CN109951940A - The replacement period determination method of x-ray analysis equipment and X-ray detector - Google Patents
The replacement period determination method of x-ray analysis equipment and X-ray detector Download PDFInfo
- Publication number
- CN109951940A CN109951940A CN201811238688.1A CN201811238688A CN109951940A CN 109951940 A CN109951940 A CN 109951940A CN 201811238688 A CN201811238688 A CN 201811238688A CN 109951940 A CN109951940 A CN 109951940A
- Authority
- CN
- China
- Prior art keywords
- ray
- detector
- replacement period
- data
- ray detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Measurement Of Radiation (AREA)
Abstract
The present invention provides a kind of replacement period determination method of appropriate x-ray analysis equipment and X-ray detector for replacing period that can determine X-ray detector.In the present invention, X-ray tube (1) is towards sample (S) X-ray irradiation.Detector (3) detection is irradiated to the X-ray after sample (S).Detector high-tension circuit (4) applies voltage to detector (3).Data acquiring section (81) obtains the data of the Wave Height Distribution curve with the intrinsic wave crest of sample (S) according to the detection signal for carrying out self-detector (3).Replacement period determination unit (82) determines the replacement period of detector (3) according to the wave crest for including in the data by measuring the Wave Height Distribution curve that standard sample is got by data acquiring section (81).
Description
Technical field
The present invention relates to a kind of X for having the X-ray source towards sample X-ray irradiation, detecting after being irradiated to sample to penetrate
The X-ray detector of line and the x-ray analysis equipment and X that alive voltage application portion is applied to the X-ray detector
The replacement period determination method of ray detector.
Background technique
Equipped with the X-ray towards sample X-ray irradiation in the x-ray analysis equipments such as Wavelength dispersion type fluorescent X-ray device
Light source and detection are irradiated to the X-ray detector of the X-ray after sample.As X-ray source, such as use X-ray tube.
In addition, as X-ray detector, such as use ratio counting tube or scintillation counter.
X-ray tube has filament and target, to applying high pressure between filament and target.It is released as a result, from filament towards target
Thermoelectron is hit to target by the thermoelectron and generates X-ray.Filament, target have the service life, therefore, if X-ray tube reaches
To replacement period, then new X-ray tube (such as with reference to following patent documents 1) are changed to.
Similarly, the X-ray detectors such as proportional counter tube, scintillation counter can also be deteriorated with using, therefore be determined
Phase replacement.Such as proportional counter tube is the composition that the core wire being made of tungsten wire is provided in enclosed argon gas, with argon gas
Deterioration, core wire it is dirty etc., replaced.In addition, scintillation counter has scintillator and photomultiplier tube, with this
The deterioration of a little parts, is replaced.
In the past, X-ray source, X-ray detector replacement period be by they using on the basis of the time.That is, using
It is following to constitute: to using the time to be added up, recorded, if this is more than certain time using the time, to be judged to replacing period.
[existing technical literature]
[patent document]
[patent document 1] Japanese Patent Laid-Open 5-283192 bulletin
Summary of the invention
[problems to be solved by the invention]
However, can not determine sometimes just in the case where determining the replacement period of X-ray detector according to the time is used
When replacement period.For example, not being the deterioration of X-ray detector itself but applying alive circuit to X-ray detector
It is inferior that the case where deterioration has occurred in side, even if X-ray detector does not arrive replacement period, can also be judged as replacement period sometimes.
In this way, having in the case where that can not determine the appropriate replacement period of X-ray detector to the X-ray detector that need not be replaced
Carry out the worry replaced or X-ray detector breaks down before changing.
The present invention is formed in view of above-mentioned truth, can determine the appropriate of X-ray detector its purpose is to provide a kind of
Replacement period x-ray analysis equipment and X-ray detector replacement period determination method.
[technical means to solve problem]
(1) x-ray analysis equipment of the invention has X-ray source, X-ray detector, voltage application portion, data acquisition
Portion and replacement period determination unit.The X-ray source is towards sample X-ray irradiation.The X-ray detector detection is irradiated to sample
X-ray later.The voltage application portion applies voltage to the X-ray detector.The data acquiring section is according to from institute
The detection signal of X-ray detector is stated to obtain the data of the Wave Height Distribution curve with the intrinsic wave crest of sample.The replacement
In data of the period determination unit according to the Wave Height Distribution curve got by measurement standard sample by the data acquiring section
The wave crest for including determines replacement period of the X-ray detector.
According to this composition, it can use following content to determine the replacement period of X-ray detector: being examined to X-ray
It surveys in the case that device is applied with certain voltage and measures standard sample, include in the data of the Wave Height Distribution curve thus got
Wave crest can change with the deterioration of X-ray detector.Specifically, applying certain voltage to X-ray detector and surveying
It the position of wave crest when fixed same standard sample can be mobile towards low energy side with the deterioration of X-ray detector.Pass through utilization
This characteristic can determine the appropriate replacement period of X-ray detector.
(2) x-ray analysis equipment can be also equipped with voltage adjustment section, and the voltage adjustment section by measurement standard to be tried
The position of wave crest included in sample and the data of Wave Height Distribution curve that are got as the data acquiring section reaches certain
The mode of base position adjusts the voltage that the voltage application portion is applied to the X-ray detector.In this case, it is described more
When the period determination unit of changing can be according to the replacement through the voltage adjustment section voltage value adjusted to determine the X-ray detector
Phase.
According to this composition, to pass through wave included in the data for measuring the Wave Height Distribution curve that standard sample is got
The mode that peak reaches certain base position adjusts the voltage for being applied to X-ray detector.At this point, X-ray detector is bad
Change, just need to be adjusted to higher voltage value, therefore, according to voltage value adjusted, it is possible to determine that X-ray detector it is appropriate
Replacement period.
(3) the replacement period determination unit can be by that will carry out through the voltage adjustment section voltage value adjusted and threshold value
Compare the replacement period to determine the X-ray detector.
According to this composition, X-ray detector is applied to adjusting in a manner of the base position that wave crest reaches certain
The voltage value is compared with threshold value when voltage, thereby, it is possible to the appropriate replacement periods of real-time judgment X-ray detector.
(4) x-ray analysis equipment can be also equipped with historical store, and the historical store storage is through the voltage tune
The history of whole voltage value adjusted.In this case, the replacement period determination unit can be according in the historical store
The history of the voltage value of storage determines replacement period of the X-ray detector.
According to this composition, it can store to adjust in a manner of the base position that wave crest reaches certain and be applied to X-ray
The history of voltage value when the voltage of detector predicts the replacement period of X-ray detector according to the history.Thereby, it is possible to
Therefore the preparation for confirming the replacement period of X-ray detector in advance and being replaced can reliably replace X in the appropriate time
Ray detector.
(5) the replacement period determination unit can be got according to by measuring standard sample by the data acquiring section
The replacement period of the position of wave crest included in the data of Wave Height Distribution curve changed to determine the X-ray detector.
According to this composition, by measuring wave crest included in the data for the Wave Height Distribution curve that standard sample is got
Position can change with the deterioration of X-ray detector.At this point, X-ray detector deteriorates, the position of wave crest
Variation degree is bigger, therefore, according to the variation of the position of wave crest, it is possible to determine that the appropriate replacement period of X-ray detector.
(6) wave that the replacement period determination unit can will be got by measuring standard sample by the data acquiring section
The variable quantity of the position for the wave crest for including in the data of high distribution curve is compared with threshold value, thus determines the X-ray
The replacement period of detector.
According to this composition, the variation of the position of changed wave crest and by with the deterioration of X-ray detector
Amount is compared with threshold value, is capable of the appropriate replacement period of real-time judgment X-ray detector.
(7) x-ray analysis equipment can be also equipped with historical store, and the historical store storage passes through measurement standard
Sample and the history of the position of the wave crest that includes in the data of Wave Height Distribution curve that are got by the data acquiring section.At this
In the case of, the replacement period determination unit can be according to the history of the position of the wave crest stored in the historical store to determine
State the replacement period of X-ray detector.
According to this composition, the deterioration with X-ray detector can store and the position of changed wave crest
History predicts the replacement period of X-ray detector according to the history.Thereby, it is possible to confirm the replacement of X-ray detector in advance
Period and therefore the preparation replaced can reliably replace X-ray detector in the appropriate time.
(8) the replacement period determination unit can be got according to by measuring standard sample by the data acquiring section
The variation of area value in the certain section for the wave crest for including in the data of Wave Height Distribution curve determines the X-ray detector
Replacement period.
According to this composition, by measuring wave crest included in the data for the Wave Height Distribution curve that standard sample is got
Certain section in area value can change with the deterioration of X-ray detector.At this point, X-ray detector is bad
To change, the variation degree of area value is bigger, therefore, the variation being worth according to area, it is possible to determine that the appropriate replacement of X-ray detector
Period.
(9) wave that the replacement period determination unit can will be got by measuring standard sample by the data acquiring section
The variable quantity of area value in the certain section for the wave crest for including in the data of high distribution curve is compared with threshold value, is thus come
Determine the replacement period of the X-ray detector.
According to this composition, and by with the deterioration of X-ray detector in certain section of changed wave crest
Area value be compared with threshold value, be capable of the appropriate replacement period of real-time judgment X-ray detector.
(10) x-ray analysis equipment can be also equipped with historical store, and the historical store storage passes through measurement mark
Quasi- sample and in certain section of the wave crest that includes in the data of Wave Height Distribution curve that are got by the data acquiring section
The history of area value.In this case, the replacement period determination unit can be according to the wave crest stored in the historical store
The history of area value determines replacement period of the X-ray detector.
According to this composition, certain area of the deterioration with X-ray detector and changed wave crest can store
The history of interior area value, the replacement period of X-ray detector is predicted according to the history.Thereby, it is possible to confirm that X is penetrated in advance
The replacement period of thread detector and therefore the preparation replaced can reliably replace X-ray detector in the appropriate time.
(11) the replacement period determination method of X-ray detector of the invention is the X-ray determined in x-ray analysis equipment
The method in the replacement period of detector, the x-ray analysis equipment has the X-ray source towards sample X-ray irradiation, detection is shone
It is mapped to the X-ray detector of the X-ray after sample and alive voltage application portion is applied to the X-ray detector, the X
The replacement period determination method of ray detector includes data acquisition step and replacement period determination step.It is obtained in the data
It takes in step, the Wave Height Distribution with the intrinsic wave crest of sample is obtained according to the detection signal from the X-ray detector
The data of curve.In the replacement period determination step, according to by measuring standard sample in the data acquisition step
In include in the data of Wave Height Distribution curve that get wave crest determine replacement period of the X-ray detector.
[The effect of invention]
According to the present invention it is possible to determine the appropriate replacement period of X-ray detector using following content: being penetrated to X
Thread detector measures standard sample in the case where being applied with certain voltage, wrap in the data of the Wave Height Distribution curve thus got
The wave crest contained can change with the deterioration of X-ray detector.
Detailed description of the invention
Fig. 1 is the block diagram of the configuration example of x-ray analysis equipment involved in expression the 1st embodiment of the invention.
Fig. 2 is the figure for indicating an example of Wave Height Distribution curve.
The process of an example for the processing that data processing equipment when Fig. 3 is determined the replacement period of detector by expression carries out
Figure.
Fig. 4 is the replacement for indicating to determine in the x-ray analysis equipment involved in the 2nd embodiment of the invention detector
The flow chart of an example for the processing that data processing equipment when period is carried out.
Fig. 5 is the replacement for indicating to determine in the x-ray analysis equipment involved in the 3rd embodiment of the invention detector
The flow chart of an example for the processing that data processing equipment when period is carried out.
Fig. 6 is the replacement for indicating to determine in the x-ray analysis equipment involved in the 4th embodiment of the invention detector
The flow chart of an example for the processing that data processing equipment when period is carried out.
Fig. 7 is the replacement for indicating to determine in the x-ray analysis equipment involved in the 5th embodiment of the invention detector
The flow chart of an example for the processing that data processing equipment when period is carried out.
Fig. 8 is the replacement for indicating to determine in the x-ray analysis equipment involved in the 6th embodiment of the invention detector
The flow chart of an example for the processing that data processing equipment when period is carried out.
Specific embodiment
1. the 1st embodiment
Fig. 1 is the block diagram of the configuration example of x-ray analysis equipment involved in expression the 1st embodiment of the invention.The X is penetrated
Line analysis device is, for example, Wavelength dispersion type fluorescent X-ray device, will be by irradiating to sample S using analyzing crystal (not shown)
X-ray and the fluorescent X-ray that generates is divided to be measured.It is high that the x-ray analysis equipment for example has X-ray tube 1, X-ray
Volt circuit 2, detector 3, detector high-tension circuit 4, preamplifier 5, MCA (Multi Channel Analyzer (multiple tracks point
Parser)) 6, control circuit 7, data processing equipment 8 and storage unit 9 etc..
X-ray tube 1 is an example towards the X-ray source of sample S X-ray irradiation.By X-ray high-tension circuit 2 to X-ray tube
1 applies high pressure.The X-ray after sample S is irradiated to be examined as the fluorescent X-ray generated from sample S by detector 3
It surveys.Detector 3 is, for example, the X-ray detectors such as proportional counter tube or scintillation counter, applies height by detector high-tension circuit 4
Pressure.Detector high-tension circuit 4, which is constituted, applies alive voltage application portion to detector 3.
Detector 3 exports the detection signal of X-ray in the form of electric pulse.The wave height of the electric pulse is penetrated with X detected
The energy of line is proportional.The electric pulse exported from detector 3 is amplified by preamplifier 5 and is input to MCA 6.MCA6
The energy binned of the electric pulse of input is exported to the data that Wave Height Distribution curve is thus generated to each channel.
X-ray high-tension circuit 2, detector high-tension circuit 4 and MCA 6 are respectively via control circuit 7 and data processing equipment 8
Connection.Control circuit 7 controls X-ray high-tension circuit 2 and detector high-tension circuit 4, thus come adjust be applied to X-ray tube 1 and
The voltage of detector 3.In addition, the data of the Wave Height Distribution curve generated in MCA 6 are input to data processing dress from control circuit 7
Set 8.
Data processing equipment 8 is for example by comprising CPU (Central Processing Unit (central processing unit))
People's computer is constituted.Data processing equipment 8 is by executing program by CPU as data acquiring section 81 and replacement period determination unit
82 wait and function.Data acquiring section 81 via control circuit 7 obtain according to carry out the detection signal of self-detector 3 and by MCA
The data of the 6 Wave Height Distribution curves generated.Replacement period determination unit 82 is according to the Wave Height Distribution got by data acquiring section 81
The data of curve determine replacement period of detector 3.
Storage unit 9 is for example made of hard disk, the information (temporal information) for the time correlation that storage is used with detector 3,
At this moment the data etc. of Wave Height Distribution curve accessed by the data of the high pressure of detector 3, data acquiring section 81 are applied to.Time
Information may be, for example, the information for the date-time that detector 3 is used, and can also be the aggregate-value for the time that detector 3 is used
Deng.
Fig. 2 is the figure for indicating an example of Wave Height Distribution curve.The Wave Height Distribution curve is according to from for example as detection
The detection signal of the proportional counter tube of device 3 and generated by MCA 6, horizontal axis is set as energy, the longitudinal axis is set as to the song of count number
Line (so-called pulse height distribution curve) indicates.As shown in Fig. 2, Wave Height Distribution curve becomes with the examination as measure object
The curve of sample S intrinsic wave crest.
In the low energy side of Wave Height Distribution curve, electrical noise (so-called amplification noise) is measured sometimes.In addition,
The high energy side of Wave Height Distribution curve measures the interference ray such as high-order ray sometimes.In order to remove this noise, interference is penetrated
Line sets the low-lying level LL and high level UL of energy, is analyzed using the data of certain section LL~UL between them.
Specifically, being made according to the area value (applying the area value of the part of hachure in Fig. 2) of the wave crest in certain section LL~UL
Make calibration curve, is analyzed using the calibration curve.
In the present embodiment, it is obtained by the standard sample for intrinsic wave crest occur on measurement Wave Height Distribution curve by data
It takes portion 81 to obtain the data of Wave Height Distribution curve, replaces the wave for including in data of the period determination unit 82 according to the wave height component curve
Peak determines replacement period of detector 3.As standard sample, such as use silicon, magnesia or calcium carbonate etc..
Following content is utilized in the judgement in the replacement period of this detector 3: being applied with certain voltage to detector 3
In the case of measure standard sample, the wave crest for including in the data of the Wave Height Distribution curve thus got can be with detector 3
It deteriorates and changes.Specifically, the position of wave crest when measuring same standard sample to the application certain voltage of detector 3
It can be mobile to low energy side (left side in Fig. 2) with the deterioration of detector 3.By utilizing this characteristic, inspection can determine
Survey the appropriate replacement period of device 3.
The stream of an example for the processing that the data processing equipment 8 when Fig. 3 is determined the replacement period of detector 3 by expression carries out
Cheng Tu.In the present embodiment, it is on the one hand obtained and periodically or non-periodically measurement standard sample by data acquiring section 81
The data of Wave Height Distribution curve based on standard sample, on the other hand according to the data come real-time judgment detector 3 replacement when
Phase.At this point, high pressure (step S101) is applied to detector 3 by detector high-tension circuit 4, wave height of the control circuit 7 to get
The mode that the position for the wave crest for including in the data of distribution curve reaches certain base position controls detector high-tension circuit 4
(step S102, S103).
That is, if the position of wave crest as shown in Figure 2 is not in certain base position (step S102 in X direction
In be "No"), then control circuit 7 control detector high-tension circuit 4, as a result, in such a way that the position of wave crest reaches base position
Adjustment is applied to the voltage (step S103) of detector 3.In this case, control circuit 7 constitutes following voltage adjustment section: with wave
The mode that the position for the wave crest for including in the data of high distribution curve reaches certain base position adjusts detector high-tension circuit 4
It is applied to the voltage of detector 3.
When adjustment is applied to the voltage of detector 3, detector 3 is deteriorated, and just needs to be adjusted to higher voltage value.
Therefore, in the present embodiment, by being determined by replacement period determination unit 82 according to through the voltage value adjusted of control circuit 7
The replacement period of detector 3 can determine the appropriate replacement period of detector 3.Specifically, replacement period determination unit 82 will
It is compared (step S104) with threshold value through the voltage value adjusted of control circuit 7, thus determines the replacement period of detector 3.
That is, replacing period if being threshold value or more (being "Yes" in step S104) through the voltage value adjusted of control circuit 7
Determination unit 82 is determined as replacement period (step S105) of detector 3, and gives the judgement result notice to user (step S106).
In this way, when adjusting the voltage for being applied to detector 3 in a manner of the base position that wave crest reaches certain by the voltage value and threshold
Value is compared, and thereby, it is possible to the appropriate replacement periods of real-time judgment detector 3.Furthermore determine that the notice of result can lead to
The display to display unit (not shown) or the voice from loudspeaker (not shown) etc. are crossed to carry out.
2. the 2nd embodiment
Fig. 4 is to indicate to determine detector 3 more in the x-ray analysis equipment involved in the 2nd embodiment of the invention
The flow chart of an example for the processing that the data processing equipment 8 when changing period is carried out.In the present embodiment, according to by regular
Or aperiodically measure standard sample and the history of detector high pressure that is stored in storage unit 9 determines the replacement of detector 3
Period.At this point, storage unit 9 plays function as the historical store for storing the history through the voltage value adjusted of control circuit 7
Energy.
Specifically, (the step S201 in the case where user has carried out the operation for confirming the replacement period of detector 3
In be "Yes"), read the history (step S202) of detector high pressure stored in storage unit 9.The detector high pressure read at this time
It is the history that the voltage value of detector 3 is applied to when measuring same standard sample.
With periodically or non-periodically measure the Wave Height Distribution curve that standard sample is got data in include wave crest
Position reach certain base position mode have adjusted the voltage for being applied to detector 3 in the case where, conduct in storage unit 9
The voltage value (detector high pressure) of historical storage can change with the deterioration of detector 3.Therefore, in present embodiment
In, period determination unit 82 is replaced according to the history of the detector high pressure stored in storage unit 9 come the replacement period of predicted detection device 3
(step S203).
That is, when being applied to detector 3 according to the history of the detector high pressure stored in storage unit 9 and each detector high pressure
Temporal information (aggregate-value for the time that the date-time or detector 3 that detector 3 is used are used) carry out predicted detection
The replacement period of device 3.For example, being in application to voltage and the case where proportionally the raising using the time of detector 3 of detector 3
Under, the relationship that the ratio can be used carrys out the replacement period of predicted detection device 3.
The prediction result in the replacement period for the detector 3 that replacement period determination unit 82 obtains passes through to display unit (not shown)
Display or voice etc. from loudspeaker (not shown) and notify to give user (step S204).Thereby, it is possible to confirm in advance
The replacement period of detector 3 and therefore the preparation replaced can reliably replace detector 3 in the appropriate time.
3. the 3rd embodiment
Fig. 5 is to indicate to determine detector 3 more in the x-ray analysis equipment involved in the 3rd embodiment of the invention
The flow chart of an example for the processing that the data processing equipment 8 when changing period is carried out.In the present embodiment, on the one hand by fixed
Phase or aperiodically measure standard sample and by data acquiring section 81 obtain the Wave Height Distribution curve based on standard sample data,
On the other hand according to the data come the replacement period of real-time judgment detector 3.At this point, by detector high-tension circuit 4 to detector 3
Apply high pressure (step S301), and confirms the position (step for the wave crest for including in the data of Wave Height Distribution curve got
S302)。
Detector 3 deteriorates, and the position for the wave crest for including in the data of Wave Height Distribution curve is towards low energy side (in Fig. 2
Left side) variation degree it is bigger.Therefore, in the present embodiment, by by replacing period determination unit 82 according to Wave Height Distribution
In the replacement period of the position for the wave crest for including in the data of curve changed to determine detector 3, it can determine the proper of detector 3
When replacement period.Specifically, replacing period determination unit 82 for the position for the wave crest for including in the data of Wave Height Distribution curve
Variable quantity be compared with threshold value (step S303), thus determine detector 3 replacement period.
That is, replacing period determination unit if the variable quantity of the position of wave crest is threshold value or more (being "Yes" in step S303)
82 are determined as replacement period (step S304) of detector 3, and give the judgement result notice to user (step S305).In this way,
The variable quantity of the position of changed wave crest is compared with threshold value and by deterioration with detector 3, can be real-time
Determine the appropriate replacement period of detector 3.Furthermore determine that the notice of result can be by the display to display unit (not shown)
Or the voice of loudspeaker (not shown) etc. is come to carry out.
4. the 4th embodiment
Fig. 6 is to indicate to determine detector 3 more in the x-ray analysis equipment involved in the 4th embodiment of the invention
The flow chart of an example for the processing that the data processing equipment 8 when changing period is carried out.In the present embodiment, according to by regular
Or it aperiodically measures standard sample and is stored in the position of the wave crest in the data of the Wave Height Distribution curve of storage unit 9 included
History determines replacement period of detector 3.At this point, included in data of the storage unit 9 as storage Wave Height Distribution curve
The historical store of the history of the position of wave crest and function.
Specifically, (the step S401 in the case where user has carried out the operation for confirming the replacement period of detector 3
In be "Yes"), read the history (step of the position for the wave crest for including in the data of Wave Height Distribution curve stored in storage unit 9
S402).Include in the data for the Wave Height Distribution curve that the position of the wave crest read at this time obtains when being the same standard sample of measurement
Wave crest position history.
By periodically or non-periodically measuring wave included in the data for the Wave Height Distribution curve that standard sample is got
The position at peak can change with the deterioration of detector 3.It therefore, in the present embodiment, will be with the deterioration of detector 3
And the historical storage of the position of changed wave crest is replaced period determination unit 82 and is predicted according to the history in storage unit 9
Replacement period (step S403) of detector 3.
That is, the history of the position of the wave crest according to included in the data for the Wave Height Distribution curve for being stored in storage unit 9 and
(date-time or detector 3 that detector 3 is used are made temporal information when getting the data of each Wave Height Distribution curve
The aggregate-value of time) carry out replacement period of predicted detection device 3.For example, the wave for including in the data of Wave Height Distribution curve
In the case that the variable quantity of the position at peak and the use time of detector 3 proportionally increase, the relationship of the ratio can be used
Carry out the replacement period of predicted detection device 3.
The prediction result in the replacement period for the detector 3 that replacement period determination unit 82 obtains passes through to display unit (not shown)
Display or voice etc. from loudspeaker (not shown) and notify to give user (step S404).Thereby, it is possible to confirm in advance
The replacement period of detector 3 and therefore the preparation replaced can reliably replace detector 3 in the appropriate time.
5. the 5th embodiment
Fig. 7 is to indicate to determine detector 3 more in the x-ray analysis equipment involved in the 5th embodiment of the invention
The flow chart of an example for the processing that the data processing equipment 8 when changing period is carried out.In the present embodiment, on the one hand by fixed
Phase or aperiodically measure standard sample and by data acquiring section 81 obtain the Wave Height Distribution curve based on standard sample data,
On the other hand according to the data come the replacement period of real-time judgment detector 3.At this point, by detector high-tension circuit 4 to detector 3
Apply high pressure (step S501), and confirm certain section LL of the wave crest for including in the data of Wave Height Distribution curve got~
Area value (area value of the part of hachure is applied in Fig. 2) (step S502) in UL.
Detector 3 deteriorates, and the position for the wave crest for including in the data of Wave Height Distribution curve is towards low energy side (in Fig. 2
Left side) variation degree it is bigger.With the variation of the position of this wave crest, the area value of the wave crest in certain section LL~UL
Also it can change.Therefore, in the present embodiment, pass through the data by replacement period determination unit 82 according to Wave Height Distribution curve
In include wave crest certain section LL~UL in the variation of area value determine replacement period of detector 3, can determine
The appropriate replacement period of detector 3.Specifically, replacement period determination unit 82 will include in the data of Wave Height Distribution curve
The variable quantity of area value in certain section LL~UL of wave crest is compared (step S503) with threshold value, thus determines detector
3 replacement period.
That is, if the variable quantity of the area value of the wave crest in certain section LL~UL is that threshold value or more (is in step S503
"Yes"), then replace replacement period (step S504) that period determination unit 82 is determined as detector 3, and by the judgement result notice
Give user (step S505).In this way, and by deterioration with detector 3 changed wave crest certain section LL~UL
The variable quantity of interior area value is compared with threshold value, is capable of the appropriate replacement period of real-time judgment detector 3.Furthermore sentence
Determine result notice can by display to display unit (not shown) or voice from loudspeaker (not shown) etc. come into
Row.
6. the 6th embodiment
Fig. 8 is to indicate to determine detector 3 more in the x-ray analysis equipment involved in the 6th embodiment of the invention
The flow chart of an example for the processing that the data processing equipment 8 when changing period is carried out.In the present embodiment, according to by regular
Or it aperiodically measures standard sample and is stored in the certain of wave crest included in the data of the Wave Height Distribution curve of storage unit 9
When replacement of the history of the area value (applying the area value of the part of hachure in Fig. 2) in the LL~UL of section to determine detector 3
Phase.At this point, the area in the certain section LL~UL for the wave crest for including in data of the storage unit 9 as storage Wave Height Distribution curve
The historical store of the history of value and function.
Specifically, (the step S601 in the case where user has carried out the operation for confirming the replacement period of detector 3
In be "Yes"), read be stored in storage unit 9 Wave Height Distribution curve data included in wave crest certain section LL~UL
The history (step S602) of interior area value.The area value of the wave crest read at this time is the wave obtained when measuring same standard sample
The history of the area value for the wave crest for including in the data of high distribution curve.
The wave crest for including in data by periodically or non-periodically measuring the Wave Height Distribution curve that standard sample is got
Certain section LL~UL in area value can change with the deterioration of detector 3.Therefore, in the present embodiment,
By with the deterioration of detector 3 and the historical storage of the area value in certain section LL~UL of changed wave crest is storing
In portion 9, period determination unit 82 is replaced according to the history come replacement period (step S603) of predicted detection device 3.
That is, according to the certain section LL~UL for the wave crest for including in the data for being stored in the Wave Height Distribution curve of storage unit 9
Temporal information (the date that detector 3 the is used when history of interior area value and the data for getting each Wave Height Distribution curve
The aggregate-value for the time that time or detector 3 are used) carry out replacement period of predicted detection device 3.For example, in Wave Height Distribution song
The variable quantity of area value in the certain section LL~UL for the wave crest for including in the data of line and detector 3 using the time at than
In the case that example ground increases, the relationship that the ratio can be used carrys out the replacement period of predicted detection device 3.
The prediction result in the replacement period for the detector 3 that replacement period determination unit 82 obtains passes through to display unit (not shown)
Display or voice etc. from loudspeaker (not shown) and notify to give user (step S604).Thereby, it is possible to confirm in advance
The replacement period of detector 3 and therefore the preparation replaced can reliably replace detector 3 in the appropriate time.
7. variation
In the above embodiment, following composition is illustrated: is carried out automatically in x-ray analysis equipment respectively
Data acquisition step, replacement period determination step and voltage regulation step, the data acquisition step are that basis carrys out self-detector 3
Detection signal obtain the data of the Wave Height Distribution curve with the intrinsic wave crest of sample, the replacement period determination step is
According to the wave crest for including in the data by measuring the Wave Height Distribution curve that standard sample is got in data acquisition step
Determine the replacement period of detector 3, the voltage regulation step be with by measurement standard sample in data acquisition step
In include in the data of Wave Height Distribution curve that get the position of wave crest reach the mode of certain base position and adjust inspection
Survey the voltage that device high-tension circuit 4 is applied to detector 3.But it is not limited to this composition, data acquisition step, replacement period determine
At least 1 side in step and voltage regulation step can also be carried out manually by user.
Additionally, this invention is not limited to Wavelength dispersion type fluorescent X-ray devices, can also apply to X-ray diffraction device etc. its
His x-ray analysis equipment.
Symbol description
1 X-ray tube
2 X-ray high-tension circuits
3 detectors
4 detector high-tension circuits
5 preamplifiers
6 MCA
7 control circuits
8 data processing equipments
9 storage units
81 data acquiring sections
82 replacement period determination units.
Claims (11)
1. a kind of x-ray analysis equipment, which is characterized in that have:
X-ray source, towards sample X-ray irradiation；
X-ray detector, detection are irradiated to the X-ray after sample；
Voltage application portion applies voltage to the X-ray detector；
Data acquiring section is obtained according to the detection signal from the X-ray detector with the intrinsic wave crest of sample
The data of Wave Height Distribution curve；And
Replacement period determination unit, it is bent according to the Wave Height Distribution got by measurement standard sample by the data acquiring section
The wave crest for including in the data of line, to determine the replacement period of the X-ray detector.
2. x-ray analysis equipment according to claim 1, which is characterized in that
It is also equipped with voltage adjustment section, the voltage adjustment section by measuring standard sample by the data acquiring section to be got
Wave Height Distribution curve data in include the position of wave crest reach the mode of certain base position and adjust the voltage and apply
Portion is added to be applied to the voltage of the X-ray detector,
The replacement period determination unit is according to through the voltage adjustment section voltage value adjusted, to determine the X-ray detection
The replacement period of device.
3. x-ray analysis equipment according to claim 2, which is characterized in that
The replacement period determination unit will be compared through the voltage adjustment section voltage value adjusted with threshold value, thus be determined
The replacement period of the X-ray detector.
4. x-ray analysis equipment according to claim 2, which is characterized in that
It is also equipped with historical store, the historical store stores the history through the voltage adjustment section voltage value adjusted,
The replacement period determination unit is according to the history of the voltage value stored in the historical store, to determine the X-ray
The replacement period of detector.
5. x-ray analysis equipment according to claim 1, which is characterized in that
The replacement period determination unit is according to the Wave Height Distribution got by measuring standard sample by the data acquiring section
The variation of the position for the wave crest for including in the data of curve, to determine the replacement period of the X-ray detector.
6. x-ray analysis equipment according to claim 5, which is characterized in that
The replacement period determination unit is bent by the Wave Height Distribution got by measurement standard sample by the data acquiring section
The variable quantity of the position for the wave crest for including in the data of line is compared with threshold value, thus determines the X-ray detector more
Change period.
7. x-ray analysis equipment according to claim 5, which is characterized in that
It is also equipped with historical store, the historical store storage is obtained by measurement standard sample by the data acquiring section
To Wave Height Distribution curve data in include wave crest position history,
The replacement period determination unit is according to the history of the position of the wave crest stored in the historical store, to determine the X
The replacement period of ray detector.
8. x-ray analysis equipment according to claim 1, which is characterized in that
The replacement period determination unit is according to the Wave Height Distribution got by measuring standard sample by the data acquiring section
The variation of area value in the certain section for the wave crest for including in the data of curve, to determine the replacement of the X-ray detector
Period.
9. x-ray analysis equipment according to claim 8, which is characterized in that
The replacement period determination unit is bent by the Wave Height Distribution got by measurement standard sample by the data acquiring section
The variable quantity of area value in the certain section for the wave crest for including in the data of line is compared with threshold value, thus determines the X
The replacement period of ray detector.
10. x-ray analysis equipment according to claim 8, which is characterized in that
It is also equipped with historical store, the historical store storage is obtained by measurement standard sample by the data acquiring section
To Wave Height Distribution curve data in include wave crest certain section in area value history,
The replacement period determination unit is described to determine according to the history of the area value of the wave crest stored in the historical store
The replacement period of X-ray detector.
11. a kind of replacement period determination method of X-ray detector, the X-ray detector are the X in x-ray analysis equipment
Ray detector, the x-ray analysis equipment has the X-ray source towards sample X-ray irradiation, detection is irradiated to after sample
X-ray X-ray detector and alive voltage application portion is applied to the X-ray detector, the X-ray detector
Replacement period determination method is characterized in that, includes:
Data acquisition step is obtained according to the detection signal from the X-ray detector with the intrinsic wave crest of sample
The data of Wave Height Distribution curve；And
Replacement period determination step, according to by measuring the wave height point that standard sample is got in the data acquisition step
The wave crest for including in the data of cloth curve, to determine the replacement period of the X-ray detector.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017245328A JP6965728B2 (en) | 2017-12-21 | 2017-12-21 | Method for determining replacement time of X-ray analyzer and X-ray detector |
| JP2017-245328 | 2017-12-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109951940A true CN109951940A (en) | 2019-06-28 |
| CN109951940B CN109951940B (en) | 2023-09-01 |
Family
ID=67005872
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811238688.1A Active CN109951940B (en) | 2017-12-21 | 2018-10-23 | X-ray analysis device and method for determining replacement time of X-ray detector |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP6965728B2 (en) |
| CN (1) | CN109951940B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114486946A (en) * | 2020-11-09 | 2022-05-13 | 株式会社岛津制作所 | X-ray inspection apparatus and degradation determination method for X-ray inspection apparatus |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5179580A (en) * | 1991-03-02 | 1993-01-12 | Horiba Ltd. | X-ray analyzer with self-correcting feature |
| JPH06324154A (en) * | 1993-05-14 | 1994-11-25 | Yokogawa Electric Corp | Judgement of change timing of proportional counter tube |
| JP2003051397A (en) * | 2001-08-06 | 2003-02-21 | Toshiba Corp | X-ray image diagnostic device |
| JP2006170652A (en) * | 2004-12-13 | 2006-06-29 | Anritsu Sanki System Co Ltd | X-ray foreign matter detecting apparatus |
| CN101105464A (en) * | 2000-11-07 | 2008-01-16 | 株式会社石田 | X-ray inspection apparatus |
| CN102348088A (en) * | 2010-07-22 | 2012-02-08 | 株式会社东芝 | Medical image display apparatus and x-ray computed tomography apparatus |
| CN102384924A (en) * | 2010-08-31 | 2012-03-21 | 精工电子纳米科技有限公司 | X-ray fluorescence analyzer and X-ray fluorescence analysis method |
| CN104076050A (en) * | 2013-03-25 | 2014-10-01 | 株式会社理学 | X-ray analyzing apparatus |
| KR101469594B1 (en) * | 2013-09-16 | 2014-12-05 | (주)선재하이테크 | X-ray generating device having a function for storing operation time |
| JP2014230636A (en) * | 2013-05-29 | 2014-12-11 | 株式会社東芝 | X-ray computed tomographic apparatus |
| JP2016125922A (en) * | 2015-01-06 | 2016-07-11 | 株式会社島津製作所 | X-ray analysis device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1048161A (en) * | 1996-07-31 | 1998-02-20 | Shimadzu Corp | X-ray analyzer |
| US9310324B2 (en) * | 2013-09-24 | 2016-04-12 | Oxford Instruments Analytical Oy | X-ray fluorescence analyzer with safety features |
-
2017
- 2017-12-21 JP JP2017245328A patent/JP6965728B2/en active Active
-
2018
- 2018-10-23 CN CN201811238688.1A patent/CN109951940B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5179580A (en) * | 1991-03-02 | 1993-01-12 | Horiba Ltd. | X-ray analyzer with self-correcting feature |
| JPH06324154A (en) * | 1993-05-14 | 1994-11-25 | Yokogawa Electric Corp | Judgement of change timing of proportional counter tube |
| CN101105464A (en) * | 2000-11-07 | 2008-01-16 | 株式会社石田 | X-ray inspection apparatus |
| JP2003051397A (en) * | 2001-08-06 | 2003-02-21 | Toshiba Corp | X-ray image diagnostic device |
| JP2006170652A (en) * | 2004-12-13 | 2006-06-29 | Anritsu Sanki System Co Ltd | X-ray foreign matter detecting apparatus |
| CN102348088A (en) * | 2010-07-22 | 2012-02-08 | 株式会社东芝 | Medical image display apparatus and x-ray computed tomography apparatus |
| CN102384924A (en) * | 2010-08-31 | 2012-03-21 | 精工电子纳米科技有限公司 | X-ray fluorescence analyzer and X-ray fluorescence analysis method |
| CN104076050A (en) * | 2013-03-25 | 2014-10-01 | 株式会社理学 | X-ray analyzing apparatus |
| JP2014230636A (en) * | 2013-05-29 | 2014-12-11 | 株式会社東芝 | X-ray computed tomographic apparatus |
| KR101469594B1 (en) * | 2013-09-16 | 2014-12-05 | (주)선재하이테크 | X-ray generating device having a function for storing operation time |
| JP2016125922A (en) * | 2015-01-06 | 2016-07-11 | 株式会社島津製作所 | X-ray analysis device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114486946A (en) * | 2020-11-09 | 2022-05-13 | 株式会社岛津制作所 | X-ray inspection apparatus and degradation determination method for X-ray inspection apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6965728B2 (en) | 2021-11-10 |
| JP2019113350A (en) | 2019-07-11 |
| CN109951940B (en) | 2023-09-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2638558B1 (en) | Determining changes in the x-ray emission yield of an x-ray source | |
| US9833202B2 (en) | System for generating spectral computed tomography projection data | |
| JP5988890B2 (en) | Radioactivity analyzer and radioactivity analysis method | |
| CN108139374A (en) | For utilizing the system of dust sensor indicator, method and apparatus | |
| US6492641B1 (en) | Apparatus and method for gamma-ray determination of bulk density of samples | |
| CN109216142A (en) | Electron probe microanalyzer and storage medium | |
| CN109951940A (en) | The replacement period determination method of x-ray analysis equipment and X-ray detector | |
| JP2016131884A (en) | X-ray ct apparatus, photon-counting detection apparatus, and double-layer photon-counting detector | |
| AU2001265285A1 (en) | Apparatus and method for gamma-ray determination of bulk density of samples | |
| US9518939B2 (en) | Radiometric density profile measuring arrangement | |
| JP2004108796A (en) | Radiation measurement device | |
| Littlejohns et al. | Investigating signatures of cosmological time dilation in duration measures of prompt gamma-ray burst light curves | |
| CN108008440B (en) | Low background alpha, beta measuring device | |
| US20080103727A1 (en) | Multichannel analyzer | |
| US20090095920A1 (en) | Radioactivity monitoring apparatus and method | |
| JP6354591B2 (en) | X-ray analyzer | |
| JP7060446B2 (en) | X-ray line sensor and X-ray foreign matter detection device using it | |
| JP4928501B2 (en) | Liquid scintillation counter | |
| US7605366B2 (en) | Nuclear density gauge | |
| CN102841366A (en) | Method and system for detecting discrimination threshold of pulse-amplitude discriminator | |
| JP3807652B2 (en) | Radiation measurement apparatus and method | |
| EP2965048B1 (en) | Method for determining liquid-vapor interface via gamma radiation | |
| US20090224160A1 (en) | Radiation analysis devices, radiation analysis methods, and articles of manufacture | |
| JP2017049098A (en) | Fluorescence x-ray analysis device, fluorescence x-ray analysis method and computer program | |
| WO2015079535A1 (en) | X-ray analysis device and x-ray analysis method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |