CN109945979A - A kind of infrared detector module Dewar shell mechanism for Cryogenic Optical System - Google Patents
A kind of infrared detector module Dewar shell mechanism for Cryogenic Optical System Download PDFInfo
- Publication number
- CN109945979A CN109945979A CN201910178523.8A CN201910178523A CN109945979A CN 109945979 A CN109945979 A CN 109945979A CN 201910178523 A CN201910178523 A CN 201910178523A CN 109945979 A CN109945979 A CN 109945979A
- Authority
- CN
- China
- Prior art keywords
- thermally insulating
- insulating housing
- flange
- infrared detector
- dewar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 36
- 230000007246 mechanism Effects 0.000 title claims abstract description 19
- 238000005057 refrigeration Methods 0.000 claims abstract description 45
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 70
- 229910052751 metal Inorganic materials 0.000 claims description 51
- 239000002184 metal Substances 0.000 claims description 51
- 238000003466 welding Methods 0.000 claims description 49
- 238000005476 soldering Methods 0.000 claims description 42
- 229910052786 argon Inorganic materials 0.000 claims description 35
- 239000000919 ceramic Substances 0.000 claims description 23
- 239000000463 material Substances 0.000 claims description 16
- 230000005855 radiation Effects 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 11
- 230000004224 protection Effects 0.000 claims description 9
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 5
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 5
- 238000005219 brazing Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- 238000001816 cooling Methods 0.000 abstract description 14
- 230000002792 vascular Effects 0.000 abstract description 7
- 230000000712 assembly Effects 0.000 abstract description 2
- 238000000429 assembly Methods 0.000 abstract description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 8
- 238000009434 installation Methods 0.000 description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 7
- 239000001257 hydrogen Substances 0.000 description 7
- 229910052739 hydrogen Inorganic materials 0.000 description 7
- 229910052759 nickel Inorganic materials 0.000 description 7
- 238000011282 treatment Methods 0.000 description 7
- 238000001514 detection method Methods 0.000 description 6
- PCEXQRKSUSSDFT-UHFFFAOYSA-N [Mn].[Mo] Chemical compound [Mn].[Mo] PCEXQRKSUSSDFT-UHFFFAOYSA-N 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 5
- 238000007747 plating Methods 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 238000005498 polishing Methods 0.000 description 4
- 238000002791 soaking Methods 0.000 description 4
- 241000233855 Orchidaceae Species 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000002360 preparation method Methods 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- BVPWJMCABCPUQY-UHFFFAOYSA-N 4-amino-5-chloro-2-methoxy-N-[1-(phenylmethyl)-4-piperidinyl]benzamide Chemical compound COC1=CC(N)=C(Cl)C=C1C(=O)NC1CCN(CC=2C=CC=CC=2)CC1 BVPWJMCABCPUQY-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004519 grease Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 230000008439 repair process Effects 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 206010037660 Pyrexia Diseases 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical group [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- NEIHULKJZQTQKJ-UHFFFAOYSA-N [Cu].[Ag] Chemical compound [Cu].[Ag] NEIHULKJZQTQKJ-UHFFFAOYSA-N 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000002631 hypothermal effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 238000004021 metal welding Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Abstract
The invention discloses a kind of infrared detector module Dewar shell mechanisms for Cryogenic Optical System, infrared detector module Dewar shell mechanism for cryogenic optics of the invention is made of rigid thermally insulating housing and flexible thermally insulating housing, and a combination thereof is mounted on afterwards together between the getter chamber of infrared detector dewar assembly and the cold finger of refrigeration machine.Can also optionally one of which be mounted between the getter chamber of infrared detector dewar assembly and the cold finger of refrigeration machine；The low temperature enclosure that the present invention had both realized infrared detector dewar cooling assembly is isolated with the calorifics of refrigeration machine expanding machine or vascular, is overcome traditional infrared detector Dewar cooling assembly and is unable to satisfy the low background of Cryogenic Optical System requirement, low refrigeration power consumption and the problem of installed positioning.Structure of the invention is simple, easy to operate, low in cost；Good compatibility is applied to various integrated infrared detector assemblies, similarly suitable separated type infrared detector dewar assembly.
Description
Technical field
The present invention relates to the low temperature bonding technologies of infrared detector, refer specifically to a kind of infrared spy for Cryogenic Optical System
Survey device assembly Dewar structure.It is suitable for Cryogenic Optical System and infrared detector dewar cooling assembly is required to be in lower environment
Temperature occasion.It is also applied for the occasion between other cryogenic vacuum chambers and heat source component needed to be thermally isolated.
Background technique
Optical remote sensing instrument is the important component of the spacecrafts such as satellite, use optical system by the earth of collection or
On the focus electromagnetic radiation to infrared detector in space.It is currently advanced in order to further enhance optical remote sensing instrument detection performance
Optical system mostly use cryogenic optics technology, by optical lens refrigeration to lower temperature levels (current infrared long wave optical
System is mostly at subzero 100 degree or so), to reduce ray machine radiation, improve the detectivity and dynamic range of remote sensing instrument.With
Wavelength is extended to long wave and the raising of detectivity, infrared detector must could work under profound hypothermia.Since machinery is made
Cold to have many advantages, such as that compact-sized, small in size, light-weight, cooling time is short, cryogenic temperature adjustable extent is big, such is detected at present
Device mostly uses mechanical refrigeration mode in the application.In this way but also it mostly uses Dewar to encapsulate to form infrared acquisition greatly when applying
Device Dewar cooling assembly.
When infrared detector dewar cooling assembly is mounted on subzero 100 degree or so, the temperature of the shell of vacuum dewar is reduced,
It can bring following benefit: 1) component Dewar skin temperature reduces, radiation of the component Dewar shell to cold platform in component Dewar
Heat reduces, so that the heat load of refrigeration machine becomes smaller.To the input lower power consumption of refrigeration machine, to the power supply of optical remote sensing instrument and
Heat dissipation is advantageous；2) temperature of vacuum dewar shell and optical window reduces, its own radiation reduces, this obtain detector receive it is lower
Background radiation.Be conducive to the detectivity and dynamic range of remote sensing instrument.Traditional infrared detector dewar cooling assembly
Mainly by infrared detector, vacuum dewar and refrigeration unit at.The coupled modes of vacuum dewar and refrigeration machine either integrated form
Or separated type, refrigeration machine and vacuum dewar are all rigid metal connections, i.e., the shell of vacuum dewar is that metal contacts with refrigeration machine.
The shell of Dewar is also the installation carrier of the optical window of vacuum dewar.When traditional detector refrigeration dewar component is in subzero 100
Degree left and right, can bring following difficulty: 1) no matter vacuum dewar and refrigeration machine be using which kind of coupled modes, between connect for metal
It connects, since solid conduction exchanges heat, can also make can be in subzero 100 degree or so at refrigeration machine.And related refrigeration machine in national military standard
Environment applicable working temperature low-temperature working temperature be subzero 55 degree or so.When environment temperature is subzero 100 degree, to refrigeration
The design and processes of machine propose new technological challenge；2) refrigeration machine and vacuum dewar junction are mostly expanding machine or vascular, are
One heat source.It can generate heat in refrigeration machine work, heat can be transmitted to the shell and optical window of vacuum dewar.This can bring asks as follows
Topic: a) heat that the expanding machine of refrigeration machine or vascular give out passes to vacuum dewar shell by solid conduction, vacuum is caused to be shut out
Watt skin temperature improves, and improves the background radiation amount that detector receives component Dewar optical window and shell, and then influence detection
The performance of device.B) raising of vacuum dewar temperature, component Dewar cold platform receive the radiant heat of component Dewar shell, this can increase
The load of cold is added, so that the input power consumption of refrigeration machine increases, and then influences the power demands of Cryogenic Optical System.C) in light
System causes the load of refrigeration machine to increase one timing of component Dewar shell heat-sinking capability, the increase of vacuum dewar skin temperature
Add, refrigeration machine inputs power consumption and increases, and the fever of expanding machine or vascular is caused to further increase, and circulation deteriorates in this way, seriously affects
The life and reliability of infrared detector dewar cooling assembly.Have to explore a kind of new method to solve the problems, such as this.
Summary of the invention
The object of the present invention is to provide a kind of for the infrared detector module Dewar structure of Cryogenic Optical System and realization
Method, it is suitable for Cryogenic Optical System and infrared detector dewar cooling assembly is required to be in lower environment temperature occasion.This
The low temperature enclosure that invention had not only realized infrared detector dewar cooling assembly is isolated with the calorifics of refrigeration machine expanding machine or vascular, but also
It has taken into account Cryogenic Optical System and mechanical support requirement is distinguished to infrared detector module Dewar and refrigeration machine, solved traditional infrared
Detector Dewar cooling assembly is unable to satisfy the low background of Cryogenic Optical System requirement, low refrigeration power consumption and installed positioning
Problem.
The object of the present invention is achieved like this: infrared detector dewar assembly by the window cap 1 with optical window, draw
Wire loop 2, getter chamber 3, the cold finger 4 of refrigeration machine and the infrared detector module Dewar shell mechanism for Cryogenic Optical System
Composition, as shown in Figure 1.The lower end of window cap 1 with optical window is by laser or argon arc airtight welding in the upper of feed-through collar 2
End, the lower end laser or argon arc airtight welding of feed-through collar 2 are in the upper end of getter chamber 3, in getter cavity 3 and refrigeration cold finger
The infrared detector module Dewar shell knot of Cryogenic Optical System is used between 4 lower part method orchid by the installation of twice weld seam
Structure.
The infrared detector module Dewar shell mechanism for cryogenic optics.As shown in Fig. 2, including rigidity every
Hot shell 5 and flexible thermally insulating housing 6.Method in the soldering of the lower metal flange 604 of flexible thermally insulating housing 6 and rigid thermally insulating housing 5
Orchid 503 by laser or argon arc airtight welding together, the upper metal flange 603 of flexible thermally insulating housing 6 and getter chamber 3
Lower end passes through laser or argon arc airtight welding together, the cold finger 4 of the soldering lower flange 501 and refrigeration machine of rigid thermally insulating housing 5
Lower end flanges Dewar shell mechanism is formed by laser or argon arc airtight welding.
The rigid thermally insulating housing 5 hankers sky ceramic cylinder 502 and soldering upper flange by soldering lower flange 501, low drain
503 compositions.It is brazed lower flange 501 and soldering 503 material selection Covar of upper flange, low drain hankers 502 material of sky ceramic cylinder
Material selects zirconium oxide.Low drain hankers the soldering lower flange 501 and soldering upper flange of sky ceramic cylinder 502 and rigid thermally insulating housing 5
503 realize high-intensitive air-tightness welding fabrication by vacuum brazing.
The rigid thermally insulating housing 5 the preparation method is as follows:
1) as shown in Fig. 3, the low drain of rigid thermally insulating housing 5 hankers sky ceramic cylinder 502 by design requirement machine-shaping,
Hollow circuit cylinder inner surface requires polishing, and surface roughness is better than Ra0.4.In the soldering lower flange 501 of itself and rigid thermally insulating housing 5
With soldering 503 junction of upper flange, the molybdenum that specific purpose tool uniformly brushes 300 mesh that thickness is about 0.03mm-0.1mm is first passed through
Manganese slurry is sent into 900 degree of high-temperature heating treatments in hydrogen furnace after cured；
2) the soldering lower flange of sky ceramic cylinder 502 and rigid thermally insulating housing 5 is hankered the low drain of rigid thermally insulating housing 5
501 and soldering 503 junction of upper flange carry out molybdenum manganese metal after carry out electronickelling, nickel layer thickness 0.05mm-0.1mm, electricity
High-temperature hydrogen burning processing is carried out after the completion of plating.Molybdenum manganese high-temperature hydrogen burning treatment conditions of the high-temperature hydrogen burning treatment conditions with step 1；
3) the both ends molybdenum manganese metal of sky ceramic cylinder 502 is hankered the low drain of the rigid thermally insulating housing 5 after the completion of step 2
Actual measurement circumferential size is carried out with the part of Nickel Plating Treatment, according to 501 He of soldering lower flange of size repair rigidity thermally insulating housing 5
It is brazed the corresponding size in 503 junction of upper flange, it is ensured that the gap at two after installation is controlled in 0.01mm-0.04mm；
4) guarantee installation site as shown in Figure 3 in special fixture installation, in the soldering lower flange 501 of rigid thermally insulating housing 5
Hanker adding the silver copper material (trade mark in 502 junction solder preformed groove of sky ceramic cylinder with soldering upper flange 503 and low drain
Ag72Cu28), it is put into vacuum brazing furnace, vacuum degree is lower than 1 × 10-3Pa increases by 10 DEG C of -30 DEG C of works on the basis of solder melt point
For welding temperature, keep being welded for 5-20 minutes；
5) thermally insulating housing 5 rigid after erection welding is completely immersed in liquid nitrogen, is taken out within soaking time 1-3 minutes, room temperature is protected
The time is held greater than 5 minutes, is repeated 5-10 times；
6) it is hunted leak with special tooling to the rigid thermally insulating housing 5 prepared, when leak rate is less than 3 × 10- 11Pa.m3When/s, leak detection is qualified；
7) 250 degree are finally carried out, vacuum degree is better than 3 × 10-4Pa continuous vacuum is stand-by after being vented 48 hours
The flexible thermally insulating housing 6 is by flexible bellow 601, radiation protection and back pressure support screen 602 and upper metal flange
603 and lower metal flange 604 composition.Flexible bellow 601 selects stainless steel or TC4, corrugated portion with a thickness of 0.15mm-
0.3mm.Flexible bellow 601 and upper metal flange 603 and lower metal flange 604 are formed by laser or argon arc welding, anti-spoke
It penetrates and is formed with upper metal flange 603 by laser or argon arc airtight welding with back pressure support screen 602.
The flexible thermally insulating housing 6 the preparation method is as follows:
1) as shown in Fig. 2, complete the flexible bellow 601 of flexible thermally insulating housing 6 and metal flange 603 thereon and under
The laser or argon arc airtight welding of metal flange 604 exist with laser or argon arc welding completion radiation protection and back pressure support screen 602
Welding on flexible thermally insulating housing 6；
2) thermally insulating housing 6 flexible after erection welding is completely immersed in liquid nitrogen, is taken out within soaking time 1-3 minutes, room temperature is protected
The time is held greater than 5 minutes, is repeated 5-10 times；
3) it is hunted leak with special tooling to the flexible thermally insulating housing 6 prepared, when leak rate is less than 3 × 10- 11Pa.m3When/s, leak detection is qualified；
4) 250 degree are finally carried out, vacuum degree is better than 3 × 10-4Pa continuous vacuum is stand-by after being vented 48 hours.
The implementation method of infrared detector module Dewar shell mechanism for cryogenic optics of the invention is as follows: according to light
Requirement of the remote sensing instrument to infrared detector dewar cooling assembly is learned, it can be by the lower metal flange 604 of flexible thermally insulating housing 6
With the soldering upper flange 503 of rigid thermally insulating housing 5 by laser or argon arc airtight welding together with, flexible thermally insulating housing 6 it is upper
Metal flange 603 is together with the lower end of getter chamber 3 is by laser or argon arc airtight welding, the pricker of rigid thermally insulating housing 5
The lower end flanges for welding the cold finger 4 of lower flange 501 and refrigeration machine form Dewar shell mechanism by laser or argon arc airtight welding,
As shown in Figure 2；Or the lower end of the soldering upper flange 503 of rigid thermally insulating housing 5 and getter chamber 3 is passed through into laser or argon arc
Together, the soldering lower flange 501 of rigid thermally insulating housing 5 and 4 lower end of cold finger of refrigeration machine pass through laser or argon arc to airtight welding
Airtight welding forms Dewar shell mechanism；Or it will be under the upper metal flange 603 of flexible thermally insulating housing 6 and getter chamber 3
End passes through laser or argon arc airtight welding together, under the lower metal flange 604 of flexible thermally insulating housing 6 and the cold finger 4 of refrigeration machine
End forms Dewar shell mechanism by laser or argon arc airtight welding.
The invention has the advantages that
(1) structure of the invention is simple, easy to operate, low in cost；
(2) good compatibility is applied to various integrated infrared detector assemblies, similarly suitable separated type infrared detector Du
Watt component.
(3) ceramics used in the present invention is zirconia ceramics (ZrO2), thermal conductivity is low.The wall thickness of hollow ceramic circumference
It can change, to meet different insulation requirements；
(4) effective length of bellows structure and thickness can change in the flexible thermally insulating housing used in the present invention, from
And meet different insulation requirements；
(5) low temperature enclosure of the achievable infrared detector dewar cooling assembly of the present invention and refrigeration machine expanding machine or vascular
Calorifics isolation, isolation effect is adjustable to be adapted to；
(6) present invention can solve traditional infrared detector Dewar cooling assembly and install positioning in Cryogenic Optical System
Problem.
Detailed description of the invention
Fig. 1 is the infrared detector module Dewar structure total figure for Cryogenic Optical System；
In figure: the 1-window cap with optical window；
2-feed-through collars；
3-getter chambers；
The cold finger of 4-refrigeration machines；
5-rigid thermally insulating housings；
501-soldering lower flanges；
502-low drains hanker sky ceramic cylinder；
503-soldering upper flanges；
6-flexible thermally insulating housings；
601-flexible bellows；
602-radiation protections and back pressure support screen；
603-upper metal flanges；
604-lower metal flanges；
Fig. 2 is flexibility/stiffness thermally insulating housing cavity configuration cross-sectional view.
Fig. 3 is rigid thermally insulating housing cavity configuration cross-sectional view.
Specific embodiment
Specific embodiments of the present invention will be described in further detail with reference to the accompanying drawing:
Example is 400 × 4 (Long Wave Infrared Probe Dewar components) of certain aerospace project.The requirement of Dewar component window enclosure
In 173K, the temperature at the vascular end of refrigeration machine is 233K, the portion connected between rigid thermally insulating housing 5 and flexible thermally insulating housing 6
Dividing temperature is 218K, and Dewar component assembling structure is as follows: the lower end of the window cap 1 with optical window is welded on the upper of feed-through collar 2
End, the lower end of feed-through collar 2 are welded on the upper end of getter chamber 3, pass through between rigid thermally insulating housing 5 and flexible thermally insulating housing 6
After laser or argon arc welding realize air-tight connection, welded by the lower end air-tightness of Laser Welding or argon arc welding and getter chamber 3,
Then such as attached by the close welding fabrication of lower part method orchid ventilation of Laser Welding or argon arc welding technique and integrated refrigeration cold finger 4
Shown in Fig. 1.A specific embodiment of the invention is as follows:
1. the method for the preparation of components in the present invention:
(a) rigidity thermally insulating housing 5 hankers sky ceramic cylinder 502 and soldering upper flange 503 by soldering lower flange 501, low drain
Composition.It is brazed lower flange 501 and soldering 503 material selection Covar of upper flange, electroplating nickel on surface, nickel layer thickness is
0.05mm carries out 900 DEG C of annealing in hydrogen atmosphere processing after the completion of plating.Low drain hankers 502 material selection zirconium oxide of sky ceramic cylinder.Low drain heat
502 material selection zirconium oxide of hollow ceramic cylinder, according to vacuum pressure container wall thickness of cylinder design standard, comprehensive mechanical strength,
Solderability and thermally conductive, according to thermally conductive formula:(K is average conduction coefficient of the material in Δ T temperature, and A is
Heat-conducting area, Δ T are the temperature difference of material ends, and L is thermally conductive length).To reduce conductive heat leakage, in addition to selecting thermally conductive system
The small material of number can also increase the length of material or reduce heat-conducting area.According to whole heat insulation, design processing outer diameter Φ
The zirconium oxide of 26.5mm wall thickness 0.5mm specification, zirconia ceramics (ZrO2) average thermal conductivity K be 2.0w/m.k, Δ T=
233K-218K=15K,L=1.2 × 10-2M, substituting into above formula can obtain: Q
=102mW, so rigid thermally insulating housing conductive heat leakage is 306mW.Low drain is hankered 502 hollow circuit cylinder inner surface of sky ceramic cylinder and is wanted
Polishing is asked, surface roughness is better than Ra0.4.In the soldering lower flange 501 and soldering upper flange 503 of itself and rigid thermally insulating housing 5
Junction first passes through brush special and uniformly brushes the molybdenum manganese slurries of 300 mesh that thickness is about 0.05mm and send after solidifying for 24 hours
Enter 900 DEG C of high-temperature heating treatments in hydrogen furnace, sky ceramic cylinder 502 is hankered to the low drain of rigid thermally insulating housing 5 and rigidity is heat-insulated outer
The soldering lower flange 501 of shell 5 and soldering 503 junction of upper flange carry out electronickelling after carrying out molybdenum manganese metal, and nickel layer thickness is
0.05mm carries out 900 DEG C of annealing in hydrogen atmosphere processing after the completion of plating；The two of sky ceramic cylinder 502 is hankered to the low drain of rigid thermally insulating housing 5
It is Φ 26.6mm, the pricker of repair rigidity thermally insulating housing 5 that the part of head molybdenum manganese metal and Nickel Plating Treatment, which carries out actual measurement circumferential size,
The corresponding size of lower flange 501 and soldering 503 junction of upper flange is welded, and controls the tolerance clearance at two after installation and controls and exist
0.04mm, special fixture installation guarantee installation site as shown in Figure 3, soldering lower flange 501 and soldering in rigid thermally insulating housing 5
Upper flange 503 and low drain hanker adding silver-bearing copper in 502 junction solder preformed groove (groove depth 0.5mm, groove width 0.2) of sky ceramic cylinder
Expect (trade mark Ag72Cu28), be put into vacuum brazing furnace, vacuum degree is lower than 1 × 10-3Pa, welding temperature are 815 DEG C, are kept for 15 minutes
It is welded, is hunted leak after soldering to rigid thermally insulating housing 5, leak rate is better than 3 × 10-11Pa.m3/s。
502 inner surface of sky ceramic cylinder mirror finish is hankered to low drain, is cleaned up remaining abrasive pastes after polishing, so
It is successively cleaned in supersonic wave cleaning machine 5-10 minutes with acetone, alcohol and deionized water afterwards, remains in part in removal processing
The grease and clast on surface.After cleaning, thermally insulating housing 5 rigid after erection welding is completely immersed in liquid nitrogen, soaking time
It takes out within 1-3 minutes, room temperature i time is greater than 5 minutes, is repeated 10 times, heat-insulated to the rigidity prepared with special tooling again
Shell 5 is hunted leak, when leak rate is less than 3 × 10-11Pa.m3When/s, leak detection is qualified, and rigid thermally insulating housing 5 is finally carried out 250
Degree, vacuum degree are better than 3 × 10-4Pa continuous vacuum is stand-by after being vented 48 hours.
(b) flexible thermally insulating housing 6 is by flexible bellow 601, radiation protection and back pressure support screen 602 and upper metal flange 603
It is formed with lower metal flange 604.Flexible bellow 601 selects stainless steel, is required according to whole heat insulation, designs nominal diameter
Φ 6.5mm, with a thickness of 0.15mm ripple, length is 54mm after stretching, and the section diameter connecting with upper metal flange 603 is Φ
26mm, the section diameter connecting with upper metal flange 603 are Φ 27mm, and bellows is by the cylinder-shaped thin wall of multiple transverse waves
The shell of fold forms, and can be equivalent to cylindrical body fixed conducting mode, according to thermally conductive formula:(K is that material exists
Average conduction coefficient in Δ T temperature, A are heat-conducting area, and Δ T is the temperature difference of material ends, and L is thermally conductive length).It is stainless
The average thermal conductivity K of steel be 12w/m.k, Δ T=218K-173K=45K,L
=8.1 × 10-2M, substituting into above formula can obtain: Q=83mW, so flexible thermally insulating housing conductive heat leakage is 83mW, bellows is wanted
Ask flash removed, ungrease treatment.Lower metal flange 604 and upper metal flange 603 use kovar, carry out electronickelling, and nickel layer is thick
Degree is 0.05mm, and radiation protection and back pressure support screen 602 use stainless steel material, and the part connecting with upper metal flange 603 is Φ
28mm, surface overall diameter are less than internal diameter after flexible bellow 601 compresses.
The flexible bellow 601 of flexible thermally insulating housing 6 and metal flange 603 thereon and lower metal flange 604 are swashed first
Light or argon arc airtight welding, hunt leak to it using special fixture, and leak rate is better than 3 × 10-11Pa.m3/ s, then will be flexible heat-insulated
The radiation protection of shell 6 and back pressure support screen 602 and 603 laser of metal flange or argon arc airtight welding thereon, and to flexible heat-insulated
Shell 6 is hunted leak, and leak rate is better than 3 × 10-11Pa.m3/ s, and in radiation protection and back pressure support screen 602 and upper metal flange 603
Surface mirror finish, cleans up remaining abrasive pastes after polishing, then successively with acetone, alcohol and deionized water in ultrasound
Cleaning 5-10 minutes in wave cleaning machine, remove the grease and clast for remaining in piece surface in processing.After cleaning, it will fill
It is completely immersed in liquid nitrogen, takes out within soaking time 1-3 minutes, room temperature i time is greater than 5 points with thermally insulating housing 6 flexible after welding
Clock is repeated 10 times, and is hunted leak again with special tooling to the flexible thermally insulating housing 6 prepared, when leak rate is less than 3 × 10- 11Pa.m3When/s, leak detection is qualified, flexible thermally insulating housing 6 is finally carried out 250 degree, vacuum degree is better than 3 × 10-4Pa continuous vacuum row
It is stand-by after gas 48 hours.
2. assembling and Connection Step
1) limiting slot of the lower metal flange 604 of flexible thermally insulating housing 6 is stuck in the soldering upper flange of rigid thermally insulating housing 5
On 503, using special fixture by the soldering lower flange of the upper metal flange 603 of flexible thermally insulating housing 6 and rigid thermally insulating housing 5
501 fixed constraints are lived, and guarantee that the fit clearance of lower metal flange 604 and soldering upper flange 503 is controlled in 0.05mm, by swashing
The carry out air-tightness welding of light or argon arc welding to flexible thermally insulating housing 6 and rigid thermally insulating housing 5, as shown in Figure 2.
2) it is hunted leak with special tooling to the components prepared, when leak rate is less than 3 × 10-11Pa.m3When/s, inspection
Leakage is qualified.
3) limiting slot of the upper metal flange 603 of flexible thermally insulating housing 6 is stuck on getter chamber 3, utilization is special
Fixture lives the upper surface fixed constraint of the lower metal flange 501 of rigid thermally insulating housing 5 and getter chamber 3, and guarantees air-breathing
The fit clearance of agent chamber 3 and upper metal flange 603 is controlled in 0.05mm, by laser or argon arc welding to getter chamber 3
Air-tightness welding is carried out with upper metal flange 603, as shown in Figure 2.
4) step 2) is repeated
5) limiting slot of feed-through collar 2 is stuck on getter chamber 3, using special fixture by the upper surface of feed-through collar 2
It lives, and guarantees between feed-through collar 2 and the cooperation of getter chamber 3 with 501 fixed constraint of lower metal flange of rigid thermally insulating housing 5
Gap control carries out air-tightness welding to feed-through collar 2 and getter chamber 3 in 0.05mm, by laser or argon arc welding, such as Fig. 1 institute
Show.
6) step 2) is repeated
7) under centering instrument, the limiting slot of the lower metal flange 501 of rigid thermally insulating housing 5 is stuck in the cold finger 4 of refrigeration machine
On, regulate the flange face hole location of the cold finger 4 of the refrigeration machine position opposite with feed-through collar 2.Using special fixture by feed-through collar 2
Upper surface and 4 fixed constraint of cold finger of refrigeration machine live, and guarantee between the cooperation of cold finger 4 and lower metal flange 501 of refrigeration machine
Gap control carries out air-tightness weldering to the cold finger 4 of refrigeration machine and rigid thermally insulating housing 5 in 0.05mm, by laser or argon arc welding
It connects, as shown in Figure 1.
8) step 2) is repeated
9) under centering instrument, the limiting slot of the window cap 1 with optical window is stuck on feed-through collar 2, optical window is regulated
The window cap 1 of the mouth position opposite with feed-through collar 2.Using special fixture by the cold finger 4 of refrigeration machine and with the window of optical window
Mouth 1 fixed constraint of cap is lived, and guarantees that the fit clearance of feed-through collar 2 and the window cap 1 with optical window is controlled in 0.05mm, is passed through
The window cap 1 of laser or argon arc welding to feed-through collar 2 and with optical window carries out air-tightness welding, as shown in Figure 1.
10) step 2) is repeated
It is achieved that the Dewar shell mechanism assembling of 400 × 4 Long Wave Infrared Probe components above.
Claims (3)
1. a kind of infrared detector module Dewar shell mechanism for Cryogenic Optical System, including rigid thermally insulating housing (5) and
Flexible thermally insulating housing (6), it is characterised in that:
The infrared detector module Dewar shell mechanism for cryogenic optics, the lower metal method of flexible thermally insulating housing (6)
Blue (604) and the soldering upper flange (503) of rigid thermally insulating housing (5) by laser or argon arc airtight welding together with, flexibility every
The upper metal flange (603) of hot shell (6) and the lower end of getter chamber (3) pass through laser or argon arc airtight welding together,
The lower end flanges of the cold finger (4) of the soldering lower flange (501) and refrigeration machine of rigid thermally insulating housing (5) are airtight by laser or argon arc
Welding forms Dewar shell mechanism.Or by the soldering upper flange (503) of rigid thermally insulating housing (5) and getter chamber (3)
Together by laser or argon arc airtight welding, the soldering lower flange (501) of rigid thermally insulating housing (5) is cold with refrigeration machine for lower end
Refer to that (4) lower end forms Dewar shell mechanism by laser or argon arc airtight welding；Or by the upper metal of flexible thermally insulating housing (6)
Flange (603) and the lower end of getter chamber (3) by laser or argon arc airtight welding together with, flexible thermally insulating housing (6)
Cold finger (4) lower end of lower metal flange (604) and refrigeration machine forms Dewar shell mechanism by laser or argon arc airtight welding.
2. a kind of infrared detector module Dewar shell mechanism of cryogenic optics according to claim 1, it is characterised in that:
The rigid thermally insulating housing (5) hankers sky ceramic cylinder (502) and soldering upper flange by soldering lower flange (501), low drain
(503) it forms；Lower flange (501) and soldering upper flange (503) material selection Covar are brazed, low drain hankers sky ceramic cylinder
(502) material selection zirconium oxide.Low drain hankers the soldering lower flange (501) of sky ceramic cylinder (502) and rigid thermally insulating housing (5)
High-intensitive air-tightness welding fabrication is realized by vacuum brazing with soldering upper flange (503).
3. a kind of infrared detector module Dewar shell mechanism of cryogenic optics according to claim 1, it is characterised in that:
The flexible thermally insulating housing (6) supports screen (602) and upper metal flange by flexible bellow (601), radiation protection and back pressure
(603) formed with lower metal flange (604), flexible bellow (601) selects stainless steel or TC4, corrugated portion with a thickness of
0.15mm-0.3mm；Flexible bellow (601) and upper metal flange (603) and lower metal flange (604) pass through laser or argon arc
Welding fabrication, radiation protection and back pressure support screen (602) and upper metal flange (603) are formed by laser or argon arc airtight welding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910178523.8A CN109945979B (en) | 2019-03-11 | 2019-03-11 | Dewar shell structure of infrared detector assembly for low-temperature optical system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910178523.8A CN109945979B (en) | 2019-03-11 | 2019-03-11 | Dewar shell structure of infrared detector assembly for low-temperature optical system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109945979A true CN109945979A (en) | 2019-06-28 |
| CN109945979B CN109945979B (en) | 2024-05-07 |
Family
ID=67009446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910178523.8A Active CN109945979B (en) | 2019-03-11 | 2019-03-11 | Dewar shell structure of infrared detector assembly for low-temperature optical system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109945979B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110887569A (en) * | 2019-11-04 | 2020-03-17 | 中国电子科技集团公司第十一研究所 | Getter assembly, Dewar assembly, assembly method of Dewar assembly and infrared detector |
| CN111595463A (en) * | 2020-05-22 | 2020-08-28 | 中国科学院上海技术物理研究所 | Split type Dewar cold platform with low contact thermal resistance and coupling stress isolation |
| CN111735763A (en) * | 2020-06-19 | 2020-10-02 | 中国科学院西安光学精密机械研究所 | Cold optical system of long-wave infrared Doppler difference interferometer |
| CN113899100A (en) * | 2021-11-11 | 2022-01-07 | 上海海洋大学 | Electron optical device of two-stage pulse tube refrigerator for cooling two-waveband infrared detection device |
| CN116625517A (en) * | 2023-07-21 | 2023-08-22 | 浙江珏芯微电子有限公司 | Novel infrared detector Dewar |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5177364A (en) * | 1990-06-22 | 1993-01-05 | U.S. Philips Corp. | Infrared detector construction including a getter and method for manufacturing same |
| CN105617936A (en) * | 2016-03-10 | 2016-06-01 | 西安交通大学 | Two-pass tube-type supercritical water reaction device |
| CN108254102A (en) * | 2017-11-30 | 2018-07-06 | 北京原力辰超导技术有限公司 | A kind of high temperature superconductor coil fever detection device |
| CN207703339U (en) * | 2017-09-15 | 2018-08-07 | 武汉高芯科技有限公司 | Refrigeration mode Dewar component |
| CN209689754U (en) * | 2019-03-11 | 2019-11-26 | 中国科学院上海技术物理研究所 | Infrared detector module Dewar shell mechanism for Cryogenic Optical System |
-
2019
- 2019-03-11 CN CN201910178523.8A patent/CN109945979B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5177364A (en) * | 1990-06-22 | 1993-01-05 | U.S. Philips Corp. | Infrared detector construction including a getter and method for manufacturing same |
| CN105617936A (en) * | 2016-03-10 | 2016-06-01 | 西安交通大学 | Two-pass tube-type supercritical water reaction device |
| CN207703339U (en) * | 2017-09-15 | 2018-08-07 | 武汉高芯科技有限公司 | Refrigeration mode Dewar component |
| CN108254102A (en) * | 2017-11-30 | 2018-07-06 | 北京原力辰超导技术有限公司 | A kind of high temperature superconductor coil fever detection device |
| CN209689754U (en) * | 2019-03-11 | 2019-11-26 | 中国科学院上海技术物理研究所 | Infrared detector module Dewar shell mechanism for Cryogenic Optical System |
Non-Patent Citations (2)
| Title |
|---|
| 焦爱红: "物质热稳定性分析实验方法及仪器比较", 分析仪器, vol. 156, no. 2, pages 53 * |
| 范燕萍: "冷罩的结构设计与应力分析", 中国优秀硕士学位论文全文数据库 工程科技Ⅱ辑, no. 1, pages 16 * |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110887569A (en) * | 2019-11-04 | 2020-03-17 | 中国电子科技集团公司第十一研究所 | Getter assembly, Dewar assembly, assembly method of Dewar assembly and infrared detector |
| CN111595463A (en) * | 2020-05-22 | 2020-08-28 | 中国科学院上海技术物理研究所 | Split type Dewar cold platform with low contact thermal resistance and coupling stress isolation |
| CN111595463B (en) * | 2020-05-22 | 2022-11-08 | 中国科学院上海技术物理研究所 | Split type Dewar cold platform with low contact thermal resistance and coupling stress isolation |
| CN111735763A (en) * | 2020-06-19 | 2020-10-02 | 中国科学院西安光学精密机械研究所 | Cold optical system of long-wave infrared Doppler difference interferometer |
| CN113899100A (en) * | 2021-11-11 | 2022-01-07 | 上海海洋大学 | Electron optical device of two-stage pulse tube refrigerator for cooling two-waveband infrared detection device |
| CN113899100B (en) * | 2021-11-11 | 2023-02-28 | 上海海洋大学 | Electron optical device for two-stage pulse tube refrigerator to cool two-waveband infrared detector |
| CN116625517A (en) * | 2023-07-21 | 2023-08-22 | 浙江珏芯微电子有限公司 | Novel infrared detector Dewar |
| CN116625517B (en) * | 2023-07-21 | 2023-10-20 | 浙江珏芯微电子有限公司 | Novel infrared detector Dewar |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109945979B (en) | 2024-05-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109945979A (en) | A kind of infrared detector module Dewar shell mechanism for Cryogenic Optical System | |
| JP4388769B2 (en) | Absorber pipe for solar heating | |
| CN209689754U (en) | Infrared detector module Dewar shell mechanism for Cryogenic Optical System | |
| CN103344342B (en) | The cold platform supporting construction of a kind of anti-radial vibration and impact | |
| CN111595463B (en) | Split type Dewar cold platform with low contact thermal resistance and coupling stress isolation | |
| Andraka et al. | Solar heat pipe testing of the Stirling thermal motors 4-120 Stirling engine | |
| CN203323885U (en) | Radial vibration and shock resistance type cold platform supporting structure | |
| JP2011089973A (en) | Thermoelectric conversion module assembly for nuclear reactor | |
| CN106643248B (en) | A kind of powder sintered formula stainless steel heat pipe and preparation method thereof | |
| CN101441150A (en) | Vacuum thermal insulation heating apparatus | |
| US20020117628A1 (en) | Detection system | |
| CN113351951A (en) | Packaging structure of integrated ceramic cold platform and implementation method | |
| JP2004245994A (en) | Optical fiber probe | |
| CN110364062A (en) | Thermionic generation experimental provision including temperature controlled container | |
| WO2018054327A1 (en) | Evacuated heat collecting tube, manufacturing method therefor, and solar thermal power station | |
| CN105658939B (en) | Stirling engine and the combination including the Stirling engine | |
| CN111889834B (en) | Method for manufacturing high-order mode absorber | |
| US5653112A (en) | Cryocooler system with welded cold tip | |
| CN110625284A (en) | Infrared detector Dewar welding method | |
| CN113964233B (en) | Packaging method of low-temperature vacuum infrared detector | |
| CN201780171U (en) | Gasifier temperature measuring device applied in high-temperature and high-pressure environment | |
| CN110454478B (en) | High-temperature-resistant thermal stress self-adaptive heat insulation screw and heat source fixing method | |
| CN109769370A (en) | A kind of electric resistance array cooling device for hundreds of watts of refrigeration work consumptions of profound hypothermia scene | |
| CN215356591U (en) | Packaging structure of integrated ceramic cold platform | |
| Clark et al. | Solar Thermal Test of Cylindrical Inverted Thermionic Converter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant |