattern of collection finally obtains particle Motion laser speckle pattern light distribution:
?Bright fringes will be formed by taking at maximum, i.e. n-th of maximum point corresponds to n-th layer bright wisp
Line (n=1,2,3 ...)；?Dark fringe, i.e. n-th of minimum point pair are formed at minimalization
N-th layer dark fringe (n=1,2,3 ...) is answered, extrapolates the displacement of particle in the direction x in conjunction with the series of extreme point and light and shade striped
Partial derivative
S4, according to displacement partial derivativeIt obtains, obtains in adjacent double exposure time interval, the displacement that particle generates:
In formula (5), t1、t2Indicate time interval it is initial with ending, β be it is parameter-embedded, after the system of having built, in known bits
It moves, under the experiment condition of displacement partial derivative, time interval, it is counter to extrapolate β.
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Cited By (1)
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| CN115877032A (en) * | 2022-12-08 | 2023-03-31 | 青岛众瑞智能仪器股份有限公司 | Method for detecting flue gas flow velocity by light interference scintillation method and novel flue gas flow velocity measuring instrument |
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