CN109941963A - Micro nano structure direct-writing device based on floating catalyst system chemical gas phase reaction - Google Patents
Micro nano structure direct-writing device based on floating catalyst system chemical gas phase reaction Download PDFInfo
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- CN109941963A CN109941963A CN201910236103.0A CN201910236103A CN109941963A CN 109941963 A CN109941963 A CN 109941963A CN 201910236103 A CN201910236103 A CN 201910236103A CN 109941963 A CN109941963 A CN 109941963A
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- microreactor
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Abstract
The present invention relates to a kind of micro nano structure direct-writing devices based on floating catalyst system chemical gas phase reaction, including microreactor, the microreactor bottom end is connected with nozzle, the collecting board for collecting micro nano structure is equipped with below nozzle, microreactor top is equipped with feed pipe, it is connected with the material feeding micro-pipe that reaction raw materials are added at the top of feed pipe, also there is the heating wire inside heating microreactor.The present invention is by utilizing microreactor, entire floating catalyst system chemical gas phase reaction is miniature in microreactor, can the nanostructure directly by line width less than ten nanometers to tens microns write on circuit boards, compared to traditional floating catalyst system chemical gas phase reaction, eliminate spinning collection, it is then transferred to the intermediate link of electric substrate etc., and the micro nano structure of direct write in this way has many advantages, such as that smooth surface, well conducting and line width are smaller.
Description
Technical field
The present invention relates to flexible electronics to manufacture micro nano structure direct-writing technical field, especially a kind of to be based on floating catalyst system
The micro nano structure direct-writing device of chemical gas phase reaction.
Background technique
Flexible electronic has become a hot spot of Current electronic industry development, as flexible display, flexible biological device,
The flexible electronic products such as intelligent skin and Electronic Clothes have achieved domestic and international extensive concern.But conventional flex electronic manufacture skill
Art, such as silk-screen printing, etching, are rather limited in terms of further decreasing line width and improving circuit, this
The bottleneck problem of limitation flexible electronic manufacturing industry fast development is all had become a bit.
Floating catalyst system chemical gas phase reaction is the method generally acknowledged in nanofiber manufacture, has simple process, at low cost
Honest and clean outstanding advantage, it can be achieved that preparation process serialization and stabilisation, had using carbon nano-tube film prepared by the method
Very good application prospect.Fiber using the preparation of floating catalyst system chemical gas phase reaction has large specific surface area, mechanicalness
Can and surface characteristic it is good the advantages that, and can produce diameter be 50-500nm, orderly aligned controllable nano fiber, this
If the fiber of sample can be deposited directly on flexible electronic chip, it will be able to realize that nanometer can to the continuous of micron dimension structure
It controls standby.But current floating catalyst system chemical gas phase reaction systematic comparison complexity is huge, is spun before this after wire vent around coiled,
It fails to be deposited directly on required circuit board.
Summary of the invention
The technical problem to be solved by the present invention is in order to overcome the deficiencies in the existing technology, for existing flexible electronic system
This technical problem of middle line width is made, the present invention provides a kind of micro nano structure direct-writing based on floating catalyst system chemical gas phase reaction
Device.
The technical solution adopted by the present invention to solve the technical problems is: one kind being based on floating catalyst system chemical gas phase reaction
Micro nano structure direct-writing device, including microreactor, the microreactor bottom end is connected with nozzle, is equipped with below nozzle
The collecting board of micro nano structure is collected, microreactor top is equipped with feed pipe, and it is former that addition reaction is connected at the top of feed pipe
The material feeding micro-pipe of material also has the heating wire inside heating microreactor.
Preferably, the microreactor is the micron-sized glass tube of diameter or alundum tube, and the collecting board can be made
The movement in direction all around.
To improve heating effect, the heating wire is located inside microreactor.
Can be with: the direct-writing device has bracket, and collecting board is mounted on the bottom plate of bracket and can make all around
The movement in direction, microreactor side are connected by the side plate of strut and bracket.
The heating wire winding is on microreactor periphery wall.
The material feeding micro-pipe includes the carrier gas micro-pipe that carrier gas is added and the liquid material micro-pipe that micro-nano liquid is added, carrier gas micro-pipe
It is connected with the gas cylinder of memory nitrogen or argon gas, liquid material micro-pipe is connected with topping-up pump.
The beneficial effects of the present invention are: the present invention by utilize microreactor, by entire floating catalyst system chemical gaseous phase
React miniature in microreactor, can the nanostructure directly by line width less than ten nanometers to tens microns write on circuit board
On, compared to traditional floating catalyst system chemical gas phase reaction, spinning collection is eliminated, the centre of electric substrate etc. is then transferred to
Link, and the micro nano structure of direct write in this way has many advantages, such as that smooth surface, well conducting and line width are smaller.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples.
Fig. 1 is the structural schematic diagram of the first embodiment of the invention.
Fig. 2 is the structural schematic diagram of second of embodiment of the invention.
In figure: 1. microreactors, 2. nozzles, 3. collecting boards, 4. feed pipes, 5. material feeding micro-pipes, 5-1. carrier gas micro-pipe, 5-
2. liquid material micro-pipe, 6. heating wire, 7. brackets, 8. struts, 9. gas cylinders, 10. topping-up pumps
Specific embodiment
In conjunction with the accompanying drawings, the present invention is further explained in detail.These attached drawings are simplified schematic diagram, only with
Illustration illustrates basic structure of the invention, therefore it only shows the composition relevant to the invention.
Embodiment 1:
A kind of micro nano structure direct-writing device based on floating catalyst system chemical gas phase reaction as shown in Figure 1, including it is straight
Angular bracket and microreactor 1, the microreactor 1 are the micron-sized glass tube of diameter, 1 side of microreactor
It is connect by strut 8 with the side plate of bracket 7.
1 bottom end of microreactor is connected with nozzle 2, is equipped with the collecting board 3 for collecting micro nano structure below nozzle 2,
The collecting board 3 is circuit board, and collecting board 3 is placed on the bottom plate of bracket 7 shifting that can need to make direction all around according to direct write
It is dynamic.
1 top of microreactor is equipped with feed pipe 4, and the material feeding micro-pipe that reaction raw materials are added is connected at the top of feed pipe 4
5, the heating wire 6 heated to the 1 micro-nano liquid material in inside of microreactor is wound on 1 periphery wall of microreactor.
The material feeding micro-pipe 5 includes the liquid material micro-pipe 5-2 that the carrier gas micro-pipe 5-1 and the micro-nano liquid of addition of carrier gas is added,
Carrier gas micro-pipe 5-1 is connected with the gas cylinder 9 of memory nitrogen or argon gas, and liquid material micro-pipe 5-2 is connected with topping-up pump 10.
Embodiment 2:
A kind of micro nano structure direct-writing device based on floating catalyst system chemical gas phase reaction as shown in Figure 2 has and adopts
It is the microreactor 1 of micron order alundum tube production with diameter, 1 bottom end of microreactor is connected with nozzle 2, under nozzle 2
Side is equipped with the collecting board 3 for collecting micro nano structure, and the collecting board 3 is that can make free-moving circuit board by direct write requirement, micro-
1 top of type reactor is connected with the material feeding micro-pipe 5 that reaction raw materials are added, and the reaction raw materials include carrier gas and nano fluid, position
The heating wire 6 of heating 1 internal-response raw material of microreactor is equipped with inside microreactor 1.
Microreactor 1, material feeding micro-pipe 5 and collecting board 3 are integrated in one by the present invention, reaction raw materials are concentrated on micro-
In the microreactor 1 of rice magnitude, the reaction of high temperature miniflow is realized, thus fine in the carbon nanotube that collecting board 3 writes out controlled diameter
Dimension and membrane structure, are main innovation points of the invention.
It mainly includes:
One is to blow out the carbon cylinder in microreactor 1 using carrier gas air blast effect, need position direct write in circuit board
How much carbon nano-tube film, width can be regulated and controled by carrier gas and reactant.
Secondly blowing out the carbon cylinder in microreactor 1 for using carrier gas air blast effect, needed in circuit board pre- on position
First complete liquid form, carbon nano-tube film contraction of the direct write in liquid form becomes carbon nano-tube fibre, and width can be with
Regulated and controled by different surfaces energy liquid.
The present invention is miniature in microreactor 1 by entire floating catalyst system chemical gas phase reaction, can be directly by line width
Nanostructure less than ten nanometers to tens microns is write on circuit boards.Preparation method is simple, the nanostructure line width of preparation
It is smaller, and size is continuously adjustable.
Technology of the invention eliminates spinning collection, retransfers compared to traditional floating catalyst system chemical gas phase reaction
To the intermediate link of electric substrate etc., and the micro nano structure of direct write in this way has smooth surface, well conducting and line width more
The advantages that small.
Taking the above-mentioned ideal embodiment according to the present invention as inspiration, through the above description, relevant staff is complete
Various changes and amendments can be carried out without departing from the scope of the technological thought of the present invention' entirely.The technology of this invention
Property range is not limited to the contents of the specification, it is necessary to which the technical scope thereof is determined according to the scope of the claim.
Claims (6)
1. a kind of micro nano structure direct-writing device based on floating catalyst system chemical gas phase reaction, including microreactor (1),
Be characterized in: microreactor (1) bottom end is connected with nozzle (2), and the collection for collecting micro nano structure is equipped with below nozzle (2)
Plate (3), microreactor (1) top are equipped with feed pipe (4), and the material feeding that reaction raw materials are added is connected at the top of feed pipe (4)
Micro-pipe (5), the heating wire (6) for also having heating microreactor (1) internal.
2. the micro nano structure direct-writing device as described in claim 1 based on floating catalyst system chemical gas phase reaction, feature
Be: the microreactor (1) is the micron-sized glass tube of diameter or alundum tube, and it is left that the collecting board (3) can make front and back
The movement of right direction.
3. the micro nano structure direct-writing device as claimed in claim 2 based on floating catalyst system chemical gas phase reaction, feature
Be: it is internal that the heating wire (6) is located at microreactor (1).
4. the micro nano structure direct-writing device as claimed in claim 2 based on floating catalyst system chemical gas phase reaction, feature
Be: the direct-writing device has bracket (7), and collecting board (3), which is mounted on the bottom plate of bracket (7), can make all around direction
Mobile, microreactor (1) side is connect by strut (8) with the side plate of bracket (7).
5. the micro nano structure direct-writing device as claimed in claim 4 based on floating catalyst system chemical gas phase reaction, feature
Be: the heating wire (6) is wrapped on microreactor (1) periphery wall.
6. the micro nano structure direct-writing device as claimed in claim 4 based on floating catalyst system chemical gas phase reaction, feature
Be: the material feeding micro-pipe (5) includes the carrier gas micro-pipe (5-1) that carrier gas is added and the liquid material micro-pipe (5-2) of the micro-nano liquid of addition,
Carrier gas micro-pipe (5-1) is connected with the gas cylinder (9) of memory nitrogen or argon gas, and liquid material micro-pipe (5-2) is connected with topping-up pump (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910236103.0A CN109941963A (en) | 2019-03-27 | 2019-03-27 | Micro nano structure direct-writing device based on floating catalyst system chemical gas phase reaction |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910236103.0A CN109941963A (en) | 2019-03-27 | 2019-03-27 | Micro nano structure direct-writing device based on floating catalyst system chemical gas phase reaction |
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| CN109941963A true CN109941963A (en) | 2019-06-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201910236103.0A Pending CN109941963A (en) | 2019-03-27 | 2019-03-27 | Micro nano structure direct-writing device based on floating catalyst system chemical gas phase reaction |
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Citations (9)
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|---|---|---|---|---|
| JPH0978360A (en) * | 1995-09-07 | 1997-03-25 | Nikkiso Co Ltd | Production of gas phase-grown carbon fiber |
| JPH09324325A (en) * | 1996-04-03 | 1997-12-16 | Nikkiso Co Ltd | Apparatus for producing vapor-phase grown carbon fiber |
| CN1376218A (en) * | 1999-09-01 | 2002-10-23 | 日机装株式会社 | Carbon fibrous matter, production device of carbon fibrous matter, production method of carbon fibrous matter and deposit prevention device for carbon fibrous matter |
| CN1497073A (en) * | 2002-10-18 | 2004-05-19 | 佳能株式会社 | Manufacturing method of matrix fixed with carbon fiber |
| US20050011459A1 (en) * | 2003-07-15 | 2005-01-20 | Heng Liu | Chemical vapor deposition reactor |
| CN1948145A (en) * | 2006-11-09 | 2007-04-18 | 上海交通大学 | Method of continuously synthesizing large diameter single wall carbon nano-tube |
| CN1966399A (en) * | 2006-11-28 | 2007-05-23 | 厦门大学 | Micro nano structure direct-writing device |
| CN1982209A (en) * | 2005-12-16 | 2007-06-20 | 清华大学 | Carbon nano-tube filament and its production |
| CN101192494A (en) * | 2006-11-24 | 2008-06-04 | 清华大学 | Electron emission element preparation method |
-
2019
- 2019-03-27 CN CN201910236103.0A patent/CN109941963A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0978360A (en) * | 1995-09-07 | 1997-03-25 | Nikkiso Co Ltd | Production of gas phase-grown carbon fiber |
| JPH09324325A (en) * | 1996-04-03 | 1997-12-16 | Nikkiso Co Ltd | Apparatus for producing vapor-phase grown carbon fiber |
| CN1376218A (en) * | 1999-09-01 | 2002-10-23 | 日机装株式会社 | Carbon fibrous matter, production device of carbon fibrous matter, production method of carbon fibrous matter and deposit prevention device for carbon fibrous matter |
| CN1497073A (en) * | 2002-10-18 | 2004-05-19 | 佳能株式会社 | Manufacturing method of matrix fixed with carbon fiber |
| US20050011459A1 (en) * | 2003-07-15 | 2005-01-20 | Heng Liu | Chemical vapor deposition reactor |
| CN1982209A (en) * | 2005-12-16 | 2007-06-20 | 清华大学 | Carbon nano-tube filament and its production |
| CN1948145A (en) * | 2006-11-09 | 2007-04-18 | 上海交通大学 | Method of continuously synthesizing large diameter single wall carbon nano-tube |
| CN101192494A (en) * | 2006-11-24 | 2008-06-04 | 清华大学 | Electron emission element preparation method |
| CN1966399A (en) * | 2006-11-28 | 2007-05-23 | 厦门大学 | Micro nano structure direct-writing device |
Non-Patent Citations (1)
| Title |
|---|
| LEE W.DRAHUSHUK: "Fundamental scaling laws for the direct-write chemical vapor deposition of nanoscale features: modeling mass transport around a translating nanonozzle", 《NANOSCALE》 * |
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Application publication date: 20190628 |