CN109930149A - A kind of method of diamond particle surfaces salt bath titanizing - Google Patents

A kind of method of diamond particle surfaces salt bath titanizing Download PDF

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CN109930149A
CN109930149A CN201910298193.6A CN201910298193A CN109930149A CN 109930149 A CN109930149 A CN 109930149A CN 201910298193 A CN201910298193 A CN 201910298193A CN 109930149 A CN109930149 A CN 109930149A
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diamond
titanizing
salt bath
particle surfaces
diamond particles
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陈锋
徐俊
朱佳
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Southeast University
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Abstract

The present invention relates to a kind of methods of diamond particle surfaces salt bath titanizing, comprise the concrete steps that: 1. pairs of diamond particles are cleaned by ultrasonic, and then impregnate it in sodium hydroxide solution, carry out surface roughening treatment.2. diamond particles are sensitized and are activated respectively using stannous chloride solution and palladium chloride solution.The quality that diamond particles, titanium valve and metal salt are pressed 5~10:1:5~10 after 3. is placed in crucible than ground and mixed.4. crucible is placed in shaft furnace, under nitrogen protection in 750~800 DEG C of progress high-temperature salt bath titanizing processing.5. product after plating is carried out ultrasonic cleaning desalination and is sieved, Ti-coated diamond particle is obtained.The diamond coating of this method preparation is made of the micro Ti particle of TiC layer and its surface, the binding force of coating and diamond body is strong, even compact, thickness are controllable, its simple process, at low cost, the feature of environmental protection is good, can be used for the industrialized production of diamond particle surfaces titanizing.

Description

A kind of method of diamond particle surfaces salt bath titanizing
Technical field
The invention belongs to technical field of material surface treatment, and in particular to the method for diamond particle surfaces salt bath titanizing.
Background technique
Diamond is the highest substance of hardness in nature, by by the metal based on diamond particles and Fe, Co, Cu etc. Bonding agent is sintered, and is widely used in the diamond tool for preparing various cuttings, sawing and probing.On the other hand, due to Diamond has high thermal conductivity, can by the way that the high-thermal conductive metals such as diamond particles and copper, aluminium, silver are constituted composite material For use as the high efficiency and heat radiation component in the fields such as Electronic Packaging.
The preparation method of diamond tool is mainly powder metallurgic method, and sintering temperature is up to 800~900 DEG C, and (diamond exists Graphitization tendency is obvious at 900 DEG C or more).As diamond tool, when work, is subjected to biggish cutting force, this requires Buddha's warrior attendant There is firm binding force between stone particle and metallic matrix, prevents diamond drop-off;Diamond-metal high-heat-conductive composite material is main It is prepared using powder metallurgy sintered or melt Infiltration Technics, preparation temperature is up to 500~800 DEG C.As heat dissipation used for electronic packaging Component, it is desirable that have extremely low interface resistance between diamond particles and metallic matrix, so as to efficient heat transfer.To realize above-mentioned answer With being required in the preparation of diamond-metal system and its application stage, the interface of diamond particles and metallic matrix is kept can The metal metallurgy smelting leaned on combines.However, without chemical affinity, interface between the diamond crystal and above-mentioned metal that are constituted due to covalent bond Nonwetting, diamond particles are generally mechanical interlock with metallic matrix, and interface binding power is very poor.Currently, solving the problems, such as this Main method is: 1. having metallic element (W, Ti, Cr, Mo, V of strong carbide Forming ability in diamond particle surfaces plating Deng), make diamond surface metallization by forming coating metal carbide;2. plating diamond particles are burnt with metal again Knot or infiltration processing, are reacted by the counterdiffusion between carbide and metallic matrix, final to realize diamond particles and metallic matrix Reliable metallurgical bonding.In addition, diamond surface thickness of coating must strict control.Coating is too thin, can not be effectively improved diamond With the interface binding power of metallic matrix;Coating is too thick, and coating is easy to fall off under thermal stress effect, while can introduce biggish boundary Face thermal resistance influences diamond-metal high-heat-conductive composite material heat dissipation effect.Currently, generally requiring Buddha's warrior attendant in diamond tool Stone carbide surface layer with a thickness of 0.5~2 μm, Electronic Packaging thermal component generally require diamond surface carbide lamella with a thickness of 0.2~1 μm.
Currently, common diamond surface coating method mainly has vacuum PVD to plate (magnetron sputtering, vacuum Ion plating etc.), chemical vapor deposition plating, powder covering sintering plating and the micro- evaporation of vacuum plate etc..Magnetron sputtering method can be in Buddha's warrior attendant The various metal layers of stone coating surface, but typically just physical attachment between coating and diamond, interface binding power are poor.Using change When learning vapor deposition metal lining, coating is chemically reacted with diamond at high temperature, and binding force of cladding material is high, but to plating For granular diamond, since reaction gas phase is difficult to the particle uniformly in contact with diamond accumulation body everywhere, coating it is uniform Property is poor, especially plating leakage phenomenon easily occurs at the diamond particles place of contacting with each other;In addition, the device is complicated for the technique, single plating The amount of covering is low, and preparation cost is higher.The micro- evaporation plating of vacuum is the method for the wider diamond particle surfaces titanizing of current application, usually It selects titanium trichloride and reducing agent titantium hydride is raw material.In temperature-rise period, titanium chloride volatilization, and the H being precipitated with titantium hydride2Occur Reaction, restores gaseous metal Ti atom, deposits to diamond surface and forms coating.The more uniform cause of coating of the micro- evaporation plating of vacuum It is close, but equipment cost is higher, plating technic is complicated.In addition, in the technique diamond particles be it is static, diamond particles are mutual A possibility that there are still plating leakages for contact position.
Salt bath plating is that metal powder is added in chloride salt, utilizes the diffusion reaction of metallic atom in fused salt at high temperature And a kind of surface treatment method of the coat of metal is obtained on plating piece surface.The advantage for carrying out salt bath plating to diamond particles exists Enhanced primary treatment in: coating and diamond particles, binding force of cladding material is high, while the equipment and technology of salt bath plating it is simple, at This is low, it is easy to accomplish industrialization production.There is researcher using magnesium chloride, sodium chloride and barium chloride as fused salt, 600~800 DEG C realize ti coat on diamond (Lv Jianwei, Zhao Qiang, An Huifen, the research of Ti-plated diamond surface by molten salt process, the electricity of diamond particles Plating and covering with paint, 2006,25 (7): 17~20), but there are plating leakages for diamond edges and corners, while coating uniformity is poor.In addition, chlorination Barium is noxious material, there is environmental protection and safety problem.There is researcher, as metal salt, to be heated to using sodium chloride and potassium chloride 900~1000 DEG C of heat preservation 2h diamond surface realize plating tungsten (Tang little Wen, the salt bath of diamond plate tungsten, mechanical engineering material, 1998,20 (6): 31~32), but follow-up study person has found, the diamond coating of this method preparation has apparent plating leakage phenomenon, difficult To form even compact coating (see China Patent No. CN201310322141.0 " a kind of method of diamond surface plating tungsten ").In State's patent No. 201610135627.7 discloses " a kind of method of diamond Electroplating from Molten Salts tungsten ", equally using salt bath process in diamond Tungsten is plated on surface, and plating temperature is 900~1200 DEG C.But some researches show that when temperature is higher than 900 DEG C, diamond graphitization inclines To obvious, diamond thermal damage big (Yin Fang, Huang Hui, Xu Xipeng, the experimental study of fine-granularity diamond soldering thermal damage, Buddha's warrior attendant Stone and grinding materials and grinding tool engineering, 2013,33 (3): 21~25).
Since the carbide Forming ability of Ti element is better than the elements such as W, Cr, and the crystal structure of diamond and TiC have one Determine corresponding relationship, Yi Shixian coherence strong―binding interface, while the temperature of Ti formation carbide is low, it is small to the thermal damage of diamond, Therefore be directed to the titanizing of diamond particles, research and develop a kind of low cost and environmental protection, coating uniformly and it is fine and close, interface binding power is excellent Plating technic, will be with important application value.
Summary of the invention
Technical problem: the purpose of the present invention is being directed to the deficiency of existing diamond particle surfaces titanizing technology, one kind is provided The salt bath titanizing method of low cost and environmental protection, diamond surface can be formed uniformly and it is fine and close, thickness is controllable, has good interface The plating titanium layer of binding force.
Technical solution: for achieving the above object, a kind of method of diamond particle surfaces salt bath titanizing of the invention It carries out in accordance with the following steps:
Step 1: diamond particles are placed in acetone soln, ultrasonic cleaning degreases, and is then cleaned with deionized water And it dries;Diamond particles are placed in roughening treatment in sodium hydroxide solution again, is cleaned and is dried with deionized water later;
Step 2: be sensitized-be activated to the diamond particles after roughening treatment, cleaned simultaneously with deionized water later Drying;
Step 3: weighing diamond particles, titanium valve and metal salt, and ground and mixed is carried out, later, mixed-powder is poured into In alumina crucible;
Step 4: crucible is placed in progress high-temperature salt bath titanizing processing in shaft furnace, crucible is set to cool to room with the furnace later Temperature;
Step 5: product uses high temperature ultrasonic to clean desalination after plating, and dry;Finally by sieve method to product after plating Extra titanium valve is screened out with the sieve of 250 mesh, obtains Ti-coated diamond particle.
Wherein:
The partial size of the diamond particles is 80~165 μm.
The volumetric concentration of the sodium hydroxide is 5~15vol%, and the roughening treatment time is 20~40min.
Sensitization-the activation process are as follows: diamond particles are immersed in 5~10min in sensitized solution, are taken out, clearly It washes and dries;The diamond particles after sensitization are immersed in 5~10min in activated solution again, are taken out, cleaning, wherein sensitization is molten Liquid is 5~20g/L of stannous chloride, and activated solution is 0.20~0.35g/L of palladium chloride.
The partial size of the titanium valve is 10~20 μm, and purity is greater than 99.95%.
The third step weighs diamond particles, titanium valve and metal salt, mass ratio are as follows: diamond: titanium valve: metal salt 5 ~10:1:5~10.
The metal salt is made of powdery sodium chloride and calcium chloride, mass ratio 1:1, and purity is greater than 99.95%.
The third step ground and mixed technique are as follows: by the hand lapping in grinding alms bowl of diamond particles, titanium valve and metal salt 5min。
The 4th step high-temperature salt bath plates titanium processing process are as follows: is filled with the flowing that purity is greater than 99.99% from burner hearth bottom Nitrogen carries out whole process protection to salt bath titanizing process;For the heating rate used for 3~5 DEG C/min, heating temperature is 750~800 ℃;After reaching heating temperature, soaking time is 2~4h, wherein in holding stage to the equal of material progress 3~4 times in crucible Homogenize stirring.
The 5th step high temperature ultrasonic cleans desalination are as follows: temperature is used to carry out ultrasound clearly for 70~80 DEG C of deionized water It washes, scavenging period is 20~40min.
The utility model has the advantages that the present invention is based on following thinking using salt bath plating titanium processing process to diamond particles: 1. titanium Grain generates micro dissolution in high-temperature metal molten salt bath, and the titanium atom dissolved will uniformly be diffused into diamond particle surfaces, in height Temperature is lower to generate TiC conversion zone in conjunction with the carbon atom of diamond surface.The TiC conversion zone and diamond are enhanced primary treatments, Binding force of cladding material is high, and thickness is controllable.2. by carrying out sensitized treatment to diamond particles in advance one can be formed in diamond surface Layer has the Sn of reducing power2+, and be activated and then introduce Pd2+, two kinds of ions, which react, to be deposited greatly in diamond surface The catalytic center palladium of amount promotes diamond to react with the titanium atom in fused salt in the catalytic center, uniformly causes to be formed Close and matrix has the coating of very strong binding force, avoids plating leakage phenomenon.3. roughening treatment technique can make diamond surface generation receive Metrical scale step helps to create more catalytic centers, improves above-mentioned sensitization-activation effect, and improves the interface knot of coating With joint efforts.4., by repeatedly being stirred under protective atmosphere to the material in crucible, can be avoided completely in salt bath titanizing processing Diamond particles contact with each other the local plating leakage phenomenon at place.5. being lower than Buddha's warrior attendant as metal salt using calcium chloride and sodium chloride Salt bath titanizing is carried out under stone graphitization temperature (900 DEG C), be can effectively avoid diamond thermal damage, is kept its good mechanics and heat Physical property, and technical process is nontoxic and pollution-free.
1. the present invention carries out salt bath titanizing as metal salt using calcium chloride and sodium chloride at 750~800 DEG C, formed Coating and diamond be enhanced primary treatment, high with the binding force of diamond body, thickness of coating is controllable.The technique can be effective The thermal damage of diamond is avoided, and the feature of environmental protection is good.
2. uniform when by diamond particles using surface roughening treatment, sensitization-activation processing and salt bath titanizing Change the technological measures such as stirring, coating uniform and densification, having very strong binding force with matrix can be formed in diamond surface, and can The plating leakage phenomenon of diamond particle surfaces is avoided completely.
3. discovery coating is unstripped, diamond by salt bath Ti-coated diamond particle of the invention after 850 DEG C of baking 1h Grain is in black (see Fig. 5 a), shows that the interface binding power of coating and diamond particles is good.
Detailed description of the invention
Fig. 1 is the SEM pattern of original diamond particle.
Fig. 2 a is the SEM pattern by roughening and sensitization-activation processing salt bath Ti-coated diamond particle, it is seen that coating is equal It is even and fine and close, no plating leakage region.Fig. 2 b is the SEM pattern of the salt bath Ti-coated diamond particle without sensitization plays-activation processing, can See that uneven coating is even, there are many plating leakage regions (being in black).
Fig. 3 is the XRD diffracting spectrum of Ti-coated diamond particle, it is seen that coating is mainly made of TiC, separately there is micro titanium (the titanium particle on the surface TiC, see Fig. 4).
Fig. 4 is the SEM pattern of salt bath Ti-coated diamond particle, it is seen that local surfaces have micro titanium particle (light tone).
Fig. 5 a is pattern of the Ti-coated diamond particle after 850 DEG C are toasted 1h, it is seen that salt bath titanizing Buddha's warrior attendant of the invention The coating of stone particle is unstripped, and black is presented in diamond particles;Fig. 5 b is coating removing, then before plating can be presented in diamond particles It is golden yellow.
Specific embodiment
To further understand the present invention, the present invention program is described combined with specific embodiments below, but should managed Solution, these descriptions are only further explanation the features and advantages of the present invention, rather than limiting to the claimed invention.
Embodiment 1
1) the 5g diamond particles that partial size is 165 μm are weighed, diamond particles are placed in ultrasonic cleaning in acetone soln It degreases, is then cleaned and dried with deionized water;Diamond particles are placed in the sodium hydroxide that volumetric concentration is 5vol% again 40min is impregnated in solution and carries out surface roughening treatment, is cleaned and is dried with deionized water after taking-up.
2) diamond particles after roughening treatment are placed in the SnCl of 20g/L25min is impregnated in sensitized solution, is taken out, clearly It washes and dries;Diamond particles after sensitization are immersed in the PdCl of 0.20g/L again210min is impregnated in activated solution, is taken out, Cleaning, it is spare after drying.
3) partial size is obtained for 10 μm of 1g titanium valve, 5g calcium chloride and sodium chloride powder (the two mass ratio 1:1) and step 2) To 5g diamond particles grinding alms bowl in ground and mixed 5min mixed-powder is poured into alumina crucible later.
4) crucible is placed in progress high-temperature salt bath titanizing processing in shaft furnace, there is flowing nitrogen to carry out whole guarantor in burner hearth Shield.Shaft furnace is warming up to 750 DEG C, soaking time 2h with the heating rate of 5 DEG C/min, and wherein holding stage is every crosses 40min pairs Material in crucible carries out homogenization stirring.Crucible is set to cool to room temperature with the furnace later.
5) product deionized water is cleaned by ultrasonic desalination after plating, and cleaning temperature is 80 DEG C, time 20min, then will Drying materials.Extra titanium valve is screened out with the sieve of 250 mesh later, obtains Ti-coated diamond particle.Its surface topography, power spectrum point Analysis and XRD spectrum result see Fig. 2 a and Fig. 3~4, it is seen that coating uniformly and fine and close, no plating leakage region.TiC is measured using XPS method Thickness of coating is 0.2 μm.
In order to prove that the present invention obtains uniformly and the validity of fine and close plating titanium layer, comparative test is carried out, with examples detailed above Difference is: without sensitization-activation process in step 2), other conditions are identical with examples detailed above, finally obtain Plating titanium layer it is uneven, there are many plating leakage regions (are in black), see Fig. 2 b.
Embodiment 2
1) the 8g diamond particles that partial size is 120 μm are weighed, diamond particles are placed in ultrasonic cleaning in acetone soln It degreases, is then cleaned and dried with deionized water;Diamond particles are placed in the sodium hydroxide that volumetric concentration is 10vol% again 30min is impregnated in solution and carries out surface roughening treatment, is cleaned and is dried with deionized water after taking-up.
2) diamond particles after roughening treatment are placed in the SnCl of 5g/L215min is impregnated in sensitized solution, is taken out, clearly It washes and dries;Diamond particles after sensitization are immersed in the PdCl of 0.30g/L again27min is impregnated in activated solution, is taken out, clearly It washes, it is spare after drying.
3) partial size is obtained for 20 μm of 1g titanium valve, 8g calcium chloride and sodium chloride powder (the two mass ratio 1:1) and step 2) To 8g diamond particles grinding alms bowl in ground and mixed 5min mixed-powder is poured into alumina crucible later.
4) crucible is placed in progress high-temperature salt bath titanizing processing in shaft furnace, there is flowing nitrogen to carry out whole guarantor in burner hearth Shield.Shaft furnace is warming up to 780 DEG C, soaking time 3h with the heating rate of 4 DEG C/min, and wherein holding stage is every crosses 45min pairs Material in crucible carries out homogenization stirring.Crucible is set to cool to room temperature with the furnace later.
5) product deionized water is cleaned by ultrasonic desalination after plating, and cleaning temperature is 75 DEG C, time 30min, then will Drying materials.Extra titanium valve is screened out with the sieve of 250 mesh later, obtains Ti-coated diamond particle.TiC is measured using XPS method Thickness of coating is 0.8 μm.
Embodiment 3
1) the 10g diamond particles that partial size is 80 μm are weighed, diamond particles are placed in ultrasonic cleaning in acetone soln It degreases, is then cleaned and dried with deionized water;Diamond particles are placed in the sodium hydroxide that volumetric concentration is 15vol% again 15min is impregnated in solution and carries out surface roughening treatment, is cleaned and is dried with deionized water after taking-up.
2) diamond particles after roughening treatment are placed in the SnCl of 10g/L210min is impregnated in sensitized solution, is taken out, clearly It washes and dries;Diamond particles after sensitization are immersed in the PdCl of 0.35g/L again25min is impregnated in activated solution, is taken out, clearly It washes, it is spare after drying.
3) partial size is obtained for 15 μm of 1g titanium valve, 10g calcium chloride and sodium chloride powder (the two mass ratio 1:1) and step 2) To 10g diamond particles grinding alms bowl in ground and mixed 5min mixed-powder is poured into alumina crucible later.
4) crucible is placed in progress high-temperature salt bath titanizing processing in shaft furnace, there is flowing nitrogen to carry out whole guarantor in burner hearth Shield.Shaft furnace is warming up to 800 DEG C, soaking time 4h with the heating rate of 3 DEG C/min, and wherein holding stage is every crosses 60min pairs Material in crucible carries out homogenization stirring.Crucible is set to cool to room temperature with the furnace later.
5) product deionized water is cleaned by ultrasonic desalination after plating, and cleaning temperature is 70 DEG C, time 40min, then will Drying materials.Extra titanium valve is screened out with the sieve of 250 mesh later, obtains Ti-coated diamond particle.TiC is measured using XPS method Thickness of coating is 1.5 μm.

Claims (10)

1. a kind of method of diamond particle surfaces salt bath titanizing, it is characterised in that this method carries out in accordance with the following steps:
Step 1: diamond particles are placed in acetone soln, ultrasonic cleaning degreases, and is then cleaned and is dried with deionized water It is dry;Diamond particles are placed in roughening treatment in sodium hydroxide solution again, is cleaned and is dried with deionized water later;
Step 2: be sensitized-be activated to the diamond particles after roughening treatment, is cleaned and dried with deionized water later It is dry;
Step 3: weighing diamond particles, titanium valve and metal salt, and ground and mixed is carried out, later, mixed-powder is poured into oxidation In aluminium crucible;
Step 4: crucible is placed in progress high-temperature salt bath titanizing processing in shaft furnace, crucible is set to cool to room temperature with the furnace later;
Step 5: product uses high temperature ultrasonic to clean desalination after plating, and dry;Product after plating is used finally by sieve method The sieve of 250 mesh screens out extra titanium valve, obtains Ti-coated diamond particle.
2. a kind of method of diamond particle surfaces salt bath titanizing as described in claim 1, it is characterised in that: the diamond The partial size of particle is 80~165 μm.
3. a kind of method of diamond particle surfaces salt bath titanizing as described in claim 1, it is characterised in that: the hydroxide The volumetric concentration of sodium is 5~15vol%, and the roughening treatment time is 20~40min.
4. a kind of method of diamond particle surfaces salt bath titanizing as described in claim 1, it is characterised in that: the sensitization- Activation process are as follows: diamond particles are immersed in 5~10min in sensitized solution, is taken out, is cleaned and dry;It again will sensitization Diamond particles afterwards are immersed in 5~10min in activated solution, take out, cleaning, wherein sensitized solution be stannous chloride 5~ 20g/L, activated solution are 0.20~0.35g/L of palladium chloride.
5. a kind of method of diamond particle surfaces salt bath titanizing as described in claim 1, it is characterised in that: the titanium valve Partial size is 10~20 μm, and purity is greater than 99.95%.
6. a kind of method of diamond particle surfaces salt bath titanizing as described in claim 1, it is characterised in that: the third step Weigh diamond particles, titanium valve and metal salt, mass ratio are as follows: diamond: titanium valve: metal salt is 5~10:1:5~10.
7. a kind of method of diamond particle surfaces salt bath titanizing as claimed in claim 6, it is characterised in that: the metal salt It is made of powdery sodium chloride and calcium chloride, mass ratio 1:1, purity is greater than 99.95%.
8. a kind of method of diamond particle surfaces salt bath titanizing as described in claim 1, it is characterised in that: the third step Ground and mixed technique are as follows: by diamond particles, titanium valve and metal salt grinding alms bowl in hand lapping 5min.
9. a kind of method of diamond particle surfaces salt bath titanizing as described in claim 1, it is characterised in that: the 4th step High-temperature salt bath plates titanium processing process are as follows: is filled with flowing nitrogen of the purity greater than 99.99% to salt bath titanizing process from burner hearth bottom Carry out whole process protection;For the heating rate used for 3~5 DEG C/min, heating temperature is 750~800 DEG C;After reaching heating temperature, Soaking time is 2~4h, wherein stirring in the homogenization that holding stage carries out 3~4 times to the material in crucible.
10. a kind of method of diamond particle surfaces salt bath titanizing as described in claim 1, it is characterised in that: the described 5th Walk high temperature ultrasonic and clean desalination are as follows: use temperature to be cleaned by ultrasonic for 70~80 DEG C of deionized water, scavenging period for 20~ 40min。
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CN112048633A (en) * 2020-09-17 2020-12-08 哈尔滨工业大学 Method for preparing aluminum alloy diamond composite material by additive manufacturing technology
CN112238276A (en) * 2020-09-22 2021-01-19 盐城金德瑞工具科技有限公司 Production process of brazed diamond tool
CN113481403A (en) * 2021-06-22 2021-10-08 安徽省新方尊自动化科技有限公司 High-strength wear-resistant foamed aluminum composite material and preparation method thereof
CN114274060A (en) * 2021-11-23 2022-04-05 北京安泰钢研超硬材料制品有限责任公司 Metal-based diamond tool bit for thinning high-end SiC chip, grinding wheel and manufacturing method of metal-based diamond tool bit
CN114274060B (en) * 2021-11-23 2023-12-01 北京安泰钢研超硬材料制品有限责任公司 Metal-based diamond tool bit for thinning SiC chip, grinding wheel and manufacturing method of metal-based diamond tool bit
CN114247957A (en) * 2021-12-29 2022-03-29 昆山耐信金刚石工具有限公司 Welding process for corner post diamond pen
CN114346919A (en) * 2022-01-26 2022-04-15 江阴市方鸿超硬工具有限公司 Ultrafine-granularity diamond grinding wheel and machining process thereof
CN115041679A (en) * 2022-06-28 2022-09-13 河南黄河旋风股份有限公司 Diamond surface modification treatment method and application
CN115401306A (en) * 2022-08-26 2022-11-29 华中科技大学 Bonding method of CVD diamond window sheet and heat conduction copper component
CN115401306B (en) * 2022-08-26 2023-09-29 华中科技大学 Bonding method of CVD diamond window and heat conduction copper component
CN117862967A (en) * 2024-03-13 2024-04-12 长沙百通新材料科技有限公司 Diamond surface treatment process

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Application publication date: 20190625